JP4528657B2 - Contact member and manufacturing method thereof - Google Patents

Description

  The present invention relates to a contact member having elastic contacts provided above and below a spacer, and in particular, an upper elastic contact and a lower elastic contact can be appropriately joined to the spacer to improve electrical reliability. It is related with the contact member which can be manufactured, and its manufacturing method.

  In order to satisfactorily perform electrical tests on ultra-fine electronic components, connection substrates having spiral contacts as elastic contacts have been developed. The connection board can also be used as a connector between the electronic component and the board.

  In the following Patent Document 1, the connection substrate has a structure in which a sheet member (resist film) having a large number of spiral contacts is attached to a spacer (printed substrate) via a conductive adhesive.

For example, FIG. 8 of Patent Document 1 discloses a planar shape of the spiral contact. The spiral contact includes an elastically deformable spiral deformable portion and a ring-shaped fixed portion surrounding the outer periphery of the elastic deformable portion.
The fixing portion is bonded and fixed to the spacer via the conductive adhesive.
JP 2002-175859 A

  When a large number of spiral contacts are provided as shown in FIG. 4 and the like of Patent Document 1, in order to increase the mounting density per unit area with respect to the spacer, it is preferable that the fixing portion of the spiral contacts is not ring-shaped. In order to give a large spring constant to the elastically deforming portion of the spiral contact, it is desired to increase the width of the elastically deforming portion. However, as in Patent Document 1, a spiral elastic deforming portion is provided inside the ring-shaped fixing portion. In the structure, there is a limit to increasing the width dimension of the elastically deformable portion, and if the width dimension is increased, a ring-shaped fixing portion must be formed larger, and the mounting density of the spiral contactor is reduced. The improvement cannot be increased. Therefore, in the structure of the spiral contact of Patent Document 1, it is impossible to obtain both the improvement of the mounting density of the spiral contact and the improvement of the spring constant at the same time.

  Therefore, for example, as shown in FIG. 12, a fixing portion 3 extending substantially linearly only in the Y1-Y2 direction from the winding start end 2a of the elastic deformation portion 2 formed in the spiral shape of the spiral contact 1 is formed, and the elastic deformation A shape that does not surround the entire outer periphery of the portion 2 with the fixing portion 3 as in Patent Document 1 was considered. When the width direction (X1-X2 direction shown in FIG. 12) is a row and the length direction (Y1-Y2 direction) is a column, the spiral contacts 1 arranged in the same row as shown in FIG. The spiral contact 1 arranged in one row adjacent in the column direction and the arrangement of the elastically deforming portion 2 and the fixing portion 3 of the spiral contact 1 (for example, spiral contact arranged in the upper row shown in FIG. 12) The fixing element 3 is arranged on the right side of the elastic deformation part 2), and the arrangement of the spiral contacts 1 arranged in the other row is reversed (the lower side shown in FIG. 12). In the spiral contacts 1 arranged in a row, the fixing portion 3 is arranged on the left side with respect to the elastic deformation portion 2), and the mounting density of the spiral contacts can be improved. Already with Japanese Patent Application No. 2004-79745 It has filed Te.

  A plurality of spiral contacts 1 shown in FIG. 12 are held by a resinous sheet member 4, and a contact sheet 5 composed of the sheet member 4 and the spiral contact 1 is bonded onto a spacer using a conductive adhesive. Fixed.

  By the way, when it is desired to provide the spiral contact 1 on the upper and lower surfaces of the spacer, the contact sheet 5 is bonded to the upper surface of the spacer and the lower surface of the spacer. It is preferable that the contact sheet to be formed (hereinafter referred to as the lower contact sheet) is formed of the same contact sheet because a reduction in manufacturing costs can be realized.

  As shown in FIG. 12, the contact sheet 5 is formed with positioning holes 6, 7 and 8 for the spacer. Two pieces of the same contact sheet 5 shown in FIG. 12 are prepared, and one contact sheet is set with the line A at a position of 45 degrees from the width direction (X direction shown in the figure) and the length direction (Y direction shown in the figure) as the rotation axis. Is reversed. Then, the planar shape of the inverted contact sheet appears as shown in FIG.

  Among the positioning holes, the circular positioning hole 6 shown in the upper left in the drawing is provided on the line A, and therefore the positioning hole 6 of the contact sheet 5 shown in FIG. 12 is located at the same position as the positioning hole 6 in FIG. 12, and when the contact sheet shown in FIG. 12 and the contact sheet shown in FIG. 13 are installed above and below the spacer, the positioning hole 6 faces in the height direction of the spacer. It becomes a state to do. On the other hand, the positioning holes 7 and 8 at the lower left and upper right in the figure shown in FIG. 12 are in a line-symmetrical relationship with the line A as the axis of symmetry. Is positioned at the same location as the positioning hole 8 shown in FIG. 13, the positioning hole 8 shown in FIG. 12 is located at the same location as the positioning hole 7 shown in FIG. 13, and the contact sheet shown in FIG. When the contact sheet shown in FIG. 13 is installed above and below the spacer, the positioning holes 7 and 8 face each other in the height direction of the spacer. For this reason, when the contact sheet 5 shown in FIG. 12 is used as an upper contact sheet, for example, and the contact sheet shown in FIG. 13 is used as a lower contact sheet and bonded and fixed to the upper and lower surfaces of the spacer, the upper contact sheet is used by using a common positioning member. The member and the lower contact sheet can be aligned with the spacer, and the manufacturing process can be simplified because it is not necessary to align the upper contact sheet and the lower contact sheet separately.

  However, when the upper contact sheet shown in FIG. 12 and the lower contact sheet shown in FIG. 13 are bonded and fixed to the upper and lower surfaces of the spacer, the spiral contact provided on the upper contact sheet is fixed as shown in FIG. Since the area B facing each other through the spacer of the fixed portion 3 of the spiral contactor provided on the part 3 and the lower contact sheet is very small, the pressure members are arranged above and below the spacer, When pressure is applied from the pressure member to the upper contact sheet and the lower contact sheet, the portion that is most strongly pressed is only the portion of the area B, and the other fixed portion 3 is strong. Pressure does not work.

  For this reason, there was a problem that the upper contact sheet and the lower contact sheet could not be appropriately bonded and fixed via a conductive adhesive.

  The fixed portions of the spiral contact that face each other in the height direction of the spacer are connected to each other through a conductive layer provided in a through hole that penetrates the spacer. In this case, the contact between the spiral contact and the conductive layer is not good, and in the worst case, the contact sheet is peeled off from the spacer. It was a factor that hindered electrical reliability.

