JP4516511B2 - Disc cleaning device - Google Patents

Description

  The present invention relates to a disk cleaning apparatus, and more particularly, in a disk cleaning apparatus for scrub cleaning a disk (disk) such as a wafer, a hard disk, or an optical disk, it is possible to simultaneously scrub and clean a plurality of disks in a batch manner. The present invention relates to a disk cleaning apparatus that can improve the throughput of cleaning processing and is suitable for downsizing of the apparatus.

For example, in a hard disk substrate or the like, the disk is cleaned after processes such as grinding, polishing, sputtering, and plating. Such a hard disk or a disk such as a wafer is cleaned by a plurality of cleaning processes and a drying process after cleaning.
In the cleaning process, an apparatus is generally known in which a carrier (or tray) in which a plurality of disks are vertically arranged is immersed in a cleaning liquid tank and cleaned by ultrasonic waves or the like. In this case, the disk after cleaning is dried by transporting the carrier (or tray) to the drying chamber.
In place of such carrier cleaning, a scrub cleaning device that provides a conveyor in each of the shower tank, chemical tank, ultrasonic tank, and pure water tank, conveys the disk in each tank, and sequentially moves between the tanks for cleaning. Is also known (Patent Document 1).
Separately from these, multiple cleaning chambers such as brush cleaning (scrub cleaning), jet cleaning, and shower cleaning are arranged radially, and the disk is held vertically on the turntable and the disk is rotated to move the disk. A technique is known in which a cleaning unit is selected according to the cleaning method (Patent Document 2).
JP 2001-96245 A JP 2001-29905 A

Also known is a technique of scrub cleaning a large number of discs simultaneously by assembling a large number of disc brushes by inserting them into one axis continuously with a gap and assembling a part of the disc between the disc brush gaps. Yes (Patent Document 3).
In the brush cleaning, a porous sponge is brought into contact with the surface of the rotating disk for cleaning, instead of a normal brush. In this specification and claims, such sponges are also included in the brush concept.
JP 11-129349 A

Hard disks have now penetrated into the fields of automobile products, home appliances, and acoustic products, and hard disk drives of 2.5 inches to 1.8 inches and even 1.0 inches or less are built in these product areas. Have been used. Hard disk drive devices tend to be further miniaturized. In addition, the product unit price of the hard disk drive itself is lowered, and manufacturers are required to manufacture a large amount of hard disk drive at a reduced cost.
Therefore, there is a demand for cleaning a large number of disks at the same time even in the disk cleaning apparatus. However, the conventional disc cleaning apparatus as described above is a single-wafer type scrub cleaning portion even if batch processing can be performed as a whole, and discs are individually cleaned. Therefore, it is not suitable for processing a large number of small disks of 2.5 inches or less at the same time.
In addition, since the rotating brush for scrub cleaning, including the sponge, is in contact with both surfaces of the disk surface, it is usually necessary to have independent rotating shafts for the disk and the rotating brush, and the rotating cleaning mechanism becomes larger. There's a problem.
Even in the case of Patent Document 3 where scrub cleaning is performed by inserting a large number of disc brushes into one axis with gaps, a rotating shaft for the disc and disc brush is required, and a disc brush with a large diameter is required. Since the disk must be provided independently and its tip must be brought into contact with the disk from the outside, the rotary cleaning mechanism is also increased in size and is not suitable for cleaning a small disk.
Moreover, since the disk loaded in the cleaning device is usually loaded into the disk cleaning device from a handling mechanism (handling robot) that moves up and down with a chuck mechanism, the height or width of the cleaning device must be increased. Absent.
An object of the present invention is to solve such problems of the prior art, and it is possible to perform scrub cleaning by a batch method, improve the throughput of cleaning processing, and reduce the size of the apparatus. The object is to provide a suitable disc cleaning device.

In order to achieve such an object, the disc cleaning apparatus of the present invention is characterized by having a rotating shaft on which a plurality of rotating brushes each having a disc-shaped or cylindrical brush having a predetermined length are inserted. A rotating brush unit that rotates by rotating the rotating brush unit with a disk inserted between the brush surfaces of the adjacent front and rear rotating brushes, and prevents rotation of the retained disk around the rotation axis due to rotation of the rotating brush. Disc revolution prevention stopper for allowing the disc to rotate, and a disc of the rotary brush provided by receiving the disc loaded from outside the device provided adjacent to the rotary brush unit and rotating the disc about a point on the outside of the disc. comprise a disk insertion mechanism for inserting between the surfaces, the outer periphery of the disc in the disc revolution prevention stopper and the rotation axis of the contact and the rotary brush By the rolling in which rotation of the disk is made.

