JP4473187B2 - Automatic material handling system - Google Patents
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- JP4473187B2 JP4473187B2 JP2005209915A JP2005209915A JP4473187B2 JP 4473187 B2 JP4473187 B2 JP 4473187B2 JP 2005209915 A JP2005209915 A JP 2005209915A JP 2005209915 A JP2005209915 A JP 2005209915A JP 4473187 B2 JP4473187 B2 JP 4473187B2
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- 239000000463 material Substances 0.000 title claims description 106
- 238000004519 manufacturing process Methods 0.000 claims description 30
- 238000012545 processing Methods 0.000 claims description 24
- 238000012546 transfer Methods 0.000 claims description 19
- 230000002457 bidirectional effect Effects 0.000 claims description 17
- 238000003860 storage Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 10
- 238000012958 reprocessing Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 description 59
- 230000000694 effects Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000008207 working material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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Description
この発明は、自動材料搬送システムに関し、特にベルトコンベアで材料を送る自動材料搬送システムに関する。 The present invention relates to an automatic material conveyance system, and more particularly to an automatic material conveyance system for feeding materials on a belt conveyor.
製造技術の弛まぬ発展に伴い、半導体、もしくは光電産業において生産される材料のサイズ（ウェハとガラス基板を含む）も弛まなくサイズが多くなっている。これら材料は通常２５枚を１ロットとし、カセットに載置する。その重量は人力の付加能力を明らかに超える。このため、目下、製造工場ではほとんどが自動材料搬送システム（Ａｕｔｏｍａｔｅｄ Ｍａｔｅｒｉａｌ Ｈａｎｄｌｉｎｇ Ｓｙｓｔｅｍ：ＡＭＨＳ）を採用してカセットの搬送を行っている。 With the continuous development of manufacturing technology, the size of materials produced in the semiconductor or photoelectric industry (including wafers and glass substrates) has also increased without sagging. Usually, 25 lots of these materials are placed in a cassette. Its weight clearly exceeds the added power of human power. For this reason, most of the manufacturing factories currently employ an automated material handling system (AMHS) to carry cassettes.
図１Ａは、従来の技術によるシングルループの自動材料搬送システムを示した説明図である。図面によれば、自動材料搬送システム１０は高架方式で設けられ、単一方向に回転するレール１１を含む。レール１１の回りには製造工程の必要に基づいて企画し、各種機能を有する加工センター１２（ｂａｙ）を設ける。また、高架方式で設け、単一方向に回転するレール１１上には、複数の搬送車１３（Ｏｖｅｒｈｅａｄ Ｓｈｕｔｔｅｒ、ＯＨＳ）を設置し、該運搬車１３内にカセットを設ける。また、搬送者１３はレール１１のルートに沿ってそれぞれの加工センター１２の間で材料の搬送を行う。材料がそれぞれの加工センター１２の間で搬送されるため、係る搬送システムは一般にＩｎｔｅｒｂａｙ搬送システムと称する。 FIG. 1A is an explanatory diagram showing a single-loop automatic material conveyance system according to the prior art. According to the drawings, the automatic material transport system 10 is provided in an elevated manner and includes a rail 11 that rotates in a single direction. A processing center 12 (bay) having various functions is provided around the rail 11 based on the necessity of the manufacturing process. Further, a plurality of transport vehicles 13 (Overhead Shutter, OHS) are installed on the rail 11 that is provided in an elevated manner and rotates in a single direction, and a cassette is provided in the transport vehicle 13. In addition, the transporter 13 transports the material between the processing centers 12 along the route of the rail 11. Since the material is transported between the respective processing centers 12, such a transport system is generally referred to as an Interbay transport system.
それぞれの加工センター１２内にはストッカー１４と、複数のテーブル１５（ｔｏｏｌ）を有する。同一の加工センター１２内に設けられるテーブル１５は通常製造工程上、互いに依拠する性質を有する。よって、製造工程を規格する上で加工センター１２は一つの製造ユニットとみなされる。 Each processing center 12 has a stocker 14 and a plurality of tables 15 (tool). The tables 15 provided in the same processing center 12 have properties that depend on each other in the normal manufacturing process. Therefore, the processing center 12 is regarded as one manufacturing unit in standardizing the manufacturing process.
ストッカー１４は、運搬車１３とテーブル１５との間において材料を搬送する場合の集荷配送ステーションと、暫時保存領域を主な機能とする。従来のストッカー１４は矩形の立方体を呈し、対向する長手の側面内にそれぞれ複数の搬送ポート１４１を設ける。短いほうの側面はレール１１に接続する。中間にはクレーンを設け、それぞれの搬送ポート１４１の間で材料の搬送を行う。 The stocker 14 has a main function of a collection / delivery station for transporting materials between the transport vehicle 13 and the table 15 and a temporary storage area. The conventional stocker 14 has a rectangular cube, and a plurality of transport ports 141 are provided in opposing longitudinal side surfaces. The shorter side is connected to the rail 11. A crane is provided in the middle, and material is transferred between the transfer ports 141.
ストッカー１４はレール１１に接近した一つ、もしくは二つの搬送ポート１４１ａ、１４１ｂを運搬車１３に対して材料搬送の入出力ポートとする。その他搬送ポート１４１はそれぞれテーブル１５と接続し、テーブル１５とストッカー１４との間において材料を搬送する入出力ポートとする。 The stocker 14 uses one or two transport ports 141 a and 141 b approaching the rail 11 as input / output ports for material transport with respect to the transport vehicle 13. The other transport ports 141 are respectively connected to the table 15 and serve as input / output ports for transporting materials between the table 15 and the stocker 14.
