JP4426481B2 - Semiconductor device - Google Patents

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JP4426481B2
JP4426481B2 JP2005050241A JP2005050241A JP4426481B2 JP 4426481 B2 JP4426481 B2 JP 4426481B2 JP 2005050241 A JP2005050241 A JP 2005050241A JP 2005050241 A JP2005050241 A JP 2005050241A JP 4426481 B2 JP4426481 B2 JP 4426481B2
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screw
notch
semiconductor device
washer
package
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JP2006237305A (en
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寿 川藤
達雄 太田
建一 林
弘幸 尾崎
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Description

本発明は、半導体装置に関するものであり、特に、放熱フィンが取り付けられる半導体装置に関する。   The present invention relates to a semiconductor device, and more particularly, to a semiconductor device to which a radiation fin is attached.

従来、発熱量が高い、例えば電力用半導体素子を樹脂でパッケージ封止した半導体装置には、発生した熱をパッケージ外部に逃がすための放熱フィンが取り付けられる。図8に概略的に示すように、半導体装置510は、熱をパッケージ512の外部に逃がすために半導体素子と熱的に接続されパッケージ512から露出した放熱板514を有し、その放熱板514に放熱フィン516が当接されて固定される。半導体装置510に対する放熱フィン516の固定は、ねじ518によって行われる。半導体装置510は、外縁にU字形状の切り欠き部520を有し、切り欠き部520にねじ518の軸部522が収容された状態でねじ518の頭部524とねじ518と螺合するめねじ526が形成された放熱フィン516とに挟持されるように、放熱フィン516に対して固定される。図に示すように、ねじ518の頭部524と半導体装置510との間にはワッシャ528が配置される。U字形状の切り欠き部を有する半導体装置として、例えば特許文献1のものがある。
特開2002−208649公報
2. Description of the Related Art Conventionally, a semiconductor device that generates a large amount of heat, for example, a semiconductor device in which a power semiconductor element is packaged with a resin, is attached with a radiation fin for releasing generated heat to the outside of the package. As schematically shown in FIG. 8, the semiconductor device 510 includes a heat sink 514 that is thermally connected to a semiconductor element and exposed from the package 512 in order to release heat to the outside of the package 512. The radiation fins 516 are contacted and fixed. The heat radiation fins 516 are fixed to the semiconductor device 510 with screws 518. The semiconductor device 510 has a U-shaped notch 520 on the outer edge, and a female screw that is screwed with the head 524 of the screw 518 and the screw 518 in a state where the shaft 522 of the screw 518 is accommodated in the notch 520. It fixes with respect to the radiation fin 516 so that it may be pinched | interposed into the radiation fin 516 in which 526 was formed. As shown in the figure, a washer 528 is disposed between the head 524 of the screw 518 and the semiconductor device 510. As a semiconductor device having a U-shaped cutout, for example, there is one disclosed in Patent Document 1.
JP 2002-208649 A

しかしながら、上述の半導体装置に放熱フィンを固定するためにねじを締めていくと、樹脂パッケージに亀裂が生じ、場合によっては、パッケージに欠けが生じることがある。例えば、図9(a)に示すように、ねじ518が時計周り方向530に回転されることにより締められると、半導体装置510のパッケージ512がねじ518の頭部524と放熱フィン516とに挟まれて圧縮力を受ける。それとともに、ワッシャ528が、ねじ518の頭部524によってパッケージ512に押圧されつつ、ねじ518の回転に応じて回転する。このとき、図9(b)に示すように、ワッシャ528と接触するパッケージ512の面532の部分(図において、ハッチング部分)534はせん断力を受ける。これにより、圧縮力を受けつつ外方向のせん断力536を受ける、切り欠き部520と側面538に挟まれた角部540に亀裂542が生じる。生じた亀裂542が発達すると、亀裂542から欠けることがあり、当然ながら、亀裂や欠けが生じると、半導体装置の信頼性が低下する。   However, when the screws are tightened to fix the radiating fins to the semiconductor device described above, the resin package is cracked, and in some cases, the package may be chipped. For example, as shown in FIG. 9A, when the screw 518 is tightened by rotating in the clockwise direction 530, the package 512 of the semiconductor device 510 is sandwiched between the head 524 of the screw 518 and the heat radiation fin 516. Receiving compression force. At the same time, the washer 528 rotates in response to the rotation of the screw 518 while being pressed against the package 512 by the head 524 of the screw 518. At this time, as shown in FIG. 9B, a portion (hatched portion in the drawing) 534 of the surface 532 of the package 512 that contacts the washer 528 receives a shearing force. As a result, a crack 542 is generated in the corner portion 540 sandwiched between the notch portion 520 and the side surface 538 that receives the outward shearing force 536 while receiving the compressive force. When the generated crack 542 develops, it may be chipped from the crack 542. Of course, if a crack or chip occurs, the reliability of the semiconductor device decreases.

