JP4437927B2 - Device for measuring electrical characteristics of planar coils - Google Patents

Device for measuring electrical characteristics of planar coils Download PDF

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JP4437927B2
JP4437927B2 JP2004034002A JP2004034002A JP4437927B2 JP 4437927 B2 JP4437927 B2 JP 4437927B2 JP 2004034002 A JP2004034002 A JP 2004034002A JP 2004034002 A JP2004034002 A JP 2004034002A JP 4437927 B2 JP4437927 B2 JP 4437927B2
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planar coil
measuring
coil
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electrical characteristics
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JP2005227041A (en
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裕一 岩方
正輝 山蔭
大雅 松下
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Lintec Corp
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この発明は、近接・近傍型の非接触ICカード・タグのアンテナ等に用いられる平面コイルの電気的特性を測定するための電気的特性測定装置に関するものである。 The present invention relates to electrical characteristic measuring device for measuring the electrical characteristics of the planar coil used in the antenna or the like of the non-contact IC card tag proximity-proximity type.

平面コイルは、非接触ICカード・タグのアンテナ等として広く用いられているが、その性能(交信距離)を最大限に引き出すためには、回路(コイル)の電気的特性値(インダクタンス)を正確に知る必要がある。このため、各平面コイルに対して、電気的特性の測定が行われる。この電気的特性の測定をするに際しては、その電気的特性値を正確に知るために、測定対象の平面コイルに測定用の端子を設け、その端子を測定機に直接接続して測定する方法が取られている。   Planar coils are widely used as antennas for non-contact IC cards and tags, but in order to maximize their performance (communication distance), the electrical characteristics (inductance) of the circuit (coil) must be accurately determined. Need to know. For this reason, electrical characteristics are measured for each planar coil. When measuring this electrical characteristic, in order to accurately know the electrical characteristic value, there is a method of measuring by providing a measurement terminal on the planar coil to be measured and connecting the terminal directly to a measuring machine. Has been taken.

非接触で測定することも可能であるが、正確な電気的特性を知るためには、平面コイルに測定機を直接接続して測定する必要があった。   Although it is possible to measure without contact, in order to know accurate electrical characteristics, it was necessary to perform measurement by directly connecting a measuring machine to the planar coil.

この例としては、特許文献1に記載の「インダクタンス測定装置及びその測定用プローブ装置」がある。この装置は、容量を備えた2本の同軸線を測定サンプルに接続して測定を行う。
特開平08−146060号公報
As an example of this, there is an “inductance measuring device and its measuring probe device” described in Patent Document 1. This apparatus performs measurement by connecting two coaxial wires having a capacity to a measurement sample.
Japanese Patent Laid-Open No. 08-146060

ところで、上述のような平面コイルの電気的特性測定方法では、ある程度高い精度で平面コイルの電気的特性を測定することができるが、近年の情報量の増大、装置の複雑化、高度化等によって、さらに高い精度での平面コイルの電気的特性測定が要請されている。   By the way, in the method for measuring electrical characteristics of a planar coil as described above, the electrical characteristics of a planar coil can be measured with a certain degree of accuracy. However, due to the recent increase in the amount of information, the complexity and sophistication of devices, etc. There is a demand for measuring the electrical characteristics of planar coils with higher accuracy.

これに対して、上述のような平面コイルの電気的特性測定方法では、測定用端子を測定対象の平面コイルに取り付けた際の状態(端子の長さ、接続方向)や、測定機への接続状態等に微妙な違いが生じてしまい、その違いによって測定結果にばらつきが生じてしまうという問題がある。   On the other hand, in the method for measuring the electrical characteristics of the planar coil as described above, the state (terminal length, connection direction) when the measurement terminal is attached to the planar coil to be measured, and the connection to the measuring machine There is a problem that a subtle difference occurs in the state or the like, and the measurement result varies due to the difference.

さらに、測定対象の平面コイル全てに対して測定用端子を個別に取り付けるのは非常に煩雑であり、品質管理が容易でないという問題がある。   Furthermore, it is very troublesome to individually attach the measurement terminals to all the planar coils to be measured, and there is a problem that quality control is not easy.

また、特許文献1の場合、2本の同軸線にU字状の配線(直線配線及び接続配線からなるU字状の配線)を接続した状態で、2本の同軸線を測定サンプルに接続して測定を行うため、接続方法の機構が複雑になる。さらに、プローブ測定機(LCRメータ)までの引き回しの状態や長さが変わってしまうと、調整し直す必要がある。   In the case of Patent Document 1, two coaxial lines are connected to a measurement sample in a state where U-shaped wirings (U-shaped wiring composed of straight wirings and connection wirings) are connected to two coaxial lines. Therefore, the connection mechanism is complicated. Furthermore, if the routing state or length to the probe measuring machine (LCR meter) changes, it is necessary to adjust again.

本発明は、上述の問題点に鑑みてなされたもので、測定及び品質管理の容易化、品質の向上を図った平面コイルの電気的特性測定装置を提供することを目的とする。 The present invention has been made in view of the above problems, an object of measurement and ease of quality control, to provide an electrical characteristic measuring device of the planar coils with improved quality.