従来の単一方向回転材料搬送システムは、回転方向のみに回転するレールを提供する。よって、台車の制御と搬送の規制が容易であって、多くの業者が採用している。但し、次に掲げるように、多くの欠点が尚も存在する。 Conventional unidirectional rotating material delivery systems provide rails that rotate only in the direction of rotation. Therefore, the control of the carriage and the regulation of the conveyance are easy, and many companies adopt it. However, there are still a number of drawbacks, as listed below.
Ａ．搬送効果が好ましくない。従来の技術は単一方向の搬送しか提供できない。例えば再加工（ｒｅｗｏｒｋ）のように製造工程の必要によって加工センターに戻し作業を行わなければならない場合、台車が直接バックできないため全体のレールのルートを回って初めて本来の加工センターに戻り再加工が行われる。従って、従来の技術は搬送効果が好ましくない。
Ｂ．従来の技術を長距離の単一方向Ｉｎｔｅｒｂａｙ搬送に応用した場合、風車をリターンさせる問題が発生する。生産工場におけるレイアウトの規格において、加工センターに単一方向の長距離方式を用いなければならない場合、従来の単一方向回転では風車がリターンする問題が発生する。台車を配送する規格において風車がリターンする時間も考慮しなければならない。
Ｃ．従来の技術を段落的なＩｎｔｅｒｂａｙ搬送に応用した場合、設備投資のコストが高くなる。図２に開示するようにＩｎｔｅｒｂａｙ搬送が段落式の伝送であった場合、全体の搬送システムは複数の互いに独立した加工センターを設けるように企画する。これら独立した加工センターの間では材料の搬送を行う必要がない。分別する便宜を図るために、異なる加工センター１２の数字の後ろに異なるアルファベットを表示する。従来の技術による単一方向回転の搬送システム１０は一つの完全なシステムである。よって、それぞれの独立した加工センターの間（点線で囲んだ領域）は、システムの設備投資の浪費となる。
Ｄ．従来の技術はシステムの台車の数量の制限を受け、処理待ち材料（Ｗｏｒｋｉｎｇ Ｉｎ Ｐｒｏｃｅｓｓ，ＷＩＰと称する）の暫時保存領域とすることができない。
Ｅ．従来の技術において、搬送する方向は固定的なものである。よって、搬送方向の変更、もしくは双方向搬送の機能を提供することができない。
A. The conveyance effect is not preferable. Prior art can only provide unidirectional transport. For example, when it is necessary to return to the processing center due to the necessity of the manufacturing process, such as reworking, the cart cannot be directly backed, so it is not possible to return to the original processing center until the entire rail route is reached. Done. Therefore, the conventional technique is not preferable for the conveyance effect.
B. When the conventional technology is applied to a long-distance single-direction interbay transport, a problem of returning the windmill occurs. In the case of a layout standard in a production factory, when a long distance method in a single direction must be used for a processing center, there is a problem that the wind turbine returns in the conventional single direction rotation. The windmill return time must also be taken into account in the standard for delivering trolleys.
C. When the conventional technology is applied to paragraph Interbay transport, the cost of capital investment increases. As shown in FIG. 2, when the interbay transport is a paragraph type transmission, the entire transport system is planned to have a plurality of mutually independent processing centers. There is no need to transport materials between these independent processing centers. For the convenience of classification, different alphabets are displayed after the numbers of the different processing centers 12. The prior art unidirectional rotating transport system 10 is one complete system. Therefore, between each independent processing center (area surrounded by a dotted line), the capital investment of the system is wasted.
D. The conventional technology is limited by the number of bogies in the system, and cannot be used as a temporary storage area for materials waiting to be processed (referred to as Working In Process, WIP).
E. In the conventional technique, the conveying direction is fixed. Therefore, it is impossible to provide a function of changing the transport direction or bi-directional transport.
この発明は材料の搬送効率を高めることのできる自動材料搬送システムを提供することを課題とする。 This invention makes it a subject to provide the automatic material conveyance system which can raise the conveyance efficiency of material.
またこの発明は、空車がリターンする問題を改善する自動材料搬送システムを提供することを課題とする。 Moreover, this invention makes it a subject to provide the automatic material conveyance system which improves the problem that an empty vehicle returns.
またこの発明は段落式Ｉｎｔｅｒｂａｙ搬送に応用する場合、それぞれの独立した加工センターの間のシステム投資にかかる浪費を防ぐ自動材料搬送システムを提供することを課題とする。
またこの発明は比較的多数の暫時保存領域を提供し、製造過程での処理待ち材料の暫時保存領域（working in process）を提供することのできる自動材料搬送システムを提供することを課題とする。
Another object of the present invention is to provide an automatic material conveyance system that prevents waste of system investment between independent processing centers when applied to paragraph type Interbay conveyance.
Another object of the present invention is to provide an automatic material transfer system that can provide a relatively large number of temporary storage areas and can provide a temporary storage area for working materials in the manufacturing process .
