JP4535650B2 - Pinch valve - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a pinch valve used for fluid transportation piping in various industrial fields such as chemical factories, semiconductor manufacturing, food, and biotechnology. More specifically, the present invention has excellent reproducibility of flow rate setting and has an overtightening prevention function. It relates to a pinch valve.
[0002]
[Prior art]
Conventionally, various pinch valves have been proposed, and an example thereof is disclosed in Japanese Utility Model Publication No. 2-84071. According to this, as shown in FIG. 13, the synthetic resin tube 51 inserted through the housing 50 is pressed in the radial direction by the tube pressing member 52 to adjust the flow rate of the fluid. An elastic ring 53 having a larger restoring force than the synthetic resin tube 51 that can deform the synthetic resin tube 51 into a flat state is fitted to the outer peripheral surface of the portion.
[0003]
[Problems to be solved by the invention]
By the way, during the semiconductor manufacturing process, there is a process of polishing the surface of the wafer, and a wide variety of slurries are used at that time. When there was a stagnant part, the slurry agglomerated and fixed there, and the piping was often clogged. Therefore, when a decrease in the fluid flow rate, which is a precursor of this clogging, is observed, it is necessary to perform cleaning to remove the stuck slurry by fully opening the valve.
However, when a pinch valve having the above structure is used during the above-described process, it is generally used with the flow rate adjusted, and the valve is fully opened every time cleaning is performed. When returning to the set flow rate value, the opening degree is adjusted again from the beginning, and it was very difficult to return to the original set flow rate value. Furthermore, if an excessive tightening torque is applied to the handle, the main body and the tube may be damaged.
[0004]
The present invention has been made in view of the above-described problems of the prior art. The reproducibility of the flow rate setting, that is, the valve can be fully opened after the flow rate is set, and then returned to the original set flow rate value. An object of the present invention is to provide a pinch valve that is easy and can reliably prevent overtightening and has excellent operability.
[0005]
[Means for Solving the Problems]
The pinch valve of the present invention will be described with reference to the drawings. The adjustment nut 1 having the female screw portion 7 on the inner surface, the concave portion 8 for receiving the lower portion of the adjustment nut 1 on the upper surface, and the concave portion 8 on the lower inner peripheral surface. A substantially cylindrical and vertically long single handle 2 having a reduced diameter and provided with a female screw portion 9 and a concave portion fitted and fixed to the upper portion so that the lower portion of the handle 2 can be rotated without moving up and down. 10 is provided, and a circular hole 24 and a pair of notch grooves 26 extending in the diameter direction of the circular hole 24 and provided perpendicularly to the flow path axis are continuously provided in the through hole 11 having a diameter reduced from the concave portion 10. A substantially cylindrical bonnet 3 provided as a single member, a first male screw portion 12 screwed to the adjustment nut 1 at the top, and a female screw portion 9 of the handle 2 at the center, and Screwed in the opposite direction to the first male screw portion 12 and expanded in diameter from the first male screw portion 12 An ellipse-shaped pincer that has a flange portion 14 that is continuously provided with a male screw portion 13 and that is accommodated in the through-hole 11 so as to be vertically movable, and that engages with a pair of cutout grooves 26. 15 is connected to and fixed to the lower end surface of the bonnet 3, the pincer body 4, which is a single member, the elastic body that is directly pressed and released by the pincer 15. The first feature is that it comprises a main body 6 having a groove for receiving the pipe body 5 on the flow path axis, and a connecting portion for connecting the pipe body 5 on both sides of the main body 6 and other tubes.
[0006]
Further, the connecting portions on both sides of the main body 6 are formed with an outer diameter larger at one end than the inner diameter of the tube body 5 and the insertion portion 19 inserted and connected to the tube body 5 at the other end and the pipe connection portion 20 at the center. 22, a cap nut 21 having one end locked to the flange portion 22 of the connection body 18 and having a female screw portion on the inner peripheral surface, and a male screw portion 17 on the outer peripheral surface. The second feature is that it comprises a coupling body receiver 16 into which the female thread portion of the cap nut 21 is screwed.
[0007]
The third feature is that the material of the tube 5 is EPDM, fluororubber, silicon rubber, or a composite thereof.
[0008]
Furthermore, the fourth feature is that the tube 5 is made of a composite of PTFE and silicon rubber.
[0009]
The pipe body 5 of the pinch valve of the present invention is not particularly limited as long as it is EPDM, fluororubber, silicone rubber, or a composite of fluororubber and silicone rubber. However, the fluororesin (for example, PTFE) is not particularly limited. And a composite of silicone rubber is particularly preferable.
The adjusting nut 1, the handle 2, the bonnet 3, and the main body 6 are not particularly limited as long as they have rigidity such as metal and plastic, but plastics such as PVC or PVDF are particularly used. It is mentioned as a suitable thing.