As described above, in the present invention, a plurality of disc-shaped or cylindrical brushes (sponge or sponge brush) having a predetermined length are continuously inserted into the rotating shaft, and these disc-shaped or cylindrical-shaped brushes are inserted. The disc is inserted and held between the brush surfaces of the rotating brushes adjacent to the brush. Then, in order to prevent the held disc from revolving around the rotation axis due to the rotation of the rotating brush, it is blocked by a disc revolution prevention stopper. In this way, since the revolution of the disk is prevented, the disk can rotate according to the rotation of the rotating brush due to the frictional contact. This allows the disc to be cleaned. In this case, since a rotating shaft for rotating the disk is not necessary, a small disk cleaning device can be realized.
The disc insertion mechanism rotates the disc received around one point on the outer side of the received disc toward the rotating brush unit and inserts the disc into the rotating brush unit. Can be delivered at the same time. As a result, more disks can be inserted into the simultaneous rotating brush unit than when the disks are mounted linearly on the rotating brush unit directly from the disk handling mechanism or the like.
In particular, the space in the height direction of the disk cleaning device can be reduced by providing the position of the disk insertion mechanism below the rotating brush unit. In addition, when the rotating shaft is rotated, the scrub cleaning of the disk by the rotating brush is started at the same time, so that the throughput is improved. Further, if two rotary brush units are provided in an array and the disc is transferred, the cleaning throughput can be further improved.

Further, if a groove is provided on the rotating shaft side corresponding to the insertion position of a plurality of discs to drive the rotating shaft to make the disc easier to rotate, and the revolution prevention stopper is a roller or a grooved roller, the disc Since the position is constant due to the action of the groove, the frictional force with the rotating brush can be stabilized. Thereby, the frictional force can be adjusted to be small so that the disk is not damaged.
Also, since the disc is inserted and held between the front bottom brush surface and the rear head brush surface of the adjacent disc-shaped or cylindrical brush, the smaller the disc is 2.5 inches or less. Since it is easy to hold and adopts a structure in which a plurality of disc-shaped or cylindrical brushes are continuously inserted into a single rotating shaft for driving the rotating brush, the entire apparatus can be miniaturized.
As a result, it is possible to scrub the discs in a batch manner, and it is possible to wash a plurality of discs at the same time, thereby improving the throughput of the cleaning process. Furthermore, it is possible to realize a disk cleaning device suitable for downsizing the device.
If a large number of perforated brush cleaner discs are inserted between the front bottom brush surface of the adjacent disc or cylindrical brush and the head brush surface of the rear brush, the disc shape Alternatively, there is an advantage that a guide groove (gap) is easily formed at an insertion position of a disk inserted between adjacent brush surfaces of the cylindrical brush, and a plurality of disks can be easily inserted at the same time.

FIG. 1 is a side sectional view of a disk cleaning apparatus according to an embodiment of the present invention. FIG. 2 is a partially omitted perspective view showing a configuration of a main part. FIG. FIG. 4 is an explanatory diagram of the principle of ejecting the inserted disc from the rotating brush unit, and FIG. 5 is an explanation of the operation of ejecting the two-stage cleaned disc from the rotating brush unit. FIG.
In each figure, the same component is shown with the same code.
1 and 2, reference numeral 10 denotes a disk cleaning device (inside the scrub cleaning chamber), 10a denotes a base casing, and 10b denotes an upper cover.
1 is a disk to be cleaned, 2 is its cleaning mechanism, 3 and 4 are rotating brush units, and 3a and 4a are porous sponge discs (hereinafter referred to as disc brushes) each having a predetermined length. Then, a large number of rollers 3b and 4b are continuously inserted into the rotating brushes, and the rotating brush units 3 and 4 are constituent members.
Rotating brush unit 3, in the disk loader side, the rotation brush unit 4 that is located in the disk unloader side.

18a, 18b, and 18c are cleaning nozzles, and the cleaning nozzles 18a and 18b are disposed on the upper side of the rotary brush units 3 and 4 inside the upper cover 10b, and serve as disc cleaning nozzles. A cleaning nozzle 18c is disposed below the brush cleaner disks 8 and 9 in the base housing 10a, and serves as a cleaning nozzle for the brush cleaner disks 8 and 9.
In FIG. 2, for the explanation of the relationship of the internal structure, the rotating brush unit 3 side is omitted and indicated by a dotted line, a part on the rotating brush unit 4 side is indicated by a solid line, and a part on the rear side is a disc. It is explanatory drawing shown in the state which can see the sleeve 4d with a groove | channel except brush 4a (rotating brush).
The disk 1 is inserted and held between the brush surfaces of adjacent front and rear disk brushes (rotating brushes) 3a and 4a. As shown in the figure, the width from the inner diameter to the outer shape of the disc brushes 3a, 4a reaches the inner diameter of the disk 1 and is a width that allows the disk 1 to be partially held and held in contact with the outside of the rotary shafts 3c, 4c. Have (see Figure 1 and Figure 2). This allows for sufficient cleaning of the disk over a wide area.

The rollers 3b and 4b are configured by closely attaching grooved sleeves 3d and 4d (see FIG. 2) to the rotation shafts 3c and 4c. Accordingly, the rollers 3b and 4b are rollers in which the grooved sleeves 3d (not shown) and 4d rotate together with the rotation shafts 3c and 4c. These rollers 3b and 4b form one long roller along the axial direction by the sleeves 3d and 4d and the rotating shafts 3c and 4c.
As shown in FIG. 2, sleeves 3 d (not shown) corresponding to the positions of the contact portions S formed by contacting the brush surfaces of the adjacent front and rear disc brushes 3 a and 4 a with the rollers 3 b and 4 b, Circumferential grooves 5a are provided in 4d (see the part indicated by the solid line). The rotating shafts 3c and 4c drive the disk 1 through rotation of the disc brushes 3a and 4a by frictional contact and the respective circumferential grooves 5a.
In addition, although the drive motor is couple | bonded with the rotating shafts 3c and 4c, the drive motor is abbreviate | omitted in the figure.

