JP4416621B2 - Method for polishing surface of electrophotographic photosensitive member and method for producing electrophotographic photosensitive member - Google Patents

Description

The present invention is an electrophotographic photosensitive member (hereinafter referred to as “a-Si photosensitive member”) having an amorphous silicon photoconductive layer that can be applied to an image forming apparatus using an electrophotographic process such as a copying machine, a printer, or a fax machine. If also.) it relates to the preparation how the polishing method and the electrophotographic photosensitive member the surface of the.

  Conventionally, regarding an electrophotographic photosensitive member, an electrophotographic photosensitive member manufacturing method in which the layer thickness unevenness of the surface of the electrophotographic photosensitive member is controlled, and an electrophotographic photosensitive member for the purpose of improving the cleaning property and preventing an image from flowing under a high humidity environment. Proposals have been made for a method for producing an electrophotographic photosensitive member using a polishing technique such as a technique for defining a fine surface shape.

In particular, there is disclosed a polishing technique for removing unevenness of the layer thickness on the surface of an electrophotographic photosensitive member on the order of 10 ⁻¹⁰ m by bringing a polishing tape into pressure contact with the electrophotographic photosensitive member having a SiC layer on the surface. (See Patent Document 1).

Also disclosed is a method for producing an electrophotographic photoreceptor in which the surface roughness in the range of 10 μm × 10 μm is controlled by a polishing means (see Patent Document 2).
Japanese Patent Publication No. 07-77702 JP 2002-40697 A

  However, the above-described conventional method for producing an electrophotographic photosensitive member using an abrasive tape has the following problems.

  First, when the surface of the a-Si photosensitive member is polished by press-contacting the polishing tape, the role of the adhesive for fixing the abrasive grains by the frictional heat on the rubbing surface between the polishing tape and the a-Si photosensitive member. In some cases, the resin component fulfilling the above is transferred from the polishing tape to the a-Si photoconductor. In an electrophotographic apparatus, when an electrophotographic photosensitive member to which such a resin component is attached is used, a decrease in surface resistance due to the adsorption of moisture on the surface of the electrophotographic photosensitive member due to the influence of the resin component in a high humidity environment and accompanying this In some cases, an image flow (high humidity flow) occurs. In addition, when the resin component is transferred to the surface of the electrophotographic photosensitive member, the polishing residue generated during polishing is mixed and adhered into the resin component, so that the surface of the electrophotographic photosensitive member and the cleaning blade are included in the image forming process. Due to an increase in torque due to an increase in frictional resistance and damage to the cleaning blade due to polishing residue, cleaning failure may occur.

  On the contrary, in order to suppress the transfer of the resin component to the electrophotographic photosensitive member, a polishing tape using a resin having a high Tg (glass transition temperature) is used, or the rubbing surface is cooled. When the above method is used, the amount of deformation of the polishing tape decreases, and therefore the polishing rate may decrease due to the decrease in the contact area between the electrophotographic photosensitive member and the polishing tape, and the polishing process time may increase.

  In addition, if the polishing process with the polishing tape is performed for a long time, large polishing residues and dust adhering to the surface that are likely to occur when polishing abnormally grown portions existing on the surface of the electrophotographic photosensitive member are separated from the electrophotographic photosensitive member and the polishing tape. In some cases, the surface of the electrophotographic photosensitive member may be damaged by polishing because the probability of being sandwiched between the polished surfaces increases.

  In addition, the used abrasive tape is difficult to recycle because the abrasive grains fall off, the resin component is pressurized and deformed by heating, and a large amount of abrasive tape is used in the polishing process. Polishing the surface of the photographic photoreceptor has hindered cost reduction of the product.

  Furthermore, the surface of the electrophotographic photosensitive member has minute irregularities, and the convex portions are selectively polished by polishing such a surface with a polishing tape, thereby producing a flat polished surface. For this reason, even if the abrasive grains were changed, a good fine uneven shape on the surface of the electrophotographic photosensitive member was not necessarily obtained. Furthermore, since the polishing surface by the polishing tape becomes flat, the pressure per unit applied from the pressure elastic roller decreases as polishing proceeds. As a result, the polishing rate decreases as the polishing time increases, and thus it may take a long time to achieve the target surface shape.

  Furthermore, in order to realize stable polishing with the polishing tape, a polishing apparatus capable of stable polishing is essential. The pressure in the longitudinal direction of the electrophotographic photosensitive member, the uniformity of the tension of the polishing tape, and the rotation In addition to the high accuracy required for the design of the center change, the improvement of productivity due to the miniaturization of the polishing apparatus and the like is also required. Therefore, it is very difficult to design a polishing apparatus that satisfies the requirements.

SUMMARY OF THE INVENTION An object of the present invention is to provide a method for polishing the surface of an electrophotographic photosensitive member that can solve at least one of the above-described problems that may occur by polishing using a polishing tape. .

In order to achieve the above object, a method for polishing a surface of an electrophotographic photoreceptor of the present invention comprises a substrate and a photoconductive layer formed on the substrate, and the photoconductive layer is composed of an amorphous material. In the method of polishing a surface of an electrophotographic photosensitive member, an abrasive tape having an abrasive grain and a resin component that is an adhesive for fixing the abrasive grain is brought into pressure contact with the surface of the electrophotographic photosensitive member, thereby A polishing step (i) for polishing the surface of the photoreceptor, and after the polishing step (i), a magnetic powder adhering to the outer peripheral surface of the magnetic roller by a magnetic force is brought into contact with the surface of the electrophotographic photoreceptor. the magnetic roller is rotated, have a polishing step of polishing the surface of the electrophotographic photosensitive member (ii), the time required for the polishing step (i) is less than 40% of the time required for the entire grinding process It is characterized by being.

  According to the present invention, the surface of the electrophotographic photosensitive member is polished by the magnetic powder having the magnetic powder adhering to the outer peripheral surface of the magnetic roller by a magnetic force. It is possible to reduce the above-mentioned problems.