第1の発明に係る平面コイルの電気的特性測定装置は、測定対象の平面コイルに対して電気的特性の測定時に一時的に接続される測定時接続用コンデンサと、上記平面コイルに面して配設され設定範囲内で周波数を変えて電流を流すことで上記平面コイルの電気的特性の違いに応じて変化する応答信号を測定する測定用コイルとを備え、上記測定時接続用コンデンサの両端に測定用プローブが接続され、当該測定用プローブを上記平面コイルに接触させることで、上記測定時接続用コンデンサを上記平面コイルに対して測定時に一時的に接続させることを特徴とする。 An apparatus for measuring electrical characteristics of a planar coil according to a first aspect of the present invention is directed to a measuring connection capacitor that is temporarily connected to a planar coil to be measured when measuring electrical characteristics, and facing the planar coil. A measuring coil that measures a response signal that changes according to the difference in electrical characteristics of the planar coil by passing a current at a different frequency within a set range, and having both ends of the measuring connection capacitor The measurement probe is connected to the flat coil, and the measurement probe is temporarily connected to the flat coil by contacting the flat probe with the flat probe .

上記構成により、測定用プローブを平面コイルに接触させて測定時接続用コンデンサを平面コイルに対して測定時に一時的に接続させることで、測定時にのみ発振回路を構成することができる。平面コイルに面して配設された測定用コイルに、設定範囲内で周波数を変えて電流を流すと、相互誘導により測定用コイルに応答信号を送る。そして、この応答信号は上記平面コイルの電気的特性の違いに応じて変化するため、応答信号を測定することで、上記平面コイルの電気的特性を測定することができる。さらに、測定用プローブが接続された測定時接続用コンデンサの電気的特性は既知であるため、これらが各平面コイルに接続されたときに、端子の長さ、接続方向等にばらつきが生じることがなくなり、各平面コイルの電気的特性を正確に測定することができる。 With the above configuration, an oscillation circuit can be configured only during measurement by bringing the measurement probe into contact with the planar coil and temporarily connecting the measurement connection capacitor to the planar coil during measurement. When a current is passed through the measurement coil disposed facing the planar coil while changing the frequency within the set range, a response signal is sent to the measurement coil by mutual induction. And since this response signal changes according to the difference in the electrical characteristic of the said planar coil, the electrical characteristic of the said planar coil can be measured by measuring a response signal. Furthermore, since the electrical characteristics of the measurement-use connection capacitors to which the measurement probes are connected are known, when these are connected to each planar coil, variations in terminal length, connection direction, etc. may occur. Thus, the electrical characteristics of each planar coil can be accurately measured.

第2の発明に係る平面コイルの電気的特性測定装置は、測定対象の平面コイルに対して電気的特性の測定時に当該平面コイルに接続される測定時接続用コンデンサと、当該測定時接続用コンデンサの両端に接続され上記平面コイルに接触することで上記測定時接続用コンデンサを上記平面コイルに一時的に接続する測定用プローブと、当該測定用プローブを支持して上記平面コイルに対して測定時にのみ接続させる測定用プローブ接続機構と、上記平面コイルの位置を検出する位置検出手段と、上記平面コイルに面して配設され設定範囲内で周波数を変えて電流を流すことで上記平面コイルの電気的特性の違いに応じて変化する応答信号を測定する測定用コイルと、電気的特性の測定時に上記位置検出手段で上記測定対象の平面コイルの正確な位置を検出して上記測定用プローブ接続機構で上記測定用プローブを上記平面コイルに接触させて測定時接続用コンデンサを平面コイルに接続させ、当該平面コイルに面して配設された測定用コイルで上記平面コイルの電気的特性の違いに応じて変化する応答信号を測定させる制御手段と、当該制御手段で測定した応答信号の変化を基に上記平面コイルのインダクタンスを導き出す演算手段とを備えたことを特徴とする。 An apparatus for measuring electrical characteristics of a planar coil according to a second aspect of the invention includes a measuring connection capacitor connected to the planar coil when measuring the electrical characteristics of the planar coil to be measured, and the measuring connection capacitor. A measurement probe for temporarily connecting the measurement-time connection capacitor to the planar coil by contacting the planar coil by contacting the planar coil, and supporting the measurement probe during measurement with respect to the planar coil. A measuring probe connection mechanism for connecting only the plane coil, a position detecting means for detecting the position of the planar coil, and a current flowing through the planar coil by changing the frequency within the set range by facing the planar coil. A measuring coil that measures a response signal that changes according to a difference in electrical characteristics, and the position detection means that accurately measures the planar coil to be measured when measuring electrical characteristics. A measuring coil disposed so as to face the planar coil by detecting a position and bringing the measuring probe into contact with the planar coil by connecting the measuring probe to the planar coil by the measuring probe connecting mechanism. And a control means for measuring a response signal that changes in accordance with the difference in electrical characteristics of the planar coil, and an arithmetic means for deriving the inductance of the planar coil based on the change in the response signal measured by the control means. It is characterized by that.

上記構成により、制御手段の制御によって、位置検出手段で平面コイルの位置を検出させ、当該平面コイルが設定位置に移動されたとき、測定用プローブ接続機構で測定用プローブを平面コイルに接触させて、測定時接続用コンデンサと平面コイルとで発振回路を構成する。このとき、測定用コイルは平面コイルに面して配設されており、この測定用コイルに設定範囲内で周波数を変えて電流を流し、平面コイルの電気的特性の違いに応じて変化する応答信号を測定する。次いで、演算手段で、上記応答信号の変化を基に平面コイルのインダクタンスを導き出す。   With the above configuration, the position detection unit detects the position of the planar coil under the control of the control unit, and when the planar coil is moved to the set position, the measurement probe connection mechanism causes the measurement probe to contact the planar coil. The oscillation circuit is composed of the connection capacitor for measurement and the planar coil. At this time, the measuring coil is disposed facing the planar coil, and a current is passed through the measuring coil at a frequency within a set range, and the response varies depending on the difference in electrical characteristics of the planar coil. Measure the signal. Next, the inductance of the planar coil is derived by the calculation means based on the change in the response signal.