そこで、本発明は、放熱フィンを取り付ける際のねじ締めによる亀裂の発生を抑えることができる構成を有する半導体装置を提供することを目的とする。   In view of the above, an object of the present invention is to provide a semiconductor device having a configuration capable of suppressing the occurrence of cracks due to screw tightening when attaching a radiation fin.

上記目的を達成するための本発明に係る半導体装置は、切り欠き部を有し、上記切り欠き部にねじの軸部が収容された状態で上記ねじの頭部と上記ねじと螺合するめねじ部を有する他の部材との間に挟持されるように上記他の部材に固定される、リードフレームに載置された半導体素子を樹脂パッケージで封止してなる半導体装置であって、
上記切り欠き部が形成された側面、上記切り欠き部の表面、および上記ねじの頭部と接触する表面によって形成された頂点を面取りして形成された、または上記切り欠き部の表面と上記ねじの頭部と接触する表面との間の辺を面取りして形成された、上記他の部材に上記ねじによって固定されたときに上記ねじの頭部との接触を回避する面取り部と、
上記他の部材に上記ねじによって固定されたときに、上記ねじの頭部と上記他の部材の間に位置する上記パッケージの部分に内含し、上記他の部材と上記ねじとから受ける圧縮力に抵抗できるように上記部分の剛性を高めるパッケージ補強部材とを有することを特徴とする。
In order to achieve the above object, a semiconductor device according to the present invention has a notch, and a female screw that engages with the screw head and the screw in a state where a shaft portion of the screw is accommodated in the notch. A semiconductor device in which a semiconductor element mounted on a lead frame is sealed with a resin package and is fixed to the other member so as to be sandwiched between other members having a portion,
Formed by chamfering the apex formed by the side surface on which the notch is formed , the surface of the notch , and the surface in contact with the head of the screw, or the surface of the notch and the screw formed by chamfering the edges between the head and the contact surface, a chamfer for avoiding contact with the head of the screw when it is fixed by the screw to the other member,
When it secured by the screw to the other member, the compression force and entailment to the portion of the package located between the head and the other member of the screw, received from the said other member and the screw And a package reinforcing member that increases the rigidity of the portion so as to resist the above .

本発明によれば、面取り部とパッケージ補強部材を有することにより、該面取り部と該パッケージ補強部材がない場合に比べてねじ締め付け時の亀裂の発生が抑制される。
According to the present invention, by having the chamfered portion and the package reinforcing member, the occurrence of cracks during tightening screws as compared with the case where there is no the chamfered portion and the package reinforcing member is suppressed.

図1は、放熱フィンが取り付けられる本発明の一実施形態に係る半導体装置の概略図である。半導体装置10は、概略長方形の板状の樹脂パッケージ12を有し、半導体装置10以外の構成要素と電気的な接続を行うための複数のアウターリード(図面簡略化のため、一部のみが示されている。)14が対向し合う2つの側面16から突出した、例えばDIP(Dual In−line Package)型の半導体装置である。図示されてはいないが、樹脂パッケージ12内部には、アウターリード14と一体のリードフレーム(インナーリード)と、リードフレームと電気的に接続された半導体素子とが封止されている。   FIG. 1 is a schematic view of a semiconductor device according to an embodiment of the present invention to which heat radiating fins are attached. The semiconductor device 10 has a substantially rectangular plate-shaped resin package 12, and a plurality of outer leads for electrical connection with components other than the semiconductor device 10 (only a part is shown for simplification of the drawing). For example, it is a DIP (Dual In-line Package) type semiconductor device in which 14 protrudes from two opposing side surfaces 16. Although not shown, a lead frame (inner lead) integrated with the outer lead 14 and a semiconductor element electrically connected to the lead frame are sealed inside the resin package 12.

