JP4383897B2 - Manufacturing method of laminated gas sensor element - Google Patents

Description

The present invention relates to a method for manufacturing a stacked gas sensor element. More specifically, it is a method of manufacturing a stacked gas sensor element that has a structure that is easy to manufacture and that can sufficiently prevent damage to the element due to adhesion of water droplets, etc. Regarding the method.
The stacked gas sensor element manufactured by the manufacturing method of the present invention and the gas sensor including the same are used as various sensors such as an exhaust gas sensor of an internal combustion engine such as an oxygen sensor, a carbon monoxide sensor, a hydrocarbon sensor, and a nitrogen oxide sensor. Can do.

  As one type of gas sensor capable of detecting oxygen, carbon monoxide, various hydrocarbons, nitrogen oxide, and the like contained in exhaust gas in an internal combustion engine or the like and measuring the concentration thereof, a gas sensor having a stacked gas sensor element is known. . A laminated gas sensor element (stacked oxygen sensor element) provided in an oxygen sensor, which is one type of gas sensor, includes a ceramic base in which a heating resistor that generates heat when energized is embedded, and oxygen ions for detecting oxygen gas. It has a laminated structure in which a conductive solid electrolyte body is laminated, and a pair of electrodes is provided on one end side of the solid electrolyte body made of zirconia or the like to constitute an oxygen concentration cell, which serves as a detector. Since such a multilayer gas sensor element has a property that it does not activate unless the solid electrolyte body reaches a predetermined temperature, the heating element is energized from the start of the internal combustion engine to activate the solid electrolyte body (detection unit). It is used for use.

  By the way, at the time of cold start of the internal combustion engine, the condensed moisture adheres to the wall surface of the exhaust pipe, and adheres to the wall surface of the exhaust pipe when the heating resistor is energized to activate the stacked gas sensor element early. When moisture is splashed and the laminated gas sensor element is wetted, the element may be damaged by a thermal shock at that time (so-called thermal shock). For this reason, a detection unit of the element is conventionally protected by a metal protector having a vent hole. However, even when such a protector is used, moisture may enter through the vent of the protector, and the element may be damaged. Further, if the vent hole is made small, exhaust gas does not sufficiently flow through the detection part, and the detection performance tends to be lowered. Therefore, there is a limit to making the vent hole small.

  In order to solve such a problem, a porous protective layer is formed on a portion (specifically, a side surface) of the stacked gas sensor element that may be damaged around the detection portion exposed to the exhaust gas, There has been proposed a gas sensor element that prevents or at least suppresses water droplets or the like from directly adhering to the element (see, for example, Patent Document 1). In the gas sensor element described in Patent Document 1, even if water droplets or the like adhere to the porous protective layer, the water sensor can be evaporated by the heat generated by the gas sensor element before the water droplets or the like penetrates to the detection unit. Therefore, it is difficult for thermal shock to occur in the gas sensor element, and the detection unit can be protected.

JP 2001-281210 A

  However, there is a possibility that the structure of Patent Document 1 cannot sufficiently meet the recent demand for realizing the activation of the element at an earlier stage. In the gas sensor element described in Patent Document 1, the porous protective layer includes an unfired body that becomes a ceramic base in which a heating resistor is embedded, and an unfired body that becomes a solid electrolyte body in which a detection portion is formed on one end side. Each of the unfired element bodies on which the body is laminated is formed by a method such as applying or printing a paste to be a porous protective layer to sequentially form a coating film, and then firing. Therefore, when using an unfired sheet laminate in which a plurality of unfired element bodies are formed, each unfired element body is cut out from this laminate, and then unfired porous layers are formed on the side surfaces of each unfired element body. It was necessary to form by coating or printing, and the work was complicated. Further, the corner of the gas sensor element is easily damaged by thermal shock or the like, and it is particularly necessary to form a protective layer. However, the element described in Patent Document 1 does not take this into consideration.

  The present invention has been made to solve the above-described conventional problems, and can prevent or at least suppress damage to elements due to adhesion of water droplets and the like, particularly damage to the detection unit and its surroundings. It is an object of the present invention to provide a method for manufacturing a stacked gas sensor element that can easily manufacture a stacked gas sensor element that can be activated.

