JP4388424B2 - Wiring board and tilt sensor device - Google Patents

Wiring board and tilt sensor device Download PDF

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JP4388424B2
JP4388424B2 JP2004190557A JP2004190557A JP4388424B2 JP 4388424 B2 JP4388424 B2 JP 4388424B2 JP 2004190557 A JP2004190557 A JP 2004190557A JP 2004190557 A JP2004190557 A JP 2004190557A JP 4388424 B2 JP4388424 B2 JP 4388424B2
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sphere
insulating substrate
wiring board
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insulating
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JP2006010590A (en
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浩一 平山
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Kyocera Corp
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Description

本発明は、傾斜の方向を検知する傾斜センサー装置を形成するための配線基板およびその配線基板を用いて成る傾斜センサー装置に関する。   The present invention relates to a wiring board for forming a tilt sensor device for detecting a tilt direction and a tilt sensor device using the wiring board.

従来、傾斜を検知するための傾斜センサー装置は、一般に、有機樹脂材料等の電気絶縁体から成る筐体と、線状の金属材料から成り、筐体の内側から外側に貫通するようにして配設され、互いに電気的に独立した複数の導電ピンと、筐体の内部に封入された導電性の球体とを具備した構造である。筐体は、通常、下板と上板とから構成され、導電ピンは、上板と下板との間に挟みこまれるようにして、または上板や下板を厚み方向に貫通するようにして取着される。また、上板と下板とを接合するときに、その間に球体を入れておくことにより、上板と下板とから成る筐体内に球体が封入される(例えば、特許文献1,2参照)。   Conventionally, an inclination sensor device for detecting inclination is generally made of a casing made of an electrical insulator such as an organic resin material and a linear metal material so as to penetrate from the inside to the outside of the casing. And a plurality of electrically conductive pins that are electrically independent from each other and a conductive sphere encapsulated inside the housing. The housing is usually composed of a lower plate and an upper plate, and the conductive pins are sandwiched between the upper plate and the lower plate, or penetrate the upper plate and the lower plate in the thickness direction. Is attached. Further, when the upper plate and the lower plate are joined, a sphere is enclosed between the upper plate and the lower plate by inserting a sphere (see, for example, Patent Documents 1 and 2). .

このような傾斜センサー装置は、導電ピンのうち筐体の外側に露出している部分を外部電気回路基板の電気回路に半田等を介して電気的に接続して用いる。導電ピンが接続される外部電気回路は、電流計等の検知器やブザー等を含む検知器等と電気的に接続されている。   Such a tilt sensor device is used by electrically connecting a portion of the conductive pin exposed to the outside of the housing to an electric circuit of an external electric circuit board via solder or the like. The external electric circuit to which the conductive pin is connected is electrically connected to a detector such as an ammeter or a detector including a buzzer.

そして、傾斜センサー装置の傾きに応じて筐体内で球体が転がって移動し、隣り合う2本の金属ピンの間が導電性の球体で電気的に接続され、この電気的な接続を金属ピンと導通するようにして外部等に配置された電流計等の検知器で検知することにより、導電性の球体が移動した方向、つまり傾きの方向を検知することができる。   Then, the sphere rolls and moves in the housing according to the inclination of the inclination sensor device, and the two adjacent metal pins are electrically connected by the conductive sphere, and this electrical connection is electrically connected to the metal pin. Thus, by detecting with a detector such as an ammeter arranged outside, the direction in which the conductive sphere has moved, that is, the direction of inclination can be detected.

この傾斜センサー装置を、携帯電話やデジタルカメラ等の電子機器、トラクター等の不整地での作業用の車両の転倒防止装置、自動車の盗難防止装置等の機器を構成する電気回路基板等に部品として搭載し実装することにより、この傾斜センサー装置が実装された各種の機器の傾きの方向を検知することができる。   This tilt sensor device is used as an electronic circuit board that constitutes equipment such as electronic devices such as mobile phones and digital cameras, anti-theft devices for vehicles for work on rough terrain, etc., and anti-theft devices for automobiles. By mounting and mounting, it is possible to detect the tilt directions of various devices on which the tilt sensor device is mounted.

例えば、デジタルカメラやカメラ付き携帯電話に部品として実装して用いると、カメラの向き(いわゆる縦位置や横位置)に応じて画像の写し込まれる向きを変え、常に撮影時の上方向を保存されている画像の上方向と一致させるようにして撮像、保存することができる。   For example, when mounted as a component on a digital camera or a mobile phone with a camera, the direction in which the image is captured is changed according to the direction of the camera (so-called vertical position or horizontal position), and the upward direction at the time of shooting is always saved. The image can be picked up and stored so as to coincide with the upward direction of the image.

また、デジタルカメラや携帯電話、PDA(Personal Digital Assistant)等で画像を見る時も、デジタルカメラや携帯電話等の画像表示機の方向がどうであれ、常に写真の上側が地球の重力の反対側に表示されるように、つまり画像表示機を見ている利用者が写真等の画像を見やすいようにして表示することができる。
特開平11−162306号公報 特開2004−55316号公報
Also, when viewing images with a digital camera, mobile phone, PDA (Personal Digital Assistant), etc., the upper side of the photo is always on the opposite side of the earth's gravity regardless of the orientation of the image display device, such as a digital camera or mobile phone. In other words, it can be displayed so that a user looking at the image display device can easily view an image such as a photograph.
JP-A-11-162306 JP 2004-55316 A

しかしながら、従来の傾斜センサー装置によると、金属ピンを筐体の内側から外側に貫通するようにして配設し、この金属ピンを検知装置等に電気的に接続するようにして外部電気回路基板に実装する必要があるため、表面実装が可能な形態とすることが難しく、また、薄型化や小型化が難しいという問題があった。   However, according to the conventional inclination sensor device, the metal pin is disposed so as to penetrate from the inside to the outside of the housing, and the metal pin is electrically connected to the detection device or the like on the external electric circuit board. Since it is necessary to mount, there is a problem that it is difficult to make the surface mountable form, and it is difficult to reduce the thickness and size.

また、例えば、筐体を構成する上板と下板、金属ピンおよび導電性の球体を準備し、上板と下板とを、金属ピンが貫通するようにして、かつ導電性の球体が封入されるようにして接合する必要があるため、部品の個数が多く製作工程も煩雑で、生産性が低いという問題があった。   Also, for example, prepare upper and lower plates, metal pins, and conductive spheres that make up the housing, with the metal pins passing through the upper and lower plates, and encapsulating the conductive spheres. Therefore, there is a problem that the number of parts is large, the manufacturing process is complicated, and the productivity is low.

