JP4546447B2 - Thermal spray coating coated member having excellent plasma erosion resistance and method for producing the same - Google Patents
Thermal spray coating coated member having excellent plasma erosion resistance and method for producing the same Download PDFInfo
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- Coating By Spraying Or Casting (AREA)
- Drying Of Semiconductors (AREA)
Description
本発明は、半導体加工プロセスにおける薄膜形成装置やプラズマ処理装置などで用いられる部材とその製造方法に関し、とくにハロゲン化合物を含む環境でプラズマ加工処理時に用いられる容器用部材、例えば、真空蒸着、イオンプレーティング、スパッタリング、化学蒸着、レーザ精密加工、プラズマスパッタリングなどに使用される容器用部材などとして用いられる耐プラズマエロージョン性に優れる溶射皮膜被覆部材とその製造方法に関するものである。
本発明に係る溶射皮膜被覆部材は、耐プラズマエロージョン性に優れる他、優れたパーティクルの付着、堆積機能および再飛散防止機能が求められる半導体加工処理装置用部材の他、半導体の精密加工部材あるいはこれらの装置の構造部材（加工室の壁面）などの分野での利用が可能である。
The present invention relates to a member used in a thin film forming apparatus or a plasma processing apparatus in a semiconductor processing process and a method for manufacturing the same, and more particularly to a container member used in plasma processing in an environment containing a halogen compound, such as vacuum deposition or ion plating. The present invention relates to a thermal spray coating member having excellent plasma erosion resistance used as a container member used for coating, sputtering, chemical vapor deposition, laser precision processing, plasma sputtering, and the like, and a method for producing the same.
In addition to being excellent in plasma erosion resistance, the thermal spray coating member according to the present invention is a member for semiconductor processing equipment that is required to have excellent particle adhesion, deposition function and re-scattering prevention function, semiconductor precision processing member or these It can be used in the field of structural members (walls of processing chambers).
半導体加工プロセスでは、金属や金属酸化物、窒化物、炭化物、硼化物、珪化物などの薄膜を形成する工程がある。これらの工程では、真空蒸着法、イオンプレーティング、スパッタリング、プラズマＣＶＤなどの薄膜形成装置が使用されている（例えば、特許文献１）。
これらの装置によって薄膜を形成する場合、上記装置に用いられている各種の治具や部材の表面にも、薄膜材料が付着する。治具や装置部材への薄膜材料の付着は、その量が少ない場合には問題となることが少ない。しかし、最近、薄膜形成処理時間が長くなるに従って、治具や部材表面へのパーティクルの付着量が増加する一方、操業時の温度変化や治具や部材に対する機械的負荷が変動することが多くなってきた。その結果、薄膜形成処理中に治具や部材表面に付着していた薄膜を主成分とするパーティクルの一部が、剥離して飛散し、それが半導体ウエハに付着して製品の品質を悪くするという問題がある。
In the semiconductor processing process, there is a step of forming a thin film of metal, metal oxide, nitride, carbide, boride, silicide or the like. In these processes, a thin film forming apparatus such as a vacuum deposition method, ion plating, sputtering, or plasma CVD is used (for example, Patent Document 1).
When forming a thin film with these apparatuses, the thin film material also adheres to the surfaces of various jigs and members used in the apparatus. The adhesion of the thin film material to the jig or device member is less likely to be a problem when the amount is small. However, as the time for thin film formation increases, the amount of particles adhering to the surface of the jig or member increases, while the temperature change during operation and the mechanical load on the jig or member often fluctuate. I came. As a result, some of the particles that consist mainly of the thin film that adheres to the surface of the jig or member during the thin film formation process peel and scatter, which adheres to the semiconductor wafer and degrades the product quality. There is a problem.
従来、上記のような装置に用いられている各種部材について、その表面に付着した薄膜形成用粒子の剥離を防止する技術として、以下に述べるような方法が提案されている。
例えば、特許文献２および３では、治具や部材の表面をサンドブラストし、ホーニングやニッティングなどを行って表面を粗面化し、このことによって、有効表面積を増加させて、付着した薄膜粒子が剥離飛散しないようにする技術が開示されている。
Conventionally, the following method has been proposed as a technique for preventing peeling of particles for forming a thin film attached to the surface of various members used in the apparatus as described above.
For example, in Patent Documents 2 and 3, the surface of a jig or member is sandblasted, and the surface is roughened by honing or knitting, thereby increasing the effective surface area and peeling the attached thin film particles. A technique for preventing scattering is disclosed.
特許文献４では、治具や部材の表面に、５ｍｍ以下の間隔で周期的にＵ溝やＶ溝を設けて、薄膜粒子の剥離を抑制する技術を開示している。 Patent Document 4 discloses a technique for suppressing peeling of thin film particles by periodically providing U grooves and V grooves at intervals of 5 mm or less on the surfaces of jigs and members.
特許文献５および６には、部材の表面にＴｉＮ皮膜を形成させるか、さらにＡｌまたはＡｌ合金の溶融めっき被覆を形成する技術が開示され、また、特許文献７では、ＴｉとＣｕ材料を用いて溶射皮膜を形成した後、ＨＮＯ3によってＣｕのみを溶解除去することによって、多孔質で比表面積の大きい表面構造として、薄膜形成作業時間の延長を可能とする一方、付着した薄膜粒子の飛散を抑制する技術が開示されている。 Patent Documents 5 and 6 disclose a technique for forming a TiN film on the surface of a member, or further forming a hot-dip coating of Al or an Al alloy, and Patent Document 7 uses Ti and Cu materials. After forming the thermal spray coating, only Cu is dissolved and removed by HNO 3 , thereby enabling the surface structure with a porous and large specific surface area to be extended, while suppressing the scattering of attached thin film particles. Techniques to do this are disclosed.
発明者の一人もまた、特許文献８において、金属部材の表面に金網を密着させた状態で金属を溶射するか、または金属を溶射した後、その上に金網を密着させた状態で再び金属を溶射し、その後、金網を引き剥がすことによって、溶射皮膜の表面に格子状の凹凸を形成することによって、比表面積の拡大を図り、薄膜粒子の多量付着を可能とする技術を提案した。 One of the inventors also in Japanese Patent Application Laid-Open No. H10-228707 sprays metal with the metal mesh in close contact with the surface of the metal member, or after spraying the metal, the metal is again applied with the metal mesh in close contact therewith. A technique has been proposed in which the specific surface area is increased by applying thermal spraying, and then peeling the wire mesh to form lattice-like irregularities on the surface of the thermal spray coating, thereby allowing a large amount of thin film particles to adhere.
しかしながら、最近の半導体の加工は、一段と高精度となり、それに伴なって加工環境の清浄度は従来以上に厳しくなっている。特に、半導体の加工を、ハロゲンガスやハロゲン化合物ガス中でプラズマスパッタリング処理することによって行う場合、この処理に用いる装置内に配設されている部材や治具の表面に生じる腐食生成物、あるいはスパッタリング現象によって部材表面から発生する微細なパーティクル対策が必要となってきた。 However, recent semiconductor processing has become more highly accurate, and along with this, the cleanliness of the processing environment has become stricter than before. In particular, when semiconductor processing is performed by plasma sputtering in a halogen gas or a halogen compound gas, corrosion products generated on the surfaces of members and jigs disposed in the apparatus used for this processing, or sputtering Due to the phenomenon, it is necessary to take measures against fine particles generated from the surface of the member.
