JP4445238B2 - Fluid control valve - Google Patents

Description

  The present invention relates to a fluid control valve that controls a fluid.

  Conventionally, a fluid control valve is attached to, for example, a semiconductor manufacturing apparatus or an ink manufacturing apparatus and used to control a fluid such as a chemical solution. FIG. 17 is a cross-sectional view of the fluid control valve 100 used in the semiconductor manufacturing apparatus.

  The fluid control valve 100 includes a valve unit 101 that controls fluid and a drive unit 102 that applies a driving force to the valve unit 101. In the drive unit 102, a piston 104 is slidably loaded in a cylindrical cylinder 103, and the piston chamber 105 is partitioned into an upper chamber 105A and a lower chamber 105B in an airtight manner. An air source is connected to the upper chamber 105A and the lower chamber 105B, and the piston 104 is slid by pressure fluctuations in the upper chamber 105A and the lower chamber 105B.

  The valve unit 101 is integrated with a drive unit 102 by connecting a cylinder 103 to a body 106. The body 106 holds the diaphragm 107 between the cylinder 103 and forms a valve chamber 110 between the first port 108 and the second port 109. A protrusion 111 is provided at the center of the valve chamber 110, and an opening 112 for communicating the first port 108 with the valve chamber 110 opens toward the center of the valve chamber 110, that is, toward the protrusion 111. A valve hole 113 is formed in the protrusion 111 and communicates with the second port 109. A valve seat 114 with which the diaphragm 107 abuts or separates is provided at the tip of the projection 111, and the bottom surface 110a of the valve chamber 110 is opened so that fluid can easily flow between the opening 112 and the valve seat 114. It is formed obliquely upward from 112 to the valve seat 114. The diaphragm 107 is connected to the piston 104 of the driving unit 102 so that the diaphragm 107 is displaced.

  Accordingly, when the fluid control valve 100 supplies the fluid to the first port 108 as shown in FIGS. 18 and 19, when the drive unit 102 pulls up the diaphragm 107, the fluid is separated from the diaphragm 107 and the valve seat 114. The flow rate is adjusted according to the output and output to the second port 109. However, at this time, the fluid is ejected from the opening 112 toward the projection 111, and most of the fluid collides with the projection 111 to reduce the flow velocity, and flows into the valve seat 114 through the shortest path. The remaining fluid flows into the valve seat 114 while flowing around the protrusion 111 in two directions. For this reason, the flow rate of the fluid decreases as the distance from the opening 112 decreases, making it difficult for the fluid to flow into the valve seat 114, and a liquid pool or a retention portion is generated on the opposite side of the opening 112 (see P1 in the figure).

  Further, when the fluid control valve 100 supplies fluid to the second port 109 as shown in FIGS. 20 and 21, when the drive unit 102 pulls up the diaphragm 107, the fluid is separated from the diaphragm 107 and the valve seat 114. Accordingly, the flow rate is adjusted and output to the first port 108 through the opening 112. However, at this time, since the fluid tends to flow to the opening 112 through the shortest path, the opposite side of the opening 112 is stagnated, and a liquid pool or a stay is generated (see P2 in the figure). Such a liquid pool or staying part is not preferable because it changes the liquid quality under the influence of temperature or the like.

  In response to this problem, the applicant has proposed a fluid control valve 200 as shown in the cross-sectional view of FIG. In the fluid control valve 200, a slope 210 a that spirally slopes around the protrusion 111 is formed on the bottom surface of the valve chamber 210, and a wall 210 b is provided on one side of the opening 112. As a result, in both cases where the fluid is supplied to the second port 109 as shown in FIG. 23 and the fluid is supplied to the first port 108 as shown in FIG. Since the fluid in the entire valve chamber 110 is entrained in a spiral shape, a liquid pool or staying portion hardly occurs on the side opposite to the opening 112 (see Patent Document 1).

JP 2002-310316 (paragraphs 0002 to 0013, 002 7 to 0049, FIGS. 7, 8, 9, 10, 15, and 18).

However, in the conventional fluid control valve, when bubbles are generated in the fluid, the bubbles flow upward and accumulate in the membrane portion of the diaphragm 107.

Therefore, the present invention has been made to solve the above-described problems, and an object of the present invention is to provide a fluid control valve with good bubble removal .

The fluid control valve according to the present invention has the following configuration.
(1) A body provided with a valve seat is provided in a valve chamber interposed between the first communication path and the second communication path, and the valve body is brought into contact with or separated from the valve seat, thereby the first communication path. A fluid control valve for controlling a fluid flowing between a passage and the second communication passage, wherein the second communication passage is provided coaxially with the valve chamber and opens to a bottom surface of the valve chamber; A second flow path formed in a direction perpendicular to the valve hole and communicating with the valve hole; and a second port provided at a portion where the second flow path opens on a side surface of the body. The valve seat is provided in a portion where the valve hole opens into the valve chamber, and a bottom surface of the valve chamber has a taper that decreases in diameter from a side surface of the valve chamber toward the valve seat, The one communication path is formed in a tangential direction of the valve chamber from a side surface opposite to the side surface on which the second port of the body is provided, An opening opening on the inner surface of the valve chamber is displaced in a radial direction with respect to the valve seat, and is provided on a cross section different from a cross section passing through the axis of the second flow path of the body and the axis of the valve chamber. A first port provided at a portion where the first flow path opens on a side surface of the body, and the first flow path opens on an inner side surface of the valve chamber. When the fluid is supplied from the first communication path to the second communication path, the bubbles generated in the fluid are installed along the taper in the valve seat direction. The air is discharged from the second port together with the fluid flowing into the valve seat, and the air bubbles are well removed .