またこの発明は双方向搬送の機能を提供し、選択的な材料の搬送を実現する自動材料搬送システムを提供することを課題とする。 Another object of the present invention is to provide an automatic material conveyance system that provides a bidirectional conveyance function and realizes selective material conveyance.
そこで、本発明者は従来の技術に見られる欠点に鑑み鋭意研究を重ねた結果、複数の互いに依頼するテーブルと、第一、第二側面に複数の搬送ポートをそれぞれ設けたストッカーと、前記第一、第二側面の間に設けられ、前記複数の搬送ポート及び前記複数のテーブルの間において材料の搬送を行う搬送機とを具えてなり、且つ該複数のテーブルが該第一側面の複数の搬送ポートに接続する複数の加工センターと、
該加工センターのストッカーの第二側面に設けた搬送ポートの内の少なくとも一つに接続する連続式の搬送ベルトと、
該搬送ベルトの提供する搬送ルートを利用して該ストッカーとの間において材料の搬送を行う少なくとも一以上の台車とを含んでなる自動材料搬送システムによって課題を解決できる点に着眼し、かかる知見に基づいて本発明を完成させた。
Therefore, as a result of intensive research in view of the disadvantages found in the prior art, the present inventor has obtained a plurality of tables requested by each other, a stocker provided with a plurality of transport ports on the first and second sides, and the first A plurality of transport ports and a transporter configured to transport a material between the plurality of tables , the plurality of tables being a plurality of the first side surfaces; Multiple processing centers connected to the transfer port;
A continuous conveyor belt connected to at least one of the conveyor ports provided on the second side of the stocker of the processing center;
Focusing on the knowledge that the problem can be solved by an automatic material conveyance system including at least one carriage that conveys material to and from the stocker using the conveyance route provided by the conveyance belt. Based on this, the present invention has been completed.
以下、この発明について具体的に説明する。
請求項１に記載する自動材料搬送システムは、第一加工センター及び第二加工センターと、連続式の搬送ベルトと、プログラマブルロジックコントローラ及びインターロックと、少なくとも一以上の台車と、を含み、
前記第一加工センター及び前記第二加工センターは、それぞれ複数のテーブルと、第一、第二側面に複数の搬送ポートをそれぞれ設けたストッカーと、を具えてなり、且つ前記複数のテーブルが前記第一側面の複数の搬送ポートに接続され、前記第二側面の搬送ポートのうち少なくとも一つの搬送ポートが双方向搬送ポートであり、
前記連続式搬送ベルトは、前記第一加工センター及び第二加工センターのストッカーの第二側面の前記双方向搬送ポートに接続されて双方向搬送を行い、
プログラマブルロジックコントローラとインターロックは、前記第一加工センター及び前記第二加工センターの間に設置されて、前記プログラマブルロジックコントローラによって前記第一加工センターと前記第二加工センターの信号を連結し、前記インターロック装置によって前記第一加工センターと前記第二加工センターとの間の前記搬送ベルトの搬送方向を制御し、
前記台車は、前記搬送ベルトの提供する搬送ルートを利用して前記第一加工センター及び前記第二加工センターとの間において材料の搬送を行う。
請求項２に記載する自動材料搬送システムは、請求項１におけるストッカーの第一、第二側面との間に、該搬送ポートとの間において材料の搬送を行う搬送機を設ける。
The present invention will be specifically described below.
The automatic material conveyance system according to claim 1 includes a first machining center and a second machining center, a continuous conveyance belt, a programmable logic controller and an interlock, and at least one or more carts,
Each of the first processing center and the second processing center includes a plurality of tables, and a stocker provided with a plurality of transfer ports on the first and second side surfaces, respectively, and the plurality of tables are the first table. Connected to a plurality of transport ports on one side, and at least one of the transport ports on the second side is a bidirectional transport port ;
The continuous transport belt is connected to the bidirectional transport port on the second side surface of the stocker of the first processing center and the second processing center to perform bidirectional transport,
The programmable logic controller and the interlock are installed between the first processing center and the second processing center, and the programmable logic controller connects the signals of the first processing center and the second processing center to each other. Controlling the transport direction of the transport belt between the first processing center and the second processing center by a locking device;
The carriage transports material between the first processing center and the second processing center using a transport route provided by the transport belt.
According to a second aspect of the present invention, there is provided an automatic material conveyance system including a conveyance device that conveys material between the first and second side surfaces of the stocker according to the first aspect and the conveyance port.
請求項３に記載する自動材料搬送システムは、請求項１における材料が１ロットを単位としてカセット内に収納され、更に該台車によって搬送される。 In an automatic material conveyance system according to a third aspect , the material according to the first aspect is stored in a cassette in units of one lot and further conveyed by the carriage.
請求項４に記載する自動材料搬送システムは、請求項１における連続式の搬送ベルトが高架式で設けられ、且つ天井、及び該ストッカーの第二側面によって支持される。 In an automatic material conveyance system according to a fourth aspect , the continuous conveyance belt according to the first aspect is provided in an elevated manner and is supported by the ceiling and the second side surface of the stocker.
請求項５に記載する自動材料搬送システムは、請求項１におけるストッカー内の搬送ポートには、垂直方向の対応する位置に複数の暫時保存領域を設ける。 According to a fifth aspect of the present invention, there is provided an automatic material conveyance system in which a plurality of temporary storage areas are provided at corresponding positions in the vertical direction in the conveyance port in the stocker.
