JP4530162B2 - Automatic X-ray inspection equipment - Google Patents

Description

  The present invention relates to an automatic X-ray inspection apparatus that performs pass / fail determination of an inspection object based on an X-ray fluoroscopic image obtained by irradiating the inspection object with X-rays, and more particularly, automatically applies a tape-shaped inspection object. The present invention relates to an automatic X-ray inspection apparatus that performs inspection while feeding in an automatic manner.

  As an effective method of inspecting the presence or absence of defects existing inside the non-destructive inspection object, an X-ray source and an X-ray detector are arranged opposite to each other, and the inspection object is supplied between them. Then, a method is known in which the X-ray transmission data is taken in, an X-ray fluoroscopic image of the inspection object is constructed, the image is processed and compared with a preset pattern.

When inspecting a tape-like inspection object such as a TAB (Tape Automated Bonding) film carrier tape for mounting a large number of IC chips in a row by using such an inspection apparatus using X-rays. The tape-like inspection object wound on the reel is fed between the X-ray source and the X-ray detector, and sequentially supplied in the direction along the longitudinal direction thereof, based on the pattern pitch of the inspection object, etc. A pass / fail decision is made for each preset range (see, for example, Patent Document 1).
JP 2002-39967 A

  By the way, in the automatic X-ray inspection apparatus in which the tape-shaped inspection object as described above is fed between the X-ray source and the X-ray detector, there is a problem with a personal computer or the like that performs a determination operation including image processing. When it is unavoidable that the operation of the device must be interrupted during the inspection, it is difficult to reliably identify the interrupted part when removing the malfunction and restarting the operation. In some cases, it is necessary to perform re-inspection from the beginning, and the record of the pass / fail judgment made before the interruption is wasted.

  That is, in a TAB film carrier tape, there are several thousand to several tens of thousands of areas to be inspected on a tape wound on one reel, and since the parts are small, the area that is visually interrupted is specified. Since the pass / fail judgment result requires that the order of the areas from the leading edge of the tape be completely the same, if the operation of the device is interrupted due to a malfunction of the personal computer, etc. It is necessary to perform an inspection from the beginning.

  The present invention has been made in view of such a situation, and even if an unexpected failure occurs and the operation of the device is interrupted, from the site where the failure occurred without wasting the pass / fail judgment made so far. An object of the present invention is to provide an automatic X-ray inspection apparatus that can reliably restart the inspection.

  In order to solve the above-described problems, an automatic X-ray inspection apparatus according to the present invention includes an X-ray source and an X-ray detector arranged opposite to each other, and a tape-shaped inspection object in the direction along the longitudinal direction. Using a X-ray transmission data of a feeding object supplied between the radiation source and the X-ray detector and the inspection object taken in every moment from the X-ray detector, for each fixed range in the supply direction of the inspection object In the automatic X-ray inspection apparatus provided with the pass / fail judgment means for performing pass / fail judgment, the feed position detecting means for detecting the feed position of the inspection object by the feed apparatus and the pass / fail judgment means for the constant Each time a range determination operation is performed, an operation determination unit that determines whether or not the operation has ended normally, and when the abnormal determination is detected by the operation determination unit, the driving of the feeding device is stopped And the feeding position detecting means Based on the force, the feeding position of the inspection object that has taken in the X-ray transmission data subjected to the determination operation determined to be abnormally ended is specified, and the determination operation is performed from the specified position at the time of return It is characterized by having a control means to control (Claim 1).

  Here, in the present invention, the feeding means feeds the inspection object by engaging the sprocket teeth with holes formed in the tape-shaped inspection object at regular intervals in the longitudinal direction. Preferably, the feeding position detecting means preferably employs a configuration that detects the feeding position of the inspection object every moment using the output of the sensor that detects the sprocket teeth (Claim 2). Can do.

  The present invention detects the feeding position of the tape-like inspection object by the feeding device every moment, determines whether or not the determination operation is normally completed for each pass / fail determination, and determines the abnormal end. In such a case, the position at which the X-ray transmission data subjected to the determination operation is stored is stored, and the determination operation is performed from the stored position when the operation is resumed, thereby solving the problem.

