JP4522725B2 - heatsink - Google Patents

Description

  The present invention relates to a heat sink for cooling a heating element such as a semiconductor element, and more particularly to a heat sink using a refrigerant.

  As a conventional heat sink of this type, in order to enhance the cooling performance for a heating element such as a semiconductor element, a plurality of flat copper members (hereinafter referred to as planar members) are overlapped to obtain an intermediate planar member and a lower planar surface. A refrigerant inflow channel is formed between the intermediate plane member and the upper plane member, and a refrigerant inflow channel and a refrigerant outflow channel are formed at one end of the intermediate plane member. A plurality of independent water communication holes having small diameters communicating with each other, and the heating element is mounted on the upper surface of the upper planar member on the water conduction hole side, and the high pressure from the lower refrigerant inflow channel The refrigerant is branched into the water guide holes, and then ejected from the water guide holes to the upper coolant outflow water channel, whereby the ejected refrigerant is mounted on the heating element mounting wall portion of the upper planar member. It intended to effect cooling of the heating element by causing collision are already known (e.g., see Patent Document 1).

Japanese Patent Laying-Open No. 2003-273441 (pages 5-6, FIG. 3)

  Since the conventional heat sink is configured as described above, the upper refrigerant outflow channel and the lower refrigerant inflow channel with the intermediate plane member as a boundary are merely mere spaces, respectively. In order to eject high-pressure refrigerant from a plurality of small-diameter water guide holes provided only in the intermediate flat member between the side flat member toward a wide area of the upper refrigerant outflow channel, The turbulent flow of the refrigerant is likely to occur in the upper flow path, and the turbulent flow causes local pressure fluctuations and flow speed fluctuations near the inner wall surface of the flow path at the upper part of the water conveyance hole, resulting in corrosion of the heat sink wall. Has been promoted, and the life of the heat sink has been greatly shortened. Further, since no heat conducting member is provided in the refrigerant inflow channel and the refrigerant outflow channel, there is a problem that the heat radiation area to the refrigerant in the refrigerant inflow channel and the refrigerant outflow channel is restricted.

  The present invention has been made to solve the above-described problems, and has a flow path configuration in which the turbulent flow of the refrigerant is unlikely to occur, and can suppress the corrosion of the heat sink wall due to the turbulent flow. It is an object of the present invention to obtain a highly reliable heat sink that can significantly improve the life of the battery and that can increase the heat radiation area and greatly improve the cooling performance.

In the heat sink according to the present invention, a heating element is mounted on an upper surface, and a refrigerant channel for cooling the heating element is provided therein, and the refrigerant channel is divided into an upper refrigerant channel and a lower refrigerant channel. And an intermediate partition member provided with a refrigerant relay flow path for connecting the upper refrigerant flow path and the lower refrigerant flow path, the lower refrigerant flow path to the refrigerant inlet, and the upper refrigerant flow path to the refrigerant flow In the heat sink connected to each outlet, at least the upper refrigerant flow path, the refrigerant relay flow path, and the lower refrigerant flow path have an inflow refrigerant from the refrigerant relay flow path on the lower surface near the heating element mounting region. collides, a plurality of independent flow paths adjacent to each other along the mounting direction of the heat generating element is made form a plurality of independent flow paths, and the outer independent flow path along the inner wall surface of the heat sink, enclosed by the outer independent channel Monodea being formed from the inner independent channel .

According to the present invention, at least the upper refrigerant flow path of the upper refrigerant flow path, the refrigerant relay flow path, and the lower refrigerant flow path causes the refrigerant flowing in from the refrigerant relay flow path to collide with the lower surface near the heating element mounting area. a plurality of independent flow paths adjacent to each other along the mounting direction of the heat generating element is made form a plurality of independent flow paths, and the outer independent flow path along the inner wall surface of the heat sink, surrounded by the outer independent channel since it is configured as being formed of an inner independent channel, the heating element of the refrigerant sprayed in the mounting wall can be laminar flow by the plurality of independent flow paths, turbulent refrigerant by the laminarization Since the flow is less likely to occur, corrosion of the heat sink wall due to the turbulent flow can be suppressed, and the life of the heat sink can be greatly extended. Further, each independent flow path increases the heat radiation area for the refrigerant at least in the vicinity of the heating element mounting wall portion of the refrigerant flow path, whereby efficient heat exchange is performed and the cooling efficiency is greatly improved. effective.