In FIGS. 1 and 2, 6 and 7 are disc revolution prevention stoppers formed as rollers, and the disc revolution prevention roller 6 is on the rotating brush unit 3 side and is adjacent to the outer periphery of the disc brush 3a. Is provided on the load side (right side in FIG. 1). The disk revolution prevention roller 7 is on the rotating brush unit 4 side, and is provided adjacent to the rotating brush unit 3 at a position adjacent to the outer periphery of the disc brush 4a.
In other words, the disk revolution prevention roller 7 is disposed between the rotating brush unit 3 and the rotating brush unit 4, but in this case, the position thereof is related to the lowest point of the outer periphery of the disk 1 or in the vicinity thereof. It is in the position close | similar to the outer periphery of the disc brush 3a of the rotating brush unit 3 so that it may match. The reason will be described later.
The disk revolution prevention rollers 6 and 7 are configured by attaching grooved sleeves 6b and 7b to the shaft 6a and the shaft 7a, respectively, corresponding to the positions of the n disks 1 inserted into the disc brushes 3a and 4a. Is done. Both ends of the shaft 6a and the shaft 7a are supported by bearings on the front and rear frames of FIG. 1, but only the rear frame 13 is shown in FIG.
These disc revolution preventing rollers 6 and 7 have shafts 6a and 7a provided in parallel to the rotating shaft 3c and the rotating shaft 4c, respectively, and form a long roller along the axial direction. The circumferential grooves 6c and 7c of the grooved sleeves 6b and 7b are respectively provided corresponding to the respective disks 1 so as to be in contact with the outer circumferences of the respective disks 1 inserted into the contact portion S (see FIG. 2). ing.

It should be noted that a roller that can rotate with respect to the shafts 6a and 7a only in the portion corresponding to the position of each disk 1 inserted in the contact portion S (see FIG. 2) in the disk revolution prevention rollers 6 and 7 may be provided. Good. Of course, grooves (hereinafter referred to as “circumferential grooves”) 6 c and 7 c can be further provided in the circumferential direction on the roller.
Further, the disk revolution prevention rollers 6 and 7 revolve around the rotation shafts 3c and 4c when the rotation shafts 3c and 4c rotate and a number of disk brushes 3a and 4a rotate in the clockwise direction. And the disk 1 is rotated counterclockwise at that position. Therefore, the disk revolution preventing rollers 6 and 7 may be simple shafts instead of rollers.
11 is a disc insertion mechanism provided on the load side for simultaneously inserting a plurality of discs 1 to be cleaned into the rotary unit 3, and 12 is an unloader that receives the plurality of cleaned discs 1 from the rotary unit 4 at the same time. This is a disk receiving mechanism that is disposed at a position and provided on the unload side.
N brush cleaner discs 8 and 9 are provided corresponding to n (n is an integer of 2 or more) disks 1 and are respectively inserted into the shafts 8a and 9a. As a result, the disk brushes (rotating brushes) 3a and 4a of the rotating brush units 3 and 4 are rotated by being driven by the frictional contact thereof. The brush cleaner discs 8 and 9 are respectively provided with openings 8b and 9b in a radial manner. In this case, the brush cleaner disks 8 and 9 may be independently driven by a motor.

Circumferential grooves 5a are provided in the sleeves 3d and 4d corresponding to the position of the disk on the rotating shafts 3c and 4c, respectively, so that the disk can be rotated more easily by driving with the rotating shafts 3c and 4c, and the anti-revolution stopper is used to prevent the disk from rotating. By using the rollers 6 and 7, the frictional force between the disk 1 and the disk brushes 3a and 4a can be adjusted to be small enough not to be damaged. In particular, the disk revolution preventing rollers 6 and 7 are similarly rollers provided with circumferential grooves 6c and 7c at positions corresponding to the circumferential grooves 5a, so that the position of the disk 1 becomes constant, and the rotating brush The frictional force can be stabilized.
In addition, a longitudinal groove 5b is provided along the axial direction provided in the sleeves 3d (not shown) and 4d (see the part indicated by the solid line), and the disc brushes 3a and 4a are provided with protrusions (see FIG. (Not shown) is constrained in the rotational direction and is slidably inserted in the axial direction.