請求項６に記載する自動材料搬送システムは、請求項１における二つの加工センターがいずれも同様の製造工程を提供し、互いに製造工程のサポートを行い、且つ暫時保存空間を提供する。 In an automatic material conveyance system according to a sixth aspect , the two processing centers in the first aspect both provide the same manufacturing process, support the manufacturing process with each other, and provide a temporary storage space.
請求項７に記載する自動材料搬送システムは、請求項１における第一加工センターが前工程を提供し、前期第二加工センターが後工程を提供し、該第二加工センターの材料に再加工を行う必要がある場合、該第一加工センターに該連続式の搬送ベルトで逆方向に搬送して再加工を行う。 In the automatic material conveyance system according to claim 7, the first processing center in claim 1 provides a pre-process, the second processing center in the previous period provides a post-process, and the material of the second processing center is reprocessed. When it is necessary to carry out, re-working is carried out in the reverse direction by the continuous carrying belt to the first working center.
請求項８に記載する自動材料搬送システムは、複数のテーブルと、第一、第二側面に複数の搬送ポートをそれぞれ設けたストッカーとを具えてなり、且つ該複数のテーブルが該第一側面の複数の搬送ポートに接続され、前記第二側面の搬送ポートのうち少なくとも一つの搬送ポートが双方向搬送ポートである複数の独立した加工センター領域と、
前記複数の加工センター領域内に設けられ、前記加工センターのストッカーの第二側面の前記双方向搬送ポートに接続される複数の段落式の搬送ベルトと、
前記段落式搬送ベルトによって連結された複数の加工センター領域内に設置されたプログラマブルロジックコントローラ及びインターロックと、
前記段落式の搬送ベルト上に位置し、該搬送ベルトの提供する搬送ルートを利用して該ストッカーとの間において材料の搬送を行う複数の台車と、
を含み、
前記複数の独立した加工センターは、前記プログラマブルロジックコントローラによって信号を連結し、前記インターロック装置によって前記複数の独立した加工センターの間の前記段落式搬送ベルトの搬送方向を制御する。
請求項９に記載する自動材料搬送システムは、請求項８におけるストッカーの第一側面と第二側面との間に、該搬送ポートとの間において材料の搬送を行う搬送機を設ける。 The automatic material conveyance system according to claim 8 includes a plurality of tables and a stocker provided with a plurality of conveyance ports on the first and second side surfaces, respectively, and the plurality of tables are arranged on the first side surface. A plurality of independent processing center regions connected to a plurality of conveyance ports, wherein at least one of the conveyance ports on the second side surface is a bidirectional conveyance port ;
A plurality of paragraph-type transport belts provided in the plurality of processing center regions and connected to the bidirectional transport port on the second side surface of the processing center stocker;
A programmable logic controller and an interlock installed in a plurality of processing center regions connected by the paragraph type conveyor belt;
A plurality of carriages that are located on the paragraph type conveyor belt and convey materials to and from the stocker using a conveyance route provided by the conveyor belt;
Including
The plurality of independent processing centers connect signals by the programmable logic controller, and the interlock device controls the conveying direction of the paragraph type conveying belt between the plurality of independent processing centers .
According to a ninth aspect of the present invention, there is provided an automatic material conveyance system including a conveyance device that conveys material between the first side surface and the second side surface of the stocker according to the eighth aspect and the conveyance port.
請求項１０に記載する自動材料搬送システムは、請求項８における材料が１ロットを単位としてカセット内に収納され、更に該台車によって搬送される。 In an automatic material conveyance system according to a tenth aspect, the material according to the eighth aspect is stored in a cassette in units of one lot and further conveyed by the carriage.
請求項１１に記載する自動材料搬送システムは、請求項８における連続式の搬送ベルトが高架式で設けられ、且つ天井、及び該ストッカーの第二側面によって支持される。
請求項１２に記載する自動材料搬送システムは、請求項８におけるストッカー内の搬送ポートには、垂直方向の対応する位置に複数の暫時保存領域を設ける。
In an automatic material conveyance system according to an eleventh aspect, the continuous conveyance belt according to the eighth aspect is provided in an elevated manner and is supported by the ceiling and the second side surface of the stocker.
According to a twelfth aspect of the present invention, in the automatic material transfer system according to the eighth aspect , the transfer port in the stocker is provided with a plurality of temporary storage areas at corresponding positions in the vertical direction.
本願発明の自動材料搬送システムは、材料の搬送効果を高めるとともに、システムを構築するコストを節減し、且つ材料の搬送効果を高めるといった効果を有する。 The automatic material conveyance system of the present invention has the effects of enhancing the material conveyance effect, reducing the cost of constructing the system, and enhancing the material conveyance effect.
