JP4539679B2 - Method for manufacturing organic electroluminescence device - Google Patents

Description

  The present invention relates to a method for manufacturing an organic electroluminescence device.

Conventionally, in an organic electroluminescence (hereinafter abbreviated as organic EL) device,
A light emitting functional layer including a plurality of circuit elements, an anode, a hole injection layer, an organic EL substance (light emitting element), a cathode, and the like are stacked on a substrate, and these are sandwiched between a substrate and a sealing substrate. Some have a stopped configuration.
Specifically, an anode made of a transparent conductive material such as indium tin oxide (ITO) or tin oxide (SnO ₂ ) is formed on a transparent substrate such as a glass substrate on which switching elements such as thin film transistors are formed. , Polythiophene derivatives (hereinafter abbreviated as PEDOT)
A hole injection layer made of a doped material of the above, a light emitting layer made of a light emitting material such as polyfluorene,
There is one in which a metal material having a low work function such as Ca or a cathode made of a metal compound is sequentially laminated.

In recent years, a manufacturing method using a droplet discharge method has been proposed as a method for manufacturing the organic EL device. In such a manufacturing method, a step of forming a droplet receiving portion is performed prior to the discharge of the droplet. In order to form the droplet receiving portion, a step of forming the semiconductor element (thin film transistor) 300 and the interlayer insulating film 301 shown in FIG. 7A and a step of forming the pixel electrode 302 shown in FIG. FIG. 7C shows a step of forming the first partition wall 303 shown in FIG.
The droplet receiving portion 305 is formed by performing the step of forming the second partition wall 304 shown in d). Then, surface modification treatment such as plasma treatment is performed on the surface of the droplet receiving unit 305 to form a lyophobic unit and a lyophilic unit, and a droplet containing a functional material is dropped into the droplet receiving unit 305. Thus, a functional element is formed (see, for example, Patent Document 1).

Japanese Patent No. 3328297

However, in the above manufacturing method, when the pixel electrode 302 is formed, the resist mask for patterning the pixel electrode 302 is in contact with the material of the pixel electrode 302, so that the residue of the resist mask is the pixel electrode 302. There was a problem of contaminating the surface. Further, since the light emitting functional layer such as the hole injection layer and the light emitting layer is formed on the surface of the pixel electrode 302 thus contaminated, there is a problem that the reliability of the light emitting functional layer is lowered. .

Furthermore, when the interlayer insulating film 301 is applied and formed by using an organic material such as acrylic or polyimide, there are some problems shown below.
(1) The pixel electrode 3 is subjected to a wet process such as wet etching or resist stripping.
By patterning 02 and the first partition 303, the organic material of the interlayer insulating film 301 swells, and stress is generated in the pixel electrode 302 and the first partition 303 that are connected in a plane. Damage to the pixel region (pixel electrode 302), which is important for the area. Further, peeling occurs at the bonding surface between the interlayer insulating film 301 and the first partition wall 303.
(2) When the first partition 303 is formed on the interlayer insulating film 301 made of an organic material by using plasma CVD or the like, the first partition 303 is formed while damaging the organic material surface. The adhesiveness between 303 and the interlayer insulating film 301 is lowered, and the first partition 303 and the interlayer insulating film 301 are easily separated. Here, when the film is peeled off, particles are scattered and the inside of the vacuum container is contaminated. In addition, the presence of the particles on the vacuum vessel or the substrate may reduce the yield of the organic electroluminescence device.
(3) Since the first partition 303 is formed so as to cover the surface of the pixel electrode 302 made of an inorganic material and the interlayer insulating film 301 made of an organic material, the etching rate of the organic material is higher than that of the inorganic material. In addition, the etching controllability when the first partition 303 is etched becomes difficult.

The present invention has been devised in view of the above-described problems, achieves the suppression of damage to the pixel region, the prevention of contamination into the vacuum vessel, and the improvement of the etching controllability of the first partition. An object of the present invention is to provide a method for manufacturing an organic electroluminescent device, an organic electroluminescent device, a substrate for an organic electroluminescent device, and an electronic apparatus.

In order to achieve the above object, the present invention employs the following configuration.
The manufacturing method of the organic electroluminescence device of the present invention is a manufacturing method of an organic electroluminescence device including a light emitting functional layer surrounded by a first partition and a second partition on a first electrode provided for each pixel. A step of sequentially forming a first electrode material and a first barrier rib material on an interlayer insulating film made of an organic material, and patterning the first electrode material and the first barrier rib material for each pixel using a mask having the same shape. The first electrode having a predetermined shape is formed and the first electrode
Patterning a partition wall material for each pixel; removing a portion of the first partition wall material to expose the first electrode; removing a portion of the first partition wall material to form the first electrode; Forming the second barrier rib on the interlayer insulating film and on the first barrier rib material after exposure.
According to another aspect of the present invention, there is provided a method of manufacturing an organic electroluminescent device according to the above-described method of manufacturing an organic electroluminescent device, wherein the first barrier rib material is patterned on a pixel-by-pixel basis according to a mask formed on the first barrier rib material. The first electrode is formed by patterning the first electrode material using the first partition wall material as a mask.
Moreover, the manufacturing method of the organic electroluminescent device of the present invention is a manufacturing method of the above organic electroluminescent device, wherein the first electrode material and the first electrode material are formed according to a shape of a mask formed on the first barrier rib material. The first partition wall material is patterned at a time to form the first electrode having a predetermined shape, and the first partition wall material is patterned for each pixel.
Moreover, the manufacturing method of the organic electroluminescence device of the present invention is a manufacturing method of the above-described organic electroluminescence device, wherein the first electrode material and the first partition wall material are patterned using a dry etching method. The first partition and the first electrode are formed.
Moreover, the manufacturing method of the organic electroluminescence device of the present invention is the manufacturing method of the organic electroluminescence device described above, wherein adhesion between the interlayer insulating film and the first electrode is provided on the interlayer insulating film. A property imparting film is formed.
Moreover, the manufacturing method of the organic electroluminescent device of the present invention is the above-described manufacturing method of the organic electroluminescent device, wherein when the first partition wall material is formed, the interlayer insulating film is made of the first electrode material. It is protected.
The method for manufacturing an organic electroluminescent device according to the present invention is a method for manufacturing the above organic electroluminescent device, wherein the first barrier rib has a side portion and an upper portion, and the second barrier rib is the first barrier rib. The barrier rib is formed so that a part of the upper part of the partition wall is exposed.
Moreover, the manufacturing method of the organic electroluminescent apparatus of this invention is a manufacturing method of said organic electroluminescent apparatus, Comprising: The said 1st partition material is a silicon oxide, It is characterized by the above-mentioned.
The method for manufacturing an organic EL device according to the present invention is a method for manufacturing an organic EL device including a light emitting functional layer surrounded by a first partition and a second partition on a first electrode, wherein the first electrode is formed on an interlayer insulating film. Material and first
A step of sequentially forming a barrier rib material, a step of patterning the first electrode material and the first barrier rib material with a mask having the same shape to form the first electrode and the first barrier rib, and the interlayer insulating film And a step of forming the second barrier rib on the first barrier rib material.