第3の発明に係る平面コイルの電気的特性測定装置は、第4の発明に係る平面コイルの電気的特性測定装置において、上記測定対象の平面コイルが縦横に複数個配設された帯状基板を上記測定用コイル側へ繰り出す繰り出し機構を備え、上記測定時接続用コンデンサ及び測定用コイルが、上記帯状基板の幅方向に配設された平面コイルの個数に合わせて配設されたことを特徴とする。 A planar coil electrical characteristic measuring apparatus according to a third aspect of the present invention is the planar coil electrical characteristic measuring apparatus according to the fourth aspect of the present invention, wherein a strip-like substrate having a plurality of planar coils to be measured is arranged vertically and horizontally. A feeding mechanism for feeding out to the measuring coil side is provided, wherein the measuring connection capacitor and the measuring coil are arranged in accordance with the number of planar coils arranged in the width direction of the belt-like substrate. To do.

上記構成により、帯状基板が繰り出し機構で測定用コイル側へ繰り出されるときに、幅方向に一列に複数配設された各平面コイルに、各測定時接続用コンデンサがそれぞれ接続され、各測定用コイルで応答信号が測定される。   With the above configuration, when the strip-shaped substrate is fed out to the measuring coil side by the feeding mechanism, each measuring coil is connected to each planar coil arranged in a row in the width direction, and each measuring coil is connected to each measuring coil. The response signal is measured at.

以上詳述したように、本発明の薄板支持容器によれば、次のような効果を奏する。   As described above in detail, the thin plate support container of the present invention has the following effects.

(1) 平面コイルの電気的特性の違いにのみ依存する、測定時接続用コンデンサと平面コイルとによる応答信号の変化を基に、平面コイルの電気的特性を測定するため、平面コイルの電気的特性を容易にかつより正確に測定することができるようになる。この結果、上記平面コイル及び当該平面コイルを用いた製品の品質管理の容易化、品質の向上を図ることができる。 (1) Since the electrical characteristics of the planar coil are measured based on the change in the response signal between the connecting capacitor and the planar coil during measurement, which depends only on the electrical characteristics of the planar coil, The characteristic can be easily and more accurately measured. As a result, it is possible to facilitate quality control and improve the quality of the planar coil and products using the planar coil.

(2) 測定用プローブを平面コイルに接触させることで測定時接続用コンデンサを平面コイルに接続させることで、端子の長さ、接続方向等のばらつきを抑えて電気的特性を測定するため、各平面コイルの電気的特性を正確に測定することができ、上記平面コイル及び当該平面コイルを用いた製品の品質管理の容易化、品質の向上を図ることができる。 (2) By connecting the measuring probe to the planar coil to connect the measuring connection capacitor to the planar coil, the electrical characteristics can be measured while suppressing variations in terminal length, connection direction, etc. The electrical characteristics of the planar coil can be accurately measured, and the quality control of the planar coil and the product using the planar coil can be facilitated and the quality can be improved.

(3) 制御手段の制御によって、平面コイルの位置検出、測定用プローブの平面コイルへの接触、測定用コイルへの周波数を変えた電流の供給、応答信号の測定、インダクタンスの導出を行うため、多数の平面コイルの電気的特性を容易にかつより正確に測定することができるようになる。この結果、多数の平面コイルの電気的特性を効率的に測定することができ、多数の平面コイル及び当該平面コイルを用いた多数の製品の品質管理の容易化、品質の向上を図ることができる。 (3) In order to detect the position of the planar coil, contact the measuring probe with the planar coil, supply a current with a different frequency to the measuring coil, measure the response signal, and derive the inductance by controlling the control means. It becomes possible to easily and more accurately measure the electrical characteristics of a large number of planar coils. As a result, it is possible to efficiently measure the electrical characteristics of a large number of planar coils, facilitating quality control and quality improvement of a large number of planar coils and a large number of products using the planar coils. .

(4) 繰り出し機構で繰り出される帯状基板の幅方向に一列に並んだ各平面コイルを、各測定時接続用コンデンサ及び各測定用コイルで同時に測定し、帯状基板の繰り出しに応じて連続的に測定するため、多数の平面コイルの電気的特性を効率的に測定することができ、多数の平面コイル及び当該平面コイルを用いた多数の製品の品質管理の容易化、品質の向上を図ることができる。 (4) Each planar coil arranged in a line in the width direction of the belt-shaped substrate fed out by the feeding mechanism is measured simultaneously with each measuring connection capacitor and each measuring coil, and continuously measured according to the feeding of the belt-shaped substrate. Therefore, it is possible to efficiently measure the electrical characteristics of a large number of planar coils, and to facilitate the quality control and quality improvement of a large number of planar coils and a large number of products using the planar coils. .

以下、本発明の実施形態を添付図面に基づいて説明する。本発明の平面コイルの電気的特性測定装置は、非接触ICカード・タグ等に用いられる平面コイルの測定装置である。具体的には、近接・近傍型の非接触ICカード・タグのアンテナ等の、薄く配設されるタイプの平面型のコイルの測定に適した装置である。 Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Electrical characteristic measuring apparatus of the planar coil of the present invention is a measurement unit for a planar coil used in the non-contact IC card tag, or the like. Specifically, such as an antenna of the contactless IC card tag proximity-proximity type, a equipment suitable for measuring the type of planar coils being thinner disposed.