また、筐体内部に外気の湿気等が侵入すると誤動作する危険性があるので筐体内の気密性を高くする必要があるが、導電ピンが筐体を貫通する部分で気密性が劣化する危険性があり、長期信頼性が低いという問題があった。   In addition, since there is a risk of malfunction if moisture in the outside air enters inside the housing, it is necessary to increase the airtightness in the housing, but there is a risk that the airtightness will deteriorate at the part where the conductive pin penetrates the housing There was a problem that long-term reliability was low.

また、激しい振動が生じるような環境で使用した場合、導電性の球体が金属ピンに当たって導電ピンを変形させたり、隣り合う2本の導電ピンの間に導電性の球体が挟みこまれたりして、正常に傾きを検知することができなくなるという問題もあった。   Also, when used in an environment where intense vibrations occur, the conductive sphere hits the metal pin and deforms the conductive pin, or the conductive sphere is sandwiched between two adjacent conductive pins. There was also a problem that the tilt could not be detected normally.

また、筐体内の球体が移動する面は、通常、下板の上面であり平面状である。この場合、球体が転がり易いので、傾斜センサー装置のわずかな傾きでも鋭敏に検知して球体が移動してしまう。そのため、自動車の防犯用センサー等、わずかな傾きでも検知する必要があるような用途には有効であるものの、例えば、カメラ付き携帯電話のように手持ちで使用するような機器の場合、検知したい機器の傾きの方向以外のわずかなぶれ等に起因する傾きも検知してしまい、その機器を正常に作動させることが難しくなるという問題点があった。例えば、撮像時の機器(携帯電話)の重力方向に対する向き、いわゆる縦位置での撮像か横位置での撮像かを検知したいときに、それ以外のぶれ等を誤って機器の傾きとして検知してしまい、撮像した画像の向きが上下左右ばらばらになってしまう。   Further, the surface on which the sphere in the housing moves is usually the upper surface of the lower plate and is flat. In this case, since the sphere easily rolls, the sphere moves with a sharp detection even with a slight inclination of the tilt sensor device. Therefore, although it is effective for applications that require detection even at a slight inclination, such as automobile security sensors, for example, in the case of a device that is used by hand, such as a mobile phone with a camera, the device that is to be detected There is also a problem that it is difficult to operate the device normally because it detects a tilt caused by a slight shake other than the direction of the tilt. For example, when it is desired to detect the orientation of the device (cell phone) in the direction of gravity at the time of image capture, that is, whether the image is taken in a vertical position or in a horizontal position, other shakes are detected as the device tilt by mistake. As a result, the orientation of the captured image varies vertically and horizontally.

このような問題に対しては、筐体内の球体が転がる面の中央部に凹部を設けておき、その中に球体を収めて転がり難くするという手段が提案されている。しかしながら、従来の傾斜センサー装置では、凹部の縁からの距離が同じになるよう各導電ピンを取り付ける必要があるため傾斜センサー装置の製作がより煩雑になり、さらに生産性が低下するという問題が誘発されるおそれがある。   For such a problem, a means has been proposed in which a concave portion is provided in the center of the surface on which the sphere in the casing rolls, and the sphere is contained in the sphere to make it difficult to roll. However, in the conventional tilt sensor device, it is necessary to attach each conductive pin so that the distance from the edge of the concave portion is the same, so that the manufacture of the tilt sensor device becomes more complicated and the problem of lowering productivity is induced. There is a risk of being.

従って、本発明はかかる上述の問題点に鑑み完成されたものであり、その目的は、外部電気回路基板等に表面実装が容易で傾斜センサー装置の生産性に優れ、球体が封入された容器の気密性が良好で、長期にわたって誤作動することなく傾きを検知することが可能な傾斜センサー装置を形成するための配線基板、およびその配線基板を用いて成る傾斜センサー装置を提供することにある。   Accordingly, the present invention has been completed in view of the above-mentioned problems, and the object thereof is to provide an easy-to-surface mount on an external electric circuit board and the like, excellent in productivity of the tilt sensor device, and a container in which a sphere is enclosed. An object of the present invention is to provide a wiring board for forming a tilt sensor device having good airtightness and capable of detecting tilt without malfunctioning over a long period of time, and a tilt sensor device using the wiring board.

本発明の配線基板は、上面の中央部に曲面状の凹部が形成されているとともに外形形状が四角形以上の多角形状である絶縁基板と、該絶縁基板の上面の外周部に前記凹部を取り囲むようにして取着された外形形状が前記絶縁基板と同形状の絶縁枠体と、該絶縁枠体の各辺部の内面から前記絶縁基板の側面および下面の少なくとも一方に導出された配線導体とを具備しており、前記絶縁基板の上面の前記絶縁枠体の内側に導電性の球体が自由に転がることができる状態で収容されているとともに、前記配線導体は互いに電気的に独立しており、前記絶縁枠体は、上面と内面との間に全周にわたって段差が形成されており、前記配線導体は、前記段差よりも下側の前記内面から前記段差の上面を経て前記絶縁基板の側面および下面の少なくとも一方に導出されていることを特徴とするものである。 In the wiring board of the present invention, a curved concave portion is formed in the central portion of the upper surface and the outer shape is a polygonal shape of a quadrangle or more, and the concave portion is surrounded by the outer peripheral portion of the upper surface of the insulating substrate. And an insulating frame having the same outer shape as that of the insulating substrate, and a wiring conductor led out from an inner surface of each side of the insulating frame to at least one of a side surface and a lower surface of the insulating substrate. And the conductive spheres are accommodated inside the insulating frame on the upper surface of the insulating substrate so that they can freely roll, and the wiring conductors are electrically independent from each other , In the insulating frame, a step is formed over the entire circumference between the upper surface and the inner surface, and the wiring conductor passes through the upper surface of the step from the inner surface below the step and the side surface of the insulating substrate and At least one of the lower surfaces And it is characterized in that it is derived.

本発明の配線基板は好ましくは、前記凹部は、その内面に前記配線導体に対して電気的に独立した電極パッドが形成されていることを特徴とするものである。   The wiring board according to the present invention is preferably characterized in that an electrode pad electrically independent of the wiring conductor is formed on the inner surface of the recess.