(2) By contacting or separating the valve body from a valve seat provided in a valve chamber interposed between the first communication path and the second communication path, the first communication path and the second communication path In the fluid control valve for controlling a fluid flowing between the valve chamber, the valve chamber has a circular bottom surface and a side surface provided along an outer edge of the bottom surface, and the second communication path is formed from the valve chamber. It has a small diameter and opens at the center of the bottom surface, and the valve seat is provided by the bottom surface at a portion where the second communication path opens at the bottom surface, and the bottom surface of the valve chamber is formed from a side surface of the valve chamber. The valve body has a taper that decreases in diameter toward the valve seat, and the valve body has a cylindrical valve body portion having a cross-sectional area larger than an opening area in which the second communication path opens in the bottom surface. The valve seat is provided so as to be able to come into contact with and separate from the valve seat. An annular flow channel having a width is formed, and the first communication passage has an opening formed in a tangential direction of the valve chamber and opening in the side surface of the valve chamber, and the opening portion extends from the valve seat. The first communication passage is installed such that the valve seat is positioned higher than the opening portion where the first communication passage opens on the inner surface of the valve chamber, and the fluid is transferred from the first communication passage to the second communication passage. When supplying, bubbles generated in the fluid move in the valve seat direction along the taper, and are discharged from the second communication path together with the fluid flowing into the valve seat .

According to the invention having the above-described configuration, when the valve portion supplies fluid from the first communication path to the second communication path , the fluid supplied to the first port passes through the first flow path to the valve chamber. It flows into the valve chamber from the opening that opens to the inner side surface, and is discharged from the second port through the valve hole and the second flow path from the valve seat. The fluid flowing into the valve chamber from the opening which opens to the inner surface of the valve chamber, for opening that opens to the inner surface of the valve chamber is formed in the tangential direction of the valve chamber, the valve chamber wall in momentum and inflows The entire valve chamber flows in a spiral shape while colliding with the valve , and flows into the valve seat. When the fluid collides with the valve chamber wall, the fluid in the vicinity of the valve chamber wall flows and flows through the entire valve chamber, so that no stagnation occurs in the valve chamber. In the invention with the above-described configuration, the first flow path is installed so that the valve seat is positioned higher than the opening portion that opens on the inner surface of the valve chamber, and the fluid is transferred from the first communication path to the second communication path. When supplying, bubbles generated in the fluid move in the direction of the valve seat along the taper and are collected upward, and are discharged from the second port together with the fluid that flows into the valve seat in a spiral shape. be able to.

According to the invention having the above-described configuration, when the valve portion supplies fluid from the first communication path to the second communication path, the fluid supplied to the first communication path is an opening that opens to the side surface of the valve chamber. From the valve seat to the second communication passage. The fluid that has flowed into the valve chamber through the opening that opens to the inner side surface of the valve chamber flows around an annular flow passage having a constant width formed between the outer peripheral surface of the valve body and the side surface of the valve chamber, Flow into. When the fluid collides with the valve chamber wall, the fluid in the vicinity of the valve chamber wall flows and flows through the entire valve chamber, so that no stagnation occurs in the valve chamber. In the invention with the above-described configuration, the first communication passage is installed so that the valve seat is positioned higher than the opening portion opened on the inner surface of the valve chamber, and the fluid is supplied from the first communication passage to the second communication passage. When supplying, bubbles generated in the fluid move in the direction of the valve seat along the taper and are collected upward, and are discharged from the second communication path together with the fluid that flows into the valve seat in a spiral shape, thus improving bubble removal Can be made.

In the following, it will be described with reference to the drawings showing preferred embodiments of a fluid control valve according to the present invention. FIG. 1 is a cross-sectional view of the on-off valve 1.
The fluid control valve according to the present embodiment is an air-operated on-off valve (hereinafter simply referred to as “on-off valve”) 1 and is attached to an ink manufacturing apparatus, for example, to supply or shut off fluid. The on-off valve 1 has an external appearance constituted by a body 4, a cylinder 5, a cover 6, and the like. 3.

  The drive unit 3 is disposed between the cylinder 5 and the cover 6. The cylinder 5 has a substantially cylindrical shape with a hollow hole, and a cover 6 is attached to form a piston chamber 7. The piston chamber 7 is slidably loaded with a piston rod 8, and is hermetically partitioned into a primary chamber 7A and a secondary chamber 7B. An air source (not shown) is connected to the primary chamber 7A and the secondary chamber 7B via operation ports 10 and 11. Therefore, the piston rod 8 can be moved in the vertical direction by utilizing the pressure fluctuations in the primary chamber 7A and the secondary chamber 7B. The piston rod 8 is prevented from rotating, and the tip end portion passes through the cylinder 5 from the drive portion 3 side to the valve portion 2 side and is connected to the diaphragm 13.

  On the other hand, the valve unit 2 is provided in the body 4 and is integrated with the drive unit 3 by connecting the body 4 to the cylinder 5. The body 4 is formed by molding a resin such as PTFE (polytetrafluoroethylene resin) or stainless steel into a block shape (a rectangular parallelepiped shape in the present embodiment) from the viewpoint of corrosion resistance and the like, and the first port is formed on the opposite side surface. 15 and the second port 16 are formed. In the body 4, a substantially cylindrical bottomed hole 17 is opened in a direction perpendicular to the first port 15 and the second port 16 at the center of the side surface connected to the cylinder 5, and a valve hole 18 is coaxially formed with the bottomed hole 17. It has been drilled. A valve seat 19 is provided at a portion where the valve hole 18 opens in the bottomed hole 17 (a portion corresponding to a “second opening”). The diaphragm 13 is sandwiched between the step provided at the opening of the bottomed hole 17 and the end of the cylinder 5 at the peripheral edge 13C, and a space formed between the body 4 and the cylinder 5 is formed in the valve chamber 17A. And the back chamber 17B.