[平面コイルの電気的特性測定装置]
まず、平面コイルの電気的特性測定方法に用いる電気的特性測定装置について、図1及び図2を基に説明する。なお、ここで測定する電気的特性はインダクタンスである。
[Equipment measurement device for planar coil]
First, an electrical characteristic measuring apparatus used in the planar coil electrical characteristic measuring method will be described with reference to FIGS. Note that the electrical characteristic measured here is inductance.

電気的特性測定装置1は、測定時接続用コンデンサ2と、測定用プローブ3と、測定用プローブ接続機構4と、位置検出手段5と、測定用コイル6と、制御手段7と、演算手段8と、帯状基板送り機構9と、マーク付与器10とから構成されている。   The electrical characteristic measuring apparatus 1 includes a measuring connection capacitor 2, a measuring probe 3, a measuring probe connecting mechanism 4, a position detecting means 5, a measuring coil 6, a control means 7, and a calculating means 8. And a belt-like substrate feeding mechanism 9 and a mark applicator 10.

測定時接続用コンデンサ2は、測定対象の平面コイル11に対して電気的特性の測定時に一時的に接続されるためのコンデンサである。この測定時接続用コンデンサ2は、平面コイル11に接続されることで、それら測定時接続用コンデンサ2及び平面コイル11で発振回路を構成するようになっている。測定時接続用コンデンサ2は、その電気的特性が予め測定されて分かっているものを用いる。これにより、発振回路を構成する部材のうち、後述する測定用プローブ3を含めた測定時接続用コンデンサ2の電気的特性は予め分かっているため、発振回路による応答信号が変化する場合、その変化は平面コイル11の電気的特性の違いによるものであることが分かる。測定時接続用コンデンサ2は、後述する帯状基板16の幅方向に配設された平面コイル11の個数に合わせて6個並列に配設されている。   The measurement-time connection capacitor 2 is a capacitor that is temporarily connected to the planar coil 11 to be measured when measuring electrical characteristics. The measurement connection capacitor 2 is connected to the planar coil 11 so that the measurement connection capacitor 2 and the planar coil 11 constitute an oscillation circuit. As the connection capacitor 2 at the time of measurement, a capacitor whose electrical characteristics are previously measured and known is used. As a result, among the members constituting the oscillation circuit, the electrical characteristics of the measurement-time connection capacitor 2 including the later-described measurement probe 3 are known in advance. It can be seen that this is due to the difference in electrical characteristics of the planar coil 11. Six measuring connection capacitors 2 are arranged in parallel in accordance with the number of planar coils 11 arranged in the width direction of a belt-like substrate 16 described later.

測定用プローブ3は、平面コイル11に接触することで測定時接続用コンデンサ2を平面コイル11に一時的に接続するためのプローブである。この測定用プローブ3は、測定時接続用コンデンサ2の両端にそれぞれ接続されている。各測定用プローブ3が平面コイル11の両端部にそれぞれ接触することで、測定時接続用コンデンサ2と平面コイル11とが互いに接続されるようになっている。測定用プローブ3が測定時接続用コンデンサ2に接続された状態で、これら測定用プローブ3と測定時接続用コンデンサ2とからなる素子の電気的特性を予め調べておく。   The measurement probe 3 is a probe for temporarily connecting the measurement connection capacitor 2 to the planar coil 11 by contacting the planar coil 11. The measurement probe 3 is connected to both ends of the connection capacitor 2 at the time of measurement. Each measurement probe 3 is brought into contact with both end portions of the planar coil 11 so that the connection capacitor for measurement 2 and the planar coil 11 are connected to each other. With the measurement probe 3 connected to the measurement connection capacitor 2, the electrical characteristics of the element composed of the measurement probe 3 and the measurement connection capacitor 2 are examined in advance.

測定用プローブ接続機構4は、測定用プローブ3を支持して測定時に平面コイル11に対して接触させるための機構である。この測定用プローブ接続機構4は、支持部12と、昇降部13とから構成されている。支持部12は、測定用プローブ3を支持するための部材である。支持部12は、測定用プローブ3が測定時接続用コンデンサ2に接続された状態で、これら測定時接続用コンデンサ2及び測定用プローブ3を一体的に支持している。昇降部13は、支持部12を昇降させるための部材である。昇降部13は、例えばネジ山を刻んだ昇降軸と、この昇降軸にねじ込まれてステッピングモータ等で回転角度を正確に制御されて昇降軸を正確に上下動させる昇降ナット部等から構成されて、支持部12を正確に上下動させることができるようになっている。昇降部13は制御手段7に接続されている。支持部12の取り付けられた測定用プローブ3は、平面コイル11に対してその環状に巻いた線の外側から斜めに延びて平面コイル11の各端部に接触するように配設されている。これは、環状の平面コイル11の内部を貫く磁束に影響を及ぼさないようにすると共に、測定用プローブ3の撓み(弾性変形)によって各測定用プローブ3の先端が平面コイル11の両端部に確実に接触するようにするためである。測定用プローブ接続機構4は、測定時にのみ測定用プローブ3を平面コイル11に接続させる。   The measurement probe connection mechanism 4 is a mechanism for supporting the measurement probe 3 and bringing it into contact with the planar coil 11 during measurement. The measurement probe connection mechanism 4 includes a support part 12 and an elevating part 13. The support part 12 is a member for supporting the measurement probe 3. The support 12 integrally supports the measurement-time connection capacitor 2 and the measurement probe 3 in a state where the measurement probe 3 is connected to the measurement-time connection capacitor 2. The elevating part 13 is a member for elevating the support part 12. The elevating unit 13 includes, for example, an elevating shaft with a screw thread and an elevating nut unit that is screwed into the elevating shaft and accurately controls the rotation angle by a stepping motor or the like to accurately move the elevating shaft up and down. The support part 12 can be moved up and down accurately. The elevating unit 13 is connected to the control means 7. The measurement probe 3 to which the support portion 12 is attached is disposed so as to extend obliquely from the outer side of the wire wound in an annular shape with respect to the planar coil 11 and to contact each end of the planar coil 11. This prevents the magnetic flux penetrating through the annular planar coil 11 from being affected, and ensures that the tip of each measurement probe 3 is attached to both ends of the planar coil 11 by the bending (elastic deformation) of the measurement probe 3. It is for making it contact. The measurement probe connection mechanism 4 connects the measurement probe 3 to the planar coil 11 only at the time of measurement.