すなわち、半導体の加工プロセスでは、薄膜の形成プロセルにおける薄膜粒子の再飛散が問題であり、また、プラズマエッチングプロセスでは、エッチングが半導体の加工のみならず、その周辺部材にも及んで微細なパーティクル発生させることから、これが半導体製品の品質に影響することが指摘されている。その対策としては、特許文献９に開示されているように、石英を基材とし、この表面粗さを３〜１８μｍとし、その上に直接Ａｌ2Ｏ3、ＴｉＯ2の溶射皮膜を形成すると共に、この溶射皮膜表面を、粗さ曲線のスキューネス（Ｒｓｋ）で０．１未満の負の値を示す粗面を推奨している。 In other words, in the semiconductor processing process, re-scattering of the thin film particles in the thin film formation process is a problem, and in the plasma etching process, fine particles are generated not only in the semiconductor processing but also in the peripheral members. It has been pointed out that this affects the quality of semiconductor products. As a countermeasure, as disclosed in Patent Document 9, quartz is used as a base material, the surface roughness is 3 to 18 μm, and a sprayed coating of Al 2 O 3 and TiO 2 is directly formed thereon. The surface of this thermal spray coating is recommended to be a rough surface showing a negative value of less than 0.1 in terms of the skewness (Rsk) of the roughness curve.
その他、特許文献１０〜１３には、パーティクルの付着や堆積容量の増大を図る技術が開示されており、また、付着物の膜を分割する凹部凸部を設けて飛散を少なくする技術が特許文献１４に見られる。
半導体加工プロセスにおける従来技術には、次に示すような課題がある。
（１）薄膜成形プロセスにおける課題
（ａ）薄膜形成プロセスにおける治具や装置部材に対する薄膜粒子の付着とその飛散現象を防止のための特許文献１〜８に開示された技術、すなわち、薄膜粒子の付着面積を各種の手段によって拡大する方法は、薄膜形成作業の長時間操業と、それによる生産効率の向上に一定の効果は認められるものの、最終的には付着堆積した薄膜粒子が再飛散するので、根本的な解決策にはなり得ない。
（ｂ）多量の薄膜粒子が付着堆積した治具や装置部材の表面に形成または処理されている表面処理膜は、金属質の膜であるため、酸やアルカリによって薄膜粒子を除去する際に、同時に溶解し、そのため再生して使用できる回数が少なく、製品のコストアップ原因となっている。
（ｃ）従来技術における薄膜粒子の付着堆積面積の拡大策は、単に面積の拡大のみを目的としており、付着堆積した薄膜粒子の飛散を防止する方法についての提案でない。
The prior art in the semiconductor processing process has the following problems.
(1) Problems in thin film forming process (a) Techniques disclosed in Patent Documents 1 to 8 for preventing adhesion of thin film particles to jigs and apparatus members in the thin film forming process and the phenomenon of scattering thereof, ie, thin film particles Although the method of enlarging the adhesion area by various means has a certain effect on the long-time operation of the thin film formation work and the improvement of the production efficiency by it, eventually the deposited thin film particles are scattered again. It cannot be a fundamental solution.
(B) Since the surface treatment film formed or treated on the surface of a jig or device member on which a large amount of thin film particles are deposited and deposited is a metallic film, when removing the thin film particles with acid or alkali, It dissolves at the same time, so the number of times that it can be regenerated and used is small, which increases the cost of the product.
(C) The measures for expanding the deposition deposition area of the thin film particles in the prior art are only for the purpose of expanding the area, and are not a proposal for a method for preventing scattering of the deposited deposition thin film particles.
（２）プラズマエッチングプロセスにおける課題
プラズマエッチングプロセスで使用される治具や装置部材における対策技術は、特許文献９に開示されているように、石英基材の表面にＡｌ2Ｏ3、ＴｉＯ2の溶射皮膜を形成するとともに、その溶射皮膜の表面粗さをＲｓｋ（粗さ曲線のスキューネス）の０．１未満の負の値に制御することによって、スパッタリング現象によって発生する微細なパーティクルを、この粗さ曲線を有する皮膜表面で受けとめることを提案している。しかし、この技術が開示しているＴｉＯ2は、ハロゲンガスを含むプラズマエッチング加工環境では、自らが腐食されたりエッチングされて、却って汚染源となってパーティクルを多量に発生する。一方、Ａｌ2Ｏ3の溶射皮膜は、ＴｉＯ2皮膜に比較すると、耐食性、耐プラズマエッチング性に優れているものの、寿命が短く、また、Ｒｓｋ：０．１未満の負の値を示す表面形状は、環境汚染物質の付着・堆積量が少なく、短時間内に飽和するため、その残りがパーティクルの発生源となる欠点がある。また、この表面形状の凸部は、面積が大きく、凸部に多量のパーティクルが堆積しやすいうえ、再飛散しやすい幾何学的形状を呈している問題がある。
(2) Problems in the plasma etching process As disclosed in Patent Document 9, the countermeasure technology for jigs and apparatus members used in the plasma etching process is made of Al 2 O 3 and TiO 2 on the surface of the quartz substrate. By forming the sprayed coating and controlling the surface roughness of the sprayed coating to a negative value of less than 0.1 of Rsk (skewness of the roughness curve), fine particles generated by the sputtering phenomenon can be reduced. It has been proposed to accept on the surface of the film having a curve. However, TiO 2 disclosed in this technology is corroded or etched by itself in a plasma etching processing environment containing a halogen gas, and on the contrary, becomes a contamination source and generates a large amount of particles. On the other hand, the thermal spray coating of Al 2 O 3 is superior in corrosion resistance and plasma etching resistance to the TiO 2 coating, but has a short life and a surface shape showing a negative value less than Rsk: 0.1. Has a drawback that the amount of adhesion and deposition of environmental pollutants is small and saturates within a short time, so that the rest becomes a source of particles. Further, the surface-shaped convex part has a problem that it has a large area, and a large amount of particles are likely to be deposited on the convex part, and has a geometric shape that is likely to rescatter.
特許文献１５に開示されているように、耐プラズマエロージョン材料として、Ｙ2Ｏ3の単結晶を適用する技術は、これを皮膜化することが困難であるため用途が限定され、また、Ｙ2Ｏ3の溶射皮膜を提案する特許文献１６の技術は、耐プラズマエロージョン性には優れているものの、環境汚染パーティクルの付着・堆積に関しては検討していない。 As disclosed in Patent Document 15, the technique of applying a single crystal of Y 2 O 3 as a plasma erosion-resistant material is limited in application because it is difficult to form a film, and Y 2 The technique of Patent Document 16 that proposes a sprayed coating of O 3 is excellent in plasma erosion resistance, but does not consider adhesion / deposition of environmental pollutant particles.
本発明の目的は、耐プラズマエロージョン特性に優れる他、プラズマ処理雰囲気の汚染原因となるパーティクル類の付着−堆積による無害化に優れる他、再飛散の防止に有効な溶射皮膜表面構造を提案することにある。
本発明の他の目的は、ハロゲンガスを含む腐食環境における半導体加工精度を高めると共に、長期に亘って安定して加工ができる他、半導体製品の品質の向上とコスト低減に効果のある溶射皮膜被覆部材とその製造方法を提案するところにある。
The object of the present invention is to provide a surface structure of a sprayed coating that is excellent in plasma erosion resistance, is not only detoxified by adhesion and deposition of particles that cause contamination of the plasma processing atmosphere, and is effective in preventing re-scattering. It is in.
Another object of the present invention is to increase the accuracy of semiconductor processing in a corrosive environment containing halogen gas, and to stably process over a long period of time, and to improve the quality and reduce the cost of semiconductor products. It is in the place which proposes a member and its manufacturing method.
本発明は、従来技術が抱えている上記した課題を次に示すような技術的手段によって解決するものである。
（１）即ち、本発明は、基材と、その基材表面を覆うセラミック溶射皮膜とからなり、その溶射皮膜は、該皮膜表面の高さ方向の粗さ曲線の中心線より上部に位置する針状凸部のみを電子ビーム照射に伴う溶融−凝固によって丸味を帯びた台形状凸部にすると共に、粗さ曲線の中心部より低い位置の開口の大きい凹部はそのまま維持した形状とし、かつ高さ方向の粗さ曲線のスキューネス値（Ｒｓｋ）が正の値を示す表面形状とした構造からなる電子ビーム照射層であることを特徴とする耐プラズマエロージョン性に優れる溶射皮膜被覆部材である。
The present invention solves the above-described problems of the prior art by the following technical means.