  Diaphragm 13 is formed by cutting out resin such as PTFE or molding by injection molding or the like from the viewpoint of corrosion resistance and the like, and peripheral portion 13C is concentric with cylindrical valve body portion 13A via thin film portion 13B. It is provided in the shape. The diaphragm 13 protrudes to the center of the valve chamber 17A so that the distal end portion of the valve body portion 13A contacts or separates from the valve seat 19, while the rear end portion of the valve body portion 13A is screwed to the piston rod 8. . Therefore, the valve opening degree can be controlled according to the movement amount of the piston rod 8.

The body 4 is configured to have a flow path so that a spiral flow is generated in the valve chamber 17A. 2 is a cross-sectional view taken along the line AA in FIG.
In the body 4, the first port 15 is formed at the center of the valve chamber 17 </ b> A, that is, at a position shifted in the width direction from the valve seat 19, and the first flow path 20 is formed coaxially with the first port 15. It communicates with 17A in the tangential direction. The reason why the first flow path 20 is formed in the tangential direction is to make it easier for fluid to enter and exit between the valve chamber 17A and the first flow path 20 in a straight line. Therefore, the first opening 21 where the first flow path 20 opens to the valve chamber 17A is the center of the valve chamber 17A, that is, the valve seat 19 and the valve body portion of the diaphragm 13 (corresponding to the “projection”). It is provided at a position shifted from 13A.

The body 4 has a second port 16 formed on the center line of the valve chamber 17A and the valve seat 19,
The second flow path 22 is formed coaxially with the second port 16 and communicates with the valve hole 18. As a result, the first port 15 communicates with the second port 16 via the first communication path 20, the first opening 21, the valve chamber 17 </ b> A, the valve seat 19, the valve hole 18, and the second flow path 22. As shown in FIG. 1, a taper 23 whose diameter decreases toward the valve seat 19 is formed on the inner wall of the valve chamber 17 </ b> A.
In the present embodiment, the first communication path 24 is configured by the first port 15 and the first flow path 20, and the second communication path 25 is configured by the valve hole 18, the second flow path 22, and the second port 16. It is configured.

  The on-off valve 1 has a mounting plate 26 fixed to the body 4 and is attached to the ink manufacturing apparatus via the mounting plate 26.

  Next, the operation of the on-off valve 1 will be described. First, a case where fluid is supplied from the first communication path 24 to the second communication path 25 will be described. FIG. 3 is a cross-sectional view of the on-off valve 1 and shows how the fluid flows from the first port 15 to the second port 16. FIG. 4 is a plan view of the body 4 and shows how the fluid flows from the first port 15 to the second port 16.

  The on-off valve 1 is attached to the ink manufacturing apparatus so that the valve unit 2 is located above the driving unit 3, and piping is connected to the first port 15 and the second port 16. Therefore, the valve seat 19 is provided at a higher position than the first opening 21.

  When compressed air is supplied to the operation port 10, as shown in FIG. 1, the piston rod 8 moves upward in the figure, and the valve body portion 13 </ b> A of the diaphragm 13 is brought into contact with the valve seat 19 to close the valve.

  When fluid is supplied to the first port 15 and compressed air is supplied to the operation port 10, the piston rod 8 moves downward in the figure as shown in FIG. 3, and the valve body portion 13 A of the diaphragm 13 is moved from the valve seat 19. Separate. Then, the fluid that has flowed into the valve chamber 17 </ b> A from the first port 15 through the first flow path 20 flows into the valve seat 19 and is output from the second port 16 through the valve hole 18 and the second flow path 22. As shown in FIG. 4, the fluid flowing into the valve chamber 17 </ b> A from the first opening 21 is provided in the center of the valve chamber 17 </ b> A, that is, at a position shifted from the valve seat 19. Instead of flowing into the valve seat 19, the force that flows into the valve chamber 17 </ b> A from the first opening 21 hits the inner wall of the valve chamber 17 </ b> A, changes its direction, and flows into the valve seat 19. When the fluid collides with the inner wall of the valve chamber 17A, the fluid near the inner wall of the valve chamber 17A flows and flows through the entire valve chamber 17A, so that stagnation hardly occurs near the inner wall of the valve chamber 17A. Further, since the fluid flows into the valve seat 19 while flowing in a spiral shape, turbulent flow hardly occurs in the vicinity of the valve seat 19.

  At this time, since the first flow path 20 is formed in a tangential direction with respect to the valve chamber 17A, the fluid linearly flows from the first opening 21 into the valve chamber 17A without impairing the flow velocity, and the valve chamber It hits the inner wall of 17A. Therefore, the fluid tends to form a spiral flow in the valve chamber 17A.

  Since the fluid flows in one direction while being guided by a flow path formed between the outer peripheral surface of the valve body portion 13A and the inner wall of the valve chamber 17A, when the fluid collides with the valve chamber 17A, Difficult to diffuse, maintaining the momentum of flow.

  Here, since centrifugal force acts on the fluid that flows spirally through the valve chamber 17A, the fluid flows along the wall surface of the valve chamber 17A. The width of the centrifugal force is gradually increased toward the valve seat 19 by the taper 23. Since the flow velocity flowing into the valve seat 19 is accelerated, the fluid at the corner of the valve chamber 17A is easily caught in the flow, and stagnation is hardly generated at the corner of the valve chamber 17A. Further, since the fluid is guided by the taper 23 and flows into the valve seat 19 at a gentle angle, turbulence is hardly generated in the vicinity of the valve seat 19.

