JP4458882B2 - Method for producing porous glass preform for optical fiber and preform - Google Patents
Method for producing porous glass preform for optical fiber and preform Download PDFInfo
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- JP4458882B2 JP4458882B2 JP2004060088A JP2004060088A JP4458882B2 JP 4458882 B2 JP4458882 B2 JP 4458882B2 JP 2004060088 A JP2004060088 A JP 2004060088A JP 2004060088 A JP2004060088 A JP 2004060088A JP 4458882 B2 JP4458882 B2 JP 4458882B2
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- core
- preform
- optical fiber
- porous glass
- deposition burner
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- 239000013307 optical fiber Substances 0.000 title claims description 20
- 239000005373 porous glass Substances 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000000151 deposition Methods 0.000 claims description 30
- 230000008021 deposition Effects 0.000 claims description 28
- 239000011521 glass Substances 0.000 claims description 22
- 238000005253 cladding Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 15
- 239000002245 particle Substances 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 3
- 238000009826 distribution Methods 0.000 description 10
- 229910005793 GeO 2 Inorganic materials 0.000 description 6
- 239000010419 fine particle Substances 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 4
- 229910003902 SiCl 4 Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 238000004017 vitrification Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009957 hemming Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/0144—Means for after-treatment or catching of worked reactant gases
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/64—Angle
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
本発明は、伝送損失が小さく分散特性に優れた通信用光ファイバの製造に好適な光ファイバ用多孔質ガラス母材の製造方法及びプリフォームに関する。 The present invention relates to a method and a preform for producing a porous glass preform for an optical fiber suitable for producing a communication optical fiber having a small transmission loss and excellent dispersion characteristics.
光ファイバは、軸付け法や外付け法と呼ばれる方法を用いて、出発母材上にガラス微粒子(スート)を堆積して多孔質ガラス母材を形成し、これを焼結・透明ガラス化した後、必要に応じて所望の径に縮径して得られたガラスロッド、いわゆる光ファイバ用プリフォームを線引きして製造される。 Optical fiber is a method of so-called “spinning” and “external attachment”. Glass microparticles (soot) are deposited on the starting base material to form a porous glass base material, which is then sintered and made into a transparent glass. Thereafter, it is manufactured by drawing a so-called optical fiber preform, which is obtained by reducing the diameter to a desired diameter as required.
光ファイバ用多孔質ガラス母材の製造には、図１に示すようなＶＡＤ法が広く採用されている。ＶＡＤ法によれば、複数のバーナ１〜３にＳｉＣｌ4，ＧｅＣｌ4などのガラス原料を供給し、火炎加水分解反応により生成するガラス微粒子を、回転しつつ上昇するターゲット棒（出発母材）に堆積させて多孔質ガラス母材４として成長させ、これを高温に加熱し、脱水・透明ガラス化することで光ファイバ用プリフォームが得られる。なお、図中の符号５はコア部であり、符号６は火炎、符号７はクラッド部、符号８は未付着ＧｅＯ2含有ガラス微粒子流である。
A VAD method as shown in FIG. 1 is widely used for manufacturing a porous glass preform for optical fibers. According to the VAD method, glass raw materials such as SiCl 4 and GeCl 4 are supplied to a plurality of burners 1 to 3, and glass fine particles generated by a flame hydrolysis reaction are turned to a target rod (starting base material) that rises while rotating. The optical fiber preform is obtained by depositing and growing as a porous
ＶＡＤ法では、コア部及びクラッド部の一部又は全部を同時に合成することができる。バーナ１〜３には、酸素、水素などの燃料ガスとともにガラス原料が供給されるが、コアを合成するコア堆積用バーナ１には、ガラス原料として、ＳｉＣｌ4とともに屈折率上昇用ドーパントとしてＧｅＣｌ4などのＧｅ含有化合物が供給される。クラッドを合成するクラッド堆積用バーナ２，３には、ガラス原料として通常ＳｉＣｌ4のみが供給される。
In the VAD method, part or all of the core part and the clad part can be synthesized simultaneously. The burner 1 to 3, GeCl oxygen, a glass material with a fuel gas such as hydrogen is supplied to the core deposition burner 1 for synthesizing a core, as a glass raw material, as a refractive index increasing dopant with SiCl 4 4 Ge-containing compounds such as are supplied. Usually, only SiCl 4 is supplied as a glass material to the
各バーナで生成されたガラス微粒子は、火炎流によって運ばれ堆積されるが、このとき各バーナの火炎流が相互に干渉して堆積効率を下げないように、各バーナは所定の間隔をあけて同一方向に向けて配置される（特許文献１参照）。 The glass particles generated in each burner are carried and deposited by the flame flow. At this time, each burner is spaced at a predetermined interval so that the flame flow of each burner does not interfere with each other to lower the deposition efficiency. It arrange | positions toward the same direction (refer patent document 1).