また、本発明の配線基板は好ましくは、前記凹部は、前記絶縁基板が10度以上傾いたときに前記球体が前記配線導体に接するように形成されていることを特徴とするものである。   The wiring board according to the present invention is preferably characterized in that the recess is formed so that the sphere contacts the wiring conductor when the insulating substrate is tilted by 10 degrees or more.

本発明の傾斜センサー装置は、上記の構成の配線基板と、前記絶縁基板の上面の前記凹部に自由に転がることができる状態で収容された導電性の球体と、前記絶縁枠体の上面に取着された蓋体とを具備しており、前記配線基板が傾いたときに前記球体が接触している前記配線導体を検知することによって前記配線基板の傾斜方向を特定することを特徴とするものである。   The tilt sensor device according to the present invention includes a wiring board having the above-described configuration, a conductive sphere accommodated in a state of being freely rollable in the recess on the upper surface of the insulating substrate, and an upper surface of the insulating frame. A tilted direction of the wiring board by detecting the wiring conductor in contact with the sphere when the wiring board is tilted. It is.

本発明の配線基板によれば、上面の中央部に曲面状の凹部が形成されているとともに外形形状が四角形以上の多角形状である絶縁基板と、絶縁基板の上面の外周部に凹部を取り囲むようにして取着された外形形状が絶縁基板と同形状の絶縁枠体と、絶縁枠体の各辺部の内面から絶縁基板の側面および下面の少なくとも一方に導出された配線導体とを具備しており、絶縁基板の上面の絶縁枠体の内側に導電性の球体が自由に転がることができる状態で収容されているとともに、配線導体は互いに電気的に独立しており、絶縁枠体は、上面と内面との間に全周にわたって段差が形成されており、配線導体は、段差よりも下側の内面から段差の上面を経て絶縁基板の側面および下面の少なくとも一方に導出されていることから、導電性の球体が転がって移動した方向で配線導体と接して隣り合う配線導体の間が導電性の球体を介して電気的に接続され、この電気的な接続を検知することにより球体が転がった方向、つまり配線基板の傾きの方向を検知することができる。また、絶縁枠体は、上面と内面との間に全周にわたって段差が形成されており、配線導体は、段差よりも下側の内面から段差の上面を経て絶縁基板の側面および下面の少なくとも一方に導出されていることから、段差の長さを調節することにより、傾き易い方向で球体の移動距離を短くし、球体が配線導体に接触し易くして検知の感度を高くする等、用途に応じた傾斜センサー装置を作製することが可能な配線基板を提供することができる。 According to the wiring board of the present invention, a curved concave portion is formed in the central portion of the upper surface and the outer shape is a polygonal shape of a quadrangle or more, and the concave portion is surrounded by the outer peripheral portion of the upper surface of the insulating substrate. And an insulating frame having the same shape as the insulating substrate, and a wiring conductor led out from the inner surface of each side of the insulating frame to at least one of the side surface and the lower surface of the insulating substrate. cage, together are accommodated in a state that can roll freely conductive sphere inside the insulating frame of the upper surface of the insulating substrate, wiring conductors are electrically independent of each other, the insulating frame body, the upper surface A step is formed over the entire circumference between the inner surface and the inner surface, and the wiring conductor is led out from the inner surface below the step to the at least one of the side surface and the lower surface of the insulating substrate through the upper surface of the step . The conductive sphere rolls The adjacent wiring conductors that are in contact with the wiring conductor in the moving direction are electrically connected via conductive spheres, and by detecting this electrical connection, the direction of the sphere rolling, that is, the wiring board The direction of tilt can be detected. The insulating frame has a step formed over the entire circumference between the upper surface and the inner surface, and the wiring conductor passes through the upper surface of the step from the inner surface below the step to at least one of the side surface and the lower surface of the insulating substrate. Therefore, by adjusting the length of the step, the moving distance of the sphere is shortened in a direction that easily tilts, and the sphere is easily contacted with the wiring conductor to increase the detection sensitivity. It is possible to provide a wiring board capable of producing a corresponding inclination sensor device.

この場合、球体は、曲面状の凹部の底面に沿って移動するので、配線基板の傾きが小さい場合には配線導体と接する位置にまで移動することはなく、球体が隣り合う配線導体の間を電気的に接続することによる傾きの検知の感度を、鋭敏に過ぎず適度に高いものとすることができる。これにより、例えば、携帯電話等の手持ちで使用される機器でも、ぶれ等のわずかな傾きには反応せず、機器を使用している角度等の、本来検知したい傾きを的確に検知することが可能な傾斜センサー装置を構成することが可能な配線基板とすることができる。   In this case, since the sphere moves along the bottom surface of the curved concave portion, when the inclination of the wiring board is small, the sphere does not move to a position in contact with the wiring conductor, and the sphere moves between adjacent wiring conductors. The sensitivity of inclination detection by electrical connection is merely sharp and can be made reasonably high. As a result, for example, even a device that is used on hand such as a mobile phone does not react to slight tilts such as shaking, and can accurately detect the tilt that is originally intended to be detected, such as the angle at which the device is used. It is possible to provide a wiring board capable of constituting a possible tilt sensor device.

また、導電ピン等を配設する必要がないので、薄型化、小型化が容易である。   In addition, since there is no need to dispose conductive pins or the like, it is easy to reduce the thickness and size.

また、絶縁基板と絶縁枠体とで形成される凹状の収納部に球体を収容し、蓋体等で収納部を塞ぐだけで傾斜センサー装置を構成することができ、製作工程が簡単であるため、生産性を良好として傾斜センサー装置を作製することができる。   In addition, the tilt sensor device can be configured by simply storing the sphere in the concave storage portion formed by the insulating substrate and the insulating frame and closing the storage portion with a lid or the like, and the manufacturing process is simple. The tilt sensor device can be manufactured with good productivity.

また、絶縁基板と絶縁枠体とを、例えば一体焼成されたセラミック焼結体の形態で一体的に形成することができるとともに、金属ピン等の貫通する部分がないので、蓋体で球体を入れた収納部を塞ぐことにより、球体を気密性に優れた状態で封入することができ、長期信頼性を優れたものとすることができる。   In addition, the insulating substrate and the insulating frame can be integrally formed, for example, in the form of an integrally fired ceramic sintered body, and since there are no penetrating parts such as metal pins, a sphere is inserted with a lid. By closing the storage portion, it is possible to enclose the sphere with excellent airtightness and excellent long-term reliability.