  Accordingly, the present invention is to solve the above-described conventional problems, and in particular, the opposing area of the fixed portions of the elastic contacts that oppose each other in the height direction via a spacer can be made wider than before, and the elastic contacts It is an object of the present invention to provide a contact member and a method for manufacturing the contact member that can improve the mounting density of the substrate.

The contact member in the present invention,
A spacer, an upper elastic contact provided on the spacer, and a lower elastic contact provided below the spacer,
The upper elastic contact and the lower elastic contact have a fixed portion fixed to the spacer, and a spiral elastic deformation portion extending from a winding start end to a winding end connected to the fixing portion , and the fixing The part is formed to extend from the winding start end on the outer side of the elastic deformation part formed in the spiral shape ,
An upper contact sheet having a plurality of the upper elastic contacts and a sheet member , and a lower contact sheet having a plurality of the lower elastic contacts and a sheet member are formed,
The upper contact sheet and the lower contact sheet are set with symmetry axes that bisect the plurality of upper elastic contacts and the plurality of lower elastic contacts,
Said plurality of said provided upper contact sheet upper elastic contacts, and, each of the plurality of the lower elastic contact provided on the lower contact sheet husband, while being disposed in line symmetry with respect to the symmetry axis, each The fixed portion of the upper contact sheet is formed in a substantially line-symmetric shape with respect to the symmetry axis or a parallel line in a direction parallel to the symmetry axis, and is bisected by the symmetry axis. The plurality of fixing portions appearing in the other region, the plurality of fixing portions appearing in the other region, the plurality of fixing portions appearing in one region of the lower contact sheet divided by the symmetry axis, and the other region a plurality of the fixing portions appearing to have, respectively, relative to said axis of symmetry, has a substantially axisymmetric shape,
The upper contact sheet is bonded onto the spacer, the lower contact sheet is bonded under the spacer, and one of the upper contact sheet and the lower contact sheet has the axis of symmetry as a rotation axis. Are joined to the spacer in an inverted state ,
And the fixed portion of the upper elastic contacts facing in the height direction of the spacer, and the fixed portion of the lower elastic contact, characterized in that substantially opposite in the height direction Is.

  Thereby, the opposing area in the height direction of the fixed portion of the upper elastic contact and the fixed portion of the lower elastic contact (overlapping area via the spacer) can be increased as compared with the conventional case. In addition, the mounting density of the elastic contacts can be improved. Further, the elastic deformation portion can be widened and the spring constant can be increased.

  In the present invention, the fixing portion and the spacer are preferably bonded and fixed via a conductive adhesive, and the opposing area can be made larger than before, so that the fixing portion can be connected via a conductive adhesive. A contact member that can be firmly bonded and fixed to the spacer and has excellent electrical reliability can be provided.

  Further, in the present invention, two identical contact sheets having a plurality of elastic contacts and sheet members are formed, one sheet is joined on the spacer as an upper contact sheet, and the other sheet is a lower contact sheet. Joined under the spacer, and either the upper contact sheet or the lower contact sheet is reversed with the symmetry axis arbitrarily set on the sheet as the rotation axis, When joined, it is not necessary to separately form the upper contact sheet and the lower contact sheet as different contact sheets, and the contact member can be easily formed.

Further, in the present invention, the plurality of elastic contacts are arranged in line symmetry with respect to the symmetry axis, and the elastic contact fixing portion that appears in one region of the contact sheet divided by the symmetry axis, and the other The fixed portion appearing in the region is formed in a substantially line-symmetric shape with respect to the symmetry axis . Accordingly, when one of the two contact sheets is reversed, the fixed portion that appears in the non-reversed contact sheet and the fixed portion that appears in the reversed contact sheet are interposed via the spacer. Therefore, the opposing areas of the fixing portions can be increased.
Further, in the present invention, each contact sheet includes the elastic contact provided with the fixed portion straddling the symmetry axis, and the elastic contact provided with the fixed portion at a position away from the symmetry axis without straddling the symmetry axis. The elastic contact fixing part and the fixing part appearing in one region of each contact sheet divided by the symmetry axis are substantially line symmetrical with respect to the symmetry axis. It is preferable that it is formed by.
In the present invention, each contact sheet is formed with a plurality of positioning holes, and these positioning holes are preferably formed in a line-symmetric shape with respect to the symmetry axis.

In addition, in the plane of the upper contact sheet and the lower contact sheet, the symmetry axis passing obliquely between the X direction and the Y direction orthogonal to the X direction is set, and a plurality of the upper elastic sheets A contact fixing portion and a plurality of lower elastic contact fixing portions are respectively connected to the first fixing portion extending in the X direction and the second fixing portion connected to the first fixing portion and extending in the Y direction. It is preferable to comprise.

The front Symbol pair Shojiku is preferably set to a position of 45 degrees each from the X and Y directions.

The manufacturing method of the contact member in the present invention is as follows.
A contact sheet in which a plurality of elastic contacts are held by a sheet member,
(A) The elastic contact is formed by including a fixed portion and a spiral elastic deformation portion extending from a winding start end to a winding end connected to the fixing portion , and the fixing portion is formed in the spiral shape. Extending from the winding start end to the outer side part of the elastic deformation part formed in
At this time, a symmetry axis that bisects the plurality of elastic contacts is set , the plurality of elastic contacts are arranged in line-symmetrical positions with respect to the symmetry axis , and each of the fixed portions is connected to the symmetry axis or the formed at substantially line-symmetric shape with respect to the symmetry axis parallel to the direction of parallel lines, and a plurality of pre-Symbol solid tough appearing in one of the areas divided by the axis of symmetry, it appears in the other region step of a plurality of said fixed portion with respect to the symmetry axis, in a substantially line-symmetric shape,
(B) a step of holding a plurality of the elastic contacts on the sheet member;
Formed with
(C) preparing two sheets of the same contact sheet formed in the steps (a) and (b), and reversing one of the contact sheets with the symmetry axis as a rotation axis;
(D) The inverted contact sheet is joined to the spacer in the inverted state on the upper side or the lower side of the spacer, and another contact sheet that is not inverted is connected to the other side of the spacer in the non-inverted state. Joining to the surface of
Thus, the fixed portions of the elastic contacts facing each other in the height direction of the spacer are substantially opposed in the height direction.
In the present invention, in the plane of the upper contact sheet and the lower contact sheet, the symmetry axis passing obliquely between the X direction and the Y direction orthogonal to the X direction is set, and a plurality of the upper elastic sheets A first fixing part extending in the X direction and a second fixing part connected to the first fixing part and extending in the Y direction, respectively, a fixing part of the contact and a plurality of lower elastic contact fixing parts. It is preferable to comprise.

