JP2008091622A - Heat receiving member mounting structure - Google Patents

Heat receiving member mounting structure Download PDF

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JP2008091622A
JP2008091622A JP2006270739A JP2006270739A JP2008091622A JP 2008091622 A JP2008091622 A JP 2008091622A JP 2006270739 A JP2006270739 A JP 2006270739A JP 2006270739 A JP2006270739 A JP 2006270739A JP 2008091622 A JP2008091622 A JP 2008091622A
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heat receiving
receiving plate
heat
mounting structure
member mounting
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JP4999060B2 (en
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Takahiro Shimura
隆広 志村
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Furukawa Electric Co Ltd
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Furukawa Electric Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat receiving member mounting structure which can be thermally connected to a semiconductor element with a small thermal resistance even if a thin heat receiving plate is used, making it possible to thin a heat sink. <P>SOLUTION: A heat receiving member mounting structure 1 includes a substrate 2 and a substrate 5 mounted on the substrate 2, a semiconductor element 6 mounted on the substrate 5 protruding from the substrate 5, a heat receiving plate 3, of which one side is thermally connected to the protruding side of the semiconductor element 6, of which another side is thermally connected to a heat pipe 10, being equipped with a reinforcement structure 4 in the periphery of the protruding side, and a fixing member 7 which fixes the substrate 2 and the heat receiving plate 3 while the protruding side and the heat receiving plate 3 are thermally connected by an elastic force. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明は、基板に搭載された半導体素子に熱的に接続される受熱プレートを基板に固定する受熱部材取り付け構造体に関し、特に受熱プレートの薄型化による薄型の受熱部材取り付け構造体に関する。   The present invention relates to a heat receiving member mounting structure for fixing a heat receiving plate thermally connected to a semiconductor element mounted on a substrate to the substrate, and more particularly to a thin heat receiving member mounting structure by thinning the heat receiving plate.

基板に搭載されるCPU、素子等の突出面の発熱量、発熱密度が増大し、これらを効率的に放熱する高性能のヒートシンクが求められている。パーソナルコンピュータにおいても、CPUに加え、グラフィックチップ(GPUまたはVGA)、チップセットなど積極的な放熱を必要とする素子が増加してきた。一方で、薄型化が要求されてきている。   The heat generation amount and the heat generation density of the projecting surfaces of the CPU and elements mounted on the substrate are increased, and there is a demand for a high performance heat sink that efficiently dissipates them. In personal computers as well, CPUs, graphic chips (GPU or VGA), chipsets and other elements that require active heat dissipation have increased. On the other hand, a reduction in thickness has been demanded.

図12は従来のヒートシンクを説明する摸式図である。図12(a)に示すように基板上に搭載された半導体素子に受熱プレート101が熱的に接続されて、固定部材105によって基板に固定されている。受熱プレートの上面にはヒートパイプの一方の端部が熱的に接続されている。ヒートパイプの他方の端部は放熱フィン部103に熱的に接続されて、半導体素子の熱を放熱フィン部に移動する。放熱フィン部の近傍にはファン104が設けられて、放熱フィン部に移動した熱を例えば筐体外に放出する。図12(b)は図12(a)に示す矢印A方向から見た部分の断面図である。図12(b)に示すように、基板に搭載された半導体素子107の突出面(即ち、上面)に受熱プレート110が押し付けられた状態でネジ108およびバネ109からなる固定部材によって基板106に固定されている。
特開2000−286130号公報
FIG. 12 is a schematic diagram for explaining a conventional heat sink. As shown in FIG. 12A, the heat receiving plate 101 is thermally connected to the semiconductor element mounted on the substrate, and is fixed to the substrate by the fixing member 105. One end of the heat pipe is thermally connected to the upper surface of the heat receiving plate. The other end of the heat pipe is thermally connected to the radiating fin portion 103 and moves the heat of the semiconductor element to the radiating fin portion. A fan 104 is provided in the vicinity of the heat radiating fin portion, and the heat moved to the heat radiating fin portion is released, for example, outside the housing. FIG. 12B is a cross-sectional view of the portion viewed from the direction of arrow A shown in FIG. As shown in FIG. 12B, the heat receiving plate 110 is pressed against the protruding surface (that is, the upper surface) of the semiconductor element 107 mounted on the substrate, and is fixed to the substrate 106 by a fixing member including a screw 108 and a spring 109. Has been.
JP 2000-286130 A

上述したように、ヒートシンクの薄型化が強く要求され、受熱プレートも薄くする必要がある。図12(c)に示すように、受熱プレートを薄くすると、受熱プレートの剛性が低くなり、矢印Cで示すように受熱プレートの中央部分でたわみが生じる。固定部材のネジが挿通する受熱プレートの端部ではバネが圧縮されず、荷重が低下する。従って、半導体素子の突出面と受熱プレートの熱接続状態が悪くなり、熱抵抗が大きくなる。   As described above, the heat sink is strongly required to be thin, and the heat receiving plate needs to be thin. As shown in FIG. 12 (c), when the heat receiving plate is thinned, the rigidity of the heat receiving plate is lowered, and as shown by an arrow C, deflection occurs in the central portion of the heat receiving plate. The spring is not compressed at the end of the heat receiving plate through which the screw of the fixing member is inserted, and the load is reduced. Therefore, the thermal connection between the protruding surface of the semiconductor element and the heat receiving plate is deteriorated, and the thermal resistance is increased.

従って、この発明の目的は、薄い受熱プレートを使用しても小さな熱抵抗で半導体素子と熱的に接続することができ、ヒートシンクの薄型化が可能な受熱部材取り付け構造体を提供することにある。   Accordingly, an object of the present invention is to provide a heat receiving member mounting structure that can be thermally connected to a semiconductor element with a small thermal resistance even if a thin heat receiving plate is used, and the heat sink can be thinned. .

発明者は従来の問題点を解決するため、鋭意研究を重ねた。その結果、薄い受熱プレートを使用しても、半導体素子の突出した突出面と熱的に接続する素子接触面の周辺部に補強構造部を設けると、受熱プレートの剛性を補強することができ、固定部材によって受熱プレートと基板を固定する際に、受熱プレートと半導体素子の突出面との間に空隙ができず、小さい熱抵抗で熱的に接続することができることが判明した。   The inventor conducted extensive research to solve the conventional problems. As a result, even if a thin heat receiving plate is used, the rigidity of the heat receiving plate can be reinforced by providing a reinforcing structure portion around the element contact surface that is thermally connected to the protruding surface of the semiconductor element, It has been found that when the heat receiving plate and the substrate are fixed by the fixing member, no gap is formed between the heat receiving plate and the protruding surface of the semiconductor element, and the heat connection can be performed with a small thermal resistance.