As shown in FIGS. 3C and 3D, when the rotating shafts 3c and 4c are rotated clockwise and a large number of disk brushes 3a and 4a are also rotated clockwise, the disk brushes 3a and 4a By frictional engagement, the disk 1 rotates counterclockwise. At this time, the circumferential groove 5 a and the circumferential grooves 6 c and 7 c support the rotational stability of the disk 1.
Alternatively, the circumferential grooves 5a may be directly provided as valley grooves in the rotating shafts 3c and 4c corresponding to the contact portions S without attaching sleeves to the rotating shafts 3c and 4c.
Further, in place of the circumferential groove 5a, only the portion corresponding to the position of each disk 1 inserted in the contact portion S (see FIG. 2) in the rollers 3b and 4b can rotate with respect to the rotary shafts 3c and 4c. A number of individual rollers may be provided by providing the rollers individually. As the individual rollers rotate in the clockwise direction in the same manner as the rotation shafts 3c and 4c, friction with the rotation shafts 3c and 4c is reduced, and the disk can be more easily rotated counterclockwise. Of course, this individual roller can be further provided with a circumferential groove 5a.

As shown in FIG. 2 and FIG. 3C, n (n is an integer of 2 or more) disks 1 are adjacent to each other about 1/4 of the outer circumference from the side above the center of the rotating shafts 3c, 4c. It is inserted and held between the bottom brush surface and the head brush surface of the front and rear disk brushes 3a, 4a, respectively. The n brush cleaner disks 8 and 9 have the bottom brush surfaces of the front and rear disk brushes 3a and 4a that are adjacent to each other from the bottom in the same manner on the lower side of the center of the rotary shafts 3c and 4c. Each is inserted between the head brush surface. Each of the brush cleaner discs 8 and 9 is also fixed to the shafts 8a and 9a corresponding to the positions of the n discs 1 inserted therein, and is provided rotatably by rotating the shafts 8a and 9a. .
When a part of the brush cleaner discs 8 and 9 is inserted between the bottom brush surfaces of the adjacent disc brushes 3a and 4a and the head brush surfaces of the subsequent disc brushes 3a and 4a as described above, There is an advantage that a guide groove (gap) is easily formed at the insertion position of the disk 1 to be inserted between the front and rear brush surfaces adjacent to the plate brushes 3a, 4a, and a plurality of disks 1 are easily inserted simultaneously.

By the way, if the disc brushes 3a and 4a are forcibly inserted into the rotary shafts 3c and 4c, the contact pressures on the respective disks 1 may not be uniform because the insertion positions are not accurate. Therefore, as described above, protrusions are provided along the axial direction of the rotary shafts 3c, 4c inside the opening holes at the center of the disc brushes 3a, 4a, and sleeves 3d (not shown), 4d (in solid lines). When the disc brushes 3a and 4a are rotated, the disc brushes 3a and 4a are rotated along the axial direction of the rotary shafts 3c and 4c. It becomes possible to move.
As a result, the brush cleaner discs 8 and 9 are partially inserted from below so that the positions of the many disc brushes 3a and 4a are shifted to proper positions in the axial direction of the rotary shafts 3c and 4c. . As a result, the positions of the disc brushes 3a and 4a are set to the optimum positions and corrected.
As a result, the brush surfaces of the disk brushes 3a and 4a can be brought into contact with the surfaces of the respective discs 1 with appropriate contact pressure on the plurality of discs 1 inserted into the contact portions S, and textures and Other effects that are difficult to cause contact damage occur.
Of course, the disc brushes 3a and 4a have a center hole smaller than the diameter of the rollers 3b and 4b (or the rotating shafts 3c and 4c), and n + 1 continuous rollers are forced through the center hole to the rollers 3b and 4b. May be inserted. By inserting and fixing the disc brushes 3a and 4a so that the rotary shafts 3c and 4c cannot move in the axial direction, the rollers 3b and 4b and the disc brushes 3a and 4a become an integral unit.

The disc insertion mechanism 11 includes two disc receiving shafts 111 and 112 provided on the load side adjacent to the disc revolution preventing roller 6, and ends of the disc receiving shaft 111 and 112 are fixed to the disc revolution preventing roller 6. The brackets 113 (see FIG. 2) and 114 (see FIG. 1) support these at both ends of 112, and a stepping motor 115 whose rotation shaft is coupled to the disk revolution prevention roller 6. A rotating shaft 115a of the stepping motor 115 is coupled to the bracket 114 and rotates the bracket 114. Both ends of the shaft 6a of the disk revolution prevention roller 6 and the disk receiving shafts 111 and 112 are supported by brackets 113 and 114, respectively, and rotate freely.
The stepping motor 115 can be a rotary air cylinder.
The disk receiving shafts 111 and 112 are fitted with grooved sleeves 111 a and 112 a so as to be in contact with the outer circumferences of the respective disks 1 so as to correspond to the respective disks 1. Reference numeral 116 denotes a circumferential groove formed in the sleeve, and the position of each circumferential groove 116 is formed corresponding to the circumferential groove 6c formed in the grooved sleeve 6b of the disk revolution prevention roller 6. It exists in the position corresponding also to the circumferential groove 5a.
Unlike the grooved sleeves 3d and 4d, the grooved sleeves 111a and 112a are supported by bearings or inserted into the disk receiving shafts 111 and 112 with a minute gap so that they can rotate around the rotation shafts 111 and 112. Good.