  Even if the upper contact sheet bonded to the upper side of the spacer and the lower contact sheet bonded to the lower side of the spacer are formed of the same contact sheet, the height direction with the spacer interposed therebetween, The fixed portion of the upper elastic contact and the fixed portion of the lower elastic contact can be substantially opposed to each other, and the fixed portion of the upper elastic contact and the fixed portion of the lower elastic contact The facing area can be increased compared to the conventional case. Further, since the upper contact sheet and the lower contact sheet can be formed from the same contact sheet, the manufacturing process can be simplified and the manufacturing cost can be further reduced.

  In the present invention, when the contact sheet is joined to the spacer, a conductive adhesive is applied between the fixed portion and the spacer, and a non-contact pressure jig is used for the elastically deforming portion, and the spacer is interposed therebetween. It is preferable that the fixing portions opposed vertically are pressed in the spacer direction by the pressing jig, and the fixing portions are bonded and fixed to the spacer.

Also, in the present invention, the sheet member is formed with a positioning hole having a line symmetry shape with respect to the symmetry axis, and the positioning hole is formed at the same position with respect to the two contact sheets, whereby (c) step When the single contact sheet is reversed about the symmetry axis, the positioning holes appearing in the non-reversed contact sheet and the positioning holes appearing in the reversed contact sheet are in the height direction. And facing each other,
In the step (d), it is preferable that each contact sheet is positioned with respect to the spacer by using a common positioning member for the contact sheet bonded to the upper side and the lower side of the spacer. Since both the lower contact sheet and the upper contact sheet can be positioned with a common positioning member, the cost for the positioning member can be reduced. Moreover, since it can position with a common positioning member, positioning accuracy can be improved.

  The present invention includes a spacer, an upper elastic contact provided on the spacer, and a lower elastic contact provided below the spacer, and the upper elastic contact and the lower elastic contact are provided on the spacer. A fixing portion to be fixed; and an elastic deformation portion extending from the fixing portion, the fixing portion being provided only in a part of the outer periphery of the elastic deformation portion, and a height direction of the spacer The fixed portion of the upper elastic contact and the fixed portion of the lower elastic contact that are opposed to each other substantially face each other in the height direction.

  Thereby, the opposing area in the height direction of the fixed portion of the upper elastic contact and the fixed portion of the lower elastic contact (overlapping area via the spacer) can be increased as compared with the conventional case. Therefore, it is possible to provide a contact member that is more excellent in electrical reliability than in the past. In addition, the mounting density of the elastic contacts can be improved. Further, the elastic deformation portion can be widened and the spring constant can be increased.

  1 is a plan view of an upper contact sheet in the first embodiment, FIG. 2 is a plan view of a lower contact sheet in the first embodiment, and FIG. 3 is an upper contact sheet shown in FIG. 1 and a lower contact shown in FIG. FIG. 4 is an exploded perspective view of a contact member having a sheet and a spacer sandwiched between the upper contact sheet and the lower contact sheet. FIG. 4 shows an upper contact sheet and a lower contact on the spacer shown in FIG. FIG. 5 is a partial cross-sectional view of the contact member in a state in which the sheets are joined, and in particular, a partial cross-sectional view when cut in the height direction (Z direction) from the line C shown in FIG. FIG. 6 is an explanatory diagram showing an overlapping state between the elastic contact fixing portion provided on the upper contact sheet and the elastic contact fixing portion provided on the lower contact sheet when viewed from directly above the member. The second embodiment is different in structure from the elastic contact shown in FIGS. FIG. 7 is a plan view of the elastic contact of the third embodiment having a structure different from that of the elastic contact shown in FIGS. 1 and 2, and FIG. 8 is a partial side view for explaining the structure of the spiral contactor. FIGS. 9 and 9 are perspective views of a connection device on which the contact member shown in FIG. 4 is mounted, FIG. 8 is a partial side view for explaining the structure of the spiral contactor, and FIG. 10 is a manufacture of the connection member according to the present invention. FIG. 11 is a partial enlarged cross-sectional view showing a process performed subsequent to FIG. 10, particularly an enlarged partial view of FIG. 10.

  In each figure, the Z1-Z2 direction (which may be simply expressed as the Z direction) is the height direction, the X1-X2 direction (which may be simply expressed as the X direction) is the width direction, and the Y1-Y2 direction. (Simply expressed as Y direction) is shown as a length direction, and each direction has a relationship orthogonal to the other two directions.

  As shown in FIG. 3, the contact member 20 includes a spacer 21, an upper contact sheet 22, and a lower contact sheet 23.

  First, the spacer 21 will be described. The spacer 21 has a plurality of through holes 21a as shown in FIG. The planar shape of the through hole 21a is, for example, a circular shape, but is not limited to such a shape. As shown in FIG. 4, a conductive portion 24 made of a conductive material is formed on the inner peripheral surface of the through hole 21a by, for example, a sputtering method. The conductive portion 24 is formed to partially extend on the upper surface 21 b and the lower surface 21 c of the spacer 21. As shown in FIG. 4, the conduction parts 24 formed in the respective through holes 21a are not in contact with each other, and therefore the conduction parts 24 formed in the adjacent through holes 21a are not in a conduction state.

  Next, the upper contact sheet 22 will be described. The upper contact sheet 22 includes a plurality of spiral contacts (elastic contacts) 25, 40, 41, 42 and a sheet member 26.

  As shown in FIG. 1, the spiral contacts 25, 40, 41, 42 are elastically deformed and formed in a spiral shape from the fixed portions 25a, 40a, 41a, 42a and the fixed portions 25a, 40a, 41a, 42a. It has a portion 25b, 40b, 41b, 42b.