また、球体が接触するのが、絶縁枠体の内面に形成されている平面状の配線導体であるため、配線基板に激しい振動が加わり、球体が繰り返し当たったとしても配線導体に変形等が生じたり、隣り合う配線導体の間に球体が挟まったりするようなことは効果的に抑制され、長期にわたって正常に傾きを検知することが可能な傾斜センサー装置を構成することができる。   In addition, since the sphere contacts with the planar wiring conductor formed on the inner surface of the insulating frame, severe vibration is applied to the wiring board, and the wiring conductor is deformed even if the sphere repeatedly hits it. In addition, it is possible to effectively prevent the spheres from being sandwiched between adjacent wiring conductors, and it is possible to configure a tilt sensor device that can normally detect tilt over a long period of time.

また、本発明の配線基板は好ましくは、絶縁基板の上面の絶縁枠体の内側に配線導体に対して電気的に独立した電極パッドが形成されていることから、電極パッドをも外部電気回路に電気的に接続することにより、球体が配線導体の一つのみに接触した場合でも、配線導体と電極パッドとの間の球体を介しての電気的接続を検知することにより傾きの方向を検知することができ、傾きの有無の検知および傾きの方向の検知の精度をより一層高くすることができる。   In the wiring board of the present invention, preferably, an electrode pad electrically independent from the wiring conductor is formed inside the insulating frame on the upper surface of the insulating substrate. Even when the sphere contacts only one of the wiring conductors by making an electrical connection, the direction of inclination is detected by detecting the electrical connection through the sphere between the wiring conductor and the electrode pad. Therefore, it is possible to further increase the accuracy of detecting the presence / absence of tilt and detecting the direction of tilt.

また、本発明の配線基板は好ましくは、凹部は、絶縁基板が10度以上傾いたときに球体が配線導体に接するように形成されていることから、携帯電話等の手持ちで使用する機器において、頻繁に生じる手ぶれ等の10度未満の傾きには反応せず、従って誤作動がより確実に防止された、検知の精度に優れるとともに使い勝手に優れた傾斜センサー装置を構成することが可能な配線基板とすることができる。   In the wiring board of the present invention, preferably, the concave portion is formed so that the sphere contacts the wiring conductor when the insulating substrate is tilted by 10 degrees or more. A wiring board that does not react to tilts of less than 10 degrees, such as frequently occurring camera shake, and thus can prevent misoperation more reliably, and can constitute a tilt sensor device with excellent detection accuracy and ease of use. It can be.

本発明の傾斜センサー装置は、上記の構成の配線基板と、絶縁基板の上面の絶縁枠体の内側に自由に転がることができる状態で収容された導電性の球体と、絶縁枠体の上面に取着された蓋体とを具備しており、配線基板が傾いたときに球体が接触している配線導体を検知することによって配線基板の傾斜方向を特定するものであることから、外部電気回路等に表面実装が容易で生産性に優れ、球体が封入された容器の気密性が良好で、長期にわたって誤作動することなく傾きを精度よく検知することが可能なものとなる。   The tilt sensor device according to the present invention includes a wiring board having the above-described configuration, a conductive sphere that can be freely rolled inside the insulating frame on the upper surface of the insulating substrate, and an upper surface of the insulating frame. And an attached electric body, and when the wiring board is tilted, the wiring board in contact with the sphere is detected to identify the inclination direction of the wiring board. For example, the surface mounting is easy, the productivity is excellent, the airtightness of the container in which the sphere is enclosed is good, and the inclination can be accurately detected without malfunctioning over a long period of time.

本発明の配線基板および傾斜センサー装置を添付の図面に基づいて詳細に説明する。図1(a)は、本発明の配線基板および傾斜センサー装置の実施の形態の一例を示す平面図であり、図1(b)はその断面図である。図1において、1は絶縁基板、2は絶縁枠体、3は配線導体、4は導電性の球体、9は配線基板である。   A wiring board and a tilt sensor device of the present invention will be described in detail with reference to the accompanying drawings. Fig.1 (a) is a top view which shows an example of embodiment of the wiring board and inclination sensor apparatus of this invention, FIG.1 (b) is the sectional drawing. In FIG. 1, 1 is an insulating substrate, 2 is an insulating frame, 3 is a wiring conductor, 4 is a conductive sphere, and 9 is a wiring substrate.

絶縁基板1および絶縁枠体2は外形形状が同形状であり、絶縁基板1の上面の外周部に絶縁枠体2が取着されていることにより、絶縁基板1の上面と絶縁枠体2の内側との間に、球体4を収容するための収納部が形成されている。   The insulating substrate 1 and the insulating frame 2 have the same outer shape, and the insulating frame 2 is attached to the outer peripheral portion of the upper surface of the insulating substrate 1, so that the upper surface of the insulating substrate 1 and the insulating frame 2 are A storage portion for storing the sphere 4 is formed between the inside and the inside.

絶縁基板1および絶縁枠体2は、酸化アルミニウム質焼結体(酸化アルミニウムセラミックス)や窒化アルミニウム質焼結体,ムライト質焼結体,炭化珪素質焼結体,窒化珪素質焼結体,ガラスセラミックス等の電気絶縁材料から成る。   The insulating substrate 1 and the insulating frame 2 are made of an aluminum oxide sintered body (aluminum oxide ceramics), an aluminum nitride sintered body, a mullite sintered body, a silicon carbide sintered body, a silicon nitride sintered body, glass Consists of electrically insulating materials such as ceramics.

絶縁基板1および絶縁枠体2は、例えば同じセラミック材料から成り、一体焼成することにより絶縁枠体2の絶縁基板1に対する取着が行なわれている。この場合、絶縁基板1と絶縁枠体2との外形形状を同じにしておくと、互いの外側面を上下に位置ずれしないように合わせるだけで、絶縁基板1に絶縁枠体2を容易に位置合わせして取着することができる。   The insulating substrate 1 and the insulating frame 2 are made of, for example, the same ceramic material, and the insulating frame 2 is attached to the insulating substrate 1 by being integrally fired. In this case, if the outer shapes of the insulating substrate 1 and the insulating frame 2 are the same, the insulating frame 2 can be easily positioned on the insulating substrate 1 only by aligning the outer surfaces thereof so as not to be displaced vertically. Can be attached together.

