JP4488873B2 - Light irradiation device - Google Patents

Description

  The present invention relates to a light irradiation apparatus that can irradiate line-shaped light using a plurality of LEDs, and is particularly suitably used for inspection such as the presence or absence of scratches or mark reading in a predetermined irradiation region of a workpiece (product). It is about things.

  Conventionally, when performing inline high-speed inspection of WEB (continuous material: film, paper, metal plate), etc., which is the object to be inspected, the surface of the flowing workpiece is successively captured as image information one after another using a line sensor camera. In the image information processing apparatus, a surface defect or the like is detected by detecting a part having a different brightness. As a lighting device (light irradiation device) used at that time, a device using a halogen lamp or a fluorescent lamp is typically known. Recently, as shown in Patent Document 1, An LED having a plurality of LEDs arranged in a line has been developed which has excellent luminous stability, longevity and the like.

  However, the LED is a point light source, and in particular, even if the shell-shaped ones are arranged in a line to obtain line-shaped light, there is a problem in that the light source becomes discontinuous as a whole and illumination unevenness is generated. Therefore, in order to suppress unevenness in illuminance, if a chip type chip that can be arranged with a small pitch is used, the light spreads too much in the width direction, resulting in difficulty in directivity, and the desired brightness cannot be obtained. Problems arise.

In particular, when an ultra-high brightness type LED 3 called a power LED is used, a problem of heat dissipation also occurs, so the pitch between the light emitting portions of the LED must be increased, and the problem of uneven illuminance becomes significant.
JP 2001-215115 A

  Therefore, the present invention is intended to solve these problems all at once, and averages the light from the LED array, which is a discontinuous point light source, in the array direction, thereby suppressing unevenness in illumination and directing in the width direction. The main aim is to provide a light irradiation device that can improve efficiency and improve efficiency, and can also solve the problem of heat dissipation.

  That is, the light irradiation device according to the present invention is arranged on the right and left sides of the casing, a plurality of LEDs that are spaced apart from each other by a certain distance and have the optical axis aligned in a certain direction and held in one row in the casing, And a reflector that gradually expands in the direction of light irradiation, and the reflector reflects light emitted from the LEDs to make it uniform in at least the column direction, and is arranged integrally or in close contact with the casing. It is characterized by being.

  As a specific embodiment in which the effect of the present invention is particularly remarkable, there can be mentioned a power LED in which the LED can continuously flow a current of 200 mA or more.

  As a specific example of the reflector shape, when viewed from the column direction, the reflector surface forms a parabola that expands in the light irradiation direction, and reflects the light emitted from the LED to be substantially parallel. Things can be mentioned.

  As an embodiment for eliminating illuminance unevenness and making the emitted light uniform, the reflector has a diffusion surface for diffusing the light from the LED at the tip of the reflector on the light irradiation direction side. Can be considered.

  In order to be able to flexibly handle various lengths and to standardize manufacturing, it further has a unit board that holds a certain number of LEDs in a row, and one or more unit boards are connected in series. What is attached to a casing is desirable. In this case, an extruded (or drawn) molded product may be used for the casing and cut according to the length.

  In order to obtain light with less illuminance unevenness, it is preferable to further include a light-transmitting plate that is disposed on the light irradiation direction side of the LED row and transmits light emitted from the LEDs while averaging at least in the row direction. . Specific examples of the light transmitting plate include a lenticular lens and a prism sheet having a line perpendicular to the column direction. Of course, a normal diffusing plate having no directionality in diffusion may be used, or a diffusion plate having a diffusing direction such as a lenticular lens may be used.

  In order to effectively dissipate heat, it is preferable that a heat conducting member is interposed between the casing and the LED. For the same purpose, it is more preferable that heat dissipating fins are provided integrally with the casing.

  In addition to the above, in order to improve the efficiency of heat dissipation, the heat conducting member is arranged so as to be sandwiched between the back surface of the substrate holding the LED and the casing, and each LED of the substrate A through-hole is provided in a portion corresponding to, and a second heat conductive member is inserted into the through-hole so that the second heat conductive member is in contact with the back surface of the LED and the heat conductive member. It is desirable. Furthermore, it is desirable that the contact surface between the casing and the heat conducting member is an uneven surface.