As shown in FIG. 1, the disk revolution prevention roller 6 and the disk bearing shaft 111 are disposed at a slightly smaller distance than the diameter of the disk 1 in the horizontal direction slightly below the center of the disk 1 to be supported. The disc bearing shaft 112 is disposed so as to contact the outer periphery of the lowest point portion of the disc 1. As a result, a disc receiving tray having recesses is formed at three points below the center of the disc 1, and these three shafts are brought into contact with the outer periphery of the disc 1 so that the disc delivery hand 14 (see FIG. 3A). N disks 1 are received simultaneously. As a result, these discs 1 are supported with their outer circumferences more than half open from slightly below the center to above.
The disk delivery hand 14 shown in FIG. 3A is moved up and down by an elevating mechanism (not shown), and simultaneously chucks the n disks 1 from both sides with two opposing chuck surfaces. It has n chucks at intervals corresponding to the length of the disc brush.

Therefore, when the stepping motor 115 rotates the disk revolution prevention roller 6 about 90 ° counterclockwise, the brackets 113 and 114 (not shown) rotate 90 ° or more counterclockwise, and accordingly, The disk receiving shafts 111 and 112 of the disk inserting mechanism 11 rotate counterclockwise around 90 ° (see FIG. 3B).
As a result, the n number of disks 1 held by the disk insertion mechanism 11 are simultaneously inserted into the rotary unit 3. Thereafter, the stepping motor 115 rotates the disk revolution prevention roller 6 in the clockwise direction backward and forward by 90 °, whereby the brackets 113 and 114 (not shown) rotate in the clockwise direction by 90 ° and the disk insertion mechanism 11 is rotated. The disc bearing shafts 111 and 112 return to the horizontal position, which is the original load position (see FIG. 3B).

The disc receiving mechanism 12 disposed at the unloading position is provided on the rear side (unloading side on the left side of the drawing) adjacent to the rotating unit 4 and parallel to the rotating shaft 4c. This has three disk receiving shafts 121, 122, 123, and the disk receiving shafts 122, 123 correspond to the disk receiving shafts 111, 112 of the disk insertion mechanism 11, respectively. A rotation shaft 126 a of the stepping motor 126 is coupled to the bracket 124 and rotates the bracket 124. The disc bearing shafts 121, 122, 123 are supported by the brackets 124, 125 at both ends, and rotate freely.
The stepping motor 126 can be a rotary air cylinder.
The stepping motor 126 and the stepping motor 115 are fixed to an apparatus frame (not shown), but the state is omitted in FIG. Both ends of the disk receiving shaft 111 are supported by bearings in a frame provided on the front side of the drawing in FIG. 1 and a frame 13 provided on the rear side.
Each disk receiving shaft 121, 122, 123 is provided with a sleeve 121a, 122a, 123a with a groove. Brackets 124 (see FIG. 2) and 125 (see FIG. 1) that support these shafts correspond to the brackets 113 and 114, respectively, and the stepping motor 126 corresponds to the stepping motor 115, respectively. The circumferential groove 127 corresponds to the circumferential groove 116 formed in the sleeve of the disk insertion mechanism 11.
However, the rotation angle of each axis of the disc receiving mechanism 12 is about half of that of the disc insertion mechanism 11.

  In contrast to the disc insertion mechanism 11, the brackets 124 and 125 cause the stepping motor 126 to rotate the disc receiving shaft 121 clockwise by about 45 ° (see FIG. 5B). The disk receiving mechanism 12 simultaneously receives n disks 1 from the rotating unit 4 at this position. After receiving the disk 1, the stepping motor 126 rotates the disk receiving mechanism 12 clockwise to return it to the original position. This original position becomes the disk unloading position. The plurality of disks 1 held by the disk receiving mechanism 12 are taken out by a disk delivery hand 15 (see FIG. 5C) similar to the disk delivery hand 14.

Next, the operation of simultaneously cleaning the n disks 1 will be described with reference to FIGS.
FIGS. 3A to 3E are explanatory views of the disk feeding operation from the loading of the disk to the two-stage cleaning.
The disk delivery hand 14 is disposed in the disk insertion mechanism 11 and is moved up and down by an elevating mechanism (not shown), and is formed by the disk receiving shafts 111 and 112 of the disk insertion mechanism 11 and the disk revolution prevention roller 6. The n discs 1 are simultaneously lowered onto the trays of the three recessed portions, and the disc insertion mechanism 11 receives the n discs 1 and forms the circumferential grooves 6c and 116 at predetermined intervals in the axial direction. (See FIG. 3A).
Here, the cleaning is started, the cleaning liquid is sprayed from the cleaning nozzles 18a to 18c, and the disc insertion mechanism 11 is rotated about 90 ° counterclockwise around the disc revolution prevention roller 6 by the stepping motor 115. The n discs 1 placed on the attachment mechanism 11 are simultaneously rotated about 90 ° counterclockwise. At this time, the roller 3b of the rotating brush unit 3 is simultaneously driven to rotate in the clockwise direction opposite to the rotating direction of the disk insertion mechanism 11, and the brush surfaces before and after the disk brush 3a of the rotating brush unit 3 contact each other. The n discs 1 are simultaneously inserted into the portion from the lateral direction (see FIG. 3B).
At this time, the brush cleaner discs 8 and 9 are also rotating, and a part of the brush cleaner discs 8 and 9 are inserted into the contact portions S of the brush surfaces before and after the disc brush 3a to form a guide groove. Yes.
As a result, the disk 1 can be easily attached to the rotating brush unit 3.