(1) That is, this invention consists of a base material and the ceramic sprayed coating which covers the base-material surface, and the sprayed coating is located above the centerline of the roughness curve of the height direction of this coating surface. Only the needle-like convex part is made into a trapezoidal convex part rounded by melting-solidification accompanying electron beam irradiation, and the concave part having a large opening at a position lower than the center part of the roughness curve is maintained as it is, and the shape is high. A thermal spray coating member excellent in plasma erosion resistance, characterized in that it is an electron beam irradiation layer having a structure having a surface shape in which the skewness value (Rsk) of the roughness curve in the vertical direction shows a positive value.
（２）また、本発明は、基材の表面に、金属質アンダーコートが形成され、その上にセラミック溶射皮膜のトップコートが形成され、そのトップコートのセラミック溶射皮膜は、該皮膜表面の高さ方向の粗さ曲線の中心線より上部に位置する針状凸部のみを電子ビーム照射に伴う溶融−凝固によって台形状凸部にすると共に、高さ方向の粗さ曲線のスキューネス値（Ｒｓｋ）が正の値を示す表面形状とした構造からなる電子ビーム照射層であることを特徴とする耐プラズマエロージョン性に優れる溶射皮膜被覆部材を提案する。 (2) Further, according to the present invention, a metallic undercoat is formed on the surface of the substrate, and a top coat of the ceramic sprayed coating is formed thereon. Only the needle-like convex part located above the center line of the roughness curve in the vertical direction is made into a trapezoidal convex part by melting-solidification accompanying the electron beam irradiation, and the skewness value (Rsk) of the roughness curve in the height direction The present invention proposes a thermal spray coating member excellent in plasma erosion resistance, characterized in that it is an electron beam irradiation layer having a structure with a positive surface shape.
（３）さらに、本発明は、基材の表面に直接、または該基材の表面にまず金属質アンダーコートを施した後、その上にトップコートとして、粒径５〜８０μｍのセラミックからなる溶射粉末材料を溶射してセラミック溶射皮膜を形成し、そのセラミック溶射皮膜の表面を電子ビーム照射処理することにより、該皮膜の最表層部に、高さ方向の粗さ曲線の中心線より上部に位置する針状凸部のみを電子ビーム照射に伴う溶融−凝固によって丸味を帯びた台形状凸部にすると共に、粗さ曲線の中心部より低い位置の開口の大きい凹部はそのまま維持した形状とし、かつ高さ方向の粗さ曲線のスキューネス値（Ｒｓｋ）が正の値を示す表面形状とした構造からなる電子ビーム照射層を、形成することを特徴とする耐プラズマエロージョン性に優れる溶射皮膜被覆部材の製造方法を提案する。 (3) Further, in the present invention, after applying a metallic undercoat directly on the surface of the base material or first on the surface of the base material, a thermal spray comprising a ceramic having a particle diameter of 5 to 80 μm as a top coat thereon. The powder material is sprayed to form a ceramic sprayed coating, and the surface of the ceramic sprayed coating is subjected to electron beam irradiation treatment, so that the outermost layer of the coating is positioned above the center line of the roughness curve in the height direction. Only the needle-like convex part to be rounded is formed into a trapezoidal convex part by melting-solidification accompanying electron beam irradiation, and the concave part having a large opening at a position lower than the center part of the roughness curve is maintained as it is, and Excellent plasma erosion resistance characterized by forming an electron beam irradiation layer having a surface shape in which the skewness value (Rsk) of the roughness curve in the height direction has a positive value. Morphism proposes a method for producing a film-coated member.
なお、本発明（１）、（２）、（３）において、前記電子ビーム照射層を形造るセラミック溶射皮膜は、Ａｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物からなる酸化物セラミック溶射皮膜であること、前記セラミック溶射皮膜は５０〜２０００μｍの厚さを有すること、そして、前記電子ビーム照射層は、溶射セラミック粒子の結晶構造を変化させた層であることが有効な手段となり得る。 In the present invention (1), (2), (3), the ceramic sprayed coating forming the electron beam irradiation layer is made of Al 2 O 3 , Y 2 O 3 or Al 2 O 3 —Y 2 O 3 composite. It is an oxide ceramic sprayed coating made of oxide, the ceramic sprayed coating has a thickness of 50 to 2000 μm, and the electron beam irradiation layer is a layer in which the crystal structure of the sprayed ceramic particles is changed. Can be an effective means.
本発明に係る溶射皮膜被覆部材は、優れた耐プラズマエロージョン性を有することから、自らが雰囲気汚染原因であるパーティクルの発生源となることもなく、しかも、皮膜表面により多くのパーティクル類を吸着し堆積量を増加させて無害化させる特性に優れるだけでなく、付着、堆積したパーティクル類の再飛散を防止する作用にも優れている。 Since the thermal spray coating member according to the present invention has excellent plasma erosion resistance, it does not itself become a source of particles that cause atmospheric contamination, and adsorbs more particles on the coating surface. Not only is it excellent in the property of detoxifying by increasing the amount of deposition, it is also excellent in the effect of preventing re-scattering of adhered and deposited particles.
さらに、本発明の部材を採用すると、高い環境清浄度が要求されると同時に、ハロゲン化合物を含む厳しい腐食環境で行われる半導体加工製品の加工精度を高めることができる。しかも、このような部材を用いると、長期間にわたる連続操業が可能となり、精密加工される半導体製品の品質の向上および製品コストの低減が可能である。 Furthermore, when the member of the present invention is employed, high environmental cleanliness is required, and at the same time, the processing accuracy of a semiconductor processed product performed in a severe corrosive environment containing a halogen compound can be increased. In addition, when such a member is used, continuous operation over a long period of time is possible, and the quality of semiconductor products to be precision processed can be improved and the product cost can be reduced.
本発明の好適実施形態の一例として、以下に、薄膜形成プロセスやプラズマエッチングプロセスなどのプロセスにおいて用いられる装置の部材に対し、その表面にセラミック（以下、「酸化物セラミックス」の例で述べる）溶射皮膜を形成する例について説明する。 As an example of a preferred embodiment of the present invention, ceramic (hereinafter, described as an example of “oxide ceramics”) is sprayed on a surface of an apparatus member used in a process such as a thin film formation process or a plasma etching process. An example of forming a film will be described.
（１）酸化物セラミック溶射皮膜の形成
基材の表面に直接、または該基材表面に形成した金属質アンダーコートの上にトップコートとして、Ａｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物からなる酸化物セラミックスの溶射皮膜を、５０〜２０００μｍの厚さに形成する。この溶射皮膜の膜厚が５０μｍより薄いと、トップコートとしての寿命が短くなり、一方、２０００μｍより厚いと、溶射成膜時に発生する熱収縮に起因する残留応力が大きくなって、皮膜の耐衝撃性や基材との密着力が低下する。
(1) Formation of oxide ceramic sprayed coating Al 2 O 3 , Y 2 O 3 or Al 2 O 3 as a top coat directly on the surface of the substrate or on the metallic undercoat formed on the surface of the substrate. the thermal spray coating of oxide ceramics consisting of -Y 2 O 3 composite oxide is formed to a thickness of 50 to 2000 m. If the thickness of this thermal spray coating is less than 50 μm, the life as a top coat is shortened. On the other hand, if it is greater than 2000 μm, the residual stress resulting from thermal shrinkage generated during thermal spray deposition increases, resulting in impact resistance of the coating. And adhesion to the substrate are reduced.
また、これらの酸化物セラミック溶射皮膜の形成に用いる溶射粉末材料は、５〜８０μｍの粒径のものがよく、粒径が５μｍより小さいと、溶射ガンへの連続かつ均等な供給が困難であるため、皮膜の厚さが不均等になり易く、一方、粒径が８０μｍより大きいと、溶射熱源中で完全に溶融することなく、いわゆる未溶融状態で皮膜を形成することになるため、緻密な溶射皮膜の形成が困難となる。 Moreover, the thermal spraying powder material used for formation of these oxide ceramic sprayed coatings should have a particle size of 5 to 80 μm, and if the particle size is smaller than 5 μm, it is difficult to supply the spraying gun continuously and evenly. For this reason, the thickness of the film tends to be uneven. On the other hand, if the particle size is larger than 80 μm, the film is formed in a so-called unmelted state without being completely melted in the thermal spraying heat source. Formation of a sprayed coating becomes difficult.