Further, after the polishing by Migaku Ken tape, when performing polishing using magnetic powder, the transfer resin component from the polishing tape on the electrophotographic photosensitive member because it can be removed by polishing with magnetic powder, by using only polishing tape Problems that may occur compared to the case where polishing is performed can be reduced.

  Next, embodiments of the present invention will be described with reference to the drawings.

[Electrophotographic photoconductor surface polishing equipment]
FIG. 1A is a schematic cross-sectional view showing a polishing apparatus for polishing the surface of an electrophotographic photosensitive member with magnetic powder on a magnetic roller according to an embodiment of the present invention, and FIG. These are typical schematic sectional drawings which show the detail of the principal part of Fig.1 (a).

  The polishing apparatus shown in FIG. 1A has a magnet roller 102 that is a magnetic roller having a magnetic body therein. The magnet roller 102 is accommodated in the magnet roller container 104. The magnet roller 102 is covered with a magnetic powder 103 attached to the surface by magnetic force. The electrophotographic photosensitive member 101 and the magnet roller 102 are connected to a rotation mechanism (not shown) and can rotate. The magnet roller container 104 is fixed to the movable table 107. The movable table 107 is moved on the base 109 to a position where the magnetic powder 103 on the surface of the magnet roller 102 is in contact with the electrophotographic photosensitive member (a-Si photosensitive member) 101 in a direction approaching the electrophotographic photosensitive member 101 by the moving mechanism 108. To move. This polishing apparatus polishes the surface of the electrophotographic photosensitive member 101 with the magnetic powder 103 by bringing the magnetic powder 103 into contact with the electrophotographic photosensitive member 101 in this manner.

  The magnetic powder 103 is formed in a brush shape by a magnetic body inside the magnet roller 102. By polishing the surface of the electrophotographic photosensitive member 101 with the brush-like magnetic powder 103, the polishing residue generated during polishing and the dust adhering before and during polishing are removed from the polishing surface, thereby causing polishing scratches. Can be suppressed.

  The magnetic body inside the magnet roller 102 is formed by forming a metal such as a normal ferrite magnet or a magnetic body such as a plastic magnet into a cylindrical shape, and forms a good brush-like magnetic powder on the magnet roller. It is preferable to use a multipolar magnetic material.

  In addition, when a magnetic material having a low magnetic flux line density is used, the flowability of the head of the magnetic powder 103 generated on the surface of the magnet roller 102 is increased, so that the surface of the electrophotographic photosensitive member 101 has a fine shape. It becomes easy to selectively enter the concave portion, and the fine shape after polishing becomes a round shape. On the other hand, when a magnetic material with a high magnetic flux line density is used, the fluidity of the head portion is reduced, so that the high convex portion is easily polished in the fine shape, and the fine shape after polishing is The convex portion has a flattened shape. Therefore, the magnetic flux line density of the magnetic material needs to be appropriately selected depending on the shape of the surface of the electrophotographic photosensitive member 101. However, if the magnetic flux line density is too low, the magnetic powder 103 is maintained on the surface of the magnet roller 102. Since it becomes impossible to do so, it is preferable to use a magnetic material that can be 300 G (Gauss) or more on the surface of the magnet roller 102.

  As shown in FIG. 1B, the layer thickness of the magnetic powder 103 covering the surface of the magnet roller 102 is controlled by the interval (SB distance) between the magnet roller 102 and the plate-like magnetic body regulating blade 105. The nip width of the magnetic powder layer on the electrophotographic photosensitive member 101 (the width in the circumferential direction of the electrophotographic photosensitive member 101 at the contact portion between the electrophotographic photosensitive member 101 and the magnetic powder 103) is determined by the polishing rate or after polishing. Since the shape is affected, stable and reproducible polishing is possible by stably controlling the nip width. As the nip width control means, the polishing apparatus of FIG. 1 can be easily realized by controlling the SB distance and the SD distance that is the distance between the electrophotographic photosensitive member 101 and the magnet roller 102. In the polishing apparatus shown in FIG. 1, the SD distance can be easily adjusted by the micrometer 106 connected to the magnet roller container 104. When the nip width is widened, the polishing rate increases, and when it is narrowed, the polishing rate decreases. Therefore, the SB distance and the SD distance must be appropriately selected. From the viewpoint of preventing the contact between the magnet roller 102 and the electrophotographic photosensitive member 101, the SB distance and the SD distance are preferably set to 100 μm or more. On the other hand, the polishing rate is saturated when the nip width is widened, so the SB distance is 1500 μm. The following is preferable.

  As described above, the outer periphery of the magnet roller 102 is covered with the magnetic powder 103 attached by the magnetic force of the magnetic material included in the magnet roller 102. As the magnetic powder 103, it is generally possible to use a magnetic powder such as ferrite or magnetite, or a known magnetic toner carrier. If the surface of the magnetic powder 103 is coated with a resin film or the like, the friction between the electrophotographic photosensitive member 101 and the magnetic powder 103 is reduced and the polishing rate is reduced. It is preferable to use magnetic powder that is not coated with a film or the like.

  The shape of the magnetic powder 103 is roughly divided into a spherical magnetic powder such as a sintered body and an irregular magnetic powder such as a pulverized sintered body. The amorphous magnetic powder has a higher polishing rate because the frictional resistance between the surface of the electrophotographic photosensitive member 101 and the magnetic powder 103 is larger than the spherical magnetic powder. For this reason, the shape of the magnetic powder 103 needs to be appropriately selected according to the polishing rate and the like.

  Furthermore, the particle size of the magnetic powder 103 needs to be appropriately selected depending on the surface shape of the electrophotographic photoreceptor 101 before polishing, the target surface shape after polishing, and the like. This will be described with reference to FIGS.