また、半導体装置10は、放熱フィン(図示せず)と接触するための放熱フィン当接面18に露出している、樹脂パッケージ12内部に封止された半導体素子と熱的に接続された放熱板20を有する。   Further, the semiconductor device 10 has a heat dissipation thermally connected to a semiconductor element sealed inside the resin package 12 exposed at a heat dissipation fin contact surface 18 for contact with a heat dissipation fin (not shown). It has a plate 20.

さらに、半導体装置10は、対向し合う2つの側面22に、側面22から半導体装置10の中央部に向かって形成された切り欠き部24を有する。切り欠き部24は、放熱フィン当接面18と垂直な方向から見た場合、U字状の形状を有する。また、放熱フィン当接面18と対向する面(後述するようにワッシャと当接する面であるため、以下、「ワッシャ当接面」と称する。)28、切り欠き部24の切り欠き面26、および側面22の3つの面によって形成される頂点を切り落として形成される切断面のような、3つの面と辺をなす三角形の逃げ面(いわゆる面取り、以下、「逃げ部」と称する)30を有する。以下、本発明の特徴である切り欠き部24周辺の半導体装置10の構成について説明する。
Furthermore, the semiconductor device 10 has a notch 24 formed on the two side surfaces 22 facing each other from the side surface 22 toward the central portion of the semiconductor device 10. The notch 24 has a U-shape when viewed from a direction perpendicular to the heat radiation fin contact surface 18. Further, a surface facing the heat radiating fin contact surface 18 (hereinafter referred to as a “washer contact surface” because it is a surface that contacts the washer as will be described later) 28, a notch surface 26 of the notch 24, And a triangular flank ( so-called chamfering, hereinafter referred to as flank ) 30 that forms a side with the three surfaces, such as a cut surface formed by cutting off the apex formed by the three surfaces of the side surface 22. Have. Hereinafter, the configuration of the semiconductor device 10 around the notch 24, which is a feature of the present invention, will be described.

切り欠き部24は、放熱フィン当接面18(放熱板20)に放熱フィンを当接した状態で該放熱フィンを半導体装置10に固定する際に機能するものである。具体的には、放熱フィンは、半導体装置10にねじによって固定される。   The notch 24 functions when the heat radiation fin is fixed to the semiconductor device 10 with the heat radiation fin in contact with the heat radiation fin contact surface 18 (heat radiation plate 20). Specifically, the heat radiating fins are fixed to the semiconductor device 10 with screws.

図2(a)は、放熱フィンが半導体装置にねじによって固定されているときの切り欠き部周辺を示す図(面28と垂直な方向から見た図)であり、図2(b)は、図2(a)においてA方向から見た断面図である。また、図3は、切り欠き部周辺の構成の詳細を示すための図である。   FIG. 2A is a diagram (a diagram viewed from a direction perpendicular to the surface 28) showing the periphery of the notch when the radiating fin is fixed to the semiconductor device with a screw, and FIG. It is sectional drawing seen from the A direction in Fig.2 (a). FIG. 3 is a diagram for showing details of the configuration around the notch.

図2(a)、2(b)に示すように、半導体装置10と放熱フィン40との間の固定は、半導体装置10のパッケージ12がねじ42の頭部44とねじ42と螺合する放熱フィン40とにワッシャ46を介して挟持されるように行われる。切り欠き部24は、図3に示すように、ねじ42の軸部48が収容できる幅wと深さd(側面22からの距離)を有する。言い換えると、切り欠き部24は、使用されるねじによって形状(寸法)が決定される。   As shown in FIGS. 2A and 2B, fixing between the semiconductor device 10 and the heat radiating fin 40 is performed by heat dissipation in which the package 12 of the semiconductor device 10 is screwed with the head portion 44 of the screw 42 and the screw 42. It is carried out so as to be held between the fins 40 via washers 46. As shown in FIG. 3, the notch portion 24 has a width w and a depth d (distance from the side surface 22) that the shaft portion 48 of the screw 42 can accommodate. In other words, the shape (dimension) of the notch 24 is determined by the screw used.