Embodiment 1 FIG.
1 is a perspective view showing an external appearance of a heat sink according to Embodiment 1 of the present invention, FIG. 2 is an exploded perspective view of FIG. 1, and FIG. 3 is a section taken along line AA in FIG. FIG. 4 is a cross-sectional view taken along the line BB in FIG. 3.
As shown in FIG. 2, the heat sink 1 assembled as shown in FIG. 1 has an upper flow path formed on the lower surface of the upper member 3 having a heating element 2 such as a semiconductor element (laser diode) mounted on the upper surface on one end side. As the arrangement in which the member 4, the intermediate partition member 5, the lower flow path forming member 6 and the lower member 7 are sequentially positioned, the members 3 to 7 are integrally joined by a method such as liquid layer diffusion bonding. ing. Details thereof will be described below.
First, as each of the members 3 to 7, a material having high thermal conductivity such as copper is used, and the thickness thereof is the thickness of the entire heat sink or a passage forming hole 40 to be described later for forming a coolant passage. Generally, a plate material of about 0.1 to 1 mm (rectangular flat plate in the illustrated example) is used. The flow path forming holes 40 and 60 are formed in the planar member by a processing method such as etching or pressing.

  In each of the members 3 to 7, the heating element 2 is mounted on the upper surface of one end side in the longitudinal direction of the upper member 3 along the width direction thereof. Each of the upper flow path forming member 4 and the lower flow path forming member 6 is provided with flow path forming holes 40 and 60 for forming a refrigerant flow path. 60 becomes a refrigerant | coolant flow path by joining each said members 3-7. More specifically, the flow path forming holes 40 of the upper flow path forming member 4 are joined between the lower surface of the upper member 3 and the upper surface of the intermediate partition member 5 by joining the members 3 to 7 to each other. A horizontal upper refrigerant flow path 41 is formed between the lower flow path forming member 6 and the flow path forming hole 60 between the lower surface of the intermediate partition member 5 and the upper surface of the lower member 7. The lower refrigerant flow path 61 in the horizontal direction is formed. Here, the flow path forming hole 40 of the upper flow path forming member 4 has the same punching width and a longer punching length than the flow path forming hole 60 of the lower flow path forming member 6. Yes.

  And in the area | region below the said heat generating body 2 in the flow path formation holes 40 and 60 of the said upper and lower flow path forming members 4 and 6, along the mounting direction (length direction) of the heat generating body 2 is provided. A plurality of heat exchange plates 42 and 62 that are adjacent to each other at a predetermined interval are arranged in parallel. These heat exchange plates 42 and 62 are made of the same material as that of the flow path forming members 4 and 6, such as copper, and have a high thermal conductivity. Each front end wall of the flow path forming members 4 and 6 (heat sink front wall). It is continuously formed integrally with 4a and 6a. Such heat exchange plates 42, 62 partition and form a plurality of independent flow paths 43, 63 adjacent to each other along the mounting direction of the heating element 2 on the front end walls 4a, 6a side of the flow path forming members 4, 6. is doing. Further, in the flow path forming members 4 and 6, the heat exchange plates 42 and 62 positioned at the respective intermediate portions in the width direction are provided with flow path separation bands 42a extending to the center portions of the flow path forming holes 40 and 60, 62a is formed in a series. The flow path separation bands 42a and 62 divide the refrigerant flow paths 41 and 61 formed by the flow path forming holes 40 and 60, respectively, in the width direction when the heat sink 1 is assembled. 4, the flow path separation band 42a of the lower flow path forming member 6 is formed short.

  The intermediate partition member 5 is formed along the front end wall 5a, and includes each of the independent flow paths 63 of the lower flow path forming member 6 and each of the independent flow paths 43 of the upper flow path forming member 4. A plurality of independent refrigerant relay channels 51 for individual connection are provided. Accordingly, the independent flow paths 61 of the lower flow path forming member 6, the independent flow paths 43 of the upper flow path forming member 4, and the refrigerant relay flow paths 51 are formed in the same number. In addition, a refrigerant inlet 71 and a refrigerant outlet 72 are provided in the lower member 7 that sandwiches the lower flow path forming member 6 with the intermediate partition member 5. The refrigerant inlet 71 communicates with the upstream side of the lower refrigerant flow path 61 formed by the flow path forming hole 60 of the lower flow path forming member 6. The refrigerant outlet 72 is a flow path forming hole 40 of the upper flow path forming member 4 via a refrigerant discharge hole 64, 52 provided in each of the lower flow path forming member 6 and the intermediate partition member 5. It communicates with the downstream side of the formed upper refrigerant flow path 41.