In this way, in the step of forming the first electrode, the resist mask for patterning the first electrode and the first electrode material are kept in a non-contact state, and the first electrode is formed by the residue of the resist mask. Contamination can be prevented. Therefore, since a light emitting functional layer such as a hole injection layer or a light emitting layer can be formed on the first electrode having a clean surface state, the reliability of the light emitting functional layer is improved and a good organic EL device can be provided. it can.

The interlayer insulating film is preferably made of an organic material. By using the organic material, an interlayer insulating film can be formed by a wet film formation method, so that it can be formed at a low manufacturing cost with a simple facility as compared with a vacuum film formation method. Further, although it is difficult to increase the film thickness by the vacuum film formation method, it is possible to easily increase the film thickness by the wet film formation method.

In addition, since the first electrode material is formed on the interlayer insulating film before forming the first partition wall material, the interlayer insulating film is protected by the first electrode material. Therefore, even if the first barrier rib material is formed using the plasma CVD method, the interlayer insulating film itself is not exposed to plasma, so that plasma damage to the interlayer insulating film can be prevented and the first insulating film can be stably formed. One barrier rib material can be formed.
In addition, since the first partition is formed only on the first electrode, the total area of the first electrode and the first partition in contact with the organic material is smaller than that in the related art. Accordingly, when stress (swelling or mechanical stress in the wet process) is generated in the interlayer insulating film during the manufacturing process or in the state of the finished product, the stress is reduced, so that the occurrence of breakage or peeling can be suppressed.

Further, since the interlayer insulating film and the first partition are kept in contact with each other, peeling at the joint surface between the interlayer insulating film and the first partition, which has been a problem in the prior art, does not occur.
In addition, by adopting an organic material as the material of the second partition, since both the interlayer insulating film and the second partition are made of an organic material, the adhesion between the interlayer insulating film and the second partition can be improved. And in the said structure, since the organic material of comparable hardness is comprised in contact, the intensity | strength improvement of an organic EL apparatus is also realizable.

Even if the first barrier rib material is formed by using a method such as plasma CVD, the interlayer insulating film is not exposed when the process is performed. Therefore, the organic material of the interlayer insulating film is etched by plasma damage. Therefore, it is possible to prevent contamination of the manufacturing apparatus due to the etching of the organic material.
In the prior art, since the first barrier rib material is formed on a plurality of layer films composed of the interlayer insulating film and the first electrode material, it is difficult to control the etching of the first barrier rib material. In the invention, since the first partition is formed only on the first electrode material, good etching controllability can be obtained, and uneven etching rate of the first partition in the plane can be suppressed.

In addition, since the first electrode material and the first partition wall material are sequentially formed on the interlayer insulating film and patterned with the same shape mask, it is not necessary to pattern each of the first electrode material and the first partition wall material. Simplification of the process can be achieved.

And in such a manufacturing method, the droplet receiving part which consists of a 1st partition and a 2nd partition is formed on a 1st electrode. Then, by using the droplet discharge method, the light emitting functional layer can be formed in the droplet receiving portion by forming the liquid material of the light emitting functional layer into droplets and discharging them to the droplet receiving portion.

The method of manufacturing the organic EL device further includes a step of removing a part of the first partition wall to expose the first electrode.
Here, after forming a mask for removing a portion of the first partition, the first electrode is exposed in accordance with the mask.
According to this configuration, the liquid material of the light emitting functional layer is discharged toward the first electrode using the droplet discharge method, so that the liquid material is landed on the exposed surface of the first electrode, and the light emitting functional layer is formed. Can be formed.

In the method of manufacturing the organic EL device, the step of forming the second partition includes forming an opening in a portion corresponding to the first electrode after the second partition material is formed on the entire surface of the substrate. It is characterized by being done by.
Here, after the second partition wall material is formed on the entire surface by a wet film formation method, a mask corresponding to the pattern of the opening is arranged, and the opening is formed according to the mask pattern.
In this case, by providing the opening in the second partition wall material, the droplet receiving portion can be formed in the portion corresponding to the first electrode.

In the method of manufacturing the organic EL device, the second electrode is exposed after the first electrode is exposed.
It is characterized by forming a partition wall.
If it does in this way, the whole surface application of the 2nd partition material and formation of an opening will be performed in the state where the 1st electrode was exposed. Thus, the first electrode can be reliably exposed after the opening is formed.

In the method of manufacturing the organic EL device, the first partition is formed after the second partition is formed.
It is characterized by exposing the electrodes.
In this case, the first partition is patterned using the second partition as a mask and the first electrode is exposed. Therefore, a mask only for exposing the first electrode becomes unnecessary, and the mask can be reduced. Therefore, simplification of the manufacturing process can be achieved.

In the method of manufacturing the organic EL device, the opening area of the second partition is increased after the first electrode is exposed.
If it does in this way, the surface of the 1st partition covered with the 2nd partition will be exposed, and the exposed area of the 1st partition will become large. Therefore, when the liquid material of the light emitting functional layer is applied and formed on the droplet receiving portion by using the droplet discharge method in a later step, the contact area between the liquid material and the first partition wall is increased. In other words, the liquid material is suitably wetted and spread on the first partition having lyophilicity, and the liquid material and the first electrode can be reliably contacted.

In the method of manufacturing the organic EL device, the first barrier rib material is patterned according to a mask formed on the first barrier rib material to form a first barrier rib, and the first barrier rib is used as a mask. The first electrode is formed by patterning the first electrode material.
If it does in this way, the 1st partition according to a mask shape can be formed, and the 1st electrode according to the plane shape of the 1st partition can be formed. Thus, the first partition and the first electrode can be formed with the same shape mask.

In the method for manufacturing the organic EL device, the first electrode material and the first barrier rib material are collectively patterned according to a shape of a mask formed on the first barrier rib material, and the first barrier rib is formed. And forming the first electrode.
If it does in this way, the 1st partition and the 1st electrode according to the same mask shape can be formed. Furthermore, since the first partition and the first electrode are formed by batch patterning, the number of processes can be simplified. Further, in this method, since the first partition is not used as a mask, the wet etching solution or the etching gas for patterning the first electrode material does not come into contact with the upper surface of the first partition. Therefore, the influence of the wet etching solution and the etching gas on the upper surface of the first partition can be prevented.