The connecting body 18 constituting the connecting portion is not particularly limited as long as it has chemical resistance such as plastic, but fluorine resin plastics such as PTFE, PVDF, and PFA are particularly suitable. Can be mentioned.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, although an embodiment of the present invention is described with reference to drawings, it cannot be overemphasized that the present invention is not limited to this embodiment.
FIG. 1 is a longitudinal sectional view showing a closed state according to a first embodiment of the pinch valve of the present invention. FIG. 2 is a longitudinal sectional view of the pinch valve of FIG. 1 viewed from the side (flow path direction). FIG. 3 is a longitudinal sectional view showing the open state of FIG. FIG. 4 is a longitudinal sectional view of the pinch valve of FIG. 3 as viewed from the side (flow path direction). FIG. 5 is a longitudinal sectional view showing an intermediate opening state before setting in FIG. FIG. 6 is a longitudinal sectional view showing the state after the setting of FIG. FIG. 7 is a longitudinal sectional view of the pinch valve of FIG. 6 as viewed from the side (flow path direction). FIG. 8 is a bottom view of the bonnet in FIG. FIG. 9 is a plan view of the main body in FIG. FIG. 10 is a right side view of the connector receiver in FIG. FIG. 11 is a longitudinal sectional view of the connector receiver in FIG. 12 is a left side view of the connector receiver in FIG.
[0011]
In the figure, reference numeral 1 denotes an adjustment nut, which has a female screw portion 7 with which a first male screw portion 12 provided on the upper portion of the pinch body 4 is screwed.
[0012]
Reference numeral 2 denotes a substantially cylindrical handle, which has a concave portion 8 in which the lower portion of the adjusting nut 1 is received at the upper portion, and a lower inner peripheral surface with a diameter smaller than that of the concave portion 8 and below the first male screw portion of the pinch body 4. A female screw portion 9 to which the provided second male screw portion 13 is screwed is provided.
[0013]
3 is a substantially cylindrical bonnet. Inside the upper part, a concave part 10 in which the lower part of the handle 2 is fitted and fixed so as to be rotatable without moving up and down by engaging a C-shaped retaining ring 25 made of resin with both of them. A circular hole 24 and a through hole 11 having a diameter reduced from the concave portion 10 are continuously formed at a lower portion thereof. The circular hole 24 includes a pair of notch grooves 26 extending in the diameter direction and perpendicular to the flow path axis. (See FIG. 8).
[0014]
The pinch body 4 includes a first male screw portion 12 into which the adjustment nut 1 is screwed at the upper portion and a female screw portion 9 of the handle 2 at the center portion, and is opposite to the first male screw portion 12. A second male screw portion 13 that is threaded and has a diameter larger than that of the first male screw portion 12 is continuously provided, and is housed in a through hole 11 provided in a lower portion of the bonnet 3 so as to be vertically movable. When the valve is opened, an oval pincher 15 that is accommodated in the through hole 11 and engages with the pair of notch grooves 26 and is pressed against or released from the tube body 5 is continuously provided. ing.
[0015]
The pipe body 5 through which the fluid flows is made of a composite of PTFE and silicon rubber. That is, a desired thickness is formed by bonding and laminating several layers of PTFE sheets impregnated with silicon rubber. In this embodiment, the material of the tube is a composite of a PTFE sheet and silicon rubber, but EPDM, silicon rubber, fluororubber, and a composite thereof may be used without any particular limitation.
[0016]
Reference numeral 6 denotes a main body joined and fixed to the lower end surface of the bonnet 3 with bolts and nuts (not shown). A groove 30 having a rectangular cross section for receiving the tubular body 5 is provided on the flow path axis. In addition, a groove 31 for receiving the fitting portion 40 of the coupling body receiver 16 is provided deeper than the groove 30 at both ends of the groove 30, and further provided at the tip of the fitting section 40 of the coupling body receiver 16 inside the groove 31. A concave groove 32 is provided to receive the convex portion 41 for preventing the loosening (see FIG. 9).
[0017]
Next, the components constituting the connection part will be described.