位置検出手段5は、平面コイル11の位置を検出するための手段である。位置検出手段5としては、種々のものを用いることができる。光の反射状態や画像から平面コイル11の境界を検出して平面コイル11の両端部の位置を特定するセンサや、後述する帯状基板16に直接的に付けた印や切欠等を検出してその位置から平面コイル11の両端部の位置を特定するセンサ等を用いることができる。   The position detection means 5 is a means for detecting the position of the planar coil 11. Various types of position detecting means 5 can be used. A sensor for detecting the boundary of the planar coil 11 from the reflection state of the light or the image to identify the positions of both ends of the planar coil 11, or a mark or notch directly attached to the belt-like substrate 16 to be described later is detected. A sensor or the like that identifies the positions of both ends of the planar coil 11 from the position can be used.

測定用コイル6は、平面コイル11からの応答信号を測定するためのコイルである。測定用コイル6は平面コイル11に面して配設されている。具体的には、平面コイル11の両端部と各測定用プローブ3の先端部とが整合した位置(測定位置)の平面コイル11と整合する位置であって、帯状基板16の下側面から5〜10mm程度隔てて配設されている。測定用コイル6には、測定部15が接続されている。この測定部15は、測定用コイル6に供給する交流電流の周波数を調整できる機能と、平面コイル11からの応答信号を検出する機能とが備えられている。これにより測定部15は、設定範囲内(例えば、基準周波数13.56MHzを中心に10〜15MHzの範囲)で電流の周波数を変えて測定用コイル6に供給すると共に、平面コイル11からの応答信号を検出する。この応答信号は、平面コイル11の電気的特性の違いに応じて変化するため、この応答信号の違いを測定部15で正確に測定することができる。測定用コイル6及び測定部15は、測定時接続用コンデンサ2と同様に、帯状基板16の幅方向に配設された平面コイル11の個数に合わせて6個並列に配設されている。   The measuring coil 6 is a coil for measuring a response signal from the planar coil 11. The measuring coil 6 is disposed facing the planar coil 11. Specifically, it is a position that is aligned with the planar coil 11 at a position (measurement position) where the both ends of the planar coil 11 and the tip of each measurement probe 3 are aligned, and is 5 to 5 from the lower surface of the belt-like substrate 16. They are spaced about 10 mm apart. A measuring unit 15 is connected to the measuring coil 6. The measuring unit 15 has a function of adjusting the frequency of the alternating current supplied to the measuring coil 6 and a function of detecting a response signal from the planar coil 11. Thereby, the measurement unit 15 changes the frequency of the current within the set range (for example, a range of 10 to 15 MHz centered on the reference frequency of 13.56 MHz) and supplies it to the measurement coil 6, and the response signal from the planar coil 11. Is detected. Since this response signal changes according to the difference in electrical characteristics of the planar coil 11, the difference in the response signal can be accurately measured by the measuring unit 15. Similar to the measuring connection capacitor 2, six measuring coils 6 and measuring units 15 are arranged in parallel in accordance with the number of planar coils 11 arranged in the width direction of the strip-shaped substrate 16.

制御手段7は、全体を制御するための装置である。制御手段7は具体的には、図3に示すフローチャートの処理機能が格納されている。   The control means 7 is a device for controlling the whole. Specifically, the control means 7 stores the processing functions of the flowchart shown in FIG.

演算手段8は、制御手段7で測定した応答信号の変化を基に平面コイル11のインダクタンスを導き出すための手段である。この演算手段8は制御手段7内に組み込まれている。演算手段8では、具体的には次の式に基づいて平面コイル11のインダクタンスを算出する。

Figure 0004437927
The computing means 8 is means for deriving the inductance of the planar coil 11 based on the change in the response signal measured by the control means 7. This calculation means 8 is incorporated in the control means 7. Specifically, the computing means 8 calculates the inductance of the planar coil 11 based on the following equation.
Figure 0004437927

Z:測定系のインピーダンス
L2:測定対象コイルのインダクタンス
L1:測定用コイルのインダクタンス(既知)
rL:測定用コイルの直流抵抗(既知)
r:測定対象コイルの直流抵抗(理論計算値を適用)
C:測定時接続用コンデンサの静電容量(既知)
M:測定用コイルと測定対象コイル間の相互インダクタンス(コイル間距離により決定)
w:2π×測定周波数[Hz]
i:虚数単位
上式からL2を導き出す。
Z: impedance of measurement system L2: inductance of measurement target coil L1: inductance of measurement coil (known)
rL: DC resistance of measuring coil (known)
r: DC resistance of the coil to be measured (theoretical calculation value is applied)
C: Capacitance of capacitor for connection during measurement (known)
M: Mutual inductance between measuring coil and measuring coil (determined by distance between coils)
w: 2π × measurement frequency [Hz]
i: Imaginary unit L2 is derived from the above equation.