In the method of manufacturing the organic EL device, the first partition material and the first electrode are formed by patterning the first electrode material and the first partition material using a dry etching method. It is said.
Since the dry etching method is used in this way, the interlayer insulating film (organic material) due to the wet process does not swell, and thus the generation of stress in the interlayer insulating film can be prevented.
In the prior art, when the first barrier rib material is formed by the plasma CVD method, the first barrier rib and the interlayer insulating film are easily peeled off and cause a contamination in the vacuum vessel. Since dry etching (plasma treatment) is performed in the patterning process instead of the film forming process, contamination in the vacuum vessel due to film peeling does not occur.

The organic EL device manufacturing method is characterized in that an adhesion providing film for providing adhesion between the interlayer insulating film and the first electrode is formed on the interlayer insulating film.
In this way, the adhesion-imparting film ensures the close contact between the interlayer insulating film and the first electrode, so that the strength of the organic EL device can be improved.

The organic EL device of the present invention is an organic EL device including a light emitting functional layer surrounded by a first barrier rib and a second barrier rib on a first electrode, wherein the first barrier rib is disposed on a side of the light emitting functional layer. And a second barrier rib, wherein the first barrier rib is provided only on the first electrode.
Here, after the first electrode material and the first barrier rib are sequentially formed on the interlayer insulating film, the first electrode material and the first barrier rib material are patterned with the same shape mask. Is formed. If it does in this way, the effect similar to the manufacturing method described above will be acquired.

The organic EL device substrate of the present invention is an organic electroluminescent device substrate in which a first partition is formed on a first electrode, and the first electrode is formed on an interlayer insulating film. The first partition is provided only on the electrode.
Here, after the first electrode material and the first barrier rib are sequentially formed on the interlayer insulating film, the first electrode material and the first barrier rib material are patterned with the same shape mask. Is formed.
If it does in this way, the effect similar to the manufacturing method described above will be acquired.
Further, by forming a second partition wall on such an organic EL device substrate and forming a light emitting functional layer surrounded by the first partition wall and the second partition wall on the first electrode, The same effect as the organic EL device can be obtained.

In addition, an electronic apparatus according to the present invention is characterized by including the organic EL device described above.
Examples of such electronic devices include information processing devices such as mobile phones, mobile information terminals, watches, word processors, and personal computers. Moreover, a television having a large display screen, a large monitor, and the like can be exemplified. Thus, by employing the organic EL device of the present invention for the display unit of an electronic device, it is possible to provide an electronic device with good display characteristics.

Next, with reference to FIGS. 1-5, the manufacturing method of the organic electroluminescent apparatus of this invention,
An organic electroluminescence device, a substrate for an organic electroluminescence device, and an electronic device will be described.
This embodiment shows one mode of the present invention, does not limit the present invention, and can be arbitrarily changed within the scope of the technical idea of the present invention. In each figure shown below,
In order to make each layer and each member large enough to be recognized on the drawing, the scale is different for each layer and each member.

(First Embodiment of Manufacturing Method of Organic EL Device)
A first embodiment of a method for manufacturing an organic EL device will be described with reference to FIG.
Here, FIGS. 1A to 1E and 2 are process diagrams for explaining a method of manufacturing an organic EL device, and FIG. 3 is a diagram for explaining FIG. 1C in detail.

First, as shown in FIG. 1A, a thin film transistor 20 and an interlayer insulating film 3 are formed on a substrate 10.
0 and contact hole 31 are formed.
The substrate 10 is a glass substrate. In addition, glass is not limited as a material, For example, materials, such as quartz and resin (plastic, plastic film), may be employ | adopted.
By adopting such a transparent or translucent material, it is possible to manufacture a so-called bottom emission type organic EL device that extracts emitted light from the substrate 10 side. Also,
As will be described later, in a so-called bottom emission type in which emitted light is extracted from the sealing substrate side, a non-transparent material such as a metal substrate may be employed as the material of the substrate 10.

The thin film transistor 20 includes a base insulating film 21, a semiconductor layer 22, a gate insulating film 23,
The gate electrode 24, the source electrode 25S, the drain electrode 25D, and the upper insulating film 26 are included.
Here, the base insulating film 21 is an insulating film formed on the surface of the substrate 10 and is a layer film for keeping the substrate 10 and the semiconductor layer 22 in a non-contact state.
The semiconductor layer 22 includes a source region 22S, a channel region 22C, and a drain region 2.
2D, and the source region 22S and the drain region 2 by the action of the electric field of the gate electrode 24
It is a layer film that performs switching between 2D.
The gate insulating film 23 is a layer film provided between the gate electrode 24 and the semiconductor layer 22, and is for obtaining electrical insulation between the semiconductor layer 22 and the gate electrode 24.
The gate electrode 24 is a layer film that is disposed to face the channel region 22C with the gate insulating film 23 interposed therebetween. The thin film transistor 20 depends on the amount of current flowing through the gate electrode 24.
The switching characteristics can be obtained as desired.
The source electrode 25S and the drain electrode 25D are electrodes connected to the source region 22S and the drain region 22D through contact holes formed in the upper insulating film 26, respectively.
The layer film and the electrodes constituting such a thin film transistor 20 are manufactured by a known manufacturing method. For example, various film forming methods, photolithography methods, etching methods, and the like are used. Further, in order to form the source region 22S, the channel region 22C, and the drain region 22D in the semiconductor layer 22, an ion doping method or the like is employed.

The interlayer insulating film 30 is formed by adopting an organic or inorganic material. Here, when an organic material is employed as the interlayer insulating film 30, for example, an acrylic resin or a polyimide resin is preferably employed. Among such materials, non-photosensitive resins and photosensitive resins are employed.
In addition, when forming such an organic material, a wet film forming method is preferably employed. As the wet film forming method, a spin coating method, a dip method, a slit coating method, or the like is used. Among such wet film forming methods, the spin coating method is suitable, and it is possible to form a film with a uniform film thickness. Further, after the film formation, it is necessary to cure the resin by performing a heat treatment or the like.