  By the way, bubbles may be generated in the fluid due to the momentum of the fluid flowing into the valve chamber 17A. In this case, when the bubbles rise in the valve chamber 17A in the spiral flow and move in the direction of the valve seat 19 along the taper 23, the bubbles are discharged from the second port 16 together with the fluid flowing into the valve seat 19. Therefore, bubble accumulation does not occur in the vicinity of the valve seat 19.

In addition, the case where a fluid is supplied from the 2nd communicating path 25 to the 1st communicating path 24 is demonstrated as an example of use of the on-off valve 1. FIG. FIG. 5 is a cross-sectional view of the on-off valve 1 and shows how the fluid flows from the second port 16 to the first port 15. FIG. 6 is a plan view of the body 4 and shows how the fluid flows from the second port 16 to the first port 15.

  The on-off valve 1 is attached to the ink manufacturing apparatus so that the valve unit 2 is located below the driving unit 3, and piping is connected to the first port 15 and the second port 16. Therefore, the first opening 21 is provided at a higher position than the valve seat 19.

  When compressed air is supplied to the operation port 10, the piston rod 8 moves toward the valve seat 19, and the valve body 13 </ b> A of the diaphragm 13 is brought into contact with the valve seat 19 to close the valve.

  When fluid is supplied to the second port 16 and compressed air is supplied to the operation port 10, the piston rod 8 moves downward in the drawing as shown in FIG. 5, and the valve body 13 A of the diaphragm 13 is moved from the valve seat 19. Separate. Then, the fluid supplied to the second port 16 is ejected from the valve seat 19 to the entire valve chamber 17A. Since the first opening 21 is displaced from the valve seat 19 when the fluid flows into the first opening 21 from the valve chamber 17A, the fluid in the valve chamber 17A is tangential to the valve chamber 17A from one side of the valve seat 19. Pull on. With this force, as shown in FIG. 6, the fluid in the valve chamber 17A flows spirally in one direction toward the first opening 21 between the valve body 13A of the diaphragm 13 and the inner wall of the valve chamber 17A. . Every time the fluid collides with the inner wall of the valve chamber 17A and changes its direction, the fluid in the vicinity of the inner wall of the valve chamber 17A flows and flows through the entire valve chamber 17A, so that the stagnation hardly occurs in the valve chamber 17A.

  At this time, since the first flow path 20 is formed in a tangential direction with respect to the valve chamber 17A, the fluid smoothly flows from the valve chamber 17A to the first opening 21 without impairing the flow velocity, and enters the valve chamber 17A. It is easy to form a spiral flow. In particular, since the fluid flowing in a spiral shape generates a centrifugal force, it is easily guided linearly from the first opening 21 to the first flow path 20 through the inner wall of the valve chamber 17A, and turbulence is generated. Hard to do.

  Since the fluid flows in one direction while being guided by a flow path formed between the outer peripheral surface of the valve body portion 13A and the inner wall of the valve chamber 17A, when the fluid collides with the inner wall of the valve chamber 17A, the valve chamber 17A Difficult to diffuse throughout, maintaining the momentum of flow.

  By the way, there is a case where bubbles are generated in the fluid by the momentum of the fluid being ejected from the valve seat 19 to the valve chamber 17A. In this case, the bubbles rise in the valve chamber 17 </ b> A in a spiral flow, but the first opening 21 is provided at a higher position than the valve seat 19. 1 port 15 is discharged. Therefore, bubble accumulation does not occur in the valve chamber 17A.

  Therefore, according to the on-off valve 1 of the present embodiment, for example, the first communication path 24 opens to the valve chamber 17A without providing an inclination between the valve seat 19 and the first opening 21. With a simple flow path configuration in which the opening 21 is provided at a position shifted from the center of the valve chamber 17A, it is possible to suppress the occurrence of a liquid pool or a staying portion. Thereby, the liquid quality of the fluid does not change in the valve chamber 17A, and the yield can be improved.

Further, according to the on-off valve 1 of the present embodiment, since the first communication path 24 is formed in the tangential direction of the valve chamber 17A, it is easy to form a spiral flow along the inner wall of the valve chamber 17A.
Further, according to the on-off valve 1 of the present embodiment, the valve chamber 17A is provided with the valve body portion 13A of the diaphragm 13 on the same axis as the valve seat 19, thereby preventing diffusion of the fluid flowing in a spiral shape. The momentum of the fluid flowing spirally through the valve chamber 17A can be maintained.

Further, according to the on-off valve 1 of the present embodiment, when supplying fluid from the first communication path 24 to the second communication path 25, the valve seat 19 is provided at a position higher than the first opening 21. When supplying the fluid from the second communication path 25 to the first communication path, the first opening 21 is provided at a position higher than the valve seat 19, so that air bubble removal can be improved.
Furthermore, according to the on-off valve 1 of the present embodiment, since the valve chamber 17A is provided with the taper 23 that is reduced in diameter toward the valve seat 19, a liquid pool or a stay portion is generated at the corner of the valve chamber 17A. It is difficult to generate turbulence near the valve seat 19.

(The first reference example)
Then, the 1st reference example which concerns on the fluid control valve of this invention is demonstrated with reference to drawings. FIG. 7 is a cross-sectional view of the regulator and shows a stopped state. FIG. 8 is a sectional view of the regulator and shows a control state.
The fluid control valve of this reference example is a regulator 31 that controls the fluid pressure to be constant. The regulator 31 is configured by connecting the bottom plate 32, the body 33, and the cover 34. For example, the bottom plate 32 is screwed to the semiconductor manufacturing apparatus, and the first port 35 and the second port 36 are connected to the piping. Installed in the chemical supply line.