  The upper member 3, the upper flow path forming member 4, the intermediate partition member 5, the lower flow path forming member 6, and the lower member 7 formed as described above are laminated as described above, and liquid layer diffusion bonding is performed. The heat sink 1 is assembled by being integrally coupled by the above method. In the assembled heat sink 1, the heat exchange plate 42 and the flow path separation band 42 a of the upper flow path forming member 4 are thermally and mechanically coupled to the lower surface of the upper member 3 and the upper surface of the intermediate partition member 5. Thus, the flow path forming hole 40 of the upper flow path forming member 4 is formed as the upper refrigerant flow path 41. Similarly, the heat exchange plate 62 and the flow path separation band 62 a of the lower flow path forming member 6 are thermally and mechanically coupled to the lower surface of the intermediate partition member 5 and the upper surface of the lower member 7. Thus, the flow path forming hole 60 of the lower flow path forming member 6 is formed as the lower refrigerant flow path 61. The refrigerant inlet 71 of the lower member 7 communicates with the upstream side of the lower refrigerant flow path 61, and the independent flow path 63 between the heat exchange plates 62 passes through the refrigerant relay flow path 51 of the intermediate partition member 5. The upper flow path forming member 4 communicates with the independent flow paths 43 between the heat exchange plates 42, and the downstream side of the upper refrigerant flow path 41 has the refrigerant discharge holes 52 of the intermediate partition member 5 and the lower flow path forming member 6. , 64, the heat sink 1 communicating with the refrigerant outlet 72 of the lower member 7 is obtained.

Next, the dimensional relationship between the refrigerant relay flow path 51 and the heat exchange plates 42 and 62 when the heat generating element (for example, laser diode) 2 has a length of 10 mm × width of 2 mm and a heat generation amount of 50 W will be described below.
FIG. 5 is an enlarged perspective view showing the vicinity of the refrigerant relay flow path in the intermediate partition member in FIG. 2, W1 is the width of the refrigerant relay flow path 51 of the intermediate partition member 5, and H1 is the height of the refrigerant relay flow path 51. , L1 indicates the length of the refrigerant relay channel 51. Here, when the heating element 2 has the above dimensions, the refrigerant relay flow path 51 has W1 = 0.1 mm to 1 mm, H1 = 0.2 mm to 3 mm, L1 ≦ 5 mm, and the number of 6 to 20 It is desirable to do.

  6 is an enlarged perspective view showing the vicinity of the heat exchange plate in the upper flow path forming member in FIG. 2, and W2 is a gap width between the heat exchange plates 42 of the upper flow path forming member 4 (independent flow path 43). Width), H2 represents the height of the heat exchange plate 42, and L2 represents the length of the heat exchange plate 42. Here, as the gap width of the heat exchange plate 42, that is, the width W2 of the independent flow path 43 between the heat exchange plates 42 is narrower, and the number of the independent flow paths 43 is larger, the cooling performance is higher. On the other hand, the flow resistance of the refrigerant also increases. Therefore, when each of the heating element 2 and the refrigerant relay flow path 5 has the above dimensions, the heat exchange plate 42 of the upper flow path forming member 4 has W2 = 0.1 to 1 mm, H2 ≦ 3 mm, and L2 = intermediate partition. It is desirable that the number of the independent flow paths 43 be approximately 6 to 20 with the width W1 × 10 or more of the refrigerant relay flow path 51 of the member 5.

7 is an enlarged perspective view showing the vicinity of the heat exchange plate in the lower flow path forming member in FIG. 2, and W3 is a gap width between the heat exchange plates 62 in the lower flow path forming member 6 (independent flow path). 63, and H3 represents the height of the heat exchange plate 62, and L3 represents the length of the heat exchange plate 62. Also in the lower flow path forming member 6, when each of the upper flow path forming member 4 and the intermediate partition member 5 has the above dimensions, the heat exchange plate 62 has W3 = 0.1-1 mm and H3 ≦ 3 mm. It is desirable that L3 = the width W1 × 10 or more of the refrigerant relay flow path 51 of the intermediate partition member 5 and the number of independent flow paths 43 be about 6 to 20.
It should be noted that the dimensions of the refrigerant relay flow path 51 and the heat exchange plates 42 and 62 described above are merely examples for obtaining ideal cooling performance, and are not necessarily specified by the specific dimensions described above. .