  Further, in order to prevent the temperature rise of the LED and the casing, it is desirable to provide a flow path for circulating a cooling fluid in the casing.

  When the casing is composed of a side plate and a bottom plate so as to open in the light irradiation direction and the LED is held on the bottom plate, the bottom plate has the highest temperature. It is preferable that it is provided inside the bottom plate.

  In order to cool the LEDs uniformly and to further improve the convenience on the piping, the flow path is a path extending in the column direction, and is reciprocated at least once.

  When the light irradiation apparatus according to the present invention is formed in a rectangular parallelepiped shape as a whole, the reflector has an inclined shape. Therefore, the side plate of the casing forming the reflector must have a wedge shape in cross section. If it does so, useless thickness will arise and the problem of becoming heavy may arise. Therefore, in order to solve this problem suitably and to effectively dissipate heat, by providing a plurality of concave grooves extending in the column direction on the surface of the side plate, the protruding portion between adjacent concave grooves is formed. What is comprised so that it may function as a radiation fin is preferable. If the concave grooves are extended in the row direction, extrusion (pulling) molding can be performed, so that there is also an effect that the manufacturing is not burdened.

  According to the present invention having such a configuration, it is possible to average the light from the LED rows, which are discontinuous point light sources, in the row direction by the reflector, thereby suppressing illuminance unevenness. Further, since the reflector reflects light that spreads by a predetermined angle or more when viewed from the column direction and approaches light traveling parallel to the optical axis, the directivity in the width direction of the light can be improved and the irradiation efficiency can be increased. Furthermore, since the reflector is integrally formed or closely attached to the casing, the structure and manufacture are not forced, and the size of the casing necessary for heat radiation of the LED can be sufficiently secured.

  <First Embodiment>

  A first embodiment of the present invention will be described below with reference to the drawings.

  1-4 has shown the light irradiation apparatus 1 which concerns on this embodiment. The light irradiation apparatus 1 irradiates, for example, a predetermined irradiation area of an inspection object (work) with line-shaped light. The imaging apparatus (not shown) images the predetermined irradiation area, and the obtained image data is imaged. It is used in a product inspection system or the like that takes in a processing apparatus (not shown) and performs an automatic surface inspection for the presence or absence of scratches.

  Specifically, the light irradiation device 1 is arranged on the right and left sides of the casing 2, the plurality of LEDs 3 held in one row in the casing 2 with the optical axis aligned in a certain direction, and the light irradiation direction. And a reflector 4 that gradually expands toward the surface.

  Each part is described in detail below.

  The casing 2 has a rectangular parallelepiped shape made of a long metal that opens upward (in the light emission direction), and includes a pair of left and right side plates 21, a bottom plate 22, and an end plate 23. The side plate 21 is formed by, for example, extrusion (drawing), and has an expanded portion 211 whose inner surface is inclined linearly when viewed from the longitudinal direction and gradually expands in the opening direction (light emission direction), and its expansion. The base portion 212 is provided continuously to the base end of the open portion 211 and is narrower than the base end and forms a step on the inner surface. In addition, the code | symbol BM is a screw hole provided in the outer surface of the side plate 21, and can be used when attaching this light irradiation apparatus 1 to the holding member which is not shown in figure, for example. The bottom plate 22 has a flat plate shape, and is attached in close contact with the bottom surface of the side plate 21 that is spaced apart with the inner surfaces facing each other by screwing or the like. The end plate 23 is a rectangular plate attached to each end face of the side plate 21.

  The LED 3 is a so-called power LED that can continuously flow a current of 200 mA or more. In this embodiment, the LED 3 has a flat rectangular parallelepiped shape that emits light from the light emitting portion 3a formed at the center of the top surface. A chip type is used. The LEDs 3 are arranged such that the light emitting portions 3a are arranged in a straight line at a predetermined interval. In this embodiment, a fixed number (for example, 10) is attached in a row on a strip-like flat wiring board 5 which is a unit board. One or a plurality of wiring boards 5 to which the LEDs 3 are attached are connected in series according to the required length, and are attached to the inner surface of the casing bottom plate 22 via the same number of heat conducting members 7. The heat conducting member 7 is a strip-shaped flat plate having substantially the same width and length as the wiring substrate 5 and is formed of an insulating material having a predetermined viscoelasticity such as silicone. With such a material, even if there is a component B such as a resistor disposed on the back side of the wiring board 5, the part is deformed so as to be recessed and ideally comes into surface contact with the wiring board 5 to increase the heat conduction efficiency. In addition, the wiring board 5 can be fixed without rattling.