The coupling body receiver 16 is formed with a fitting section 40 having a rectangular cross section that fits into grooves 30 provided at both ends of the main body 6 at one end, and the groove 30 of the main body 6 at the tip of the fitting section 40. A protrusion 41 for preventing slipping is provided to be fitted into the groove 32 provided in the. On the other hand, a receiving port 42 having the same cross-section for receiving the hexagonal flange portion 22 of the coupling body 18 is provided at the other end portion, and a male screw portion 17 is provided at the outer peripheral surface. An annular flange 23 having a diameter substantially the same as the diagonal length of the fitting portion 40 is provided on the outer peripheral surface located between the male screw portion 17 and the fitting portion 40. The flange 23 is in contact with the bonnet 3 and the main body 6 to prevent the connecting body receiver 16 from moving into the bonnet 3 and the main body 6. Inside the connection body receiver 16, a through hole 45 having a diameter substantially the same as the outer diameter of the tube body 5 is provided in the fitting portion 40. Further, a through-hole 43 having substantially the same diameter as the outer diameter of the tube body 5 that has been inserted and expanded in the insertion portion 19 of the coupling body 18 is provided continuously to the receiving port 42. Therefore, a stepped portion 44 is formed on the inner peripheral surface of the connector receiver 16 as is apparent from the drawing. The tubular body 5 is clamped and fixed in the connecting body receiver 16 by the stepped portion 44. In this embodiment, the through hole 45 and the through hole 43 having a diameter larger than that are provided. However, the through hole 45 may be provided on the entire surface (see FIGS. 10, 11, and 12).
[0018]
The connecting body 18 has a flow path 46 inside, and an insertion portion 19 is provided at one end portion to be inserted into the inner surface of the expanded tube body 5 having an outer diameter larger than the inner diameter of the tube body 5. The other end portion is provided with a pipe connection portion 20 to which another pipe body is connected. A flange portion 22 having a hexagonal cross section is provided at the center of the outer periphery of the connecting body 18 so as to have a larger diameter than both ends. The connecting body 18 has the flange portion 22 fitted in the receiving opening 42 of the connecting body receiver 16, and the cap nut 21 engaged with the flange portion 23 is screwed into the male screw portion 17 provided on the outer periphery of the connecting body receiver 16. As a result, the coupling body receiver 16 is fitted and fixed so as not to rotate. Note that the structure of the connecting portion is not limited to this embodiment, and other structures may be used.
[0019]
The operation of the pinch valve of the present embodiment having the above-described configuration is as follows.
As shown in FIGS. 1 and 2, when the handle 2 is rotated in the opening direction with the pinch valve fully closed, the handle 2 rotates but does not move up and down, and is screwed into the female screw portion 9 of the handle 2. The combined pinch body 4 is raised without rotating. At the same time, the pincer 15 of the pincer body 4 is separated from the tube body 5 and the tube body 5 tries to restore from a flat state to a circular tube state by the elastic force of the tube body itself. That is, the pinch valve shifts from the fully closed state to the open state. When the handle 3 continues to rotate in the opening direction, the pinch body 4 continues to rise, and finally, the upper end of the collar 14 of the pinch body 4 reaches the lower end surface of the handle 2 and comes into pressure contact with the pin 2. The ascent stops and the pinch valve is fully opened (the state shown in FIGS. 3 and 4).
[0020]
Next, as shown in FIGS. 3 and 4, when the handle 2 is rotated in the closing direction with the pinch valve fully opened, the pincer body 4 is lowered and the lower end surface of the pincer 15 presses the tube body 5. When the handle 2 continues to rotate in the closing direction, the pinch body 4 continues to descend, the tube body 5 is flattened, and finally the inner peripheral surface of the tube body 5 is completely adhered. At this time, the adjustment nut 1 screwed to the pinch body 4 is also lowered together with the pinch body 4, and the lower end surface of the adjustment nut 1 comes into pressure contact with the bottom surface of the recess 8 of the handle 2. Is fully closed. Even if the handle 2 is further rotated from this state, the lower end surface of the adjusting nut 1 is pressed against the bottom surface of the recess 8 of the handle 2, so the handle 2 cannot be rotated in the closing direction. Therefore, the pinch body 4 cannot be lowered further. That is, it is possible to prevent an excessive force from being applied to the main body and the pipe body (the state shown in FIGS. 1 and 2).
[0021]
Next, a method for adjusting the intermediate opening shown in FIGS.
When the handle 2 is rotated in the opening direction in the state of FIGS. 1 and 2, that is, in the fully closed state, the handle 2 is screwed into the female screw portion 9 of the handle 2 without rotating up and down. The pinch body 4 is raised without rotating. Along with this, the tubular body 5 tries to recover from the flat state to the circular tubular state by the elastic force of the tubular body itself. That is, the pinch valve shifts from the fully closed state to the open state, and the tube body 5 has an intermediate opening (state shown in FIG. 5). Here, the adjustment nut 1 that has been lifted together with the pinch body 4 is rotated in the closing direction, and its lower end surface is brought into pressure contact with the bottom surface of the recess 8 of the handle 2 to fix the intermediate opening position (FIG. 6). , 7 state).
[0022]
In this state, when the pinch valve is used in a piping line such as a slurry, the slurry or the like is fixed in the piping, and it becomes necessary to wash the slurry or the like. In this case, the pinch valve is fully opened and the slurry or the like is washed away. To return to the original intermediate opening position again, the handle 2 may be rotated until it cannot be rotated in the closing direction. That is, the original set flow rate value can be restored without any fine adjustment.