ステップインデックス型シングルモード光ファイバは、図２に示すように、径方向の屈折率分布においてコア部の裾引き９が大きいと、光ファイバの分散特性が悪化することが知られている（特許文献２参照）。
また、ステップインデックス型以外の単純な光ファイバでも、用途によっては伝送特性上、コア部の屈折率分布の裾引きを抑制しなければならないときがある。
As shown in FIG. 2, in the step index type single mode optical fiber, it is known that the dispersion characteristic of the optical fiber is deteriorated when the
Further, even with simple optical fibers other than the step index type, depending on the application, it is sometimes necessary to suppress the tailing of the refractive index distribution of the core part due to transmission characteristics.
上記コア部の屈折率分布の裾引きは、多孔質ガラス母材の脱水・透明ガラス化工程で、ＧｅＯ2が拡散することにより生じる。これを防ぐ方法として、堆積時にコアの外側を火炎で焼き締めることにより、コア部の周囲に嵩密度の高い硬化層を形成し（特許文献１参照）、クラッド中へのＧｅＯ2の拡散を抑制する技術が挙げられる。しかし、この方法は、焼き締めを強くするとガラス化時に気泡を生じることがある。 The bottom of the refractive index distribution of the core portion is caused by the diffusion of GeO 2 in the dehydration and transparent vitrification process of the porous glass base material. As a method to prevent this, a hardened layer having a high bulk density is formed around the core by baking the outside of the core with a flame during deposition (see Patent Document 1), and the diffusion of GeO 2 into the clad is suppressed. Technology to do. However, in this method, if baking is strengthened, bubbles may be generated during vitrification.
その他に、コア堆積用バーナで生じたコア部に未付着のガラス微粒子がクラッド部で付着することにより、裾引きを生じる場合がある。この問題に対しては、図３に示すように、コア堆積用バーナの未付着のガラス微粒子を排気管10で吸引させる方法があるが、この方法は、排気管10内にガラス微粒子の堆積層11が形成されることにより（矢印側の図）、排気方向や吸引線速が変化し、コア／クラッド比及び屈折率分布が変化するという問題がある。
In addition, tailing may occur due to adhesion of unadhered glass particles to the core portion generated by the core deposition burner at the cladding portion. As shown in FIG. 3, there is a method of sucking unadhered glass particles of the core deposition burner through the
本発明は、上記コア部の屈折率分布の裾引きを容易に低減することのできる光ファイバ用多孔質ガラス母材の製造方法及びプリフォームを提供することを目的としている。 An object of the present invention is to provide a method for producing a porous glass preform for an optical fiber and a preform that can easily reduce the tailing of the refractive index distribution of the core portion.
本発明の光ファイバ用多孔質ガラス母材の製造方法は、ＶＡＤ法によりコア部、クラッド部を同時に形成する多孔質ガラス母材の製造方法において、コア堆積用バーナによりドープ材含有ガラス微粒子を堆積させてコア部を形成するに際し、コア堆積用バーナに隣接するクラッド堆積用バーナを該コア堆積用バーナの反対側に設置し、該コア堆積用バーナと対向する方向からコア堆積面の上部に火炎流を吹き付けることにより、コア部に堆積されなかったドープ材含有ガラス微粒子のクラッド部への付着を抑制することを特徴としている。 The method for producing a porous glass preform for an optical fiber according to the present invention is a method for producing a porous glass preform in which a core portion and a cladding portion are simultaneously formed by a VAD method. When forming the core portion, a cladding deposition burner adjacent to the core deposition burner is installed on the opposite side of the core deposition burner, and a flame is formed above the core deposition surface from the direction facing the core deposition burner. By spraying the flow , it is characterized in that adhesion of dope-containing glass fine particles not deposited on the core portion to the cladding portion is suppressed.