Next, the operation will be described.
The heating element 2 such as a laser diode emits light when a voltage is applied to it. However, when the electrical energy is converted into light, a loss of the electrical energy occurs to generate heat. The heating element 2 in the heat generation state is cooled by a coolant such as water circulating in the heat sink 1. The refrigerant flow in this case will be described below.
As shown by arrows in FIG. 3, the refrigerant that has flowed into the lower refrigerant flow path 61 from the refrigerant inlet 71 below the heat sink 1 first flows into the respective independent flow paths 63 between the lower heat exchange plates 62. . The refrigerant at this time is accelerated because the sectional area of the channel is reduced by the independent channel 63. The accelerated refrigerant collides with the heat sink front wall (front end wall of the lower flow path forming member 6) 6a and becomes an upward flow, passes through the refrigerant relay flow path 51 and the upper independent flow path 43 in order, and then moves to the upper member (heat sink). Heat is taken away by colliding with the lower surface of the upper wall 3 near the mounting area of the heating element 2. The collision refrigerant then flows from each of the upper independent flow paths 43 along the upper flow path separation zone 42a and passes through the refrigerant discharge holes 52 and 64 communicating with the downstream side of the lower refrigerant. It is discharged from the discharge port 72.

  According to the first embodiment described above, the upper member 3 having the heating element 2 mounted on the upper surface on the one end side, the upper flow path forming member 4 that forms the upper refrigerant flow path 41, and the lower refrigerant flow path 61 are provided. The lower flow path forming member 6 to be formed, the intermediate partition member 5 having the refrigerant relay flow path 51 and partitioning the upper refrigerant flow path 41 and the lower refrigerant flow path 61, the refrigerant inlet 71 and the refrigerant outlet In the heat sink 1 in which the lower member 7 having 72 is laminated and integrally joined, in the upper refrigerant channel 41 and the lower refrigerant channel 61, below the mounting region of the heating element 2 on the upper member 3. Then, a plurality of adjacent heat exchange plates 42 and 62 are arranged at predetermined parallel intervals along the mounting direction (longitudinal direction) of the heating element 2, and the heating element 2 is mounted by the heat exchange plates 42 and 62. A plurality of upper independent flow paths 43 adjacent to each other in the direction Each of the upper independent flow path 43 and the lower independent flow path 63 are individually connected to the intermediate partition member 5. Therefore, the following excellent effects can be obtained.

  That is, according to the first embodiment configured as described above, the refrigerant flowing into the lower refrigerant flow path 61 branches into the plurality of lower independent flow paths 63 and is stratified, and the lower independent flow Even in the refrigerant flowing into the upper refrigerant flow path 41 from the path 63 via the refrigerant relay flow path 51, the laminarized state is maintained by passing the same number of upper independent flow paths 43 as the lower independent flow paths 63. Therefore, the turbulent flow of the refrigerant does not occur in either the upper refrigerant flow path 41 or the lower refrigerant flow path 61. Therefore, corrosion of the refrigerant flow path forming wall part due to the turbulent flow of the refrigerant can be suppressed, and there is an effect that the life of the heat sink 1 can be greatly extended.

  Further, each heat exchange plate 42 forming the upper independent flow path 43 includes a front end wall 4a of the upper flow path forming member 4 serving as a heat sink front wall, an upper member 3 serving as a heat sink upper wall, and a bottom of the upper refrigerant flow path 41. Similarly, in each heat exchange plate 62 that forms the lower independent flow path 63, the lower flow path forming member that becomes the heat sink front wall is integrally joined to each of the intermediate partition members 5 that become the walls. 6 is integrally joined to the front end wall 6a, the intermediate partition member 5 and the lower member 7, the heat generated by the heating element 2 is generated by the heat sink upper wall (upper member 3) and the heat sink front wall (upper flow path forming member 4). The heat exchange plates 42 and 62 dissipate heat to the refrigerant through the front end wall 4a) of the upper heat exchange plate 42, the intermediate partition member 5 and the lower heat exchange plate 62. Heat dissipation area for the refrigerant is greatly increased, extremely efficient heat exchange performed by cooling efficiency has the effect of greatly improved. In particular, since the refrigerant laminarized in the upper independent flow path 43 collides with the heat sink upper wall (upper member 3) near the mounting portion of the heating element 2, the cooling efficiency of the heating element 2 is further greatly improved. There is an effect of doing.