[0023]
【The invention's effect】
As is clear from the above description, the pinch valve of the present invention can set an intermediate opening and is excellent in reproducibility of flow rate adjustment, and can reliably prevent overtightening when the valve is fully closed. Thus, the main body and the pipe body can be protected and the useful life of the pinch valve can be greatly extended.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view showing a closed state of a pinch valve of the present invention.
FIG. 2 is a longitudinal sectional view of FIG. 1 viewed from a side surface (flow channel direction).
3 is a longitudinal sectional view showing the open state of FIG. 1;
4 is a longitudinal sectional view of FIG. 3 viewed from the side (flow path direction).
FIG. 5 is a longitudinal sectional view showing an intermediate opening state before setting in FIG. 1;
6 is a longitudinal sectional view showing the state after the setting in FIG. 5;
7 is a longitudinal sectional view of FIG. 6 as viewed from the side (flow channel direction).
8 is a bottom view of the bonnet in FIG. 1. FIG.
9 is a plan view of the main body in FIG. 1. FIG.
10 is a right side view of the connector receiver in FIG. 1. FIG.
11 is a longitudinal sectional view of the coupling body receiver of FIG.
12 is a left side view of the coupling body receiver of FIG. 10. FIG.
FIG. 13 is a longitudinal sectional view of a conventional pinch valve in a closed state.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Adjustment nut 2 ... Handle 3 ... Bonnet 4 ... Pinch body 5 ... Pipe body 6 ... Main body 7 ... Female screw part 8 ... Recess 9 ... Female screw part 10 ... Recess 11 ... Through hole 12 ... First male screw part DESCRIPTION OF SYMBOLS 13 ... 2nd male thread part 14 ... collar part 15 ... pincer 16 ... coupling body receptacle 17 ... male thread part 18 ... coupling body 19 ... insertion part 20 ... piping connection part 21 ... cap nut 22 ... collar part 23 ... collar part 24 ... Circular hole 25 ... C-type retaining ring 26 ... Notch groove 27 ... Lower end surface 30 ... Groove 31 ... Groove 32 ... Concave groove 40 ... Fitting portion 41 ... Protrusion prevention convex portion 42 ... Receptacle 43 ... Through hole 44 ... Step 45 ... Through hole 46 ... Channel

Claims (4)

An adjustment nut (1) having an internal thread (7) on the inner surface;
A substantially cylindrical , vertically long , single- piece , provided with a recess (8) for receiving the lower part of the adjustment nut (1) at the upper part and a female thread part (9) having a diameter reduced from the recess (8) on the inner peripheral surface of the lower part. A handle (2) which is one member ;
The upper part is provided with a concave part (10) in which the lower part of the handle (2) is fitted and fixed so as to be rotatable without moving up and down, and the lower part is provided with a circular hole (24) and extending in the diameter direction thereof, and the flow path axis The substantially cylindrical bonnet which is a single member in which a through hole (11) which is formed by a pair of cutout grooves (26) provided orthogonal to each other and which is reduced in diameter from the recess (10) is continuously provided. (3) and
A first male screw part (12) screwed to the adjustment nut (1) at the upper part, and a first male screw part (12) screwed to the female screw part (9) of the handle (2) at the center part Is continuously provided with a second male screw portion (13) threaded in the opposite direction and having a diameter larger than that of the first male screw portion (12). A pincer body (4), which is a single member, provided with an oval pincer (15) having a flange portion (14) to be engaged and engaging with a pair of notch grooves (26). )When,
A tubular body (5) made of an elastic body that is directly pressed and released by the pinch indenter (15);
A body (6) having a groove (30) which is bonded and fixed to the lower end surface (27) of the bonnet (3) and receives the pipe body (5) on the flow path axis;
A connecting portion for connecting the tube (5) on both sides of the main body (6) and another tube;
A pinch valve comprising: The connection part on both sides of the main body (6) is formed with an outer diameter larger than the inner diameter of the pipe body (5) at one end and an insertion part (19) inserted and connected to the pipe body (5) is connected to the pipe connection part at the other end. (20) a coupling body (18) having a flange part (22) in the center, and a cap nut (21 having one end engaged with the collar part (22) of the coupling body (18) and having an internal thread on the inner peripheral surface. And a connecting body receiver (16) having a male threaded portion (17) on the outer peripheral surface and having the female threaded portion of the cap nut (21) screwed into the male threaded portion (17). The pinch valve described. The pinch valve according to claim 1 or 2, wherein the material of the pipe body (5) is EPDM, fluororubber, silicon rubber, or a composite thereof. The pinch valve according to claim 1 or 2, wherein the tubular body (5) comprises a composite of PTFE and silicone rubber.

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