  2, 4 and 6 are views showing an example of an AFM image obtained by observing the surface of the electrophotographic photosensitive member with a 10 μm × 10 μm field of view. In the AFM image of FIG. 2, a crest having a width of about 1 to 2 μm and a trough having a width of about sub μm can be seen. When the surface of the a-Si photosensitive member 101 having such a fine surface shape is polished with a magnetic powder 103 having a relatively small particle size distribution (about 0.3 to 1 μm) as shown in FIG. Since the particle diameter of the magnetic powder 103 is smaller than the width of the valley portion, the valley portion can also be polished. Therefore, the surface shape of the a-Si photosensitive member 101 after the polishing is rounded as shown in the AFM image of FIG. It becomes a shape.

  Conversely, when the surface of the a-Si photosensitive member 101 is polished with the magnetic powder 103 having a relatively large particle size distribution (about 10 to 60 μm) as shown in FIG. Is larger than the width of the valley, and the magnetic powder 103 does not enter the valley, so that the peak is selectively polished. Therefore, the surface shape of the a-Si photosensitive member 101 after polishing has a flat shape as shown in the AFM image of FIG. Therefore, it is necessary to appropriately select the particle size of the magnetic powder according to the surface shape of the electrophotographic photosensitive member 101 before polishing, the target surface shape after polishing, and the like. From the viewpoint of reducing, it is preferable to use the magnetic powder 103 having a particle size of 100 μm or less.

  The polishing apparatus of this embodiment can uniformly polish the outer peripheral surface of the electrophotographic photosensitive member 101 by rotating the electrophotographic photosensitive member 101 and polishing the surface when polishing with the magnetic powder 103. It is. The rotational speed of the electrophotographic photosensitive member 101 at this time tends to selectively polish fine recesses on the surface of the electrophotographic photosensitive member 101 and lower the polishing rate when the rotational speed is lowered. Since the convex portion is easily polished and the polishing rate tends to be improved as it is raised, it is necessary to select appropriately depending on the surface shape, polishing rate, and polishing amount of the electrophotographic photoreceptor 101 before and after polishing. In order to perform the polished, it is preferable to set to 10 to 500 rpm.

  Further, when the surface of the electrophotographic photosensitive member 101 is polished, it is possible to perform stable polishing by constantly replacing the magnetic powder 103 adsorbed on the magnet roller 102, so that the magnet roller 102 is also rotated. It is preferable. At this time, at the position where the surface of the electrophotographic photosensitive member 101 and the magnetic powder 103 are in contact, the rotation direction of the electrophotographic photosensitive member 101 and the rotation direction of the magnet roller 102 are opposite to each other than the same direction. Since the polishing rate is improved, the rotation direction of the magnet roller 102 is preferably opposite to the rotation direction of the electrophotographic photosensitive member 101 as shown in FIG.

  FIG. 7 is a view showing a modification of the polishing apparatus of the present embodiment. In order to further improve the polishing rate, a plurality of polishing units are provided for one electrophotographic photosensitive member 201 as shown in FIG. 7, and the surface of the electrophotographic photosensitive member 201 is polished by a plurality of magnet rollers 202. It is valid. By using two magnet rollers 202 as in the polishing apparatus of FIG. 7, a polishing rate approximately twice that of the polishing apparatus of FIG. 1 can be obtained, and the shape after polishing is polished by the polishing apparatus shown in FIG. A surface shape equivalent to that obtained is obtained.

  In addition, since each structure of the grinding | polishing apparatus shown with reference to 201-209 in FIG. 7 is the same as each structure shown with reference to 101-109 in FIG. 1, the detailed description regarding them is abbreviate | omitted.

  However, in the polishing apparatus shown in FIG. 7, in order to obtain the target surface shape after polishing, the material, shape, particle size distribution and particle size of the magnetic powder 203 used in each of the two polishing units, the magnet roller One or more parameters such as the magnetic body and magnetic flux line density in 202, the rotational speed of the magnet roller 202 and the electrophotographic photosensitive member 201, the SD distance, and the SB distance are set to different values, and the electrophotographic photosensitive member 101 The surface may be polished.

  FIG. 8 is a schematic cross-sectional view schematically showing another modification of the polishing apparatus of the present embodiment. The polishing apparatus shown in FIG. 8 has a polishing unit using magnetic powder 303 and a polishing unit using polishing tape 310. The polishing units (reference numerals 302 to 309) using the magnetic powder 303 are the same as those of the polishing apparatus shown in FIGS. 1 and 7, and therefore the description of the polishing unit is omitted here and the polishing tape 310 is used. The polishing unit will be described.

  The polishing unit using the polishing tape 310 has a pressure elastic roller container 312 to which a pressure elastic roller 311 as a pressure contact member is connected. The polishing tape 310 is controlled in its feed amount by a fixed feed roller 314 and a capstan roller 315 connected to a rotation mechanism (not shown), and the polishing tape 310 fed from the feed roll 316 is transported by the conveyance path support bar 313. It is the structure wound up by the winding roll 317 via. The pressure elastic roller container 312 is configured to perform polishing by pressing the polishing tape 310 against the surface of the electrophotographic photosensitive member 301 by moving in the direction of the electrophotographic photosensitive member 301 by the moving mechanism 318. . As in the polishing apparatus shown in FIG. 8, by using a magnet roller 302 having a magnetic powder 303 and the polishing tape 310 in combination, the electrophotography can be performed in a wider range than polishing with only the magnetic powder 303. The surface shape of the photoreceptor 301 can be changed.

  In the polishing apparatus shown in FIG. 8, one polishing unit using the magnetic powder 303 and one polishing unit using the polishing tape 310 are installed one by one. What is necessary is just to determine suitably by the shape etc. of the surface of the target electrophotographic photoreceptor.

The abrasive tape 310 is preferably a so-called lapping tape, and the abrasive grains contained in the abrasive tape 310 are silicon carbide (SiC), aluminum oxide (Al ₂ O ₃ ), α-iron oxide (Fe ₂ O ₃ ), chromium oxide ( Cr ₂ O ₃ ), diamond (C), silica (SiO ₂ ), barium carbonate (BaCO ₃ ) and the like are used. Further, if the abrasive grain size is too fine, the polishing rate decreases, and if it is too coarse, the processing damage to the surface of the electrophotographic photosensitive member 301 increases, so 0.1 to 100 μm, more preferably 1 to 40 μm. Is preferred.

