JP4426972B2 - 赤外線反射積層構造 - Google Patents

赤外線反射積層構造 Download PDF

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Publication number
JP4426972B2
JP4426972B2 JP2004549171A JP2004549171A JP4426972B2 JP 4426972 B2 JP4426972 B2 JP 4426972B2 JP 2004549171 A JP2004549171 A JP 2004549171A JP 2004549171 A JP2004549171 A JP 2004549171A JP 4426972 B2 JP4426972 B2 JP 4426972B2
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Prior art keywords
layer
metal oxide
silver
laminated structure
oxide layer
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JP2006505811A (ja
Inventor
ペルソーネ,ペーター
ヴラミンク,コエン
リーヴェンス,フーゴ
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Bekaert NV SA
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Bekaert NV SA
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Description

本発明は、赤外線反射積層構造及びそのような積層構造のヒートミラーとしての使用に関する。
可視スペクトルの放射線を透過させながら、赤外スペクトルの放射線を反射するヒートミラーは、例えば、建物又は車両の窓としての重要な用途を有している。
透明ヒートミラーの場合、可視光線透過率は高くなければならなく、従って、反射率と吸収率は低くなければならない。例えば、米国において、自動車用のフロントガラスは、少なくとも70%の可視光線の透過率を有していなければならない。しかし、赤外線に関して、ヒートミラーは、高い反射率を有していなければならず、従って、赤外線の透過率と吸収率は低くなければならない。
交互に配置される誘電体層と金属層の積層体を備えるヒートミラーは、当技術分野において知られている。低い熱透過率によって特徴付けられるヒートミラーを得るために、一般的に、少なくとも3つの金属層が必要である。しかし、金属層の数と厚みは、可視光線透過率及び製造プロセスのコストと複雑さに悪影響を及ぼす。
銀を金属層として用いることがよく知られている。しかし、銀層は、安定性と耐久性が低く、耐湿性と耐候性が劣る。
本発明の目的は、先行技術の欠点を回避することにある。本発明の他の目的は、改良された赤外線反射積層構造を提供することにある。
本発明の目的は、最少の数の金属層によって、良好な可視光線透過率と低い太陽熱利得係数(ソーラーヒートゲイン係数)によって特徴付けられる赤外線反射積層構造を提供することにある。本発明のさらに他の目的は、高安定性と高耐候性を有する銀含有層を備える赤外線反射積層構造を提供することにある。
本発明の第1のアスペクトによれば、赤外線反射積層構造が提供される。この積層構造は、
透明な基板層と、
第1金属酸化物層と、
第1銀含有層と、
第2金属酸化物層と、
第2銀含有層と、
第3金属酸化物層と
を備える。第1、第2及び第3金属酸化物層は、500nmの波長において少なくとも2.40の屈折率を有する。
本発明による積層構造において、銀含有層と金属酸化物層の対の数は2に制限されている。種々の金属酸化物層の厚みと、第1及び第2銀含有層の厚みは、ガラスに積層された層状構造が、70%よりも高い可視光線透過率(VLT)と0.44よりも低い太陽熱利得係数(SHGC)を有するように、互いに適合される。ガラスに積層された層状構造の日照利得に対する光の比率(LSG比:ライト・ツー・ソーラーゲイン・レイシオ)は、好ましくは、1.60よりも高い。さらに好ましくは、LSG比は、1.65よりも高く、例えば、1.69である。