  More specifically, in a general fluid flow, when the Reynolds number Re = ud / ν (u: average flow velocity, ν: kinematic viscosity, d: representative diameter) is small, the flow is laminar. In the heat sink 1 according to the first embodiment, the representative diameter d corresponds to the width W1 of the refrigerant relay flow path 51, the width W2 of the upper independent flow path 43, and the width W3 of the lower independent flow path 63, respectively. Re becomes smaller. For this reason, in the first embodiment, the refrigerant flowing through the series of independent flow paths formed by the lower independent flow path 63, the refrigerant relay flow path 51, and the upper independent flow path 43 becomes a laminar flow, and refrigerant turbulence occurs. Corrosion of the heat sink wall due to the flow can be prevented, and the life of the heat sink 1 can be extended.

  In general, when the refrigerant flow is a laminar flow, the cooling performance is lower than when turbulent flow occurs. However, in the first embodiment, a plurality of heat exchange plates 42 and 62 forming a plurality of independent flow paths 43 and 63 are arranged in parallel in the flow paths of the wide refrigerant flow paths 41 and 61, respectively. Since the heat dissipating area is increased by the heat exchange plates 42 and 62, it is possible to compensate for a decrease in the cooling performance due to the laminar flow of the refrigerant and to obtain a high cooling performance.

Embodiment 2. FIG.
8 is an exploded perspective view of the heat sink according to the second embodiment, FIG. 9 is a cross-sectional view in a heat sink assembly state taken along the line CC in FIG. 8, and FIG. 10 is a cross-sectional view along the line DD in FIG. FIGS. 11A and 11B are cross-sectional views taken along the line E-E in FIG. 9, and the same or corresponding parts as those in FIGS.
In the second embodiment, the number of flow path forming members 4 and intermediate partition members 5 stacked between the upper member 3 and the lower member 7 in the first embodiment is increased, and a series of outside independent operations shown in FIG. A flow channel 100 and an inner independent flow channel 101 are formed. That is, in the first embodiment, between the upper member 3 and the lower member 7, two flow path forming members 4, 6 and a single sheet disposed between these flow path forming members 4, 6. By laminating the intermediate partition member 5 and integrally joining them, a single laminar flow independent flow path composed of the upper independent flow path 43, the refrigerant relay flow path 51, and the lower independent flow path 63 is formed. In the second embodiment, four flow path forming members 4, 4A, 4B, 6 and three intermediate partition members 5, 5A, 5B are alternately stacked between the upper member 3 and the lower member 7. As a result, the outer independent flow path 100 along the inner wall surface of the heat sink 1 and the inner independent flow path 101 surrounded by the outer independent flow path 100 are partitioned as shown in FIG. The details will be described below.

  In the second embodiment, as shown in FIG. 8, the flow path forming member and the intermediate partition member that are alternately arranged between the upper member 3 and the lower member 7 are arranged from the upper member 3 side. 1 flow path forming member 4, first intermediate partition member 5, second flow path forming member 4A, second intermediate partition member 5A, third flow path forming member 4B, third intermediate partition member 5B, The fourth flow path forming member 6 will be described. The first flow path forming member 4, the first intermediate partition member 5, the fourth flow path forming member 6, and the upper member 3 and the lower member 7 are the upper flow path forming member of the first embodiment. 4, the intermediate partition member 5, the lower flow path forming member 6, and the upper member 3 and the lower member 7 have the same configuration, and thus the description thereof is omitted.