更に、上述した補強構造部は、受熱プレートの端部を折り曲げて重ね合わせることによって容易に形成することができ、ヒートシンクの薄型化が可能になることが判明した。また、板バネの本体部分を受熱プレートに固定し、延伸部を放射状に設けることによって、板バネ自体を補強材として、延伸部を固定部材によって基板に固定することができ、固定部材によって受熱プレートと基板を固定する際に、受熱プレートと半導体素子の突出面との間に空隙ができないことが判明した。   Furthermore, it has been found that the above-described reinforcing structure can be easily formed by folding and overlapping the end portions of the heat receiving plate, and the heat sink can be made thinner. In addition, by fixing the body portion of the leaf spring to the heat receiving plate and providing the extending portions radially, the extending portion can be fixed to the substrate by the fixing member using the leaf spring itself as a reinforcing material, and the heat receiving plate by the fixing member. When fixing the substrate, it has been found that there is no gap between the heat receiving plate and the protruding surface of the semiconductor element.

この発明の受熱部材取り付け構造体の第1の態様は、基板と、基板の上に搭載され、前記基板から突出した半導体素子と、前記基板上から突出した前記半導体素子の突出面に熱的に一方の面が接続され、他方の面がヒートパイプに熱的に接続され、前記突出面の周辺部に補強構造部を備えた受熱プレートと、前記基板と前記受熱プレートとを、前記突出面と受熱プレートが弾性力で熱的に接続された状態で固定する固定部材とを備えた、受熱部材取り付け構造体である。   According to a first aspect of the heat receiving member mounting structure of the present invention, a substrate, a semiconductor element mounted on the substrate and projecting from the substrate, and a projecting surface of the semiconductor element projecting from the substrate are thermally applied. One surface is connected, the other surface is thermally connected to a heat pipe, a heat receiving plate provided with a reinforcing structure around the protruding surface, the substrate and the heat receiving plate, and the protruding surface It is a heat receiving member attachment structure provided with the fixing member fixed in the state in which the heat receiving plate was thermally connected by the elastic force.

この発明の受熱部材取り付け構造体の第2の態様は、前記補強構造部は、前記受熱プレートの周辺部を折り曲げて重ね合わせて形成されている受熱部材取り付け構造体である。   A second aspect of the heat receiving member mounting structure according to the present invention is the heat receiving member mounting structure in which the reinforcing structure portion is formed by bending and overlapping the peripheral portion of the heat receiving plate.

この発明の受熱部材取り付け構造体の第3の態様は、前記受熱プレートの周辺部を前記半導体素子側に折り曲げる受熱部材取り付け構造体である。   A third aspect of the heat receiving member mounting structure according to the present invention is a heat receiving member mounting structure in which a peripheral portion of the heat receiving plate is bent toward the semiconductor element.

この発明の受熱部材取り付け構造体の第4の態様は、前記受熱プレートにプレス加工を施して前記突出面に対応する凹部を形成し、前記凹部側に折り曲げる受熱部材取り付け構造体である。   A fourth aspect of the heat receiving member mounting structure according to the present invention is a heat receiving member mounting structure in which the heat receiving plate is pressed to form a recess corresponding to the projecting surface and is bent toward the recess.

この発明の受熱部材取り付け構造体の第5の態様は、前記受熱プレートの前記補強構造部は、前記受熱プレートが多角形のプレートの周辺部を前記半導体素子側に折り曲げて重ね合わせて形成されている受熱部材取り付け構造体である。   According to a fifth aspect of the heat receiving member mounting structure of the present invention, the reinforcing structure portion of the heat receiving plate is formed by overlapping the heat receiving plate by folding a peripheral portion of a polygonal plate toward the semiconductor element. The heat receiving member mounting structure.

この発明の受熱部材取り付け構造体の第6の態様は、前記受熱プレートが前記突出面に対応する矩形の素子接触部分と、前記素子接触部分の各角部から放射状に延びる延伸部からなっており、前記補強構造部が前記延伸部を折り曲げて重ね合わせて形成されている受熱部材取り付け構造体である。   According to a sixth aspect of the heat receiving member mounting structure of the present invention, the heat receiving plate includes a rectangular element contact portion corresponding to the protruding surface, and extending portions extending radially from each corner of the element contact portion. The reinforcing structure portion is a heat receiving member mounting structure formed by bending and overlapping the extending portion.

この発明の受熱部材取り付け構造体の第7の態様は、前記補強構造部が、前記受熱プレートと異なる別の材料によって形成され、前記受熱プレートに取り付けられて形成されている受熱部材取り付け構造体である。   A seventh aspect of the heat receiving member mounting structure according to the present invention is a heat receiving member mounting structure in which the reinforcing structure is formed of another material different from the heat receiving plate and is attached to the heat receiving plate. is there.

この発明の受熱部材取り付け構造体の第8の態様は、前記受熱プレートの前記突出面に対応する位置に切削または鍛造によって溝部を形成し、前記溝部の周辺部が前記補強構造部を形成する受熱部材取り付け構造体である。   According to an eighth aspect of the heat receiving member mounting structure of the present invention, a groove portion is formed by cutting or forging at a position corresponding to the projecting surface of the heat receiving plate, and a peripheral portion of the groove portion forms the reinforcing structure portion. It is a member attachment structure.

この発明の受熱部材取り付け構造体の第9の態様は、前記固定部材がネジおよびバネからなっており、前記受熱プレートがバネを介して前記基板にネジ止めされる受熱部材取り付け構造体である。   A ninth aspect of the heat receiving member mounting structure according to the present invention is the heat receiving member mounting structure in which the fixing member includes a screw and a spring, and the heat receiving plate is screwed to the substrate via the spring.

この発明の受熱部材取り付け構造体の第10の態様は、前記バネが固定部および延伸部を備えた複数の板バネからなっており、前記固定部のそれぞれが前記受熱プレートに固定され、前記延伸部のそれぞれを介してネジ止めされる受熱部材取り付け構造体である。   According to a tenth aspect of the heat receiving member mounting structure of the present invention, the spring is composed of a plurality of plate springs each having a fixing portion and an extending portion, and each of the fixing portions is fixed to the heat receiving plate, and the extension It is the heat receiving member attachment structure screwed through each of the parts.

この発明の受熱部材取り付け構造体の第11の態様は、前記バネが固定部および延伸部を備えた複数の板バネの前記固定部を連結した単一部材からなっており、前記固定部がそれぞれ前記受熱プレートに固定され、前記延伸部を介してネジ止めされる受熱部材取り付け構造体である。   In an eleventh aspect of the heat receiving member mounting structure according to the present invention, the spring is composed of a single member connecting the fixing portions of a plurality of leaf springs each having a fixing portion and an extending portion, and the fixing portions are respectively provided. It is a heat receiving member mounting structure fixed to the heat receiving plate and screwed through the extending portion.

この発明の受熱部材取り付け構造体の第12の態様は、前記板バネが取り付けられる側に更に補強部材を備えている受熱部材取り付け構造体である。   A twelfth aspect of the heat receiving member mounting structure according to the present invention is a heat receiving member mounting structure further including a reinforcing member on a side on which the leaf spring is mounted.