  The description will focus on the spiral contact 25 formed at the upper left shown in FIG. As shown in FIG. 1, the fixing portion 25a of the spiral contact 25 is formed in a substantially inverted L shape extending in the X direction and the Y direction. The fixing part extending in the X direction in the figure of the fixing part 25a will be described as a first fixing part 27, and the fixing part extending in the Y direction in the figure will be described as a second fixing part 28. An opposing side portion (inner side portion) 27a facing the elastic deformation portion 25b of the first fixed portion 27 has a curved shape along the external shape of the elastic deformation portion 25b. On the other hand, a side portion (outside side portion) 27b opposite to the facing side portion 27a of the first fixed portion 27 has a form extending linearly in the width direction (X direction in the drawing). A winding start end 25b1 of the elastic deformation portion 25b is connected to an opposite side portion (inner side portion) 28a of the second fixing portion 28 facing the elastic deformation portion 25b. Further, the opposite side portion (inner side portion) 28a at a place other than the connection portion with the winding start end 25b1 has a curved shape that follows the external shape of the elastic deformation portion 25b. Further, the side portion (outer side portion) 28b opposite to the facing side portion 28a is linearly extended in the length direction (Y direction in the drawing). As shown in FIG. 1, the plurality of spiral contacts 25, 40, 41, and 42 provided on the sheet member 26 are all formed in the same shape.

  For example, the sheet member 26 is formed in a square shape. Therefore, the line C passing on one diagonal line of the sheet member 26 is at a position of 45 degrees from the width direction (X direction in the drawing) and the length direction (Y direction in the drawing). The spiral contacts 25, 40, 41, and 42 are arranged in line symmetry with the line C as the axis of symmetry. The sheet member 26 is divided into two parts with the line C as a boundary, and fixed portions 25a, 41a, and 42a of the spiral contacts 25, 41, and 42 in one region D and the other region E with the line C as a boundary. The fixed portions 25a, 40a, and 42a of a certain spiral contactor 25, 40, and 42 are formed in a substantially line-symmetric shape with the line C as an axis of symmetry. Specifically, the first fixing portion 27 in the region D of the fixing portion 25a of the upper left spiral contactor 25 shown in FIG. 1 and the second fixing portion 28 in the region E have the line C as the axis of symmetry. It is formed in a substantially line symmetrical shape. As described above, the first fixing portion 27 extends in the width direction (X direction in the drawing), the inner side portion 27a of the first fixing portion 27 is formed in a curved shape, and the outer side portion 27b is It is a linear shape extending in the width direction. On the other hand, the second fixing portion 28 extends in the length direction (Y direction in the drawing), the inner side portion 28a of the second fixing portion 28 is formed in a curved shape, and the outer side portion 28b extends in the width direction. It is a linear shape that extends. Since the line (symmetry axis) C is at a position of 45 degrees from each of the width direction and the length direction, the first fixing portion in the region D among the fixing portions 25a of the upper left spiral contact 25 shown in FIG. 27 and the second fixing portion 28 in the region E are formed in a substantially line-symmetric shape with the line C as the axis of symmetry. The lower left spiral contact 41 shown in FIG. 1 is in the region D, and the upper right spiral contact 40 shown in FIG. In both the lower left spiral contact 41 and the upper right spiral contact 40, the fixing portions 40a and 41a are composed of the first fixing portion 27 and the second fixing portion 28 as described in the upper left spiral contact 25. It has a substantially inverted L shape, and is substantially line symmetrical with the line C as the axis of symmetry. Further, in the spiral contactor 42 at the lower right, like the spiral contactor 25 at the upper left, the fixing part 25a straddles the line C, and the first fixing part 27 and the second fixing part 28 are connected to the line C. It is formed in a substantially line-symmetric shape with C as an axis of symmetry.

  As shown in FIG. 1, the sheet member 26 is opposed to the elastic deformation portions 25b, 40b, 41b, 42b of the spiral contacts 25, 40, 41, 42 in the height direction (Z direction in the drawing). A through-hole 26a is formed in the upper surface. The through-hole 26a has a circular shape as shown in FIG. 1, for example, and the through-hole 26a is formed in a line-symmetric shape with the line C as an axis of symmetry.

  The elastic deformation portion 25b of the spiral contact 25 is formed in a spiral shape from the winding start end 25b1 to the winding end 25b2. As will be described later, the elastic deformation portion 25b is a portion where, for example, an electrode of an electronic component abuts, and is a portion that can be elastically deformed by receiving a pressing force. The elastic deformation portions 40b, 41b, 42b of the other spiral contacts 40, 41, 42 are also formed in the same shape.

  The spiral contacts 25, 40, 41, 42 are formed by electroforming or a plating layer is formed on the surface of the foil body. For example, there is no Ni layer or NiP layer around the spiral contact-shaped copper foil. This is a structure formed by electrolytic plating or the like.

  As shown in FIG. 8, the fixing portion 25a of the spiral contactor 25 is fixed and held on the lower surface of the sheet member 26 by an adhesive or the like, and the spiral contact is made from the through hole 26a formed in the sheet member 26. The elastic deformation portion 25b of the child 25 is three-dimensionally shaped upward (in the Z1 direction in the drawing). The other spiral contacts 40, 41, 42 are also formed in a three-dimensional manner.

  As shown in FIG. 1, a plurality of positioning holes 30, 31 and 32 are formed in the sheet member 26. These positioning holes 30, 31, and 32 are formed in a line-symmetric shape with the line C as an axis of symmetry.

Two identical contact sheets 22 and 23 having the sheet member 26 and spiral contacts 25, 40, 41 and 42 shown in FIG. 1 are prepared, and one contact sheet 23 is the line (symmetric axis). It can be reversed with C as the axis of rotation. The contact sheet 23 in an inverted state is shown in FIG. 2 (plan view). The upper left spiral contact 25 shown in FIG. 2 is obtained by inverting the upper left spiral contact 25 shown in FIG. 1 with the line (symmetric axis) C as a rotation axis, and the lower left spiral contact 40 shown in FIG. 1 is obtained by inverting the upper right spiral contact 40 shown in FIG. 1 with the line (symmetric axis) C as a rotation axis, and the upper right spiral contact 41 shown in FIG. 2 is the lower left spiral contact 41 shown in FIG. 2 is reversed with the line (symmetric axis) C as a rotation axis, and the lower right spiral contact 42 shown in FIG. 2 is replaced with the lower right spiral contact 42 shown in FIG. Corresponds to the rotating shaft.

  In the contact sheet 23 shown in FIG. 2, the fixing portions 25a, 40a, 41a, 42a of the spiral contacts 25, 40, 41, 42 are located on the upper surface of the sheet member 26. Therefore, the fixing portions 25a, 40a, 41a, 42a is exposed from the upper surface of the sheet member 26, and the elastically deforming portions 25b, 40b, 41b, 42b of the spiral contacts 25, 40, 41, 42 protrude in a spiral shape downward in the figure. It is in a state.