なお、切り欠き部の深さdは、最小限、ねじの軸部が収容される大きさに設計されている。そのため、ワッシャ当接面と垂直な方向から見た場合、ねじの頭部やワッシャは切り欠き部が形成されている側面から突出する。これは、ねじの頭部やワッシャが完全にワッシャ当接面上に配置されるように切り欠き部を形成すると、半導体装置本体が不要に大きくなる(小型化できない)不都合が生じるためである。また、ねじの頭部やワッシャが完全にワッシャ当接面上に配置されるようにするならば、切り欠き部ではなく、貫通孔が形成される。   The depth d of the notch is designed to be a size that can accommodate the shaft portion of the screw at a minimum. Therefore, when viewed from a direction perpendicular to the washer contact surface, the screw head and the washer protrude from the side surface where the notch is formed. This is because if the notch portion is formed so that the screw head and the washer are completely disposed on the washer contact surface, the semiconductor device body becomes unnecessarily large (cannot be reduced in size). Further, if the screw head and the washer are completely disposed on the washer contact surface, a through hole is formed instead of a notch.

逃げ部30は、切り欠き部24と側面22に挟まれた角部50においてワッシャ46との接触を回避する非接触部として機能する。非接触部は、図3に示すようにワッシャ当接面28と垂直な方向から見た場合、切り欠き面26と側面22との頂点54を頂点とする2辺の長さがcである直角二等辺三角形の領域である。角部50において、逃げ部30が設けられることにより、逃げ部30がない場合に比べてワッシャ46との接触面積が減少し、ねじ締め付け時にワッシャ46から受けるせん断力も小さくなる。角部50に作用するせん断力が小さくなることにより、逃げ部30がない場合に比べて亀裂の発生が抑制される。   The escape portion 30 functions as a non-contact portion that avoids contact with the washer 46 at the corner portion 50 sandwiched between the notch portion 24 and the side surface 22. As shown in FIG. 3, the non-contact portion is a right angle whose length of two sides is c with the apex 54 of the cut-out surface 26 and the side surface 22 as viewed from the direction perpendicular to the washer contact surface 28. This is an isosceles triangular region. By providing the relief portion 30 in the corner portion 50, the contact area with the washer 46 is reduced as compared with the case where the relief portion 30 is not provided, and the shearing force received from the washer 46 during screw tightening is also reduced. Since the shearing force acting on the corner portion 50 is reduced, the generation of cracks is suppressed as compared with the case where the escape portion 30 is not provided.

また、角部50における亀裂の発生は、ねじ締め付け時にワッシャ46から受けるせん断力だけでなく、ねじ42の頭部44と放熱フィン40に挟まれることにより受ける圧縮力にも起因する。この圧縮力による亀裂の発生を抑制するために、インナーリードの一部からなる補強部材52が、放熱フィン取り付け時においてワッシャ46と放熱フィン40の間に存在するようにパッケージ12内に配置されている。これにより、ワッシャ46と放熱フィン40との間にあるパッケージ12の部分の剛性が増加してねじ締め付け時に受ける圧縮力に抵抗し、その結果、補強部材52がない場合に比べて亀裂の発生が抑制される。   In addition, the occurrence of cracks in the corner 50 is caused not only by the shearing force received from the washer 46 during screw tightening but also by the compressive force received by being sandwiched between the head 44 of the screw 42 and the radiation fin 40. In order to suppress the occurrence of cracks due to this compressive force, the reinforcing member 52 made of a part of the inner lead is disposed in the package 12 so as to exist between the washer 46 and the heat radiating fin 40 when the heat radiating fin is attached. Yes. As a result, the rigidity of the portion of the package 12 between the washer 46 and the radiating fin 40 is increased to resist the compressive force received during screw tightening, and as a result, cracks are generated compared to the case where the reinforcing member 52 is not provided. It is suppressed.