  The body 33 is formed by molding a resin such as PTFE into a block shape having a hollow hole from the viewpoint of corrosion resistance and the like, and a first port 35 and a second port 36 are formed in the side surface. The body 33 has a bottomed hole formed in the center of the side surface connected to the bottom plate 32, and a seal member 37 is attached to the bottomed hole opening to fix the bottom plate 32 to the body 33. 38 is formed. The seal member 37 and the bottom plate 32 are formed by molding a resin such as PCTFE (polychlorotrifluoroethylene resin) or PTFE from the viewpoint of corrosion resistance.

  The body 33 has a bottomed hole formed coaxially with the first valve chamber 38 in the center of the side surface connected to the cover 33, and a space 39 is formed between the body 33 and the cover 34. The space 39 is airtightly divided into a second valve chamber 39A and a back chamber 39B by a diaphragm 40 having a peripheral edge held between the body 33 and the cover 34. The first valve chamber 38 and the second valve chamber 39A communicate with each other through a valve hole 41 formed coaxially with the valve valve 42 so that the valve shaft 42 connected to the central portion of the diaphragm 40 can slide in the valve hole 41. It is inserted. A valve body 43 is integrally formed at the distal end portion of the valve shaft 42, and is configured to abut against or separate from a valve seat 44 protruding from a portion where the valve hole 41 of the first valve chamber 38 opens. On the other hand, the operation port 45 communicates with the back chamber 39B, and the diaphragm 40 is displaced by the balance between the pressure in the back chamber 39B and the fluid pressure in the valve chamber 39A to adjust the valve opening. Note that the cover 33, the diaphragm 40, the valve shaft 42, the valve body 43, and the like are also formed of a resin such as PTEF from the viewpoint of corrosion resistance.

The body 33 is configured to have a flow path so that a spiral flow is generated in the first valve chamber 38 and the second valve chamber 39A. FIG. 9 is a bottom view of the regulator 31. FIG. 10 is a top view of the regulator 31.
As shown in FIG. 9, the first port 35 is provided at a position shifted from the center of the first valve chamber 38, and the first communication passage 46 is formed coaxially with the first port 35. The valve chamber 38 communicates in a tangential direction. The reason why the first communication passage 46 is formed in the tangential direction is to make it easier for the chemical liquid to flow out into the first valve chamber 38 linearly. Therefore, the first opening 47 where the first communication passage 46 opens into the first valve chamber 38 is the center of the first valve chamber 38, that is, the valve seat 44 and the valve body (corresponding to a “projection”). It is formed at a position shifted from 43.

  As shown in FIG. 10, the body 33 is provided with the second port 36 at a position shifted from the center of the second valve chamber 39 </ b> A, and the second communication passage 48 is formed coaxially with the second port 36. The second valve chamber 39A communicates in the tangential direction. The reason why the second communication path 48 is formed in the tangential direction is to make it easier for the chemical liquid to flow into the second communication path 48. The second opening 49 in which the second communication passage 48 opens into the second valve chamber 39A opens perpendicularly to the direction in which the chemical liquid ejected from the first opening 47 into the first valve chamber 38 flows spirally. The chemical liquid that spirally flows through the second valve chamber 39A is allowed to flow into the second opening 49 as it is.

  The regulator 31 is installed in a semiconductor manufacturing apparatus with piping connected to the first port 35 and the second port 36. When compressed air is supplied from the operation port 49 to the back chamber 39B, the back chamber 39B becomes higher than the second valve chamber 39A, and the diaphragm 40 is displaced downward from the state shown in FIG. It will be in the state shown in. As a result, the valve body 43 is pushed down by the diaphragm 40 via the valve shaft 42 and is separated from the valve seat 44. When the chemical solution is supplied to the first port 35, the chemical solution flows into the first valve chamber 38 from the first communication passage 46, passes through the valve hole 44 at a flow rate corresponding to the valve opening degree, and then enters the second valve chamber 39A. To the second port 36 via the second communication path 48. When the second valve chamber 39A is pressurized, the diaphragm 40 is displaced upward to reduce the valve opening. Therefore, the chemical liquid is controlled to a constant pressure by the pressure balance between the back chamber 39B and the second valve chamber 39A, and is output from the second port 36.

  At this time, the chemical solution supplied to the first port 35 flows spirally through the first valve chamber 38, the valve hole 41, the second valve chamber 39 </ b> A, etc., and is output from the second port 36. FIG. 11 is a diagram conceptually showing how the chemical solution flows through the first valve chamber 38. FIG. 12 is a diagram conceptually illustrating a state in which the chemical liquid flows through the valve hole 41. FIG. 13 is a diagram conceptually illustrating a state in which the chemical liquid flows through the second valve chamber 39A.

  That is, the chemical solution supplied to the first port 35 is formed at the position where the first opening 47 is displaced from the center of the first valve chamber 38, that is, the valve seat 44, as shown in FIG. It does not flow into the valve seat 44 in a short circuit, but flows linearly from the first opening 47 to one side of the valve seat 44, and strikes the inner wall of the first valve chamber 38 with the force to change the direction of the valve chamber 38 and the valve body. 43 flows in one direction and generates a spiral flow. With the momentum of the spiral flow, the chemical solution spirally flows between the valve hole 41 and the valve shaft 42 as shown in FIG. 12, and further maintains the spiral flow as shown in FIG. Then, it flows into the second valve chamber 39A. The chemical solution in the second valve chamber 39A is output from the second port 36 through the second communication passage 48 from the second opening portion 49, but the chemical solution in the second valve chamber 39A is discharged when flowing into the second opening portion 49. Pull in the tangential direction of the second valve chamber 39A. Since this force coincides with the spiral flow direction, the chemical liquid that has flowed into the second valve chamber 39A continues to flow spirally and flows into the second opening 49.