この発明の受熱部材取り付け構造体の第13の態様は、前記ヒートパイプが複数のヒートパイプからなっており、前記ヒートパイプの間に別の補強部材を備えている受熱部材取り付け構造体である。   A thirteenth aspect of the heat receiving member mounting structure according to the present invention is a heat receiving member mounting structure in which the heat pipe is composed of a plurality of heat pipes and another reinforcing member is provided between the heat pipes.

この発明の受熱部材取り付け構造体によると、薄い受熱プレートの周辺部に別部材の補強構造部が設けられるので、ネジおよびバネからなる固定部材によって受熱プレートと基板を固定する際に、受熱プレートと突出面を小さな熱抵抗で接続することができる。その結果、受熱部材を薄くすることができ、ヒートシンクを薄型化することができる。   According to the heat receiving member mounting structure of the present invention, since the reinforcing structure portion of the separate member is provided in the peripheral portion of the thin heat receiving plate, when the heat receiving plate and the substrate are fixed by the fixing member made of screws and springs, Protruding surfaces can be connected with a small thermal resistance. As a result, the heat receiving member can be thinned and the heat sink can be thinned.

この発明の受熱部材取り付け構造体を図面を参照しながら説明する。
この発明の受熱部材取り付け構造体の1つの態様は、基板と、基板の上に搭載され、前記基板から突出した半導体素子と、前記基板上から突出した前記半導体素子の突出面に熱的に一方の面が接続され、他方の面がヒートパイプに熱的に接続され、前記突出面の周辺部に補強構造部を備えた受熱プレートと、前記基板と前記受熱プレートとを、前記突出面と受熱プレートが弾性力で熱的に接続された状態で固定する固定部材とを備えた、受熱部材取り付け構造体である。
The heat receiving member mounting structure of the present invention will be described with reference to the drawings.
One aspect of the heat receiving member mounting structure according to the present invention includes a substrate, a semiconductor element mounted on the substrate and protruding from the substrate, and a thermal surface on the protruding surface of the semiconductor element protruding from the substrate. And the other surface is thermally connected to a heat pipe, a heat receiving plate having a reinforcing structure around the protruding surface, the substrate and the heat receiving plate, and the protruding surface and the heat receiving plate. A heat receiving member mounting structure including a fixing member that fixes a plate in a state where the plate is thermally connected by an elastic force.

図1は、この発明の受熱部材取り付け構造体を説明する摸式断面図である。
図1に示すように、この発明の受熱部材取り付け構造体1は、基板(マザーボード)2と、小さい基板5の上に搭載された突出面(即ち、上面)を備えた半導体素子6と、補強構造部4を備えた受熱プレート3と、基板(マザーボード)2と受熱プレート3を固定する固定部材7とを備えている。即ち、基板(マザーボード)2に搭載された半導体素子6の突出面は受熱プレートの一方の面と熱的に接続される。熱抵抗を小さくするため突出面は平らに形成されている。
FIG. 1 is a schematic cross-sectional view illustrating a heat receiving member mounting structure according to the present invention.
As shown in FIG. 1, the heat receiving member mounting structure 1 of the present invention includes a substrate (motherboard) 2, a semiconductor element 6 having a protruding surface (that is, an upper surface) mounted on a small substrate 5, and a reinforcement. A heat receiving plate 3 including the structure portion 4, a substrate (motherboard) 2, and a fixing member 7 that fixes the heat receiving plate 3 are provided. That is, the protruding surface of the semiconductor element 6 mounted on the substrate (motherboard) 2 is thermally connected to one surface of the heat receiving plate. In order to reduce the thermal resistance, the protruding surface is formed flat.

受熱プレート3の突出面が熱的に接続される素子接触部分11の周辺部には、受熱プレートと別の部材で形成された補強構造部4が取り付けられている。半導体素子が熱的に接続される受熱プレートの面と反対側の面には、ヒートパイプ10の一方の端部が熱的に接続されている。   A reinforcement structure 4 formed of a member different from the heat receiving plate is attached to the periphery of the element contact portion 11 where the protruding surface of the heat receiving plate 3 is thermally connected. One end of the heat pipe 10 is thermally connected to the surface opposite to the surface of the heat receiving plate to which the semiconductor element is thermally connected.

図1に示す態様においては、2本のヒートパイプの端部が受熱プレートに熱的に接続されている。(図示しないが)ヒートパイプの他方の端部には放熱フィンが熱的に接続され、ヒートパイプによって放熱フィンに移動された熱が、放熱フィンの近傍に設けられたファンによって放熱される。ヒートパイプは、受熱プレートとの接触面を広くするために少なくとも端部が扁平化されていてもよい。   In the embodiment shown in FIG. 1, the ends of the two heat pipes are thermally connected to the heat receiving plate. A heat radiating fin is thermally connected to the other end of the heat pipe (not shown), and the heat transferred to the heat radiating fin by the heat pipe is radiated by a fan provided near the heat radiating fin. At least the end of the heat pipe may be flattened to widen the contact surface with the heat receiving plate.

例えば受熱プレートの四隅には孔部が設けられており、固定部材が孔部を挿通して、受熱プレートが基板に固定される。固定部材7は例えばネジ8およびバネ9からなっている。
受熱プレート3の下部周辺部に設けられた補強構造部4の下面と、小さな基板5との間の間隙は、上述した固定部材によって受熱プレートと基板(マザーボード)とが固定されたときに、従来技術で説明したように、受熱プレートが湾曲して受熱プレートの素子接触部分と突出面の間に空隙ができないように設定する。例えば補強構造部4の下面と小さな基板5の上面との間の間隙が、補強構造部の厚さと概ね同一であってもよい。その際には、小さな基板が補強部材を支えるので、受熱プレートの素子接触部分と突出面が密着して熱抵抗が小さくなる。
For example, holes are provided at four corners of the heat receiving plate, and a fixing member is inserted through the hole so that the heat receiving plate is fixed to the substrate. The fixing member 7 includes a screw 8 and a spring 9, for example.
The gap between the lower surface of the reinforcing structure portion 4 provided in the lower peripheral portion of the heat receiving plate 3 and the small substrate 5 is conventional when the heat receiving plate and the substrate (motherboard) are fixed by the fixing member described above. As described in the art, the heat receiving plate is set to be curved so that there is no gap between the element contact portion of the heat receiving plate and the protruding surface. For example, the gap between the lower surface of the reinforcing structure 4 and the upper surface of the small substrate 5 may be substantially the same as the thickness of the reinforcing structure. In this case, since the small substrate supports the reinforcing member, the element contact portion of the heat receiving plate and the protruding surface are in close contact with each other, and the thermal resistance is reduced.