In the contact sheet 23 shown in FIG. 2, the contact sheet 22 shown in FIG. 1 is inverted with the line C as the rotation axis. 2, D is located in the upper area of the line C of the line C in FIG. 2, and the area E that is located on the upper side of the line C of the contact sheet 22 shown in FIG. 1 is located in the lower area of the line C in FIG. To do. As described above, the first fixed portion 27 of the spiral contactors 25 and 42 formed in the region D of FIG. 1 and the fixed portion 41a of the spiral contactor 41 are formed in the spiral contactor formed in the region E. 2 and 42, the fixed portion 40a of the spiral contactor 40 and the line C are substantially line-symmetrical with respect to the axis of symmetry, and therefore the contact of FIG. The formation positions (arrangements) of the plurality of spiral contacts 25, 40, 41, 42 provided on the sheet 23 and the contact sheet 22 of FIG. 1 coincide with each other, and the spiral contacts 25, 40, 41, 42 are fixed. The portions 25a, 40a, 41a, 42a all appear in a substantially inverted L shape on both of the contact sheets 22, 23 , and the positions where the through holes 26a formed in the sheet member 26 are also formed. The contact sheets 22 and 23 coincide with each other.

  Further, since the positioning holes 30, 31, and 32 formed in the sheet member 26 shown in FIG. 1 are formed in a line-symmetric shape with the line C as the symmetry axis, the positioning holes appearing in the contact sheet 23 of FIG. The formation positions of 30, 31, 32 coincide with the formation positions of the positioning holes 30, 31, 32 formed in the contact sheet 22 of FIG.

  The contact sheet 22 shown in FIG. 1 is an upper contact sheet 22 bonded to the upper surface 21b of the spacer 21, and the contact sheet 23 shown in FIG. 2 is a lower contact sheet 23 bonded to the lower surface 21c of the spacer 21, and FIG. As shown, the upper contact sheet 22 is bonded and fixed to the upper surface 21b of the spacer 21 via a conductive adhesive 50, and the lower contact sheet 23 is bonded to the lower surface 21c of the spacer 21 via a conductive adhesive 50. To be fixed.

  FIG. 5 shows fixing portions 25a, 40a, 41a, 42a (indicated by dotted lines in FIG. 5) of spiral contacts 25, 40, 41, 42 provided on the upper contact sheet 22 via a spacer 21. , Opposed to the fixing portions 25a, 40a, 41a, 42a (shown by solid lines in FIG. 5) of the spiral contacts 25, 40, 41, 42 provided on the lower contact sheet 23 (via the spacer 21). The overlapping state). In FIG. 5, the elastically deforming portions 25b, 40b, 41b, and 42b of the spiral contacts 25, 40, 41, and 42 are not shown in order to make the drawing easy to see.

  As shown in FIG. 5, fixing portions 25 a, 40 a, 41 a of spiral contacts 25, 40, 41, 42 provided on the upper contact sheet 22 facing in the height direction (Z direction in the drawing) via the spacer 21. 42a and the fixed portions 25a, 40a, 41a, 42a of the spiral contacts 25, 40, 41, 42 provided on the lower contact sheet 23 are substantially opposed (overlapped via the spacer 21). It has become. Here, the “substantially opposed state” means that the area of the fixing part of each spiral contact is S, and the fixing part that occupies the area S of each fixing part in the height direction via the spacer 21. When the facing area is S1, it means that (S1 / S) × 100 (%) is in the range of 50% to 100%.

  As described above, in the first embodiment, the fixing portions 25 a, 40 a, 41 a, 42 a of the spiral contacts 25, 40, 41, 42 provided on the upper contact sheet 22 and the spiral provided on the lower contact sheet 23. Since the facing area S1 of the contacts 25, 40, 41, 42 with the fixing portions 25a, 40a, 41a, 42a can be increased as compared with the conventional case, the upper contact sheet 22 and the lower contact sheet 23 are securely attached to the spacer 21. It is possible to provide a contact member that can be adhesively fixed and has excellent electrical reliability because the conductive portions 24a, 40a, 41a, 42a and the conductive layer 24 provided on the spacer 21 have a good conductive connection. Become.

As shown in FIGS. 1 and 2, the fixing portions 25a, 40a, 41a, 42a of the spiral contacts 25, 40, 41, 42 provided on the contact sheets 22, 23 are formed in a substantially inverted L shape and are elastic. Since the outer periphery of the deformable portions 25b, 40b, 41b, and 42b is not completely enclosed, the pitch interval between the spiral contacts 25, 40, 41, and 42 can be easily reduced, and the spiral contacts 25, 40, 41, The mounting density per unit area of 42 can be improved. Further, the elastic deformation portions 25b, 40b, 41b, and 42b can be widened and the spring constant can be improved.

  Further, as shown in FIG. 1, the shape of the fixing portions 25a, 40a, 41a, and 42a of the spiral contacts 25, 40, 41, and 42 is not limited to the substantially inverted L shape shown in FIG. In the plurality of spiral contacts, two fixing portions extend on both sides of the line C or a parallel line extending in a direction parallel to the line C, and both the two fixing portions are the line C or parallel. If the line is symmetrically formed with the line as the axis of symmetry, the fixed portion can be formed in the same direction in all spiral contacts. Therefore, the manufacture of the spiral contact is facilitated. Specifically, referring to FIG. 1, in FIG. 1, the fixing portions 25 a, 40 a, 41 a, 42 a of all the spiral contacts 25, 40, 41, 42 are replaced by the first fixing portion 27 and the second fixing portion 28. The first fixing part 27 and the second fixing part 28 both extend at an angle of 45 degrees with respect to the line C or a parallel line extending in a direction parallel to the line C. By forming the fixing portion in this manner, the fixing portions 25a, 40a, 41a, 42a of all the spiral contacts 25, 40, 41, 42 can be formed in a substantially inverted L shape that is all directed in the same direction. Therefore, since all the spiral contacts 25, 40, 41, and 42 can be formed in the same direction, the manufacture of the spiral contacts becomes very easy.

  For example, as shown in FIG. 7, two curved fixing portions 70 and 71 extend on both sides of the line C, and the fixing portions 70 and 71 are formed in a line-symmetric shape with the line C as an axis of symmetry. Therefore, when a plurality of spiral contacts are formed on the sheet member as shown in FIG. 1, the fixed portions of all spiral contacts are curved fixed portions composed of the fixed portions 70 and 71 shown in FIG. And can be formed in the same direction. That is, since all the spiral contacts can be formed in the same shape and in the same direction as the spiral contact shown in FIG. 7, the manufacture of the spiral contacts can be facilitated.

