JP2006308743A - Electrophotographic photoreceptor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrophotographic photoreceptor, capable of preventing image defects due to toner fusion, and image deletion due to high humidity in a high humidity environment, while achieving speed up of the electrophotographic photoreceptor and the high-quality image thereof, and longer operating lifetime and energy saving of the electrophotographic photoreceptor, by reducing the effects of the local shape of the electrophotographic photoreceptor surface, and controlling the surface shape of the electrophotographic photoreceptor more strictly than before. <P>SOLUTION: In the electrophotographic photoreceptor having a photoconductive layer constituted of at least a noncrystalline material and a surface layer on a substrate, "A" and "a" satisfy all the conditions of (1) 0.01 μm≤A≤0.30 μm, (2) 0.03 μm≤a≤0.55 μm, and (3) 1.0×10<SP>-3</SP>≤A×a≤4.50×10<SP>-2</SP>, where A is the difference of the height of 5-95% in the load curve of the height using the highest point as a reference in the microscopic surface roughness in the region of 10 μm×10μm of the electrophotographic photoreceptor, and a is the difference of the height of 5-95% in the load curve of the height, by using the highest point as a reference in the macroscopic surface roughness measured set at a reference length of 0.8 mm. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an amorphous material applicable to an image forming apparatus utilizing an electrophotographic process such as a copying machine, a printer, a fax machine, etc., in particular, an amorphous silicon (hereinafter referred to as “a-Si”) system. The present invention relates to an electrophotographic photosensitive member having a conductive layer.

  Electrophotographic photoreceptors having an amorphous material as a photosensitive layer on a substrate are widely known. In particular, a-Si formed on a substrate of metal or the like by a film forming technique such as CVD or PVD is used as a photosensitive layer. The electrophotographic photosensitive member has already been commercialized.

  In this a-Si electrophotographic photosensitive member, an electrophotographic film which defines the fine shape of the surface of the electrophotographic photosensitive member for the purpose of improving the cleaning property, preventing image flow in a high humidity environment, and preventing image defects due to fusion of toner or the like. Numerous proposals have been made for photoreceptors.

  In particular, in a light-receiving member composed of a photosensitive layer having a silicon atom as a base material and a surface layer on a conductive support, the relationship between the microscopic unevenness height and the uneven pitch, and the macroscopic unevenness height and the uneven pitch. It is disclosed that by forming an electrophotographic photosensitive member having a concavo-convex shape whose relationship satisfies a conditional expression, durability against toner fusion, image flow, and the like are improved (see, for example, Patent Document 1). .

  Further, in the electrophotographic photosensitive member in which the photoconductive layer containing a-Si and the surface layer are sequentially laminated, 50 to 90 in the cumulative frequency distribution of the uneven height with respect to the deepest point in the range of 10 μm × 10 μm. %, The toner fusion and high-humidity flow are improved by making the difference in height of the projections and depressions corresponding to the percentage of roughness and Ra (arithmetic mean roughness) of the conductive substrate within the specified range (for example, (See Patent Document 2 and Patent Document 3).

In addition, a photosensitive layer made of a-Si is laminated on the outer peripheral surface of the drum-shaped substrate cut in the circumferential direction, and the average interval of the triangular linear grooves formed on the cross section of the surface, Ra, and the apex of the triangular shape. It is disclosed that toner adhesion / fusion can be prevented and good image formation can be obtained by making the angle formed within a specified range (see, for example, Patent Document 4). Further, in the electrophotographic photosensitive member in which a-SiC is laminated on the surface of the photosensitive layer made of a-Si, the angle forming the top of the triangle, the angle forming the bottom of the adjacent triangle, and the pitch of each linear groove are as follows. It has been disclosed that, when the amount is within the specified range, toner adhesion / fusion can be prevented and good image formation can be obtained (see, for example, Patent Document 5).
Japanese Patent Laid-Open No. 10-63023 Japanese Patent Laid-Open No. 2002-49171 JP 2002-40697 A JP 2000-314974 Japanese Patent Laid-Open No. 10-90928

  However, in recent years, with the progress of electrophotographic devices in color, there is an increasing market demand for higher speed and higher image quality than before. At the same time, the use of a-Si electrophotographic photoconductors is increasing due to the growing awareness of ecology, and further life extension and energy saving of electrophotographic photoconductors are required.

  Specifically, in order to meet market demands for higher speed and higher image quality, low melting point toners corresponding to higher speeds of electrophotographic devices and small particle size toners corresponding to higher image quality have been developed. Low melting point + small particle size toners have been used. As a result, the melting point is lowered, so that fusion to the surface of the electrophotographic photosensitive member is more likely to occur than in the conventional toner. Further, by reducing the particle size, the specific surface area is larger than that of the conventional toner, and the surface of the electrophotographic photosensitive member is Since the adhesion force to the toner increases, it becomes more difficult than conventional toners to remove residual toner from the surface of the electrophotographic photosensitive member.

  Therefore, in the case of a toner having a low melting point and a small particle diameter, there is a high possibility that fusion to the surface of the electrophotographic photosensitive member will occur, and even if a cleaning blade or a cleaning roller is used in combination, sufficient residual toner or fusion toner is removed. It may be difficult to remove.

  If the electrophotographic process is repeated in such a state, an image defect such as “black streaks” or “white streaks” due to the fused toner may occur on the image, and the initial image quality may not be maintained. It was.

  In addition, in order to meet market demands for longer life and energy saving, it has been required to reduce the wear of the surface of the electrophotographic photosensitive member by the electrophotographic process and to reduce the amount of electric power without using a drum heater. This makes it difficult to sufficiently remove adsorbed substances such as moisture and ozone products adhering to the surface of the electrophotographic photosensitive member as compared to the conventional method. There is a high possibility that image density will decrease due to.

  Furthermore, with the progress of colorization of electrophotographic apparatuses, the opportunity for outputting not only characters but also photographs and the like has increased. As a result, a high-humidity flow that could not be confirmed in the case of only conventional character output tends to appear at the time of photo output, and thus further improvement of the high-humidity flow has been required.

  Therefore, the above problems have been solved by controlling the surface shape of the electrophotographic photosensitive member by the methods mentioned in the prior art. However, even in the microscopic range obtained by AFM or the like and the macroscopic range obtained by a roughness meter, the surface roughness parameters conventionally used, particularly the parameters representing the height direction, are locally In some cases, it was affected by high mountains and deep valleys. As a result, the dispersion of numerical values becomes large, and even if the obtained numerical values are the same, the surface shape may be greatly different, so it may be difficult to control the surface shape of the electrophotographic photosensitive member. In particular, the surface of the electrophotographic photosensitive member is processed to control the shape, for example, when the polishing process is performed.In the case where the polishing residue adheres to the polishing surface, the polishing residue enters the valley, etc. There could be changes in the direction parameters.

  In addition, in order to achieve higher image quality, higher speed, longer life, and energy saving, it is necessary to further control the microscopic and macroscopic shape of the electrophotographic photosensitive member surface. It was required to control the parameters other than the vertical direction, that is, the peaks and valleys forming the surface shape more accurately. However, regarding the parameters that accurately represent the shape of the peaks and valleys that form such a surface shape, the direction of which shape of the peaks and valleys should be controlled was not accurately grasped. It was difficult to control the shape of peaks and valleys forming

  Therefore, in order to solve the above problems and to realize higher image quality, higher speed, energy saving and longer life of the electrophotographic photosensitive member than in the past, the surface shape of the electrophotographic photosensitive member itself should be changed. It has become necessary to control more strictly than before.

  Accordingly, an object of the present invention is to increase the speed of the electrophotographic apparatus by suppressing the influence of the local shape of the surface of the electrophotographic photosensitive member and controlling the surface shape of the electrophotographic photosensitive member more strictly than before. Realize high image quality, energy saving, and long life of electrophotographic photosensitive member, and provide good electrophotographic photosensitive member against image defects due to poor cleaning and toner fusion and “high humidity flow” in high humidity environment It is to provide.

  As a result of diligent studies to achieve the above-mentioned object, the parameters in the height direction obtained from the microscopic surface shape and macroscopic surface shape of the electrophotographic photosensitive member surface, and further from the microscopic surface shape, By controlling the relationship between the obtained height direction parameter and the height direction parameter obtained from the macroscopic surface shape, it was found that there is a great effect on image defects and high humidity flow, and the present invention was completed. It is what led to it.

More specifically, the present invention relates to an electrophotographic photosensitive member having a photoconductive layer and a surface layer made of at least an amorphous material on a substrate, and is microscopic in a range of 10 μm × 10 μm of the electrophotographic photosensitive member. The difference in height between 5% and 95% in the load curve of the unevenness height based on the highest point in the surface roughness is A, and the highest point in the macroscopic surface roughness measured at a reference length of 0.8 mm is used as a reference. An electrophotographic photosensitive film characterized in that A and a satisfy all of the following conditions (1) to (3), where a is a height difference of 5% to 95% in the load curve of the uneven height: About the body.
(1) 0.01μm ≦ A ≦ 0.30μm
(2) 0.03μm ≦ a ≦ 0.55μm
(3) 1.0 × 10 ⁻³ μm ² ≦ A × a ≦ 4.5 × 10 ⁻² μm ² .

  As described above, by controlling the microscopic and macroscopic surface shape of the electrophotographic photosensitive member, the reason why the image defect and the high-humidity flow are improved is estimated as follows.

  First, the high-humidity flow causes ozone products and adsorbed water adhering to the surface of the electrophotographic photosensitive member by rubbing on the surface of the electrophotographic photosensitive member by an external additive such as silica contained in the toner or a cleaning member such as a cleaning blade. It is assumed that it occurs when it cannot be removed sufficiently. At this time, a place where it is difficult to sufficiently remove ozone products and adsorbed moisture is between the mountains seen in the microscopic or macroscopic surface shape, particularly in the valleys. However, by reducing the height parameter in the microscopic or macroscopic surface shape, the depth of the valley becomes shallow, and at the same time, the slope of the peak becomes gentle. As a result, it is easy for external additives to enter between the peaks, especially in the valleys, and the contact area of the cleaning member increases to increase the rubbing area, thus removing ozone products and adsorbed moisture. Becomes easy. As a result, it is presumed that the high humidity flow is improved.

  However, if the height parameter of the microscopic or macroscopic surface shape is too small, the microscopic or macroscopic surface shape is flattened. Therefore, since the contact area between the cleaning member and the electrophotographic photosensitive member surface becomes too large, the rubbing force per unit area is extremely reduced, and conversely, ozone products and adsorbed moisture are sufficiently absorbed. It is presumed that the image quality deteriorates because it cannot be removed. Further, since the microscopic or macroscopic surface shape is flattened, when the cleaning member removes the toner component adhering to the surface of the electrophotographic photosensitive member, the toner and the electrophotographic photosensitive member are simultaneously eliminated. It is presumed that toner adhesion occurs because the adhesion force on the body surface increases.

  Therefore, it is possible to suppress high-humidity flows and image defects by appropriately controlling the parameter A in the height direction of the microscopic surface shape and the parameter a in the height direction of the macroscopic surface shape. It is inferred that

  It is considered that the generation of high humidity flow and image defects is determined by the contact area between the external additive and the cleaning member and the electrophotographic photosensitive member surface. Therefore, the microscopic surface shape and the height direction parameter obtained from the macroscopic surface shape are determined by the contact area between the external additive and the cleaning member and the surface of the electrophotographic photosensitive member. Since there is also a relationship between the height direction parameters obtained from the general surface shape and the macroscopic surface shape, it is presumed that these relationships also affect the high-humidity flow and image defects.