上述したように、この態様の受熱部材取り付け構造体においては、薄い受熱プレートの周辺部に別部材の補強構造部が設けられるので、ネジおよびバネからなる固定部材によって受熱プレートと基板を固定する際に、受熱プレートと突出面を小さな熱抵抗で接続することができる。
なお、図1に示す態様では、上述したように、基板(マザーボード)2の上に小さい基板5が配置され、小さい基板から半導体素子が突出して、その上面が突出面を形成している。基板(即ち、マザーボード)の上に直接半導体素子が搭載されている場合であってもよい。更に、基板(マザーボード)の上にソケットが配置され、ソケットの上に小さい基板が配置され、小さい基板の上に半導体素子が突出して形成されていてもよい。
As described above, in the heat receiving member mounting structure according to this aspect, the reinforcing structure portion of the separate member is provided in the peripheral portion of the thin heat receiving plate. Therefore, when the heat receiving plate and the substrate are fixed by the fixing member including the screw and the spring. In addition, the heat receiving plate and the protruding surface can be connected with a small thermal resistance.
In the embodiment shown in FIG. 1, as described above, the small substrate 5 is disposed on the substrate (motherboard) 2, the semiconductor element protrudes from the small substrate, and the upper surface forms a protruding surface. It may be a case where a semiconductor element is directly mounted on a substrate (that is, a mother board). Further, a socket may be disposed on a substrate (motherboard), a small substrate may be disposed on the socket, and a semiconductor element may be formed to protrude on the small substrate.

図2(a)は、この発明の他の態様の受熱部材取り付け構造体を説明する摸式断面図である。図2(b)は、補強構造部を備えた受熱プレートの平面図および断面図である。この態様においては、図2(b)に示すように、受熱プレートの周辺部を折り曲げて重ね合わせて補強構造部を形成している。   FIG. 2A is a schematic cross-sectional view illustrating a heat receiving member mounting structure according to another embodiment of the present invention. FIG.2 (b) is the top view and sectional drawing of a heat receiving plate provided with the reinforcement structure part. In this aspect, as shown in FIG. 2 (b), the peripheral portion of the heat receiving plate is folded and overlapped to form the reinforcing structure portion.

即ち、図2(b)の左図および右図に示すように、受熱プレート3の両側端部を半導体素子側に折り曲げて重ね合わせて形成された部分3−1が補強構造部として機能する。折り曲げて重ね合わされた2つの部分3−1の間に位置する部分が半導体素子の突出面と熱的に接続される素子接触面を形成している。折り曲げられて重ね合わされた部分の端部に固定部材用の孔部12が形成されている。   That is, as shown in the left and right views of FIG. 2B, the portion 3-1 formed by folding both side ends of the heat receiving plate 3 toward the semiconductor element side functions as a reinforcing structure portion. A portion located between the two portions 3-1 that are folded and overlapped forms an element contact surface that is thermally connected to the protruding surface of the semiconductor element. A hole 12 for a fixing member is formed at the end of the folded and overlapped portion.

図2(b)を参照して説明した補強構造部を備えた受熱プレート3を使用して、受熱プレートが基板に固定される。即ち、図2(a)に示すように、この態様の受熱部材取り付け構造体1は、基板2と、小さな基板5の上に搭載された突出面を備えた半導体素子6と、周辺部を折り曲げて重ね合わせて補強構造部3−1を形成している受熱プレート3と、基板と受熱プレートを固定する固定部材7とを備えている。基板2に搭載された半導体素子6の突出面が、上述したように、折り曲げて重ね合わされた2つの部分3−1の間に位置する受熱プレートの素子接触面と熱的に接続される。   The heat receiving plate 3 is fixed to the substrate using the heat receiving plate 3 having the reinforcing structure described with reference to FIG. That is, as shown in FIG. 2 (a), the heat receiving member mounting structure 1 according to this aspect includes a substrate 2, a semiconductor element 6 provided with a projecting surface mounted on a small substrate 5, and a peripheral portion bent. And a heat receiving plate 3 that forms a reinforcing structure 3-1 by overlapping and a fixing member 7 that fixes the substrate and the heat receiving plate. As described above, the protruding surface of the semiconductor element 6 mounted on the substrate 2 is thermally connected to the element contact surface of the heat receiving plate positioned between the two portions 3-1 that are folded and overlapped.

受熱プレート3は、それ自体の側面部が折り曲げられて重ね合わされて形成された補強構造部3−1を備えているので、薄い受熱プレートの剛性が強化される。従って、固定部材であるネジを孔部に挿通してバネを介して受熱プレートを基板に固定する際に、受熱プレートにたわみが生じることなく、小さい熱抵抗で突出面と受熱プレートが熱的に接続される。一方で、受熱プレートが薄いので、薄い素子接触部が半導体素子の突出面に熱的に接続されて、受熱部材取り付け構造体としては薄型化が図れる。   Since the heat receiving plate 3 includes the reinforcing structure portion 3-1 formed by bending and overlapping the side surface portion of itself, the rigidity of the thin heat receiving plate is enhanced. Therefore, when the heat receiving plate is fixed to the substrate through the spring by inserting the screw as the fixing member through the spring, the protruding surface and the heat receiving plate are thermally heated with a small thermal resistance without causing the heat receiving plate to bend. Connected. On the other hand, since the heat receiving plate is thin, the thin element contact portion is thermally connected to the protruding surface of the semiconductor element, and the heat receiving member mounting structure can be thinned.

図3は受熱プレートの別の態様を説明する図である。図3(a)はプレス加工によって凹部を形成した受熱プレートの平面図および側面図である。図3(b)は図3(a)に示した受熱プレートの側部を折り曲げて重ね合わせた受熱プレートの平面図および側面図である。   FIG. 3 is a diagram illustrating another embodiment of the heat receiving plate. Fig.3 (a) is the top view and side view of a heat receiving plate which formed the recessed part by press work. FIG. 3B is a plan view and a side view of the heat receiving plate in which the side portions of the heat receiving plate shown in FIG.

図3(a)に示すように、プレス加工によって受熱プレート3の中央部3−2に凹部を形成する。即ち、中央部3−2の凹部の両側に平らな面3−3が形成される。中央部の凹部の裏面が半導体素子の突出面と熱的に接続される素子接触面を形成する。図3(b)に示すように、このように中央部3−2に凹部が形成された受熱プレートの両側部3−3を凹部の側に折り曲げて重ね合わせる。このように折り曲げ重ね合わせると、中央部の凹部の上面と折り曲げ重ね合わされた両側部3−3の上面とが概ね同一面を形成する。   As shown to Fig.3 (a), a recessed part is formed in the center part 3-2 of the heat receiving plate 3 by press work. That is, flat surfaces 3-3 are formed on both sides of the concave portion of the central portion 3-2. The back surface of the concave portion in the central portion forms an element contact surface that is thermally connected to the protruding surface of the semiconductor element. As shown in FIG. 3B, both side portions 3-3 of the heat receiving plate in which the concave portion is formed in the central portion 3-2 in this way are folded and overlapped to the concave portion side. When folded in this way, the upper surface of the concave portion at the center portion and the upper surfaces of the side portions 3-3 that are folded and overlapped form substantially the same surface.