基材表面に、酸化物セラミック溶射皮膜からなるトップコートの形成に先駆けて形成する金属質アンダーコートは、Ｎｉおよびその合金、Ｍｏおよびその合金、Ａｌおよびその合金、Ｍｇ合金などが好適である。この皮膜の膜厚は５０〜５００μｍの範囲がよい。その理由は、膜厚が５０μｍより薄いと基材の保護が十分でなく、一方、膜厚が５００μｍよりも厚いと、アンダーコートとしての作用効果が飽和するので経済的でない。 Ni and its alloy, Mo and its alloy, Al and its alloy, Mg alloy, etc. are suitable for the metallic undercoat formed on the surface of the substrate prior to the formation of the top coat made of the oxide ceramic sprayed coating. The film thickness is preferably in the range of 50 to 500 μm. The reason is that if the film thickness is less than 50 μm, the substrate is not sufficiently protected, whereas if the film thickness is more than 500 μm, the effect as an undercoat is saturated, which is not economical.
前記基材は、ＡｌおよびＡｌ合金、ＴｉおよびＴｉ合金、ステンレス鋼、Ｎｉ基合金などの金属のほか、石英、ガラス、プラスチック（高分子材料）、焼結部材（酸化物、炭化物、硼化物、珪化物、窒化物およびこれらの混合物）、またはこれたの基材表面にめっき膜や蒸着膜を形成したものが用いられる。 In addition to metals such as Al and Al alloys, Ti and Ti alloys, stainless steel, and Ni-based alloys, the base material is quartz, glass, plastic (polymer material), sintered member (oxide, carbide, boride, Silicides, nitrides, and mixtures thereof), or those obtained by forming a plating film or vapor deposition film on the surface of the substrate.
本発明において、基材の表面に、前記酸化物セラミック溶射皮膜（トップコート）として、Ａｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物のいずれかを溶射する理由は、これらの酸化物セラミックは、耐食性や耐プラズマエロージョン性が、他の酸化物セラミック、例えば、ＴｉＯ2、ＭｇＯ、ＺｒＯ2、ＮｉＯ、Ｃｒ2Ｏ3などに比較して優れているからである。 In the present invention, any one of Al 2 O 3 , Y 2 O 3 or Al 2 O 3 —Y 2 O 3 double oxide is sprayed on the surface of the substrate as the oxide ceramic sprayed coating (top coat). The reason is that these oxide ceramics are superior in corrosion resistance and plasma erosion resistance compared to other oxide ceramics such as TiO 2 , MgO, ZrO 2 , NiO, Cr 2 O 3 and the like. is there.
基材表面に形成するトップコートやアンダーコートは、大気プラズマ溶射法、減圧プラズマ溶射法、水プラズマ溶射法、高速および低速フレーム溶射法あるいは爆発溶射法を採用して形成することが好ましい。 The top coat and undercoat formed on the substrate surface are preferably formed by employing an atmospheric plasma spraying method, a low pressure plasma spraying method, a water plasma spraying method, a high-speed and low-speed flame spraying method, or an explosion spraying method.
（２）酸化物セラミック溶射皮膜の表面形状（最適粗さ）
本発明において、基材表面に直接、または金属質アンダーコートを施工した上に形成される前記酸化物セラミック溶射皮膜は、その表面形状、即ち、表面粗さ、とくに高さ方向の粗さ曲線を、以下に述べるようにする。
一般に、半導体装置、例えば、プラズマ処理装置に用いられる治具等の部材は、表面積の大きいものが用いられる。その理由は、薄膜粒子やプラズマエッチングによって処理雰囲気内に発生するパーティクルなどの環境汚染物質を、なるべく多く、この部材表面に付着（吸着）させると同時に、その堆積状態を永く維持させるためであり、そして、この付着、堆積した環境汚染物質が基材表面から再飛散することを防止するためである。
(2) Surface shape of oxide ceramic sprayed coating (optimal roughness)
In the present invention, the oxide ceramic sprayed coating formed directly on the surface of the substrate or after applying a metallic undercoat has a surface shape, that is, a surface roughness, particularly a roughness curve in the height direction. As described below.
In general, a member having a large surface area is used as a member such as a jig used in a semiconductor device, for example, a plasma processing apparatus. The reason for this is to maintain as long as possible the deposition of environmental contaminants such as thin film particles and particles generated in the processing atmosphere by plasma etching, while adhering (adsorbing) them to the surface of the member, and at the same time, This is to prevent the adhering and deposited environmental pollutants from re-scattering from the substrate surface.
本発明では、このような目的の下で、基材表面にトップコートとして形成する溶射皮膜の表面形状、即ち、この皮膜の表面粗さ曲線について、皮膜厚み（高さ）方向のゆがみを示す粗さ曲線のスキューネス値（Ｒｓｋ）で特定することにした。即ち、このスキューネス値（Ｒｓｋ）が正の値を示す粗化面とすることによって、環境汚染物（含むプラズマエッチング時に発生するパーティクル）の付着量、堆積量の増加を図るとともに、これらが再飛散して半導体加工製品の品質を低下させることがないようにした。 In the present invention, for such a purpose, the surface shape of the sprayed coating formed as a top coat on the substrate surface, that is, the surface roughness curve of the coating shows a roughness indicating the distortion in the coating thickness (height) direction. The skewness value (Rsk) of the curve is specified. In other words, the roughened surface having a positive skewness value (Rsk) increases the adhesion amount and deposition amount of environmental pollutants (including particles generated during plasma etching), and rescatters them. As a result, the quality of semiconductor processed products is not degraded.
なお、本発明において、酸化物セラミック溶射皮膜の表面形状を特定する手段として、ＪＩＳ Ｂ０６０１（２００１）の幾何特性仕様、表面性状：輪郭曲線方式、用語・定義および表面性状パラメータにおいて規定されているスキューネス値（Ｒｓｋ）に着目することにした理由は以下のとおりである。
このスキューネス値は、図１に示すように、山（凸部）に対して谷（凹部）の部分が、広い粗さ曲線では、確率密度関数が谷の方へ偏った分布となる。この場合のスキューネス値Ｒｓｋは正の値を示す。Ｒｓｋが正側に大きいほど確率密度関数が谷側に片寄り、例えば、環境汚染物質が谷に付着しやすく、堆積しやすいものとなる。
In the present invention, as means for specifying the surface shape of the oxide ceramic sprayed coating, the skewness specified in the geometric characteristic specification, surface property: contour curve method, term / definition, and surface property parameter of JIS B0601 (2001). The reason for paying attention to the value (Rsk) is as follows.
As shown in FIG. 1, the skewness value has a distribution in which a probability density function is biased toward a valley in a roughness curve having a wide valley (concave) portion with respect to a mountain (convex portion). In this case, the skewness value Rsk is a positive value. The larger Rsk is on the positive side, the closer the probability density function is to the valley side. For example, environmental pollutants are more likely to adhere to the valley and deposit more easily.
なお、このＲｓｋは、基準長（ｌｒ）における高さ（Ｚ（ｘ））の三乗平均を二乗平均率方根の三乗（Ｒｑ3）で割ったものと定義されている。
ところで、特許文献９で開示されているような、Ｒｓｋ＜０の表面粗さでは、薄膜粒子やプラズマエッチング現象によって発生する環境汚染原因のパーティクルなどを付着、収納堆積する凹部面積が小さいうえ、凹部の間隔が狭いため、少し大き目のパーティクルなどがこの凹部の表面を覆うと、パーティクルの収納効率が著しく低下する一方、そのパーティクルの再飛散が容易となる欠点がある。 By the way, with the surface roughness of Rsk <0 as disclosed in Patent Document 9, the area of the recessed portion for attaching, storing, and depositing thin film particles or particles causing environmental contamination caused by the plasma etching phenomenon is small, and the recessed portion Therefore, if a slightly larger particle or the like covers the surface of the recess, the particle storage efficiency is remarkably lowered, but the particles are easily re-scattered.