本願発明は、ベルトコンベアで材料を送る自動材料搬送システムを提供するものであって、複数のテーブルと、第一、第二側面に複数の搬送ポートをそれぞれ設けたストッカーとを具えてなり、且つ該複数のテーブルが該第一側面の複数の搬送ポートに接続する複数の加工センターと、該加工センターのストッカーの第二側面に設けた搬送ポートの内の少なくとも一つに接続する連続式の搬送ベルトと、該搬送ベルトの提供する搬送ルートを利用して該ストッカーとの間において材料の搬送を行う少なくとも一以上の台車とによって構成し、材料の搬送効果を高めるとともに、材料の搬送効果を高めるといった目的を実現するものである。
係る構成の自動材料搬送システムについて、その構造と特徴を説明するために、図面を参照にして以下に詳述する。
The present invention provides an automatic material conveyance system for feeding materials on a belt conveyor, comprising a plurality of tables, and a stocker provided with a plurality of conveyance ports on the first and second sides, respectively. Continuous conveyance in which the plurality of tables are connected to a plurality of processing centers connected to the plurality of conveyance ports on the first side surface and at least one of the conveyance ports provided on the second side surface of the stocker of the processing center. The belt and at least one carriage that conveys the material between the belt and the stocker using the conveyance route provided by the conveyance belt enhances the material conveyance effect and enhances the material conveyance effect. The purpose is realized.
The automatic material conveyance system having such a configuration will be described in detail below with reference to the drawings in order to explain the structure and features thereof.
図３にこの発明による自動材料搬送システム３０の第一の実施例を開示する。図面によれば自動材料搬送システム３０は、複数の加工センター３１と、連続式の搬送ベルト３２と、複数の台車３３とを含む。生産工場における製造工程を自動化する上で、工場内部の加工センター３１にアレンジする方式は製造工程の規格によって決める。材料の搬送の便宜を図るため、加工センター３１は通常、ライン性配列か、もしくは環状配列を採用し、それぞれの加工センター３１を製造ユニットとみなす。その内部は複数のテーブル３４とストッカー３５によって構成される。これらテーブル３４は製造工程上において通常、ある程度の互いに依頼する性質を有し、製造過程の規格上一つの製造ユニットと見なす。 FIG. 3 discloses a first embodiment of an automatic material conveyance system 30 according to the present invention. According to the drawing, the automatic material conveyance system 30 includes a plurality of processing centers 31, a continuous conveyance belt 32, and a plurality of carriages 33. In automating the manufacturing process in the production factory, the method of arranging the processing center 31 in the factory is determined by the standard of the manufacturing process. In order to facilitate the conveyance of materials, the processing centers 31 usually adopt a linear array or an annular array, and each processing center 31 is regarded as a manufacturing unit. The interior is composed of a plurality of tables 34 and a stocker 35. These tables 34 usually have the property of requesting each other to some extent in the manufacturing process, and are regarded as one manufacturing unit in the standard of the manufacturing process.
ストッカー３５は、矩形の立方体を呈し、対向する長手の側面を第１側面３５１、及び第２側面３５２とする。ストッカー３５の第１側面３５１、及び第２側面３５２には、それぞれ複数の搬送ポート３５３を設ける。これら搬送ポート３５３は、単一方向搬送ポートか、もしくは双方向搬送ポートとすることができる。両側面の間には搬送機３６（crane）を設けて、搬送ポート３５３とテーブル３４との間の材料の搬送を行う。第２側面３５３には、少なくとも１以上の搬送ポート３５３が連続式の搬送ベルト３２に連結して台車３３と搬送ポート３５３との間で材料の搬送を行う。運搬機３６はそれぞれの搬送ポート３５３間の材料の搬送を行う。よって、ストッカー３５は加工センター３１内の材料搬送の配送ステーションとすることができる。 The stocker 35 has a rectangular cube, and the opposite longitudinal side surfaces are defined as a first side surface 351 and a second side surface 352. A plurality of transport ports 353 are provided on the first side surface 351 and the second side surface 352 of the stocker 35, respectively. These transport ports 353 can be unidirectional transport ports or bidirectional transport ports. A transporter 36 (crane) is provided between both side surfaces to transport the material between the transport port 353 and the table 34. At least one or more transport ports 353 are connected to the continuous transport belt 32 on the second side surface 353 to transport the material between the carriage 33 and the transport port 353. The transporter 36 transports material between the transport ports 353. Therefore, the stocker 35 can be used as a material conveyance delivery station in the processing center 31.
また、それぞれの搬送ポート３５３は垂直方向の対応する位置に複数の暫時保存領域３７（図４参照）を設け、材料を搬送ポート３５３と座印字保存領域３６との間で搬送する。従ってストッカー３１は加工センター３１内において、材料を製造作業に投入する場合の暫時保存領域とすることができる。 Each transport port 353 is provided with a plurality of temporary storage areas 37 (see FIG. 4) at corresponding positions in the vertical direction, and the material is transported between the transport port 353 and the seat print storage area 36. Accordingly, the stocker 31 can be used as a temporary storage area in the processing center 31 when a material is put into a manufacturing operation.
連続式搬送ベルト３２は、直線状か、もしくは単一方向回転する環状であってもよく、ストッカー３５の第２側面３５２に接続する。第２側面３５２はストッカー３５の対向する長手の側面であるため、連続式のベルト３２を高架方式で天井４に架設する場合、ストッカー３５の第２側面３５２が支持力を提供（図５参照）し、搬送ベルト３２の安定性を高めることができる。仮に、ストッカー３５の短い側面に搬送ベルト３２を接続すると、提供される支持面積と支持力が小さく、搬送ベルト３２の安定性が低くなる。 The continuous conveyance belt 32 may be linear or annularly rotated in a single direction, and is connected to the second side surface 352 of the stocker 35. Since the second side surface 352 is the opposite longitudinal side surface of the stocker 35, the second side surface 352 of the stocker 35 provides a supporting force when the continuous belt 32 is installed on the ceiling 4 in an elevated manner (see FIG. 5). In addition, the stability of the conveyor belt 32 can be improved. If the transport belt 32 is connected to the short side surface of the stocker 35, the provided support area and support force are small, and the stability of the transport belt 32 is lowered.