  For the polishing tape 310, generally well-known coating methods such as a doctor blade (knife edge) coating method, a dip coating method, an air knife coating method, a curtain coating method, a wire bar coating method, a gravure coating method, and an extrusion coating method are used. It is possible to apply an adhesive containing abrasive grains.

  The feed rate of the polishing tape may be appropriately determined in consideration of the polishing rate, polishing scratches, processing cost, heat generated by friction, etc., but is preferably 1 to 300 mm / min, more preferably 10 to 100 mm / min.

  The pressure elastic roller 311 is created by forming rubber as a flexible member on a cored bar. Examples of the material used for the rubber include neoprene (registered trademark) rubber and silicone rubber. As the JIS rubber hardness increases, the polishing rate improves, but gradually saturates. Therefore, it is preferable to use the pressure elastic roller 311 having a JIS rubber hardness of about 20 to 90.

  In addition, the shape of the pressure elastic roller 311 is preferably such that the diameter of the central part is larger than that of both ends in order to perform uniform processing in the generatrix direction of the photoreceptor 301, and the diameter difference is 0.01 to 0.6 mm. Is preferably 0.02 to 0.4 mm.

Further, when the electrophotographic photosensitive member 301 is polished, the pressing pressure of the pressure elastic roller 311 to the rotating electrophotographic photosensitive member 301 is 9.8 × 10 ^{3 to} 2.0 × 10 ⁶ N / m ² . It is preferable to make it 4.9 × 10 ^{4 to} 9.8 × 10 ⁵ N / m ² . If the pressing pressure is too low, the polishing rate is lowered. On the other hand, if the pressing pressure is too high, a large amount of the resin component of the polishing tape 310 is transferred to the surface of the electrophotographic photosensitive member 301 due to heat generated on the polishing surface. is there.

  In order to prevent transfer of the resin component of the polishing tape 310 to the electrophotographic photosensitive member 301 due to frictional heat and dropping off of the abrasive grains from the polishing tape 310 on the polishing surface where the electrophotographic photosensitive member 301 and the polishing tape 310 are in contact with each other. It is preferable to cool the surface with water or cold air. As a method for cooling the polishing surface, the polishing surface may be directly cooled, a cooling means may be brought into contact with the surface of the pressure elastic roller, or the inside of the electrophotographic photosensitive member 301 may be cooled.

  When both a polishing unit using the magnetic powder 303 and a polishing unit using the polishing tape 310 are provided as in the polishing apparatus shown in FIG. 8, the polishing tape 310 is used after polishing with the magnetic powder 303. Polishing may be performed, or conversely, polishing may be performed with the magnetic powder 303 after polishing with the polishing tape 310, and further, polishing may be performed simultaneously with the magnetic powder 303 and the polishing tape 310. May be.

  Further, as in the polishing apparatus shown in FIGS. 1 and 9, the polishing apparatus using magnetic powder and the polishing apparatus using a polishing tape may be separate apparatuses, but the polishing time is shortened and workability is improved. From the standpoint of improvement, a polishing apparatus provided with both the magnetic powder 303 and the polishing tape 310 as in the polishing apparatus shown in FIG. 8 is more preferable. The polishing apparatus (reference numerals 410 to 419) shown in FIG. 9 is composed only of a polishing unit using a polishing tape in the polishing apparatus shown in FIG. 8, and detailed description thereof will be omitted.

  According to the polishing apparatus shown in FIG. 8, the time necessary for producing the desired surface shape on the electrophotographic photosensitive member 301 is shortened by polishing using the magnetic powder 303 and then using the polishing tape 310. This is possible, and the amount of the polishing tape 310 used can be reduced, leading to cost reduction.

  Further, by polishing with the magnetic powder 303 after polishing with the polishing tape 310, in addition to the effect of shortening the polishing time and reducing the cost as described above, the electrophotographic photosensitive when the polishing with the polishing tape 310 is performed. Since the resin component and the polishing residue adhering to the body can be removed by polishing with the magnetic powder 303, it becomes possible to suppress cleaning failure and “high humidity flow” in a high humidity environment.

  Furthermore, since the magnetic powder 303 and the polishing tape 310 are used together and polished simultaneously, the resin component and polishing residue adhering when the polishing is performed with the polishing tape 310 can be immediately removed. In addition to the effects of shortening time, cost reduction, poor cleaning, and “high humidity flow”, it is possible to suppress polishing scratches.

In the present invention, the polishing is performed with the magnetic powder 303 after the polishing with the polishing tape 310, and the time required for the polishing process using the polishing tape 310 is reduced to 40% or less of the time required for the entire polishing process. It is more preferable to polish the photographic photoreceptor. This is because when the electrophotographic photosensitive member surface is polished only by the polishing step using the magnetic powder 303, the magnetic powder 303 may polish only the periphery of the abnormally grown portion in the initial stage of polishing. Although it is very rare, the abnormally grown part dropped out, and the dropped part sometimes appeared in the image as a white spot. However, by adopting such a configuration, the abnormally grown portion on the surface of the electrophotographic photosensitive member can be flattened by a polishing process using the polishing tape 310 in the initial stage of polishing, and then, by a polishing process using magnetic powder. Since the surface shape of the electrophotographic photosensitive member can be controlled, the surface of the electrophotographic photosensitive member can be more stably polished. At this time, if the time of the polishing process using the polishing tape 310 is longer than 40% of the total polishing process, it occurs when the abnormally grown portion is polished on the polishing surface of the electrophotographic photoreceptor 301 and the polishing tape 310. Since there is a high probability that large polishing residues that are easy to grind and dust adhered to the surface of the electrophotographic photosensitive member during the polishing will be pinched, the electrophotographic photosensitive member may be damaged by polishing. It is preferable to set the polishing process time to 40% or less of the entire polishing process.