Further, when an inorganic material is employed as the interlayer insulating film 30, silicon oxide, silicon nitride, silicon oxynitride, or the like is employed.
In the case of depositing an inorganic material, a vacuum film formation method or a wet film formation method is preferably employed. As the vacuum film formation method, a CVD method, a sputtering method, a vapor deposition method, or the like is employed. Further, it is preferable to employ the same spin coating method as the wet film formation method and perhydropolysilazane as the inorganic material. Perhydropolysilazane is a substance name of a compound having — (SiH ₂ NH) — as a basic unit. Further, since the perhydropolysilazane is an inorganic polymer that is soluble in an organic solvent, it can be handled as a liquid material by mixing with the organic solvent. In addition, perhydropolysilazane is fired at a high temperature in an inert atmosphere,
It has the property of undergoing thermosetting shrinkage associated with the dehydrogenation reaction and being converted into silicon nitride ceramics. Moreover, it has the property of reacting with water or oxygen by being fired in the atmosphere or in an atmosphere containing water vapor, and converted into silicon oxide.

The wet film formation method as described above is easier to increase in thickness than the vacuum film formation method. Therefore, it is more preferable to employ the wet film formation method when forming the interlayer insulating film 30. Also,
By increasing the thickness, the uneven shape of the thin film transistor 20 is not transferred to the surface of the interlayer insulating film 30, and the surface of the interlayer insulating film 30 is flattened.

Further, a contact hole 31 is formed in the interlayer insulating film 30.
Here, the method for forming the contact hole 31 is different depending on whether the interlayer insulating film 30 is made of a non-photosensitive resin or an inorganic material, and when the interlayer insulating film 30 is made of a photosensitive resin.
First, the case where the interlayer insulating film 30 is made of a non-photosensitive resin or an inorganic material will be described.
In this case, patterning is performed by an etching process using a photoresist film. Specifically, after a photoresist film is applied and formed on the interlayer insulating film 30, a heat treatment, an exposure process, and a development process are performed to form an opening, and an etching process is performed to form a non-photosensitive layer corresponding to the opening. Contact hole 31 by removing conductive resin and inorganic material
Is formed.
On the other hand, when the interlayer insulating film 30 is made of a photosensitive resin, a photoresist film is not necessary, and the interlayer insulating film 30 itself is sequentially subjected to a heat treatment, an exposure process, and a development process, thereby forming a contact hole. 31 is formed.

Next, as shown in FIG. 1B, the pixel electrode material (first electrode material) 4 is formed on the interlayer insulating film 30.
1 and a first barrier rib material (first barrier rib material) 42 are formed (first electrode material and first barrier rib on the interlayer insulating film).
Step of sequentially forming a partition wall material).
Here, when the pixel electrode material 41 and the first partition material 42 are formed, the pixel electrode material 41 and the first partition material 42 are continuously formed without patterning the pixel electrode material 41.
The pixel electrode material 41 is made of a transparent metal such as ITO. In addition, for example, an indium oxide / zinc oxide based amorphous transparent conductive film (Indium Zinc Oxide: IZO /
(I z O) (registered trademark)) (made by Idemitsu Kosan Co., Ltd.) can be used. In addition,
In this embodiment, ITO is used. In the case of the top emission type, it is not necessary to use a material having a light transmission property. For example, Al or the like may be provided on the lower layer side of ITO and used as a reflection layer.
Further, as the material of the first partition wall material 42, a lyophilic material is employed, and in this embodiment, silicon oxide is employed. In addition, lyophilic here means having a lyophilic property relative to the liquid material applied later than the material of the second partition wall (described later).
As a method for forming the pixel electrode material 41 and the first partition wall material 42, a vacuum film formation method is preferably employed.

Next, as shown in FIG. 1C, the pixel electrode material 41 and the first barrier rib material 42 are patterned to form the pixel electrode (first electrode) 41a and the first barrier rib 42a (the first electrode material and the first barrier rib 42a). 1 partition wall material is patterned with a mask having the same shape to form a first electrode and a first partition wall).
Here, the patterning of the pixel electrode material 41 and the first barrier rib material 42 will be described in detail with reference to FIG. FIG. 3 is a diagram showing the main parts of the interlayer insulating film 30, the pixel electrode material 41, and the first partition material 42 in FIG. 1C, and the pixel electrode 41a and the first partition 4 are etched by etching.
It is process drawing until 2a is formed. In FIG. 3, the contact hole 31 is not shown, but the contact hole 31 is formed in a not-shown part, and the pixel electrode material 41 and the drain electrode 25 </ b> D are connected via the contact hole 31. It shall be.

As shown in FIG. 3A, first, a mask (a mask having the same shape) PR is formed. The mask PR is a heat treatment for a photoresist film applied and formed by spin coating.
It is formed by performing an exposure process and a development process.

Next, as shown in FIG. 3B, the pixel electrode material 41 and the first partition material 42 are etched while the mask PR is left to form the pixel electrode 41a and the first partition 42a.
Here, as the etching process, a wet etching method or a dry etching method is used. In the wet etching method, an etchant mainly composed of hydrofluoric acid (HF) is preferably used as an etching solution for removing the silicon oxide of the first partition wall material 42. In addition, aqua regia is suitably used as an etching solution for removing the ITO of the pixel electrode material 41.
In such a wet etching method, after the first partition wall material 42 is patterned by being immersed in an HF etchant, the interlayer insulating film 30 and the pixel electrode material 41 are cleaned,
Thereafter, the pixel electrode 41a is patterned by dipping in aqua regia.

In the dry etching method, the first barrier rib material 42 is removed by exposing the first barrier rib material 42 to plasma of a fluorine-based gas.
Further, in the dry etching method for removing the ITO of the pixel electrode material 41, HBr,
A halide gas such as HI is used.
In such a dry etching method, the first partition wall 42a and the pixel electrode 41a can be formed in a lump because processing can be performed while changing the etching gas in the same chamber. In addition, the shape of the side portions of the first partition wall 42a and the pixel electrode 41a shown in FIG. 3B is a shape in which erosion E occurs, but anisotropic etching (RIE) is used among dry etching methods. By using it, the shape of the side part can be suitably controlled.
In FIG. 3B, since it is important to leave the mask PR, it is preferable to perform the dry etching method without using a plasma that removes the mask PR, for example, oxygen gas plasma. .

Next, the patterning of the pixel electrode 41a and the first partition 42a is completed by removing the mask PR as shown in FIG.

Next, returning to FIG. 1, the manufacturing method of the organic EL device will be described.
As shown in FIG. 1D, a part of the first partition wall 42a is removed to expose the pixel electrode 41a,
An electrode exposed portion 41b is formed (step of removing a part of the first partition wall to expose the first electrode).
Here, a mask (not shown) is formed on the first partition 42a, and the electrode exposed portion 41b is formed by etching the first partition 42a according to the pattern of the mask. First partition 4
As the etching method 2a, wet etching and dry etching are preferably employed as described above. Moreover, the partition side part 42b is formed in the 1st partition 42a by such an etching method. The partition side portion 42b is preferably inclined at a predetermined angle from the surface of the electrode exposed portion 41b.