複数の台車３３はカセットを搬送するものであって、カセット内には材料を収納する。台車３３は返送ベルト３３の提供する搬送ルート上を移動してそれぞれの加工センター３１間の材料の搬送を行う。 The plurality of carriages 33 convey a cassette, and material is stored in the cassette. The carriage 33 moves on the conveyance route provided by the return belt 33 and conveys the material between the processing centers 31.
図６にこの発明の第２の実施例を開示する。図面によれば、自動材料搬送システム６０は第一加工センター６１と、第二加工センター６２を含む。第一加工センターはストッカー６３の第二側面６３２に双方向の搬送ポート６４を設け、第二加工センター６２のストッカー６３の第二側面６３２に双方向の搬送ボート６４を設ける。連続式の搬送ベルト６５はこの二つの搬送ボート６４の間において双方向の搬送を行う。二つの加工センター６１、６２の提供する製造工程が同様であった場合、二つの加工センター６１、６２の間において互いに製造工程をバックアップし、且つ暫時保存空間を提供することができる。その実施方式を次に説明する。 FIG. 6 discloses a second embodiment of the present invention. According to the drawing, the automatic material transport system 60 includes a first processing center 61 and a second processing center 62. The first processing center is provided with a bidirectional transfer port 64 on the second side surface 632 of the stocker 63, and a bidirectional transfer boat 64 is provided on the second side surface 632 of the stocker 63 of the second processing center 62. The continuous conveyance belt 65 performs bidirectional conveyance between the two conveyance boats 64. When the manufacturing processes provided by the two processing centers 61 and 62 are the same, the manufacturing process can be backed up between the two processing centers 61 and 62 and a temporary storage space can be provided. The implementation method will be described next.
第一加工センター６１のライン上の生産能力が極限に達し、第二加工センター６２がスタンバイの状態にある場合、第一加工センター６１に暫時保存された材料は両加工センター６１、６２間の搬送ベルト６５を介して材料を第二加工センター６２に搬送し、製造工程の作業を行う。このため、両加工センター６１、６２の生産能力を最高の状態で発揮することができ、全体的な生産の効率を高めることができる。逆に第二加工センター６２のライン上の生産能力が極限に達し、第一加工センター６１がスタンバイ状態にあった場合、両加工センター６１、６２間の搬送ベルト６３を介して材料を第一加工センター６１に搬送して製造工程の作業を行う。 When the production capacity on the line of the first processing center 61 reaches the limit and the second processing center 62 is in a standby state, the material temporarily stored in the first processing center 61 is transported between both processing centers 61 and 62. The material is conveyed to the second processing center 62 via the belt 65, and the manufacturing process is performed. For this reason, the production capacity of both the processing centers 61 and 62 can be exhibited in the highest state, and the overall production efficiency can be increased. On the contrary, when the production capacity on the line of the second processing center 62 reaches the limit and the first processing center 61 is in a standby state, the material is first processed through the conveying belt 63 between the processing centers 61 and 62. It is transported to the center 61 to perform the manufacturing process.
また、第二の実施例は二つの異なる製造工程を行う加工センターに応用することができる。例えば第一加工センター６１が前工程を行い、第二加工センター６２が後工程を行い、第二加工センター６２の材料を再加工する場合、両加工センター６１、６２間の搬送ベルト６５を介し材料を第一加工センター６１に搬送して再加工を行う。 The second embodiment can be applied to a processing center that performs two different manufacturing processes. For example, when the first processing center 61 performs a pre-process, the second processing center 62 performs a post-process, and the material of the second processing center 62 is reprocessed, the material is conveyed via the conveyance belt 65 between both the processing centers 61 and 62. Is transferred to the first processing center 61 and reworked.
また、搬送ベルト６５が双方向の搬送を行う場合にエラーが発生しないように、この発明では搬送システムにプログラマブルロジックコントローラ（ＰＬＣ）６６、及びインターロック装置６７を設け、第一加工センター６１と第二加工センター６２の信号を連結し、第一加工センター６１と第二加工センター６２間の搬送の方向を制御するようにしてもよい。 Further, in order to prevent an error from occurring when the conveyor belt 65 performs bidirectional conveyance, the present invention is provided with a programmable logic controller (PLC) 66 and an interlock device 67 in the conveyance system. It is also possible to connect the signals of the two machining centers 62 and control the direction of conveyance between the first machining center 61 and the second machining center 62.
図７にこの発明の第３の実施例を開示する。第３の実施例は段落式のＩｎｔｅｒｂａｙに応用する自動材料搬送システム７０であって、複数の独立した加工センターエリア７１ａ，７１ｂと、複数の段落式の搬送ベルト７２ａ、７２ｂと、複数の台車７３ａ，７３ｂを含む。 FIG. 7 discloses a third embodiment of the present invention. The third embodiment is an automatic material conveyance system 70 applied to a paragraph type Interbay, which includes a plurality of independent processing center areas 71a and 71b, a plurality of paragraph type conveyance belts 72a and 72b, and a plurality of carriages 73a. , 73b.