  According to the electrophotographic photosensitive member of the present invention, as compared with the prior art, each parameter in the height direction obtained from the microscopic surface shape and the macroscopic surface shape of the electrophotographic photosensitive member, By controlling the relationship between the parameters in the height direction obtained from various surface shapes and the parameters in the height direction obtained from macroscopic surface shapes, image defects such as defective cleaning and toner fusing and high humidity environments It is possible to suppress the image flow.

  As a result, it is possible to solve various problems in the conventional electrophotographic photosensitive member, and therefore it is possible to provide an electrophotographic photosensitive member corresponding to high speed, high image quality, long life, and energy saving. .

  In addition, by controlling the microscopic surface shape and the macroscopic surface shape of the peaks and valleys themselves, compared with the conventional case, image defects such as poor cleaning and toner fusing, and high in a high humidity environment are achieved. It becomes possible to suppress the wet flow.

  Embodiments of the present invention will be described in detail with reference to the drawings.

"Microscopic surface roughness according to the present invention"
FIG. 1 shows a load curve (BAC: surface height) based on the highest point in a microscopic shape obtained by AFM measurement of an a-Si electrophotographic photosensitive member in a range of 10 μm × 10 μm. A schematic diagram of (Bearing Area Curve) is shown, in which the horizontal axis represents surface height and the vertical axis represents bearing ratio. The surface height is a distance in the height direction with the highest point in the microscopic surface shape obtained by the AFM measurement as a reference, and the bearing ratio is as shown in FIG. The cross-sectional area A (x) of the three-dimensional observation image at the distance x is calculated with reference to the highest point in the three-dimensional observation image obtained by the AFM, and this A (x) is calculated as the cross-sectional area A (Rt) of the distance Rt. It is shown as a percentage. Therefore, the smaller bearing ratio value indicates the peak and the larger bearing ratio indicates the valley.

In the present invention, the difference in surface height corresponding to a bearing ratio of 5% to 95% is A, and the value of A is used. The reason for using such values will be described with reference to FIG. In FIG. 2, there is a locally deep valley v. Thus, when there is a locally deep valley in the microscopic surface shape obtained by AFM, the maximum height Rt, the ten-point average roughness Rz _JIS, etc. are affected by the effect of this locally deep valley v. In some cases, the parameters in the height direction cannot be measured accurately. In order to suppress the influence of such a local valley, it is possible to reduce the influence of the measurement position on the parameter in the height direction as much as possible by removing the region having a Bearing Ratio of 95% or more. Similarly, there may be locally high peaks in the microscopic surface shape obtained by AFM. In particular, when the surface of the electrophotographic photosensitive member is polished, polishing residues generated by the polishing are further removed by electrons. There is a case where a large peak is locally formed by adhering to the polished surface of the photographic photoreceptor. The parameter in the height direction may not be accurately measured due to the influence of such a locally high mountain. In order to suppress the influence of such local peaks, the area with a Bearing Ratio of 5% or less is removed, and the influence on the parameters in the height direction due to the measurement position and polishing process can be minimized. It becomes.

  In the present invention, as shown in FIG. 1, the surface height corresponding to the bearing ratio of 5% to 20% is measured for the shape of the peaks and valleys of the microscopic surface shape, and the horizontal axis is the surface height. The vertical axis is Bearing Ratio, the slope obtained by linear approximation of the measurement points is B, the surface height corresponding to the bearing ratio of 80% to 95% is measured, the horizontal axis is surface height, and the vertical axis is bearing ratio. The slope obtained by linear approximation of the measurement points was quantified as C, and the slope when summarizing the peaks in the measurement range and the slope when summing the valleys were determined. As described above, the sum of the peaks and valleys in the measurement range to represent the shape of the peaks and valleys, the shapes of the peaks and valleys present in the measurement range are various. This is because quantifying the shapes of the peaks and valleys is not accurate as a representative value of the measured surface of the electrophotographic photosensitive member, and is likely not accurate. Another reason is that image defects and high-humidity flows are not observed within minute surface areas such as peaks and valleys, but occur within a certain wide surface area. It is because it thought that it would be influenced by the mountain and valley which exist in the inside.

  B thus obtained is the average slope of the peaks obtained from all peaks in the microscopic surface roughness within the measurement range, and similarly C is also microscopic within the measurement range. Is the average slope of the valleys obtained from all the valleys at a good surface roughness. The reason for not using the range where the Bearing Ratio is less than 5% when calculating B and the range where the Bearing Ratio is greater than 95% when calculating C is the same as the content described in A above. By removing regions with a Bearing Ratio of 5% or less, and regions with a Bearing Ratio of 95% or more, which are local valleys, variations in height parameters due to measurement positions are suppressed, This is because the influence of the polishing process can be suppressed.

  In the present invention, the measurement range of 10 μm × 10 μm is used as the AFM measurement range of the electrophotographic photosensitive member. The reason for this is that stable measurement is possible by widening the measurement range, and more accurate measurement values can be obtained. On the other hand, widening the measurement range has the effect of macroscopic surface shape, that is, the substrate. The influence of waviness and processed shape, and unique shapes such as protrusions are reflected. Conversely, by narrowing the measurement range, the variation due to the selection of the measurement position increases. Therefore, in the present invention, 10 μm × 10 μm is the measurement range as the optimum range for obtaining a more accurate measurement value. However, the inventive concept of the present invention is limited to the measurement range of 10 μm × 10 μm from the above circumstances. It is not something.

"Macroscopic surface roughness according to the present invention"
FIG. 3 shows the highest point obtained by measuring the a-Si electrophotographic photosensitive member with a roughness curve of a surface roughness meter under the evaluation conditions of a reference length of 0.8 mm, an evaluation length of 4.0 mm, and λc of 0.8 mm. Is a schematic diagram of a load curve (BAC) of the uneven height with reference to, where the horizontal axis is the depth and the vertical axis is the load length ratio. Depth refers to the distance in the height direction based on the highest point in the macroscopic shape obtained by measuring with a roughness meter, and the load length ratio is as shown in FIG. The highest point in the waveform obtained by the roughness meter is referred to as M (y) as a percentage with respect to the cutting distance (evaluation length) L at the distance Rt. As a result, the total cutting distance M (y) of the waveform obtained by the roughness meter at the distance y is calculated. Therefore, the smaller the load length ratio value is, the larger the valley portion is, and the larger one is the valley portion. .

  In the present invention, a depth corresponding to 5% to 95% of the load length ratio is set as a using a roughness curve instead of a cross section curve, and the value of a is used. The reason for using the roughness curve is that the cross-section curve may be affected by undulations within the measurement range, and therefore, the depth corresponding to 5% to 95% of the load length ratio obtained from the cross-section curve is larger. The depth corresponding to 5% to 95% of the load length ratio obtained from the roughness curve was more related to image defects such as toner fusing on the surface of the electrophotographic photosensitive member and high humidity flow. It is. Further, as a reason for using a depth corresponding to 5% to 95% of the load length ratio, the macroscopic surface shape obtained by a roughness meter or the like is the same as the above-described microscopic surface shape. This is because the parameters in the height direction may not be accurately measured depending on the measurement position. As a result, an area where the load length ratio is 5% or less to eliminate the influence of such local peaks, and an area where the load length ratio is 95% or more to eliminate the influence of local valleys By removing, it is possible to suppress the influence of the measurement position and the polishing process.

  Further, in the present invention, as shown in FIG. 3, the shape of the macroscopic surface shape of the mountain or valley itself is measured by measuring the depth corresponding to the load length ratio from 5% to 20%, and the horizontal axis is the depth. The vertical axis is the load length ratio, the slope obtained by linear approximation of the measurement point is b, the depth corresponding to the load length ratio from 80% to 95% is measured, the horizontal axis is the depth, and the vertical axis The slope obtained by linear approximation of the measurement points as a load length ratio was numerically expressed as c, and the slope when the peaks in the measurement range were combined and the slope when the valleys were combined were obtained. Thus, as a reason for using the slopes of the peaks and valleys obtained from all the peaks and all the valleys in the measurement range, the macroscopic surface shape of the electrophotographic photosensitive member is greatly influenced by the shape of the substrate, When the substrate is cut with a lathe or the like, a regular surface shape is created on the surface of the substrate. However, the shape of the peaks and valleys of the macroscopic surface shape after the film is formed on this substrate is dominated by the shape of the substrate surface, but depending on the conditions of film formation, the surface of the electrophotographic photosensitive member and the substrate This is because the surface shape is not always the same, and the numerical value of the shape of specific peaks and valleys is more likely not to accurately represent the measured surface of the electrophotographic photosensitive member. Another reason is that it was considered that image defects and high-humidity flows are affected by peaks and valleys within a certain range.

  The b obtained in this way is the average slope of the peaks obtained from all peaks in the macroscopic surface roughness within the measurement range, and similarly c is the macroscopic surface within the measurement range. The average slope of the trough obtained from all troughs in roughness. The reason why the load length ratio is less than 5% when b is obtained and the range where the load length ratio is greater than 95% is not used when c is obtained is the same as the content described in a. By removing the area where the load length ratio is 5% or less, which is a local mountain, and the area where the load length ratio is 95% or more, which is a local valley, the height direction parameter according to the measurement position is removed. This is because it is possible to suppress the variation in measurement and to suppress the influence of the measurement position and the polishing process.

  In the present invention, the measurement was performed at 0.8 mm as the reference length of the roughness meter of the electrophotographic photosensitive member. The reason for this is that the variation due to the influence of the waviness of the substrate may be increased by widening the measurement range. Conversely, by narrowing the measurement range, there may be a case where the variation due to selection of the measurement position due to the decrease in the number of peaks and valleys increases. Therefore, in the present invention, the reference length was 0.8 mm, and the evaluation length was 4.0 mm in order to obtain a more accurate measurement value.

  From the above circumstances, the inventive idea of the present invention is not limited to the measurement conditions of the reference length of 0.8 mm and the evaluation length of 4.0 mm.

In the present invention, the value of A obtained from the microscopic surface shape of the electrophotographic photosensitive member is 0.01 μm or more and 0.30 μm or less, the value of a obtained from the macroscopic surface shape is 0.03 μm or more and 0.55 μm or less, and A It has been found that an electrophotographic photosensitive member having a high humidity flow and good image defects can be obtained by setting xa to 1.0 × 10 ⁻³ μm ² or more and 4.50 × 10 ⁻² μm ² or less.

  When A is larger than 0.30 μm, the uneven surface shape of the microscopic surface shape becomes too large. Therefore, ozone products and moisture adhering to the recesses on the surface of the electrophotographic photosensitive member are removed from toner components such as silica, cleaning blades, etc. It may be difficult to remove by the cleaning member, resulting in a high humidity flow. On the other hand, when the thickness is smaller than 0.01 μm, the fine unevenness of the microscopic surface shape is reduced, and at the same time, the finer unevenness of the surface of the mountain or valley is also reduced. As a result, since the contact area between the cleaning member and the electrophotographic photosensitive member increases, the rubbing force per unit in the contact area between the cleaning member and the surface of the electrophotographic photosensitive member decreases, resulting in poor cleaning and electrophotography. Since the microscopic unevenness of the photosensitive member is reduced, the escape route of the toner and the like that has entered between the cleaning member and the surface of the electrophotographic photosensitive member is reduced, so that the toner and the like are likely to be fused, resulting in image defects. May occur. When the microscopic surface shape of the electrophotographic photosensitive member is controlled by polishing, the polishing rate decreases as the contact area between the polishing member and the electrophotographic photosensitive member increases as polishing progresses. Therefore, in order to make the microscopic surface shape smaller than 0.01 μm, the time required for polishing becomes very long, which is not preferable from the viewpoint of production.