The organic EL device substrate 2 is completed by the manufacturing method described in FIGS. Next, a method for forming an organic EL device by sequentially forming the second partition walls and the light emitting functional layer will be described with reference to FIGS.

As shown in FIG. 1E, in the organic EL device substrate 2, a second partition 45 is formed so as to cover the interlayer insulating film 30 and the first partition 42a (on the interlayer insulating film and the first partition material). Step of forming a second partition wall on top). The second partition 45 is formed with the electrode exposed portion 41b formed (step of forming the second partition after exposing the first electrode).

Here, the method of forming the second partition 45 is performed by forming the opening 45a corresponding to the pixel electrode 41a after forming the material of the second partition 45 on the entire surface.
As the material of the second partition 45, an organic material such as an acrylic resin or a polyimide resin is suitable, and a non-photosensitive resin or a photosensitive resin is employed. In addition, when forming such an organic material, a wet film forming method is preferably employed. As the wet film forming method, a spin coating method, a dip method, a slit coating method, or the like is used. Among such wet film forming methods, the spin coating method is suitable, and it is possible to form a film with a uniform film thickness. After film formation,
The resin is cured by heat treatment or the like.
Furthermore, the material of the second partition 45 and the material of the interlayer insulating film 30 are preferably the same. Alternatively, it is preferable to form the same organic material. In this way, the adhesion between the materials is improved and the thermal expansion coefficient is substantially the same, so that the structure is stable against thermal stress and mechanical stress.

In addition, the method of forming the opening 45a differs depending on whether the second partition 45 is made of a non-photosensitive resin or a case where it is made of a photosensitive resin.
First, in the case of a non-photosensitive resin, patterning is performed by an etching process using a photoresist film. Specifically, after a photoresist film is applied and formed on the interlayer insulating film 30, heat treatment, exposure processing, and development processing are performed to form a mask opening, and etching is performed to correspond to the mask opening. The opening 45a is formed by removing the non-photosensitive resin.
On the other hand, when the second partition 45 is made of a photosensitive resin, a photoresist film is not necessary, and the second partition 45 itself is sequentially subjected to a heat treatment, an exposure process, and a development process, thereby opening the opening. 45a is formed.

In forming such an opening 45a, it is preferable to expose the partition side portion 42b and the first partition upper portion 42c in the first partition 42a. In this way, when the inkjet method (droplet discharge method) is used in a later step, it is possible to suitably wet and spread the droplets in the vicinity of the first partition wall 42a.

Further, by forming the opening 45a, the droplet receiving portion 46 surrounded by the first partition wall 42a and the second partition wall 45 is formed on the pixel electrode 41a. Further, O _{2 is applied} to the droplet receiving portion 46.
Plasma treatment, CF ₄ plasma treatment, or the like is performed to make the pixel electrode 41a lyophilic and the second partition 45 lyophobic. As a result, the liquid material ejected by the ink jet method is used as the droplet receiving portion 46.
In addition, the liquid material can be suitably wetted and spread in the droplet receiving portion 46.

Next, as shown in FIG. 2, the light emitting functional layer 47 and the cathode 53 are formed, and the substrate 10 and the sealing substrate 56 are bonded together via a sealing resin (not shown), thereby completing the organic EL device 1. It becomes. Here, a getter agent 55 that absorbs moisture and oxygen is attached to the inner surface of the sealing substrate 56 between the substrate 10 and the sealing substrate 56. The space is filled with nitrogen gas to form a nitrogen gas filled layer 54. Under such a configuration, moisture and oxygen are prevented from penetrating into the organic EL device 1, thereby extending the lifetime of the organic EL device 1. Such an organic EL device 1 is a so-called bottom emission type organic EL device that extracts emitted light from the substrate 10 side. Furthermore, it is preferable to employ the same material as the material of the second partition 45 and the material of the interlayer insulating film 30 as the material of the sealing resin. Alternatively, it is preferable to form the same organic material. In this way, the adhesion between the materials is improved and the thermal expansion coefficient is substantially the same, so that the structure is stable against thermal stress and mechanical stress.

Next, each structure of the light emitting functional layer 47 and the cathode 53 will be described.
The light emitting functional layer 47 has a structure in which a hole injection layer 50, a light emitting layer 51, and an electron injection layer 52 are stacked from the pixel electrode 41a side toward the cathode 53.

As a material for forming the hole injection layer 50, in particular, a dispersion of 3,4-polyethylenediothiophene / polystyrene sulfonic acid (PEDOT / PSS), that is, 3,4-polyethylenedioxy in polystyrene sulfonic acid as a dispersion medium. A dispersion in which thiophene is dispersed and further dispersed in water is preferably used.
In addition, as a forming material of the positive hole injection layer 50, various things can be used, without being limited to the said thing. For example, a material obtained by dispersing polystyrene, polypyrrole, polyaniline, polyacetylene or a derivative thereof in an appropriate dispersion medium such as the aforementioned polystyrene sulfonic acid can be used.

As a material for forming the light emitting layer 51, a known light emitting material capable of emitting fluorescence or phosphorescence is used. In addition, the light emitting layer 51 of each color of R (red), G (green), and B (blue).
By providing for each of the plurality of pixel electrodes 41a, an organic EL device capable of full color display is obtained.
Specific examples of the material for forming the light emitting layer 51 include (poly) fluorene derivative (PF), (poly) paraphenylene vinylene derivative (PPV), polyphenylene derivative (PP), polyparaphenylene derivative (PPP), and polyvinylcarbazole (PVK). ), Polythiophene derivatives, and polysilanes such as polymethylphenylsilane (PMPS) are preferably used. In addition, these polymer materials include polymer materials such as perylene dyes, coumarin dyes, rhodamine dyes, rubrene, perylene, 9,10-diphenylanthracene, tetraphenylbutadiene, Nile red, coumarin 6, and quinacridone. It can also be used by doping a low molecular weight material such as.
Further, as a material for forming the red light emitting layer 51, for example, MEHPPV (poly (3-methoxy 6- (3-ethylhexyl) paraphenylene vinylene) is used, and as a material for forming the green light emitting layer 51, for example, polydioctylfluorene and F8BT ( For example, polydioctylfluorene may be used as a material for forming the blue light-emitting layer 51 in a mixed solution of dioctylfluorene and benzothiadiazole). There is no limitation on the thickness, and a preferable film thickness is adjusted for each color.