これに対して、本発明のように、前記スキューネス値が係るＲｓｋ＞０の場合は、図１（ａ）に示すとおり、表面粗さの凹部面積（三次元的には体積）が大きく、薄膜粒子やパーティクルの付着量や堆積量を大きくすることができる。また、凸部が鋭角の針状となっているので、パーティクルを凹部内に導入しやすい形状になっていることがわかる。しかも、一旦、凹凸内に収納したパーティクルが飛散しにくい形状でもある。 On the other hand, when the skewness value is Rsk> 0 as in the present invention, as shown in FIG. 1A, the concave area (volume in three dimensions) of the surface roughness is large, and the thin film It is possible to increase the amount of particles and particle adhesion and deposition. Moreover, since the convex part is an acute-angle needle shape, it turns out that it is a shape which is easy to introduce | transduce a particle into a recessed part. Moreover, the particles once stored in the irregularities are also difficult to scatter.
なお、上記のスキューネス値（Ｒｓｋ）の正の値を示す割合と、負の値を示す割合とは、正の値を示す割合が８０％以上になることが、上述した作用・効果を得る上で望ましい。それは、負の値を示す割合が多くなる程、薄膜粒子やパーティクルの付着量、堆積量が少なくなるからである。なお、このスキューネス値の制御は、溶射粉末材料の粒径制御や溶射条件、具体的には、プラズマ用ガスとしてＡｒとＨ2の混合ガスを用い、溶射角度を基材に対して、９０°〜５５°で施工すると、安定した上記表面形状の皮膜が得られる。 It should be noted that the ratio indicating the positive value of the skewness value (Rsk) and the ratio indicating the negative value are such that the ratio indicating the positive value is 80% or more in order to obtain the above-described effects. Is desirable. This is because as the proportion of negative values increases, the amount of thin film particles and particles attached and the amount of deposition decrease. The skewness value is controlled by controlling the particle size of the thermal spray powder material and thermal spraying conditions, specifically, using a mixed gas of Ar and H 2 as the plasma gas and setting the thermal spray angle to 90 ° with respect to the substrate. When the construction is carried out at ˜55 °, a stable film having the above surface shape can be obtained.
さらに詳しく説明すると、溶射皮膜の上述した表面形状、即ち、所定の粗さ曲線をもつ粗化面を有する皮膜にするためには、粒径５〜８０μｍのセラミック粉末を数万個単位で、連続して熱源中へ供給することによって実現する。この場合、すべての溶射粉末材料が温度の高い熱源の中心部（フレーム中）に位置するものだけでなく、比較的温度の低い熱源の周辺部（フレーム外）に分布するものもあり、また、溶射粉末粒子がたとえ熱源の中心部を飛行したとしても、粒径の大、小によって加熱溶融の度合いに差が生じる。溶射皮膜は、このような熱履歴と粒子径の異なるセラミック粒子から構成されているため、結果的には扁平度の異なる粒子が無秩序に堆積することとなる。従って、溶射皮膜の表面粗さは、このような不均等な粒子が堆積した結果、形成されるものであり、所定の溶射条件の下で、溶射粉末材料として５〜８０μｍの粒径の酸化物セラミック溶射粉末材料を溶射すると、上述した粗さ曲線スキューネス値が主として（≧８０％）正の値を示すように制御できる。 More specifically, in order to obtain the above-described surface shape of the sprayed coating, that is, a coating having a roughened surface having a predetermined roughness curve, ceramic powder having a particle size of 5 to 80 μm is continuously in units of tens of thousands. This is realized by supplying the heat source. In this case, all the thermal spray powder materials are distributed not only in the center (in the frame) of the heat source having a high temperature but also in the periphery (outside the frame) of the heat source having a relatively low temperature, Even if the sprayed powder particles fly through the center of the heat source, the degree of heating and melting varies depending on the size of the particle size. Since the thermal spray coating is composed of ceramic particles having different thermal histories and particle diameters, particles having different flatness are deposited randomly. Therefore, the surface roughness of the thermal spray coating is formed as a result of depositing such uneven particles, and the oxide having a particle size of 5 to 80 μm as the thermal spray powder material under a predetermined thermal spraying condition. When the ceramic spray powder material is sprayed, the above-mentioned roughness curve skewness value can be controlled so as to mainly show a positive value (≧ 80%).
上記した溶射皮膜表面のＲｓｋ＞０で表示される表面粗さは、図１に示すように、凸部形状が鋭く針状となっているので、プラズマエッチング環境では凸部が優先的にスパッタリングされて耐プラズマエロージョン特性が悪くなるおそれが生じる。そこで、本発明では、プラズマエロージョン特性を改善するために、Ａｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物の溶射皮膜の表面を、電子ビーム照射処理して溶射粒子を溶融−凝固させ、該溶射皮膜の最表層（０．５〜５μｍ）の部分を、即ち、前記粗さ曲線で示されるスキューネス値の中心線より上の針状凸部の形状を、図２に示すように、台形状の凸部に変化させることとした。 As shown in FIG. 1, the surface roughness indicated by Rsk> 0 on the surface of the thermal spray coating is sharp and needle-shaped as shown in FIG. 1, and therefore the projection is preferentially sputtered in the plasma etching environment. As a result, the plasma erosion resistance may deteriorate. Therefore, in the present invention, in order to improve plasma erosion characteristics, the surface of the sprayed coating of Al 2 O 3 , Y 2 O 3 or Al 2 O 3 —Y 2 O 3 double oxide is subjected to electron beam irradiation treatment. The sprayed particles are melted and solidified, and the outermost layer (0.5 to 5 μm) of the sprayed coating is formed, that is, the shape of the needle-like convex portion above the center line of the skewness value indicated by the roughness curve. As shown in FIG. 2, it was changed to a trapezoidal convex part.
前記酸化物セラミック溶射皮膜の表面を電子ビーム照射すると、照射部は一段と優れた雰囲気内汚染を招くパーティクルの発生を抑制するとともに付着容量、堆積容量を低下させずに、一方で、それの再飛散を抑制することができ、このことにより溶射皮膜自体が良好な耐プラズマエロージョン効果を示すようになる。従って、溶射皮膜は、電子ビーム照射されると、自らがこのことにより環境汚染パーティクルの発生源となっている従来技術の欠点が解消される。 When the surface of the oxide ceramic sprayed coating is irradiated with an electron beam, the irradiated portion further suppresses the generation of particles that cause contamination in the atmosphere and reduces the adhesion capacity and the deposition capacity, but on the other hand, rescatters it. The thermal spray coating itself exhibits a good plasma erosion resistance effect. Therefore, when the thermal spray coating is irradiated with an electron beam, the disadvantages of the prior art, which is the source of environmental pollution particles by itself, are eliminated.
図１に示すＲｓｋ＞０の表面形状を有する溶射皮膜を電子ビーム照射すると、粗さ曲線の針状凸部の部分にビームエネルギーが集中し、この部分が優先的に溶融して、初期の鋭角的な針状の凸部が丸味を帯びた台形状の凸部に変化する。電子ビーム照射の効果が高さ方向の表面粗さ曲線の中心線の位置で止まるようにすると、粗さ曲線の中心部より低い位置に存在している開口の大きい凹部の方は、電子ビーム照射の影響を受けないので、多量の環境汚染パーティクルを付着、堆積させるための形状をそのまま維持することができる。 When the thermal spray coating having the surface shape of Rsk> 0 shown in FIG. 1 is irradiated with an electron beam, the beam energy concentrates on the needle-like convex part of the roughness curve, and this part is preferentially melted, and the initial acute angle The needle-like convex part changes into a rounded trapezoidal convex part. If the effect of electron beam irradiation stops at the position of the center line of the surface roughness curve in the height direction, the concave part with a large opening existing at a position lower than the center part of the roughness curve is irradiated with the electron beam. Therefore, the shape for adhering and depositing a large amount of environmental pollution particles can be maintained as it is.