Also, if a is larger than 0.55 and A × a is larger than 4.50 × 10 ⁻² μm ² , the macroscopic surface irregularities will increase, and as with A, high humidity flow may occur. is there. If a is smaller than 0.03 μm and A × a is smaller than 1.0 × 10 ⁻³ μm ² , image defects may occur due to fusing of toner or insufficient cleaning as in the case of A.

In the present invention, when A is 0.02 μm or more and 0.25 μm or less, a is 0.05 μm or more and 0.45 μm or less, and A × a is 3.0 × 10 ⁻³ μm ² or more and 3.50 × 10 ⁻² μm ² or less, More preferable for image defects such as toner fusion and high humidity flow, A is 0.03 μm to 0.20 μm, a is 0.07 μm to 0.40 μm, A × a is 5.0 × 10 ⁻³ μm ^{2 to} 3.0 × 10 More preferably, it is ⁻² μm ² or less.

  In the present invention, in the macroscopic surface shape obtained by the roughness meter, when the horizontal axis is the depth (μm) and the vertical axis is the load length ratio (%), the load length ratio is 5%. If the slope of the approximate line connecting 20% is b and the slope of the approximate line connecting 80% and 95% is c, b is 250% / μm or more and 1000% / μm or less, and c is 220% / μm or more and 1000% / When the thickness is not more than μm and the c / b is not less than 0.5 and not more than 2.0, further defective cleaning, image defects such as toner fusion, and high humidity flow are improved.

If the slope b of the peak in the macroscopic surface shape is less than 250% / μm, the macroscopic peak shape will stand up, so clean the peaks and valleys with external additives and cleaning members. As a result, high humidity flow may occur. Also, if b is larger than 1000% / μm, the shape of the microscopic peak will be crushed, and the contact area with the cleaning member will increase, resulting in a decrease in density due to poor cleaning, and escape of toner etc. during cleaning. In some cases, fusing of toner or the like may occur due to the decrease in image quality, and image defects may occur. If the slope c of the valley in the macroscopic surface shape is smaller than 220% / μm, the microscopic valley Since the shape stands, it becomes difficult to clean the valleys, and as a result, a high humidity flow may occur. In addition, when c is larger than 1000% / μm, the macroscopic shape is also small. Therefore, when the contact area with the cleaning member is increased, the cleaning property is deteriorated or the toner is fused. It is assumed that there is.

  Furthermore, the relationship between the macroscopic mountain slope b and the valley slope c affects the high-humidity flow and image defects. For example, it has a macroscopic valley shape that is difficult to clean with an external additive or a cleaning member contained in the toner even though it has a good macroscopic peak shape against high humidity flow and image defects. In this case, a high humidity flow is generated.

  That is, when the relationship between the macroscopic peak-to-valley shape c / b is less than 0.5, or when c / b is greater than 2.0, c is a good slope for high humidity flow and image defects. However, as b increases, the macroscopic peaks flatten, and image defects such as density reduction due to poor cleaning and toner fusing due to reduced toner escape during cleaning may occur. is there. Further, as b becomes smaller, a macroscopic mountain shape is formed, so that it becomes difficult to clean the valleys and a high humidity flow may occur.

  On the other hand, even if b has a good inclination with respect to high-humidity flow and image defects, as c becomes larger, the macro valley becomes narrower, so cleaning becomes difficult and high-humidity flow occurs. There is. Further, as c becomes smaller, the macroscopic shape also becomes smaller, so that the cleaning area may be lowered and the toner may be fused due to an increase in the contact area with the cleaning member.

  In this way, the shape of each of the macroscopic peaks and valleys affects the high-humidity flow and image defects, so the relationship between the macroscopic mountain and valley shapes as well as the macroscopic mountain and valley shapes In addition, it is surmised that high humidity flow and image defects are further improved by appropriately controlling the flow rate.

  Furthermore, in the present invention, in the microscopic surface shape obtained by AFM, when the horizontal axis is surface height (μm) and the vertical axis is bearing ratio (%), the bearing ratio is an approximation connecting 5% and 20%. When the slope of the straight line is B and the slope of the approximate straight line connecting 80% and 95% is C, B is 250% / μm to 3000% / μm, C is 200% / μm to 2000% / μm, and More preferably, C / B is 0.1 or more and 1.0 or less.

  If the slope B of the peak in the microscopic surface shape is less than 250% / μm, the microscopic peak shape will stand up, making it difficult to clean between the peaks. High humidity flow may occur. Further, if B is larger than 3000% / μm, the shape of the microscopic peak is crushed, so that the contact area with the cleaning member increases, resulting in a decrease in density due to poor cleaning, and escape of toner and the like during cleaning. In some cases, image defects such as toner fusion due to a decrease in toner may occur.

  Also, if the slope C of the valley in the microscopic surface shape is smaller than 200% / μm, the microscopic valley shape will stand up, making it difficult to clean the valley, resulting in high humidity flow. May occur. In addition, when C is larger than 2000% / μm, the microscopic shape is also small, so that an image defect such as a decrease in cleaning property due to an increase in the contact area with the cleaning member or toner fusion. May occur.

  Further, the relationship between the microscopic mountain slope B and the valley slope C also affects the high-humidity flow and image defects. For example, a microscopic valley shape that is difficult to clean with an external additive or a cleaning member contained in the toner even though it has a good microscopic peak shape against high humidity flow and image defects This is because a high humidity flow is generated.

  That is, when the relationship between the microscopic peak-valley shapes C / B is smaller than 0.1, or when C / B is larger than 1.0, C has a good inclination with respect to high-humidity flow and image defects. However, as B becomes larger, the microscopic peaks flatten, so that density defects due to poor cleaning and image defects such as toner fusing due to reduced escape of toner during cleaning occur. There is a case. In addition, as B becomes smaller, a macroscopic mountain shape is formed, so that it becomes difficult to clean the valley and a high humidity flow may occur.

  On the contrary, even if B has a good inclination with respect to the high-humidity flow and the image defect, as C becomes larger, the microscopic valley becomes narrower, so that cleaning becomes difficult and a high-humidity flow occurs. There is a case. Further, as C becomes smaller, the microscopic shape also becomes smaller. Therefore, there is a case where the cleaning property is deteriorated and the toner or the like is fused due to an increase in the contact area with the cleaning member.

  In this way, since the shape of each of the microscopic peaks and valleys affects the high-humidity flow and the image defect, not only the microscopic peak and valley shapes but also the microscopic peak and valley shapes It is presumed that high humidity flow and image defects are further improved by appropriately controlling the above relationship.

  The means for controlling the microscopic and macroscopic surface shapes is not particularly limited, but the shape and height of the peaks and valleys of the microscopic and macroscopic surface shapes can be arbitrarily changed. Since it is possible, it is preferable to polish the electrophotographic photoreceptor surface.

  The polishing means is not particularly limited, such as a polishing method such as polishing tape, magnetic powder, buffing, or a combination thereof, and is appropriately selected and used to control the target surface shape. Is preferred.

  When the abrasive grains such as the abrasive tape are fixed, only the tops of the peaks having the microscopic and macroscopic surface shapes are selectively polished. As a result, since the peak portion is flattened, only B and b change greatly, and conversely, since the valley portion does not substantially change, the change of C and c is small. In addition, when abrasive grains such as magnetic powder and buffing are not fixed and those having fluidity are used, the entire surface is polished regardless of the microscopic and macroscopic surface shapes. As a result, B, b, C, and c all increase, and the microscopic and macroscopic surface shape peaks are rounded.

  In addition, the grain size of the abrasive grains used for polishing must be appropriately selected according to the desired microscopic and macroscopic surface shapes, but the grain size of the abrasive grains is particularly useful for controlling the microscopic surface shape. It is effective. When abrasive grains having a grain size larger than the crest-to-crest interval in the microscopic surface shape are used, only the crests are selectively polished because the abrasive grains cannot enter the troughs. On the other hand, if abrasive grains having a particle size smaller than the interval between peaks are used, both peaks and valleys can be polished. Therefore, it is necessary to appropriately select the particle size of the magnetic powder according to the surface shape before polishing of the electrophotographic photosensitive member, the target surface shape after polishing, etc., but from the point of processing damage of the electrophotographic photosensitive member due to polishing, It is preferable to use abrasive grains having a particle size of 100 μm or less.

  FIG. 4 is a schematic view showing an example of a polishing apparatus for polishing the surface of the electrophotographic photosensitive member used for controlling the microscopic and macroscopic surface shape of the electrophotographic photosensitive member with magnetic powder according to the present invention. It is a schematic sectional drawing. Here, FIG. 4-1 is a schematic cross-sectional view of the entire apparatus, and FIG. 4-2 is a schematic cross-sectional view showing details of the main part of FIG. 4-1.

  In the polishing apparatus shown in FIG. 4A, a magnet roller 402 having a magnetic body is accommodated in a magnet roller container 404, and the surface of the magnet roller 402 is covered with magnetic powder 403. The electrophotographic photosensitive member 401 and the magnet roller 402 are connected to a rotation mechanism (not shown) and can rotate. The magnet roller container 404 is fixed to the movable base 407, and is moved to a position where the magnetic powder 403 contacts the electrophotographic photosensitive member 401 by the moving mechanism 408, whereby the surface of the electrophotographic photosensitive member 401 is made of magnetic powder. It is configured to polish.

  Magnetic powder is formed in a brush shape by the magnetic material inside the magnet roller 402, and the surface of the electrophotographic photosensitive member 401 is polished by the brush-shaped magnetic powder formed on the magnet roller 402, which occurs during polishing. By removing the polishing residue and dust attached during polishing before and after polishing from the polishing surface, polishing scratches can be suppressed.

  Magnetic powder is formed in a brush shape by the magnetic material inside the magnet roller 402, and the surface of the electrophotographic photosensitive member 401 is polished by the brush-shaped magnetic powder formed on the magnet roller 402, which occurs during polishing. By removing the polishing residue and dust attached during polishing before and after polishing from the polishing surface, polishing scratches can be suppressed.

  The magnetic body inside the magnet roller 402 is formed into a cylindrical shape using a metal such as a normal ferrite magnet or a magnetic body such as a plastic magnet, and forms a good brush-like magnetic powder on the magnet roller. Therefore, it is preferable to use a multipolar magnetic material.

  In addition, when a magnetic material having a low magnetic flux line density is used, the flowability of the spikes of the magnetic powder generated on the surface of the magnet roller 102 is increased, so that the finely shaped recesses on the surface of the electrophotographic photosensitive member are formed. It becomes easy to selectively enter, and the fine shape after polishing becomes a rounded shape. On the other hand, when a magnetic material with a high magnetic flux line density is used, the fluidity of the head portion is reduced, so that the high convex portion is easily polished in the fine shape, and the fine shape after polishing is The convex portion has a flattened shape. Therefore, the magnetic flux line density of the magnetic material needs to be appropriately selected depending on the shape of the electrophotographic photosensitive member surface, etc., but if the magnetic flux line density is too low, the magnetic powder cannot be maintained on the surface of the magnet roller 402. It is preferable to use a magnetic material having a surface of 30 mT (= 300 G) or more on the surface of the magnet roller 402.