図3(b)の右側の断面図に示すように、形成された受熱プレートは両側部が厚くなり、中央部の半導体素子の突出面と熱的に接続される素子接触面が薄くなっている。図示しながいが、固定部材が挿通される孔部が形成される。なお、図3では、折り曲げ方向を中央部の凹部側として説明しているが、折り曲げ方向はこれに限定されることはなく、反対側に折り曲げて重ね合わせてもよい。   As shown in the right cross-sectional view of FIG. 3B, the formed heat receiving plate is thicker at both sides, and the element contact surface that is thermally connected to the protruding surface of the semiconductor element at the center is thinner. . Although not shown, a hole through which the fixing member is inserted is formed. In FIG. 3, the bending direction is described as the concave portion side of the central portion, but the bending direction is not limited to this, and the folding direction may be folded to the opposite side and overlapped.

図4は受熱プレートの他の態様を説明する図である。図4(a)は8角形の受熱プレートの平面図である。図4(b)は図4(a)に示した受熱プレートの側部を折り曲げて重ね合わせた受熱プレートの平面図である。
図4(a)に示すように、所定形状の受熱プレートが形成できるように、8角形の受熱プレートを調製する。図4(a)に示す点線部分が折り曲げ線である。
FIG. 4 is a diagram illustrating another embodiment of the heat receiving plate. FIG. 4A is a plan view of an octagonal heat receiving plate. FIG. 4B is a plan view of the heat receiving plate in which the side portions of the heat receiving plate shown in FIG.
As shown in FIG. 4A, an octagonal heat receiving plate is prepared so that a heat receiving plate having a predetermined shape can be formed. A dotted line portion shown in FIG. 4A is a fold line.

図4(a)に示す点線部分で周辺部3−4を折り曲げて重ね合わせて、所定形状(この態様では、矩形)の受熱プレートが形成される。図4(b)に示すように、このように折り曲げ重ね合わされて形成された受熱プレート3は、中央部3−6が薄く、素子接触面になる。周辺部3−5は折り曲げ重ね合わされて中央部の概ね2倍の厚さになっている。この態様においても、隅部に固定部材が挿通される孔部が形成される。   The peripheral portion 3-4 is bent and overlapped at the dotted line portion shown in FIG. 4A to form a heat receiving plate having a predetermined shape (in this embodiment, a rectangle). As shown in FIG. 4B, the heat receiving plate 3 formed by being folded and overlapped as described above has a thin central portion 3-6 and becomes an element contact surface. The peripheral portion 3-5 is folded and overlapped to be approximately twice as thick as the central portion. Also in this aspect, a hole through which the fixing member is inserted is formed at the corner.

図5は受熱プレートの他の態様を説明する図である。図5(a)は他の態様よりも厚い受熱プレートの平面図および側面図である。図5(b)は図5(a)に示した受熱プレートの中央部を切削または鍛造等によって溝部を形成した受熱プレートの平面図および側面図である。   FIG. 5 is a diagram illustrating another embodiment of the heat receiving plate. Fig.5 (a) is the top view and side view of a heat-receiving plate thicker than another aspect. FIG. 5B is a plan view and a side view of the heat receiving plate in which a groove portion is formed by cutting or forging the central portion of the heat receiving plate shown in FIG.

図5(a)に示すように、やや厚い受熱プレートを調製する。図5(b)示すように、このように調製された受熱プレート3の中央部3−2を切削して、厚さの薄い素子接触面を形成する。即ち、この態様においては、厚い板状の受熱プレートの中央部3−2を切削して薄くし、両側部3−3はそのまま厚い部分として残す。その結果、受熱プレートの剛性を維持しつつ、半導体素子の突出面と熱的に接続する素子接触面11の厚さを薄くして、受熱部材取り付け構造体としては薄型化が図れる。この態様においても、隅部に固定部材が挿通される孔部が形成される。   A slightly thick heat receiving plate is prepared as shown in FIG. As shown in FIG. 5B, the central portion 3-2 of the heat receiving plate 3 thus prepared is cut to form a thin element contact surface. That is, in this embodiment, the central portion 3-2 of the thick plate-shaped heat receiving plate is cut and thinned, and the both side portions 3-3 are left as they are as thick portions. As a result, while maintaining the rigidity of the heat receiving plate, the thickness of the element contact surface 11 that is thermally connected to the protruding surface of the semiconductor element can be reduced, so that the heat receiving member mounting structure can be made thinner. Also in this aspect, a hole through which the fixing member is inserted is formed at the corner.

図6は受熱プレートの他の態様を説明する図である。図6(a)は受熱プレートの平面図である。図6(b)は図5(a)に示した受熱プレートの放射状に伸びる延伸部を折り曲げて重ね合わされて形成された受熱プレートの平面図である。図6(a)に示すように、矩形の部分と矩形の角部から放射状に伸びた延伸部分13とを備えた薄板状の受熱プレート3を調製する。図6(a)に示す点線に沿って4箇所の延伸部13を折り曲げ重ね合わせて、図6(b)に示すように、延伸部に沿う部分の剛性を高めた受熱プレートを形成する。この態様においては、折り曲げられ重ね合わされた延伸部の端部に固定部材が挿通される孔部12が形成される。この態様の受熱プレートにおいては、孔部12と素子接触面を結ぶ線の剛性が高められる。   FIG. 6 is a diagram illustrating another embodiment of the heat receiving plate. FIG. 6A is a plan view of the heat receiving plate. FIG. 6B is a plan view of the heat receiving plate formed by folding and overlapping the radially extending portions of the heat receiving plate shown in FIG. As shown in FIG. 6A, a thin plate-shaped heat receiving plate 3 having a rectangular portion and extending portions 13 extending radially from the corners of the rectangle is prepared. Four extending portions 13 are folded and overlapped along the dotted line shown in FIG. 6A to form a heat receiving plate with increased rigidity along the extending portion, as shown in FIG. 6B. In this aspect, a hole 12 through which the fixing member is inserted is formed at the end of the extended portion that is folded and overlapped. In the heat receiving plate of this aspect, the rigidity of the line connecting the hole 12 and the element contact surface is increased.

図7は、この発明の他の態様の受熱部材取り付け構造体を説明する摸式断面図である。この態様においては、受熱プレートの周辺部を折り曲げて重ね合わせて補強構造部3−1を形成している。なお、図1を参照して説明したように、薄い受熱プレートの周辺部に別部材の補強構造部が設けられてもよい。   FIG. 7 is a schematic cross-sectional view illustrating a heat receiving member mounting structure according to another aspect of the present invention. In this aspect, the reinforcing structure portion 3-1 is formed by bending and overlapping the peripheral portion of the heat receiving plate. Note that, as described with reference to FIG. 1, a reinforcing structure portion as a separate member may be provided around the thin heat receiving plate.

