JP4443438B2 - エレクトロメカニカルスイッチ - Google Patents
エレクトロメカニカルスイッチ Download PDFInfo
- Publication number
- JP4443438B2 JP4443438B2 JP2005049184A JP2005049184A JP4443438B2 JP 4443438 B2 JP4443438 B2 JP 4443438B2 JP 2005049184 A JP2005049184 A JP 2005049184A JP 2005049184 A JP2005049184 A JP 2005049184A JP 4443438 B2 JP4443438 B2 JP 4443438B2
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- JP
- Japan
- Prior art keywords
- substrate
- electrode
- lower electrode
- thin plate
- recess
- Prior art date
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- Expired - Fee Related
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Description
11・・・下部電極
12・・・駆動電極
13・・・凹部
14・・・電極パッド
15・・・電極パッド
19・・・絶縁膜
20・・・封止基板
21・・・薄板部
22・・・上部電極
23・・・上部駆動電極
24・・・可動腕
Claims (1)
- 凹部が設けられている基板と、前記凹部に対向して設けられている薄板部、および該薄板部に一体に形成されている複数の可動腕を有する封止基板とを有しており、
前記凹部は、底面に、途切れた箇所を有する下部電極と、複数の駆動電極とが設けられており、
前記薄板部は、上部電極が前記下部電極の途切れた箇所と対向する部位に、上部駆動電極が前記複数の駆動電極と対向する部位に設けられており、
前記可動腕は、前記上部電極が前記下部電極の途切れた箇所を電気的に接続するように前記凹部の底面側に変形可能に構成されており、
前記下部電極は、前記上部電極が接触する部位の幅が他の部位の幅に比べて狭くなっており、
前記複数の駆動電極は、前記下部電極を挟むように当該下部電極の両側に配置されており、前記下部電極の途切れた箇所に設けられていない、エレクトロメカニカルスイッチ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005049184A JP4443438B2 (ja) | 2005-02-24 | 2005-02-24 | エレクトロメカニカルスイッチ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005049184A JP4443438B2 (ja) | 2005-02-24 | 2005-02-24 | エレクトロメカニカルスイッチ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006236765A JP2006236765A (ja) | 2006-09-07 |
JP4443438B2 true JP4443438B2 (ja) | 2010-03-31 |
Family
ID=37044182
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005049184A Expired - Fee Related JP4443438B2 (ja) | 2005-02-24 | 2005-02-24 | エレクトロメカニカルスイッチ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4443438B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1798196B1 (en) * | 2005-12-15 | 2017-08-09 | Infineon Technologies AG | Multi-layer device with reduced UV radiations during encapsulation |
JP2009277617A (ja) * | 2008-05-19 | 2009-11-26 | Nippon Telegr & Teleph Corp <Ntt> | 微細電子機械スイッチおよびその製造方法 |
JP5152062B2 (ja) * | 2009-03-25 | 2013-02-27 | 富士通株式会社 | 電気部品およびその製造方法、並びにマイクロスイッチデバイス |
JP5842386B2 (ja) * | 2011-05-25 | 2016-01-13 | セイコーエプソン株式会社 | 光フィルター、光フィルターモジュール、および光分析装置 |
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2005
- 2005-02-24 JP JP2005049184A patent/JP4443438B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2006236765A (ja) | 2006-09-07 |
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