JP4477252B2 - Piezo positioner - Google Patents

Description

【００２４】
表１から明らかなように、実施例１〜４は、素子連に圧縮応力がかかっているため、その変位量は従来の板バネで圧縮応力をかけている比較例２の変位量と変わらず、同等であった。
【００２５】
これに対して、比較例１では、素子連に圧縮応力がかかっていないため、変位量は実施例より大きく、正確な変位量とはならなかった。このことは、本発明であれば、圧縮応力がかかっているため、板バネを必要としなくても、板バネを用いたものと同等の変位量が得られることを示している。
【００２６】
【発明の効果】
以上の通り、本発明のピエゾポジショナーであれば、ピエゾ素子連を押さえる板バネを必要としないピエゾポジショナーとすることができるようになった。このことにより、作業効率が向上するので、ピエゾポジショナーの生産性を向上させることができるようになった。
【図面の簡単な説明】
【図１】従来用いられている直線導通線を示す。
【図２】ピエゾ素子とその電極部を示す。
【図３】従来の直線導通線で接続されたピエゾ素子連を示す。
【図４】本発明で用いる蛇行導通線を示す。
【図５】本発明の蛇行導通線で接続したピエゾ素子連を示す。
【図６】本発明で用いるヘリカル導通線を示す。
【図７】本発明のヘリカル導通線で接続したピエゾ素子連を示す。
【符号の説明】
Ａ：ピエゾ素子
Ｂ：電極部
Ｃ：導通線
Ｄ：はんだ付け部[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a piezo positioner, and more particularly, to a piezo positioner comprising a piezo element series made of piezoelectric ceramics.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, in a piezoelectric positioner using a piezoelectric ceramic piezo element series, a linear conductive line shown in FIG. 1 is provided on the surface of each element shown in FIG. As shown in FIG. 3, the wire was joined to the part, and the conduction line was bent and connected between the elements.
[0003]
[Problems to be solved by the invention]
However, in this electrical connection, although each element is bonded with a resin, since no compressive stress is applied between the elements, a problem arises in that it is buffered by the bonded adhesive and does not cause accurate displacement. The element series was held by a leaf spring. For this reason, there is a problem that productivity is poor because there is a troublesome and complicated operation of sandwiching a leaf spring between element elements.
[0004]
The present invention has been made in view of the problems of the above-described piezo positioner, and an object thereof is to provide a piezo positioner that does not require a leaf spring for pressing the piezo element series.
[0005]
[Means for Solving the Problems]
As a result of earnest research to achieve the above object, the present inventors have used a wire that can be expanded and contracted as a conductive wire, and if it is dotted and joined to the electrode portion of each element while applying compressive stress to the elements, or The present invention has been completed with the knowledge that it is not necessary to use a leaf spring if it is spotted and joined to the electrode portion of each element while applying a tensile stress to the conducting wire.
[0006]
That is, according to the present invention, (1) in a piezoelectric positioner comprising piezoelectric ceramic element piezo elements, the piezo element elements are electrically connected by stretchable meandering conductive lines that are spot-bonded to each element while applying compressive stress to the element elements. A piezoelectric positioner (Claim 1), characterized in that it is a piezo element series connected to each other, and (2) a piezo positioner comprising a piezo element series made of piezoelectric ceramics, wherein the piezo element series is connected to a conductive line. A piezoelectric positioner (Claim 2) characterized in that it is a piezo element series electrically connected by a stretchable meandering conductive line that is dotted and joined to each element while applying a tensile stress. (3) Piezoelectric ceramics In a piezo positioner composed of piezo element series manufactured by the manufacturer, each piezo element series is applied to each element while applying compressive stress to the element series. And piezo positioner, which is a piezoelectric element communicating that are electrically connected (claim 3) by two points with the joined expandable helical conductive lines, consisting of (4) a piezoelectric ceramic of the piezoelectric element communicating In the piezo positioner, the piezo element series is a piezo element series electrically connected by a stretchable helical conduction line that is dotted and joined to each element while applying a tensile stress to the conduction line. The gist is to use a positioner (claim 4). This will be described in more detail below.
[0007]
As described above, the piezo positioner composed of the piezo element series according to the present invention is electrically connected by a stretchable meandering conductive line that is dotted and joined to each element while applying compressive stress to the element series. A piezo positioner that is connected to an element is provided.
[0008]
First, since the conducting wire is a meandering conducting wire that can be expanded and contracted as shown in FIG. 4, if the meandering conducting wire is spotted and joined to each element while applying compressive stress to the elements, it is applied to the elements. On the contrary, the compressive stress is applied as a tensile stress to the meandering conductive line, and therefore, a compressive stress is applied between the elements, so that it is not necessary to press down with a leaf spring.
[0009]
Further, as another piezo positioner, the piezo element series is an element series in which the piezo element series is electrically connected by a stretchable meandering conduction line that is dotted and joined to each element while applying a tensile stress to the conduction line. (Claim 2).
[0010]
Similarly to the above, since the conducting line is a meandering conducting line that can be expanded and contracted as shown in FIG. 4, if the meandering conducting line is dotted and joined to each element while applying a tensile stress to the meandering conducting line. Further, since the tensile stress applied to the meandering conductive line is applied as a compressive stress between the elements, it is not necessary to press the plate spring with the leaf spring as described above.
[0011]
Further, as another piezo positioner, the piezo element series is an element series electrically connected by a stretchable helical conduction line that is dotted and joined to each element while applying compressive stress to the element series. (Claim 3).
[0012]
This is because the conductive line is a helical conductive line that can be expanded and contracted as shown in FIG. 6, and if the helical conductive line is dotted and joined to each element while applying compressive stress to the element series, it is applied to the element series. On the contrary, the compressive stress is applied as a tensile stress to the helical conducting wire, and therefore, a compressive stress is applied between the elements, so that it is not necessary to hold down with a leaf spring.
[0013]
Furthermore, as another piezo positioner, the piezo element unit is a piezo element unit that is electrically connected by a stretchable helical conductive line that is dotted and joined to each element while applying a tensile stress to the conductive line. A positioner was used (claim 4).
[0014]
Similarly to the above, since the conduction line is a helical conduction line that can be expanded and contracted as shown in FIG. 6, if the helical conduction line is dotted and joined to each element while applying a tensile stress to the helical conduction line. Further, since the tensile stress applied to the helical conductive line is applied as a compressive stress between the elements, this need not be held by a leaf spring.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
The present invention will be described with reference to specific examples. First, a ceramic piezo element (manufactured by Taiheiyo Cement Co., Ltd.) is prepared.
[0016]
Using the four piezo elements, the four are bonded with an adhesive as shown in FIG. 5, and a compressive stress is applied to the bonded elements with an assembly jig that pressurizes the elements with a small vise. In addition, a meandering conductive line made of phosphor bronze as shown in FIG. 4 was spotted and joined with 6/4 eutectic solder as shown in FIG. 1).
[0017]
Similarly, four piezo elements are used, and four of them are bonded with an adhesive as shown in FIG. 5, and the meandering conductive wire is pulled to the electrode portion of each bonded element with a spring to connect the elements. A piezo element series was fabricated by spotting and joining with an assembly jig having a structure in contact with the electrode part of the above while applying tensile stress (Example 2).
[0018]
Similarly, four electrodes are bonded with an adhesive as shown in FIG. 7, and an electrode for each element is applied while applying compressive stress to the bonded element series with an assembly jig that pressurizes the element series with a small vise. A helical conduction line made of phosphor bronze shown in FIG. 6 was spotted and joined to the part with 6/4 eutectic solder as shown in FIG. 7 to produce four piezo element series (Example 3).
[0019]
Further, similarly, four piezo elements are used, and four of them are bonded with an adhesive as shown in FIG. 7, and the helical conductive wire is pulled by a spring to the electrode portion of each bonded element. A piezo element series was fabricated by spotting and joining with an assembly jig having a structure in contact with the series of electrode portions while applying tensile stress (Example 4).
[0020]
For comparison, apart from the above, similarly, four piezo elements were used, and four of them were bonded with an adhesive as shown in FIG. 3, and the phosphor bronze shown in FIG. As shown in FIG. 3, the linear conduction wires formed were lined and joined with 6/4 eutectic solder to produce four piezo element series (Comparative Example 1).
[0021]
In addition to the above, as a comparison, the four piezo element series obtained in Comparative Example 1 were pressed with a separately prepared leaf spring (Comparative Example 2).
[0022]
The displacement of the obtained piezo element series was measured with an electric micrometer. The results are shown in Table 1.
[0023]
[Table 1]

