JP4391840B2 - ZnS膜形成方法 - Google Patents
ZnS膜形成方法 Download PDFInfo
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- JP4391840B2 JP4391840B2 JP2004027099A JP2004027099A JP4391840B2 JP 4391840 B2 JP4391840 B2 JP 4391840B2 JP 2004027099 A JP2004027099 A JP 2004027099A JP 2004027099 A JP2004027099 A JP 2004027099A JP 4391840 B2 JP4391840 B2 JP 4391840B2
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- film
- light transmittance
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- specific wavelength
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- 238000000034 method Methods 0.000 title claims description 21
- 238000002834 transmittance Methods 0.000 claims description 82
- 239000000758 substrate Substances 0.000 claims description 75
- 230000015572 biosynthetic process Effects 0.000 claims description 19
- 238000001704 evaporation Methods 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 3
- 238000007733 ion plating Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 description 13
- 238000001816 cooling Methods 0.000 description 12
- 238000000151 deposition Methods 0.000 description 10
- 230000008022 sublimation Effects 0.000 description 9
- 238000000859 sublimation Methods 0.000 description 9
- 230000007423 decrease Effects 0.000 description 8
- 230000008021 deposition Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- Holo Graphy (AREA)
- Physical Vapour Deposition (AREA)
Description
11 真空チャンバ
2 基板走行手段
3 蒸発源
4 透過式測定手段
Claims (6)
- 真空チャンバ内で処理基板表面にホログラム用の透明ZnS膜を形成する方法であって、
前記ZnS膜を成膜する間、300nm〜400nmの波長範囲から選択した第1の特定波長と、400nm〜800nmの波長範囲から選択した第2の特定波長とのそれぞれでZnS膜の光透過率及び光反射率の少なくとも一方を測定し、
前記第2の特定波長での光透過率または光反射率が所定の範囲内の場合は、前記第1の特定波長での光透過率または光反射率が所定範囲内に保持されるように成膜速度を制御し、
前記第2の特定波長での光透過率または光反射率が前記所定の範囲外になった場合は、前記第2の特定波長での光透過率または光反射率が前記所定の範囲内に入るように成膜速度を制御することを特徴とするZnS膜形成方法。 - 前記第2の特定波長を500nm〜600nmの波長範囲から選択することを特徴とする請求項1記載のZnS膜形成方法。
- 前記第1及び第2の各特定波長でのZnS膜の光透過率及び光反射率の少なくとも一方のそれぞれの測定を複数箇所で行うことを特徴とする請求項1または請求項2記載のZnS膜形成方法。
- 前記成膜を、蒸着法、スパッタリング法、イオンプレーティング法またはCVD法により行うことを特徴とする請求項1乃至請求項3のいずれかに記載のZnS膜形成方法。
- 前記処理基板を真空チャンバ内で走行させながらまたは所定の位置に保持して前記成膜を行うことを特徴とする請求項1乃至請求項4記載のいずれかに記載のZnS膜形成方法。
- 前記処理基板は、プラスチック或いはガラス製であることを特徴としたことを請求項1乃至請求項5のいずれかに記載のZnS膜形成方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004027099A JP4391840B2 (ja) | 2004-02-03 | 2004-02-03 | ZnS膜形成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004027099A JP4391840B2 (ja) | 2004-02-03 | 2004-02-03 | ZnS膜形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005220381A JP2005220381A (ja) | 2005-08-18 |
JP4391840B2 true JP4391840B2 (ja) | 2009-12-24 |
Family
ID=34996253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004027099A Expired - Lifetime JP4391840B2 (ja) | 2004-02-03 | 2004-02-03 | ZnS膜形成方法 |
Country Status (1)
Country | Link |
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JP (1) | JP4391840B2 (ja) |
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2004
- 2004-02-03 JP JP2004027099A patent/JP4391840B2/ja not_active Expired - Lifetime
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JP2005220381A (ja) | 2005-08-18 |
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