  That is, in the present invention, it is determined whether or not the determination operation is normally completed each time the pass / fail determination of the certain range is performed while feeding the tape-shaped inspection object. On the other hand, when the feeding position of the tape-shaped inspection object is detected momentarily and it is determined that the judgment operation has been terminated abnormally, the feeding of the tape-shaped inspection object is stopped, and when the operation is resumed, The tape-shaped inspection object is automatically positioned at the position where the X-ray transmission data provided for the determination operation determined to be finished is taken in, and the determination operation is continued. Thereby, it is possible to reliably restart the determination from the position corresponding to the determination operation that ended abnormally.

  Further, as in the invention according to claim 2, as a feeding means, a type of feeding the inspection object by engaging sprocket teeth with holes formed at regular intervals in the tape-shaped inspection object. When using a device, if the feed position of the inspection object is detected by the output of the sensor that detects the sprocket teeth, the position can be reliably and accurately detected with a simple configuration. .

  According to the present invention, an automatic operation is interrupted due to some trouble in an automatic X-ray inspection apparatus that performs X-ray fluoroscopy data every predetermined range while feeding a tape-like inspection object and sequentially makes a pass / fail determination. However, the determination operation can be restarted from the position at the time when the interruption is surely performed, and the determination result up to that point is not wasted as in the prior art, and the reliability of the determination is improved.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a main part configuration diagram of an embodiment of the present invention, and is a diagram illustrating a schematic diagram showing a mechanical configuration of a main part and a block diagram showing a system configuration.

  The inspection object W is, for example, a TAB tape, and holes Wa are formed at both edges in the width direction at regular intervals in the longitudinal direction. The feeding device 1 has a motor 11 as a drive source, two sprockets 12 and 12 are fixed to the rotation shaft thereof, and sprocket teeth 12a are engaged with holes Wa formed at both edges of the inspection object W. It is supposed to be. With this configuration, when the motor 11 is driven to rotate the sprockets 12 and 12, the inspection object W is fed in the longitudinal direction. The motor 11 is driven and controlled by a drive signal supplied from the controller 13, and the controller 13 is placed under the control of the personal computer 2.

  An X-ray source 3 and an X-ray detector 4 are arranged opposite to each other so as to sandwich the inspection object W on the feeding path of the inspection object W by the feeding device 1. When the inspection object W passes between the X-ray source 3 and the X-ray detector 4, X-ray transmission data in a certain range in the length direction of the inspection object W is transmitted by the X-ray detector 4. Sequentially detected. The output of the X-ray detector 4 is taken into the personal computer 2 via an image data take-in circuit 5 such as a capture board.

  In the personal computer 2, every time X-ray transmission data of a certain range of the inspection object W is sequentially acquired in this way, an X-ray transmission image of the inspection object W based on the data, a reference pattern stored in advance, and The pass / fail judgment is performed by a known method such as comparing the above. The pass / fail judgment result is sequentially stored in a storage medium such as a hard disk or outputted to the outside. Further, the personal computer 2 determines for each pass / fail judgment whether or not the pass / fail judgment operation is normally completed.

  A proximity switch 51 is disposed in the vicinity of one sprocket 12 of the feeding device 1 described above, and the proximity switch 51 detects the sprocket teeth 12 a of the sprocket 12. That is, while the sprocket 12 is rotating, each time the sprocket teeth 12a formed around the sprocket 12 pass through the position where the proximity switch 51 is disposed, a pulse signal is output from the proximity switch 51. The The output of the proximity switch 51 is taken into the detection circuit 52, and the detection circuit 52 outputs a signal corresponding to the feed position of the inspection object W based on the output and supplies it to the personal computer 2. The detection circuit 52 can be constituted by a counter that counts pulse signals, for example, and constitutes the feeding position detection mechanism 5 for the inspection object W. In the personal computer 2, the feed position from the start of feeding of the inspection object W can be recognized by the output of the detection circuit 52. In addition, by storing the feeding position of the inspection object W based on the output of the detection circuit 52 together with the determination results of each time described above, a failed part is located in what number area from the top of the inspection object W. Can recognize if there is.