  First, the second flow path forming member 4A is provided with a plurality of refrigerant relay flow paths 44 similar to the refrigerant relay flow path 51 of the first intermediate partition member 5 on the front end wall (heat sink front wall) 4a side in front of the heat sink. A point in which a plurality of parallel heat exchange plates 42 are integrally formed on a partition wall provided in a line along the wall 4a and partitioning the refrigerant relay flow path 44 group and the flow path forming hole 40 (refrigerant flow path 41), This is different from the upper flow path forming member 4 of the first embodiment (the first flow path forming member in the second embodiment). The third flow path forming member 4B is different from the second flow path forming member 4 in that the flow path separation band 42b is shorter than that of the second flow path forming member 4, and the other portions are the second. This is the same as the flow path forming member 4.

  Next, the second intermediate partition member 5A includes a plurality of outer refrigerant relay channels 51 and inner refrigerant relays that communicate with the refrigerant relay channels 44 of the second and third channel forming members 4A and 4B. The difference from the first intermediate partition member 5 is that the flow paths 53 are provided in parallel. The third intermediate partition member 5B is provided with a refrigerant inflow hole 52a that communicates the upstream sides of the refrigerant flow paths 41 and 61 of the third and fourth flow path forming members 4B and 6 with respect to the first middle partition member 5B. Different from the partition member 5.

  In the above, between the upper member 3 and the lower member 7, the first to fourth flow path forming members 4, 4A4B, 6 are interposed between the flow path forming members 4, 4A4B, 6. The first to third intermediate partition members 5, 5 </ b> A, and 5 </ b> B are stacked and integrally joined to form the heat sink 1 shown in FIGS. 10 to 11. In the heat sink 1, from the lower refrigerant inlet 71 to the fourth refrigerant channel 61 and the independent channel 63 → the refrigerant relay channel 51 of the third intermediate partition member 5B → the refrigerant of the third channel forming member 4B. Relay channel 44 → outer refrigerant relay channel 51 of second intermediate partition member 5A → refrigerant relay channel 44 of second channel forming member 4A → refrigerant relay channel 51 of first intermediate partition member 5 → first A flow path that reaches the lowermost refrigerant discharge port 7 through the independent flow path 43 and the refrigerant flow path 41 of the single flow path forming member 4, that is, the outer independent flow path 100 along the inner wall surface of the heat sink 1, The flow path configuration is such that an inner independent flow path 101 surrounded by the outer independent flow path 100 is formed.

  Here, the inner independent flow path 101 is connected to the refrigerant inflow hole 52a of the third intermediate partition member 5B through the fourth refrigerant flow path 61 from the refrigerant inlet 71 to the refrigerant flow of the third flow path forming member 4B. Channel 41 → Refrigerant relay channel 53 of second intermediate partition member 5A → Independent channel 43 of second channel forming member 4A and refrigerant channel 41 → Formation of second intermediate partition member 5A and third channel The flow path configuration reaches the refrigerant outlet 71 through the refrigerant discharge holes 52, 45, 52, 64 of the member 4B, the third intermediate partition member 5B, and the fourth flow path forming member 6.

  According to the second embodiment described above, a plurality (first to first) each having a plurality of independent flow paths 43 and 63 between the upper member 3 and the lower member 7 similar to those of the first embodiment. The heat sink 1 in which the flow path forming members 4, 4 </ b> A, 4 </ b> B, 6 of 4) and a plurality of (first to third) intermediate partition members 5, 5 </ b> A, 5 </ b> B interposed therebetween are laminated and integrally joined. An outer independent flow path 100 along the inner wall surface of the heat sink 1 by communicating the independent flow paths 43 and 63 of the flow path forming members 4, 4 </ b> A, 4 </ b> B, and 6, and the outer independent flow path 100. The inner independent flow path 101 surrounded by the inner independent flow path 101 is formed, so that the heat radiation area is increased by the outer independent flow path 100 and the inner independent flow path 101 as compared with the case of the first embodiment, which is even better. There is an effect that cooling performance is obtained. The independent flow paths 43 and 63 of the flow path forming members 4, 4 </ b> A, 4 </ b> B and 6 are adjacent to the mounting direction (longitudinal direction) of the heating element 2 below the mounting area of the heating element 2. Since the plurality of heat exchange plates 42 and 62 are formed, the flow of the refrigerant is laminar by the heat exchange plates 42 and 62 as in the case of the first embodiment. Therefore, the turbulent flow of the refrigerant It is possible to prevent the heat sink wall portion from being corroded due to the above, and to extend the life of the heat sink 1.