  The reflector 4 is formed integrally with the side plate 21 by applying a white paint, for example, to the inner surface of the side plate 21 facing the widened portion 211. In addition, a white resin plate is adhered to the inner surface. You may attach it. This reflector 4 has its base end set at substantially the same height as the light emitting portion 3a of the LED 3, and receives almost all of the light spreading outward from the optical axis of the LED 3 by a predetermined angle or more once to several times. Reflected and reflected toward the opening direction. In this process, the light emitted from the LEDs 3 is made uniform at least in the column direction and the directivity in the width direction is enhanced, and is emitted from the casing opening. In order to further improve the reflection efficiency, the reflector 4 may be a mirror surface, and in the reflection process, the light of the LED 3 is mixed with the light of the other LEDs 3 and is also made uniform in the column direction and the directivity in the width direction. And is injected from the casing opening.

  Furthermore, in this embodiment, the translucent plate 6 that transmits the light emitted from the LEDs 3 while averaging at least in the column direction is arranged at a certain distance from the light irradiation direction side of the LED column 3L. More specifically, the translucent plate 6 is a belt-like flat plate and is disposed so as to close the opening of the casing 2. For this purpose, a holding groove 21 a for sandwiching and holding the translucent plate 6 is provided on the inner surface of the opening end portion of the casing side plate 21. The translucent plate 6 may be, for example, a normal non-directional diffuser plate, but in this embodiment, the light transmitting plate 6 is formed in a direction perpendicular to the column direction of the LEDs 3 and mainly diffuses light only in the column direction. A prism sheet is used.

  If this is the case, the reflector 4 and the translucent plate 6 can average the light from the LED row 3L, which is a discontinuous point light source, in the row direction, and suppress uneven illuminance. Further, since the reflector 4 reflects light that spreads a predetermined angle or more when viewed from the column direction and approaches light that travels parallel to the optical axis, the directivity as line light can be improved and the irradiation efficiency can be increased. Further, since the reflector 4 is integrally formed or closely attached to the casing 2, the size and the size of the casing 2 necessary for heat radiation of the LED 3 can be sufficiently secured without any difficulty in configuration and manufacture.

  In terms of the heat dissipation, in this embodiment, the heat conducting member 7 is used to connect the bottom surface of the LED 3 to the casing bottom plate 22, so that reliable and effective heat dissipation can be performed.

  Further, since one or a plurality of wiring boards 5 holding a certain number of LEDs 3 in one row are mounted in series on the casing 2, the number of wiring boards 5 in series is changed while standardizing parts. Thereby, although it is stepwise, the light irradiation apparatus 1 of various lengths can be manufactured flexibly. For the casing 2, for example, the side plate 21 and the bottom plate 22 having a certain length may be manufactured and cut according to the length.

  Second Embodiment

  A second embodiment will be described below with reference to the drawings. In addition, the same code | symbol is attached | subjected to the member corresponding to the member in the said 1st Embodiment.

  5-8 has shown the light irradiation apparatus 1 which concerns on this embodiment. The light irradiation apparatus 1 is different from the first embodiment in the configuration of the casing 2, the reflector 4, and the wiring board 5, and further includes a cooling mechanism 9.

  The side plate 21 constituting the casing 2 of the present embodiment includes a reflector member 213 and a holding member 214 that holds the reflector member 213 in a dovetail manner.

  The inner surface of the reflector member 213 is the reflector 4, and the outer surface is provided with a dovetail groove A <b> 1 for adopting a dovetail groove method. The reflector member 213 can be made of metal or resin. Preferably, the reflector member 213 is made of resin. The reflector 4 has a vapor deposition surface processed, but the tip portion thereof is formed as a diffusing surface 41 by forming minute irregularities or by painting it with white. Further, when viewed from the column direction, the reflector 4 forms a parabola whose surface expands in the light irradiation direction, and reflects the light emitted from the LED 3 so as to be substantially parallel to the optical axis.