本実施形態による亀裂発生の抑制の効果を、発明者は実験により実証している。発明者は、まず、切り欠き部の深さd(図3参照。言い換えると、切り欠き部が設けられた側面22からねじまでの距離L)の寸法が異なる半導体装置を用い、補強部材が放熱フィンとワッシャの間に存在することによる効果を確かめた。また、逃げ部の大きさ(非接触部の大きさ)が異なる半導体装置を用い、逃げ部の大きさによる影響を調べた。使用したねじはM3ねじ(軸径が3mm、頭部径5.5mm)、ワッシャはM3ねじ用で、内径が3.3mm、外径が8mmのものを使用した。切り欠き部の幅wは、M3ねじに対応して3.2mmである。   The inventor has demonstrated the effect of suppressing crack generation according to the present embodiment through experiments. The inventor first uses semiconductor devices having different dimensions of the depth d of the notch (see FIG. 3; in other words, the distance L from the side surface 22 where the notch is provided) to the screw, and the reinforcing member dissipates heat. We confirmed the effect of existing between the fin and washer. Moreover, the influence by the magnitude | size of an escape part was investigated using the semiconductor device from which the magnitude | size of an escape part (size of a non-contact part) differs. The screws used were M3 screws (shaft diameter 3 mm, head diameter 5.5 mm), and washer for M3 screws with an inner diameter of 3.3 mm and an outer diameter of 8 mm. The width w of the notch is 3.2 mm corresponding to the M3 screw.

補強部材の存在による効果、逃げ部の大きさによる影響は、ねじ締めトルク(N・m)を測定し、半導体装置のパッケージに亀裂が発生するときのトルク(亀裂が発生せずにパッケージが耐えうる限界のトルク)で評価した。この限界のトルクが高いほど、亀裂が発生し難いことを示し、言い換えると、亀裂の発生が抑制されている。   The effect of the presence of the reinforcing member and the influence of the size of the relief part are measured by measuring the screw tightening torque (N · m), and the torque when a crack occurs in the package of the semiconductor device (the package withstands without generating a crack). It was evaluated by the torque limit. The higher this limit torque, the harder it is to crack, in other words, the cracking is suppressed.

図4には、切り欠き部が異なる5種類の半導体装置1〜5について補強部材による効果を示す実験結果の表が示されている。図示されている表において、「1.8以上」は、1.8N・mのトルクでねじを締めても亀裂が発生しなかったことを示す。図4に示す実験結果より、補強部材の有無に関わらず、切り欠き部の深さd大きくなるほど(ねじの位置が側面から離れるほど)、限界トルクは大きくなることがわかる(言い換えると、亀裂の発生が抑制されることがわかる。)。また、全ての半導体装置において、補強部材がある方が、ない方に比べて限界トルクが大きい。これにより、補強部材が亀裂の発生を抑制していることが分かる。   FIG. 4 shows a table of experimental results showing the effect of the reinforcing member on five types of semiconductor devices 1 to 5 having different notches. In the illustrated table, “1.8 or more” indicates that no crack occurred even when the screw was tightened with a torque of 1.8 N · m. From the experimental results shown in FIG. 4, it can be seen that the limit torque increases as the depth d of the notch increases (the screw moves away from the side surface) regardless of the presence or absence of the reinforcing member (in other words, crack cracks). It can be seen that the occurrence is suppressed.) In all the semiconductor devices, the limit torque is larger when the reinforcing member is present than when the reinforcing member is not present. Thereby, it turns out that the reinforcement member has suppressed generation | occurrence | production of the crack.

図5には、逃げ部(非接触部)の大きさが異なる6種類の半導体装置1〜6(半導体装置1には逃げ部が形成されていない)についての限界トルクを示す表が示されている。図において、「1.8以上」は、1.8N・mのトルクでねじを締めても亀裂が発生しなかったことを示す。図5に示す実験結果より、逃げ部が存在する方が(非接触部が存在する方が)、存在しない場合に比べて(半導体装置1に比べて)限界トルクが概ね大きい。また、非接触部が大きくなるほど(言い換えると、角部においてワッシャとの接触面積が小さくなるほど)、限界トルクが大きくなる(亀裂の発生が抑制されている。)。これにより、逃げ部(非接触部)が亀裂の発生を抑制していることが分かる。   FIG. 5 shows a table showing limit torques for six types of semiconductor devices 1 to 6 (the semiconductor device 1 does not have a relief portion) with different sizes of relief portions (non-contact portions). Yes. In the figure, “1.8 or more” indicates that no crack occurred even if the screw was tightened with a torque of 1.8 N · m. From the experimental results shown in FIG. 5, the limit torque is generally larger when the escape portion is present (when the non-contact portion is present) than when the clearance portion is not present (as compared with the semiconductor device 1). Further, the larger the non-contact portion (in other words, the smaller the contact area with the washer at the corner portion), the greater the limit torque (the occurrence of cracks is suppressed). Thereby, it turns out that the escape part (non-contact part) has suppressed generation | occurrence | production of the crack.