  As shown in FIG. 4B, the layer thickness of the magnetic powder 403 covering the surface of the magnet roller 402 is controlled by the interval (SB distance) between the magnet roller 402 and the plate-like magnetic body regulating blade 405. The nip width of the magnetic powder layer on the electrophotographic photosensitive member 401 (the circumferential width at the contact portion between the electrophotographic photosensitive member and the magnetic powder) affects the polishing rate and the shape after polishing. By controlling stably, polishing with high stability and reproducibility becomes possible. 4 can be easily realized by controlling the SB distance and the SD distance which is the distance between the electrophotographic photosensitive member 401 and the magnet roller 402 as the nip width control means. In the polishing apparatus shown in FIG. 4, the SD distance can be easily adjusted by a micrometer 406 connected to the magnet roller container 404. Since the polishing rate increases when the nip width is widened and decreases when the nip width is narrowed, the SB distance and the SD distance must be appropriately selected. However, from the viewpoint of preventing contact between the magnet roller 402 and the electrophotographic photosensitive member, the SB distance and The SD distance is preferably 400 μm or more, and the polishing rate is saturated when the nip width is widened. Therefore, the SB distance is preferably 1500 μm or less.

  The outer periphery of the magnet roller 402 is covered with magnetic powder 403 attracted by magnetic force. As this magnetic powder, it is generally possible to use magnetic powders such as ferrite and magnetite, and well-known magnetic toner carriers. If the surface of the magnetic powder is coated with a resin film, etc., the friction between the electrophotographic photosensitive member and the magnetic powder will decrease, and the polishing rate will decrease, so the magnetic powder that is not coated is used. It is preferable to do.

  The shape of the magnetic powder is roughly divided into a spherical magnetic powder such as a sintered body and an irregular magnetic powder such as a pulverized sintered body. The amorphous magnetic powder has a higher polishing rate because the frictional resistance between the surface of the electrophotographic photosensitive member and the magnetic powder is larger than the spherical magnetic powder. Therefore, the shape of the magnetic powder needs to be appropriately selected depending on the polishing rate and the like.

  When polishing with the magnetic powder 403, the outer periphery of the electrophotographic photosensitive member can be uniformly polished by rotating the electrophotographic photosensitive member 401 and polishing the surface of the electrophotographic photosensitive member. The rotational speed of the electrophotographic photoreceptor needs to be appropriately selected depending on the desired microscopic and macroscopic surface shapes, but the rotational speed during polishing is particularly effective for controlling the macroscopic surface shape. When the rotational speed is decreased, the macroscopic surface shape of the electrophotographic photosensitive member surface is selectively polished, and the polishing rate tends to decrease. Conversely, when the rotational speed is increased, the macroscopic surface is observed. Since the troughs of the shape are selectively polished and the polishing rate tends to improve, it is necessary to select appropriately depending on the shape, polishing rate and polishing amount of the electrophotographic photoreceptor surface after polishing, but stable polishing In order to carry out, it is preferable to rotate at 10 to 500 rpm.

  Also, when polishing the surface of the electrophotographic photosensitive member, it is possible to perform stable polishing by always replacing the magnetic powder 403 attracted to the magnet roller 402, so the magnet roller 402 can also be rotated. Is preferred. At this time, the rotation direction of the magnet roller 402 is such that the rotation direction of the electrophotographic photosensitive member 401 and the rotation direction of the magnet roller 402 are opposite to each other at the position where the surface of the electrophotographic photosensitive member is in contact with the magnetic powder. Since the polishing rate is improved, it is preferable from the viewpoint of shortening the polishing time that the rotation direction of the magnet roller 402 is reversed as shown in FIG.

  FIG. 5 is a schematic outline showing an example of a polishing apparatus for polishing the surface of the electrophotographic photosensitive member used for controlling the microscopic and macroscopic surface shape of the electrophotographic photosensitive member with the polishing tape according to the present invention. It is sectional drawing. A pressure elastic roller 503 is connected in the pressure elastic roller container 507. The feed amount of the polishing tape 502 is controlled by a fixed delivery roller 510 and a capstan roller 509 connected to a rotation mechanism (not shown), and the polishing tape sent from the delivery roll 504 passes through the transport path support bar 511. Thus, the take-up roll 505 is wound up. The pressure elastic roller container 507 is configured to perform polishing by pressing the polishing tape 502 against the surface of the electrophotographic photosensitive member 501 by moving in the direction of the electrophotographic photosensitive member 501 by the moving mechanism 506.

The polishing tape 502 is preferably a so-called lapping tape, and the abrasive grains are silicon carbide (SiC), aluminum oxide (Al ₂ O ₃ ), α iron oxide (Fe ₂ O ₃ ), chromium oxide (Cr ₂ O _3). ), Diamond (C), silica (SiO ₂ ), barium carbonate (BaCO ₃ ), and the like. The abrasive grain size is preferably 0.1-100 μm, more preferably 1-40 μm, since the polishing rate decreases if it is too fine, and if it is too coarse, the processing damage to the electrophotographic photoreceptor surface increases.

  The polishing tape 502 is a generally well-known coating method, such as a doctor blade (knife edge) coating method, a dip coating method, an air knife coating method, a curtain coating method, a wire bar coating method, a gravure coating method, an extrusion coating method, etc. It is possible to apply by.

  The polishing tape feed speed may be appropriately determined in consideration of the polishing rate, polishing scratches, processing cost, heat generated by friction, etc., but is preferably 1 to 300 mm / min, more preferably 10 to 100 mm / min.

  The pressure elastic roller 503 is created by forming rubber as a flexible member on a cored bar. The rubber is made of a material such as neoprene (registered trademark) rubber or silicon rubber. As the JIS rubber hardness increases, the polishing rate improves but gradually saturates. Therefore, it is preferable to use a JIS rubber hardness of about 20 to 90.

  Further, the shape of the pressure elastic roller 503 is preferably such that the diameter of the central portion is thicker than both ends in order to perform uniform processing in the direction of the photoreceptor bus, and the difference in diameter is 0.01 to 0.6 mm, and further 0.02 to 0.4. mm is preferred.

Further, when polishing the electrophotographic photosensitive member 501, it is preferable that the pressure applied to the rotating electrophotographic photosensitive member 301 from the pressure elastic roller 503 is 9.8 × 10 ^{3 to} 1.96 × 10 ⁶ N / m ^2. 4.9 × 10 ^{4 to} 9.8 × 10 ⁵ N / m ² is more preferable. If the pressing pressure is too low, the polishing rate is reduced. Conversely, if the pressing pressure is too high, a large amount of the resin component of the polishing tape is transferred to the surface of the electrophotographic photosensitive member due to heat generated on the polishing surface.

  In the polishing surface where the electrophotographic photosensitive member 501 and the polishing tape 502 are in contact, the polishing surface is cooled with water, cold air, etc. to prevent transfer of the resin component to the electrophotographic photosensitive member due to frictional heat and dropping off of abrasive grains from the polishing tape. It is preferable to cool with As a method for cooling the polishing surface, the polishing surface may be directly cooled, a cooling means may be brought into contact with the surface of the pressure elastic roller, or the inside of the electrophotographic photosensitive member may be cooled.

  In the present invention, the macroscopic surface shape of the electrophotographic photosensitive member is affected by the surface shape of the substrate on which the film is formed. Therefore, it is preferable to control the surface shape of the substrate as means for controlling the macroscopic surface shape of the electrophotographic photosensitive member. The means for controlling the surface shape of the substrate is not particularly limited, but it is preferable to cut the substrate with a lathe or the like from the viewpoint of strictly controlling the surface shape of the substrate.

"Electrophotographic photoreceptor according to the present invention"
The present invention is characterized in that an electrophotographic photoreceptor having a photoconductive layer composed of at least an amorphous material on a substrate is used. FIG. 8 shows a schematic cross-sectional view of an a-Si electrophotographic photosensitive member as an example of an electrophotographic photosensitive member suitable for the present invention.

  The electrophotographic photoreceptor shown in FIG. 8 (a) is amorphous silicon containing a hydrogen atom or a halogen atom as a constituent element on a cylindrical substrate 801 (hereinafter referred to as “a-Si: H, X”). A photoconductive layer 802 having photoconductivity is provided.

  The photoconductor for electrophotography shown in FIG. 8B has a photoconductive layer 802 made of a-Si: H, X and having photoconductivity on a cylindrical substrate 801, and amorphous silicon (or amorphous carbon). ) A surface layer 803 is provided.

  An electrophotographic photoreceptor shown in FIG. 8C has an amorphous silicon based charge injection blocking layer 804 and a photoconductive layer 802 made of a-Si: H, X and having photoconductivity on a cylindrical substrate 801. And an amorphous silicon-based (or amorphous carbon-based) surface layer 803. The interface between the photoconductive layer 802 and the surface layer 803 may be subjected to interface control that continuously changes and suppresses interface reflection.

  In the electrophotographic photoreceptor shown in FIG. 8D, a photoconductive layer 802 is provided on a cylindrical substrate 801. This photoconductive layer includes a charge generation layer 805 and a charge transport layer 806 made of a-Si: H, X, and an amorphous silicon (or amorphous carbon) surface layer 803 is provided thereon. The interface between the charge generation layer 805 and the surface layer 803 may be continuously changed to perform interface control that suppresses interface reflection.

  The surface of the electrophotographic photosensitive member in the present invention may be polished after the surface layer as shown in FIGS. 8B, 8C, and 8D is formed, or as shown in FIG. Such a photoconductive layer 802 may be formed and then polished, and the surface layer 803 may be formed after polishing.

"Electrophotographic photoreceptor manufacturing apparatus according to the present invention"
The a-Si electrophotographic photosensitive member is produced by a generally known film forming method such as a vacuum deposition method, a sputtering method, an ion plating method, a thermal CVD method, a photo CVD method, a plasma CVD method, The a-Si electrophotographic photosensitive member shown in FIG. 8 may be formed on the substrate, and in particular, plasma CVD, that is, decomposition by glow discharge by applying high-frequency power in the RF band or VHF band to the source gas, It is preferable to produce an a-Si electrophotographic photosensitive member by a method of forming a deposited film on a substrate.

  FIG. 6 is a schematic schematic diagram showing an example of an a-Si electrophotographic photosensitive member manufacturing apparatus using a high-frequency plasma CVD method using a VHF band as a power supply frequency, and FIG. 7 outputs two different high-frequency powers. It is a typical schematic block diagram which shows an example of the a-Si electrophotographic photoreceptor manufacturing apparatus by the possible high frequency plasma CVD method. The a-Si electrophotographic photoreceptor manufacturing apparatus in FIG. 6 includes at least a reaction vessel 602 capable of containing a cylindrical substrate 601 and a source gas introduction pipe 609 for supplying a source gas into the reaction vessel 602 and a source gas. A deposition apparatus comprising a cathode 607 for introducing power for decomposing the gas, a source gas supply apparatus 604 for supplying a source gas into the reaction container 602, an exhaust apparatus (not shown) for exhausting the reaction container 602, and the cathode 607 It consists of a power supply device that supplies power.

  First, the cylindrical substrate 601 is installed in the reaction vessel 602, the inside of the reaction vessel 602 is exhausted through an exhaust port 1012 by an exhaust device (not shown), and then an inert gas is supplied into the reaction vessel 602. After the internal pressure of the reaction vessel 602 is set to a desired pressure, the cylindrical substrate 601 is heated to a desired temperature by the heater 608.