即ち、溶射皮膜の表面を電子ビーム照射処理を行うと、スキューネス値がＲｓｋ＞０の粗さ曲線をもつ表面形状の針状凸部の部分のみが溶融して台形状に変化するので、プラズマエロージョンの作用を受けて環境汚染原因となる微細なパーティクルそのものの生成、飛散を防ぐことができる。一方、中心線以下の凹部の形状は、そのまま維持させることができる。なお、電子ビーム照射の効果を、表面粗さ曲線の中心線以下まで及ぶようにすると、パーティクルの多量付着と堆積に適した凹部までが、溶融して、皮膜全体が平滑状態となって、溶射皮膜特有の凹凸を有効利用できなくなる。 That is, when the surface of the thermal spray coating is subjected to an electron beam irradiation process, only the surface of the needle-shaped convex portion having a roughness curve with a skewness value of Rsk> 0 is melted and changed into a trapezoidal shape. It is possible to prevent the generation and scattering of fine particles themselves that cause environmental pollution. On the other hand, the shape of the recess below the center line can be maintained as it is. Note that if the effect of electron beam irradiation extends below the center line of the surface roughness curve, the recesses suitable for mass adhesion and deposition of particles melt, and the entire coating becomes smooth, so that The unevenness peculiar to the film cannot be used effectively.
また、酸化物セラミック溶射皮膜の表面を電子ビーム照射すると、前記酸化物セラミックス、Ａｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物粒子の結晶構造が変化し、電子ビーム照射前の皮膜に比較して、耐プラズマエロージョン性を向上させることができる。この効果は溶射皮膜がプラズマエロージョンの作用を受けて、自らが環境汚染パーティクルの発生源となる欠点を補うこととなる。 Further, when the surface of the oxide ceramic sprayed coating is irradiated with an electron beam, the crystal structure of the oxide ceramic, Al 2 O 3 , Y 2 O 3 or Al 2 O 3 —Y 2 O 3 double oxide particles changes, Plasma erosion resistance can be improved as compared with a film before electron beam irradiation. This effect compensates for the disadvantage that the sprayed coating is subjected to the action of plasma erosion and becomes a source of environmental pollution particles.
酸化物セラミック溶射皮膜の表面に電子ビーム照射を行った場合、皮膜成分である溶射セラミック粒子の結晶構造は、発明者らが知見したところによると、より安定化する方向に変化する。即ち、Ａｌ2Ｏ3の場合、皮膜溶射後の結晶構造は、γ相であるが、電子ビーム照射後はα相に変化し、Ｙ2Ｏ3の結晶構造は、立方晶、単斜晶から立方晶に、またＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物は上記Ａｌ2Ｏ3、Ｙ2Ｏ3単独の変化を併せもつように結晶構造が変化し、その何れの変化においても、耐プラズマエロージョン性が向上する。 When the surface of the oxide ceramic sprayed coating is irradiated with an electron beam, the crystal structure of the sprayed ceramic particles, which are the coating components, changes according to the findings of the inventors in a more stable direction. That is, in the case of Al 2 O 3 , the crystal structure after coating spraying is the γ phase, but changes to the α phase after electron beam irradiation, and the crystal structure of Y 2 O 3 is from cubic and monoclinic crystals. The crystal structure of the cubic crystal and the Al 2 O 3 —Y 2 O 3 double oxide change so that both the above Al 2 O 3 and Y 2 O 3 alone change. Plasma erosion property is improved.
なお、所定のスキューネス値（Ｒｓｋ）の針状凸部を台形状凸部に変えるためには、電子ビーム照射条件として、溶射皮膜（５０〜２０００μｍ）の厚みに応じ、しかもスキューネス値Ｒｓｋの中心線より上の部分を溶融させるための方法として、下記のような条件の範囲で照射出力および照射回数を制御することが推奨される。
照射雰囲気 ： １０〜０．００５ＰａのＡｒガス
照射出力 ： １．０〜１０ｋｅＶ
照射速度 ： １〜２０ｍ／ｓ
上記照射条件以外の照射条件を採用する他の方法として、電子銃によって電子ビームを発生させたり、また、照射雰囲気を減圧中や減圧された不活性ガス中で行うことによっても、照射層の微調整が可能である。
In order to change the needle-like convex portion having a predetermined skewness value (Rsk) to a trapezoidal convex portion, the electron beam irradiation condition depends on the thickness of the sprayed coating (50 to 2000 μm) and the center line of the skewness value Rsk. As a method for melting the upper part, it is recommended to control the irradiation output and the number of irradiations within the range of the following conditions.
Irradiation atmosphere: Ar gas irradiation output of 10 to 0.005 Pa: 1.0 to 10 keV
Irradiation speed: 1-20m / s
Other methods of adopting irradiation conditions other than the above irradiation conditions include generating an electron beam with an electron gun, or performing irradiation in a reduced pressure or a reduced inert gas to reduce the fineness of the irradiated layer. Adjustment is possible.
本発明において、酸化セラミック溶射皮膜の表面に電子ビーム照射処理を施す意義とその利点を列挙すると次のとおりである。
ａ．酸化物セラミック溶射皮膜であれば、Ａｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物のようなこれらの複酸化物に限らず、例えば、３Ａｌ2Ｏ3・２ＳｉＯ2、ＺｒＯ2、Ｃｒ2Ｏ3などの全てのセラミック溶射皮膜にも適用が可能であるので、その用途は頗る広い。
ｂ．溶射皮膜表面の高さ方向の粗さ曲線（スキューネス値）の形状に関係なく、それぞれの粗さ曲線の凸部の部分に、電子ビーム照射処理を行うので、皮膜全体の物理、化学的性質に影響を与えることがない。
ｃ．電子ビーム照射された溶射皮膜表面の凸部では、局部的な溶融−凝固反応によって、鋭利な形状の針状凸部が丸味を帯びた台形状の凸部形状に変化するので、プラズマエッチング作用を受け難くなるとともに、その結晶構造もより安定なものに変化するため、結晶構造レベルから改質かつ長寿命化させることができる。
ｄ．電子ビーム照射部分が溶射皮膜表面最表層の凸部のみに限定されているので、粗さ曲線の中心線以下の凹部の形状の特徴、具体的には、Ｒｓｋ＞０で表示される粗さ曲線の凹部形状のような環境汚染パーティクルを多量に堆積できる形状、その特性をそのまま維持することができる。
ｅ．電子ビーム照射された溶射皮膜表面の凸部は、溶融−凝固反応に伴う結晶構造変化などの効果によって、耐プラズマエロージョン性が向上し、自らが環境汚染原因となるパーティクルの発生源とはならないので、高度を環境清浄度を維持して、半導体の精密加工作業を円滑に行うことができる。
In the present invention, the significance and the advantages of performing the electron beam irradiation treatment on the surface of the oxide ceramic sprayed coating are listed as follows.
a. The oxide ceramic sprayed coating is not limited to these double oxides such as Al 2 O 3 , Y 2 O 3, or Al 2 O 3 —Y 2 O 3 double oxide, but, for example, 3Al 2 O 3. Since it can be applied to all ceramic sprayed coatings such as 2SiO 2 , ZrO 2 , and Cr 2 O 3 , its use is very wide.
b. Regardless of the shape of the roughness curve (skewness value) in the height direction of the sprayed coating surface, the electron beam irradiation treatment is performed on the convex part of each roughness curve, so that the physical and chemical properties of the entire coating are improved. There is no impact.
c. At the projections on the surface of the thermal spray coating irradiated with the electron beam, sharply shaped needle-like projections change to rounded trapezoidal projections by a local melting-solidification reaction, so that plasma etching is effective. In addition to being difficult to receive, the crystal structure also changes to a more stable one, so that the crystal structure level can be improved and the life can be extended.
d. Since the electron beam irradiated portion is limited to only the convex portion on the outermost surface of the sprayed coating surface, the feature of the shape of the concave portion below the center line of the roughness curve, specifically, the roughness curve displayed by Rsk> 0 The shape and characteristics of a large amount of environmental pollutant particles such as the concave shape can be maintained as they are.
e. The projections on the surface of the thermal spray coating that has been irradiated with an electron beam have improved plasma erosion resistance due to the effects of changes in the crystal structure associated with the melting-solidification reaction, and do not become a source of particles that cause environmental pollution. Maintaining the environmental cleanliness of the altitude, it is possible to smoothly perform precision processing of semiconductors.