  In the second embodiment, the case where the outer independent flow channel 100 and the inner independent flow channel 101 are configured as two flow paths has been described. However, the flow path forming members 4, 4 </ b> A, 4 </ b> B, 6, and intermediate partitions are used. The number of members 5, 5A, 5B may be increased to form an independent flow path composed of a plurality of layers. In this case, the same effect as in the first embodiment can be obtained.

It is a perspective view which shows the external appearance of the heat sink by Embodiment 1 of this invention. FIG. 2 is an exploded perspective view of FIG. 1. FIG. 3 is a cross-sectional view taken along the line AA in FIG. 1 so as to pass through the line A1-A1 in FIG. It is sectional drawing along the BB line of FIG. It is an expansion perspective view which shows the vicinity of the refrigerant | coolant relay flow path in the intermediate partition member in FIG. It is an expansion perspective view which shows the vicinity of the heat exchange plate in the upper side flow path formation member in FIG. FIG. 3 is an enlarged perspective view showing the vicinity of a heat exchange plate in a lower flow path forming member in FIG. 2. It is a disassembled perspective view of the heat sink by Embodiment 2 of this invention. It is sectional drawing in the heat sink assembly state cut along the CC line of FIG. It is sectional drawing along the DD line of FIG. It is sectional drawing along the EE line of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Heat sink, 2 Heat generating body, 3 Upper member, 4, 4A Upper flow path formation member, 4a Front end wall, 4B Lower flow path formation member, 5, 5A, 5B Intermediate partition member, 5a Front end wall, 6 Lower flow path Forming member, 6a front end wall, 7 lower member, 40 channel forming hole, 41 upper refrigerant channel, 42 heat exchange plate, 42a channel separation zone, 43 upper independent channel, 44 outer refrigerant relay channel, 45 Refrigerant discharge hole, 51 Refrigerant relay flow path, 52 Refrigerant discharge hole, 52a Refrigerant inflow hole, 53 Inner refrigerant relay flow path, 60 Flow path forming hole, 61 Lower refrigerant flow path, 62 Heat exchange plate, 62a Flow path separation Belt, 63 Lower independent flow path, 64 Refrigerant discharge hole, 71 Refrigerant inlet, 72 Refrigerant outlet, 100 Outer independent flow path, 101 Inner independent flow path.

Claims (3)

A heating element is mounted on the upper surface, and a refrigerant flow path for cooling the heating element is provided therein, and the refrigerant flow path is divided into an upper refrigerant flow path and a lower refrigerant flow path, It has an intermediate partition member provided with a refrigerant relay channel for connecting to the lower refrigerant channel, and the lower refrigerant channel is connected to the refrigerant inlet and the upper refrigerant channel is connected to the refrigerant outlet. In the heat sink,
At least the upper refrigerant flow path of the upper refrigerant flow path, the refrigerant relay flow path, and the lower refrigerant flow path is caused to cause the inflow refrigerant from the refrigerant relay flow path to collide with the lower surface near the heating element mounting region. a plurality of independent flow paths adjacent to each other along the mounting direction of the heating element is made form,
The plurality of independent flow paths include an outer independent flow path along an inner wall surface of the heat sink ,
Heat sink, characterized in that it is formed from the enclosed outside independent channel and inner independent channel. The refrigerant flow path is
A flat plate-like upper member having a heating element mounted on the upper surface on one end side;
A flat plate-like lower member having a refrigerant inlet and a refrigerant outlet;
A plurality of plate-shaped flow path forming members disposed between the upper member and the lower member;
It is formed by a flat intermediate partition member arranged between the flow path forming members,
Refrigerant relay in which an upper refrigerant flow path and a lower refrigerant flow path with the intermediate partition member as a boundary are formed, and an upstream side of the upper refrigerant flow path and a downstream side of the lower refrigerant flow path are provided in the intermediate partition member The heat sink according to claim 1, wherein the heat sink is connected by a flow path, and a plurality of independent flow paths are formed in each of the upper refrigerant flow path and the lower refrigerant flow path at the connection portion.   The independent flow path is formed by a plurality of gaps between a plurality of heat exchange plates adjacent to each other along the heat generator mounting direction and a plurality of refrigerant relay flow paths of the intermediate partition member that are integrally connected to the heat sink wall, and the refrigerant relay flow The heat sink according to claim 1 or 2, wherein the number of gaps between the path and the heat exchange plate is the same.

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