[Electrophotographic photoreceptor]
The electrophotographic photosensitive member used in the present invention is characterized by having a photoconductive layer composed of at least an amorphous material on a substrate. FIG. 10 is a schematic cross-sectional view of an a-Si photosensitive member as an embodiment of an electrophotographic photosensitive member suitable for the present invention.

  An electrophotographic photoreceptor 1100 shown in FIG. 10A is expressed as amorphous silicon (hereinafter, “a-Si: H, X”) containing a hydrogen atom or a halogen atom as a constituent element on a cylindrical substrate 1101. And a photoconductive layer 1102 having photoconductivity.

  An electrophotographic photoreceptor 1100 shown in FIG. 10B includes a photoconductive layer 1102 made of a-Si: H, X and having photoconductivity on a cylindrical substrate 1101, and an amorphous silicon (or amorphous carbon). System) surface layer 1103 is provided.

  An electrophotographic photoreceptor 1100 shown in FIG. 10C includes an amorphous silicon-based charge injection blocking layer 1104 and a photoconductive layer made of a-Si: H, X and having photoconductivity on a cylindrical substrate 1101. 1102 and an amorphous silicon (or amorphous carbon) surface layer 1103 are provided. The interface between the photoconductive layer 1102 and the surface layer 1103 may be subjected to interface control that continuously changes and suppresses interface reflection.

  An electrophotographic photoreceptor 1100 shown in FIG. 10D is provided with a photoconductive layer 1102 on a cylindrical substrate 1101. The photoconductive layer 1102 includes a charge generation layer 1105 and a charge transport layer 1106 made of a-Si: H, X, and an amorphous silicon (or amorphous carbon) surface layer 1103 is provided thereon. The interface between the charge generation layer 1105 and the surface layer 1104 may be continuously changed to perform interface control that suppresses interface reflection.

  The surface of the electrophotographic photosensitive member 1100 in this embodiment may be polished after the surface layer 1103 is formed as shown in FIGS. 10B, 10C, and 10D. Alternatively, as shown in FIG. 10A, the surface may be polished after forming the photoconductive layer 1102, and the surface layer 1103 may be formed on the photoconductive layer 1102 after the polishing.

[Electrophotographic photoreceptor manufacturing equipment]
The above-described a-Si photosensitive member is formed by a generally known vacuum deposition method, sputtering method, ion plating method, thermal CVD method, photo CVD method, plasma CVD method, etc., as shown in FIG. As shown, it can be produced by forming a photoconductive layer made of amorphous silicon on a substrate. In particular, an a-Si photosensitive member can be produced by a plasma CVD method, that is, a method in which RF gas or VHF band high-frequency power is applied to a source gas and decomposed by glow discharge to form a deposited film on a substrate. preferable.

  FIG. 11 is a schematic schematic configuration diagram showing an example of an electrophotographic photoreceptor manufacturing apparatus using a high frequency plasma CVD method using a VHF band as a power supply frequency. The manufacturing apparatus shown in FIG. 11 has a configuration capable of simultaneously producing six electrophotographic photosensitive members. This manufacturing apparatus introduces at least a reaction vessel 1002 capable of containing a cylindrical substrate 1001, a source gas introduction pipe 1009 for supplying a source gas into the reaction vessel 1002, and electric power for decomposing the source gas. A deposition apparatus comprising a cathode 1007, a source gas supply apparatus 1004 for supplying source gas into the reaction container 1002, an exhaust apparatus (not shown) for exhausting the reaction container 1002, and power for supplying power to the cathode 1007 And a supply device.

  Next, a method for producing an a-Si photoreceptor using this production apparatus will be described. First, the cylindrical substrate 1001 is installed in the reaction vessel 1002, the inside of the reaction vessel 1002 is evacuated through an exhaust port 1012 by an unillustrated exhaust device, and then an inert gas is supplied into the reaction vessel 1002. Then, after setting the internal pressure of the reaction vessel 1002 to a desired pressure, the cylindrical substrate 1001 is heated to a desired temperature by the heater 1008.

  After the heating step is completed by the above procedure, a deposited layer forming step is subsequently performed. After the inert gas in the reaction vessel 1002 is exhausted by an exhaust device (not shown), the source gas is supplied into the reaction vessel 1002 from the source gas supply device 1004 through the source gas introduction pipe 1009. When the internal pressure of the reaction vessel 1002 is stabilized, high-frequency power is supplied from the high-frequency power source 1005 to the cathode 1007 via the matching box 1006 to cause glow discharge in the reaction vessel 1002. With this discharge energy, the source gas in the reaction vessel 1002 is decomposed, and a predetermined deposition layer is formed on the cylindrical substrate 1001. In order to improve the uniformity of the deposited layer in the circumferential direction of the substrate, it is effective to rotate the substrate 1001 at a predetermined speed by the motor 1011 via the drive unit 1010 during the formation of the deposited layer. Thus, when the deposition layer reaches a desired film thickness, the supply of high-frequency power is stopped, and the supply of the source gas from the source gas supply device 1004 is stopped to finish the formation of the deposition layer. By repeating the same operation a plurality of times, a deposition layer having a multilayer structure can be formed on the cylindrical substrate 1001.

[Electrophotographic equipment]
FIG. 12 shows an embodiment of an electrophotographic apparatus in which the electrophotographic photosensitive member produced according to the present invention is used. The electrophotographic apparatus of this example is suitable when a cylindrical electrophotographic photosensitive member is used.

  In FIG. 12, a primary charger 505 that charges the electrophotographic photosensitive member 504 for forming an electrostatic latent image around the electrophotographic photosensitive member 504, and an electrophotographic photosensitive member 504 on which the electrostatic latent image is formed. A developer 506 for supplying a developer (toner), a transfer charger 507 for transferring toner on the surface of the electrophotographic photosensitive member to a transfer material 513 such as paper, and a cleaner for purifying the surface of the electrophotographic photosensitive member 508 is disposed. In this example, in order to effectively remove the surface of the photosensitive member effectively, the surface of the electrophotographic photosensitive member is cleaned using the elastic roller 508a and the cleaning blade 508b as described above, but only one of them may be used. Further, between the cleaner 508 and the primary charger 505, a neutralizing lamp 510 is disposed for neutralizing the surface of the electrophotographic photosensitive member in preparation for the next copying operation, and the transfer material 513 is a feed roller 514. Sent by. As a light source for exposure A, a halogen light source or a light source mainly having a single wavelength is used.