  The holding member 214 is erected upward (from the light irradiation direction) from the bottom plate 22 on the side of the wiring board 5 holding the LED 3, and the ant A <b> 2 fitted into the ant groove A <b> 1 of the reflector member 213 on the inner surface thereof. And has a flange portion 215 having a stepped shape at the tip thereof. A holding groove 21 a for holding the translucent plate 6 is formed by the inner surface of the flange portion 215 and the tip end surface of the reflector member 213. Furthermore, the holding member 214 has a plurality of concave grooves M extending in the column direction on the outer surface thereof, so that the projecting portions of the adjacent concave grooves M and the concave grooves M function as the radiation fins F. It is configured as follows. By fitting the dovetail A2 of the holding member 214 into the dovetail groove A1 of the reflector member 213, the reflector 4 can be attached to the casing 2 without using screws. Moreover, if it is such a structure, an extrusion (drawing) shaping | molding process is also possible and a burden is not applied also to manufacture. The dovetail A2 may be formed on the reflector member 213, and the dovetail groove A1 may be formed on the holding member 214.

  Further, the bottom plate 22 constituting the casing 2 has a contact surface with the heat conduction member 7 of the bottom plate 22 to be an uneven surface in order to increase the contact area with the heat conduction efficiency member 7 and increase the heat conduction efficiency. Yes. Specifically, the upper surface 223 of the bottom plate 22 is an uneven surface in which both the concave portion and the convex portion extend in the column direction. In the present embodiment, an insulating material having a predetermined viscoelasticity, such as silicone, is used as the heat conducting member 7. Therefore, when the heat conducting member 7 and the bottom plate 22 are pressed and adhered, for example, with screws, the heat conduction is achieved. The member 7 is deformed and its contact surface becomes an uneven surface. If this is the case, the heat conduction efficiency can be improved, and even if there is a component B such as a resistor disposed on the back surface of the wiring board 5, the heat conduction member 7 corresponding to the volume of the component B is the concave portion of the uneven surface. Therefore, the wiring board 5 and the heat conducting member 7 can be brought into close contact with each other without difficulty. Further, when the heat conducting member 7 is a material that does not have a predetermined viscoelasticity, the contact surface of the heat conducting member 7 is processed to be uneven so as to be in close contact with the unevenness of the upper surface 223 of the bottom plate 22.

  One or a plurality of wiring boards 5 to which the LEDs 3 are attached are connected in series according to the required length, and are attached to the inner surface of the casing bottom plate 22 via the same number of heat conducting members 7. Then, a through hole 51 having a circular cross section, for example, is provided in a portion corresponding to each LED 3 arranged in a line, that is, a portion where the LED 3 and the wiring board 5 are in contact with each other, and a second heat conducting member such as solder is provided in the through hole 51 8 is inserted so that the second heat conducting member 8 contacts the back surface of the LED 3 and the heat conducting member 7. At this time, the second heat conducting member 8 has a higher thermal conductivity than the substrate 5. Thereby, the heat generated from the LED 3 is directly transmitted to the second heat conducting member 8 and further to the heat conducting member 7, so that the heat from the LED 3 can be suitably conducted to the bottom plate 22.

  Moreover, the light irradiation apparatus 1 of this embodiment has the cooling mechanism 9 in addition to the said structure.

  The cooling mechanism 9 includes a circulation path 91, an introduction port 92 for introducing a cooling fluid (for example, air) into the circulation path 91, a lead-out port 93 for leading the fluid, and a circulation pump (not shown). Become.

  The distribution path 91 includes a straight path 911 extending in the column direction and a curved path 912 continuous with the straight path 911. The straight path 911 is provided inside the bottom plate 22, and specifically, the bottom plate 22 is provided with a bottomed groove RM (four in the present embodiment) in the first bottom plate member 221 in the column direction, A straight path 911 is formed by bringing the second bottom plate member 222 into close contact with the first bottom plate member 221 with a screw N1. The curved path 912 is configured by providing a recess 231 inside the end plate 23 attached to each end face of the side plate 21 and the bottom plate 22. At this time, the opening of the adjacent straight path 911 is included in the range of the opening of the recess 231. Further, an introduction port 92 and a lead-out port 93 are provided on the end face of one of the end plates 23. The introduction port 92 and the outlet port 93 are connected to the circulation pump by a pipe (not shown).