  The personal computer 2 controls the entire apparatus including the feeding apparatus 2 as follows. FIG. 2 is a flowchart showing the contents of the control procedure of the apparatus under the control of the personal computer 2. The overall operation of the embodiment of the present invention will be described with reference to FIG.

  While feeding the inspection object W by driving the feeding device 1, the X-ray from the X-ray source 3 is irradiated, the output from the X-ray detector 4 is taken in, and the X-ray transmission data for each fixed range is obtained. The pass / fail judgment is performed by using this, and when the judgment is finished up to the end position of the tape as the inspection object W, the series of operations is finished. For each pass / fail judgment, it is determined whether or not the determination operation has ended normally. If it is determined that the determination operation has ended abnormally for some reason, based on the output from the detection circuit 52, After storing the feeding position of the inspection object W that has taken in the X-ray transmission data used for the pass / fail judgment, the motor 11 is stopped to temporarily stop the feeding of the inspection object W, and the operation is interrupted. Thereafter, the motor 11 is reversely rotated to return the inspection object W to the origin position. When a recovery operation is performed to eliminate the problem that caused the interruption and a command to restart the operation is given, the motor 11 is driven, and an inspection is made at the stored feeding position when it is determined that the operation has ended abnormally. The object W is automatically fed. Therefore, when the operation is restarted, the determination operation is restarted from the position where the pass / fail determination operation is determined to be abnormally ended, and the determination result before the interruption and the determination result after the restart are surely continuous.

  Here, in the above embodiment, an example in which the sprocket teeth 12a are detected by the proximity switch 51 arranged on the outer peripheral side of the sprocket 12 has been shown. For example, as shown in FIG. A structure in which each sprocket tooth 12a protrudes not only to the outside but also to the inside of the sprocket 12 can be used. In this case, the proximity switch 51 is arranged on the side of the sprocket 12 and the sprocket teeth 12a An inward protruding portion can also be detected.

  Moreover, in the above embodiment, although the example which used the tape for TAB as a test object was shown, this invention is not specifically limited to this, As long as it is a tape-shaped test object, it is arbitrary. Can be applied to inspection. Furthermore, when holes are not formed at regular intervals in the inspection object, a pulley can be used as the feeding device. Furthermore, the feed position can be detected using a sprocket or a rotary encoder attached to the pulley shaft.

BRIEF DESCRIPTION OF THE DRAWINGS It is a principal part block diagram of embodiment of this invention, and is the figure which writes together and shows the schematic diagram showing the mechanical structure of the principal part, and the block diagram showing a system structure. It is a flowchart showing operation | movement of embodiment of this invention. It is a principal part perspective view of other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Feeding device 11 Motor 12 Sprocket 12a Sprocket tooth 13 Controller 2 Personal computer 3 X-ray source 4 X-ray detector 5 Feeding position detection mechanism 51 Proximity switch 52 Detection circuit W Inspection object Wa hole

Claims (2)

An X-ray source and an X-ray detector arranged opposite to each other, a feeding device for supplying a tape-shaped inspection object between the X-ray source and the X-ray detector in a direction along the longitudinal direction thereof, and In an automatic X-ray inspection apparatus provided with a pass / fail determination means for performing pass / fail determination for each fixed range in the supply direction of the inspection object, using the X-ray transmission data of the inspection object taken every moment from the X-ray detector,
Whether or not the operation is normally completed each time the predetermined position is judged by the feeding position detecting means for detecting the feeding position of the inspection object by the feeding device and the pass / fail judgment means. An operation determining means for determining whether or not an abnormal end is detected by the operation determining means, and stopping the driving of the feeding device and determining the abnormal end based on the output of the feeding position detecting means It is characterized by comprising control means for specifying a feeding position of an inspection object that has taken in X-ray transmission data provided for operation and performing a determination operation from the specified position upon return. Automatic X-ray inspection device.   The feeding means is means for feeding the inspection object by engaging sprocket teeth in a hole formed at a predetermined interval in the longitudinal direction of the tape-shaped inspection object. 2. The automatic X-ray inspection apparatus according to claim 1, wherein the feeding position detecting means detects the feeding position of the inspection object every moment using the output of the sensor for detecting the sprocket teeth.

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