[0024]
As is clear from Table 1, in Examples 1 to 4, since the compressive stress is applied to the elements, the displacement amount is not different from the displacement amount of Comparative Example 2 in which the compressive stress is applied by the conventional leaf spring. Was equivalent.
[0025]
On the other hand, in Comparative Example 1, since no compressive stress was applied to the elements, the amount of displacement was larger than that of the example, and the amount of displacement was not accurate. This indicates that, according to the present invention, since a compressive stress is applied, a displacement equivalent to that using a leaf spring can be obtained without requiring a leaf spring.
[0026]
【The invention's effect】
As described above, the piezo positioner according to the present invention can be a piezo positioner that does not require a leaf spring for pressing the piezo elements. As a result, the working efficiency is improved, and the productivity of the piezo positioner can be improved.
[Brief description of the drawings]
FIG. 1 shows a conventional linear conductive line.
FIG. 2 shows a piezoelectric element and its electrode part.
FIG. 3 shows a series of piezo elements connected by a conventional linear conductive line.
FIG. 4 shows a meandering conductive line used in the present invention.
FIG. 5 shows a series of piezo elements connected by meandering conductive lines of the present invention.
FIG. 6 shows a helical conduction line used in the present invention.
FIG. 7 shows a series of piezo elements connected by a helical conduction line according to the present invention.
[Explanation of symbols]
A: Piezoelectric element B: Electrode part C: Conductive wire D: Soldering part

Claims (4)

Piezoelectric positioner comprising piezoelectric ceramic element piezoelectric elements, wherein the piezoelectric element elements are electrically connected by means of stretchable meandering conductive lines that are dotted and joined to each element while applying compressive stress to the element element. A piezo positioner characterized by being a ream. Piezoelectric positioner comprising piezoelectric ceramic element piezoelectric elements, wherein the piezoelectric element elements are electrically connected by means of stretchable meandering conductive lines that are spotted and joined to each element while applying tensile stress to the conductive lines. A piezo positioner characterized by being a ream. Piezoelectric positioner composed of piezoelectric ceramic piezoelectric element series, wherein the piezoelectric element series is electrically connected by a stretchable helical conductive wire that is dotted and joined to each element while applying compressive stress to the element series. A piezo positioner characterized by being a ream. Piezoelectric positioner comprising piezoelectric ceramic element piezo element series, wherein the piezo element element is electrically connected by a stretchable helical conduction line that is dotted and joined to each element while applying tensile stress to the conduction line. A piezo positioner characterized by being a ream.

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