JP4506554B2 - Emission spectroscopy analysis method and emission spectroscopy analyzer - Google Patents

Description

  The present invention relates to various emission spectroscopic analyzers such as an inductively coupled plasma (ICP) emission spectroscopic analysis apparatus and a laser excitation emission spectroscopic analysis apparatus, and an emission spectroscopic analysis method using the apparatus. The present invention relates to an emission spectroscopic analysis apparatus and an emission spectroscopic analysis method for calculating a semi-quantitative value (qualitative value) by performing semi-quantitative analysis together with qualitative analysis using a qualitative database in such emission spectroscopic analysis.

  In an ICP emission spectroscopic analyzer, a sample is introduced into a high-temperature plasma in an ICP torch to cause excitation light emission, and the emission light is wavelength-dispersed and detected by a detector to obtain an emission spectrum. Qualitative analysis (identification) of the element contained in the sample is performed from the wavelength of the appearing spectral line (bright line spectrum), and quantitative analysis of the element is performed from the intensity of the spectral line (see, for example, Patent Document 1).

  Normally, in quantitative analysis, an accurate quantitative value (concentration) is calculated by referring to a calibration curve created by a user analyzing a standard sample with a known concentration in advance. It is necessary to prepare a calibration curve by analyzing a standard sample for each element. On the other hand, when you want to know the approximate content that does not require as much accuracy as quantitative analysis, or when you want to estimate the possibility of interference with coexisting elements and an appropriate quantitative concentration range, etc. prior to strict quantitative analysis For example, semi-quantitative analysis using a qualitative database provided by a device manufacturer is performed. In such semi-quantitative analysis, the concentration and content of qualitative elements are calculated as semi-quantitative values (sometimes called qualitative values).

  Such semi-quantitative analysis is often not required to be as precise as originally quantitative analysis. However, when the accuracy of semi-quantitative analysis using a qualitative database deteriorates, the analysis conditions are determined, for example, by determining the influence of coexisting elements and selecting spectral lines (or wavelengths) to be used for quantitative analysis of the target element. In some cases, inaccurate analysis conditions are set, which may impair the accuracy of quantitative analysis. In addition, even if it does not reach that point, it becomes difficult to set analysis conditions, and there are cases where a person unskilled in analysis cannot make a judgment.

  Therefore, in order to increase the calculation accuracy of the semi-quantitative value, it is theoretically possible to calibrate the information in the qualitative database and increase the accuracy. However, practically no such calibration is performed. This is because the qualitative database contains information on one or more spectral lines for each of the vast number of elements, and preparing standard samples of known concentrations for all these elements is a lot of work and cost. It is because it takes. Even if such standard samples can be prepared, it takes a very long time to analyze them one by one. When a mixed solution containing a large number of elements is used as a standard sample, only a part of wavelengths may be calibrated due to the influence of inter-element interference. In such a case, spectrum lines that can be calibrated and spectrum lines that cannot be calibrated are mixed in the qualitative database, and the reliability of the qualitative database is low.

Japanese Patent Laid-Open No. 10-253540

  The present invention has been made to solve the above-mentioned problems, and its object is to improve the accuracy of a qualitative database used for semi-quantitative analysis without taking time and effort. It is to provide an emission spectroscopic analysis method and an emission spectroscopic analysis apparatus that can be used.

The first invention made to solve the above problems is to excite a sample to emit light having a wavelength specific to the element contained in the sample, and to obtain an emission spectrum by spectroscopically measuring the light, In an emission spectroscopic analysis method for performing qualitative analysis and semi-quantitative analysis with reference to a qualitative database in which wavelength information and intensity information are recorded for spectral lines of a large number of elements,
The spectral lines of elements contained in the qualitative database, based on the neutral atomic beam and classified into the ion beam, yet the variation in the intensity of the spectral line under predetermined variation conditions of the plasma state measurement result min By classifying them into a plurality of groups that exhibit similar behavior to the variation factors caused by the device, a representative spectral line is defined for each group, and information on this grouping and representative spectral line is also stored in the qualitative database. Aside,
When calibrating the qualitative database, intensity information of the plurality of representative spectral lines is obtained by emission spectroscopic analysis of a standard sample containing a predetermined element having a known concentration. Calculate calibration information for each representative spectral line from the intensity information of the representative spectral line stored in the qualitative database,
Using the calibration information obtained for each representative spectrum line, correct the semi-quantitative information of each element included in the group to which each representative spectrum belongs, and perform semi-quantitative analysis of the target element based on the corrected semi-quantitative information. It is characterized by doing.