When the insertion of the n discs 1 into the rotating brush unit 3 is completed, the disc insertion mechanism 11 is rotated in the clockwise direction and returned to the original position (see FIG. 3C). At this time, the n discs 1 inserted into the rotating brush are prevented from revolving by the disc revolution prevention roller 6 and rotated counterclockwise, and the disc 1 is continuously cleaned.
When the cleaning of the disk 1 is completed after a predetermined time has elapsed, the roller 3b of the rotating brush unit 3 rotates in the reverse direction and rotates counterclockwise. At this time, the n disks 1 are in contact with the disk revolution prevention roller 7 of the rotating brush unit 4 in the vicinity of the lowermost point on the outer periphery, and the disk on the left side of the outer periphery of the rotating brush unit 3 indicated by the dotted line in FIG. Then, the n discs 1 move over the disc revolution prevention roller 7 and move toward the rotating brush unit 4 (see FIG. 3D).
The reason for this is that the disk revolution prevention roller 7 is provided close to the lowermost point of the outer periphery of the disk 1 or a position close to the outer periphery of the disc brush 3a of the rotating brush unit 3 so as to be engaged therewith. Because. Thereby, according to the counterclockwise rotation of the disc brush 3a, the n discs 1 are pushed over the disc revolution preventing roller 7 and pushed out to the rotating brush unit 4 side.

With reference to FIG. 4, the principle that the disk 1 gets over the disk revolution prevention roller 7 will be described.
The center of the disk revolution prevention roller 7 in FIG. 3 (d) is close to the center of the disk 1 whose outer periphery is in contact with the roller, but is slightly shifted outward from the center of the disk 1 as shown in FIG. Yes. If the engagement point between the disk revolution prevention roller 7 and the outer periphery of the disk 1 is K, the disc brush 3a applies a frictional force indicated by a force FA to the disk 1, thereby rotating the disk 1 counterclockwise. . At the same time, a pressing force indicated by a force FB is applied to the upper outer peripheral side surface of the disk 1 held between the front and rear disk brushes 3a. This also becomes a force for rotating the disk 1, and the disk 1 rotates.
Since the force FA is a frictional force that does not damage the disk 1, normally, the force FB> force FA. If the direction of the resultant force FW is above the engagement point K, the disk 1 comes into contact with the disk revolution prevention roller 7 and is pushed out of the rotating brush unit 3 and discharged. Accordingly, here, the disk revolution prevention roller 7 is set at a position where this relationship is maintained, and n disks 1 move from the rotating brush unit 3 to the rotating brush unit 4.
This relationship is the same as the relationship between the shaft 121 of the disk receiving mechanism 12 and the rotating brush unit 4. When the rotating brush unit 4 rotates counterclockwise, the rotating brush unit 4 moves to the disk receiving mechanism 12 via the shaft 121. n disks 1 move.

On the contrary, when the resultant force FW becomes lower than the outer peripheral engagement point K of the disk, the disk 1 is not pushed outward. This relationship is the relationship between the disc revolution preventing roller 6 on the disc insertion mechanism 11 side and the disc 1.
That is, the disk revolution prevention roller 6 engages with the disk 1 at a position higher than the lowermost vicinity of the outer periphery of the disk 1. In this way, n disks 1 are supported between the roller 3b of the rotating brush unit 3 (the circumferential groove 5a of the sleeve 3d). As a result, the n disks 1 have a resultant force FW below the engagement point K, and do not get over the disk revolution prevention roller 6 even during disk cleaning. Further, the position of the disk revolution prevention roller 6 is set so that the disk revolution prevention roller 6 holds the disk 1 in such a positional relation with the roller 3b (circumferential groove 5a of the sleeve 3d).
The relationship between the disc revolution prevention roller 7 and the rotating brush unit 4 is also in the same positional relationship as the disc revolution prevention roller 6.
By the way, even if the resultant force FW is slightly below the outer peripheral engagement point K of the disc, the disc can be discharged to the outside when the disc revolution preventing roller 7 is a rotatable roller. The reason is that, at this time, the disk 1 is rotating in the clockwise direction, so the roller of the disk revolution prevention roller 7 is rotated in the counterclockwise direction for pushing out the disk 1. This is because the force for pushing out the disk 1 increases by this rotating action.
Note that the above description with the resultant force FW is for easy understanding. Actually, the point of action of the force FB is a high position on the outer periphery of the disk 1 so as to pass the center of the disk 1. Therefore, the disk 1 is easily pushed outward by the force FB as described above.