  At this time, every time the chemical solution collides with the inner walls of the first valve chamber 39, the valve chamber 41, and the second valve chamber 39A and changes its direction, the chemical solution near the inner wall is involved, and the first valve chamber 39, the valve chamber 41, It flows through the entire second valve chamber 39A. Therefore, stagnation hardly occurs in the vicinity of the inner wall of the first valve chamber 39, the valve hole 41, and the second valve chamber 39A.

Therefore, in the regulator 31 of this reference example , the first opening 47 is provided at a position shifted from the center of the first valve chamber 38, and the second opening 49 is provided at a position shifted from the center of the second valve chamber 39A. With a simple flow path configuration, the chemical solution can be output without stagnation in the first valve chamber 38 or the second valve chamber 39A.

( Second reference example )
Next, a second reference example according to the fluid control valve of the present invention will be described with reference to the drawings. FIG. 14 is a diagram conceptually showing the flow path configuration of the regulator.
The fluid control valve of this reference example is also a regulator 51 that controls the fluid pressure to be constant. The regulator 51 has the same basic structure as the regulator 31 described in the first reference example , but has a different flow path configuration. Therefore, here, the description will focus on the parts that are different from the regulator 31 of the first reference example , and common parts will be denoted by the same reference numerals in the drawings and will be omitted as appropriate.

Similar to the regulator 51 of the first reference example , the regulator 51 includes a first valve chamber 38 and a second valve chamber 39A that are provided on the axis of the body 33 and communicate with each other via the valve hole 41. The valve opening is adjusted according to the pressure balance with the chamber 39A, and the chemical solution is output from the second port 36 at a constant pressure. A first port 52 and a second port 53 are formed in the body 33 with the first valve chamber 38 and the second valve chamber 39A interposed therebetween.

  The first port 52 is drilled from the side surface of the body 33 toward the center of the first valve chamber 38, and communicates with the first valve chamber 38 via the first communication passage 54. The first communication passage 54 is formed in the tangential direction from the first port 52 to the first valve chamber 38 with respect to the first valve chamber 38, and the first opening is formed in the first communication passage 54 in the first valve chamber 38. 55 is provided at a position displaced from the valve seat 44 which is the center of the valve chamber 38.

On the other hand, the second port 53 is drilled from the side surface of the body 33 toward the center of the second valve chamber 39 </ b> A and communicates with the second valve chamber 39 </ b> A via the second communication passage 56. The second communication passage 56 is formed tangentially from the second port 53 to the second valve chamber 39A, and the second opening 57 through which the second communication passage 56 opens into the second valve chamber 39A is the second valve chamber 39A. It is provided at a position shifted from the valve hole 41 which is the center of the chamber 39A. Note that the second opening 57 is in a direction in which the chemical liquid flowing out from the first opening 55 to the first valve chamber 38 flows in a spiral shape through the first valve chamber 38, the valve hole 41, and the second valve chamber 39A. It is provided so as to open at right angles.
Accordingly, the first port 52 is connected via the first communication passage 54, the first opening 55, the first valve chamber 38, the valve hole 41, the second valve chamber 39 </ b> A, the second opening 57, and the second communication passage 56. The second port 53 communicates.

  The regulator 51 is attached to a semiconductor manufacturing apparatus or the like, and adjusts the amount of the valve element 43 separated from the valve seat 44 by controlling the compressed air supplied to the back chamber 39B of the diaphragm 35. Adjust the flow rate.

  At this time, the chemical solution supplied to the first port 52 flows into the first valve chamber 38 from the first communication path 54 via the first opening 55 and hits the inner wall of the first valve chamber 38 with the momentum. It flows spirally through the first valve chamber 38 while changing its direction. The chemical liquid flows through the entire first valve chamber 38 while entraining the fluid near the inner wall of the first valve chamber 38, and flows from the valve seat 44 into the valve hole 41. Also in the valve hole 41, the chemical solution flows spirally around the valve shaft 42 and flows out into the second valve chamber 39A while maintaining the flow. The chemical solution is guided by the inner wall of the second valve chamber 39 </ b> A, flows into the second opening 57, and is output to the second port 53 through the second communication path 56. Here, when the chemical liquid flows into the second opening 57, the chemical liquid in the second valve chamber 39A is pulled in the tangential direction of the second valve chamber 39A. Also by the force, the chemical solution in the second valve chamber 39A forms a spiral flow. When the chemical liquid spirally flows through the first valve chamber 38, the valve hole 41, and the second valve chamber 39A, the chemical liquid collides with the inner walls of the first valve chamber 38, the valve hole 41, and the second valve chamber 39A, and the surrounding chemical liquid Therefore, stagnation hardly occurs in the first valve chamber 38, the valve hole 41, and the second valve chamber 39A.

  Therefore, the regulator 51 is a simple flow in which the first opening 47 is provided at a position shifted from the center of the valve chamber 38 and the second opening 49 is provided at a position shifted from the center of the second valve chamber 39A. With the path configuration, the chemical solution can be output without being stagnation in the first valve chamber 38 or the second valve chamber 39A. Further, since the first port 52 and the second port 53 are provided on the center line of the first valve chamber 38 and the second valve chamber 39A, the drilling positions of the first port 52 and the second port 53 can be easily determined. .

(Third reference example )
Next, a third reference example according to the fluid control valve of the present invention will be described with reference to the drawings. FIG. 15 is a cross-sectional view of the suck back valve 61.
The fluid control valve of the present reference example is a suck-back valve 61 that pulls back a certain amount of fluid by changing the flow path cross-sectional area, and is used, for example, in a semiconductor manufacturing apparatus. The suck back valve 61 is configured by connecting a body 62, a cylinder 63, and a cover 64.