The second invention is an apparatus that embodies the emission spectroscopic analysis method according to the first invention, wherein the sample is excited to emit light having a wavelength specific to the element contained in the sample, and the light is spectroscopically measured. An emission spectrum analyzer for performing qualitative analysis and semi-quantitative analysis with reference to a qualitative database in which wavelength information and intensity information are recorded for spectral lines of a large number of elements, the qualitative database the spectral lines of the elements contained, and classified into a neutral atomic beam and ion beam, by further classify based on the measured result of the variation in the intensity of the spectral line under predetermined variation conditions of the plasma state Categorized in advance into a plurality of groups exhibiting similar behavior with respect to variation factors caused by the apparatus, and a representative spectral line is defined for each group. In emission spectroscopic analysis device information it was also to and stored in the qualitative database of vector lines,
a) Measured information acquisition means for acquiring intensity information of the plurality of representative spectral lines from an emission spectrum obtained by performing an emission spectroscopic analysis of a standard sample containing a predetermined element having a known concentration,
b) Calibration information calculation for calculating calibration information for each representative spectral line from the intensity information obtained by actual measurement of each representative spectral line obtained by the actual measurement information acquisition means and the intensity information of the representative spectral line stored in the qualitative database. Means,
c) information correction means for correcting semi-quantitative information of each element included in the group to which each representative spectrum belongs, using the calibration information obtained for each representative spectrum line;
And performing semi-quantitative analysis of the target element based on the corrected semi-quantitative information.

  As a typical aspect of the emission spectroscopic analysis method according to the first invention and the emission spectroscopic analysis device according to the second invention, an ICP emission spectroscopic analysis method and an ICP emission spectroscopic analysis device can be used.

  For example, in an ICP emission spectroscopic analysis apparatus, the most dominant factor of variation caused by the apparatus is the state of plasma that atomizes the sample, specifically, the temperature and electron density of the plasma. Depending on the state of the plasma, the atomization rate, the ratio between neutral atoms and ions, and the like change, thereby changing the intensity of the spectral line. Although the tendency of the change differs for each spectrum line, a large number of spectrum lines recorded in the qualitative database can be classified into a plurality of groups showing similar tendency of change. In this way, for multiple spectral lines in the same group that show similar behavior to the variation factor caused by the device, the correction can be made by correcting the information in the qualitative database for semi-quantitative analysis in the same way. The accuracy should be much higher than when not.

  Therefore, in the emission spectroscopic analysis method according to the first invention, a large number of spectral lines recorded in the qualitative database are pre-classified into a plurality of groups that exhibit behaviors similar in intensity to variation factors caused by the apparatus, and One representative spectral line is defined for each group (not necessarily one, but one is sufficient). Therefore, in the case of classification into n (n is an integer of 2 or more) groups, it is sufficient to select at most n representative spectral lines. Then, by measuring a standard sample capable of analyzing such n representative spectral lines, for example, the intensity information of these representative spectral lines is acquired and stored in the qualitative database and the intensity information obtained by actual measurement. Calibration information is calculated for each representative spectral line from the standard intensity information. In the above example, n pieces of calibration information are obtained. Here, the calibration information can be a calibration coefficient, for example.

  Next, using the calibration information obtained for each representative spectral line, the semi-quantitative information in the qualitative database of each element included in the group to which each representative spectral line belongs is corrected. Processing until the correction of semi-quantitative information of all elements (spectral lines) in the qualitative database after the emission spectroscopic analysis of the standard sample is completed, that is, actual measurement information acquisition means in the emission spectroscopic analysis apparatus according to the second invention Since all the processes executed by the calibration information calculating means and the information correcting means are arithmetic processes performed by, for example, a computer, it can be completed in a short time. On the other hand, it is not necessary to prepare all the elements recorded in the qualitative database for the standard sample, but a number much smaller than that number, usually about 1 to 2 types containing about several to ten elements. The mixed sample solution may be used.