  For this reason, n disks 1 ride on the disk revolution prevention roller 7 and move to the rotating brush unit 4 side. At this time, the rotating brush unit 4 is rotating in the clockwise direction, and the disk 1 that has passed over the disk revolution prevention roller 7 is received by the contact portion S, and the state shown in FIG. At this time, the n discs 1 are prevented from rotating clockwise by the disc revolution preventing roller 7 and are rotated counterclockwise by the rotating brush unit 4. Therefore, the disk 1 is cleaned.

The rotating brush unit 4 rotates clockwise, receives the disk 1 that has passed over the disk revolution prevention roller 7 into the contact portion S, and in the state shown in FIG. Revolution is prevented and the rotating brush unit 4 rotates counterclockwise. Therefore, the disk 1 is cleaned.
Of course, at this time, n new discs are loaded into the rotating brush unit 3 by the disc insertion mechanism 11 and n new discs are inserted between the disc revolution preventing roller 6 and the rotating brush unit 3 in the state shown in FIG. As shown in FIG. 2, the rotating brush unit 4 similarly holds n new disks between the disk revolution preventing roller 7 and the rotating brush unit 4 as shown in FIG. Then, it is rotated and cleaning is performed in parallel. Further, the disk receiving mechanism 12 holds a disk 1 for unloading.

FIG. 5 is an explanatory diagram of the operation of discharging the disk that has been cleaned in two stages from the rotating brush unit.
When the cleaning of the disc with the rotating brush unit 4 is completed in the state of FIG. 3E, the disc receiving mechanism 12 rotates clockwise by about 45 ° from the state of FIG. become. Thereafter, the roller 4b of the rotating brush unit 4 rotates counterclockwise, and the n discs 1 that have been cleaned are delivered to the disc receiving mechanism 12 (see FIG. 5B).
When receiving the n discs 1, the disc receiving mechanism 12 rotates about 45 ° counterclockwise and returns to the original position (see FIG. 5C).
The n discs after cleaning held by the disc receiving mechanism 12 at the position shown in FIG. 5 (c) are taken out by a disc take-out hand 15 similar to the disc delivery hand 14 provided on the unload side. 10 to the next drying step and the like.

In the above embodiment, two rotating brush units 3 and 4 are provided in parallel and the disk 1 is transferred and cleaned by each rotating brush unit 3 and 4, so that the cleaning efficiency can be improved.
The n discs 1 are held between the bottom brush surface and the head brush surface of the adjacent front and rear disc brushes 3a and 4a, and disc revolution is prevented by disc revolution prevention rollers 6 and 7, thereby discs. It rotates according to the rotation of the brushes 3a and 4a.
With this rotation, the n discs 1 rotate simultaneously without being supported by the rotating shaft while being exposed to the cleaning liquid shower of the cleaning nozzles 18a, 18b, 18c, and the bottom brush surface and the head of the disk brushes 3a, 4a. It is rubbed with the part brush surface and shower washed. At the same time, the brush cleaner discs 8 and 9 are rotated, and the disc brushes 3a and 4a themselves are simultaneously cleaned by the multiple openings 8b and 9b.

As described above, in the embodiment, the rotating brush uses a disk-like one for cleaning a large number of discs at the same time, but if the number of discs is small, a cylindrical rotating brush is used. Of course it is good. Of course, the number of disks to be processed may be one, not a plurality.
In the embodiment, the disc is delivered to the disc insertion mechanism 11 by the disc delivery hand 14 and the disc is taken out from the disc receiving mechanism 12 by the disc delivery hand 15. However, the delivery of the disc and the removal of the disc are as described above. The present invention is not limited to a disk handling mechanism (handling robot) having a simple chuck mechanism.
If a force sufficient to prevent the disc from falling is secured on the brush surface of the rotating brush, the disc can be cleaned even if the disc has a small mass even if it is hung downward. Therefore, the position of the disk revolution prevention stopper provided for preventing the disk revolution may be anywhere around the rotary shafts 3c and 4c.
Furthermore, in the embodiment, two rotary brush units 3 and 4 are provided, but this may be any one of the rotary brush units 3 and 4. In this case, the disc receiving mechanism 11 and the disc receiving mechanism 12 are arranged on the opposite sides of one rotating brush unit.

Further, in the embodiment, the disc is inserted into the contact portion S between the bottom brush surface and the head brush surface of the front and rear brushes adjacent to each of the disc brushes 3a and 4a, but the bottom brush of the front and rear disc brushes. A disc is inserted into the gap with a gap between the surface and the head brush surface, and then the bottom brush surface and the head brush surface of the disc brush are brought into contact with the disc surface to hold the disc. Also good. In this case, it is necessary that each disk brush 3a, 4a can move in the axial direction of the rotating shaft as in the embodiment.
The number of rollers 3b and 4b to which the sleeves of the embodiments are attached is one, but the rollers are individually provided by being divided according to the position of the contact portion S that holds n disks. May be. In this case, n rollers 3b and 4b are arranged alternately with the disk brushes 3a and 4a. Of course, as described in the embodiment, the same applies to the shafts of the disk revolution preventing rollers 6 and 7, the disk insertion mechanism 11, and the disk receiving mechanism 12.
Further, in the embodiment, the disc brush is made of sponge, but the disc brush is made of sponge as long as the disc can be held and held between the bottom brush surface and the head brush surface. It is not limited to.

