JP4545535B2 - 製造装置 - Google Patents

製造装置 Download PDF

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Publication number
JP4545535B2
JP4545535B2 JP2004270728A JP2004270728A JP4545535B2 JP 4545535 B2 JP4545535 B2 JP 4545535B2 JP 2004270728 A JP2004270728 A JP 2004270728A JP 2004270728 A JP2004270728 A JP 2004270728A JP 4545535 B2 JP4545535 B2 JP 4545535B2
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JP
Japan
Prior art keywords
emitting element
substrate
chamber
light emitting
transistor
Prior art date
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Expired - Fee Related
Application number
JP2004270728A
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English (en)
Japanese (ja)
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JP2005116524A5 (enExample
JP2005116524A (ja
Inventor
吉晴 平形
薫 土屋
友幸 岩淵
照幸 藤井
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2004270728A priority Critical patent/JP4545535B2/ja
Publication of JP2005116524A publication Critical patent/JP2005116524A/ja
Publication of JP2005116524A5 publication Critical patent/JP2005116524A5/ja
Application granted granted Critical
Publication of JP4545535B2 publication Critical patent/JP4545535B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electroluminescent Light Sources (AREA)
JP2004270728A 2003-09-19 2004-09-17 製造装置 Expired - Fee Related JP4545535B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004270728A JP4545535B2 (ja) 2003-09-19 2004-09-17 製造装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003329008 2003-09-19
JP2004270728A JP4545535B2 (ja) 2003-09-19 2004-09-17 製造装置

Publications (3)

Publication Number Publication Date
JP2005116524A JP2005116524A (ja) 2005-04-28
JP2005116524A5 JP2005116524A5 (enExample) 2007-08-16
JP4545535B2 true JP4545535B2 (ja) 2010-09-15

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ID=34554673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004270728A Expired - Fee Related JP4545535B2 (ja) 2003-09-19 2004-09-17 製造装置

Country Status (1)

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JP (1) JP4545535B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446506B2 (ja) * 2009-06-26 2014-03-19 日本精機株式会社 有機ｅｌ素子の製造方法
US8845379B2 (en) 2010-06-02 2014-09-30 Nec Lighting, Ltd. Manufacturing method for organic EL lighting device
JP6603831B1 (ja) * 2018-04-11 2019-11-06 堺ディスプレイプロダクト株式会社 有機ｅｌ表示装置及び有機ｅｌ表示装置の製造方法
CN120148380A (zh) * 2025-05-14 2025-06-13 合肥维信诺科技有限公司 显示面板老化设备、生产设备及显示面板制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR870010154A (ko) * 1986-04-09 1987-11-30 원본미기재 전기발광 표시용 인광물질 및 전기발광 매트릭스 표시판과 그의 제조방법
JP2818255B2 (ja) * 1990-05-08 1998-10-30 出光興産株式会社 有機エレクトロルミネッセンス素子の製造方法
JPH05174969A (ja) * 1991-12-25 1993-07-13 Nec Kansai Ltd 分散型ｅｌ用蛍光体の製造方法
JP2002190390A (ja) * 2000-10-10 2002-07-05 Semiconductor Energy Lab Co Ltd 発光装置の修理方法及び作製方法
JP4011337B2 (ja) * 2000-12-12 2007-11-21 株式会社半導体エネルギー研究所 発光装置及びその作製方法。
JP4273715B2 (ja) * 2002-07-18 2009-06-03 セイコーエプソン株式会社 有機ｅｌ素子の製造方法

Also Published As

Publication number Publication date
JP2005116524A (ja) 2005-04-28

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