JP4565082B2 - 透明材料加工方法及び透明材料加工装置 - Google Patents
透明材料加工方法及び透明材料加工装置 Download PDFInfo
- Publication number
- JP4565082B2 JP4565082B2 JP2004091900A JP2004091900A JP4565082B2 JP 4565082 B2 JP4565082 B2 JP 4565082B2 JP 2004091900 A JP2004091900 A JP 2004091900A JP 2004091900 A JP2004091900 A JP 2004091900A JP 4565082 B2 JP4565082 B2 JP 4565082B2
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- JP
- Japan
- Prior art keywords
- femtosecond laser
- transparent material
- refractive index
- material processing
- pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12002—Three-dimensional structures
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Laser Beam Processing (AREA)
Description
12 対物レンズ
13 透明材料
14 導波路
BS ビームスプリッタ
M ミラー
VA 減衰器
Claims (5)
- 屈折率変化の誘起が完了する時間内にある複数のフェムト秒レーザパルスをセットとして、該セットを前記時間よりも長い間隔を開けて繰り返し照射して透明材料の所定の領域の屈折率を変化させることを特徴とする透明材料加工方法。
- 前記複数のフェムト秒レーザパルスの内の最初のフェムト秒レーザパルスの振幅は後続の他のフェムト秒レーザパルスの振幅よりも小さいことを特徴とする請求項1記載の透明材料加工方法。
- 前記セットのフェムト秒レーザパルスのパルス間隔は、前記透明材料が溶融石英である場合に、1ps以上かつ100ps以下であることを特徴とする請求項1又は2記載の透明材料加工方法。
- レーザから出力されるフェムト秒レーザパルスを2つに分ける分波器と、
該分波器で分けられたフェムト秒レーザパルスの一方を遅延する遅延器と、
該遅延器で遅延されたフェムト秒レーザパルスと前記分波器で分けられたフェムト秒レーザパルスの他方との2つのフェムト秒レーザパルスを合波する合波器と
を備え、該合波器から出力される1ps以上かつ100ps以下の時間内にある複数のフェムト秒レーザパルスをセットとして、該セットを溶融石英の屈折率変化の誘起が完了する時間よりも長い間隔を開けて繰り返し照射して溶融石英の所定の領域の屈折率を変化させることを特徴とする透明材料加工装置。 - 空間位相変調器を用いてレーザから出力されるフェムト秒レーザパルスを1ps以上かつ100ps以下の時間内にある複数のフェムト秒レーザパルスのセットにして、該セットを溶融石英の屈折率変化の誘起が完了する時間よりも長い間隔を開けて繰り返し照射して溶融石英の所定の領域の屈折率を変化させることを特徴とする透明材料加工装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004091900A JP4565082B2 (ja) | 2004-03-26 | 2004-03-26 | 透明材料加工方法及び透明材料加工装置 |
US11/087,740 US7257294B2 (en) | 2004-03-26 | 2005-03-24 | Method for processing transparent material, apparatus for processing the same and optical function device |
Applications Claiming Priority (1)
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---|---|---|---|
JP2004091900A JP4565082B2 (ja) | 2004-03-26 | 2004-03-26 | 透明材料加工方法及び透明材料加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005275268A JP2005275268A (ja) | 2005-10-06 |
JP4565082B2 true JP4565082B2 (ja) | 2010-10-20 |
Family
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Family Applications (1)
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JP2004091900A Expired - Fee Related JP4565082B2 (ja) | 2004-03-26 | 2004-03-26 | 透明材料加工方法及び透明材料加工装置 |
Country Status (2)
Country | Link |
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US (1) | US7257294B2 (ja) |
JP (1) | JP4565082B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9475149B1 (en) | 2015-04-24 | 2016-10-25 | Testrake Aviation, Inc. | Optical device and method of making same |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9904018B2 (en) * | 2007-03-16 | 2018-02-27 | Peter R. Herman | Multipulse system for writing waveguides, gratings, and integrated optical circuits |
WO2013002013A1 (ja) * | 2011-06-27 | 2013-01-03 | 学校法人 慶應義塾 | 光導波路及びその製造方法 |
DE102012222460A1 (de) * | 2012-12-06 | 2014-06-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zur Herstellung von zumindest einem Faser-Bragg-Gitter |