  Therefore, according to the emission spectroscopic analysis method according to the first invention and the emission spectroscopic analysis apparatus according to the second invention, the preparation of the standard sample for calibration can be performed without much time and the cost can be suppressed. Analyzing and calibrating information on all elements in the qualitative database can be done in a short time. Therefore, for example, calibration processing can be surely performed before analysis of unknown samples every day, and the accuracy of the qualitative database can be improved in accordance with the state of the apparatus at that time. As a result, the semi-quantitative analysis of the target element contained in the unknown sample is accurately performed using the qualitative database, and the condition analysis of the quantitative analysis can be easily and accurately performed based on the result.

  In the emission spectroscopic analysis apparatus according to the second invention, preferably, a sample that provides the user with sample information for the user to prepare the standard sample for correcting semi-quantitative information of predetermined representative spectral lines. It may be configured to further include information providing means. Specifically, information such as composition, concentration, wavelength, and the like related to the standard sample may be stored in advance, and the information may be displayed according to a user operation. Thus, since the user only needs to prepare a standard sample based on the provided information, even an unskilled person can perform an accurate semi-quantitative analysis.

  Hereinafter, an ICP emission spectroscopic analyzer according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of an ICP emission spectroscopic analyzer according to the present embodiment.

  In FIG. 1, the sample solution supplied from the autosampler 11 controlled by the control unit 21 is atomized by a nebulizer (not shown) and then introduced into the light emitting unit 10 and excited by a plasma flame. The light generated thereby is collected by the condenser lens 12, passes through the slit 13, and is sent to the diffraction grating 14. The light wavelength-dispersed by the diffraction grating 14 is simultaneously detected by a multi-channel detector 15 such as a linear CCD sensor. Specifically, here, the light between the wavelengths λ1 and λ2 reaching the both ends of the light receiving surface of the multichannel detector 15 is detected almost simultaneously by a large number of light receiving elements, and photoelectrically converted by each light receiving element. The signal is sent to the data processing unit 20.

  The data processing unit 20 converts the detection signal into digital data (emission spectrum data) and performs arithmetic processing according to a predetermined algorithm, thereby executing qualitative analysis, semi-quantitative analysis, and quantitative analysis of the sample. For this purpose, the data processing unit 20 includes a qualitative database 201 used for qualitative analysis and semi-quantitative analysis and a database calibration processing unit 202 for calibrating the qualitative database 201. The operations of the above-described units are comprehensively controlled by the control unit 21, and many of the functions of the control unit 21 and the data processing unit 20 are achieved by executing predetermined programs on a general-purpose personal computer 22. The personal computer 22 is connected to an input unit 23 including a keyboard for an operator to input analysis conditions and the like, and a display unit 24 including a display for displaying measurement results and the like.

  Next, for the calibration process of the qualitative database 201 executed mainly by the database calibration processing unit 202 in the ICP emission spectroscopic analysis apparatus of the present embodiment, the principle of the calibration method will be described first.

  Spectral lines used in ICP emission spectroscopic analysis are roughly classified into two types: neutral atom lines due to neutral atoms and ion lines due to ion atoms. When the plasma in the light emitting unit 10 is in a thermal equilibrium state, the intensity of the spectral line is theoretically proportional to the number of atoms in the unit volume of the target element, but this number of atoms is neutral for the neutral atomic beam. For numbers and ion lines, it is the number of ion atoms (strictly, the number of ion atoms of the corresponding valence). Although the total number of atoms in the plasma is constant, the ratio between the number of neutral atoms and the number of ion atoms changes when the plasma state such as plasma temperature changes. For example, if the number of ion atoms increases, the intensity of the ion beam increases, but on the other hand, neutral atoms decrease and the intensity of the neutral atom beam decreases. That is, the intensity of the two types of spectral lines behaves exactly opposite to the change in the plasma state.

  The intensity of the spectral line also depends on the atomization rate of the sample in the plasma. That is, when the plasma state changes, the atomization rate also changes, and as a result, the intensity of the spectral line also changes. Since the change in the atomization rate with respect to the change in the plasma state is different for each element, the difference in the change amount of the atomization rate also affects the behavior of the intensity of the spectral line.