The reference invention of the present invention is as follows.
1. A plate extending in the longitudinal direction, having a ceramic base in which a heating resistor is embedded, and a detection element formed on the ceramic base and formed with a detection portion having a pair of electrodes disposed on one end side In the stacked gas sensor element including the element body, the element body is narrow at one end including the detection part of the element body, and at least a side surface of the element body at the narrowed portion. And a laminated gas sensor element, wherein a first porous layer is formed on one end face.
2. A second porous layer is coated on the entire periphery of the one end including the detection part of the element body on which the first porous layer is formed, and the first porous layer and the second porous layer The above 1. in which a porous protective layer is formed. The laminated gas sensor element according to 1.
3. The thickness of the porous protective layer is 20 μm or more from the corner of the element body. The laminated gas sensor element according to 1.

The present invention is as follows.
1 . A plate extending in the longitudinal direction, having a ceramic base in which a heating resistor is embedded, and a detection element formed on the ceramic base and formed with a detection portion having a pair of electrodes disposed on one end side In a manufacturing method of a stacked gas sensor element comprising a cylindrical element body,
A through-hole forming step of providing a through-hole in the green sheet laminate to form the element body along the side surface and one end surface of the element body including the detection portion; A filling step of filling the pores with the first porous layer paste to form an unfired porous layer to be the first porous layer, an unfired element body and the unfired porous layer from the unfired sheet laminate A cutting step of cutting the green element so as not to cause a step between the side surface of the green element body and the side surface of the green porous layer in the green element; and A method of manufacturing a laminated gas sensor element, comprising: a firing step for firing.
2 . After the baking step, the 1 comprising a coating step of coating the second porous layer the entire circumference of the end portion including the detection portion among the element body forming the first porous layer. The manufacturing method of the lamination | stacking type | mold gas sensor element of description.
3 . Two or more unfired elements can be cut out from the unfired sheet laminate, and the filling is simultaneously performed in each of the through holes for forming the two or more unfired elements in the filling step. 1 . Or 2 . The manufacturing method of the lamination | stacking type | mold gas sensor element of description.
4 . The first porous layer paste, the 1 containing pores agent for forming pores in the first porous layer after the firing. Thru 3 . The manufacturing method of the lamination | stacking type | mold gas sensor element of any one of these.
5 . In the filling, by disposing a release material on one surface of the unsintered sheet stack, the one that fills the opposite surface from the first porous layer paste and the one side of the green sheet laminate . To 4 . The manufacturing method of the lamination | stacking type | mold gas sensor element of any one of these.
6 . The 5 the release material having an uneven surface in contact with the green sheet laminate. The manufacturing method of the lamination | stacking type | mold gas sensor element of description.

The reference invention of the present invention is as follows.
4 . Above 1. To 3. A laminated gas sensor element according to any one of the above, and a sensor housing for supporting the laminated gas sensor element and disposing the laminated gas sensor element at a measurement position. Gas sensor.

According to the laminated gas sensor element of the reference invention, the first porous layer is provided on the side surface and one end surface of the one end portion including the detection portion that is likely to cause damage such as cracks due to adhesion (water exposure) of water droplets or the like in the element body. Since it is formed, water droplets flying toward the element adhere to the first porous layer. The water droplets adhering to the first porous layer slowly permeate while being dispersed in a large number of pores. Therefore, water droplets can be dispersed before reaching one end of the element main body located inside the first protective layer, the temperature gradient generated in the element main body can be reduced, and thermal shock can be effectively suppressed. It is possible to prevent the element from being damaged due to the adhesion. In addition, since the laminated gas sensor element is exposed to a high temperature state by heat generated by the heating resistor itself during use, water droplets that permeate the first porous layer are evaporated by the surrounding heat.
Then, according to the laminated gas sensor element of the reference invention, one end portion of the element body where the first porous layer is formed is formed narrower than the width of the other part of the element body. For this reason, even if the first porous layer is formed on the element body, the element itself can be reduced in size as compared with the case where the first porous layer is formed on the element body having the same width. . Therefore, in the laminated gas sensor element of the reference invention, the heat generated by the heating resistor is efficiently used as a detection element (detection unit) as compared with the conventional case where the first porous layer is formed in the element body having the same width. As a result, early activation of the device can be effectively achieved.