  After the heating step is completed by the above procedure, a deposited layer forming step is subsequently performed. After the inert gas in the reaction vessel 602 is exhausted by an exhaust device (not shown), the source gas is supplied into the reaction vessel 602 from the source gas supply device 604 through the source gas introduction pipe 609. When the internal pressure of the reaction vessel 602 is stabilized, high-frequency power is supplied from the high-frequency power source 605 to the cathode 607 via the matching box 606 to cause glow discharge in the reaction vessel 602. With this discharge energy, the source gas in the reaction vessel 602 is decomposed, and a predetermined deposition layer is formed on the cylindrical substrate 601. In order to improve the uniformity of the deposited layer in the circumferential direction of the substrate, it is effective to rotate the substrate 601 at a predetermined speed by the motor 611 via the driving unit 610 during the formation of the deposited layer. Thus, when the deposited layer reaches a desired film thickness, the supply of high-frequency power is stopped, and the supply of the source gas from the source gas supply device 604 is stopped to finish the formation of the deposited layer. By repeating the same operation a plurality of times, it becomes possible to form a deposited layer having a multilayer structure.

[Electrophotographic equipment]
FIG. 9 shows an embodiment of an electrophotographic apparatus in which the electrophotographic photosensitive member produced by the present invention is used. The electrophotographic apparatus of this example is suitable when a cylindrical electrophotographic photosensitive member is used.

  In FIG. 9, a primary charger 902 that charges the electrophotographic photosensitive member 901 for forming an electrostatic latent image around the electrophotographic photosensitive member 901, and an electrophotographic photosensitive member 901 on which the electrostatic latent image is formed. Developer 904 for supplying developer (toner), transfer charger 905 for transferring toner on the surface of the electrophotographic photosensitive member to a transfer material 513 such as paper, and cleaning for the surface of the electrophotographic photosensitive member A cleaner 906 is provided. In addition, a photoconductor heater (not shown) is disposed inside the electrophotographic photoconductor 901, and the electrophotographic photoconductor 901 can be heated by this photoconductor heater. In this example, the surface of the electrophotographic photosensitive member is cleaned using the elastic roller 907 and the cleaning blade 908 in order to clean the surface of the photosensitive member uniformly, but only one of them may be used. Further, between the cleaner 906 and the primary charger 902, a neutralizing lamp 909 is provided for neutralizing the surface of the electrophotographic photosensitive member in preparation for the next copying operation, and the transfer material 904 is a feed roller 910. Sent by. As a light source for exposure A, a halogen light source or a light source mainly having a single wavelength is used.

  Formation of a copy image using such an electrophotographic apparatus is performed as follows, for example. First, the electrophotographic photoreceptor 901 is rotated at a predetermined speed in the direction of the arrow, and the surface of the electrophotographic photoreceptor 901 is uniformly charged using the primary charger 902. Next, image exposure A is performed on the surface of the charged electrophotographic photoreceptor 901, and an electrostatic latent image of the image is formed on the surface of the electrophotographic photoreceptor 901. Then, when the electrostatic latent image portion on which the electrostatic latent image is formed on the surface of the electrophotographic photosensitive member 901 passes through the installation portion of the developing device 903, toner is supplied to the surface of the electrophotographic photosensitive member 901 by the developing device 903. The electrostatic latent image is visualized (developed) as an image by the toner 911, and this toner image reaches the installation portion of the transfer charger 905 as the photosensitive member 901 rotates, and is sent by the feed roller 910 here. It is transferred to the coming transfer material 904.

  After the transfer is completed, the transfer material is separated from the electrophotographic photosensitive member by a separation charger using electrostatic force. The separation may be performed mechanically using a belt, a claw, or the like. In order to prepare for the next copying process, residual toner is removed from the surface of the electrophotographic photosensitive member 901 by the cleaner 906, and further, the electric charge is removed by the static eliminating lamp 909 so that the potential of the surface of the electrophotographic photosensitive member 901 becomes zero or almost zero. One copy process is completed.

  EXAMPLES Hereinafter, although an Example and a comparative example demonstrate this invention further in detail, this invention is not restrict | limited at all by these.

<Electrophotographic photoconductor preparation example 1>
A cylindrical substrate made of aluminum (diameter 80 mm, length 358 mm) is mirror-finished with a diamond miracle bite, and the macroscopic surface shape of the cylindrical substrate is determined by a surface roughness meter according to the measurement method shown below. [5% to 95%] (the distance from 5% to 95% of the load length ratio (mr)) was 0.16 ± 0.1 μm, and the interval between the peaks was 120 ± 10 μm by microscopic observation. Next, using the plasma processing apparatus shown in FIG. 6, a charge injection blocking layer, a photoconductive layer, and a surface layer are formed in this order on the cylindrical substrate under the conditions shown in Table 1, and positively charged a-Si An electrophotographic photosensitive member was produced. At this time, a high frequency power source capable of outputting high frequency power of 105 MHz was used. Further, “180 → 20” in the production conditions shown in Table 1 indicates that the gas flow rate is continuously changed from 180 ml / min (normal) to 20 ml / min (normal).

<Measurement method with surface roughness meter>
The measurement position is a center position in the longitudinal direction of the electrophotographic photosensitive member at a 0 ° position and a 180 ° position when an arbitrary circumferential direction of the electrophotographic photosensitive member is 0 °, and 3 × 2 of ± 100 mm from the central position. A total of six locations were measured with a surface roughness meter (manufactured by Mitutoyo: SV-C4000) and analyzed using a Dualtrace Pack Surfpak.

  The measurement conditions of the surface roughness meter were a standard stylus (12AAB403) and a standard nosepiece (12AAC753) with a tip radius of 5 μm, a speed of 0.1 mm / S, a pitch of 0.5 μm, and a detector for 4 mN. The evaluation conditions were an R curve (cross-section curve), standard OLDMIX, standard length 0.8 mm, number of sections 5, evaluation length 4.0 mm, running and rear running 0.4 mm, cutoff (λc) 0.8. .

  As shown in FIG. 10, the reference line of the cutting level difference δc is set to a load length ratio of 5%, and the cutting line is set to a load length ratio of 95%, as shown in FIG. 95%]. The average value of δc [5% to 95%] obtained at each measurement position in this way was defined as a.

  Next, from the obtained surface shape waveform, as shown in FIG. 11, the plateau rate reference line is set to a load length rate of 0%, and the cut lines are set to a load length rate of 5%, 10%, 15% and 20%. The distance from the highest point in each load length ratio was obtained by setting the percentage. The obtained measurement data was linearly approximated with the distance from the highest point (μm) on the horizontal axis and the load length ratio (%) on the vertical axis, and the slope of the straight line was obtained. The average value of the slope of the approximate straight line obtained at each measurement position was defined as b.

  In addition, the plateau rate reference line is set to 0% load length rate, and the cutting line is set to 80%, 85%, 90% and 95% load length rate, and the distance from the highest point at each load length rate. Asked. The obtained measurement data was linearly approximated with the distance from the highest point (μm) on the horizontal axis and the load length ratio (%) on the vertical axis, and the slope of the straight line was obtained. The average value of the slope of the approximate straight line obtained at each measurement position was defined as c.

Example 1
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 1 was subjected to a polishing treatment under the following polishing conditions 1 while changing the polishing time. The microscopic surface shape of the electrophotographic photosensitive member was evaluated by the following AFM measurement method, and a polishing time was calculated such that the value of A (μm) took the values shown in Table 2. Further, the microscopic surface shapes A, B, and C of the electrophotographic photosensitive member after performing the polishing treatment with the polishing time satisfying such conditions are determined by a measurement method using AFM shown below, and the macroscopic surface shape a, b and c were determined by the measurement method using the surface roughness meter described above. The measurement results are shown in Table 4.

  For the electrophotographic photoreceptors 1 to 7, the high humidity flow (characters), the high humidity flow (halftone), black streaks, and poor cleaning were evaluated under the following conditions. The evaluation results are shown in Table 4.

<Polishing condition 1>
Using the polishing apparatus shown in FIG. 4, the rotation speed of the electrophotographic photosensitive member 401 is adjusted to 90 rpm, the rotation speed of the magnet roller 402 is 240 rpm, the magnetic force of the magnet roller 402 is 900 G, the SD distance is 0.4 mm, and the SB distance is 1.0 mm. The magnetic powder 403 was obtained by removing 3.0 μm or less of Cu-Zn phyllite (DFC450) manufactured by Dowa Iron Powder Industry Co., Ltd.

<Measurement method by AFM>
The measurement position was the same as the measurement position of the surface roughness meter. AFM uses Quesant's Q-SCOPE250 (Version 3.181), head Tape10, and probe NSC16, and an AFM observation image measured with SCAN RATE 4Hz in the range of 10μm × 10μm Parabolic of Q-SCOPE250's Tilt Removal manufactured by Quesant An AFM observation image consisting of a three-dimensional shape obtained after performing Line by line correction was graphed using a Bearing Ratio of Histogram Analysis.

  In this graph, surface height [5% to 95%] corresponding to a bearing ratio of 5% to 95% was obtained, and an average value of surface height [5% to 95%] obtained at each measurement position was defined as A.

  Moreover, each surface height was calculated | required in Bearing Ratio 5%, 10%, 15%, and 20% position from the said graph. The obtained measurement data was linearly approximated with the horizontal axis surface height (μm) and the vertical axis Bearing Ratio (%) to determine the slope of the straight line. The average value of the inclination of the approximate straight line obtained at each measurement position was B.

  Furthermore, each surface height at the bearing ratio of 80%, 85%, 90% and 95% was obtained from the above graph. The obtained measurement data was linearly approximated with depth (μm) on the horizontal axis and mr (%) on the vertical axis, and the slope of the straight line was obtained. The average value of the slope of the approximate straight line obtained at each measurement position was C.

<Evaluation method using electrophotographic apparatus>
The electrophotographic apparatus used for the evaluation was a Canon digital electrophotographic apparatus iR-6000 (pre-exposure 660 nm LED array, image exposure 655 nm laser, process speed 265 mm / sec).

  Evaluation of high-humidity flow and image defects is based on the fact that an electrophotographic photosensitive member is placed in a high-temperature, high-humidity environment of 30 ° C and 80%, and the photosensitive drum heater is used while the electrophotographic photosensitive member is running for the daytime. The surface temperature of the photoconductor was maintained at about 40 ° C. while the electrophotographic apparatus was stopped, and the durability was evaluated by a sequence in which the photoconductor heater was turned off while the nighttime electrophotographic apparatus was stopped.

<Evaluation of high humidity flow>
Evaluation of high-humidity flow uses a test pattern with a printing rate of 1% and a lower printing rate than usual. A4 copy paper has a continuous paper durability of 20,000 sheets per day for 5 days, up to 100,000 sheets. After the endurance of paper passing, the environmental condition was changed to 35 ° C / 85%, and it was left for a day and night, and the next morning was imaged to evaluate the high humidity flow. The image used was a copy image obtained when a character test chart in which 6 to 8 point “electric” characters were repeatedly printed on one line and a halftone chart made by Canon were placed on the platen and copied.

The copy image obtained by the character chart was observed, and up to which point the character could be read was evaluated. However, at this time, when there was unevenness on the image, the evaluation was made in the entire image region and the result of the worst part was shown. The evaluation criteria are as follows.

◎ ... Can read up to 6 characters.
○ ・ ・ ・ Can read up to 7 characters.
△ ・ ・ ・ Can read up to 8 point characters.
× …… Some of the 8-point characters cannot be read.

Further, the image density of the copy image obtained from the halftone chart was measured. As shown in FIG. 12, the measurement position is obtained by dividing the center of the copy image direction corresponding to the longitudinal direction of the electrophotographic photosensitive member in the A3 copy image into 1 cm square ranges in the rotation direction of the electrophotographic photosensitive member. The image density was measured, and the ratio of the minimum value to the maximum value of the reflection density (minimum value of reflection density / maximum value of reflection density) was determined and compared. The image density was measured using an image densitometer (Macbeth RD914). The evaluation criteria are as follows.