絶縁基板1および絶縁枠体2は、例えば、ともに酸化アルミニウム質焼結体から成る場合、酸化アルミニウムや酸化珪素,酸化マグネシウム,酸化カルシウム等のセラミック原料粉末に適当な有機バインダ,溶剤,可塑剤および分散剤を添加混合して泥漿状となし、これを従来周知のドクターブレード法等によりシート状に成形することで複数枚のセラミックグリーンシート(以下、グリーンシートともいう)を得、しかる後、これらのグリーンシートに適当な打ち抜き加工を施して絶縁基板1となる板状のグリーンシートと絶縁枠体2となる枠状のグリーンシートとを形成し、板状のグリーンシートの上に枠状のグリーンシートを積層して、約1600℃の温度で焼成することにより製作される。   For example, when both the insulating substrate 1 and the insulating frame 2 are made of an aluminum oxide sintered body, an organic binder, a solvent, a plasticizer, and a suitable ceramic raw material powder such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide are used. A dispersant is added and mixed to form a slurry, and this is formed into a sheet by a conventionally known doctor blade method or the like to obtain a plurality of ceramic green sheets (hereinafter also referred to as green sheets). An appropriate punching process is performed on the green sheet to form a plate-like green sheet to be the insulating substrate 1 and a frame-like green sheet to be the insulating frame 2, and a frame-like green is formed on the plate-like green sheet. It is manufactured by laminating sheets and firing at a temperature of about 1600 ° C.

絶縁基板1および絶縁枠体2は、上述の収納部内に球体4を収容するための容器の基体であり、球体4の移動した方向により配線基板の傾きの方向を精度良く検知するために四角形以上の多角形状に形成される。   The insulating substrate 1 and the insulating frame 2 are bases of containers for housing the spheres 4 in the above-described housing portion, and are quadrilateral or more in order to accurately detect the direction of inclination of the wiring board based on the direction of movement of the spheres 4. It is formed in a polygonal shape.

この場合、例えば三角形であると、平面視において上下左右の四方向の傾きを検知することができない。従って、絶縁基板1および絶縁枠体2は、四角形以上の多角形状とする必要がある。なお、傾きを検知する機構については後で詳しく説明する。   In this case, for example, if it is a triangle, it is not possible to detect inclinations in four directions, up, down, left, and right in a plan view. Therefore, it is necessary that the insulating substrate 1 and the insulating frame 2 have a quadrangular or more polygonal shape. The mechanism for detecting the inclination will be described in detail later.

絶縁枠体2の内面から絶縁基板1の側面および下面の少なくとも一方に配線導体3が導出され、各配線導体3は電気的に独立している。   A wiring conductor 3 is led out from the inner surface of the insulating frame 2 to at least one of the side surface and the lower surface of the insulating substrate 1, and each wiring conductor 3 is electrically independent.

また、絶縁基板1の上面の絶縁枠体2の内側に球体4が自由に転がることができる状態で収容されている。そして、球体4が転がって移動した方向で隣り合う配線導体3同士の間が球体4を介して電気的に接続され、この電気的な接続を検知することにより球体4が転がった方向、つまり配線基板9の傾きの方向を検知することができる。   In addition, the sphere 4 is accommodated inside the insulating frame 2 on the upper surface of the insulating substrate 1 in a state where it can roll freely. The wiring conductors 3 adjacent to each other in the direction in which the sphere 4 rolls and moves are electrically connected via the sphere 4, and by detecting this electrical connection, the direction in which the sphere 4 rolls, that is, the wiring The direction of the inclination of the substrate 9 can be detected.

なお、絶縁基板1の上面の中央部には凹部1aが形成されており、絶縁基板1aの上面の絶縁枠体2の内側に収容される球体4は、部分球面状、逆円錐状あるいは逆多角錘等の曲面状の凹部1aの底面に沿って、配線基板9の傾きにともなう重力に従い自由に転がる。   A recess 1a is formed at the center of the upper surface of the insulating substrate 1, and the sphere 4 accommodated inside the insulating frame 2 on the upper surface of the insulating substrate 1a has a partial spherical shape, an inverted conical shape, or an inverted polygonal shape. It rolls freely along the bottom surface of the curved concave portion 1a such as a weight according to the gravity accompanying the inclination of the wiring board 9.

この場合、球体4は、凹部1aの底面に沿って移動するので、配線基板9の傾きが小さい場合には移動の範囲は凹部1a内に止まり、配線導体3と接する位置にまで移動することが効果的に防止される。また、凹部1aの曲面形状を調整することにより、所望の角度に配線基板が傾いたときに球体4が凹部1aから出て、その外側の絶縁枠体2の内面に接するようにすることができる。その結果、球体4が隣り合う配線導体3同士の間を電気的に接続することによる傾きの検知の感度を、鋭敏に過ぎず適度に高いものとすることができる。これにより、例えば、携帯電話等の手持ちで使用される機器でも、ぶれ等のわずかな傾きには反応せず、カメラ付き携帯電話の撮像の向き等のような本来検知したい機器の傾きを的確に検知することが可能な傾斜センサー装置を構成することが可能な配線基板9とすることができる。   In this case, since the sphere 4 moves along the bottom surface of the recess 1 a, the range of movement stops within the recess 1 a when the inclination of the wiring board 9 is small, and can move to a position in contact with the wiring conductor 3. Effectively prevented. Further, by adjusting the curved surface shape of the concave portion 1a, the sphere 4 can come out of the concave portion 1a when the wiring board is inclined at a desired angle, and can come into contact with the inner surface of the insulating frame 2 on the outer side. . As a result, the sensitivity of inclination detection by electrically connecting the wiring conductors 3 adjacent to each other with the sphere 4 is not sharp but can be appropriately high. As a result, for example, even a device that is used on hand such as a mobile phone does not react to slight tilts such as shaking, and the tilt of the device that is originally desired to be detected, such as the direction of imaging of a camera-equipped mobile phone, can be accurately determined. It can be set as the wiring board 9 which can comprise the inclination sensor apparatus which can be detected.

また、絶縁基板1の側面や下面に導出された配線導体3の導出部分を外部電気回路に電気的に接続するだけで実装できるので、外部電気回路基板に対する表面実装を容易に行なうことができる。   Moreover, since it can be mounted only by electrically connecting the lead-out portion of the wiring conductor 3 led to the side surface and the bottom surface of the insulating substrate 1 to the external electric circuit, surface mounting on the external electric circuit substrate can be easily performed.

また、従来のように金属ピン等を配設する必要がないので、薄型化、小型化が容易である。   Further, since there is no need to dispose a metal pin or the like as in the prior art, it is easy to reduce the thickness and size.