  Moreover, you may form a spiral contactor like FIG. In the case of FIG. 6, the shapes of the plurality of spiral contacts are all the same, but the formation directions are different. In FIG. 6, the fixing part 60 a of the spiral contact member 60 is formed across the line C, and includes a part 60 a 1 of the fixing part 60 a on one side of the line C and a fixing part 60 a on the other side. The part 60a2 is formed in a substantially line-symmetric shape with the line C as an axis of symmetry. Similarly, the spiral contact indicated by reference numeral 63 has a part 63a1 of the fixing part 63a on one side of the line C and a part 63a2 of the fixing part 63a on the other side substantially having the line C as an axis of symmetry. It is formed in a line symmetrical shape. The fixed portions 61a and 62a of the spiral contactors 61 and 62 are substantially symmetrical with respect to the line C as an axis of symmetry. The fixed portions 60a, 61a, 62a, 63a of the spiral contacts 60, 61, 62, 63 shown in FIG. 6 are all formed in a direction away from the elastically deformable portions 60b, 61b, 62b, 63b. Even if a spiral contact is formed as shown in FIG. 6, the line symmetrical state of the fixed portion can be maintained with respect to the line C, and two contact sheets provided with a plurality of spiral contacts shown in FIG. 6 are prepared, One of them is reversed with the line (symmetric axis) C as a rotation axis. For example, a non-reversed contact sheet is placed on the upper surface of the spacer 21, and a reversed contact sheet is placed on the spacer 21 with the lower surface via a conductive adhesive. When joined, the fixed portions of the spiral contacts facing each other in the height direction via the spacer 21 are substantially opposed in the height direction, and the facing area of the fixed portion is increased compared to the conventional case. I can do it.

  The contact member 20 shown in FIG. 4 is mounted on, for example, the inspection apparatus 80 shown in FIG. As shown in FIG. 4, the inspection device 80 includes a base 81 and a lid 82 that is rotatably supported via a hinge 83 provided on one edge of the base 81. ing. The base 81 and the lid 82 are made of an insulating resin material or the like, and a loading region 81A that is concave in the Z2 direction is formed at the center of the base 81. An electronic component 90 such as a semiconductor can be mounted in the loading area 81A. A locked portion 84 is formed on the other edge of the base 81.

  At the center position of the inner surface of the lid 82 of the inspection device 80, a convex pressing portion 82a that presses the electronic component 90 downward in the figure is provided to face the loading area 81A. Further, a lock portion 85 is formed at a position opposite to the hinge portion 83.

  When the contact member 20 is installed on the loading area 81A of the base 81 and the lock portion 85 of the lid 82 is locked to the locked portion 84 of the base 81, the electronic component 90 is moved by the pressing portion 82a. Since it is pressed downward in the drawing, an electrode (not shown) provided on the lower surface of the electronic component 90 pushes down the elastic deformation portion of each spiral contact provided in the contact member 20, and the spiral contact and the Conductive connection with the electrode is achieved. The elastically deforming portions 25b, 40b, 41b, and 42b of the spiral contacts 25, 40, 41, and 42 are not limited to the spiral shape. The outer shape of the deformed portion is deformed so as to be pushed and expanded from the winding end to the winding start direction (outward from the center of the spiral), and is wound so as to embrace the outer surface of the electrode. It is preferable because the conductive connection between the electronic components can be ensured.

  The contact member 20 can be used as a connector or the like mounted in an electronic apparatus in addition to an inspection apparatus such as burn-in inspection shown in FIG.

  Next, a method for manufacturing the contact member 20 will be described. First, spiral contacts 25, 40, 41, and 42 shown in FIG. 1 are formed. The spiral contacts 25, 40, 41, 42 are composed of fixed portions 25a, 40a, 41a, 42a and elastic deformation portions 25b, 40b, 41b, 42b. For example, after the copper foil is formed in a spiral contact shape, a Ni layer or a NiP layer is plated around the copper foil by an electroless plating method to form the spiral contacts 25, 40, 41, 42.

  As shown in FIG. 1, the spiral contacts 25, 40, 41, and 42 are arranged with respect to a line C (a line at a position of 45 degrees from each of the width direction (X direction in the drawing) and the length direction (Y direction in the drawing)). In addition to being arranged at positions that are line symmetric, the fixed portions 25a, 40a, 41a, 42a of the spiral contacts 25, 40, 41, 42 are all in the width direction (X direction shown in the drawing) and the length direction (Y direction shown in the drawing). It is formed in a substantially inverted L shape extending to

  Then, the sheet member 26 having the through hole 26a is joined onto the fixing portions 25a, 40a, 41a, 42a of the spiral contacts 25, 40, 41, 42 using, for example, a conductive adhesive, etc. The contacts 25, 40, 41, 42 are fixedly held on the sheet member 26. 2 are prepared, and the elastically deforming portions 25b, 40b, 41b, 42b of all the spiral contacts 25, 40, 41, 42 provided on the two contact sheets are directed upward. Three-dimensional forming towards.

  One of the two contact sheets is reversed with the line C as the rotation axis. The contact sheet 22 (shown in FIG. 1) in the non-inverted state is used as the upper contact sheet 22 joined to the upper surface 21b of the spacer 21, and the contact sheet 23 (shown in FIG. 2) in the inverted state is used as the spacer 21. The lower contact sheet 23 is joined to the lower surface 21c.

  As shown in FIG. 10, a receiving jig (lower pressurizing jig) 101 is provided on the installation table 100, and the lower contact sheet 23 is installed on the receiving jig 101. As shown in FIG. 11, on the upper surface 101a of the receiving jig 101, elastic deformation portions 25b, 40b, 41b, 42b of the spiral contacts 25, 40, 41, 42 formed on the lower contact sheet 23 and A concave portion 101b is formed at an opposing position, and the elastic deformation portions 25b, 40b, 41b, and 42b are in a non-contact state with the receiving-side jig 101. On the other hand, the lower contact sheet 23 and the receiving-side jig 101 in a portion where the elastically deforming portions 25b, 40b, 41b, and 42b are not formed are in contact with each other. The installation table 100 is provided with a positioning member 102 that protrudes upward (Z1 direction in the drawing). The positioning member 102 is passed through positioning holes 30, 31, 32 provided in the lower contact sheet 23, thereby positioning the lower contact sheet 23.