◎ ...... Image density in the lowest density range is higher than image density in the highest density range
Very good at 90% to 100%.
○ …… The image density in the lowest density range is compared to the image density in the highest density range.
Good at 85% or more and less than 90%.
△ ... The image density in the lowest density range is compared to the image density in the highest density range.
There is no practical problem at 80% or more and less than 85%.
× ...... The image density in the lowest density range is compared to the image density in the highest density range.
Less than 80%, density difference can be confirmed visually.

<Image defect evaluation method>
The image defect was carried out by the following method after performing continuous paper passing durability similar to the high-humidity flow evaluation. The black streak was evaluated by placing a Canon color laser copier paper (TKCL A3) on the platen as an all-white chart and observing the copy image obtained during copying. The A3 test chart shown was placed on the platen and the copy image obtained when copying was used.

The black streak was evaluated by observing a copy image obtained with an all-white chart and checking whether a black streak having a length of 1 mm or more could be confirmed on the image. The evaluation criteria are as follows.

◎ ...... Cannot confirm at all.
○ A black streak of less than 1 mm can be confirmed slightly.
Δ: Black stripes of 1 mm or more can be confirmed slightly.
× ... Black stripes of 1 mm or more can be easily confirmed.

Evaluation of poor cleaning was performed by placing a test chart on which a total of 20 black circles with a reflection density of 1.5 and a diameter of 10 mm printed at 10 mm intervals were printed on the platen as shown in FIG. The image density of the copy image obtained at times was measured, and the average value of 10 images selected in order from the black circle with the highest density was obtained. The image density was measured using an image densitometer (Macbeth RD914). The evaluation criteria are as follows.

◎ …… The measured reflection density is 1.4 or more.
○ …… The measured reflection density is 1.3 or more and less than 1.4.
Δ: The measured reflection density is 1.2 or more and less than 1.3.
× …… The measured reflection density is less than 1.2.

<< Comparative Example 1 >>
Without polishing the electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 1, A, B, and C were measured by the measurement method using the AFM, and a, b, and C were measured by the measurement method using the surface roughness meter. c was determined. Further, the high-humidity flow (characters), high-humidity flow (halftone), black stripes, and poor cleaning of the electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 1 were evaluated in the same manner as in Example 1. The evaluation results are shown in Table 4. However, the number of the electrophotographic photosensitive member used in Comparative Example 1 is (1).

<< Comparative Example 2 >>
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 1 was subjected to a polishing process under the same polishing conditions 1 as in Example 1 while changing the polishing time, and the value A obtained by the same method as in Example 1 was obtained. The polishing time was determined such that (μm) takes the values shown in Table 3. Further, the microscopic surface shapes A, B, and C and the macroscopic surface shapes a, b, and c of the electrophotographic photosensitive member after the polishing process is performed with a polishing time that satisfies such conditions are the same as in the first embodiment. Asked. The measurement results are shown in Table 4. Further, the high-humidity flow (characters), high-humidity flow (halftone), black stripes, and poor cleaning of the electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 1 were evaluated in the same manner as in Example 1. The evaluation results are shown in Table 4.

  Measurement results of A, B, C, a, b, c, A × a, C / B, c / b obtained by Example 1 and Comparative Examples 1 and 2, high humidity flow (character), high humidity flow ( Table 4 shows the evaluation results of halftone), black streaks, and poor cleaning.

From the results of Table 4, the microscopic and macroscopic surface shapes of the electrophotographic photosensitive member are as follows. A is 0.02 μm or more and 0.25 μm or less, a is 0.09 μm or more and 0.18 μm or less, and A × a is 1.8 × 10 ⁻³ μm. High humidity flow (letters), high humidity flow (halftone), black streaks, and poor cleaning were controlled by controlling to ² or more and 4.5 × 10 ^-2 μm ² . In addition, it was improved by controlling A to 0.03 μm to 0.20 μm, a to 0.10 μm to 0.15 μm, and A × a to 3.0 × 10 ⁻³ μm ^{2 to} 3.0 × 10 ⁻² μm ² . . In addition, A is controlled from 0.05 μm to 0.20 μm, a is from 0.10 μm to 0.15 μm, and A × a is controlled from 5.0 × 10 ⁻³ μm ^{2 to} 3.0 × 10 ⁻² μm ² to further improve the cleaning failure. Especially, high humidity flow (letters), high humidity flow (halftone), black streaks and poor cleaning.

<Electrophotographic photoconductor preparation example 2>
An electrophotographic photoreceptor was produced under the conditions shown in Electrophotographic photoreceptor preparation example 1. However, in the electrophotographic photosensitive member production example 2, a macroscopic surface shape is obtained by using a cylindrical substrate processed so that δc [5% to 95%] obtained by a surface roughness meter is 0.30 ± 0.1. A photographic photoreceptor was prepared.

Example 2
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 2 was subjected to polishing treatment under the same polishing conditions 1 as in Example 1 while changing the polishing time, and the value A obtained by the same method as in Example 1 was obtained. The polishing time was determined such that (μm) takes the values shown in Table 5. Further, the microscopic surface shapes A, B, and C and the macroscopic surface shapes a, b, and c after performing the polishing process with the polishing time satisfying such conditions were obtained in the same manner as in Example 1. The measurement results are shown in Table 7.

  The electrophotographic photoreceptors 8 to 13 were evaluated in the same manner as in Example 1 for high humidity flow (characters), high humidity flow (halftone), black streaks, and poor cleaning. The evaluation results are shown in Table 7.

<< Comparative Example 3 >>
A, B, C and a, b, c were determined in the same manner as in Example 1 without polishing the electrophotographic photosensitive member produced in Electrophotographic photosensitive member production example 2. Further, as in Example 1, high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning were evaluated. The evaluation results are shown in Table 7. However, the number of the electrophotographic photosensitive member used in Comparative Example 3 is (5).

<< Comparative Example 4 >>
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 2 was subjected to polishing treatment under the same polishing conditions 1 as in Example 1 while changing the polishing time, and the value A obtained by the same method as in Example 1 was obtained. The polishing time was determined such that (μm) takes the values shown in Table 6. Further, A, B, C, and a, b, c after performing the polishing treatment with the polishing time satisfying such conditions were obtained in the same manner as in Example 1. Further, as in Example 1, high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning were evaluated. The evaluation results are shown in Table 7.

  Measurement results of A, B, C, a, b, c, A × a, C / B, c / b obtained by Example 2 and Comparative Examples 3, 4 and high humidity flow (character), high humidity flow ( Table 7 shows the evaluation results of halftone), black streaks, and poor cleaning.

From the results shown in Table 7, the microscopic and macroscopic surface shapes of the electrophotographic photosensitive member are as follows: A is 0.01 μm or more and 0.15 μm or less, a is 0.14 μm or more and 0.25 μm or less, and A × a is 1.4 × 10 ⁻³ μm. High humidity flow (letters), high humidity flow (halftone), black streaks and poor cleaning were controlled by controlling to ² or more and 3.8 × 10 ^-2 μm ² . In addition, black streaks and poor cleaning can be achieved by controlling A to 0.02 to 0.15 μm, a to 0.15 to 0.25 μm, and A × a to 3.0 × 10 ⁻³ μm ^{2 to} 3.8 × 10 ⁻² μm ^2. Became better. Furthermore, by controlling A to be 0.03 to 0.15 μm, a to be 0.16 to 0.25 μm, and A × a to be 4.8 × 10 ⁻³ μm ^{2 to} 3.8 × 10 ⁻² μm ² The defect was good, and particularly good for high-humidity flow (characters), high-humidity flow (halftone), black streaks, and poor cleaning.

<Electrophotographic photoconductor preparation example 3>
An electrophotographic photoreceptor was produced under the conditions shown in Electrophotographic photoreceptor preparation example 1. However, in the electrophotographic photosensitive member production example 3, the macroscopic surface shape is obtained by using a cylindrical substrate processed so that δc [5% to 95%] obtained by a surface roughness meter is 0.08 ± 0.1. A photographic photoreceptor was prepared.

Example 3
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 3 was subjected to a polishing treatment under the same polishing conditions 1 as in Example 1 while changing the polishing time, and the value A obtained by the same method as in Example 1 was obtained. The polishing time was determined such that (μm) takes the values shown in Table 8. Further, the microscopic surface shapes A, B, and C and the macroscopic surface shapes a, b, and c after performing the polishing process with the polishing time satisfying such conditions were obtained in the same manner as in Example 1. The measurement results are shown in Table 10.

  The electrophotographic photoreceptors 14 to 21 were evaluated in the same manner as in Example 1 for high humidity flow (characters), high humidity flow (halftone), black streaks, and poor cleaning. The evaluation results are shown in Table 10.

<< Comparative Example 5 >>
A, B, C, and a, b, and c were determined in the same manner as in Example 1 without polishing the electrophotographic photoreceptor produced in Electrophotographic photoreceptor production example 3. Further, as in Example 1, high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning were evaluated. The evaluation results are shown in Table 10. However, the number of the electrophotographic photosensitive member used in Comparative Example 5 is (10).

<< Comparative Example 6 >>
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 3 was subjected to a polishing treatment under the same polishing conditions 1 as in Example 1 while changing the polishing time, and the value A obtained by the same method as in Example 1 was obtained. The polishing time was determined such that (μm) takes the values shown in Table 9. Further, A, B, C, and a, b, c after performing the polishing treatment with the polishing time satisfying such conditions were obtained in the same manner as in Example 1. Further, as in Example 1, high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning were evaluated. The evaluation results are shown in Table 10.

  Measurement results of A, B, C, a, b, c, A × a, C / B, c / b obtained by Example 3 and Comparative Examples 5 and 6, high humidity flow (characters), high humidity flow ( Table 10 shows the evaluation results of halftone), black streaks, and poor cleaning.

From the results of Table 10, the microscopic and macroscopic surface shapes of the electrophotographic photosensitive member are as follows. A is 0.02 μm or more and 0.30 μm or less, a is 0.05 μm or more and 0.10 μm or less, and A × a is 1.0 × 10 ⁻³ μm. High humidity flow (letters), high humidity flow (halftone), black streaks, and poor cleaning were controlled by controlling to ² or more and 3.0 × 10 ^-2 μm ² . In addition, it was improved by controlling A to 0.05 μm to 0.25 μm, a to 0.06 μm to 0.09 μm, and A × a to 3.0 × 10 ⁻³ μm ^{2 to} 2.3 × 10 ⁻² μm ² . . By controlling b to 1000% / μm or less and c to 1000% / μm or less, black streaks and poor cleaning are further improved, A is 0.15 μm to 0.20 μm, a is 0.07 μm to 0.08 μm, By controlling A × a to 1.1 × 10 ⁻³ μm ² or more and 1.6 × 10 ⁻² μm ² , high-humidity flow (halftone) becomes even better, and high-humidity flow (character), high-humidity flow (halftone) ), Particularly good for black streaks and poor cleaning.

<Electrophotographic photosensitive member production example 4>
An aluminum cylindrical substrate (diameter 80 mm, length 358 mm) is mirror-finished with a diamond miracle bite, and the cutting level difference δc [5% to 95%] of the macroscopic surface shape of the cylindrical substrate is shown in Table 11. Was processed as follows. Next, using the plasma processing apparatus shown in FIG. 7, a charge injection blocking layer, a photoconductive layer, and a surface layer are formed in this order on the cylindrical substrate under the conditions shown in Table 12, and positively charged a-Si An electrophotographic photosensitive member was produced. When the microscopic surface shape of the produced a-Si electrophotographic photosensitive member was measured by AFM under the above conditions, it was almost unaffected by the macroscopic surface shape of the cylindrical substrate, and A was 0.20 ± 0.01 μm. there were.