The electron injection layer 52 is formed on the light emitting layer 51. The material of the electron injection layer 52 is appropriately selected according to various materials of the light emitting layer 51. Specific materials include alkali metal fluorides such as LiF (lithium fluoride), NaF (sodium fluoride), and KF.
(Potassium fluoride), RbF (rubidium fluoride), CsF (cesium fluoride), etc.
Alternatively, an alkali metal oxide, that is, Li ₂ O (lithium oxide), Na ₂ O (sodium oxide), or the like is preferably used. The thickness of the electron injection layer 52 is 0.5 nm to
The thickness is preferably about 10 nm.

The cathode 53 has an area larger than the total area of the electron injection layer 52 and is formed so as to cover the first area. The first cathode made of a low work function metal provided on the electron injection layer 52; First
And a second cathode that is provided on the cathode and protects the first cathode. The metal having a low work function for forming the first cathode is preferably a metal having a work function of 3.0 eV or less, specifically, Ca (work function; 2.6 eV), Sr (work function; 2 .1 eV), Ba
(Work function; 2.5 eV) is preferably used. The second cathode is provided to cover the first cathode and protect it from oxygen, moisture, and the like, and to increase the conductivity of the entire cathode 53. The material for forming the second cathode is not particularly limited as long as it is chemically stable and has a relatively low work function, and any material such as a metal or an alloy can be used. Al (aluminum), Ag (silver), or the like is preferably used.

In addition, although the organic EL device 1 having the above configuration has a bottom emission type structure, it is not limited thereto. The organic EL device 1 can also be applied to a so-called top emission type in which emitted light is extracted from the sealing substrate 30 side.
In the case of a top emission type organic EL device, the sealing substrate 3 on the opposite side of the substrate 10 is used.
Since the configuration is such that emitted light is extracted from the 0 side, either a transparent substrate or an opaque substrate can be used. Examples of the opaque substrate include a thermosetting resin and a thermoplastic resin in addition to a ceramic sheet such as alumina and a metal sheet such as stainless steel that has been subjected to an insulation treatment such as surface oxidation.

As described above, in this embodiment, the pixel electrode material 41 and the first electrode are formed on the interlayer insulating film 30.
The step of sequentially forming the partition wall material 42 and the pixel electrode material 41 and the first partition wall material 42 as a mask P
The pixel electrode 41a is formed by patterning with R to form the pixel electrode 41a and the first partition wall 42a, and forming the second partition wall 45 on the interlayer insulating film 30 and the first partition wall 42a. The resist mask for patterning and the pixel electrode material 41 are kept in a non-contact state. Accordingly, it is possible to prevent the pixel electrode 41a from being contaminated by the resist mask residue. Accordingly, since the light emitting functional layer 47 such as the hole injection layer 50 and the light emitting layer 51 can be formed on the pixel electrode 41a having a clean surface state, the reliability of the light emitting functional layer 47 is improved, and the excellent organic EL device 1 is improved. Can be provided.

In addition, the interlayer insulating film 30 is preferably made of an organic material. In this case, the interlayer insulating film 30 can be formed by a wet film forming method. A film can be formed at a low manufacturing cost. Further, although it is difficult to increase the film thickness by the vacuum film formation method, it is possible to easily increase the film thickness by the wet film formation method.

In addition, since the pixel electrode material 41 is formed on the interlayer insulating film 30 before the first partition material 42 is formed, the interlayer insulating film 30 is protected by the pixel electrode material 41. Therefore, even if the first barrier rib material 42 is formed using the plasma CVD method, the interlayer insulating film 30 itself is not exposed to plasma, so that plasma damage to the interlayer insulating film 30 can be prevented and stable. Thus, the first partition wall material 42 can be formed.
In addition, since the first partition wall 42a is formed only on the pixel electrode 41a, the total area of the pixel electrode 41a and the first partition wall 42a in contact with the organic material is smaller than that in the related art. Therefore, when stress is generated in the interlayer insulating film 30 during the manufacturing process or in the state of the finished product,
Since the stress is reduced, the occurrence of breakage or peeling can be suppressed.

Further, since the interlayer insulating film 30 and the first partition wall 42a are kept in non-contact, peeling at the joint surface between the interlayer insulating film 30 and the first partition wall 42a, which has been a problem in the prior art, does not occur.
In addition, by adopting an organic material as the material of the second partition 45, both the interlayer insulating film 30 and the second partition 45 are made of an organic material.
It is possible to improve the adhesion. And in the said structure, since the organic material of comparable hardness contacts and is comprised, the intensity | strength improvement of the organic EL apparatus 1 is also realizable.

Even if the first barrier rib material 42 is formed using a method such as plasma CVD, the interlayer insulating film 30 is not exposed when the process is performed, and therefore the organic material of the interlayer insulating film 30 is damaged by plasma. Therefore, the contamination of the manufacturing apparatus accompanying the etching of the organic material can be prevented.
In the prior art, the first partition material 42 is the interlayer insulating film 30 and the pixel electrode material 41.
However, in the present embodiment, the first barrier rib 42a is formed only on the pixel electrode material 41. However, in the present embodiment, the first barrier rib material 42a is formed only on the pixel electrode material 41. Good etching controllability can be obtained, and uneven etching rate of the first partition wall 42a in the surface can be suppressed.

Further, since the pixel electrode material 41 and the first partition wall material 42 are sequentially formed on the interlayer insulating film 30 and patterned with the mask PR, it is necessary to pattern each of the pixel electrode material 41 and the first partition wall material 42. Therefore, simplification of the process can be achieved.

In such a manufacturing method, the first partition wall 42a and the second partition wall 42a are formed on the pixel electrode 41a.
A droplet receiving portion 46 composed of the partition wall 45 is formed. Then, by using the ink jet method, the liquid material of the light emitting functional layer 47 is formed into droplets and discharged to the droplet receiving portion 46, and the droplet receiving portion 4
The light emitting functional layer 47 can be formed in the substrate 6.

In addition, since the pixel electrode 41a is exposed by removing a part of the first partition wall 42a,
By discharging the liquid material of the light emitting functional layer 47 toward the pixel electrode 41a using the droplet discharge method, the light emitting functional layer 47 can be formed by landing the liquid material on the electrode exposed portion 41b.

Further, in the step of forming the second partition 45, since the opening 45a is formed in the portion corresponding to the pixel electrode 41a after the material of the second partition 45 is formed on the entire surface of the substrate 10, the pixel electrode 41a is formed. The droplet receiving portion 46 can be formed in a portion corresponding to the above.