また、絶縁基板1の上面の中央部の凹部1aに球体4を収容し、蓋体5等で封止することにより傾斜センサー装置を構成することができ、製作工程が簡単であるため、傾斜センサー装置を生産性を良好として作製することができる。   Further, since the spherical body 4 is accommodated in the concave portion 1a at the center of the upper surface of the insulating substrate 1 and sealed with the lid 5 or the like, the inclination sensor device can be configured, and the manufacturing process is simple. The apparatus can be manufactured with good productivity.

また、絶縁基板1と絶縁枠体2とを一体的に形成することができるとともに、金属ピン等の貫通する部分がないので、例えば後述するように蓋体5で球体4が収容されている凹部1aを塞ぐことにより、球体4を気密性に優れた状態で容器に封入することができ、長期信頼性を優れたものとすることができる。   In addition, since the insulating substrate 1 and the insulating frame 2 can be formed integrally, and there is no penetrating portion such as a metal pin, for example, a recess in which the sphere 4 is accommodated by the lid 5 as will be described later By closing 1a, the sphere 4 can be enclosed in a container with excellent airtightness, and long-term reliability can be improved.

また、球体4が接触するのが平面状の配線導体3であるため、球体4が繰り返し当たったとしても配線導体3に変形等が生じることは効果的に抑制され、長期にわたって正常に傾きを検知することが可能な傾斜センサー装置を作製することができる。   Further, since the sphere 4 is in contact with the planar wiring conductor 3, even if the sphere 4 repeatedly hits, deformation of the wiring conductor 3 is effectively suppressed, and the inclination is detected normally over a long period of time. A tilt sensor device that can be manufactured can be manufactured.

なお、配線導体3は、タングステンやモリブデン,マンガン,銅,銀,パラジウム,白金,金等の金属粉末メタライズから成り、例えば、タングステンの粉末に適当な有機バインダ,溶剤,可塑剤および分散剤等を添加混合して得たメタライズペーストを従来周知のスクリーン印刷法により絶縁基板1や絶縁枠体2となるグリーンシートに所定のパターンに印刷塗布し、これをグリーンシートの積層体とともに焼成することによって形成される。   The wiring conductor 3 is made of metal powder metallization such as tungsten, molybdenum, manganese, copper, silver, palladium, platinum, and gold. For example, an appropriate organic binder, solvent, plasticizer, and dispersant are added to the tungsten powder. Formed by printing and applying a metallized paste obtained by addition and mixing in a predetermined pattern on a green sheet to be an insulating substrate 1 or an insulating frame 2 by a well-known screen printing method, and baking this together with a laminate of green sheets Is done.

なお、配線導体3の露出表面には、配線導体3が酸化腐食するのを防止するとともに配線導体3と球体4とが接触したときの電気的接続の感度を向上させるために、厚みが1〜10μm程度のニッケルめっき層と厚みが0.1〜5μm程度の金めっき層とが順次被着されていることが好ましい。   The exposed surface of the wiring conductor 3 has a thickness of 1 to 1 in order to prevent the wiring conductor 3 from being oxidized and corroded and to improve the sensitivity of electrical connection when the wiring conductor 3 and the sphere 4 are in contact with each other. It is preferable that a nickel plating layer having a thickness of about 10 μm and a gold plating layer having a thickness of about 0.1 to 5 μm are sequentially deposited.

また、球体4が繰り返し配線導体3に接触したときのめっき層の磨耗を効果的に防止するために、白金やパラジウム等の耐食性が良好で金よりも磨耗し難い金属層を最表層のめっき層として被着させてもよい。また、ニッケルめっき層にホウ素等を混入させてニッケルめっき層の硬度を高くするようにしてもよい。また、クロム等の硬質めっき層を被着させてもよい。   Further, in order to effectively prevent wear of the plating layer when the sphere 4 repeatedly contacts the wiring conductor 3, a metal layer having good corrosion resistance such as platinum or palladium and less likely to wear than gold is used as the outermost plating layer. May be applied as Further, boron or the like may be mixed into the nickel plating layer to increase the hardness of the nickel plating layer. Moreover, you may deposit hard plating layers, such as chromium.

また、本発明の配線基板9は、絶縁基板1の上面の絶縁枠体2の内側に配線導体3に対して電気的に独立した電極パッドが形成されていることが好ましい。これにより、球体4が、配線導体3の一つのみに接した場合でも、配線導体3と電極パッドとの間の球体4を介しての電気的接続により傾きの方向を検知することができ、傾きの方向の検知の精度をより一層高くすることができる。この電極パッドは、凹部1aの底面に形成されていてもよく、または絶縁基板1の上面の凹部1aの外側の部位に、各配線導体3に対応させて配線導体3と同じ個数形成してもよい。   In the wiring board 9 of the present invention, it is preferable that an electrode pad electrically independent of the wiring conductor 3 is formed inside the insulating frame 2 on the upper surface of the insulating substrate 1. Thereby, even when the sphere 4 is in contact with only one of the wiring conductors 3, the direction of inclination can be detected by electrical connection via the sphere 4 between the wiring conductor 3 and the electrode pad. The detection accuracy in the direction of tilt can be further increased. The electrode pads may be formed on the bottom surface of the recess 1a, or may be formed in the same number as the wiring conductors 3 corresponding to the wiring conductors 3 on the outer surface of the recess 1a on the upper surface of the insulating substrate 1. Good.

また、本発明の配線基板9は、凹部1aは、絶縁基板1が10度以上傾いたときに球体4が配線導体3に接するように形成されていることが好ましい。これにより、携帯電話等の手持ちで使用する機器において、頻繁に生じる手ぶれ等の10度未満の傾きには反応せず、誤作動がより確実に防止された、検知の精度に優れるとともに使い勝手に優れた傾斜センサー装置を構成することが可能な配線基板9とすることができる。   Further, in the wiring board 9 of the present invention, the recess 1a is preferably formed so that the sphere 4 contacts the wiring conductor 3 when the insulating substrate 1 is tilted by 10 degrees or more. As a result, in devices used by hand such as mobile phones, it does not react to tilts of less than 10 degrees, such as hand shakes that occur frequently, malfunctions are prevented more reliably, and it has excellent detection accuracy and ease of use. In addition, the wiring board 9 that can constitute the tilt sensor device can be obtained.