  According to the light irradiation device 1 according to the present embodiment configured as described above, since the diffusing surface 41 is provided at the tip portion of the reflector 4, the illuminance unevenness is further suppressed as compared with the light irradiation device 1 of the first embodiment. can do. Furthermore, when viewed from the column direction, the surface of the reflector 4 forms a parabola that expands in the light irradiation direction, so that the light emitted from the LED 3 can be reflected and made substantially parallel to the optical axis. Irradiation efficiency can be improved by improving directivity as light. In addition, when the thing made from resin is used as the reflector member 213, the further weight reduction of the light irradiation apparatus 1 can be achieved.

  Regarding the heat dissipation, in the second embodiment, the second heat conducting member 8 is brought into contact with the back surface of the LED 3, the heat conducting member 7 is brought into contact with the second heat conducting member 8, and the bottom surface of the LED 3 is casing. Since the surface connection is made to the bottom plate 22, more reliable and effective heat dissipation can be performed. Furthermore, since the contact surface between the heat conducting member 7 and the bottom plate 22 is an uneven surface, the amount of heat dissipated within a certain time can be increased, and the heat conduction efficiency can be improved. In addition, since the flow path 91 for allowing the cooling fluid to flow through the bottom plate 22 is provided, the LED 3 and the casing 2 can be suitably cooled. At this time, since the cooling fluid reciprocates in the bottom plate 22, the cooling imbalance of the LEDs 3 can be prevented, and the temperature of each LED 3 can be averaged. Furthermore, since the introduction port 92 and the outlet port 93 are provided on the same surface of the end plate 23, the handling of the light irradiation device 1 can be facilitated, the convenience of piping can be improved, and the restrictions on the installation location can be reduced. In addition, since the bottom plate 22 constitutes only the straight path 911, the flow path 91 can be appropriately constituted according to the number of wiring boards 5 or bottom plates 22 in series.

  The present invention is not limited to the above embodiment. In the following description, members corresponding to the above-described embodiment are denoted by the same reference numerals.

  For example, as shown in FIG. 9, when viewed from the column direction, the surface of the reflector 4 forms a parabola that expands in the light irradiation direction, and reflects the light emitted from the LED 3 so as to be substantially parallel to the optical axis. In addition, the shape of the reflector 4 can be variously modified according to the purpose.

  Moreover, in the said 1st Embodiment, although the surface of the reflector 4 was made into the non-directional diffuse reflection surface, as shown, for example in FIGS. 9-11, many streak is carried out in the direction substantially orthogonal to the said column direction. The received light may be averaged and reflected only in the substantially column direction by providing a continuous shape or waveform having a triangular cross section. In this way, the light irradiation efficiency is further improved.

  In addition, in order to further increase the heat radiation efficiency, the heat radiation fins F may be attached to the casing 2 of the first embodiment. In consideration of assembly man-hours and the like, it is more preferable that the casing 2 and the radiation fins F are integrally formed. For example, FIG. 12 shows a protrusion between adjacent concave grooves M by providing a plurality of concave grooves M extending in the column direction on the outer surface of the side plate 21 of the casing 2 forming the reflector 4. The strip portion is configured to function as the radiation fin F. In addition, the same code | symbol is attached | subjected to the member corresponding to the said embodiment in the figure.

  In such a case, since the reflector 4 has an inclined shape, the schematic cross-section must be a wedge shape, and the side plate 21 that tends to be heavy due to a thick portion is reduced in heat dissipation. This can be performed together with the generation of the fins F. Further, since the concave grooves M are extended in the column direction, extrusion (pulling) molding processing is possible, and the manufacturing is not burdened.

  Further, the light-transmitting plate and the heat conducting member are not always necessary, and may be omitted depending on the usage mode. The LED is not limited to a power LED or chip type, and may be a type that operates with a normal current or a shell type.

  In the second embodiment, a straight path and a curved path are provided on the bottom plate and the distribution path is configured. However, the present invention is not limited to this. For example, a straight path and a curved path may be provided on the bottom plate. In this case, the length of the flow path is set so that the cooling fluid reaches the both ends of the LED array.

  In addition, you may make it combine suitably the above-mentioned each structure containing the said embodiment, and a various deformation | transformation is possible in the range which does not deviate from the meaning.