In the case where the second porous layer is provided on the entire periphery of one end of the element body where the first porous layer is formed, and the porous protective layer is formed by the first porous layer and the second porous layer. Can more efficiently prevent the element from being damaged by water. In other words, in the laminated gas sensor element of the reference invention, since the element body has a plate shape having a substantially square cross section, a corner is formed in the element body. Thermal stress tends to concentrate and cracks tend to occur. Therefore, in addition to the first porous layer, if the second porous layer is provided on the entire periphery of the one end including the detection part of the element body, water droplets can be more reliably attached directly to the corners of the element body. The water resistance of the element itself can be further improved. In addition, it is not easy to increase the thickness of the porous layer alone, but the thickness of the porous layer (porous protective layer) is controlled by providing the second porous layer as described above. It is easy and effective from the viewpoint of design.
Further, the thickness of the porous protective layer is preferably 20 μm or more from the corner of the element body from the viewpoint of more effectively preventing damage to the element due to water.

According to the method for manufacturing a multilayer gas sensor element of the present invention, it is possible to efficiently manufacture a multilayer gas sensor element that has excellent water resistance and can realize early activation when used. More specifically, according to the method for manufacturing a laminated gas sensor element of the present invention, the unfired sheet laminate that forms the element body is provided on the side surface and the one end surface of the one end including the detection unit. By providing a through hole along the surface and filling the through hole with the first porous layer paste, an unfired protective layer can be formed on each surface at the same time. Increased compared to Furthermore, the unsintered protective layer and the unsintered element body are fired simultaneously in the firing step, and the adhesive strength of the first porous layer to the element body after firing can be increased. Moreover, it can be set as an element with a flat side surface by cutting out so that a level | step difference may not arise between the side surface of an unbaking element main body, and the side surface of an unbaking porous layer.
In addition, when the coating step of covering the first porous layer with the second porous layer is provided after the firing step, the surface of the first porous layer is roughened by pores. The anchor strength of the second porous layer can be effectively obtained by the anchor effect of the porous layer. As described above, the porous layer is only a single layer, and it is not easy to increase the thickness. However, if the second porous layer is provided after the firing step as described above, the resistance against the element body can be improved. A relatively thick porous layer (porous protective layer) can be formed in a state in which the releasability is satisfactorily secured.
Furthermore, two or more unfired elements can be cut out from the unfired sheet laminate, and when each through hole for forming two or more unfired elements is filled simultaneously, two or more An element can be manufactured more efficiently.
Moreover , when the 1st porous layer paste contains the porosity forming agent for forming a pore at the time of baking, a 1st porous layer can be formed more easily.
Further, in the filling , when a release material is disposed on one side of the unfired sheet laminate and the first porous layer paste is filled from the side opposite to the one side of the unfired sheet laminate , Is easy to release, and the paste adheres to the release material and does not remain.
Furthermore, when the release material has irregularities on the surface that comes into contact with the unfired sheet laminate, it is easier to release after filling, and the adhesion and remaining of the paste on the release material are more sufficiently prevented.

According to the gas sensor of the reference invention, damage to the element due to adhesion of water droplets or the like can be sufficiently prevented, and a gas sensor that can maintain stable detection performance over a long period of time can be obtained. Furthermore, according to the gas sensor of the reference invention, since the stacked gas sensor element is activated early, a gas sensor that enables early gas detection can be obtained.

Hereinafter, the present invention will be described in detail.
[1] Configuration of Stacked Gas Sensor Element of Reference Invention The stacked gas sensor element is a stacked gas sensor element using an oxygen concentration cell made of a solid electrolyte body, for example, in the case of an oxygen sensor, and a heating resistor is embedded therein. A laminated structure is provided that includes a plate-like element body that includes a ceramic base and a detection element that is laminated on the ceramic base and that has a detection portion having a pair of electrodes disposed on one end side. And this laminated type gas sensor element is provided with the 1st porous layer which coat | covers the side surface and one end surface of the one end part which contains a detection part at least among element bodies, and protects from the damage by the thermal shock accompanying a to-be-watered. Furthermore, this multilayer gas sensor element covers the entire periphery of one end of the element body on which the first porous layer is formed, and can prevent or at least suppress damage to the multilayer gas sensor element more reliably. You may have two porous layers.