  At this time, a high frequency power source capable of outputting high frequency power of 105 MHz and 60 MHz was used. Further, “200 → 20” in the manufacturing conditions shown in Table 12 represents that the gas flow rate is continuously changed from 200 ml / min (normal) to 20 ml / min (normal).

Example 4
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 4 was polished under the same polishing conditions 1 as in Example 1 until the microscopic surface shape A of the electrophotographic photosensitive member became 0.10 μm. After polishing of the electrophotographic photosensitive member, microscopic surface shapes A, B, and C and macroscopic surface shapes a, b, and c were obtained in the same manner as in Example 1. The measurement results are shown in Table 13. However, the photoreceptor numbers of the electrophotographic photoreceptor after polishing formed on the substrates of the substrate numbers [2] to [10] are 18 to 26, respectively.

  The electrophotographic photoreceptors 18 to 26 were evaluated in the same manner as in Example 1 for high humidity flow (characters), high humidity flow (halftone), black streaks, and poor cleaning. The evaluation results are shown in Table 13.

<< Comparative Example 7 >>
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 4 was polished in the same manner as in Example 4 until the microscopic surface shape A of the electrophotographic photosensitive member became 0.10 μm. After polishing of the electrophotographic photosensitive member, microscopic surface shapes A, B, and C and macroscopic surface shapes a, b, and c were obtained in the same manner as in Example 1. The measurement results are shown in Table 13. However, the photoreceptor numbers of the electrophotographic photoreceptor after polishing formed on the substrates [1], [11] to [14] are (17) and (18) to (21), respectively.

  Measurement results of A, B, C, a, b, c, A × a, C / B, c / b obtained by Example 4 and Comparative Example 7, high humidity flow (character), high humidity flow (halftone ), Black streaks and poor cleaning evaluation results are shown in Table 13.

From the results shown in Table 13, when the microscopic and macroscopic surface shape of the electrophotographic photosensitive member is polished so that A is 0.10 μm, a is 0.03 μm or more and 0.45 μm or less, and A × a is 3.0 × 10 ^−. High humidity flow (letters), high humidity flow (halftone), black streaks and poor cleaning were controlled by controlling to ³ × m ² or more and 4.5 × 10 ⁻² μm ² . Also, by controlling a from 0.05μm to 0.35μm and A × a from 5.0 × 10 ⁻³ μm ^{2 to} 3.5 × 10 ⁻² μm ² , high humidity flow (character), high humidity flow (halftone) And poor cleaning. When b is 250% / μm or more and c is 220% / μm or more, the high-humidity flow (character) is further improved, a is 0.07 μm or more and 0.30 μm or less, and A × a is 7.0 × 10 ^−3. By controlling to μm ² or more and 3.0 × 10 ^-2 μm ² , high-humidity flow (halftone), black streaks and poor cleaning are further improved, high-humidity flow (character), high-humidity flow (halftone), black Especially good for streaks and poor cleaning.

Example 5
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 4 was polished under the same polishing conditions 1 as in Example 1 until the microscopic surface shape A of the electrophotographic photosensitive member became 0.07 μm. After polishing of the electrophotographic photosensitive member, microscopic surface shapes A, B, and C and macroscopic surface shapes a, b, and c were obtained in the same manner as in Example 1. The measurement results are shown in Table 14. However, the photoreceptor numbers of the electrophotographic photoreceptor after polishing formed on the substrates of the substrate numbers [3] to [13] are 27 to 37, respectively.

  For the electrophotographic photoreceptors 27 to 37, high humidity flow (characters), high humidity flow (halftone), black streaks, and poor cleaning were evaluated in the same manner as in Example 1. The evaluation results are shown in Table 15.

<< Comparative Example 8 >>
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 4 was polished in the same manner as in Example 5 until the microscopic surface shape A of the electrophotographic photosensitive member became 0.07 μm. After polishing of the electrophotographic photosensitive member, microscopic surface shapes A, B, and C and macroscopic surface shapes a, b, and c were obtained in the same manner as in Example 1. The measurement results are shown in Table 14. However, the photoreceptor numbers of the electrophotographic photoreceptor after polishing formed on the substrates [1] to [2] and [14] are (22) to (23) and (24), respectively.

  Measurement results of A, B, C, a, b, c, A × a, C / B, c / b obtained by Example 5 and Comparative Example 8, high humidity flow (character), high humidity flow (halftone ), Black streaks and poor cleaning evaluation results are shown in Table 14.

From the results in Table 14, when the microscopic and macroscopic surface shape of the electrophotographic photosensitive member is polished so that A is 0.07 μm, a is 0.03 μm or more and 0.55 μm or less, and A × a is 2.1 × 10 ^{−. By controlling to 3} μm ² or more and 3.9 × 10 ⁻² μm ² , high humidity flow (letters), high humidity flow (halftone), black streaks and poor cleaning were obtained. Further, it was improved by controlling a to 0.05 μm or more and 0.45 μm or less and A × a to 3.5 × 10 ⁻³ μm ² or more and 3.2 × 10 ⁻² μm ² . When b is 870% / μm or less and c is 840% / μm or less, black streaks and poor cleaning are further improved, a is 0.07 μm or more and 0.40 μm or less, and A × a is 1.2 × 10 ⁻² μm. ^By controlling to ² or more 2.8 × 10 ^-2 μm ² , the high humidity flow (halftone) becomes even better, against high humidity flow (letters), high humidity flow (halftone), black streaks and poor cleaning. Especially good.

Example 6
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 2 was subjected to polishing treatment under different polishing conditions 2 shown below, and the polishing process was carried out. A value (μm) obtained by the same method as in Example 1 The polishing time was determined so as to take the values shown in Table 15. Further, the microscopic surface shapes A, B, and C of the electrophotographic photosensitive member after the polishing process is performed with the polishing time satisfying such conditions are obtained by the measurement method using the AFM described above, and the macroscopic surface shapes a and b are determined. , C were determined by the measurement method using the surface roughness meter described above. The measurement results are shown in Table 17.

<Polishing condition 2>
Using the polishing apparatus shown in FIG. 5, the rotational speed of the electrophotographic photosensitive member 501 is 90 rpm, the polishing tape feed speed is 30 mm / min, and the pressure from the pressure elastic roller 503 to the electrophotographic photosensitive member 501 is 4.9 × 10 ^5. N / m ² , the material of the pressure elastic roller is neoprene (registered trademark) rubber with JIS rubber hardness 50, or the diameter of the central part is 0.1mm thicker than both ends, and the polishing tape 502 is Fuji Photo Film The wrapping tape LT-C2000 (Abrasive grain: silicon carbide (SiC), particle diameter: 6 μm, coating method: doctor blade (knife edge) coating method) was used, and the polishing tape was not cooled.

  The electrophotographic photoreceptors 38 to 46 were evaluated in the same manner as in Example 1 for high humidity flow (characters), high humidity flow (halftone), black streaks, and poor cleaning. The evaluation results are shown in Table 17.

<< Comparative Example 9 >>
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 2 was subjected to a polishing treatment under the same polishing conditions 2 as in Example 6 while changing the polishing time, and the value of A obtained by the same method as in Example 1 The polishing time was calculated such that (μm) took the values shown in Table 16. Further, the microscopic surface shapes A, B, and C and the macroscopic surface shapes a, b, and c of the electrophotographic photosensitive member after the polishing process is performed with a polishing time that satisfies such conditions are the same as in the first embodiment. Asked. Further, as in Example 1, high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning were evaluated. The evaluation results are shown in Table 17.

  Measurement results of A, B, C, a, b, c, A × a, C / B, c / b obtained by Example 6 and Comparative Examples 3 and 9, high humidity flow (characters), high humidity flow ( Table 17 shows the evaluation results of halftone), black streaks, and poor cleaning.

From the results of Table 17, the microscopic and macroscopic surface shapes of the electrophotographic photosensitive member are as follows: A is 0.01 μm or more and 0.17 μm or less, a is 0.11 μm or more and 0.25 μm or less, and A × a is 1.1 × 10 ⁻³ μm. High humidity flow (letters), high humidity flow (halftone), black streaks, and poor cleaning were controlled by controlling to ² or more and 4.3 × 10 ^-2 μm ² . In addition, it was improved by controlling A to 0.03 μm to 0.15 μm, a to 0.12 μm to 0.23 μm, and A × a to 3.6 × 10 ⁻³ μm ^{2 to} 3.5 × 10 ⁻² μm ² . . And when c / b is 0.50 or more, black streaks are further improved, B is 3000% / μm or less, C is 200% / μm or more, and C / B is 0.10 or more. Tone) and poor cleaning, and particularly good for high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning.

<Electrophotographic photoreceptor preparation example 5>
An aluminum cylindrical substrate (diameter 80 mm, length 358 mm) is processed with a diamond tool having a tip diameter of 5 mm, and the macroscopic surface shape of the cylindrical substrate is cut by a surface roughness meter according to the measurement method shown below. Processing was performed so that the difference δc [5% to 95%] (the distance from 5% to 95% of the load length ratio (mr)) was 0.12 ± 0.1. Next, using the plasma processing apparatus shown in FIG. 7, a charge injection blocking layer, a photoconductive layer, and a surface layer are formed in this order on the cylindrical substrate under the conditions shown in Table 13 above. A Si electrophotographic photosensitive member was produced.

  At this time, a high frequency power source capable of outputting high frequency power of 105 MHz and 60 MHz was used. Further, “200 → 20” in the manufacturing conditions shown in Table 13 indicates that the gas flow rate is continuously changed from 200 ml / min (normal) to 20 ml / min (normal).

Example 7
A, B, C, and a, b, and c were determined in the same manner as in Example 1 without polishing the electrophotographic photoreceptor produced in Electrophotographic photoreceptor production example 5. Further, as in Example 1, high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning were evaluated. The evaluation results are shown in Table 19. However, the number of the electrophotographic photosensitive member used in Example 7 is 47.

Example 8
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 5 was subjected to polishing treatment under the polishing conditions 3 shown below while changing the polishing time, and the value A (μm) obtained by the same method as in the first example. The polishing time was determined so as to take the values shown in Table 18. Further, the microscopic surface shapes A, B, and C of the electrophotographic photosensitive member after the polishing process is performed with the polishing time satisfying such conditions are obtained by the measurement method using the AFM described above, and the macroscopic surface shapes a and b are determined. , C were determined by the measurement method using the surface roughness meter described above. The measurement results are shown in Table 19.

<Polishing condition 3>
Using the polishing apparatus shown in FIG. 4, the rotation speed of the electrophotographic photosensitive member 401 is 90 rpm, the rotation speed of the magnet roller 402 is 240 rpm, the magnetic force of the magnet roller 402 is 900 G, the SD distance is 0.4 mm, and the SB distance is 1.0 mm. As a magnetic powder 403, Cu-Zn Philite (DFC450) manufactured by Dowa Iron Powder Industry Co., Ltd. was used.

  For the electrophotographic photoreceptors 47 to 56, high humidity flow (characters), high humidity flow (halftone), black streaks, and poor cleaning were evaluated in the same manner as in Example 1. The evaluation results are shown in Table 19.

  Measurement results of A, B, C, a, b, c, A × a, C / B, c / b obtained in Examples 7 and 8, high humidity flow (characters), high humidity flow (halftone), Table 19 shows the evaluation results of black stripes and poor cleaning.