加工センターエリア７ａ、７１ｂは互いに独立していて、その内部には少なくとも一以上の加工センター７１と、段落式の搬送ベルト７２を含む。それぞれの加工センター７１は複数のテーブル７４とストッカー７５とを有する。段落式の搬送ベッド７２はストッカー７５の第二側面７５２に設けられた、少なくとも1以上の搬送ポート７５３に接続し、搬送ベッド７２の提供する搬送ルートによってストッカー７５と台車７３との間の材料伝送を行う。 The processing center areas 7a and 71b are independent from each other, and include at least one processing center 71 and a paragraph type conveying belt 72 therein. Each processing center 71 has a plurality of tables 74 and a stocker 75. The paragraph-type transport bed 72 is connected to at least one transport port 753 provided on the second side surface 752 of the stocker 75, and material transfer between the stocker 75 and the carriage 73 is performed by a transport route provided by the transport bed 72. I do.
段落式のInterbay材料伝送の過程において、材料は加工センター領域７１内において加工作業が完成し、その他加工センター領域７１に再度搬送して、加工作業を行う必要がない。よって、この発明のそれぞれの段落式搬送ベルト７２の間は、それぞれ独立しているため接続する必要がない。搬送システムは加工センター領域７１の間において浪費を発生させない。また、それぞれの段落式搬送ベルト７２の間は互いに独立しているため、搬送方向を単一搬送か双方向搬送に設計することができる。従って、この発明は搬送の規格において従来の技術に比して選択性を有する。 In the process of the paragraph-type Interbay material transmission, the material is processed in the processing center region 71 and does not need to be transported again to the processing center region 71 to perform the processing operation. Therefore, since each paragraph type conveyance belt 72 of this invention is independent, it is not necessary to connect. The transport system does not cause waste between the processing center areas 71. Further, since the paragraph type conveyor belts 72 are independent from each other, the conveyance direction can be designed to be single conveyance or bidirectional conveyance. Therefore, the present invention has selectivity in the standard of conveyance as compared with the prior art.
以上はこの発明の好ましい実施例であって、この発明の実施の範囲を限定するものではない。よって、当業者のなし得る修正、もしくは変更であって、この発明の精神の下においてなされ、この発明に対して均等の効果を有するものは、いずれも本発明の特許請求の範囲に属するものとする。 The above are preferred embodiments of the present invention, and do not limit the scope of the present invention. Therefore, any modifications or changes that can be made by those skilled in the art, which are made within the spirit of the present invention and have an equivalent effect on the present invention, shall belong to the scope of the claims of the present invention. To do.
１０ 自動材料搬送システム
１１ レール
１２ 加工センター
１３ 搬送車
１４ ストッカー
１４１ 搬送ポート
１５ テーブル
３０ 自動材料搬送システム
３１ 加工センター
３２ 搬送ベルト
３３ 台車
３４ 複数のテーブル
３５ ストッカー
３５１ 第１側面
３５２ 第２側面
３５３ 搬送ポート
３６ 運搬機
３７ 暫時保存領域
４ 天井
６０ 動材料搬送システム
６１ 第一加工センター
６２ 第二加工センター
６３ 搬送ベルト
６３２ 第二側面
６４ 搬送ボート
６５ 搬送ベルト
６６ プログラマブルロジックコントローラ
６７ インターロック装置
７０ 自動材料搬送システム
７１ 加工センターエリア
７２ 複数の段落式の搬送ベルト
７３ 台車
７４ テーブル
７５ ストッカー
７５２ 第二側面
７５３ 搬送ポート
DESCRIPTION OF SYMBOLS 10 Automatic material conveyance system 11 Rail 12 Processing center 13 Conveyor 14 Stocker 141 Conveyance port 15 Table 30 Automatic material conveyance system 31 Processing center 32 Conveyor belt 33 Carriage 34 Multiple tables 35 Stocker 351 First side 352 Second side 353 Conveyance port 36 Transporter 37 Temporary Storage Area 4 Ceiling 60 Dynamic Material Transfer System 61 First Processing Center 62 Second Processing Center 63 Transfer Belt 632 Second Side 64 Transfer Boat 65 Transfer Belt 66 Programmable Logic Controller 67 Interlock Device 70 Automatic Material Transfer System 71 Processing Center Area 72 Multiple Paragraph Type Conveyor Belt 73 Bogie 74 Table 75 Stocker 752 Second Side 753 Conveying Port
Claims (12)
前記第一加工センター及び前記第二加工センターは、それぞれ複数のテーブルと、第一、第二側面に複数の搬送ポートをそれぞれ設けたストッカーと、を具えてなり、且つ前記複数のテーブルが前記第一側面の複数の搬送ポートに接続され、前記第二側面の搬送ポートのうち少なくとも一つの搬送ポートが双方向搬送ポートであり、
前記連続式搬送ベルトは、前記第一加工センター及び第二加工センターのストッカーの第二側面の前記双方向搬送ポートに接続されて双方向搬送を行い、
プログラマブルロジックコントローラとインターロックは、前記第一加工センター及び前記第二加工センターの間に設置されて、前記プログラマブルロジックコントローラによって前記第一加工センターと前記第二加工センターの信号を連結し、前記インターロック装置によって前記第一加工センターと前記第二加工センターとの間の前記搬送ベルトの搬送方向を制御し、
前記台車は、前記搬送ベルトの提供する搬送ルートを利用して前記第一加工センター及び前記第二加工センターとの間において材料の搬送を行う、
ことを特徴とする自動材料搬送システム。 An automatic material transfer system, comprising a first processing center and a second processing center, a continuous transfer belt, a programmable logic controller and an interlock, and at least one or more carts,
Each of the first processing center and the second processing center includes a plurality of tables, and a stocker provided with a plurality of transfer ports on the first and second side surfaces, respectively, and the plurality of tables are the first table. Connected to a plurality of transport ports on one side, and at least one of the transport ports on the second side is a bidirectional transport port ;
The continuous transport belt is connected to the bidirectional transport port on the second side surface of the stocker of the first processing center and the second processing center to perform bidirectional transport,
The programmable logic controller and the interlock are installed between the first processing center and the second processing center, and the programmable logic controller connects the signals of the first processing center and the second processing center to each other. Controlling the transport direction of the transport belt between the first processing center and the second processing center by a locking device;
The carriage conveys material between the first machining center and the second machining center using a conveyance route provided by the conveyance belt.