以上、一実施形態を挙げて本発明に係る半導体装置を説明したが、この実施形態に限定するわけでなく、他の実施形態でも可能である。ねじ締め付け時においてワッシャと接触する角部に非接触部を形成する逃げ部は、上述のように、ワッシャ当接面と切り欠き面と切り欠き部が形成された側面から形成された頂点を切り落として形成される切断面のような、3つの面と辺をなす三角形の面でなくてもよい。   The semiconductor device according to the present invention has been described with reference to one embodiment. However, the present invention is not limited to this embodiment, and other embodiments are possible. As above-mentioned, the relief part which forms a non-contact part in the corner which contacts a washer at the time of screw tightening cuts off the vertex formed from the washer contact surface, the notch surface, and the side surface in which the notch part was formed. It does not have to be a triangular surface that forms sides with three surfaces, such as a cut surface that is formed in this manner.

例えば、図6(a)に示すように、切り欠き部124の切り欠き面126とワッシャ当接面128との間で形成される辺を切り落として形成されたような、切り欠き面126とワッシャ当接面128との間に配置された面130であってもよい。また、本実施形態の半導体装置10が、当業者によって様々に変更可能であることは明らかである。例えば、図6(b)に示すように、切り欠き部224が形成された側面222とワッシャ当接面228との間で形成される辺を切り落として形成されたような、側面224とワッシャ当接面228との間に配置された面230であってもよい。このように、切り欠き部が形成された側面と切り欠き部に挟まれた角部においてワッシャとの接触面積が減少するための非接触部を形成する逃げ部は種々有り、本明細書に記載した形態以外の逃げ部でも亀裂の発生が抑制されるのは明らかである。本明細書に記載した形態以外の逃げ部を有する半導体装置も、本発明に含まれる。

For example, as shown in FIG. 6A, the notch surface 126 and the washer formed by cutting off the side formed between the notch surface 126 of the notch portion 124 and the washer contact surface 128. The surface 130 may be disposed between the contact surface 128. It is obvious that the semiconductor device 10 of the present embodiment can be variously changed by those skilled in the art. For example , as shown in FIG. 6 (b), the side surface 224 and the washer contact, which are formed by cutting off the side formed between the side surface 222 where the notch 224 is formed and the washer contact surface 228, are formed. The surface 230 may be disposed between the contact surface 228 and the contact surface 228. In this way, there are various relief portions that form non-contact portions for reducing the contact area with the washer at the side surface where the notch portion is formed and the corner portion sandwiched between the notch portions, and are described in this specification. It is clear that the occurrence of cracks is suppressed even in escape portions other than the above-described form. Semiconductor devices having relief portions other than those described in this specification are also included in the present invention.

また、補強部材は、上述するようにインナーリードの一部から形成するのではなく、インナーリードとは別の部材で形成してもよい。また、上述の形状とは異なる別の形状で形成してもよい。図7(a)、7(b)(図7(a)においてB方向から見た断面図)に示すように、例えば、パッケージ312内の補強部材352は、切り欠き部324の切り欠き面326に沿って配置される、ワッシャ当接面328と垂直な方向から見た場合にU字形状に湾曲した板部材であってもよい。または、インナーリードの一部を、図7に示すように、切り欠き部324の切り欠き面326に沿ってU字形状に湾曲して補強部材を構成してもよい。このように、放熱フィン取り付け時にワッシャと放熱フィンの間に存在するようにパッケージ内に配置される補強部材は種々有り、本明細書に記載した形態以外の補強部材でも亀裂の発生が抑制されるのは明らかである。本明細書に記載した形態以外の補強部材を有する半導体装置も、本発明に含まれる。   Further, the reinforcing member is not formed from a part of the inner lead as described above, but may be formed by a member different from the inner lead. Moreover, you may form in another shape different from the above-mentioned shape. As shown in FIGS. 7A and 7B (a cross-sectional view seen from the direction B in FIG. 7A), for example, the reinforcing member 352 in the package 312 is a notch surface 326 of the notch 324. The plate member may be a U-shaped curved plate member as viewed from a direction perpendicular to the washer contact surface 328. Alternatively, as shown in FIG. 7, a part of the inner lead may be curved in a U shape along the notch surface 326 of the notch 324 to constitute the reinforcing member. As described above, there are various reinforcing members arranged in the package so as to exist between the washer and the radiating fin when the radiating fin is attached, and the occurrence of cracks is suppressed even in the reinforced member other than the embodiment described in the present specification. It is clear. Semiconductor devices having reinforcing members other than those described in this specification are also included in the present invention.