  The suck back valve 61 has a piston chamber 65 formed between the cylinder 63 and the cover 64. The piston 66 is slidably loaded in the piston chamber 65, and is hermetically partitioned into a primary chamber 65A and a secondary chamber 65B. A spring 67 is contracted in the primary chamber 65 </ b> A, and an upward force is always applied to the piston 66. In addition, an exhaust port 68 communicates with the primary chamber 65A, while an operation port 69 communicates with the secondary chamber 65B. Therefore, the piston 66 can be slid by controlling the compressed air supplied to the secondary chamber 65B. The flow rate adjusting rod 70 is inserted into a lock nut 71 fixed to the cover 64 so as to be able to advance and retreat, and the tip portion protrudes into the secondary chamber 65B. Therefore, if the position of the flow rate adjusting rod 70 is adjusted, the moving amount of the piston 66 can be arbitrarily set.

  The body 62 holds the periphery of the diaphragm 73 between the body 63 and a suck back chamber (corresponding to a “valve chamber”) 76 between the first port 74 and the second port 75. is doing. A valve hole 77 is formed in the body 62 coaxially with the suck back chamber 76. The diaphragm 73 is connected to the tip portion of the piston 66 protruding from the cylinder 63 to the body 62 so that the volume of the suck back chamber 76 is changed according to the sliding of the piston 66.

The body 62 has a flow path configuration substantially the same as that of the on-off valve 1 of the above embodiment . FIG. 16 is a bottom view of the suck back valve 61.
That is, the first port 74 is formed from a position shifted in the width direction from the axis of the body 62 and communicates with the suck back chamber 76 via the first flow path 78. The first flow path 78 is formed coaxially with the first port 74 and is formed tangential to the suck back chamber 76. Therefore, the first opening 79 where the first flow path 78 communicates with the suck back chamber 76 is the center of the suck back chamber 76, that is, the portion where the valve hole 77 opens into the suck back chamber 76 (the “second opening”). Equivalent).

On the other hand, the second port 75 is drilled from the axis of the body 62 and communicates with the valve hole 77 via the second flow path 80.
Therefore, the first port 74 communicates with the second port 75 via the first flow path 78, the first opening 79, the suck back chamber 76, the valve hole 77, and the second flow path 80. In this reference example , the first communication path 81 is configured by the first port 74 and the first flow path 78, and the second communication path 82 is configured by the valve hole 77, the second flow path 80, and the second port 75. ing.

  The suck back valve 61 is attached to the semiconductor manufacturing apparatus via the attachment plate 83, and a pipe is connected to the first port 74, and a nozzle for dropping the chemical solution onto the wafer is connected to the second port 75. When supplying the chemical to the wafer, compressed air is supplied from the operation port 69 to the secondary chamber 65B, the piston 66 is lowered against the spring 67, and the diaphragm 73 is displaced downward. Thereby, the volume of the suck back chamber 76 becomes small.

Chemical solution supplied to the first port 74 of the suck back valve 61, drug solution in the above embodiment flows through the suck-back chamber 76 in the same way as when flowing through the valve chamber 17A, is outputted from the second port 75. Briefly, when the chemical liquid supplied to the first port 74 linearly flows into the suck back chamber 76 from the first opening 79, it strikes the inner wall of the suck back chamber 76 and changes its direction while moving. It flows through the back chamber 76 in a spiral shape, flows into the valve hole 77, and is output from the second port 75 via the second flow path 80. At this time, since the chemical solution entrains the chemical solution near the inner wall of the suck back chamber 76 and flows through the entire suck back chamber 76, the suck back chamber 76 is unlikely to stagnate.

  Thereafter, the supply of the chemical solution is stopped, and at the same time, the supply of compressed air to the suck back valve 61 is stopped. The suck-back valve 61 is lifted by the piston 66 being biased by the spring 67 and the volume of the suck-back chamber 76 is expanded, so that the chemical solution corresponding to the volume expansion is pulled back from the second port 75 to the suck-back chamber 76. Thereby, in the nozzle connected to the second port 75 of the suck back 61, the chemical solution is pulled back from the tip opening by a predetermined amount, thereby preventing excess chemical solution from dripping onto the wafer.

Therefore, the suck back valve 61 of the present reference example has a simple flow path in which the first opening 79 where the first communication path 81 opens into the suck back chamber 76 is provided at a position shifted from the center of the suck back chamber 76. With the configuration, it is possible to suppress the occurrence of a liquid pool or a stay in the suck back chamber 76.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various applications are possible.

( 1 ) For example, in the above-described embodiment, a fluid control valve that controls a liquid such as a chemical solution has been described. However, the above-described flow path configuration may be applied to a fluid control valve that controls a gas.

( 2 ) For example, in the above-described embodiment , the air operated on-off valve has been described. On the other hand, you may employ | adopt the said flow-path structure for an electromagnetic proportional valve. Also in this case, since the generation of the liquid pool and the staying portion can be suppressed, the change in the liquid quality can be prevented.

( 3 ) For example, in the above embodiment , the fluid flow is bidirectional, but the fluid may flow in one direction.

( 4 ) For example, in the first reference example described above, the regulator for flowing fluid in one direction from the first port 35 to the second port 36 has been described. However, the flow path configuration shown in FIGS. It may be applied and fluid may flow in both directions.