  As described in detail above, according to the present invention, the light from the LED array, which is a discontinuous point light source, is averaged in the column direction to suppress illuminance unevenness and improve directivity and increase efficiency. Furthermore, the light irradiation apparatus which can also solve the problem of heat dissipation can be provided.

The longitudinal cross-sectional view which shows the light irradiation apparatus in 1st Embodiment of this invention. The top view which shows the light irradiation apparatus in the embodiment. The side view which shows the light irradiation apparatus in the embodiment. The disassembled perspective view of the light irradiation apparatus in the embodiment. The longitudinal cross-sectional view which shows the light irradiation apparatus in 2nd Embodiment of this invention. The expanded sectional view which mainly shows the heat conductive member in the embodiment. The figure which mainly shows the distribution channel of the light irradiation apparatus in the embodiment. The perspective view which shows the light irradiation apparatus in the embodiment. The longitudinal cross-sectional view which shows the light irradiation apparatus in other embodiment of this invention. The fragmentary perspective view which shows the reflector in other embodiment of this invention. The fragmentary sectional view which shows an example of the surface shape of the reflector in the embodiment. The fragmentary sectional view which shows the other example of the surface shape of the reflector in the embodiment. The longitudinal cross-sectional view which shows the light irradiation apparatus in further another embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Light irradiation apparatus 2 ... Casing 3 ... LED
3a: Light emitting portion 3L: LED array 4: Reflector 5: Unit substrate (wiring substrate)
6 ... Translucent plate 7 ... Heat conducting member 41 ... Diffusion surface 51 ... Through hole 8 ... Second heat conducting member 91 ... Flow path 21 ... Side plate 22 ... -Bottom plate M ... Groove F ... Radiation fin

Claims (12)

A casing,
A plurality of LEDs arranged in a row in the casing so that the optical axes are aligned in a certain direction and the light emitting portions are separated from each other by a predetermined distance;
Reflectors that are arranged on the left and right of the LED row and gradually expand toward the light irradiation direction;
A heat conduction member made of an insulating material having a viscoelasticity interposed between the casing and the LED;
The reflector reflects the light emitted from the LED to make it uniform at least in the column direction, and is arranged integrally or in close contact with the casing,
The light irradiation apparatus, wherein a contact surface between the casing and the heat conducting member is an uneven surface.   The light irradiation apparatus according to claim 1, wherein the LED is a power LED capable of continuously supplying a current of 200 mA or more. The parabola which the reflector surface spreads toward the light irradiation direction when viewed from the column direction is formed, and the light emitted from the LED is reflected so as to be substantially parallel to the optical axis. The light irradiation apparatus of description.   The light irradiation device according to claim 1, wherein the reflector has a diffusion surface that diffuses light from the LED at a tip portion of the reflector on a light irradiation direction side.   5. The light irradiation apparatus according to claim 1, further comprising a unit substrate for holding a certain number of LEDs in one row, wherein one or a plurality of the unit substrates are connected in series to the casing.   6. The light irradiation according to claim 1, further comprising a translucent plate that is disposed on the light irradiation direction side of the LED row and transmits light emitted from the LEDs while averaging at least in the row direction. apparatus. The heat conducting member is disposed so as to be sandwiched between the back surface of the substrate holding the LED and the casing, and a through hole is provided in a portion corresponding to each LED of the substrate. and fitting the second heat conducting member, the second heat conducting member, according to claim 2, 3, 4, 5 or 6, wherein is in contact with the back surface of the LED and said heat conducting member Light irradiation device. The light irradiation apparatus according to claim 1, 2, 3, 4, 5, 6 or 7 , wherein a flow path for circulating a cooling fluid is provided in the casing. The said casing is comprised from the side plate and the baseplate so that it may open in a light irradiation direction, LED was hold | maintained at the baseplate, The said distribution path is provided in the inside of the said baseplate. 8. The light irradiation apparatus according to 8 . The light irradiation apparatus according to claim 8 or 9 , wherein the distribution path is a path extending in a row direction and reciprocates at least once. The light irradiation device according to claim 1, 2, 3, 4, 5, 6, 7, 8, 9 or 10 , wherein heat radiation fins are integrally provided in the casing. By providing a plurality of concave grooves extending in the column direction on the surface of the side plate of the casing forming the reflector, the protrusions between the adjacent concave grooves function as heat radiating fins. The light irradiation apparatus according to claim 11 .