確認のために、本発明に係る半導体装置はワッシャと放熱フィンとに挟持されるように放熱フィンに固定されるものであるが、ワッシャがなくてもねじの頭部と放熱フィンに挟持されることが可能な形態であるのは明らかである。この場合、逃げ部は、切り欠き部が形成された側面と切り欠き部とに挟まれた角部においてねじの頭部との接触面積を減らすための非接触部を形成し、補強部材は、放熱フィン取り付け時にねじの頭部と放熱フィンの間に存在するようにパッケージ内に配置される。   For confirmation, the semiconductor device according to the present invention is fixed to the radiating fin so as to be sandwiched between the washer and the radiating fin, but is sandwiched between the screw head and the radiating fin without the washer. It is clear that this is a possible form. In this case, the relief portion forms a non-contact portion for reducing a contact area with the head portion of the screw at a corner portion sandwiched between the side surface where the notch portion is formed and the notch portion, and the reinforcing member is It arrange | positions in a package so that it may exist between the head of a screw and a radiation fin at the time of a radiation fin attachment.

最後に、本発明に係る半導体装置は、放熱フィンに取り付けることに限定しておらず、放熱フィン以外の部材にも取り付け可能であることは明らかである。また、切り欠き部は、ワッシャ当接面と垂直な方向から見た場合U字形状以外の形状でもよく、例えばコ字形状であってもよい。   Finally, it is obvious that the semiconductor device according to the present invention is not limited to being attached to the heat radiating fins, and can be attached to members other than the heat radiating fins. Further, the cutout portion may have a shape other than the U shape when viewed from a direction perpendicular to the washer contact surface, and may be, for example, a U shape.

本発明に係る半導体装置の概略的な外観図である。1 is a schematic external view of a semiconductor device according to the present invention. 放熱フィン取り付け時の半導体装置の切り欠き部を示した図である。It is the figure which showed the notch part of the semiconductor device at the time of a radiation fin attachment. 半導体装置の切り欠き部の詳細を示すための図である。It is a figure for showing the detail of the notch part of a semiconductor device. 補強部材の効果を実証する実験結果の表を示す図である。It is a figure which shows the table | surface of the experimental result which demonstrates the effect of a reinforcement member. 逃げ部の効果を実証する実験結果の表を示す図である。It is a figure which shows the table | surface of the experimental result which demonstrates the effect of an escape part. 他の実施形態に係る半導体装置の切り欠き部を示す図である。It is a figure which shows the notch part of the semiconductor device which concerns on other embodiment. 他の実施形態に係る半導体装置の補強部材を示す図である。It is a figure which shows the reinforcement member of the semiconductor device which concerns on other embodiment. 従来の半導体装置と放熱フィンの取り付け方法を示す図である。It is a figure which shows the conventional semiconductor device and the attachment method of a radiation fin. 従来の半導体装置のパッケージにおいて亀裂の発生を説明するための図である。It is a figure for demonstrating generation | occurrence | production of a crack in the package of the conventional semiconductor device.

符号の説明Explanation of symbols

10 半導体装置、 12 パッケージ、 14 アウターリード、 16 側面、 18 放熱フィン当接面、 20 放熱板、 22 側面、 24 切り欠き部、 26 切り欠き面、 28 ワッシャ当接面、 30 逃げ面、 40 放熱フィン、 42 ねじ、 44 頭部、 46 ワッシャ、 48 軸部、 50 角部、 52 補強部材、 54 頂点、
122 側面、 124 切り欠き部、 126 切り欠き面、 128 ワッシャ当接面、 130 面、
222 側面、 224 切り欠き部、 226 切り欠き面、 228 ワッシャ当接面、 230 面、
312 パッケージ、 324 切り欠き部、 326 切り欠き面、 328 ワッシャ当接面、 352 補強部材、
510 半導体装置、 512 パッケージ、 514 放熱板、 516 放熱フィン、 518 ねじ、 520 切り欠き部、 522 軸部、 524 頭部、 526 めねじ、 528 ワッシャ、 530 回転方向、 532 面、 534 接触部分、 536 せん断力、 538 側面、 540 角部、 542 亀裂