帯状基板送り機構9は、順次間欠的に帯状基板16を流れ方向Xへ繰り出すための繰り出し機構である。帯状基板送り機構9は、帯状基板16が巻かれた繰り出しロール18と、この繰り出しロール18を回転駆動する繰り出し側駆動部19と、帯状基板16を巻き取る巻き取りロール20と、この巻き取りロール20を回転駆動する巻き取り側駆動部21とから構成されている。繰り出し側駆動部19と巻き取り側駆動部21は、帯状基板16の繰り出し量を正確に制御できるステッピングモータ等の駆動手段で構成されている。これら繰り出し側駆動部19及び巻き取り側駆動部21は上記制御手段7に接続されている。この制御手段7に制御された繰り出し側駆動部19及び巻き取り側駆動部21は、帯状基板16を正確に繰り出して、位置検出手段5で検査対象の平面コイル11の位置を検出し、正確に位置決めするようになっている。   The belt-like substrate feeding mechanism 9 is a feeding mechanism for feeding the belt-like substrate 16 intermittently in the flow direction X sequentially. The belt-like substrate feeding mechanism 9 includes a feeding roll 18 around which the belt-like substrate 16 is wound, a feeding-side drive unit 19 that rotationally drives the feeding roller 18, a winding roll 20 that winds the belt-like substrate 16, and this winding roll. It is comprised from the winding side drive part 21 which rotationally drives 20. The feeding side driving unit 19 and the winding side driving unit 21 are configured by driving means such as a stepping motor that can accurately control the feeding amount of the belt-like substrate 16. The feeding side driving unit 19 and the winding side driving unit 21 are connected to the control means 7. The feeding-side driving unit 19 and the winding-side driving unit 21 controlled by the control unit 7 accurately feeds the belt-like substrate 16 and the position detecting unit 5 detects the position of the planar coil 11 to be inspected. It is designed to be positioned.

帯状基板16は、測定対象の平面コイル11を縦横に複数個配設された基板である。この帯状基板16は、横幅50cmで縦方向に長尺の帯状に形成されている。平面コイル11は帯状基板16の流れ方向Xに対して6個並列に並べられ、縦方向に2cmの間隔で多数設けられている。   The strip-shaped substrate 16 is a substrate in which a plurality of planar coils 11 to be measured are arranged vertically and horizontally. The strip-shaped substrate 16 is formed in a strip shape having a width of 50 cm and being elongated in the vertical direction. Six planar coils 11 are arranged in parallel with respect to the flow direction X of the strip-shaped substrate 16, and a large number are provided at intervals of 2 cm in the vertical direction.

マーク付与器10は、制御手段7で不良品と判断された平面コイル11にマークを付与するための装置である。このマーク付与器10は、スタンプや印刷装置等によって構成され、不良である旨の印を平面コイル11に付ける。マーク付与器10は、帯状基板16に配設された平面コイル11に合わせて帯状基板16の幅方向に6個並列に設けられている。   The mark applicator 10 is an apparatus for applying a mark to the planar coil 11 that is determined to be defective by the control means 7. The mark applicator 10 is constituted by a stamp, a printing device, or the like, and attaches a mark indicating that it is defective to the planar coil 11. Six mark appliers 10 are provided in parallel in the width direction of the belt-like substrate 16 in accordance with the planar coil 11 disposed on the belt-like substrate 16.

[平面コイルの電気的特性測定方法]
次に、平面コイル11の電気的特性測定方法について説明する。この平面コイル11の電気的特性測定方法は、具体的には制御手段7の制御によって行われる。以下、図3のフローチャートを基に説明する。
[Method for measuring electrical characteristics of planar coil]
Next, a method for measuring electrical characteristics of the planar coil 11 will be described. Specifically, the method of measuring the electrical characteristics of the planar coil 11 is performed under the control of the control means 7. Hereinafter, description will be made based on the flowchart of FIG.

まず、位置検出手段5で平面コイル11の位置を検出する(ステップS1)。次いで、帯状基板送り機構9の繰り出し側駆動部19と巻き取り側駆動部21を作動させる(ステップS2)。これにより、繰り出しロール18と巻き取りロール20とが回転して帯状基板16が流れ方向Xへ繰り出される。測定対象の平面コイル11は位置検出手段5で監視されており、当該平面コイル11が測定位置に整合したか否かを判断する(ステップS3)。整合していない場合は、ステップS2に戻って帯状基板送り機構9をさらに作動させ、平面コイル11を測定位置に整合させる。   First, the position detector 5 detects the position of the planar coil 11 (step S1). Next, the feeding side driving unit 19 and the winding side driving unit 21 of the belt-like substrate feeding mechanism 9 are operated (step S2). As a result, the feeding roll 18 and the take-up roll 20 rotate to feed the strip-shaped substrate 16 in the flow direction X. The planar coil 11 to be measured is monitored by the position detecting means 5, and it is determined whether or not the planar coil 11 is aligned with the measurement position (step S3). If not, the process returns to step S2 to further operate the belt-like substrate feeding mechanism 9 to align the planar coil 11 with the measurement position.

測定対象の平面コイル11が測定位置に整合したら、帯状基板送り機構9の繰り出しを停止する(ステップS4)。次いで、測定用プローブ接続機構4を作動させる(ステップS5)。これにより、測定用プローブ3を降下させて平面コイル11の両端部と接触させ、測定時接続用コンデンサ2と平面コイル11とを接続する。   When the planar coil 11 to be measured is aligned with the measurement position, the feeding of the belt-like substrate feeding mechanism 9 is stopped (step S4). Next, the measurement probe connection mechanism 4 is activated (step S5). Thereby, the measurement probe 3 is lowered and brought into contact with both ends of the planar coil 11, and the connection capacitor for measurement 2 and the planar coil 11 are connected.