図7に示すように、受熱プレート3の両側端部を半導体素子側に折り曲げて重ね合わせて形成された部分3−1が補強構造部として機能する。折り曲げて重ね合わされた2つの部分3−1の間に位置する部分が半導体素子の突出面と熱的に接続される素子接触面を形成している。折り曲げられて重ね合わされた部分の端部に固定部材用の孔部が形成されている。   As shown in FIG. 7, a portion 3-1 formed by folding both side end portions of the heat receiving plate 3 toward the semiconductor element side and functioning as a reinforcing structure portion. A portion located between the two portions 3-1 that are folded and overlapped forms an element contact surface that is thermally connected to the protruding surface of the semiconductor element. A hole for a fixing member is formed at the end of the folded and overlapped portion.

この態様においては、固定部材7としてネジ8と弾性樹脂材9を使用する。弾性樹脂材はバネの機能をはたす。即ち、ゴムのような弾性樹脂材で形成されたワッシャーを使用する。例えば、厚さ1mmのシリコーン製のワッシャーがある。シリコーン製のワッシャーを使用すると、直径も小さくすることができる。更に、弾性樹脂材のワッシャーの代わりに皿バネを使用してもよい。皿バネの材料は金属であっても、樹脂であってもよい。
受熱部材取り付け構造体のその他の部分は、図1または図2を参照して説明したものと実質的に同一である。
In this embodiment, a screw 8 and an elastic resin material 9 are used as the fixing member 7. The elastic resin material functions as a spring. That is, a washer formed of an elastic resin material such as rubber is used. For example, there is a silicone washer having a thickness of 1 mm. If a silicone washer is used, the diameter can be reduced. Further, a disc spring may be used instead of the elastic resin washer. The material of the disc spring may be metal or resin.
Other portions of the heat receiving member mounting structure are substantially the same as those described with reference to FIG. 1 or FIG.

図8は板バネを取り付けた受熱プレートを説明する図である。図8(a)は平面図、図8(b)は断面図である。図8に示すように、受熱プレート3は、図2を参照して説明したように、両側部を折り曲げ重ね合わせて補強構造部3−1を形成し、薄い中央部が半導体素子の突出面と熱的に接続する素子接触面11を形成している。このように形成された受熱プレートの両側部に、固定部14−1および延伸部14−2からなる板バネが、例えばリベット15によって取り付けられている。即ち、剛性を保持した受熱プレートの部分(即ち、両側部)に板バネが取り付けられている。受熱プレート3の薄い素子接触面11が半導体素子の突出面と熱的に接続された状態で、延伸部14−2に設けられた孔部12に固定部材が挿通されて、受熱プレートが基板に固定される。   FIG. 8 is a view for explaining a heat receiving plate to which a leaf spring is attached. 8A is a plan view and FIG. 8B is a cross-sectional view. As shown in FIG. 8, the heat receiving plate 3 is formed with a reinforcing structure portion 3-1 by folding both side portions as described with reference to FIG. An element contact surface 11 to be thermally connected is formed. Leaf springs composed of a fixing portion 14-1 and an extending portion 14-2 are attached to both sides of the heat receiving plate formed in this way, for example, by rivets 15. That is, leaf springs are attached to the heat receiving plate portions (that is, both side portions) that retain rigidity. In a state where the thin element contact surface 11 of the heat receiving plate 3 is thermally connected to the protruding surface of the semiconductor element, the fixing member is inserted into the hole 12 provided in the extending portion 14-2, and the heat receiving plate is attached to the substrate. Fixed.

図9は板バネを取り付けた受熱プレートを説明する図である。図9(a)は平面図、図9(b)は断面図である。図9(a)に示すように、この態様においては、14−1固定部および延伸部14−2からなる2つの板バネが連結部14−3によって連結されて一体化されている。このように連結されて一体化された板バネのそれぞれの固定部14−1が、例えばリベット15によって受熱プレート3に取り付けられている。受熱プレートは薄い板状からなっているが、連結され一体化された板バネによってその剛性が補強されている。   FIG. 9 is a view for explaining a heat receiving plate to which a leaf spring is attached. FIG. 9A is a plan view, and FIG. 9B is a cross-sectional view. As shown in FIG. 9 (a), in this aspect, two leaf springs comprising a 14-1 fixing portion and an extending portion 14-2 are connected and integrated by a connecting portion 14-3. The fixed portions 14-1 of the leaf springs connected and integrated in this way are attached to the heat receiving plate 3 by rivets 15, for example. Although the heat receiving plate has a thin plate shape, its rigidity is reinforced by a connected and integrated leaf spring.

なお、2つの板バネを連結部によって連結されて一体化しないで、別々の板バネを図8に示すように受熱プレートの両側部に取り付けて、さらに図9(b)に示すように、板バネの固定部を曲げて、符号16で示すように薄板状の受熱プレートを挟みリベットで固定して、受熱プレートの剛性を補強してもよい。   It should be noted that the two leaf springs are not connected and integrated by the connecting portion, but separate leaf springs are attached to both sides of the heat receiving plate as shown in FIG. 8, and further, as shown in FIG. The rigidity of the heat receiving plate may be reinforced by bending the fixing portion of the spring and sandwiching and fixing the thin heat receiving plate with a rivet as indicated by reference numeral 16.

図10は板バネを取り付けた他の受熱プレートを説明する図である。図10に示す態様においては、受熱プレートのヒートパイプが熱的に接続される側の面にも補強材が取り付けられている。図8を参照して説明したように、受熱プレート3は、両側部を折り曲げ重ね合わせて補強構造部3−1を形成し、薄い中央部が半導体素子の突出面と熱的に接続する素子接触面11を形成している。このように形成された受熱プレート3の両側部に、別の補強材17を介して、固定部14−1および延伸部14−2からなる板バネが、例えばリベット15によって取り付けられている。板バネは通常のバネ等と比べて厚さが薄いので、上述した別の補強材を使用しても、受熱部材取り付け構造体の薄型化が可能である。図10(a)に示すように、2つの板バネの間にヒートパイプが熱的に接続される。   FIG. 10 is a view for explaining another heat receiving plate to which a leaf spring is attached. In the embodiment shown in FIG. 10, the reinforcing material is also attached to the surface of the heat receiving plate on the side where the heat pipe is thermally connected. As described with reference to FIG. 8, the heat receiving plate 3 is formed with a reinforcing structure portion 3-1 by bending both sides thereof, and the element contact where the thin central portion is thermally connected to the protruding surface of the semiconductor element. Surface 11 is formed. A leaf spring composed of a fixing portion 14-1 and an extending portion 14-2 is attached to both side portions of the heat receiving plate 3 formed in this way via another reinforcing member 17 by, for example, rivets 15. Since the leaf spring is thinner than a normal spring or the like, the heat receiving member mounting structure can be thinned even if another reinforcing material described above is used. As shown in FIG. 10A, a heat pipe is thermally connected between two leaf springs.