  Formation of a copy image using such an electrophotographic apparatus is performed as follows, for example. First, the electrophotographic photosensitive member 504 is rotated at a predetermined speed in the direction of the arrow, and the surface of the electrophotographic photosensitive member 504 is uniformly charged using the primary charger 505. Next, image exposure A is performed on the surface of the charged electrophotographic photosensitive member 504, and an electrostatic latent image of the image is formed on the surface of the electrophotographic photosensitive member 504. Then, when the electrostatic latent image portion on which the electrostatic latent image is formed on the surface of the electrophotographic photosensitive member 504 passes through the installation portion of the developing device 506, the developing device 506 supplies toner to the surface of the electrophotographic photosensitive member 504. Then, the electrostatic latent image is visualized (developed) as an image by the toner 506a, and this toner image reaches the installation portion of the transfer charger 507 as the photosensitive member 504 rotates, and is sent by the feed roller 514 here. The image is transferred to the transfer material 513 that comes.

  After the transfer is completed, the transfer material is separated from the electrophotographic photosensitive member by a separation charger using electrostatic force. The separation may be performed mechanically using a belt, a claw, or the like. In order to prepare for the next copying process, residual toner is removed from the surface of the electrophotographic photosensitive member 504 by the cleaner 508, and the charge is removed by the charge removing lamp 510 so that the surface potential becomes zero or almost zero. The process ends.

  EXAMPLES Hereinafter, although an Example and a comparative example demonstrate this invention further in detail, this invention is not restrict | limited at all by these.

<Electrophotographic photosensitive member production example 1>
Using the plasma processing apparatus shown in FIG. 11, a charge injection blocking layer and a photoconductive layer are formed on a cylindrical substrate (cylindrical aluminum cylinder having a mirror finish with a diameter of 80 mm and a length of 358 mm) under the conditions shown in Table 1 below. The layers were formed in the order of the surface layer, and eight positively charged a-Si photoconductors were produced. In addition, “200 → 20” in the manufacturing conditions shown in Table 1 represents that the flow rate of SiH ₄ is continuously changed from 200 ml / min (normal) to 20 ml / min (normal). “80” represents that the flow rate of CH ₄ is continuously changed from 0 ml / min (normal) to 80 ml / min (normal).

  The surface roughness Ra of the electrophotographic photosensitive member produced under the conditions shown in Table 1 was measured at six points in the circumferential direction at 60 ° intervals in the circumferential direction by the following method. Was 45 nm and was substantially uniform over the entire circumference of the electrophotographic photosensitive member.

  The surface roughness Ra of the electrophotographic photosensitive member was calculated from an AFM (Atomic Force Microscope) observation image measured by a Q-SCOPE250 (Version 3.181) which is a scanning probe microscope (SPM) manufactured by Quesant. Values were used. The measurement range is a range of 10 μm × 10 μm, and the surface roughness Ra of the electrophotographic photosensitive member is obtained by performing “Parabolic Line by line correction” on the measured AFM observation image by “Tilt Removal” of Q-SCOPE250. The value calculated from the obtained AFM observation image having a three-dimensional shape was used.

< Reference Example 1>
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 1 is polished with magnetic powder until the average surface roughness Ra of the electrophotographic photosensitive member becomes 30 nm ± 1 nm using the polishing apparatus shown in FIG. Carried out.

  Specifically, the rotation speed of the electrophotographic photosensitive member is adjusted to 90 rpm, the rotation speed of the magnet roller is adjusted to 240 rpm, the SD distance is adjusted to 0.4 mm, and the SB distance is adjusted to 1.0 mm. Company-made Cu-Zn phyllite (DFC450) was used.

  The electrophotographic photoreceptor after the polishing treatment obtained under the above conditions was evaluated under the following conditions for high humidity flow, polishing scratches, and poor cleaning. The electrophotographic apparatus used for the measurement was a Canon digital electrophotographic apparatus iR-6000 (pre-exposure 660 nm LED array, image exposure 655 nm laser, process speed 265 mm / sec).

  Evaluation of high humidity flow, polishing scratches and poor cleaning is carried out by installing the electrophotographic photosensitive member in a high temperature and high humidity environment of 30 ° C. and 80% and operating the electrophotographic photosensitive member in the daytime. During this period, the photoconductor heater was turned on to maintain the photoconductor surface temperature at about 40 ° C., and the electrophotographic apparatus was turned off during the night, and the photoconductor heater was turned off, and the durability evaluation was performed. Specifically, using a test pattern with a printing rate of 1% and a printing rate lower than normal, 20,000 continuous paper passes per day were carried out for 15 days, and up to 300,000 papers were passed. Iroha chart, solid black chart and halftone chart were output at the end of every 10,000 sheets and at the start of the morning, and the high humidity flow was evaluated. Polishing scratches were evaluated by images output from a solid black chart and a halftone chart at the end of 20,000 sheets. The cleaning failure was evaluated by judging the presence or absence of a cleaning failure on the electrophotographic photosensitive member at the end of 20,000 sheets. The evaluation results are shown in Table 2 below.

< Reference Example 2>
Using the polishing apparatus of FIG. 7 equipped with two polishing units, polishing treatment and evaluation were performed in the same manner as in Reference Example 1 except that the polishing time was 10 minutes as shown in Table 2. The evaluation results are shown in Table 2.

< Reference Example 3>
The electrophotographic photosensitive member was manufactured created by the electrophotographic photosensitive member Production Example 1, the polishing process to an average surface roughness Ra by using a polishing tape and the magnetic powder at the same time by the polishing apparatus shown in FIG. 8 is 30 nm ± 1 nm Carried out.