次いで、測定用コイル6の測定部15を作動させる(ステップS6)。これにより、測定用コイル6に設定範囲内で周波数を変えて電流を流す。この電流によって測定用コイル6に生じる磁束が変化し、測定時接続用コンデンサと平面コイル11とからなる発振回路が共振して応答信号を測定用コイル6に送る。この応答信号を測定用コイル6で検出させる(ステップS7)。次いで、検出した応答信号を基に演算手段8でインダクタンスを演算させる(ステップS8)。   Next, the measuring unit 15 of the measuring coil 6 is activated (step S6). Thereby, the current is passed through the measuring coil 6 while changing the frequency within the set range. The magnetic flux generated in the measuring coil 6 is changed by this current, and the oscillation circuit composed of the measuring connection capacitor and the planar coil 11 resonates and sends a response signal to the measuring coil 6. This response signal is detected by the measuring coil 6 (step S7). Then, the inductance is calculated by the calculation means 8 based on the detected response signal (step S8).

次いで、算出したインダクタンスが設定値内にあるか否かを判断し(ステップS9)、設定値内であれば良品と判断する。設定値を越えていれば不良品と判断し、当該平面コイル11にマーク付与器10でマークを付ける(ステップS10)。なお、マークは、不良品と判断したその場で不良品位置に付与しても良いし、不良品位置を制御手段7が記憶しておいて、次回以降の間欠送りの停止時に付与しても良い。マーク付与器10は、マークを付与する態様に応じた位置に取り付けられる。   Next, it is determined whether or not the calculated inductance is within the set value (step S9). If it exceeds the set value, it is determined as a defective product, and the flat coil 11 is marked with the mark applier 10 (step S10). The mark may be applied to the defective product position on the spot where it is determined as a defective product, or the defective device position may be stored by the control means 7 and applied at the next intermittent feed stop. good. The mark applicator 10 is attached at a position corresponding to the mode of applying the mark.

次いで、上記ステップS1に戻り、次の列の平面コイル11の電気的特性を測定する。   Next, returning to step S1, the electrical characteristics of the planar coil 11 in the next row are measured.

次に、上記電気的特性測定方法で実際に平面コイル11のインダクタンス値を測定した例を以下に示す。ここでは、同一性能の平面コイル11を従来方法でサンプル数25、本発明方法でサンプル数25に対して行った。

Figure 0004437927
Next, an example in which the inductance value of the planar coil 11 is actually measured by the above-described electrical characteristic measuring method will be shown below. Here, the planar coil 11 having the same performance was applied to the sample number 25 by the conventional method and the sample number 25 by the method of the present invention.
Figure 0004437927

この結果、上記表のように、標準偏差で1/2以下に改善された。   As a result, as shown in the above table, the standard deviation was improved to ½ or less.

これにより、平面コイル11の電気的特性をより正確に測定することができるようになる。さらに、平面コイル11の電気的特性の測定が容易になる。この結果、平面コイル11及び当該平面コイル11を用いた製品の品質管理が容易化にあり、品質の向上を図ることができる。   Thereby, the electrical characteristics of the planar coil 11 can be measured more accurately. Furthermore, it becomes easy to measure the electrical characteristics of the planar coil 11. As a result, the quality control of the planar coil 11 and the product using the planar coil 11 is facilitated, and the quality can be improved.

[変形例]
(1) 上記実施形態では、測定時接続用コンデンサ2に測定用プローブ3を接続して、測定時に測定時接続用コンデンサ2を平面コイル11に一時的に接続したが、予め各平面コイル11に測定時接続用コンデンサ2を半田等で接続するようにしてもよい。この場合は、測定時接続用コンデンサ2、測定用プローブ3、測定用プローブ接続機構4は不要となる。この場合も上記実施形態同様の作用、効果を奏することができる。
[Modification]
(1) In the above embodiment, the measurement probe 3 is connected to the measurement connection capacitor 2 and the measurement connection capacitor 2 is temporarily connected to the planar coil 11 during measurement. The connection capacitor 2 for measurement may be connected with solder or the like. In this case, the measurement connection capacitor 2, the measurement probe 3, and the measurement probe connection mechanism 4 are not required. Also in this case, the same operations and effects as the above embodiment can be achieved.

(2) 上記実施形態では、平面コイル11を縦横に多数配設した帯状基板16を測定対象にしたが、平面コイル11は、横に7個以上、5個以下配設されている場合、1列に配設されている場合でもよいことは言うまでもない。 (2) In the above embodiment, the strip-shaped substrate 16 in which a large number of planar coils 11 are arranged in the vertical and horizontal directions is used as a measurement target. It goes without saying that it may be arranged in rows.

(3) 上記実施形態では、平面コイル11を識別するためにマーク付与器10を設けたが、穴を空ける等の他の手段でもよい。この場合も上記実施形態同様の作用、効果を奏することができる。 (3) In the above embodiment, the mark applicator 10 is provided to identify the planar coil 11, but other means such as making a hole may be used. Also in this case, the same operations and effects as the above embodiment can be achieved.

本発明の実施形態に係る平面コイルの電気的特性測定装置を示す概略構成図である。It is a schematic block diagram which shows the electrical property measuring apparatus of the planar coil which concerns on embodiment of this invention. 本発明の実施形態に係る平面コイルを配設した帯状基板を示す平面図である。It is a top view which shows the strip | belt-shaped board | substrate which arrange | positioned the planar coil which concerns on embodiment of this invention. 本発明の実施形態に係る電気的特性測定装置の制御手段での機能を示すフローチャートである。It is a flowchart which shows the function in the control means of the electrical property measuring device which concerns on embodiment of this invention.