なお、凹部1aについて、絶縁基板1が10度以上傾いたときに球体4が配線導体3に接するように形成するには、例えば、平面視形状が正方形の凹部1aの場合、対向する辺間の距離が500μmであれば、凹部1aの底面を断面が曲率半径732μmの円弧状の球面状とする等の形状に成形すればよい。この場合、図1(b)に示すように、凹部1aの端が絶縁枠体2の内面に接して連続している場合、球体4は凹部1aの外側に出ることはなく、凹部1aの端にくると配線導体3に接することとなる。また、凹部1aの端と絶縁枠体2の内面との間に絶縁基板1の上面がある場合、球体4は凹部1aの外側に出て配線導体3に接することもある。   In order to form the concave portion 1a so that the sphere 4 is in contact with the wiring conductor 3 when the insulating substrate 1 is tilted by 10 degrees or more, for example, in the case of the concave portion 1a having a square shape in plan view, between the opposing sides If the distance is 500 μm, the bottom surface of the recess 1 a may be formed into a shape such as an arcuate spherical shape with a cross section having a radius of curvature of 732 μm. In this case, as shown in FIG. 1B, when the end of the recess 1a is continuous in contact with the inner surface of the insulating frame 2, the sphere 4 does not come out of the recess 1a, and the end of the recess 1a. If it comes to, it will contact | connect the wiring conductor 3. FIG. When the upper surface of the insulating substrate 1 is between the end of the recess 1 a and the inner surface of the insulating frame 2, the sphere 4 may come out of the recess 1 a and contact the wiring conductor 3.

また、本発明の配線基板9は、絶縁枠体2は、上面と内面との間に全周にわたって段差が形成されており、配線導体3は、段差よりも下側の内面から段差の上面を経て絶縁基板1の側面および下面の少なくとも一方に導出されている。これにより、段差の長さを調節することにより、傾き易い方向(例えばデジタルカメラにおける上下方向等)で球体4の移動距離を短くし、球体4が配線導体3に接触し易くして検知の感度を高くする等、用途に応じた傾斜センサー装置を作製することが可能な配線基板9を提供することができる。 Further, in the wiring board 9 of the present invention, the insulating frame 2 has a step formed over the entire circumference between the upper surface and the inner surface, and the wiring conductor 3 extends from the inner surface below the step to the upper surface of the step. after it that have been derived to at least one side surface and the lower surface of the insulating substrate 1. Thereby, by adjusting the length of the step, the moving distance of the sphere 4 is shortened in a direction in which it is easy to tilt (for example, the vertical direction in a digital camera), and the sphere 4 can easily come into contact with the wiring conductor 3 to detect sensitivity. It is possible to provide the wiring board 9 that can produce a tilt sensor device according to the application, such as increasing the height of the wiring board.

また、本発明の配線基板9は、絶縁基板1および絶縁枠体2は正六角形または正八角形であることが好ましい。これにより、傾きの生じる方向(例えば、平面視において上下左右方向とそれぞれの間の8方向、斜め上左右方向と斜め下左右方向および上下方向の6方向)を精度良く検知することができ、傾きの精度をより一層優れたものとすることができる。なお、八角形を超える多角形状では円形状に近くなるので、球体4が絶縁枠体2の辺部や角部に留まらずに不安定に移動し易くなり過ぎる傾向があり、傾きを検知する精度が低くなるおそれがある。   In the wiring board 9 of the present invention, the insulating substrate 1 and the insulating frame 2 are preferably regular hexagons or regular octagons. This makes it possible to accurately detect the direction in which the tilt occurs (for example, eight directions between the upper, lower, left, and right directions in the plan view, and the six directions of the diagonally upper horizontal direction, the diagonally lower horizontal direction, and the vertical direction). The accuracy can be further improved. In addition, since the polygonal shape exceeding the octagon is close to a circular shape, the sphere 4 tends not to stay on the sides and corners of the insulating frame 2 and tends to move unstably, and the accuracy of detecting the inclination May be low.

そして、上記構成の配線基板9において、絶縁基板1の上面の絶縁枠体2の内側に、凹部1aの底面を自由に転がることができる状態で球体4を収容するとともに、絶縁枠体2の上面に蓋体5を取着することにより、配線基板9が傾いたときに球体4が接触している配線導体3を検知することによって配線基板9の傾斜方向を特定するようにした本発明の傾斜センサー装置が構成される。上記の構成により、傾きの検知の感度がぶれ等のわずかな傾きには反応せず、使用している機器の傾き等の傾きは的確に検知することが可能な適度に高いものであるとともに、表面実装が容易で生産性に優れ、球体4が封入された容器の気密性が良好で、長期にわたって誤作動することなく傾きを検知することが可能な傾斜センサー装置とすることができる。   In the wiring board 9 configured as described above, the sphere 4 is accommodated inside the insulating frame 2 on the upper surface of the insulating substrate 1 in a state where the bottom surface of the recess 1a can be freely rolled, and the upper surface of the insulating frame 2 The inclination of the present invention is such that the direction of inclination of the wiring board 9 is specified by detecting the wiring conductor 3 that is in contact with the sphere 4 when the wiring board 9 is tilted by attaching the lid 5 to the board. A sensor device is configured. With the above configuration, the sensitivity of tilt detection does not react to slight tilts such as blurring, and the tilt of the equipment used is moderately high that can be accurately detected, It is possible to provide an inclination sensor device that is easy to mount on the surface, is excellent in productivity, has good airtightness of the container in which the sphere 4 is sealed, and can detect the inclination without malfunctioning over a long period of time.

なお、蓋体5は、酸化アルミニウム質焼結体や窒化アルミニウム質焼結体,ムライト質焼結体,炭化珪素質焼結体,窒化珪素質焼結体,ガラスセラミックス等のセラミック材料、鉄−ニッケル−コバルト合金や鉄−ニッケル合金等の金属材料で形成される。   The lid 5 is made of an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon carbide sintered body, a silicon nitride sintered body, a ceramic material such as glass ceramics, iron- It is formed of a metal material such as a nickel-cobalt alloy or an iron-nickel alloy.

また蓋体5は、絶縁枠体2の上面に取着して収納部を封止することができるものであればよく、特に形状、寸法等に制約はないが、例えば、取り扱いや絶縁枠体2の上面に取着する作業を容易とすること等を考慮して、絶縁枠体2と外形形状が同形状の板状に形成されるのがよい。   The lid 5 may be anything that can be attached to the upper surface of the insulating frame 2 and seal the storage portion, and is not particularly limited in shape, dimensions, etc. In view of facilitating the work of attaching to the upper surface of 2, it is preferable that the insulating frame 2 and the outer shape be formed in a plate shape having the same shape.