  FIG. 3 is a diagram showing the concept of grouping based on the behavior of the intensity of spectral lines having various wavelengths. That is, all the spectral lines can be divided into either an ion beam or a neutral atom beam, and the ion beam or neutral atom beam is appropriately selected according to the variation in atomization rate (this example). Then you can divide them into four). As a result, in this example, the whole is classified into 8 groups G1 to G8, and the behavior of the intensity of the spectral line (change direction and amount of change) with respect to the change of the plasma state is similar in each group. It can be considered. The number of groupings is not limited to this example, but can be arbitrarily determined. However, if the number of elements is subdivided, the number of elements that must be analyzed at the time of calibration increases, and it takes time to prepare and analyze standard samples. Substantially grouped meaning disappears. On the other hand, reducing the number of groups means that the similarity in the behavior of the intensity of the spectral lines belonging to the same group becomes poor, so that the accuracy of calibration described later deteriorates. Therefore, it is usually preferable to divide the sample into groups of about 4 to 12 in consideration of both the preparation and analysis labor of the sample and the necessary calibration accuracy.

  Actually, the grouping of the spectral lines of all the elements as described above is performed with the creation of the qualitative database 201. That is, the manufacturer that provides this apparatus obtains the intensity of the spectral line of each element by analyzing a standard sample whose concentration is known, and registers the intensity information together with the information such as the wavelength in the qualitative database 201. . At that time, the condition for changing the plasma state is determined, the fluctuation amount of the intensity of each spectral line is obtained under the condition, and the above grouping is executed based on the fluctuation amount. That is, in principle, fluctuations in the intensity of spectral lines occur depending on the amount of fluctuation in atomization rate as described above, but it is very difficult to perform grouping based on theoretical calculations. It is practical to perform grouping directly from the amount of fluctuation in the intensity of the spectral lines obtained by actual measurement.

  In terms of the wavelength of the spectral line, it has been empirically known that a neutral atomic beam is concentrated and distributed in a relatively short wavelength range and a long wavelength range. On the other hand, elements having only ion beams are distributed almost uniformly throughout the wavelength direction without being concentrated in a certain range. Since the change in atomization rate relative to the change in plasma state is related to the wavelength, it is considered that the spectral line grouping based on the measurement results is particularly important for ion beams.

  If grouping is performed for the spectral lines of all the elements recorded in the qualitative database 201 as described above, representative spectral lines are determined for each group. For example, phosphorus (P: wavelength 213.618 nm) is the representative spectral line of the short wavelength group of neutral atomic beams, and sodium (Na: wavelength 588.995) is the representative spectral line of the long wavelength group of neutral atomic beams. nm). Some elements have spectral lines of both an ion beam and a neutral atomic beam, and also have spectral lines with different atomization rates. Examples of such elements include copper (Cu) and magnesium (Mg). By using this element, representative spectral lines of a plurality of groups can be obtained simultaneously. Normally, almost all groups can be covered with these elements, but rare earth elements such as yttrium (Y: wavelength 371.030 nm) may be added as the short-wavelength ion beam that is insufficient. However, these representative spectral lines are not limited to the above description and can be determined as appropriate.

  Here, for the sake of simplicity, the spectral lines of all elements are grouped into eight groups G1 to G8 as shown in FIG. 3 as an example, and the representative spectral lines of each group are represented by g1 to g8, respectively. It shall represent. Information regarding this grouping and information regarding the representative spectral lines of each group are also stored in the qualitative database 201. The intensities of a plurality of spectral lines belonging to one group show a variation factor caused by the apparatus, specifically, a behavior similar to the plasma state, that is, a tendency of fluctuation. Therefore, when the apparatus is in a certain state, the intensity of the representative spectral line is measured and the intensity value in the plasma state at that time is changed from the value and the reference intensity value stored in the qualitative database 201. If it is grasped | ascertained, it can be estimated that the fluctuation | variation of the intensity | strength of the other spectral line which belongs to the same group is the same. Therefore, when the user calibrates the qualitative database 201 provided by the manufacturer as described above, the intensities of the representative spectral lines g1 to g8 of each group are actually measured, and the intensity for each group is determined based on the measured intensity. Calibration information that can correct fluctuations in the frequency is calculated and is used to correct the intensity of all spectral lines.

  The composition of the calibration standard sample to be analyzed at the time of calibration is uniquely determined according to the representative spectral line required as described above. Therefore, when the grouping and representative spectrum are determined, the manufacturer determines the composition of the calibration standard sample, and provides reference information such as the calibration standard sample composition (element type) and the concentration of each element in the qualitative database, Store in other storage units. This reference information is displayed on the display unit 24 when the user performs a predetermined operation on the input unit 23. Of course, the standard sample itself may be provided by the manufacturer, or such information may be described in a booklet such as an instruction manual of the apparatus.