可視光線透過率(VLT)は、窓を透過した可視スペクトル(380〜780nm)の百分率を指す。
太陽熱利得係数(SHGC)は、窓を通過することが許容され、直接伝達及び吸収され、次いで、対流と輻射によって、内部に放出される入射太陽光線の割合を指す。SHGCは、0と1の間の数として、表される。窓の太陽熱利得係数が低いほど、窓を伝達する太陽熱は小さい。
日照利得に対する光の比率(LSG比)は、VLT/(SHGC・100)として定義される。LSG比は、熱利得を遮断させながら日光を透過させる、異なる種類のガラスにおける相対的な効率の尺度をもたらす。この比率が高いほど、室内は、余分な熱量を加えることなく、明るくなる。
金属酸化物は、どのような透明材料であってもよい。しかし、高屈折率とほぼ零の吸光係数(extinction coefficient)を有する金属酸化物が好ましい。従って、層の光学的な厚みが重要である光学被膜において、高屈折率を有する金属酸化物の物理的な厚みは、低屈折率を有する金属酸化物の物理的な厚みよりも低く維持され得る。
積層構造の金属酸化物は、当技術分野において知られているどのような技術によって、堆積(deposit)されてもよい。好ましい技術は、スパッタ堆積等の物理的蒸着技術又は化学蒸着技術を含む。
好ましい金属酸化物層は、TiO2、特に、主にルチル相から成り、極めて高密度のTiO2を含む。この種のTiO2は、510nmにおいて2.41の屈折率を有する。TiO2層は、Tiターゲット、TiO2ターゲット、又は亜化学量論的(サブストイチオメトリック)TiOx(xは1.75〜2である)ターゲットを用いる反応性スパッタ堆積法によって、堆積され得る。
主にルチル相から成るTiO2は、好ましくは、TiOxターゲット(好ましくは、回転可能なTiOxターゲット)(xは1.5〜2であり、例えば1.5〜1.7)を用いるDCマグネトロン・スパッタリングによって堆積される。これらの回転可能なターゲットは、還元雰囲気(例えば、Ar/H2)において、ステンレス鋼裏当てチューブ上にルチル粉体をプラズマ溶射することによって作製される。これらのターゲットは、DCマグネトロン・スパッタリング法において陰極(cathode)として用いられるのに十分な電気伝導性を有し、極めて高い電力レベルに耐えることができる。その結果、より低い投資コストで(堆積源そのものと電力供給の両方において、著しく安いコストで)、極めて高いスパッタ堆積速度を達成することができる。
高屈折率を有する他の金属酸化物は、例えば、BiO2(550nmにおける屈折率2.45)又はPbO(550nmにおける屈折率2.55)である。
積層構造の異なる金属酸化物層は、同じ材料を含んでもよいし、又は異なる材料を含んでもよい。
第1及び第2銀含有層は、純銀(すなわち、不可避的不純物を含む銀)、又は銀と他の元素、例えば、金、プラチナ、パラジウム、銅、アルミニウム、インジウム、又は亜鉛、及び/又はそれらの混合物との合金を含んでもよい。銀含有層は、例えば、銀と最大30質量%までの他の元素、例えば、金、プラチナ、パラジウム、銅、アルミニウム、インジウム、又は亜鉛、及び/又はそれらの混合物を含んでもよい。好ましい銀含有層は、10質量%の金を含む。
銀含有層は、好ましくは、真空堆積技術、例えば、スパッタリング又は蒸着によって、堆積される。
銀含有層の堆積は、特別の事前注意が必要である。その理由は、
(i)銀は、貴金属と呼ばれることが多いが、極めて腐食されやすく、
(ii)吸収率は実質的にη.kに比例するので、より濃度が高く混合されたTiO2(高η)−銀(高k)層の存在は、積層構造の全吸収率を著しく増大させ、理論的に達成され得る可視光線透過率の大きな部分を侵食できるので、金属酸化物と銀層の混合は避けられねばならない、
からである。
これは、銀含有層と金属酸化物との界面及び/又は銀含有層は、特に保護されることが好ましいことを意味している。これは、例えば、金属酸化物層と銀含有層との間に設けられる中間層、銀含有層と金属酸化物層との間に設けられる中間層、又は銀含有層の両側に設けられる中間層によって、達成され得る。このような中間層は、好ましくは、金、例えば、純金(すなわち、不可避的不純物を含む金)、又は金と30質量%までの他の元素、例えば、銀との合金を含む。中間層は、好ましくは、0.5〜10nmの厚さ、例えば、1nmの厚みを有する。