(1) Ceramic Substrate The “ceramic substrate” is not particularly limited as long as it is a ceramic sintered body, and alumina, spinel, mullite, and the like that maintain high insulation even at high temperatures can be used. These ceramics may use only 1 type and can also use 2 or more types together.

  The material of the heating resistor is not particularly limited, and for example, noble metal, tungsten, or molybdenum can be used. Examples of the noble metal include Pt, Au, Ag, Pd, Ir, Ru, and Rh. These may use only 1 type and can use 2 or more types together, and an alloy may be sufficient in the case of 2 or more types. Further, among precious metals, it is preferable that Pt is mainly used in consideration of heat resistance, oxidation resistance, and the like.

  In addition to the noble metal, the heating resistor can contain a ceramic component. The type of the ceramic component is not particularly limited, but is preferably the same as the ceramic component constituting the portion of the ceramic base that contacts the heating resistor, from the viewpoint of fixing strength. This heating resistor is formed by applying a conductive paste containing a predetermined noble metal powder and, if necessary, a ceramic powder to a green sheet as a ceramic substrate to form a heating resistor pattern, and then firing it. can do.

(2) Detection Element The “detection element” includes at least one solid electrolyte body (solid electrolyte layer) including a pair of electrodes. The detection element may be directly laminated with the ceramic substrate, or may be indirectly laminated via another member. Further, in this detection element, a portion of the solid electrolyte body where the pair of electrodes is formed constitutes a detection unit. Specifically, a detection unit that functions as an oxygen concentration cell is provided by providing a reference electrode on the side facing the ceramic substrate in the solid electrolyte body and providing a detection electrode on the side opposite to the side facing the ceramic substrate. Can be configured. The thickness of a solid electrolyte body is not specifically limited, Usually, it is 20-100 micrometers. Further, the solid electrolyte body may be I have a characteristic corresponding to the gas to be detected, the material is not particularly limited, it is possible to use zirconia sintered body and LaGaO ₃ sintered body or the like.

  The solid electrolyte body can contain the same component as the ceramic component constituting the ceramic substrate, particularly the ceramic component as the main component. The content of the ceramic component can be 10 to 80% by mass, preferably 30 to 70% by mass, more preferably 40 to 60% by mass, when the solid electrolyte body is 100% by mass. This can relieve stress due to the difference in thermal expansion between the ceramic substrate and the sensing element, facilitate simultaneous firing by directly laminating the ceramic substrate and the sensing element, and improve their adhesion. Can do.

  The material of the “electrode” is not particularly limited, but a noble metal is preferable, and Pt is particularly preferable. The electrode may be made of two or more metals, and an alloy may be used in the case of two or more metals. For example, Au, Ag, Pd, Ir, Ru, Rh, or the like may be contained with Pt as a main component, or an alloy of Pt and another noble metal may be used. In particular, the combined use of Pt and Rh that can suppress the volatilization of Pt at a high temperature is useful.

  One end including the detection portion of the element body formed by stacking the ceramic base and the detection element, that is, one end side of the element body is “narrower” than the other portions. This narrow width is a form in which a part of the element body is scraped off in the width direction on one end side of the element body, and it is preferable that the width is narrow with substantially the same dimension on each side. Thus, by narrowing the one end side of the element body, the element itself can be reduced in size even when a first porous layer described later is formed on the side surface and one end surface of this part of the element body. it can. In addition, it is preferable that the narrow end portion is narrow with substantially the same size on each side, so that the first porous layer having a uniform thickness can be easily formed.