Further, since the second partition 45 is formed after the electrode exposed portion 41b is formed, the electrode exposed portion 41 is formed.
The entire surface of the material of the second partition wall 45 and the opening 45a are formed on b. Thus, the electrode exposed portion 41b can be reliably exposed after the opening 45a is formed.

In addition, since the pixel electrode material 41 and the first partition material 42 are collectively patterned according to the shape of the mask PR formed on the first partition material 42, the first partition 42a and the pixel electrode 41a are formed. The first partition wall 42a and the pixel electrode 41a can be formed in accordance with the shape of the mask PR. Furthermore, since the first partition wall 42a pixel electrode 41a is formed by batch patterning, the number of steps can be simplified. Further, in this method, since the first partition 42a is not used as a mask, the wet etching solution or the etching gas for patterning the pixel electrode material 41 does not come into contact with the upper surface of the first partition 42a. Accordingly, it is possible to prevent the wet etching solution or the etching gas from affecting the upper surface of the first partition wall 42a.

In the method of manufacturing the organic EL device 1, the pixel electrode material 41 and the first partition wall material 42 are patterned using a dry etching method, and the first partition wall 42a and the pixel electrode 41a are patterned.
It is characterized by forming.
Since the dry etching method is used in this way, the interlayer insulating film 30 resulting from the wet process is used.
Does not swell, the generation of stress in the interlayer insulating film 30 can be prevented.
In the prior art, when the first barrier rib material 42 is formed by the plasma CVD method, the first barrier rib 42a and the interlayer insulating film 30 are easily peeled off, resulting in contamination in the vacuum vessel. In the present embodiment, since dry etching (plasma treatment) is performed in the patterning process instead of the film forming process, the contamination in the vacuum vessel due to the film peeling is not caused.

Moreover, the organic EL device 1 can be manufactured by the above manufacturing method. Organic E
The L device substrate 2 can also be manufactured. These have the same effects as the manufacturing method described above.

(Second Embodiment of Manufacturing Method of Organic EL Device)
Next, a second embodiment of the method for manufacturing an organic EL device will be described with reference to FIGS.
Here, FIGS. 4A to 4D are process diagrams for explaining the method of manufacturing the organic EL device, and FIGS.
These are the figures for demonstrating FIG.4 (a) in detail.
In the present embodiment, parts different from the first embodiment described above will be described. Therefore, the same reference numerals are assigned to the same components to simplify the description.

First, as shown in FIG. 4A, a thin film transistor 20 and an interlayer insulating film 3 are formed on a substrate 10.
After forming 0, the pixel electrode material 41 and the first partition wall material 42 are successively formed. Furthermore,
The pixel electrode 41 is patterned by patterning the pixel electrode material 41 and the first partition wall material 42.
a and the first partition wall 42a are formed.
Here, the patterning of the pixel electrode material 41 and the first barrier rib material 42 will be described in detail with reference to FIG. FIG. 5 is a diagram showing the main parts of the interlayer insulating film 30, the pixel electrode material 41, and the first barrier rib material 42 in FIG. 4A, and the pixel electrode 41a and the first barrier rib 4 are etched by etching.
It is process drawing until 2a is formed. In FIG. 5, the contact hole 31 is not shown, but the contact hole 31 is formed in a not-shown part, and the pixel electrode material 41 and the drain electrode 25 </ b> D are connected via the contact hole 31. It shall be.

First, as shown in FIG. 5A, a mask PR is formed on the first partition material 42.
Next, as shown in FIG. 5B, the first partition wall material 42 is etched according to the shape of the mask RR to form the first partition wall 42a.
Next, as shown in FIG. 5C, the mask RR is removed, and only the first partition wall 42 a is left on the pixel electrode material 41.
Next, as shown in FIG. 5D, the pixel electrode material 41 is etched according to the shape of the first partition wall 42a using the first partition wall 42a as a mask (mask having the same shape) to form the pixel electrode 41a. .
By doing in this way, the pixel electrode 41a and the 1st partition 42a can be formed similarly to 1st Embodiment.

Next, returning to FIG. 4, the method for manufacturing the organic EL device will be described.
As shown in FIG. 4B, the second partition 45 is formed so as to cover the interlayer insulating film 30 and the first partition material 42 (the second partition is formed on the interlayer insulating film and the first partition material). Process).
The second partition 45 is formed in a state where the pixel electrode 41a is not exposed.

Next, as shown in FIG. 4C, a part of the first partition 42a is removed to expose the pixel electrode 41a, and an electrode exposed portion 41b is formed (a part of the first partition is removed and the first partition 42a is removed). Step of exposing one electrode).
Here, the opening 45a of the second partition 45 functions as a mask, and the first partition material 42 is etched according to the mask pattern to form the electrode exposed portion 41b (after the second partition is formed). A step of exposing the first electrode).
Through such a process, not only the electrode exposed portion 41b is formed but also the partition wall side portion 42b.
Is exposed. Accordingly, the droplet receiving portion 46 is formed.

Next, as shown in FIG. 4D, the second partition 45 is retracted to widen the opening area 45b of the opening 45a (step of expanding the opening area of the second partition after exposing the first electrode). .
Here, in order to retract the second partition, a known etching process is performed. For example, immersion in an etching solution or oxygen plasma treatment is suitable.
When the second partition 45 is retracted in this way, the first partition upper portion 42c is exposed, so that the droplets discharged into the droplet receiving layer 46 can be suitably wetted and spread.

As described above, in the present embodiment, the opening 45a is formed using the second partition wall 45 as a mask.
Since the first partition wall 42a is patterned at a position corresponding to, the pixel electrode 41a is exposed. Accordingly, a mask only for exposing the pixel electrode 41a, for example, a resist mask becomes unnecessary, and the mask can be reduced. Therefore, simplification of the manufacturing process can be achieved.

In addition, since the opening area 45b of the second partition is increased after the electrode exposed portion 41b is formed, the first partition upper part 42c covered with the second partition 45 is exposed, and the exposed area of the first partition 42a is large. Become. Therefore, when the liquid material of the light emitting functional layer is applied and formed on the droplet receiving portion 46 using the droplet discharge method, the contact area between the liquid material and the first partition wall 42a is increased. That is,
The liquid material suitably wets and spreads on the first partition wall 42a having lyophilicity, and the liquid material and the first electrode 42
Contact with a can be reliably performed. Further, when patterning the first partition wall 42a and the second partition wall 45, an exposure mask for exposing the resist mask is required. In the conventional case, it is necessary to control the upper portion 42c of the first partition by combining the exposure pattern for the first partition 42a and the exposure pattern for the second partition 45. In the present invention, since the resist mask is not used, the first partition upper part 42c can be controlled in a self-aligning manner. Therefore, the liquid material is suitably wetted and spread on the first partition wall 42a and the pixel electrode 41a having lyophilic properties, and the liquid material and the first electrode 42a can be reliably contacted.