図11は、板バネを取り付けた他の受熱プレートを説明する図である。図11に示す態様においては、図10を参照して説明したように、受熱プレートのヒートパイプが熱的に接続される側の面にも補強材が取り付けられている。即ち、受熱プレート3は、両側部を折り曲げ重ね合わせて補強構造部3−1を形成し、薄い中央部が半導体素子の突出面と熱的に接続する素子接触面11を形成している。このように形成された受熱プレート3の両側部に、別の補強材17を介して、固定部14−1および延伸部14−2からなる板バネが、例えばリベット15によって取り付けられている。この態様においては、更に、ヒートパイプ間にも補強材が取り付けられて、受熱プレートの剛性がより一層補強される。即ち、図11(c)に示すように、2つのヒートパイプ10の間に補強材18が設けられている。   FIG. 11 is a diagram for explaining another heat receiving plate to which a leaf spring is attached. In the embodiment shown in FIG. 11, as described with reference to FIG. 10, the reinforcing material is also attached to the surface of the heat receiving plate where the heat pipe is thermally connected. That is, the heat receiving plate 3 forms a reinforcing structure portion 3-1 by bending both sides thereof, and a thin central portion forms an element contact surface 11 that is thermally connected to the protruding surface of the semiconductor element. A leaf spring composed of a fixing portion 14-1 and an extending portion 14-2 is attached to both side portions of the heat receiving plate 3 formed in this way via another reinforcing member 17 by, for example, rivets 15. In this aspect, a reinforcing material is further attached between the heat pipes, and the rigidity of the heat receiving plate is further reinforced. That is, as shown in FIG. 11 (c), the reinforcing material 18 is provided between the two heat pipes 10.

なお、バネには円錐バネを使用してもよい。円錐バネは全体が同一面に位置するまで薄型化ができる。
補強材は、必要に応じて受熱プレートと異なる材質を使用してもよい。例えば、銅の受熱プレートにニッケルめっきした鋼材を補強材として使用することができる。
A conical spring may be used as the spring. The conical spring can be thinned until it is entirely located on the same plane.
The reinforcing material may be made of a material different from that of the heat receiving plate, if necessary. For example, a steel material obtained by nickel-plating a copper heat receiving plate can be used as a reinforcing material.

上述したように、この発明の受熱部材取り付け構造体によると、薄い受熱プレートの周辺部に別部材の補強構造部が設けられるので、固定部材によって受熱プレートと基板を固定する際に、受熱プレートと突出面を小さな熱抵抗で接続することができ、受熱部材およびヒートシンクを薄型化することができる。   As described above, according to the heat receiving member mounting structure of the present invention, the reinforcing structure portion of the separate member is provided in the peripheral portion of the thin heat receiving plate, so when the heat receiving plate and the substrate are fixed by the fixing member, The protruding surfaces can be connected with a small thermal resistance, and the heat receiving member and the heat sink can be thinned.

図1は、この発明の受熱部材取り付け構造体を説明する摸式断面図である。FIG. 1 is a schematic cross-sectional view illustrating a heat receiving member mounting structure according to the present invention. 図2(a)は、この発明の他の態様の受熱部材取り付け構造体を説明する摸式断面図である。図2(b)は、補強構造部を備えた受熱プレートの平面図および断面図である。FIG. 2A is a schematic cross-sectional view illustrating a heat receiving member mounting structure according to another embodiment of the present invention. FIG.2 (b) is the top view and sectional drawing of a heat receiving plate provided with the reinforcement structure part. 図3は受熱プレートの別の態様を説明する図である。図3(a)はプレス加工によって凹部を形成した受熱プレートの平面図および側面図である。図3(b)は図3(a)に示した受熱プレートの側部を折り曲げて重ね合わせた受熱プレートの平面図および側面図である。FIG. 3 is a diagram illustrating another embodiment of the heat receiving plate. Fig.3 (a) is the top view and side view of a heat receiving plate which formed the recessed part by press work. FIG. 3B is a plan view and a side view of the heat receiving plate in which the side portions of the heat receiving plate shown in FIG. 図4は受熱プレートの他の態様を説明する図である。図4(a)は8角形の受熱プレートの平面図である。図4(b)は図4(a)に示した受熱プレートの側部を折り曲げて重ね合わせた受熱プレートの平面図である。FIG. 4 is a diagram illustrating another embodiment of the heat receiving plate. FIG. 4A is a plan view of an octagonal heat receiving plate. FIG. 4B is a plan view of the heat receiving plate in which the side portions of the heat receiving plate shown in FIG. 図5は受熱プレートの他の態様を説明する図である。図5(a)は他の態様よりも厚い受熱プレートの平面図および側面図である。図5(b)は図5(a)に示した受熱プレートの中央部を切削または鍛造等によって溝部を形成した受熱プレートの平面図および側面図である。FIG. 5 is a diagram illustrating another embodiment of the heat receiving plate. Fig.5 (a) is the top view and side view of a heat-receiving plate thicker than another aspect. FIG. 5B is a plan view and a side view of the heat receiving plate in which a groove portion is formed by cutting or forging the central portion of the heat receiving plate shown in FIG. 図6は受熱プレートの他の態様を説明する図である。図6(a)は受熱プレートの平面図である。図6(b)は図5(a)に示した受熱プレートの放射状に伸びる延伸部を折り曲げて重ね合わされて形成された受熱プレートの平面図である。FIG. 6 is a diagram illustrating another embodiment of the heat receiving plate. FIG. 6A is a plan view of the heat receiving plate. FIG. 6B is a plan view of the heat receiving plate formed by folding and overlapping the radially extending portions of the heat receiving plate shown in FIG. 図7は、この発明の他の態様の受熱部材取り付け構造体を説明する摸式断面図である。FIG. 7 is a schematic cross-sectional view illustrating a heat receiving member mounting structure according to another aspect of the present invention. 図8は板バネを取り付けた受熱プレートを説明する図である。図8(a)は平面図、図8(b)は断面図である。FIG. 8 is a view for explaining a heat receiving plate to which a leaf spring is attached. 8A is a plan view and FIG. 8B is a cross-sectional view. 図9は板バネを取り付けた受熱プレートを説明する図である。図9(a)は平面図、図9(b)は断面図である。FIG. 9 is a view for explaining a heat receiving plate to which a leaf spring is attached. FIG. 9A is a plan view, and FIG. 9B is a cross-sectional view. 図10は板バネを取り付けた他の受熱プレートを説明する図である。FIG. 10 is a view for explaining another heat receiving plate to which a leaf spring is attached. 図11は、板バネを取り付けた他の受熱プレートを説明する図である。FIG. 11 is a diagram for explaining another heat receiving plate to which a leaf spring is attached. 図12は従来のヒートシンクを説明する摸式図である。FIG. 12 is a schematic diagram for explaining a conventional heat sink.