  From the results in Table 19, the high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning were good in any electrophotographic photosensitive member, but b was 450% / μm or more, c Was controlled to 900% / μm or more and c / b to 2.0 or less, the higher humidity flow (characters) and higher humidity flow (halftone) became better. Also, by setting B to 2260% / μm or less, C to 2000% / μm or less, and C / B to 0.78 or less, the cleaning failure becomes even better, high humidity flow (letters), high humidity flow (halftone) In particular, it was excellent against black streaks and poor cleaning.

<Electrophotographic photoconductor preparation example 6>
A cylindrical substrate made of aluminum (diameter 80 mm, length 358 mm) is mirror-finished with a diamond miracle bite, and the macroscopic surface shape of the cylindrical substrate is determined by a surface roughness meter according to the measurement method shown below. [5% to 95%] (the distance from 5% to 95% of the load length ratio (mr)) was processed to be 0.07 ± 0.1. Next, using the plasma processing apparatus shown in FIG. 7, a charge injection blocking layer, a photoconductive layer, and a surface layer are formed in this order on the cylindrical substrate under the conditions shown in Table 20, and positively charged a-Si An electrophotographic photosensitive member was produced.

  At this time, a high frequency power source capable of outputting high frequency power of 105 MHz and 60 MHz was used. Further, “200 → 20” in the manufacturing conditions shown in Table 13 indicates that the gas flow rate is continuously changed from 200 ml / min (normal) to 20 ml / min (normal).

Example 9
A, B, C and a, b, c were determined in the same manner as in Example 1 without polishing the electrophotographic photoreceptor produced in Electrophotographic photoreceptor production example 6. Further, as in Example 1, high humidity flow (characters), high humidity flow (halftone), black streaks and poor cleaning were evaluated. The evaluation results are shown in Table 22. However, the number of the electrophotographic photosensitive member used in Example 9 is 57.

Example 10
The electrophotographic photosensitive member produced in the electrophotographic photosensitive member production example 6 was subjected to polishing treatment under the same polishing conditions 1 as in Example 1 while changing the polishing time, and the value A obtained by the same method as in Example 1 was obtained. The polishing time was determined such that (μm) took the values shown in Table 21. Further, the microscopic surface shapes A, B, and C and the macroscopic surface shapes a, b, and c after performing the polishing process with the polishing time satisfying such conditions were obtained in the same manner as in Example 1. The measurement results are shown in Table 22.

  The electrophotographic photosensitive members 57 to 61 were evaluated in the same manner as in Example 1 for high humidity flow (characters), high humidity flow (halftone), black streaks, and poor cleaning. The evaluation results are shown in Table 22.

  Measurement results of A, B, C, a, b, c, A × a, C / B, c / b obtained in Examples 9 and 10, high humidity flow (characters), high humidity flow (halftone), Table 22 shows the evaluation results of black stripes and poor cleaning.

  From the results in Table 22, the high humidity flow (letters), high humidity flow (halftone), black streaks and poor cleaning were good in any electrophotographic photosensitive member, but B was 250% / μm or more, and C was By controlling 250% / μm or more and C / B to 1.00 or less, high-humidity flow (halftone) is improved, against high-humidity flow (letters), high-humidity flow (halftone), black streaks, and poor cleaning. Particularly good.

As described above, from the results of Examples 1 to 9 and Comparative Examples 1 to 7, A is 0.01 μm or more and 0.30 μm or less, a is 0.03 μm or more and 0.55 μm or less, and A × a is 1.0 × 10 ⁻³ μm ² or more and 4.5 × 10. ^By controlling to ^-2 μm ² , high-humidity flow (letters), high-humidity flow (halftone), black streaks, and poor cleaning are obtained. Among them, A is 0.02 μm or more and 0.25 μm or less, and a is 0.05 μm. By controlling to 0.45 μm or less and A × a to 3.0 × 10 ⁻³ μm ² or more and 3.5 × 10 ⁻² μm ² , it was improved. Further, it was further improved by controlling b to 250% / μm to 1000% / μm, c to 220% / μm to 1000% / μm, and c / b to 0.5 to 2.0. Furthermore, B was further improved by controlling it from 250% / μm to 3000% / μm, C from 200% / μm to 2000% / μm, and C / B from 0.1 to 1.0. Among these, by controlling A to be 0.03 μm to 0.20 μm, a to be 0.07 μm to 0.40 μm, and A × a to be 5.0 × 10 ⁻³ μm ^{2 to} 3.0 × 10 ⁻² μm ² , high humidity flow ( Character), high humidity flow (halftone), black streaks and poor cleaning.

(FIG. 1-1) FIG. 1-1 is a schematic diagram of a load curve of unevenness height based on the highest point obtained by AFM measurement in the range of 10 μm × 10 μm of an a-Si electrophotographic photosensitive member. (FIG. 1-2) It is a typical schematic sectional drawing which shows the detail of the principal part of FIG. 1-1. It is an AFM three-dimensional observation image in the range of 10 μm × 10 μm on the surface of an a-Si electrophotographic photosensitive member. The highest point obtained by measuring the a-Si electrophotographic photosensitive member with a roughness curve of a surface roughness meter under the evaluation conditions of a reference length of 0.8 mm, an evaluation length of 4.0 mm, and λc of 0.8 mm was used as a reference. It is a typical schematic diagram of a load curve (BAC) of unevenness height. FIG. 4-1 is a schematic cross-sectional view of a polishing apparatus using magnetic powder for controlling the microscopic and macroscopic surface shapes of an electrophotographic photosensitive member. FIG. 4-2 is a schematic schematic cross-sectional view showing details of a main part of FIG. 4-1. 1 is a schematic cross-sectional view of a polishing apparatus using a polishing tape for controlling the microscopic and macroscopic surface shapes of an electrophotographic photosensitive member. It is a typical schematic block diagram which shows an example of the a-Si electrophotographic photoreceptor manufacturing apparatus by the high frequency plasma CVD method using a VHF band. It is a typical schematic block diagram which shows another example of the a-Si electrophotographic photoreceptor manufacturing apparatus by the high frequency plasma CVD method using a VHF band. 1 is a schematic cross-sectional view schematically showing a layer configuration of an electrophotographic photosensitive member according to the present invention. 1 is a schematic cross-sectional view showing an embodiment of an electrophotographic apparatus according to the present invention. It is a schematic diagram of BAC for demonstrating cutting | disconnection level difference (delta) c [5%-95%] used when calculating | requiring a. It is a schematic diagram of BAC for demonstrating the cutting | disconnection level difference (delta) c (plateau rate) used when calculating | requiring b and c. It is the schematic which shows the measurement position at the time of evaluation of the high-humidity flow by a halftone chart. It is the schematic of the test chart used for evaluation of cleaning defect. It is explanatory drawing of the microscopic surface and load curve for demonstrating Bearing Ratio calculated | required by the measurement of AFM. It is explanatory drawing of the macroscopic surface and load curve for demonstrating the load length rate calculated | required by the measurement of a roughness meter.

Explanation of symbols

401, 501 ……………………………… Electrophotographic photoreceptor
402 ……………………………………………… Magnet roller
403 ‥‥‥‥‥‥‥‥‥‥ Magnet
404 …………………………………………………………………… Magnet roller container
405 ……………………………………………………………………………………………
406 ‥‥‥‥‥‥‥‥‥‥ Micrometer
407 ‥‥‥‥‥‥‥‥‥‥ Movable stand
408, 506 ....................... Movement mechanism
409, 508 ……………………………… Base base
502 ………………………………………… Abrasive tape
503 ……………………………………………………………………………………………….
504 ‥‥‥‥‥‥‥‥‥‥ Sending Roll
505 ……………………………………………… Take-up roll
507 ‥‥‥‥‥‥‥‥‥‥ Pressure elastic roller container
509 ……………………………………………… Capstan Roller
510 ……………………………………………………………………………….
511 ‥‥‥‥‥‥‥‥‥‥ Transport path support rod
601、701 ……………………………… Cylindrical substrate
602, 702 ..... Reaction vessel
603, 703 ……………………………… Shield
604, 704 ... Raw material gas supply equipment
605, 705 ... High frequency power supply
606, 706 ……………………………… Matching box
607, 707 ……………………………… Cathode
608, 708 ..... Heater
609, 709 ... Raw material gas introduction pipe
610, 710 ..... Drive unit
611, 711 ……………………………… Motor
612, 712 ……………………………….
800 ……………………………………………… Electrophotographic photoreceptor
801 ………………………………………… Cylindrical substrate
802 …………………………………………… Photoconductive layer
803 ……………………………………………….
804 ……………………………………………………………………………….
805 ………………………………………………………………………….
806 ……………………………………………………………………………………………………………………………………………….
901 ……………………………………………… Electrophotographic photoreceptor
902 ……………………………………………… Primary charger
903 …………………………………………… Developer
904 · · · · · · · · · · · · · · · · Transfer material
905 ······················· Transcription charger
906 ……………………………………………… Cleaner
907 …………………………………………………………………… Elastic roller
908 ………………………………………………………… Cleaning blade
909 …………………………………………………………………….
910 …………………………………………………………………… Feed roller
911 ……………………………………………… Toner

Claims (5)

In an electrophotographic photosensitive member having a photoconductive layer composed of at least an amorphous material on the substrate and a surface layer, the standard is based on the highest microscopic surface roughness in the range of 10 μm × 10 μm of the electrophotographic photosensitive member. The difference in height between 5% and 95% in the uneven height load curve is A, and in the uneven height load curve based on the highest point of macroscopic surface roughness measured at a reference length of 0.8 mm. An electrophotographic photoreceptor, wherein A and a satisfy all of the following conditions (1) to (3), where a is a height difference of 5% to 95%.
(1) 0.01μm ≦ A ≦ 0.30μm
(2) 0.03μm ≦ a ≦ 0.55μm
(3) 1.0 × 10 ⁻³ μm ² ≦ A × a ≦ 4.5 × 10 ⁻² μm ² 2. The electrophotographic photosensitive member according to claim 1, wherein A and a satisfy all of the following conditions (4) to (6).
(4) 0.02μm ≦ A ≦ 0.25μm
(5) 0.05μm ≦ a ≦ 0.45μm
(6) 3.0 × 10 ⁻³ μm ² ≦ A × a ≦ 3.5 × 10 ⁻² μm ² When the slope b of 5% to 20% and the slope of 80% to 95% in the load curve of the macroscopic surface roughness is c, b and c are all the following conditions (7) to (9): The electrophotographic photosensitive member according to claim 1, wherein the electrophotographic photosensitive member is satisfied.
(7) 250 (% / μm) ≦ b ≦ 1000 (% / μm)
(8) 220 (% / μm) ≦ c ≦ 1000 (% / μm)
(9) 0.5 ≤ c / b ≤ 2.0 When the slope of 5% to 20% in the load curve of the microscopic surface roughness is B and the slope of 80% to 95% is C, B and C are all the following (10) to (12): The electrophotographic photosensitive member according to claim 1, wherein the condition is satisfied.
(10) 250 (% / μm) ≦ B ≦ 3000 (% / μm)
(11) 200 (% / μm) ≦ C ≦ 2000 (% / μm)
(12) 0.1 ≤ C / B ≤ 1.0 The electrophotographic photosensitive member according to any one of claims 1 to 4, wherein A and a satisfy all of the following conditions (13) to (15).
(13) 0.03μm ≦ A ≦ 0.20μm
(14) 0.07μm ≦ a ≦ 0.40μm
(15) 5.0 × 10 ^-3 μm ² ≦ A × a ≦ 3.0 × 10 ^-2 μm ²

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