ITMI20130631A1 (it) * | 2013-04-18 | 2014-10-19 | Consiglio Nazionale Ricerche | Metodo di realizzazione di una guida d'onda in un substrato tramite laser a femtosecondi |
JP7018082B2 (ja) * | 2020-02-18 | 2022-02-09 | Nttエレクトロニクス株式会社 | 描画装置及び描画方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001174764A (ja) * | 1999-12-14 | 2001-06-29 | Japan Science & Technology Corp | 超広帯域可変波長多重パルス波形整形装置 |
JP2001236644A (ja) * | 2000-02-21 | 2001-08-31 | Central Glass Co Ltd | 固体材料の屈折率を変化させる方法 |
JP2001311847A (ja) * | 2000-02-22 | 2001-11-09 | Nec Corp | 屈折率の修正方法、屈折率の修正装置、及び光導波路デバイス |
JP2002131710A (ja) * | 2000-10-27 | 2002-05-09 | Japan Science & Technology Corp | 複合型超広帯域高精度位相補償・位相制御装置 |
JP2002228867A (ja) * | 2001-01-31 | 2002-08-14 | Fujikura Ltd | 光導波路の製造方法 |
JP2002311277A (ja) * | 2001-04-17 | 2002-10-23 | Hitachi Cable Ltd | ガラス導波路の製造方法 |
JP2004034103A (ja) * | 2002-07-04 | 2004-02-05 | Fujikura Ltd | 光路の調整方法 |
JP2005014059A (ja) * | 2003-06-26 | 2005-01-20 | Ricoh Co Ltd | 超短パルスレーザ加工法及び加工装置並びに構造体 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3649835B2 (ja) | 1996-03-18 | 2005-05-18 | 独立行政法人科学技術振興機構 | 光導波路の作製方法 |
US20010021293A1 (en) * | 2000-02-22 | 2001-09-13 | Hikaru Kouta | Method for modifying refractive index in optical wave-guide device |
CA2436499C (en) * | 2003-03-21 | 2012-04-17 | Her Majesty In Right Of Canada As Represented By The Minister Of Industry | Bragg grating and method of producing a bragg grating using an ultrafast laser |
US7486705B2 (en) * | 2004-03-31 | 2009-02-03 | Imra America, Inc. | Femtosecond laser processing system with process parameters, controls and feedback |
-
2004
- 2004-03-26 JP JP2004091900A patent/JP4565082B2/ja not_active Expired - Fee Related
-
2005
- 2005-03-24 US US11/087,740 patent/US7257294B2/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001174764A (ja) * | 1999-12-14 | 2001-06-29 | Japan Science & Technology Corp | 超広帯域可変波長多重パルス波形整形装置 |
JP2001236644A (ja) * | 2000-02-21 | 2001-08-31 | Central Glass Co Ltd | 固体材料の屈折率を変化させる方法 |
JP2001311847A (ja) * | 2000-02-22 | 2001-11-09 | Nec Corp | 屈折率の修正方法、屈折率の修正装置、及び光導波路デバイス |
JP2002131710A (ja) * | 2000-10-27 | 2002-05-09 | Japan Science & Technology Corp | 複合型超広帯域高精度位相補償・位相制御装置 |
JP2002228867A (ja) * | 2001-01-31 | 2002-08-14 | Fujikura Ltd | 光導波路の製造方法 |
JP2002311277A (ja) * | 2001-04-17 | 2002-10-23 | Hitachi Cable Ltd | ガラス導波路の製造方法 |
JP2004034103A (ja) * | 2002-07-04 | 2004-02-05 | Fujikura Ltd | 光路の調整方法 |
JP2005014059A (ja) * | 2003-06-26 | 2005-01-20 | Ricoh Co Ltd | 超短パルスレーザ加工法及び加工装置並びに構造体 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9475149B1 (en) | 2015-04-24 | 2016-10-25 | Testrake Aviation, Inc. | Optical device and method of making same |
WO2016172470A1 (en) * | 2015-04-24 | 2016-10-27 | Testrake Aviation, Inc. | Optical device and method of making same |
Also Published As
Publication number | Publication date |
---|---|
JP2005275268A (ja) | 2005-10-06 |
US7257294B2 (en) | 2007-08-14 |
US20050271349A1 (en) | 2005-12-08 |
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