符号の説明Explanation of symbols

1 受熱部材取り付け構造体
2 基板(マザーボード)
3 受熱プレート
4 補強構造部
5 小さな基板
6 半導体素子
7 固定部材
8 ネジ
9 バネ
10 ヒートパイプ
11 素子接触面
12 孔部
13 延伸部
14 板バネ
15 リベット
16 補強部
17 補強材
18 補強材
1 Heat receiving member mounting structure 2 Board (motherboard)
3 Heat receiving plate 4 Reinforcement structure 5 Small substrate 6 Semiconductor element 7 Fixing member 8 Screw 9 Spring 10 Heat pipe 11 Element contact surface 12 Hole 13 Extension part 14 Leaf spring 15 Rivet 16 Reinforcement 17 Reinforcement 18 Reinforcement

Claims (13)

基板と、
基板の上に搭載され、前記基板から突出した半導体素子と、
前記基板上から突出した前記半導体素子の突出面に熱的に一方の面が接続され、他方の面がヒートパイプに熱的に接続され、前記突出面の周辺部に補強構造部を備えた受熱プレートと、
前記基板と前記受熱プレートとを、前記突出面と受熱プレートが弾性力で熱的に接続された状態で固定する固定部材とを備えた、受熱部材取り付け構造体。
A substrate,
A semiconductor element mounted on the substrate and protruding from the substrate;
One surface is thermally connected to the projecting surface of the semiconductor element projecting from the substrate, the other surface is thermally connected to a heat pipe, and a heat receiving unit is provided with a reinforcing structure around the projecting surface. Plates,
A heat receiving member mounting structure comprising: a fixing member that fixes the substrate and the heat receiving plate in a state where the protruding surface and the heat receiving plate are thermally connected by an elastic force.
前記補強構造部は、前記受熱プレートの周辺部を折り曲げて重ね合わせて形成されている、請求項1に記載の受熱部材取り付け構造体。   2. The heat receiving member mounting structure according to claim 1, wherein the reinforcing structure portion is formed by bending and overlapping a peripheral portion of the heat receiving plate. 前記受熱プレートの周辺部を前記半導体素子側に折り曲げる、請求項2に記載の受熱部材取り付け構造体。   The heat receiving member mounting structure according to claim 2, wherein a peripheral portion of the heat receiving plate is bent toward the semiconductor element. 前記受熱プレートにプレス加工を施して前記突出面に対応する凹部を形成し、前記凹部側に折り曲げる請求項2に記載の受熱部材取り付け構造体。   The heat receiving member mounting structure according to claim 2, wherein the heat receiving plate is pressed to form a recess corresponding to the protruding surface, and the heat receiving plate is bent toward the recess. 前記受熱プレートの前記補強構造部は、前記受熱プレートが多角形のプレートの周辺部を前記半導体素子側に折り曲げて重ね合わせて形成されている、請求項1に記載の受熱部材取り付け構造体。   2. The heat receiving member mounting structure according to claim 1, wherein the reinforcing structure portion of the heat receiving plate is formed by overlapping the heat receiving plate by bending a peripheral portion of a polygonal plate toward the semiconductor element. 前記受熱プレートが前記突出面に対応する矩形の素子接触部分と、前記素子接触部分の各角部から放射状に延びる延伸部からなっており、前記補強構造部が前記延伸部を折り曲げて重ね合わせて形成されている、請求項1に記載の受熱部材取り付け構造体。   The heat receiving plate includes a rectangular element contact portion corresponding to the projecting surface and extending portions extending radially from each corner of the element contact portion, and the reinforcing structure portion folds and extends the extending portion. The heat receiving member attachment structure according to claim 1, wherein the heat receiving member attachment structure is formed. 前記補強構造部が、前記受熱プレートと異なる別の材料によって形成され、前記受熱プレートに取り付けられて形成されている、請求項1に記載の受熱部材取り付け構造体。   The heat receiving member mounting structure according to claim 1, wherein the reinforcing structure portion is formed of another material different from the heat receiving plate and is attached to the heat receiving plate. 前記受熱プレートの前記突出面に対応する位置に切削または鍛造によって溝部を形成し、前記溝部の周辺部が前記補強構造部を形成する、請求項1に記載の受熱部材取り付け構造体。   The heat receiving member mounting structure according to claim 1, wherein a groove portion is formed by cutting or forging at a position corresponding to the protruding surface of the heat receiving plate, and a peripheral portion of the groove portion forms the reinforcing structure portion. 前記固定部材がネジおよびバネからなっており、前記受熱プレートがバネを介して前記基板にネジ止めされる、請求項1から8の何れか1項に記載の受熱部材取り付け構造体。   The heat receiving member mounting structure according to any one of claims 1 to 8, wherein the fixing member includes a screw and a spring, and the heat receiving plate is screwed to the substrate via the spring. 前記バネが固定部および延伸部を備えた複数の板バネからなっており、前記固定部のそれぞれが前記受熱プレートに固定され、前記延伸部のそれぞれを介してネジ止めされる、請求項9に記載の受熱部材取り付け構造体。   The spring includes a plurality of leaf springs each having a fixing portion and an extending portion, and each of the fixing portions is fixed to the heat receiving plate and is screwed through each of the extending portions. The heat receiving member mounting structure according to the description. 前記バネが固定部および延伸部を備えた複数の板バネの前記固定部を連結した単一部材からなっており、前記固定部がそれぞれ前記受熱プレートに固定され、前記延伸部を介してネジ止めされる、請求項9に記載の受熱部材取り付け構造体。   The spring is composed of a single member that connects the fixing portions of a plurality of leaf springs each having a fixing portion and an extending portion, and the fixing portions are respectively fixed to the heat receiving plate and screwed through the extending portion. The heat-receiving member attachment structure according to claim 9. 前記板バネが取り付けられる側に更に補強部材を備えている、請求項10または11に記載の受熱部材取り付け構造体。   The heat receiving member mounting structure according to claim 10 or 11, further comprising a reinforcing member on a side on which the leaf spring is mounted. 前記ヒートパイプが複数のヒートパイプからなっており、前記ヒートパイプの間に別の補強部材を備えている、請求項1から12の何れか1項に記載の受熱部材取り付け構造体。   The heat receiving member mounting structure according to any one of claims 1 to 12, wherein the heat pipe includes a plurality of heat pipes, and another reinforcing member is provided between the heat pipes.
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JP2014086434A (en) * 2012-10-19 2014-05-12 Mitsubishi Electric Corp Semiconductor device
JP2016213314A (en) * 2015-05-08 2016-12-15 富士通株式会社 Cooling module and electronic device
JP2018056350A (en) * 2016-09-29 2018-04-05 富士通株式会社 Heat radiation component and terminal apparatus including heat radiation component

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JP2001119182A (en) * 1999-10-19 2001-04-27 Nec Corp Fixing structure for heat sink
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JP2005505927A (en) * 2001-10-10 2005-02-24 アービッド・サーマロイ・エルエルシー Heat collector with mounting plate

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