好ましくは、中間層は、スパッタ堆積によって堆積される。
本発明による積層構造は、少なくとも1つの透明基板層を備えている。この一以上の透明基板層は、ガラス層、又はプラスチック層、例えば、ポリカーボネート、ポリアクリレート、ポリエチレンテレフタレート(PET)等のポリエステル、三酢酸セルロース(TCA又はTAC)又はポリウレタンから成るプラスチック層を含むとよい。
可能であれば、付加的な層が積層構造の上に堆積される。このような付加的な層は、例えば、保護層又は耐磨耗層を含む。
本発明の第2のアスペクトによれば、赤外線反射積層構造の透明ヒートミラーとしての使用が提供される。
さらに他のアスペクトによれば、赤外線反射積層構造における銀含有層の数を低減させる方法、及び赤外線反射積層構造の可視光線透過率を改良する方法が提供される。
以下、添付の図面を参照して、本発明をさらに詳細に説明する。
赤外線反射積層構造10の実施形態が、図1に示されている。この積層構造は、3つの金属酸化物層12、14、16、及び2つの銀含有層13、15を備えている。金属酸化層は、TiO2を含んでいる。このTiO2は、回転可能なセラミックTiOx(xは1.5〜1.7である)ターゲットを用いるDCマグネトロン・スパッタリングによって得られる。これらのターゲットは、DCマグネトロン・スパッタリング法における陰極(cathode)として用いられるのに十分な電気伝導度を有している。
図4において、TiO2被膜の屈折率(η)と吸光係数(ε)が示されている。波長の関数としての屈折率(η)がライン44によって与えられ、波長の関数としての吸光係数(ε)がライン42によって与えられている。395nmよりも高い波長では、この被膜は吸収を示さない。510nmにおける屈折率は、2.41であり、これはTiO2のルチル相に対応している。
銀含有層13、15は、純銀(すなわち、不可避的な不純物を含む銀)を含んでいる。代替的実施形態において、銀含有層13、15は、10質量%の金を含んでいる。
第1金属酸化物層12と第3金属酸化物16は、25〜35nmの厚みを有している。第2金属酸化物層14は、50〜70nmの厚みを有している。第1及び第2銀含有層13、15は、10〜25nmの厚みを有している。
図2は、赤外線反射積層構造20の他の実施形態を示している。この積層構造は、図1に示される積層構造と同じであるが、しかし、第1銀含有層22と第2金属酸化物層24との間及び第2銀含有層25と第3金属酸化物層26との間に、それぞれ、中間層27、27’をさらに備える。中間層は、金を含み、1nmの厚みを有する。
中間層は、銀含有層の安定性と耐久性を増大し、銀含有層と金属酸化物層との界面における混合を回避する。
図3は、赤外線反射積層構造30のさらに他の実施形態を示している。中間層37、37’及び39、39’が、銀含有金属層33、35の両側に堆積されている。これらの中間層は、金又は10質量%の銀を含む金を含んでいる。中間層は、1nmの厚みを有している。
図5は、スペクトル選択性日照制御窓フィルム50の断面を示す。この窓フィルム50は、
例えば架橋アクリレートを含む硬質被覆上層52と、
例えば23μmの厚みを有する第1PETフィルム53と、
本発明による層状構造54と、
第1接着層55と、
例えば、23μmの厚みを有する第2PETフィルム56と、
第2接着層57と、
ガラス層58と
を備えている。
図5は、一連の異なる層を示している。異なる層の厚みは、実際の厚みと比例して描かれていない。
図6は、自動車用の窓ガラスの断面を示す。この窓ガラスは、
第1ガラス層62と、
例えば375μmの厚みを有するPVB層を含む第1接着層63と、
例えば50μmの厚みを有するPETフィルム64と、
本発明による積層構造65と、
例えば375μmの厚みを有するPVB層を含む第2接着層66と、
ガラス層67
を備える。
図5に示されるスペクトル選択性日射制御窓の光学特性が、表1に示される。
Figure 0004426972
図5に示されるようなスペクトル選択性日射制御窓の透過率T(単位:%)が、UV、可視光線、及び近赤外線に対して図7に示される。