  The calibration work of the qualitative database 201 in the ICP emission spectroscopic analyzer of the present embodiment is executed according to a user (user) instruction. For example, in an analysis site where the ICP emission spectroscopic analyzer is activated every morning and a large number of samples are measured sequentially during the day, the qualitative database 201 is calibrated after the apparatus is activated and before the measurement of unknown samples. It is good to. Next, the procedure and operation of this calibration work will be described along the flowchart of FIG.

  The user prepares a calibration standard sample in which the composition or the like is designated as described above (step S1), and performs ICP emission spectroscopic analysis on the calibration standard sample. As a result, the data processing unit 20 acquires an emission spectrum in the wavelength range of λ1 to λ2 (step S2). As described above, since this apparatus performs multi-wavelength simultaneous measurement, an emission spectrum can be obtained in a much shorter time than a sequential type apparatus. The database calibration processing unit 202 reads spectral data of wavelengths of the representative spectral lines g1 to g8 determined in advance in the obtained emission spectrum, and obtains intensity values of the representative spectral lines g1 to g8 (step S3). For example, it is assumed that the measured intensity of the representative spectral line g1 is I1b.

  Next, the database calibration processing unit 202 reads the reference intensities of the representative spectral lines g1 to g8 stored in the qualitative database 201, and calculates a calibration coefficient for each representative spectral line from the reference intensities and the actually measured intensities. Obtained (step S4). The reference intensity referred to here is not necessarily the intensity value of each spectral line initially recorded in the qualitative database 201. In the case of a configuration in which data in the qualitative database 201 is rewritten every time calibration processing is performed, the initial value does not remain in the database, and only the latest information is always held in the qualitative database. Reference strength. On the other hand, when the initial value in the qualitative database 201 is not rewritten and the corrected intensity information as described later is stored in an area different from the initial value when the calibration process is executed, As the reference intensity, both the initial value and the latest information can be considered.

For example, assuming that the reference intensity of the representative spectral line g1 is I1a, the calibration coefficient K1 of the representative spectral line g1 is obtained as follows.
K1 = I1b / I1a
For example, if the relative value of the reference intensity is 1 and the relative value of the actually measured intensity is 1.2, K1 = 1.2 / 1 = 1.2. Since the measured intensity and the reference intensity are different for each representative spectrum, the calibration coefficient is also different for each representative spectrum (of course, it may happen to be the same value by chance).

When the calibration coefficients K1 to K8 are obtained for the representative spectral lines g1 to g8 as described above, 1 stored in the qualitative database 201 for each of the groups G1 to G8 to which the representative spectral lines g1 to g8 belong. The reference intensities of all the spectral lines belonging to one group are corrected (step S5). Specifically, for example, for spectral lines belonging to the group G1, the intensity value I stored in the qualitative database 201 is corrected by the following equation.
I '= K1 · I
This corrected intensity value I ′ becomes the semi-quantitative information in the semi-quantitative analysis. This equation is a one-point calibration when the strength of the blank sample is zero, but it can also be a two-point calibration.

By the above calibration process, the reference intensity for semi-quantitative analysis of a plurality of spectral lines whose intensity varies with the same tendency with respect to variations in plasma temperature, electron density, etc. is corrected using the same calibration coefficient. . Therefore, the tendency of intensity fluctuation unique to each group is corrected for each group, and the reference intensity in which the influence of the variation in plasma state is reduced is stored in the qualitative database 201. At this time, as described above, the intensity value before correction may be rewritten and the intensity value after correction may be written in another storage area.
In any case, as a result of the calibration process, the accuracy of the qualitative database 201 is increased, and the analysis accuracy is improved when the semi-quantitative analysis of the elements contained in the unknown sample is performed with reference to the qualitative database 201.

  As a result, for example, the analysis conditions such as the presence or absence of the influence of coexisting elements can be accurately examined, which leads to an improvement in accuracy when the quantitative analysis is subsequently performed. In addition, since the accuracy of semi-quantitative analysis increases, semi-quantitative analysis results can be used instead of quantitative analysis results for purposes that do not require as much accuracy as quantitative analysis based on a strict calibration curve. Become.