Specifically, the conditions of the polishing unit using the magnetic powder are the same as those in Reference Example 1, and the conditions of the polishing unit using the polishing tape are such that the feeding speed of the polishing tape is 30 mm / min, and the pressure elastic roller The pressure to the electrophotographic photosensitive member is 2.0 × 10 ⁵ N / m ² , neoprene (registered trademark) rubber having a JIS rubber hardness of 50 is used as the material of the pressure elastic roller, and the shape of the pressure elastic roller is The diameter of the center is 0.1 mm thicker than both ends, and the polishing tape is a wrapping tape LT-C2000 manufactured by Fuji Photo Film Co., Ltd. (abrasive: silicon carbide (SiC), particle size: 6 μm, coating method: doctor blade ( Using the knife edge) coating method), the polishing tape was not cooled.

The electrophotographic photosensitive member processed under the above polishing conditions was evaluated for each item of high humidity flow, polishing scratches, and poor cleaning as in Reference Example 1. The evaluation results are shown in Table 2.

<Example 4>
The electrophotographic photosensitive member was manufactured created by the electrophotographic photosensitive member Production Example 1, by using the polishing apparatus shown in FIG. 8, instead of using a polishing tape and the magnetic powder at the same time, the magnetic powder after polishing with the polishing tape Polishing was performed until the average surface roughness Ra of the electrophotographic photosensitive member was 30 nm ± 1 nm. The specific polishing conditions at this time were as shown in Table 2, except that the polishing tape was switched to the polishing with the magnetic powder so that the polishing was performed for 2 minutes with the polishing tape and then the polishing with the magnetic powder for 19 minutes. Was polished in the same manner as in Reference Example 3.

The electrophotographic photosensitive member processed under the above polishing conditions was evaluated in the same manner as in Reference Example 1 for high humidity flow, polishing scratches, and poor cleaning. The evaluation results are shown in Table 2.
<Example 5>
The electrophotographic photosensitive member was manufactured created by the electrophotographic photosensitive member Production Example 1, by using the polishing apparatus shown in FIG. 8, the surface roughness of the electrophotographic photosensitive member by polishing is performed with magnetic powder after polishing with the polishing tape Polishing was performed until the average of Ra reached 30 nm ± 1 nm. As shown in Table 2, the polishing conditions were the same as in Reference Example 3 except that the polishing tape was changed to polishing with magnetic powder so that the polishing was performed with polishing tape for 10 minutes and then with magnetic powder for 15 minutes. Polished.

The electrophotographic photosensitive member processed under the above polishing conditions was evaluated in the same manner as in Reference Example 1 for high humidity flow, polishing scratches, and poor cleaning. The evaluation results are shown in Table 2.

< Reference Example 6>
The electrophotographic photosensitive member was manufactured created by the electrophotographic photosensitive member Production Example 1, by using the polishing apparatus shown in FIG. 8, the surface roughness of the electrophotographic photosensitive member by polishing is performed with magnetic powder after polishing with the polishing tape Polishing was performed until the average of Ra reached 30 nm ± 1 nm. The specific polishing conditions at this time were as shown in Table 2 except that the polishing tape was switched to the polishing with the magnetic powder so that the polishing was performed for 14 minutes with the polishing tape and then the polishing with the magnetic powder for 14 minutes. Was polished in the same manner as in Reference Example 3.

The electrophotographic photoreceptor obtained under the above polishing conditions was evaluated in the same manner as in Reference Example 1 for high humidity flow, polishing scratches, and poor cleaning. The evaluation results are shown in Table 2.

< Reference Example 7>
The electrophotographic photosensitive member was manufactured created by the electrophotographic photosensitive member Production Example 1, the electron by using the polishing apparatus shown in FIG. 8, which performs polishing with a polishing tape after polishing with magnetic powder in contrast to the fourth embodiment Polishing was performed until the average surface roughness Ra of the photographic photoconductor was 30 nm ± 1 nm. As shown in Table 2, the specific polishing conditions at this time were changed from the magnetic powder to the polishing with the polishing tape so that the polishing was performed with the magnetic powder for 14 minutes and then the polishing tape with the polishing tape for 14 minutes. Was polished in the same manner as in Reference Example 3.

The electrophotographic photosensitive member processed under the above polishing conditions was evaluated in the same manner as in Reference Example 1 for high humidity flow, polishing scratches, and poor cleaning. The evaluation results are shown in Table 2.

<Comparative Example 1>
The electrophotographic photosensitive member was manufactured created by the electrophotographic photosensitive member Production Example 1, by polishing apparatus shown in FIG. 9, the polishing treatment until the average surface roughness Ra of the electrophotographic photosensitive member becomes 30 nm ± 1 nm using a polishing tape Carried out. The specific polishing conditions at this time are the same as the conditions of the polishing unit using the polishing tape described in Reference Example 3 except that the polishing process was performed for 40 minutes with the polishing tape as shown in Table 2.

The electrophotographic photosensitive member processed under the above polishing conditions was evaluated in the same manner as in Reference Example 1 for high humidity flow, polishing scratches, and poor cleaning. The evaluation results are shown in Table 2.

[Evaluation results]
Table 2 shows the evaluation results on the high-humidity flow, the polishing scratches, and the cleaning failure for Reference Examples 1 to 3, 6, and 7 , Examples 4 and 5, and Comparative Example 1.

  In Table 2, symbols indicating the evaluation results respectively mean ◎: very good, ◯: excellent, Δ: no practical problem, ×: practical problem.