（実施例１）
この実施例では、ＳＵＳ３０４基材（寸法：幅４０ｍｍ×長さ５０ｍｍ×厚さ７ｍｍ）の表面に直接、プラズマ溶射法によって、Ａｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物の皮膜を、１２０μｍの厚さに形成した後、その表面を、（（株）東京精密製ＳＵＲＦＣＯＭ１４００Ｄ−１３の粗さ測定器を用いて、皮膜表面の高さ方向の粗さ曲線のスキューネス値を測定することによって、それぞれ電子ビーム照射したものと、無照射の試験片を準備した。
これらの試験片をプラズマ照射出力８０Ｗの反応性プラズマエッチング装置によって、次に示す項目について調査した。
Example 1
In this embodiment, Al 2 O 3 , Y 2 O 3 or Al 2 O 3 —Y 2 O is directly applied to the surface of a SUS304 substrate (dimensions: width 40 mm × length 50 mm × thickness 7 mm) by plasma spraying. 3 After forming a double oxide film to a thickness of 120 μm, the surface was subjected to a roughness curve in the height direction of the film surface using a roughness measuring instrument (SURFCOM 1400D-13 manufactured by Tokyo Seimitsu Co., Ltd.). By measuring the skewness value, an electron beam irradiated sample and an unirradiated test piece were prepared.
These test pieces were examined for the following items using a reactive plasma etching apparatus having a plasma irradiation output of 80 W.
（１）プラズマエッチング性
プラズマエッチング装置内にＣＦ4ガス（６０ｍｌ／ｍｉｎ）とＯ2ガス（２ｍｌ／ｍｉｎ）の混合ガスを流しつつ、供試溶射皮膜の表面を８００分間エッチングし、その後、皮膜表面を電子顕微鏡により観察して、耐プラズマエッチング性を評価した。
(1) Plasma etching property While flowing a mixed gas of CF 4 gas (60 ml / min) and O 2 gas (2 ml / min) in the plasma etching apparatus, the surface of the test sprayed coating is etched for 800 minutes, and then the coating is applied. The surface was observed with an electron microscope to evaluate plasma etching resistance.
（２）パーティクルの堆積状況の調査
環境汚染パーティクルの発生源として、プラズマエッチングされ易いＳｉＯ2溶射皮膜を別途準備し、この皮膜をプラズマエッチングすることによって、環境汚染パーティクルと見做し、プラズマエッチング装置内に取付けた。供試溶射皮膜表面へのパーティクルの付着堆積状況を電子顕微鏡によって観察評価した。
(2) Investigation of particle accumulation conditions A plasma sprayed SiO 2 sprayed coating that is easily plasma-etched is separately prepared as a source of environmental polluting particles, and this coating is plasma-etched. Installed inside. The state of adhesion and deposition of particles on the surface of the test sprayed coating was observed and evaluated with an electron microscope.
（３）環境汚染パーティクルの再飛散調査
（２）の評価試験片を用い、不活性ガス（Ａｒ）の雰囲気中で、試験片を３００℃×１５分加熱した後、室温に冷却する操作を１サイクルとし、これを１０サイクル繰返した後の溶射皮膜表面を電子顕微鏡を用いて観察し、付着していたパーティクルの残存状態を調査することによって実施した。
(3) Investigation of re-scattering of environmental pollutant particles Using the evaluation test piece of (2), the test piece is heated to 300 ° C. for 15 minutes in an inert gas (Ar) atmosphere and then cooled to room temperature. The surface was sprayed for 10 cycles, and the surface of the sprayed coating was observed using an electron microscope, and the remaining state of the adhered particles was investigated.
表１は、以上の結果を要約したものである。耐プラズマエッチング性に関しては、電子ビーム照射したＡｌ2Ｏ3、Ｙ2Ｏ3およびＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物皮膜は、その表面粗さ曲線の形状が、無照射の皮膜に比較してすべて良好な耐プラズマエッチング性を発揮した。具体的には、電子ビーム照射処理を受けていないＲｓｋ＞０のＹ2Ｏ3皮膜（Ｎｏ．４）、Ａｌ2Ｏ3−Ｙ2Ｏ3複酸化物皮膜（Ｎｏ．６）ではＡｌ2Ｏ3皮膜に比較するとかなり良好な耐プラズマエロージョン性を発揮している。しかし、この皮膜に対しても電子ビーム照射によって、一段と耐プラズマエロージョン性の向上が得られる。
次に、パーティクルの堆積状況を見ると、粗さ曲線の凸部形状が鋭く、凹部容量の大きいＲｓｋ＞０皮膜が、皮膜材料の種類に関係なく、多量のパーティクルの堆積が認められ、皮膜表面の形状効果が最も大きな要因であることが窺がえる。しかし、電子ビーム照射しても（Ｎｏ．１、３、５）パーティクルの堆積拡大効果が認められるので、試験片の表面に付着堆積したパーティクルの再飛散の程度を、環境温度の変化に伴う基材金属および酸化物セラミック皮膜の膨張・収縮挙動によって調査した結果、電子ビーム照射の有無に関係なく、皮膜表面の粗さ曲線のスキューネス値がＲｓｋ＞０の皮膜では再飛散が少ないことが判明した。Ｒｓｋ＞０の皮膜を電子ビーム照射（Ｎｏ．１、３、５）しても、パーティクルの再飛散効果が低下しないのは、粗さ曲線の凸部のみが照射され、パーティクルの堆積容量の大きい凹部形状には影響を与えないことに起因するものと思われる。
Table 1 summarizes the results. Regarding plasma etching resistance, Al 2 O 3 , Y 2 O 3 and Al 2 O 3 —Y 2 O 3 double oxide films irradiated with an electron beam have a surface roughness curve that is a non-irradiated film. In comparison, all exhibited good plasma etching resistance. Specifically, Y 2 O 3 film (No.4) of Rsk> 0 not subjected to electron beam irradiation treatment, Al 2 O 3 -Y 2 O 3 composite oxide film (No.6) in Al 2 O Compared to the three coatings, it exhibits considerably better plasma erosion resistance. However, even with this film, the plasma erosion resistance can be further improved by electron beam irradiation.
Next, looking at the state of particle deposition, the Rsk> 0 film with a sharp convexity on the roughness curve and a large concave capacity showed a large amount of particle deposition regardless of the type of film material. The shape effect is the biggest factor. However, since the effect of expanding the accumulation of particles is recognized even when irradiated with an electron beam (No. 1, 3, 5), the degree of re-scattering of particles adhering to the surface of the test piece is determined based on the change in environmental temperature. As a result of investigating the expansion / contraction behavior of the metal and oxide ceramic coatings, it was found that the coating with the roughness curve on the surface of the coating having a skewness value of Rsk> 0 has little re-scattering regardless of the presence or absence of electron beam irradiation. . Even if the film with Rsk> 0 is irradiated with an electron beam (No. 1, 3, 5), the effect of particle re-scattering is not reduced because only the convex portion of the roughness curve is irradiated and the particle deposition capacity is large. It seems to be caused by not affecting the shape of the recess.
以上の結果を総合すると、酸化物セラミック溶射皮膜表面の粗さ曲線の形状が、Ｒｓｋ＞０に対して、電子ビーム照射の効果が認められ、この照射処理によってＡｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物皮膜の耐プラズマエロージョン性が向上し、自らがパーティクルの発生源となる欠点を解決できることが窺がえる。 When the above results are combined, the shape of the roughness curve on the surface of the oxide ceramic sprayed coating shows an effect of electron beam irradiation with respect to Rsk> 0. By this irradiation treatment, Al 2 O 3 , Y 2 O 3 Alternatively, the plasma erosion resistance of the Al 2 O 3 —Y 2 O 3 complex oxide film is improved, and it is possible to solve the disadvantage that it itself becomes a source of particles.