  In addition, the said Example is an example of this invention, and it is natural that even if it changes, corrects and adds suitably in the range of the meaning of this invention, it is included by this invention. For example, in the above embodiment, a multi-channel type emission spectroscopic analyzer is shown, but the present invention can also be applied to a sequential type emission spectroscopic analyzer. However, it goes without saying that the former is preferable in terms of analysis time.

  Further, the present invention is not applied only to the ICP emission spectroscopic analyzer as described above, and other various laser excitation plasma emission spectroscopic analyzers, solid state emission spectroscopic analyzers, glow discharge emission spectroscopic analyzers, etc. It can be applied to an emission spectroscopic analyzer.

1 is a schematic configuration diagram of an ICP emission spectroscopic analyzer that is one embodiment of the present invention. FIG. The flowchart which shows the procedure and operation | movement of a calibration process of the qualitative database in the ICP emission-spectral-analysis apparatus of a present Example. The figure which shows the concept of grouping based on the behavior of the intensity | strength of the spectral line which has various wavelengths.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Light emission part 11 ... Autosampler 12 ... Condensing lens 13 ... Slit 14 ... Diffraction grating 15 ... Multichannel type detector 20 ... Data processing part 201 ... Qualitative database 202 ... Database calibration processing part 21 ... Control part 22 ... Personal computer 23 ... Input unit 24 ... Display unit

Claims (3)

A sample is excited to emit light having a wavelength specific to the element contained in the sample, and the light is spectrally measured to obtain an emission spectrum. Wavelength information and intensity information are recorded for spectral lines of many elements. In the emission spectroscopic analysis method for performing qualitative analysis and semi-quantitative analysis with reference to the qualitative database,
The spectral lines of elements contained in the qualitative database, based on the neutral atomic beam and classified into the ion beam, yet the variation in the intensity of the spectral line under predetermined variation conditions of the plasma state measurement result min By classifying them into a plurality of groups that exhibit similar behavior to the variation factors caused by the device, a representative spectral line is defined for each group, and information on this grouping and representative spectral line is also stored in the qualitative database. Aside,
When calibrating the qualitative database, intensity information of the plurality of representative spectral lines is obtained by emission spectroscopic analysis of a standard sample containing a predetermined element having a known concentration. Calculate calibration information for each representative spectral line from the intensity information of the representative spectral line stored in the qualitative database,
Using the calibration information obtained for each representative spectrum line, correct the semi-quantitative information of each element included in the group to which each representative spectrum belongs, and perform semi-quantitative analysis of the target element based on the corrected semi-quantitative information. Emission spectroscopy analysis method characterized by performing.
A sample is excited to emit light having a wavelength specific to the element contained in the sample, and the light is spectrally measured to obtain an emission spectrum. Wavelength information and intensity information are recorded for spectral lines of many elements. An emission spectroscopic analysis apparatus that performs qualitative analysis and semi-quantitative analysis with reference to a qualitative database, wherein the spectral lines of elements contained in the qualitative database are classified into neutral atomic beams and ion beams, and further plasma by minute like based on the measured result of the variation in the intensity of the spectral line under predetermined variation condition of the state, as well as pre-classified into a plurality of groups showing similar behavior against the fluctuation factor of the device due, An emission spectrum in which representative spectral lines are defined for each group, and information on the grouping and representative spectral lines is also stored in a qualitative database. In the analysis apparatus,
a) Measured information acquisition means for acquiring intensity information of the plurality of representative spectral lines from an emission spectrum obtained by performing an emission spectroscopic analysis of a standard sample containing a predetermined element having a known concentration,
b) Calibration information calculation for calculating calibration information for each representative spectral line from the intensity information obtained by actual measurement of each representative spectral line obtained by the actual measurement information acquisition means and the intensity information of the representative spectral line stored in the qualitative database. Means,
c) information correction means for correcting the semi-quantitative information of each element included in the group to which each representative spectrum belongs, using the calibration information obtained for each representative spectrum line;
And an emission spectroscopic analyzer characterized by performing semi-quantitative analysis of the target element based on the corrected semi-quantitative information.
  The sample information providing means for providing the user with sample information for the user to prepare the standard sample for correcting semi-quantitative information of a predetermined representative spectral line. Emission spectroscopy analyzer.

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