DESCRIPTION OF SYMBOLS 10 Semiconductor device, 12 Package, 14 Outer lead, 16 Side surface, 18 Radiation fin contact surface, 20 Heat sink, 22 Side surface, 24 Notch part, 26 Notch surface, 28 Washer contact surface, 30 Escape surface, 40 Heat dissipation Fin, 42 Screw, 44 Head, 46 Washer, 48 Shaft, 50 Corner, 52 Reinforcement, 54 Vertex,
122 side surface, 124 notch, 126 notch surface, 128 washer contact surface, 130 surface,
222 side surface, 224 notch, 226 notch surface, 228 washer contact surface, 230 surface,
312 package, 324 notch, 326 notch surface, 328 washer contact surface, 352 reinforcing member,
510 Semiconductor Device, 512 Package, 514 Radiation Plate, 516 Radiation Fin, 518 Screw, 520 Notch, 522 Shaft, 524 Head, 526 Female Screw, 528 Washer, 530 Rotation Direction, 532 Surface, 534 Contact Portion, 536 Shear force, 538 sides, 540 corners, 542 crack

Claims (4)

外縁に切り欠き部を有し、上記切り欠き部にねじの軸部が収容された状態で上記ねじの頭部と上記ねじと螺合するめねじ部を有する他の部材との間に挟持されるように上記他の部材に固定される、リードフレームに載置された半導体素子を樹脂パッケージで封止してなる半導体装置であって、
上記切り欠き部が形成された側面、上記切り欠き部の表面、および上記ねじの頭部と接触する表面によって形成された頂点を面取りして形成された、または上記切り欠き部の表面と上記ねじの頭部と接触する表面との間の辺を面取りして形成された、上記他の部材に上記ねじによって固定されたときに上記ねじの頭部との接触を回避する面取り部と、
上記他の部材に上記ねじによって固定されたときに上記ねじの頭部と上記他の部材の間に位置する上記パッケージの部分に内含し、上記他の部材と上記ねじとから受ける圧縮力に抵抗できるように上記部分の剛性を高めるパッケージ補強部材とを有することを特徴とする半導体装置。
It has a notch on the outer edge, and is sandwiched between the head of the screw and another member having a female screw that is screwed with the screw in a state where the shaft portion of the screw is accommodated in the notch. A semiconductor device formed by sealing a semiconductor element mounted on a lead frame with a resin package, which is fixed to the other member as described above,
Formed by chamfering the apex formed by the side surface on which the notch is formed , the surface of the notch , and the surface in contact with the head of the screw, or the surface of the notch and the screw formed by chamfering the edges between the head and the contact surface, a chamfer for avoiding contact with the head of the screw when it is fixed by the screw to the other member,
And entailment to the package portion located between the head and the other member of the screw when it is fixed by the screw to the other member, the compressive force received from the said other member and the screw A semiconductor device comprising: a package reinforcing member that increases the rigidity of the portion so as to resist .
ねじの頭部との間に配置されたワッシャと上記他の部材とに挟持されるように上記他の部材に固定されるものであって、
上記面取り部が上記ワッシャとの接触を回避するものであって、
上記パッケージ補強部材が上記ワッシャと他の部材との間にあるようにパッケージに内含されていることを特徴とする請求項1に記載の半導体装置。
Be one that is fixed to the other member so as to be sandwiched between the washer and the other member disposed between the head of the screw,
The chamfered portion avoids contact with the washer;
The semiconductor device according to claim 1, wherein the package reinforcing member is included in the package so as to be between the washer and another member.
上記パッケージ補強部材がリードフレームのインナーリードの一部からなることを特徴とする請求項1または2のいずれかに記載の半導体装置。 3. The semiconductor device according to claim 1, wherein the package reinforcing member is a part of an inner lead of a lead frame. 上記他の部材が放熱フィンであることを特徴とする請求項1〜3のいずれか一に記載の半導体装置。 The semiconductor device according to claim 1, wherein the other member is a heat radiating fin.
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