（実施例２）
この実施例では、Ａｌ基材（寸法：幅３０ｍｍ×長さ５０ｍｍ×厚さ５ｍｍ）の表面に、アンダーコートとして８０mass％Ｎｉ−２０mass％Ｃｒを８０μｍ、その上にトップコートとしてＡｌ2Ｏ3、Ｙ2Ｏ3またはＡｌ3Ｏ3−Ｙ2Ｏ3複酸化物の皮膜を２５０μｍ、それぞれプラズマ溶射法によって形成した。その後、この溶射皮膜の表面を、前記粗さ計を用いて、粗さ曲面のＲｓｋ値を測定し、それぞれ電子ビーム照射処理を行った。
(Example 2)
In this example, 80 mass% Ni-20 mass% Cr as an undercoat is 80 μm on the surface of an Al base (dimension: width 30 mm × length 50 mm × thickness 5 mm), and a topcoat is Al 2 O 3 . A film of Y 2 O 3 or Al 3 O 3 —Y 2 O 3 double oxide was formed in a thickness of 250 μm by plasma spraying. Thereafter, the Rsk value of the roughness curved surface was measured on the surface of the sprayed coating using the roughness meter, and each was subjected to an electron beam irradiation treatment.
これらの溶射皮膜試験片を下記の条件でプラズマエッチングを行い、エッチング作用によって削られて飛散するパーティクル粒子数を、同じチャンバー内に配設した直径３インチのシリコンウエハーの表面に付着する粒子数によって比較した。なお、付着する粒子数は表面検査装置（拡大鏡）によって調査し、概ね０．２μｍ以上の粒子を対象として行った。
（１）雰囲気ガス条件
ＣＨＦ3８０：Ｏ2１００：Ａｒ１６０（数字は１分間当りの流量ｃｍ3）
（２）プラズマ照射出力
高周波電力：１３００Ｗ
圧力 ：４Ｐａ
温度 ：６０℃
この実験では、比較例として、電子ビーム照射のない皮膜のほか、ＴｉＯ2および８mass％Ｙ2Ｏ3−９２mass％ＺｒＯ2の酸化物セラミック皮膜を同じ条件で試験した。
These sprayed coating specimens are subjected to plasma etching under the following conditions, and the number of particle particles that are scraped and scattered by the etching action depends on the number of particles that adhere to the surface of a 3-inch diameter silicon wafer disposed in the same chamber. Compared. The number of adhered particles was examined by a surface inspection device (magnifying glass), and was generally targeted for particles of 0.2 μm or more.
(1) Atmospheric gas conditions CHF 3 80: O 2 100: Ar160 (numbers are flow rate cm 3 per minute)
(2) Plasma irradiation output High frequency power: 1300W
Pressure: 4Pa
Temperature: 60 ° C
In this experiment, as a comparative example, an oxide ceramic film of TiO 2 and 8 mass% Y 2 O 3 -92 mass% ZrO 2 was tested under the same conditions in addition to a film without electron beam irradiation.
表２は、この実験の結果を示すものである。この結果から明らかなように、比較例のＴｉＯ2（Ｎｏ．８）は１．８時間また８mass％Ｙ2Ｏ3−９２mass％ＺｒＯ2（Ｎｏ．１０）では３．２時間のプラズマ照射試験によって、パーティクル管理値の３０個を超え、耐プラズマエロージョン性に乏しいことが認められた。これに対し、本発明に適合するＡｌ2Ｏ3、Ｙ2Ｏ3あるいはＡｌ2Ｏ3−Ｙ2Ｏ3複酸化物皮膜では、比較例の皮膜に比較すると、優れた耐プラズマエロージョン性を示すことがわかる。特に、電子ビーム照射した皮膜（Ｎｏ．１、３、５）は、電子ビーム照射しない皮膜（Ｎｏ．２、４、６）に比較して、一段と優れた耐プラズマエロージョン性を示した。
以上の結果から、電子ビーム照射処理は、溶射皮膜の状態（as Spayed)で、ある程度の耐プラズマエロージョン性を有している皮膜に対し、特に有効であり、また、皮膜表面の粗さ曲線の形状（Ｒｓｋ＜０）にも大きな影響を受けず効果的な処理方法であることがみとめられた。
Table 2 shows the results of this experiment. As is clear from this result, TiO 2 (No. 8) of the comparative example is 1.8 hours, and 8 mass% Y 2 O 3 -92 mass% ZrO 2 (No. 10) is 3.2 hours after the plasma irradiation test. It was confirmed that the particle management value exceeded 30 and the plasma erosion resistance was poor. On the other hand, Al 2 O 3 , Y 2 O 3 or Al 2 O 3 —Y 2 O 3 double oxide film suitable for the present invention exhibits excellent plasma erosion resistance as compared with the film of the comparative example. I understand that. In particular, the coatings (No. 1, 3, 5) irradiated with an electron beam exhibited much more excellent plasma erosion resistance than the coatings (No. 2, 4, 6) not irradiated with an electron beam.
From the above results, the electron beam irradiation treatment is particularly effective for a coating having a certain level of plasma erosion resistance in the state of a sprayed coating (as Spayed), and the roughness curve of the coating surface is also shown. It has been found that this is an effective treatment method without being greatly affected by the shape (Rsk <0).
（実施例３）
この実施例では、実施例２の耐プラズマエロ−ジョン試験に提供した全試験片について、熱衝撃試験を実施した。即ち、実施例２の試験に提供した溶射皮膜試験片は、ハロゲンガスを含む腐食性の環境中でプラズマエロージョン試験を受けており、この期間中に、トップコートの気孔を通して腐食性のハロゲンガスが皮膜内部へ侵入し、アンダーコート腐食し、トップコートが剥離しやすくなっている可能性を有するものである。
熱衝撃試験は、３００℃の電気炉に１５分間放置して加熱後、これを２４℃の空気中で２０分間冷却する操作を１サイクルとして、１０サイクル繰返した後、トップコートの変化を目視観察した。この結果、表２記載の全溶射試験片のトップコートには割れや皮膜の剥離はなく、良好な耐熱衝撃性を保持していることが確認された。
(Example 3)
In this example, a thermal shock test was performed on all test pieces provided for the plasma erosion resistance test of Example 2. That is, the thermal spray coating specimen provided for the test of Example 2 was subjected to a plasma erosion test in a corrosive environment containing a halogen gas, and during this period, the corrosive halogen gas was passed through the topcoat pores. There is a possibility that it penetrates into the inside of the film, corrodes the undercoat, and the topcoat is easily peeled off.
In the thermal shock test, the sample was allowed to stand in an electric furnace at 300 ° C for 15 minutes and heated, and then this was cooled for 20 minutes in air at 24 ° C. After 10 cycles, the change in the topcoat was visually observed. did. As a result, it was confirmed that the top coat of all the thermal spray test pieces listed in Table 2 had no cracking or peeling of the film and maintained good thermal shock resistance.
本発明の技術は、真空蒸着、イオンプレーティング、スパッタリング、化学蒸着、レーザ精密加工、プラズマスパッタリングなどに使用される真空容器用部材などの半導体加工装置、薄膜形成装置などの技術分野において用いられる部材としての適用が可能である。 The technology of the present invention is a member used in the technical field of semiconductor processing devices such as vacuum vessel members used for vacuum deposition, ion plating, sputtering, chemical vapor deposition, laser precision processing, plasma sputtering, etc., and thin film forming devices. Can be applied.
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| JP4546448B2 (en) * | 2006-12-22 | 2010-09-15 | トーカロ株式会社 | Thermal spray coating coated member having excellent plasma erosion resistance and method for producing the same |
| US20120183790A1 (en) * | 2010-07-14 | 2012-07-19 | Christopher Petorak | Thermal spray composite coatings for semiconductor applications |
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