JP4403280B2 - 軟質薄膜の物性値測定方法とそのための装置 - Google Patents

軟質薄膜の物性値測定方法とそのための装置 Download PDF

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JP4403280B2
JP4403280B2 JP2006140770A JP2006140770A JP4403280B2 JP 4403280 B2 JP4403280 B2 JP 4403280B2 JP 2006140770 A JP2006140770 A JP 2006140770A JP 2006140770 A JP2006140770 A JP 2006140770A JP 4403280 B2 JP4403280 B2 JP 4403280B2
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thin film
soft thin
ultrasonic
flat plate
physical property
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JP2007309850A5 (enExample
JP2007309850A (ja
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泰成 燈明
真澄 坂
卓也 今泉
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Tohoku University NUC
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JP2006140770A 2006-05-19 2006-05-19 軟質薄膜の物性値測定方法とそのための装置 Active JP4403280B2 (ja)

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JP2007309850A JP2007309850A (ja) 2007-11-29
JP2007309850A5 JP2007309850A5 (enExample) 2009-07-02
JP4403280B2 true JP4403280B2 (ja) 2010-01-27

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Publication number Priority date Publication date Assignee Title
JP5305093B2 (ja) * 2009-03-17 2013-10-02 本多電子株式会社 音響インピーダンス測定方法、音響インピーダンス測定装置、物体特性評価方法、及び物体特性評価装置
JP5257991B2 (ja) * 2009-04-01 2013-08-07 トヨタ自動車東日本株式会社 膜厚測定方法及び測定装置
JP5875087B2 (ja) * 2011-11-04 2016-03-02 国立大学法人東北大学 膜厚測定方法および膜厚測定装置

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