蓋体5は、酸化アルミニウム質焼結体から成る場合、絶縁基板1や絶縁枠体2と同様にしてグリーンシートを作製し、これを所定の寸法に切断加工して焼成することにより製作することができる。蓋体5の絶縁枠体2に対する取着は、ガラスやろう材、樹脂接着剤等の接合材を介して接合すること等の方法により行なうことができる。   When the lid 5 is made of an aluminum oxide sintered body, the lid 5 is produced by producing a green sheet in the same manner as the insulating substrate 1 and the insulating frame 2, and cutting and firing the green sheet to a predetermined dimension. Can do. Attachment of the lid 5 to the insulating frame 2 can be performed by a method such as bonding via a bonding material such as glass, brazing material, or resin adhesive.

また、球体4の上端と蓋体5の下面との間の距離は50μm以上が好ましい。これにより、球体4が蓋体5の下面に頻繁に接触するようなことを効果的に防止し、球体4の移動をより滑らかにして傾きの検知の精度をより確実に高く確保することができる。また、球体4と蓋体5との間の距離が広くなりすぎることを防ぎ、球体4を自由に移動できるものとするとともに、球体4が蓋体5に強く衝突するようなことを効果的に防止し、気密封止の信頼性をより優れたものとすること等のために、上記距離は50乃至300μmとすることがより好ましい。   Further, the distance between the upper end of the sphere 4 and the lower surface of the lid 5 is preferably 50 μm or more. Accordingly, it is possible to effectively prevent the sphere 4 from frequently contacting the lower surface of the lid 5, and to make the movement of the sphere 4 smoother and ensure the accuracy of tilt detection more reliably. . In addition, it is possible to prevent the distance between the sphere 4 and the lid 5 from becoming too wide, to move the sphere 4 freely, and to effectively collide the sphere 4 with the lid 5 effectively. The distance is more preferably 50 to 300 μm in order to prevent and improve the reliability of hermetic sealing.

なお、本発明は、上述の実施の形態の例に限定されるものではなく、本発明の要旨を逸脱しない範囲内であれば種々の変更は可能である。   Note that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention.

(a)は本発明の配線基板および傾斜センサー装置の平面図、(b)はその断面図である。(A) is a top view of the wiring board and inclination sensor apparatus of this invention, (b) is the sectional drawing.

符号の説明Explanation of symbols

1・・・絶縁基板
1a・・・凹部
2・・・絶縁枠体
3・・・配線導体
4・・・球体
5・・・蓋体
9・・・配線基板
DESCRIPTION OF SYMBOLS 1 ... Insulating substrate 1a ... Recessed part 2 ... Insulating frame 3 ... Wiring conductor 4 ... Sphere 5 ... Lid 9 ... Wiring board

Claims (4)

上面の中央部に曲面状の凹部が形成されているとともに外形形状が四角形以上の多角形状である絶縁基板と、該絶縁基板の上面の外周部に前記凹部を取り囲むようにして取着された外形形状が前記絶縁基板と同形状の絶縁枠体と、該絶縁枠体の各辺部の内面から前記絶縁基板の側面および下面の少なくとも一方に導出された配線導体とを具備しており、前記絶縁基板の上面の前記絶縁枠体の内側に導電性の球体が自由に転がることができる状態で収容されているとともに、前記配線導体は互いに電気的に独立しており、前記絶縁枠体は、上面と内面との間に全周にわたって段差が形成されており、前記配線導体は、前記段差よりも下側の前記内面から前記段差の上面を経て前記絶縁基板の側面および下面の少なくとも一方に導出されていることを特徴とする配線基板。 An insulating substrate having a curved concave portion formed in the central portion of the upper surface and having an outer shape of a polygonal shape of a quadrangle or more, and an outer shape attached to the outer peripheral portion of the upper surface of the insulating substrate so as to surround the concave portion An insulating frame having the same shape as the insulating substrate; and a wiring conductor led out from an inner surface of each side of the insulating frame to at least one of a side surface and a lower surface of the insulating substrate. with conductive spheres inside the insulating frame of the upper surface of the substrate is accommodated in a state that can roll freely, wherein the wiring conductors are electrically independent of each other, said insulating frame body, the upper surface A step is formed between the inner surface and the inner surface, and the wiring conductor is led out from the inner surface below the step to the at least one of the side surface and the lower surface of the insulating substrate through the upper surface of the step. Iruko Te Wiring board according to claim. 前記凹部は、その内面に前記配線導体に対して電気的に独立した電極パッドが形成されていることを特徴とする請求項1記載の配線基板。   2. The wiring board according to claim 1, wherein an electrode pad electrically independent of the wiring conductor is formed on an inner surface of the recess. 前記凹部は、前記絶縁基板が10度以上傾いたときに前記球体が前記配線導体に接するように形成されていることを特徴とする請求項1または請求項2記載の配線基板。   The wiring substrate according to claim 1, wherein the concave portion is formed so that the sphere contacts the wiring conductor when the insulating substrate is tilted by 10 degrees or more. 請求項1乃至請求項3のいずれかに記載の配線基板と、前記絶縁基板の上面の前記凹部に自由に転がることができる状態で収容された導電性の球体と、前記絶縁枠体の上面に取着された蓋体とを具備しており、前記配線基板が傾いたときに前記球体が接触している前記配線導体を検知することによって前記配線基板の傾斜方向を特定することを特徴とする傾斜センサー装置。   A wiring board according to any one of claims 1 to 3, a conductive sphere accommodated in a state of being freely rollable in the recess on the upper surface of the insulating substrate, and an upper surface of the insulating frame And an attached lid, and the direction of inclination of the wiring board is specified by detecting the wiring conductor in contact with the sphere when the wiring board is tilted. Tilt sensor device.
JP2004190557A 2004-06-28 2004-06-28 Wiring board and tilt sensor device Expired - Fee Related JP4388424B2 (en)

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JP2008089501A (en) * 2006-10-04 2008-04-17 Matsushita Electric Works Ltd Tilt sensor
JP4291858B2 (en) 2007-03-27 2009-07-08 Okiセミコンダクタ株式会社 Tilt position sensor and method of manufacturing tilt position sensor
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