It is sectional drawing of an on-off valve according to embodiment of this invention, Comprising: A closed state is shown. Similarly, it is AA sectional drawing of FIG. Similarly, it is sectional drawing of an on-off valve, Comprising: It is the figure which showed a mode that the fluid flows from a 1st port to a 2nd port. Similarly, it is BB sectional drawing of Drawing 3, and is a figure showing signs that fluid flows from the 1st port to the 2nd port. Similarly, it is sectional drawing which shows the usage reference example of an on- off valve, Comprising: It is the figure which showed a mode that the fluid flows from a 2nd port to a 1st port. Similarly, it is CC sectional drawing of FIG. 5, Comprising: It is the figure which showed a mode that the fluid flows from a 2nd port to a 1st port. It is sectional drawing of a regulator concerning 1st reference example of this invention, Comprising: A stop state is shown. Similarly, it is sectional drawing of a regulator, Comprising: A control state is shown. Similarly, it is a bottom view of the regulator. Similarly, it is a top view of a regulator. Similarly, it is the figure which showed notionally that a fluid flows through the 1st valve chamber. Similarly, it is the figure which showed notionally that a fluid flows through a valve hole. Similarly, it is the figure which showed notionally that a fluid flows through the 2nd valve chamber. FIG. 6 is a diagram conceptually illustrating a flow path configuration of a regulator according to a second reference example of the present invention. It is sectional drawing of the suck back valve | bulb concerning 3rd reference example of this invention. Similarly, it is a bottom view of the suck back valve. It is sectional drawing of the conventional fluid control valve. It is a figure which shows notionally the flow path of the fluid control valve shown in FIG. 17, Comprising: The figure which showed a mode that the fluid flows from a 1st port to a 2nd port. It is a figure which shows notionally the flow-path cross section of the fluid control valve shown in FIG. 17, Comprising: The figure which showed a mode that the fluid flows from a 1st port to a 2nd port. It is a figure which shows notionally the flow path of the fluid control valve shown in FIG. 17, Comprising: The figure which showed a mode that the fluid flows from a 2nd port to a 1st port. It is a figure which shows notionally the flow-path cross section of the fluid control valve shown in FIG. 17, Comprising: The figure which showed a mode that the fluid flows from a 2nd port to a 1st port. It is sectional drawing of the conventional fluid control valve. It is a figure which shows notionally the flow path of the fluid control valve shown in FIG. 22, Comprising: The figure which showed a mode that the fluid flows from a 1st port to a 2nd port. It is a figure which shows notionally the flow-path cross section of the fluid control valve shown in FIG. 22, Comprising: The figure which showed a mode that the fluid flows from a 1st port to a 2nd port.

DESCRIPTION OF SYMBOLS 1 On-off valve 2 Valve part 3 Drive part 24 1st communicating path 25 2nd communicating path 13 Diaphragm 13A Valve body part 17A Valve chamber 21 1st opening part 23 Taper 31 Regulator 35 Diaphragm 38 1st valve chamber 39A 2nd valve chamber 42 Valve shaft 43 Valve body 44 Valve seat 46 First communication path 47 First opening 48 Second communication path 49 Second opening 51 Regulator 52 First port 53 Second port 54 First communication path 55 First opening 56 First 2 communication path 57 2nd opening part 61 Suck back valve 79 1st opening part 81 1st communication path 82 2nd communication path

Claims (2)

The valve chamber interposed between the first communication path and the second communication path includes a body provided with a valve seat, and by contacting or separating the valve body from the valve seat, the first communication path and the In the fluid control valve for controlling the fluid flowing between the second communication passages,
The second communication path is provided coaxially with the valve chamber and opens to the bottom surface of the valve chamber, and is formed in a direction orthogonal to the valve hole and communicates with the valve hole. A flow path, and a second port provided in a portion where the second flow path opens on a side surface of the body,
The valve seat is provided in a portion where the valve hole opens into the valve chamber,
The bottom surface of the valve chamber has a taper that decreases in diameter from the side surface of the valve chamber toward the valve seat,
The first communication passage is formed in a tangential direction of the valve chamber from a side surface opposite to the side surface on which the second port of the body is provided, and an opening opening on an inner side surface of the valve chamber is formed in the valve seat. A first channel provided on a cross-section different from a cross-section passing through the axis of the second flow channel of the body and the axis of the valve chamber; A first port provided in a portion opening on the side surface of
When the first flow path is installed so that the valve seat is positioned higher than an opening portion that opens on the inner surface of the valve chamber, and the fluid is supplied from the first communication path to the second communication path. The fluid control valve is characterized in that bubbles generated in the fluid move in the valve seat direction along the taper, are discharged from the second port together with the fluid flowing into the valve seat, and the bubbles are eliminated. A valve element is brought into contact with or separated from a valve seat provided in a valve chamber interposed between the first communication path and the second communication path, thereby flowing between the first communication path and the second communication path. In a fluid control valve that controls fluid,
The valve chamber has a circular bottom surface and a side surface provided along an outer edge of the bottom surface,
The second communication path has a smaller diameter than the valve chamber, and opens in the center of the bottom surface.
The valve seat is provided by the bottom surface in a portion where the second communication path opens in the bottom surface,
The bottom surface of the valve chamber has a taper that decreases in diameter from the side surface of the valve chamber toward the valve seat,
The valve body is provided with a columnar valve body portion having a cross-sectional area larger than an opening area where the second communication passage opens in the bottom surface so as to be able to contact and separate from the valve seat, An annular channel having a constant width is formed between the outer peripheral surface of the valve body portion and the side surface of the valve chamber,
The first communication passage has an opening formed in a tangential direction of the valve chamber and opening in the side surface of the valve chamber, and the opening is displaced from the valve seat,
When the first communication passage is installed so that the valve seat is positioned higher than an opening portion opened on the inner surface of the valve chamber, and the fluid is supplied from the first communication passage to the second communication passage. , bubbles generated in the fluid along the tapered moves the valve seat direction, is discharged from the second communication path with a fluid flowing into the valve seat, the fluid control valve, characterized in that air bubbles escape is good.

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