  Spacers 21 are installed on the lower contact sheet 23 as shown in FIGS. A conductive adhesive 50 is applied to the upper surface 21 b and the lower surface 21 c of the spacer 21. As shown in FIG. 10, the spacer 21 is also provided with a positioning hole 103 at the same position facing the positioning holes 30, 31, 32 formed in the lower contact sheet 23 shown in FIG. The spacer 21 is installed on the lower contact sheet 23 through the positioning member 102 through the positioning hole 103 provided in the spacer 21. Accordingly, the spacer 21 and the lower contact sheet 23 are positioned with respect to each other.

  Next, as shown in FIGS. 10 and 11, the upper contact sheet 22 shown in FIG. 1 is installed on the spacer 21. Since the positioning holes 30, 31, 32 formed in the upper contact sheet 22 are at the same position as the lower contact sheet 23 shown in FIG. 2, the upper contact sheet 22 is moved by using a common positioning member 102. It can be positioned on the spacer 21. By passing the positioning member 102 through the positioning holes 30, 31, 32 provided in the upper contact sheet 22, the upper contact sheet 22 and the spacer 21 are positioned relative to each other.

  As shown in FIGS. 10 and 11, a pressing jig (upper pressing jig) 104 is moved from the upper side of the upper contact sheet 22 toward the spacer 21 (downward direction in the drawing), and the lower contact sheet is moved. 23, the spacer 21 and the upper contact sheet 22 are pressed toward the receiving jig 101. As shown in FIG. 11, the lower surface 104a of the pressing jig 104 is opposed to the elastically deforming portions 25b, 40b, 41b, 42b of the spiral contacts 25, 40, 41, 42 formed on the upper contact sheet 22. A concave portion 104b is formed at a position where the elastic deformation portion 25b, 40b, 41b, 42b is not in contact with the pressing jig 104. On the other hand, the upper contact sheet 22 and the pressurizing jig 104 at a location where the elastically deforming portions 25b, 40b, 41b, and 42b are not formed are in contact with each other. Therefore, the elastically deforming portions 25b, 40b, 41b, 42b of the spiral contacts 25, 40, 41, 42 provided on the lower contact sheet 23 and the upper contact sheet 22 are not affected by the pressurization, and are three-dimensional. The molding state is maintained.

By applying heat treatment while pressurizing the lower contact sheet 23, the spacer 21 and the upper contact sheet 22 provided between the jigs 101 and 104, the spacer 21 and the lower contact sheet 23, and the spacer 21 The upper contact sheet 22 is firmly bonded and fixed via the conductive adhesive 50 . At this time, as shown in FIG. 5, the fixing portions 25 a, 40 a, 41 a, 42 a of the spiral contacts 25, 40, 41, 42 provided on the lower contact sheet 23 and the upper contact sheet 22 are provided. Further, the fixed portions 25a, 40a, 41a, 42a of the spiral contacts 25, 40, 41, 42 are substantially opposed in the height direction (Z direction in the drawing), and the fixed portions 25a, 40a, 41a, 42a are substantially opposed to each other. Since the facing area S1 (overlapping area through the spacer) is increased, the pressing force acts strongly between the upper and lower fixing parts 25a, 40a, 41a, 42a through the spacer 21, and the fixing parts 25a, 40a, 41a and 42a are appropriately bonded and fixed to the upper surface 21b and the lower surface 21c of the spacer 21, respectively. As a result, the conductive layer 24 provided in the through hole 21a of the spacer 21 and the fixing portions 25a, 40a, 41a, and 42a are appropriately connected to each other. Elastic deformation portions 25b, 40b, 41b, 42b of the provided spiral contacts 25, 40, 41, 42 and elastic deformation of the spiral contacts 25, 40, 41, 42 provided on the lower contact sheet 23 The portions 25b, 40b, 41b, and 42b are appropriately conducted through the conductive layer 24, and the contact member 20 having excellent electrical reliability can be manufactured.

The advantage of the manufacturing method of the contact member 20 described above is that not only the facing area S1 between the fixing portions 25a, 40a, 41a, 42a of the spiral contacts 25, 40, 41, 42 facing each other in the height direction can be increased. , Two identical contact sheets are prepared, and one contact sheet is inverted with the line (opposite axis) C as the rotation axis, and the non-inverted contact sheet and the inverted contact sheet are respectively spacers 21. Therefore, the contact sheet for the upper contact sheet 22 and the contact sheet for the lower contact sheet 23 do not need to be individually formed, and the formation of the contact sheet is greatly facilitated. Moreover, since the positioning holes provided in the contact sheets 22 and 23 also appear at the same position in the non-reversed contact sheet 22 and the reversed contact sheet 23, the contact sheet 22 is used by using a common positioning member 102. , 23 can be positioned together, the contact sheets 22 and 23 can be positioned very easily and accurately, and the common positioning member 102 can be used, so that the cost of the positioning member 102 can be reduced.

The top view of the upper side contact sheet in a 1st embodiment, The top view of the lower side contact sheet in 1st Embodiment, 1 is an exploded perspective view of a contact member having an upper contact sheet shown in FIG. 1, a lower contact sheet shown in FIG. 2, and a spacer sandwiched between the upper contact sheet and the lower contact sheet; FIG. 4 is a partial cross-sectional view of the contact member in a state where the upper contact sheet and the lower contact sheet are joined to the spacer illustrated in FIG. 3, particularly when cut in the height direction (Z direction) from the line C illustrated in FIG. 1. Partial sectional view of Explanatory drawing which shows the overlapping state of the fixing | fixed part of the elastic contact especially provided in the upper contact sheet, and the fixing part of the elastic contact provided in the lower contact sheet when the contact member shown in FIG. 4 is seen from right above , The top view of the elastic contact of 2nd Embodiment in which a structure differs from the elastic contact shown in FIG.1 and FIG.2, The top view of the elastic contact of 3rd Embodiment in which a structure differs from the elastic contact shown in FIG.1 and FIG.2, Partial side view for explaining the structure of the spiral contact, FIG. 4 is a perspective view of a connection device on which the contact member shown in FIG. 4 is mounted. One process diagram (partial cross-sectional view) showing the manufacturing method of the connecting member, FIG. 10 is a partially enlarged cross-sectional view showing the process performed next to FIG. Plan view of a contact sheet with a conventional spiral contact, The top view of the said contact sheet when the contact sheet shown in FIG. 12 is reversed by making the line C shown in FIG. 12 into a rotating shaft, FIG. 12 is a partial plan view of the contact sheet for explaining the overlapping state of the fixed portions of the spiral contactors that are vertically opposed when the contact sheet shown in FIG. 12 and the contact sheet shown in FIG.