As can be seen from Table 2, polishing with magnetic powder ( Reference Examples 1 and 2) or polishing using a combination of magnetic powder and polishing tape ( Reference Examples 3 , 6 and 7 , Examples 4 and 5 ) is an abrasive tape. The polishing time is shortened as compared with the conventional technique (Comparative Example 1) in which polishing is performed alone, and the high-humidity flow, polishing scratches and poor cleaning of the electrophotographic photosensitive member after polishing are improved. Among them, the electrophotographic photoreceptor polished by polishing with magnetic powder ( Reference Examples 1 and 2) and polishing using magnetic powder and polishing tape ( Reference Examples 3 , 6 and 7 , Examples 4 and 5 ). Shows a good evaluation result, especially when polishing is performed under conditions where the polishing time using only the polishing tape is 40% or less of the time required for the entire polishing step (Examples 4 and 5). Good evaluation results were obtained.

From this result, the high humidity flow reduces the polishing time with the polishing tape by using the polishing tape after polishing with the magnetic powder as in Reference Example 7, and the surface of the electrophotographic photosensitive member from the polishing tape. reducing the amount of resin component to be transferred to further reference example 3 and 6, either simultaneously polished by the polishing tape and the magnetic powder as in example 4 and 5, or a magnetic powder after polishing with the polishing tape The resin component transferred from the polishing tape to the surface of the electrophotographic photosensitive member is removed by polishing with a polishing tape, and further, polishing is performed using a polishing means only with magnetic powder as in Reference Example 1 or 2. Thus, it is considered that the resin component does not adhere to the surface of the electrophotographic photosensitive member, which is a factor for obtaining a good result.

As for the scratches, Reference Example 3 and 6, the foreign matter such as abrasive residue or dust to shorten the operating time of the abrasive tape as in Example 4 and 5 is possible to reduce the probability of entering into the polishing surface, further, As in Reference Example 7, the use time of the polishing tape is shortened to reduce the probability that foreign matter enters the polishing surface, and the magnetic powder removes a relatively large polishing residue from the abnormally grown portion that occurs at the initial stage of polishing. The reason why good results are obtained is that foreign substances do not easily enter the polished surface by polishing by using a polishing means only with magnetic powder as in Reference Example 1 or 2, It is considered that a better result can be obtained by setting the time of the polishing process using only the polishing tape to 40% or less of the time required for the entire polishing process.

Further, regarding the cleaning failure, the polishing time is shortened by using the polishing tape after being polished with the magnetic powder as in Reference Example 7, and transferred from the polishing tape to the surface of the electrophotographic photosensitive member. The amount of the resin component is reduced, and further, the magnetic powder and the polishing tape are polished at the same time as in Reference Examples 3 and 6 and Examples 4 and 5 , or after polishing with the polishing tape, the magnetic powder is polished. By removing the resin component transferred to the surface of the electrophotographic photosensitive member from the polishing tape, and further polishing by using a polishing means only with magnetic powder as in Reference Example 1 or 2, The reason for the good results was that the components were not allowed to adhere to the surface of the electrophotographic photosensitive member, and the fine shape of the electrophotographic photosensitive member surface after polishing was rounded. Conceivable.

  It is also effective to polish the surface of the electrophotographic photosensitive member by performing a polishing process using a magnetic powder and a polishing process using a polishing tape at the same time after performing a polishing process using a polishing tape. is there. Even in this case, it is possible to obtain a better result by setting the time of the polishing process using only the polishing tape to 40% or less of the time required for the entire polishing process.

It is a figure which shows the grinding | polishing apparatus which grind | polishes the electrophotographic photoreceptor surface with the magnetic powder on a magnetic roller by one Embodiment of this invention. It is a figure which shows an example of the AFM image which observed the electrophotographic photoreceptor surface in a 10 micrometer x 10 micrometer visual field. It is a graph which shows the particle size distribution of magnetic powder. It is a figure which shows an example of the AFM image which observed the electrophotographic photoreceptor surface in a 10 micrometer x 10 micrometer visual field. It is a graph which shows the particle size distribution of magnetic powder. It is a figure which shows an example of the AFM image which observed the electrophotographic photoreceptor surface in a 10 micrometer x 10 micrometer visual field. It is a figure which shows the modification of the grinding | polishing apparatus shown in FIG. It is a figure which shows the other modification of the grinding | polishing apparatus shown in FIG. It is a figure which shows the grinding | polishing apparatus using a grinding tape. It is a typical schematic sectional drawing of the a-Si photoreceptor which is one Embodiment of an electrophotographic photoreceptor. It is a typical schematic block diagram which shows an example of the electrophotographic photoreceptor manufacturing apparatus by the high frequency plasma CVD method using a VHF band as a power supply frequency. 1 is a schematic cross-sectional view showing an embodiment of an electrophotographic apparatus of the present invention.

Explanation of symbols

101, 201, 301 Electrophotographic photosensitive member 102, 202, 302 Magnet roller 103, 203, 303 Magnetic powder

Claims (3)

In a method of polishing a surface of an electrophotographic photoreceptor having a substrate and a photoconductive layer formed on the substrate, the photoconductive layer being made of an amorphous material,
A polishing step (i) of polishing the surface of the electrophotographic photosensitive member by bringing a polishing tape having abrasive grains and a resin component that is an adhesive for fixing the abrasive grains into pressure contact with the surface of the electrophotographic photosensitive member; After the polishing step (i), the magnetic powder adhering to the outer peripheral surface of the magnetic roller by a magnetic force is brought into contact with the surface of the electrophotographic photosensitive member, the magnetic roller is rotated, and the electrophotographic photosensitive member is rotated. A polishing step (ii) for polishing the surface of the body,
A method for polishing the surface of an electrophotographic photosensitive member, wherein the time required for the polishing step (i) is 40% or less of the time required for the entire polishing step.   The method of polishing a surface of an electrophotographic photosensitive member according to claim 1, wherein the polishing step (ii) is a step of polishing the surface of the electrophotographic photosensitive member using a plurality of the magnetic rollers. By forming a photoconductive layer composed of an amorphous material on a substrate and preparing an electrophotographic photosensitive member before the surface is polished, by polishing the surface of the electrophotographic photosensitive member In the method for producing an electrophotographic photosensitive member whose surface is polished,
A method for producing an electrophotographic photosensitive member having a polished surface, wherein the polishing treatment is carried out by the polishing method according to claim 1.