図5に示されるようなスペクトル選択性日射制御窓フィルムの反射率R(単位:%)が、図8に示される。反射率は、ガラス側(ライン82)とフィルム側(ライン84)において測定される。
本発明によるこの赤外線反射構造は、高い可視光線透過率(VLT)を、低い可視光線反射率及び低い太陽熱利得係数(SHGC)と組合せる。この構造は、さらに中間色(ニュートラルカラー)によって特徴付けられる。
当技術分野において知られている赤外線反射積層構造は、所望する低い太陽熱利得係数を得るために、3つの銀含有層を必要とする。本発明による積層構造は、2つのみの銀含有層によって、低い太陽熱利得係数を有する。この銀含有層の数の低減は、可視光線透過率に好ましい影響を及ぼす。
図9及び10において、図5に示されるようなスペクトル選択性日照制御窓フィルムの透過率と反射率が、2つの他のフィルム、すなわち、フィルムA及びフィルムBと比較される。図9において、本発明によるスペクトル選択性日照制御窓フィルムの透過率はライン92によって示され、フィルムAの透過率はライン94によって示され、フィルムBの透過率はライン96によって示される。図10において、本発明によるスペクトル選択性日照制御窓フィルムの反射率はライン102によって示され、フィルムAの反射率はライン104によって示され、フィルムBの反射率はライン106によって示される。
フィルムAは、In23層とAgAu層の交互の層、すなわち、In23層/AgAu合金層/In23層/AgAu合金層/In23層/AgAu合金層/In23層を含んでなる。
フィルムBは、SnO2層とAg層の交互の層、すなわち、SnO2層/銀層/SnO2層/銀層/SnO2層を含んでなる。
図9から、本発明による構造の可視光線透過率(VLT)は、フィルムAのVLTと殆ど等しいことが結論付けられる。これは、本発明による構造の場合、所望のVLTは2つのみの銀含有層によって得られるが、フィルムAの構造は3つの銀含有層を必要とすることを意味している。図10から、本発明による構造の赤外線の反射は、フィルムBの構造の赤外線の反射よりも高いことが結論付けられる。
本発明による赤外線反射積層構造の異なる実施形態を示す図である。 本発明による赤外線反射積層構造の異なる実施形態を示す図である。 本発明による赤外線反射積層構造の異なる実施形態を示す図である。 TiO2被膜の光学特性を示す図である。 スペクトル選択性日照制御窓フィルムの断面図である。 本発明による積層構造を備える自動車用窓ガラスの断面図である。 本発明による積層構造の透過率を示す図である。 本発明による積層構造の反射率を示す図である。 本発明による積層構造の透過率と反射率を2つの他の種類の積層構造と比較して示す図である。 本発明による積層構造の透過率と反射率を2つの他の種類の積層構造と比較して示す図である。

Claims (7)

  1. 透明な基板層と、
    第1金属酸化物層と、
    第1銀含有層と、
    第2金属酸化物層と、
    第2銀含有層と、
    第3金属酸化物層と
    を備え、前記第1、第2、及び第3金属酸化物層が、500nmの波長において少なくとも2.40の屈折率を有し、ガラスに積層された前記層状構造が、70%よりも高い可視光線透過率(VLT)と0.44よりも低い太陽熱利得係数(SHGC)を有する赤外線反射積層構造であって、
    前記積層構造が、少なくとも1つの中間層を含み、該中間層が、銀含有層と金属酸化物層との間及び/又は金属酸化物層と銀含有層との間に位置し、金を含む積層構造
  2. 前記積層構造が、1.60よりも高い日照利得に対する光の比率(LSG比)を有する請求項1に記載の積層構造。
  3. 前記金属酸化物層が、TiO2を含む請求項1又は2に記載の積層構造。
  4. 前記TiO2が、主にルチル相から成る請求項3に記載の積層構造。
  5. 前記第1及び第2銀含有層が、10〜25nmの厚みを有する請求項1〜のいずれかに記載の積層構造。
  6. 前記第1、第2及び第3金属酸化物層が、25〜70nmの厚みを有する請求項1〜のいずれかに記載の積層構造。
  7. 請求項1〜のいずれかに記載の積層構造の透明ヒートミラーとして使用。
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