このようにして得られた多孔質ガラス母材を、脱水・透明ガラス化することで、光ファイバ用プリフォームが得られる。また、このプリフォームをコアとクラッドの一部を有する出発母材とし、この外側にさらにクラッドを付与して光ファイバ用プリフォームとすることもできる。 An optical fiber preform can be obtained by dehydrating and converting the porous glass preform thus obtained into a transparent glass. Moreover, this preform can be used as a starting base material having a core and a part of a clad, and a clad can be further provided on the outer side to form a preform for an optical fiber.
本発明によれば、コア堆積用バーナに隣接するクラッド堆積用バーナを、コア堆積用バーナとは反対側に配置してガラス微粒子の堆積を行うことにより、コア堆積用バーナで生じたコア部に未付着のドープ材含有ガラス微粒子がクラッド部表面に達する前に、クラッド堆積用バーナの火炎流で散らすことができ、クラッド部での付着を防止することができ、コア部の屈折率分布の裾引きが低減されたプリフォームが得られ、分散特性の優れた光ファイバが得られる。 According to the present invention, the clad deposition burner adjacent to the core deposition burner is disposed on the opposite side of the core deposition burner to deposit the glass fine particles, so that the core portion generated by the core deposition burner is applied. Before adhering glass particles containing dopants do not reach the surface of the cladding part, they can be scattered by the flame flow of the burner for cladding deposition, preventing adhesion at the cladding part, and the bottom of the refractive index distribution of the core part. A preform with reduced pulling can be obtained, and an optical fiber with excellent dispersion characteristics can be obtained.
本発明は、コア堆積用バーナによって生成されたＧｅＯ2などのドープ材含有ガラス微粒子がクラッド部に付着するのを防止し、これによってコア部の屈折率分布の裾引きを低減させている。具体的には、例えば図４に示すように、コア堆積用バーナ１に隣接するクラッド堆積用バーナ２を、コア堆積用バーナ１の反対側に設置し、この火炎流により未付着ＧｅＯ2含有ガラス微粒子流８が乱され、未付着ガラス微粒子のクラッド部への付着が防止される。
The present invention prevents the glass fine particles containing a doping material such as GeO 2 produced by the core deposition burner from adhering to the cladding part, thereby reducing the tailing of the refractive index distribution of the core part. Specifically, as shown in FIG. 4, for example, a
このようにして得られたプリフォームを線引きして、ステップインデックス型シングルモード光ファイバを得た。この光ファイバの屈折率分布を測定したところ、図５に示すように、コア部の裾引きが極めて小さくなっている。 The preform thus obtained was drawn to obtain a step index type single mode optical fiber. When the refractive index distribution of this optical fiber was measured, as shown in FIG. 5, the tail of the core part was extremely small.
分散特性に優れた光ファイバが、容易に低コストで得られる。 An optical fiber having excellent dispersion characteristics can be easily obtained at low cost.
１……コア堆積用バーナ、
２，３……クラッド堆積用バーナ、
４……多孔質ガラス母材、
５……コア部、
６……火炎、
７……クラッド部、
８……未付着ＧｅＯ2含有ガラス微粒子流、
９……裾引き、
１０……排気管、
１１……堆積層。
1 ... Core deposition burner,
2, 3 ... Burner for cladding deposition,
4 …… Porous glass base material,
5 …… Core part,
6 ... Flame,
7 …… Clad part
8: Non-adhered GeO 2 -containing glass particulate flow,
9 ... hemming,
10 …… Exhaust pipe,
11: Deposited layer.
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004060088A JP4458882B2 (en) | 2004-03-04 | 2004-03-04 | Method for producing porous glass preform for optical fiber and preform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004060088A JP4458882B2 (en) | 2004-03-04 | 2004-03-04 | Method for producing porous glass preform for optical fiber and preform |
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| Publication Number | Publication Date |
|---|---|
| JP2005247631A JP2005247631A (en) | 2005-09-15 |
| JP4458882B2 true JP4458882B2 (en) | 2010-04-28 |
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| Country | Link |
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| JP (1) | JP4458882B2 (en) |
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- 2004-03-04 JP JP2004060088A patent/JP4458882B2/en not_active Expired - Lifetime
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| JP2005247631A (en) | 2005-09-15 |
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