FIG. 1 is a side sectional view of a disk cleaning apparatus according to an embodiment of the present invention. FIG. 2 is a partially omitted perspective view showing the configuration of the main part. FIG. 3 is an explanatory diagram of a disk feeding operation from loading of a disk to two-stage cleaning. FIG. 4 is an explanatory view of the principle of ejecting the inserted disc from the rotating brush unit. FIG. 5 is an explanatory diagram of the operation of discharging the disk that has been cleaned in two stages from the rotating brush unit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Disk, 2 ... Cleaning mechanism part, 3, 4 ... Rotary brush unit,
3a, 4a ... disc brush, 3b, 4b ... roller,
3c, 4c ... rotating shaft, 3d, 4d, 6b, 7b ... grooved sleeve,
5a, 6c, 7c ... circumferential groove, 5b ... longitudinal groove,
6, 7 ... disc revolution prevention roller, 6a, 7a ... shaft,
8, 9 ... cleaner disk,
DESCRIPTION OF SYMBOLS 10 ... Disk washing | cleaning apparatus, 10a ... Base housing | casing, 10b ... Top cover,
11: Disc insertion mechanism, 12 ... Disc receiving mechanism,
13 ... Frame, 14, 15 ... Disc delivery hand,
18a, 18b, 18c ... cleaning nozzles.

Claims (9)

In the disc cleaning device that cleans the disc by bringing the rotating brush into contact with the disc surface from both the front and back sides,
The rotating brush is a disc-shaped or cylindrical brush having a predetermined length. The rotating brush has a rotating shaft on which a plurality of rotating brushes are inserted, and the disk is interposed between adjacent brush surfaces of the rotating brushes. A rotating brush unit that is inserted and held and rotates the rotating brush;
A disc revolution prevention stopper for preventing revolution of the disc held around the rotation axis by rotation of the rotary brush and allowing rotation;
A disk that is provided adjacent to the rotating brush unit and receives the disk loaded from outside the apparatus, rotates the disk about a point on the outside of the disk, and inserts it between the brush surfaces of the rotating brush. An insertion mechanism ,
A disk cleaning device in which an outer periphery of the disk is in contact with the disk revolution prevention stopper and the rotating shaft, and the disk is rotated by rotation of the rotating brush .   The disc insertion mechanism has a plurality of disc receiving shafts provided along the rotating shaft, and the plurality of disc receiving shafts receive the received disc correspondingly between the brush surfaces of the rotating brush. 2. The disc cleaning apparatus according to claim 1, wherein the disc cleaning device is engaged with an outer periphery of the disc and supported along a plane perpendicular to the rotation axis, and rotated along the vertical plane about one point outside the disc. The disk includes a plurality of disks, and the disk revolution prevention stopper has an axis along the rotation axis, is in contact with the outer periphery of the plurality of disks held by the rotating brush unit, and is provided at one point outside the disk. 3. The disk cleaning apparatus according to claim 2, wherein the plurality of received disks are supported between the disk revolution preventing stopper and the plurality of disk receiving shafts. The disc bearing shaft is a roller provided along the axial direction of the rotating shaft, and the disk revolution prevention stopper is also a roller provided along the axial direction of the rotating shaft. 4. The disk cleaning apparatus according to claim 3, wherein the disk cleaning apparatus is disposed at a position such that the center of the received disk is below the center of the rotating shaft.   A brush cleaner disk having a plurality of openings is inserted between the brush surfaces that do not overlap with the position where the disk is inserted in the rotating brush unit, and the brush cleaner disk rotates to clean the rotating brush. The disk cleaning apparatus according to claim 1, wherein the disk cleaning apparatus is selected from the group consisting of:   Furthermore, the disk receiving mechanism has a disk receiving mechanism on the side opposite to the rotating brush unit across the disk revolution prevention stopper, and the disk receiving mechanism receives the cleaned disk discharged from the rotating brush unit, A point on the outer side of the disk after the cleaning is received as a center of rotation, the disk is rotated along the vertical plane toward the rotary brush unit and received from the rotary brush unit along the vertical plane. 6. The disk cleaning apparatus according to claim 5, wherein the disk after cleaning is supported and rotated in a direction opposite to the rotation direction to return to a position where the disk is ejected out of the apparatus.   Each of the disk revolution prevention stopper and each of the disk receiving shafts includes a plurality of rollers provided along the axial direction of the rotating shaft, and the plurality of rollers are respectively lower than the center of the rotating shaft. 4. The disk cleaning device according to claim 3, wherein the disk cleaning apparatus is disposed at a position where the center of the received disk is located at the center.   The disk cleaning device according to claim 4 or 7, wherein two each of the rotating brush unit and the disk revolution prevention stopper are provided adjacent to each other.   The disk revolution prevention stopper provided between the two rotating brush units is provided at the bottom of the disk held by one of the rotating brush units to transfer the disk to the other rotating brush unit. 9. The disk cleaning apparatus according to claim 8, wherein the disk cleaning apparatus is in contact with the outer periphery in the vicinity of the point.

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