Further, the first barrier rib material 42 is patterned according to the mask PR formed on the first barrier rib material 42 to form the first barrier rib 42a, and the pixel electrode material 4 is formed using the first barrier rib 42a as a mask.
Since the pixel electrode 41a is formed by patterning 1, the first partition 42 a corresponding to the shape of the mask PR can be formed, and the pixel electrode 41 a corresponding to the shape of the first partition 42 a can be formed. Thus, the first partition wall 42a and the pixel electrode 41a can be formed with the same shape mask.

In the first and second embodiments, the pixel electrode 41a is formed on the interlayer insulating film 30, but the adhesion between the interlayer insulating film 30 and the pixel electrode 41a is improved on the interlayer insulating film 30. You may form the adhesive provision film | membrane to improve. Examples of the adhesion imparting film include Ti and M
A metal film such as o is preferably employed. In this way, the adhesion-imparting film surely brings the interlayer insulating film 30 and the pixel electrode 41a into close contact with each other, so that the strength of the organic EL device 1 and the organic EL device substrate 2 can be improved.

(Electronics)
Next, an example of an electronic apparatus including the organic EL device according to the above embodiment will be described.
FIG. 10A is a perspective view showing an example of a mobile phone. In FIG. 10A, reference numeral 500 denotes a mobile phone main body, and reference numeral 501 denotes a display unit provided with an organic EL device.
FIG. 10B is a perspective view illustrating an example of a portable information processing apparatus such as a word processor or a personal computer. In FIG. 10B, reference numeral 600 denotes an information processing apparatus, reference numeral 601 denotes an input unit such as a keyboard, reference numeral 603 denotes an information processing body, and reference numeral 602 denotes a display unit including an organic EL device.
FIG. 10C is a perspective view illustrating an example of a wristwatch type electronic device. In FIG. 10C, reference numeral 700 indicates a watch body, and reference numeral 701 indicates an EL display unit including an organic EL device.
Since the electronic devices shown in FIGS. 10A to 10C are provided with the organic EL device described in the previous embodiment, the electronic devices have excellent display characteristics.

In addition, as an electronic device, it is not restricted to the said electronic device, It can apply to a various electronic device. For example, a desktop computer, a liquid crystal projector, a multimedia personal computer (PC) and an engineering workstation (EWS), a pager, a word processor, a television, a viewfinder type or a monitor direct view type video tape recorder, an electronic notebook, an electronic Desktop calculator, car navigation system, P
The present invention can be applied to an electronic device such as an OS terminal or a device provided with a touch panel.

The figure for demonstrating the manufacturing method of the organic electroluminescent apparatus shown in 1st Embodiment of this invention. The figure for demonstrating the manufacturing method of the organic electroluminescent apparatus shown in 1st Embodiment of this invention. The figure for demonstrating the manufacturing method of the organic electroluminescent apparatus shown in 1st Embodiment of this invention. The figure for demonstrating the manufacturing method of the organic electroluminescent apparatus shown in 2nd Embodiment of this invention. The figure for demonstrating the manufacturing method of the organic electroluminescent apparatus shown in 2nd Embodiment of this invention. The figure which shows an electronic device provided with the organic electroluminescent apparatus of this invention. The figure for demonstrating the manufacturing method of the conventional organic electroluminescent apparatus.

Explanation of symbols

1 ... Organic EL device (organic electroluminescence device), 2 ... Substrate for organic EL device (
Organic electroluminescent device substrate), 10 ... substrate, 30 ... interlayer insulating film, 41 ... pixel electrode material (first electrode material), 41a ... pixel electrode (first electrode), 42 ... first barrier rib material (first barrier rib) Material), 42a ... first partition (mask of the same shape), 45 ... second partition, 45a ... opening, 45b ... opening area, 47 ... light emitting functional layer, 50 ... hole injection layer (light emitting functional layer), 51 ... light emitting layer (light emitting functional layer), 52 ... electron injection layer (light emitting functional layer), PR ... mask (mask of the same shape).

Claims (8)

A first electrode provided for each pixel ;
A first barrier rib provided in direct contact with the first electrode and having a single layer;
A second partition comprising a single layer provided in direct contact with the first partition;
A manufacturing method of an organic electroluminescent device having a light emitting function layer surrounded by the first partition wall and the second partition wall,
A step of sequentially depositing a first electrode material and a first barrier rib material on an interlayer insulating film made of an organic material;
Patterning the first electrode material and the first barrier rib material for each pixel with a mask having the same shape to form the first electrode having a predetermined shape, and patterning the first barrier rib material for each pixel;
Removing a portion of the first barrier rib material to expose the first electrode;
Forming the second barrier rib on the interlayer insulating film and on the first barrier rib material after removing the first barrier rib material and exposing the first electrode;
The manufacturing method of the organic electroluminescent apparatus characterized by comprising.   The first barrier rib material is patterned for each pixel in accordance with a mask formed on the first barrier rib material, and the first electrode material is patterned using the first barrier rib material as a mask to form the first electrode. The manufacturing method of the organic electroluminescent apparatus of Claim 1 characterized by these.   The first electrode material and the first barrier rib material are collectively patterned according to the shape of the mask formed on the first barrier rib material to form the first electrode having a predetermined shape, and the first barrier rib 2. The method of manufacturing an organic electroluminescence device according to claim 1, wherein the material is patterned for each pixel.   4. The method according to claim 2, wherein the first electrode material and the first barrier rib material are patterned using a dry etching method to form the first barrier rib and the first electrode. 5. A method for manufacturing an organic electroluminescence device.   5. The organic material according to claim 1, wherein an adhesion providing film that provides adhesion between the interlayer insulating film and the first electrode is formed on the interlayer insulating film. A method for manufacturing an electroluminescence device.   6. The organic electroluminescence according to claim 1, wherein when the first partition wall material is formed, the interlayer insulating film is protected by the first electrode material. Device manufacturing method. The first partition has side portions and an upper portion,
7. The organic electro of claim 1, wherein the second barrier rib is formed by a photolithography method so that a part of the upper portion of the first barrier rib is exposed. Manufacturing method of luminescence device.   The method for manufacturing an organic electroluminescence device according to claim 1, wherein the first partition wall material is silicon oxide.

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