Explanation of symbols

20 Contact member 21 Spacer 22 Upper contact sheet 23 Lower contact sheet 25, 40, 41, 42, 60, 61, 62, 63 Spiral contact 25a, 40a, 41a, 42a, 60a, 61a, 62a, 63a, 70, 71 fixing part 25b, 40b, 41b, 42b, 60b, 61b, 62b, 63b elastic deformation part 26 sheet member 27 first fixing part 28 second fixing part 30, 31, 32 positioning hole 50 conductive adhesive 80 inspection device 90 Electronic component 100 Installation base 101 Receiving side jig (lower pressure jig)
102 Positioning member 104 Pressure jig (Upper pressure jig)
C line (axis of symmetry)
D, E area

Claims (10)

A spacer, an upper elastic contact provided on the spacer, and a lower elastic contact provided below the spacer,
The upper elastic contact and the lower elastic contact have a fixed portion fixed to the spacer, and a spiral elastic deformation portion extending from a winding start end to a winding end connected to the fixing portion , and the fixing The part is formed to extend from the winding start end on the outer side of the elastic deformation part formed in the spiral shape ,
An upper contact sheet having a plurality of the upper elastic contacts and a sheet member , and a lower contact sheet having a plurality of the lower elastic contacts and a sheet member are formed,
The upper contact sheet and the lower contact sheet are set with symmetry axes that bisect the plurality of upper elastic contacts and the plurality of lower elastic contacts,
Said plurality of said provided upper contact sheet upper elastic contacts, and, each of the plurality of the lower elastic contact provided on the lower contact sheet husband, while being disposed in line symmetry with respect to the symmetry axis, each The fixed portion of the upper contact sheet is formed in a substantially line-symmetric shape with respect to the symmetry axis or a parallel line in a direction parallel to the symmetry axis, and is bisected by the symmetry axis. The plurality of fixing portions appearing in the other region, the plurality of fixing portions appearing in the other region, the plurality of fixing portions appearing in one region of the lower contact sheet divided by the symmetry axis, and the other region a plurality of the fixing portions appearing to have, respectively, relative to said axis of symmetry, has a substantially axisymmetric shape,
The upper contact sheet is bonded onto the spacer, the lower contact sheet is bonded under the spacer, and one of the upper contact sheet and the lower contact sheet has the axis of symmetry as a rotation axis. Are joined to the spacer in an inverted state ,
And the fixed portion of the upper elastic contacts facing in the height direction of the spacer, and the fixed portion of the lower elastic contact, characterized in that substantially opposite in the height direction Contact member.   In the plane of the upper contact sheet and the lower contact sheet, the symmetry axis that passes obliquely between the X direction and the Y direction orthogonal to the X direction is set, and a plurality of the upper elastic contacts A fixing portion and a plurality of lower elastic contact fixing portions each include a first fixing portion extending in the X direction, and a second fixing portion connected to the first fixing portion and extending in the Y direction. The contact member according to claim 1, which is configured. Before Symbol pair Shojiku, the contact member of claim 2, wherein the set to the position of 45 degrees each from the X and Y directions. Contact member according to any one of claims 1 to 3 between the said fixed part spacer is bonded and fixed via the conductive adhesive. Each contact sheet is provided with the elastic contact provided with the fixing portion straddling the symmetry axis, and the elastic contact provided with the fixing portion at a position away from the symmetry axis without straddling the symmetry axis, and the symmetry The elastic contact fixing portion appearing in one region of each contact sheet divided into two by the axis and the fixing portion appearing in the other region are formed in a substantially line symmetrical shape with respect to the symmetry axis. The contact member according to any one of claims 1 to 4 . Each contact sheet, a plurality of positioning holes are formed, these positioning holes, the contact member according to any one of claims 1 are formed in line symmetry shape with respect to the axis of symmetry 5 . A contact sheet in which a plurality of elastic contacts are held by a sheet member,
(A) The elastic contact is formed by including a fixed portion and a spiral elastic deformation portion extending from a winding start end to a winding end connected to the fixing portion , and the fixing portion is formed in the spiral shape. Extending from the winding start end to the outer side part of the elastic deformation part formed in
At this time, a symmetry axis that bisects the plurality of elastic contacts is set , the plurality of elastic contacts are arranged in line-symmetrical positions with respect to the symmetry axis , and each of the fixed portions is connected to the symmetry axis or the formed at substantially line-symmetric shape with respect to the symmetry axis parallel to the direction of parallel lines, and a plurality of pre-Symbol solid tough appearing in one of the areas divided by the axis of symmetry, it appears in the other region step of a plurality of said fixed portion with respect to the symmetry axis, in a substantially line-symmetric shape,
(B) a step of holding a plurality of the elastic contacts on the sheet member;
Formed with
(C) preparing two sheets of the same contact sheet formed in the steps (a) and (b), and reversing one of the contact sheets with the symmetry axis as a rotation axis;
(D) The inverted contact sheet is joined to the spacer in the inverted state on the upper side or the lower side of the spacer, and another contact sheet that is not inverted is connected to the other side of the spacer in the non-inverted state. Joining to the surface of
Thus, the fixing portions of the elastic contacts facing each other in the height direction of the spacer are substantially made to face each other in the height direction.   In the planes of the upper contact sheet and the lower contact sheet, the symmetry axis passing obliquely between the X direction and the Y direction orthogonal to the X direction is set, and a plurality of upper elastic contact fixing portions And a plurality of lower elastic contact fixing portions, each including a first fixing portion extending in the X direction and a second fixing portion connected to the first fixing portion and extending in the Y direction. The manufacturing method of the contact member of Claim 7. When joining the contact sheet to the spacer, a conductive adhesive is applied between the fixed portion and the spacer, and a non-contact pressure jig is used for the elastically deforming portion, and the upper and lower sides are opposed via the spacer. The manufacturing method of the contact member according to claim 7 or 8 , wherein the fixing portion to be pressed is pressed in a spacer direction by the pressing jig, and the fixing portion is bonded and fixed to the spacer. In the sheet member, a positioning hole having a line-symmetric shape with respect to the symmetry axis is formed, and the positioning hole is formed at the same position with respect to the two contact sheets, whereby one sheet is formed in step (c). When the contact sheet is reversed with the axis of symmetry as the rotation axis, the positioning hole that appears in the contact sheet in the non-reversed state and the positioning hole that appears in the contact sheet in the reversed state face each other in the height direction. Relationship
Step (d) when using a common positioning member to contact the sheet to be joined to the upper and lower side of the spacer, wherein each contact sheet in any one of claims 7 to 9 for positioning relative to the spacer Manufacturing method of the contact member.

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