符号の説明Explanation of symbols

1:電気的特性測定装置、2:測定時接続用コンデンサ、3:測定用プローブ、4:測定用プローブ接続機構、5:位置検出手段、6:測定用コイル、7:制御手段、8:演算手段、9:帯状基板送り機構、10:マーク付与器、11:平面コイル、12:支持部、13:昇降部、15:測定部、16:帯状基板、18:繰り出しロール、19:繰り出し側駆動部、20:巻き取りロール、21:巻き取り側駆動部。   DESCRIPTION OF SYMBOLS 1: Electrical characteristic measuring apparatus, 2: Capacitor for connection at the time of measurement, 3: Probe for measurement, 4: Connection mechanism for measurement probe, 5: Position detection means, 6: Coil for measurement, 7: Control means, 8: Calculation Means: 9: strip substrate feeding mechanism, 10: mark applicator, 11: planar coil, 12: support, 13: lifting unit, 15: measuring unit, 16: strip substrate, 18: feeding roll, 19: feeding side drive Part, 20: winding roll, 21: winding side drive part.

Claims (3)

測定対象の平面コイルに対して電気的特性の測定時に一時的に接続される測定時接続用コンデンサと、
上記平面コイルに面して配設され設定範囲内で周波数を変えて電流を流すことで上記平面コイルの電気的特性の違いに応じて変化する応答信号を測定する測定用コイルとを備え
上記測定時接続用コンデンサの両端に測定用プローブが接続され、当該測定用プローブを上記平面コイルに接触させることで、上記測定時接続用コンデンサを上記平面コイルに対して測定時に一時的に接続させる
ことを特徴とする平面コイルの電気的特性測定装置。
A measurement-time connection capacitor that is temporarily connected to the planar coil to be measured when measuring electrical characteristics; and
A measuring coil that is arranged facing the planar coil and that measures a response signal that changes according to the difference in electrical characteristics of the planar coil by changing the frequency within a set range and passing a current ;
A measurement probe is connected to both ends of the measurement connection capacitor, and the measurement probe is temporarily connected to the planar coil by contacting the measurement probe with the planar coil during measurement. An apparatus for measuring the electrical characteristics of a planar coil.
測定対象の平面コイルに対して電気的特性の測定時に当該平面コイルに接続される測定時接続用コンデンサと、
当該測定時接続用コンデンサの両端に接続され上記平面コイルに接触することで上記測定時接続用コンデンサを上記平面コイルに一時的に接続する測定用プローブと、
当該測定用プローブを支持して上記平面コイルに対して測定時にのみ接続させる測定用プローブ接続機構と、
上記平面コイルの位置を検出する位置検出手段と、
上記平面コイルに面して配設され設定範囲内で周波数を変えて電流を流すことで上記平面コイルの電気的特性の違いに応じて変化する応答信号を測定する測定用コイルと、
電気的特性の測定時に上記位置検出手段で上記測定対象の平面コイルの正確な位置を検出して上記測定用プローブ接続機構で上記測定用プローブを上記平面コイルに接触させて測定時接続用コンデンサを平面コイルに接続させ、当該平面コイルに面して配設された測定用コイルで上記平面コイルの電気的特性の違いに応じて変化する応答信号を測定させる制御手段と、
当該制御手段で測定した応答信号の変化を基に上記平面コイルのインダクタンスを導き出す演算手段と
を備えたことを特徴とする平面コイルの電気的特性測定装置。
A measuring connection capacitor connected to the planar coil when measuring the electrical characteristics of the planar coil to be measured;
A measurement probe for temporarily connecting the measurement connection capacitor to the planar coil by being connected to both ends of the measurement connection capacitor and contacting the planar coil;
A measurement probe connection mechanism that supports the measurement probe and connects to the planar coil only at the time of measurement;
Position detecting means for detecting the position of the planar coil;
A measuring coil that faces the planar coil and measures a response signal that changes according to a difference in electrical characteristics of the planar coil by changing the frequency within a set range and passing a current;
When measuring the electrical characteristics, the position detecting means detects the exact position of the planar coil to be measured, and the measuring probe connecting mechanism brings the measuring probe into contact with the planar coil to connect the measuring connection capacitor. A control means for connecting to a planar coil and measuring a response signal that changes in accordance with the difference in electrical characteristics of the planar coil with a measuring coil disposed facing the planar coil;
An apparatus for measuring electrical characteristics of a planar coil, comprising: arithmetic means for deriving the inductance of the planar coil based on a change in response signal measured by the control means.
請求項に記載の平面コイルの電気的特性測定装置において、
上記測定対象の平面コイルが縦横に複数個配設された帯状基板を上記測定用コイル側へ繰り出す繰り出し機構を備え、
上記測定時接続用コンデンサ及び測定用コイルが、上記帯状基板の幅方向に配設された平面コイルの個数に合わせて配設されたことを特徴とする平面コイルの電気的特性測定装置。
The planar coil electrical characteristic measuring device according to claim 2 ,
A feeding mechanism for feeding a strip-like substrate on which a plurality of planar coils to be measured are arranged vertically and horizontally to the measuring coil side;
An apparatus for measuring electrical characteristics of a planar coil, wherein the measuring connection capacitor and the measuring coil are arranged in accordance with the number of planar coils arranged in the width direction of the strip substrate.
JP2004034002A 2004-02-10 2004-02-10 Device for measuring electrical characteristics of planar coils Expired - Fee Related JP4437927B2 (en)

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