The automatic material conveyance system characterized by this.
複数のテーブルと、第一、第二側面に複数の搬送ポートをそれぞれ設けたストッカーとを具えてなり、且つ該複数のテーブルが該第一側面の複数の搬送ポートに接続され、前記第二側面の搬送ポートのうち少なくとも一つの搬送ポートが双方向搬送ポートである複数の独立した加工センター領域と、
前記複数の加工センター領域内に設けられ、前記加工センターのストッカーの第二側面の前記双方向搬送ポートに接続される複数の段落式の搬送ベルトと、
前記段落式搬送ベルトによって連結された複数の加工センター領域内に設置されたプログラマブルロジックコントローラ及びインターロックと、
前記段落式の搬送ベルト上に位置し、該搬送ベルトの提供する搬送ルートを利用して該ストッカーとの間において材料の搬送を行う複数の台車と、
を含み、
前記複数の独立した加工センターは、前記プログラマブルロジックコントローラによって信号を連結し、前記インターロック装置によって前記複数の独立した加工センターの間の前記段落式搬送ベルトの搬送方向を制御する、
ことを特徴とする自動材料搬送システム。 An automatic material handling system,
A plurality of tables, and a stocker provided with a plurality of transport ports on the first and second side surfaces, respectively, and the plurality of tables are connected to the plurality of transport ports on the first side surface, A plurality of independent processing center regions in which at least one of the transfer ports is a bidirectional transfer port ;
A plurality of paragraph-type transport belts provided in the plurality of processing center regions and connected to the bidirectional transport port on the second side surface of the processing center stocker;
A programmable logic controller and an interlock installed in a plurality of processing center regions connected by the paragraph type conveyor belt;
A plurality of carriages that are located on the paragraph type conveyor belt and convey materials to and from the stocker using a conveyance route provided by the conveyor belt;
Including
The plurality of independent processing centers connect signals by the programmable logic controller, and control the conveyance direction of the paragraph-type conveyance belt between the plurality of independent processing centers by the interlock device .
The automatic material conveyance system characterized by this.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW093122109A TWI279379B (en) | 2004-07-23 | 2004-07-23 | Automated material handling system |
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| JP2006036539A JP2006036539A (en) | 2006-02-09 |
| JP4473187B2 true JP4473187B2 (en) | 2010-06-02 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2005167083A (en) * | 2003-12-04 | 2005-06-23 | Daifuku Co Ltd | Conveyance equipment for glass substrate |
| WO2006098039A1 (en) * | 2005-03-15 | 2006-09-21 | Hirata Corporation | Work handling device |
| DE102008036322A1 (en) * | 2008-07-29 | 2010-02-04 | Dürr Systems GmbH | Interim storage for intermediate storage of objects to be painted |
| TWI411565B (en) * | 2010-09-16 | 2013-10-11 | Au Optronics Corp | Object transportation control system |
| CN103663166A (en) * | 2013-12-11 | 2014-03-26 | 深圳市华星光电技术有限公司 | Automatic material carrying system and overhead traveling crane system thereof |
| CN110190019A (en) * | 2018-02-22 | 2019-08-30 | 圆益Ips股份有限公司 | Substrate transports module and the base plate processing system including the module |
| CN112744586B (en) * | 2020-12-23 | 2022-09-02 | 乐金显示光电科技(中国)有限公司 | Glass substrate carrying control method and control system |
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| KR100515740B1 (en) * | 1998-08-14 | 2005-09-20 | 동경 엘렉트론 주식회사 | Substrate processing apparatus |
| US6435330B1 (en) * | 1998-12-18 | 2002-08-20 | Asyai Technologies, Inc. | In/out load port transfer mechanism |
| EP1202325A1 (en) * | 2000-10-25 | 2002-05-02 | Semiconductor300 GmbH & Co KG | Arrangement for transporting a semiconductor wafer carrier |
| US6580967B2 (en) * | 2001-06-26 | 2003-06-17 | Applied Materials, Inc. | Method for providing distributed material management and flow control in an integrated circuit factory |
| US6968753B2 (en) * | 2002-05-09 | 2005-11-29 | Taiwan Semiconductor Manufacturing Co. | Vibration-dampening base for ball-type lead screw of load port transfer system |
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| TW200604075A (en) | 2006-02-01 |
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