(3) First Porous Layer The “first porous layer” is formed of a ceramic sintered body and has a communication hole through which a test gas can enter. The material of the first porous layer is not particularly limited, but spinel, alumina, mullite and the like can be used. The porosity of the first porous layer is preferably 15 to 65%. If the porosity is less than 15%, the function of slowly permeating water droplets while being dispersed by the first porous layer may not be sufficiently exerted, and the porosity exceeds 65%. When water or the like adheres, the element easily enters the first porous layer, and the element body may not be sufficiently protected. Moreover, it is preferable to make this porosity into the range of 30 to 60%. By making it within this range, the effect of dispersing water droplets can be sufficiently obtained, the temperature in the first porous layer can be made uniform, and the ability to alleviate the thermal shock on the element body can be enhanced. The porosity is more preferably in the range of 40 to 55%. In the present specification, the porosity is calculated by analyzing the cross section of the first porous layer with a scanning electron microscope, and from the enlarged photograph obtained by the analysis, the ratio of the area of the pores per unit area ( %).

  The first porous layer may be formed by applying a first porous layer paste containing a pore forming agent to a portion of the element body where the first porous layer is disposed, and then baking the paste. it can. By this baking, the pore forming agent contained in the first porous layer paste is vaporized and dissipated to form pores (holes). The first porous layer paste can be applied by a method such as screen printing and dipping depending on the portion where the first porous layer is formed, in addition to the filling described later.

  By the way, when forming a porous layer (porous protective layer) having a relatively thick thickness on each surface including the corners of the element body, it is possible to obtain a bonding strength of the porous protective layer to the element body. This is important from the viewpoint of peelability. Therefore, the second porous layer is formed so as to cover the entire periphery of one end side of the element body on which the first porous layer is formed as described above, and the first porous layer and the second porous layer are porous. It is effective to form a quality protective layer. That is, since the first porous layer is porous, the surface is roughened by pores, and the anchor effect of the surface is used to fix the second porous layer to the first porous layer. The strength can be increased, and as a result, the thickness of the porous protective layer composed of the first porous layer and the second porous layer can be increased.

(4) Second Porous Layer The “second porous layer” is formed of a ceramic sintered body having a communication hole through which a test gas can permeate in the same manner as the first porous layer. The material of the second porous layer is not particularly limited, but spinel, alumina, mullite and the like can be used. The porosity of the second porous layer may be adjusted to be approximately the same as that of the first porous layer. However, from the viewpoint of increasing the adhesion strength of the second porous layer to the first porous layer, the first porous layer It is preferable that the porosity of the layer is larger than the porosity of the second porous layer. This is because the anchor effect by the first porous layer can be enhanced.

  The porous protective layer formed from the first porous layer and the second porous layer is formed so as to cover the corner of the element body, and is formed with a thickness of 20 μm or more from the corner. It is preferable. Thus, by forming a porous protective layer of 20 μm or more, it is possible to effectively prevent damage to the laminated gas sensor element due to moisture.

  The thickness of the porous protective layer is preferably 20 μm or more, more preferably 30 μm or more, and even more preferably 50 μm or more in order to more effectively prevent damage to the element due to moisture. The upper limit value of the thickness of the porous protective layer is not particularly limited, but can be set to 500 μm or less in consideration of the manufacturing cost and the like. In this specification, “the thickness of the porous protective layer is set to 20 μm or more from the corner of the element body” means that the corner of the element body and the porosity are taken when a cross section in the thickness direction of the element body is taken. This means that when a virtual circle having a diameter of 20 μm is formed between the porous protective layer and the protective layer, the virtual circle is included in the porous protective layer. In addition, the “corner portion” in the present specification connects any one of the front and back surfaces extending in the longitudinal direction and any one of both side surfaces and one end surface in the plate-like element body. It points to a point. The “corner portion” is not limited to only the upper portion (that is, the ridge) where the two surfaces intersect, and includes a curved portion that connects the two surfaces in, for example, an R shape.

[2] Production of Multilayer Gas Sensor Element In the method for producing a multilayer gas sensor element of the present invention, two or more unfired elements can be formed on a single unfired sheet laminate, A laminated gas sensor element can be obtained easily and efficiently by cutting out from the unfired sheet laminate and firing.
(1) Unsintered sheet laminate The above-mentioned “unsintered sheet laminate” is a laminate that constitutes an element body, that is, a ceramic substrate and a detection element after firing. This green sheet laminate is a laminate composed of a plurality of green ceramic layers. Further, a heating resistor is formed between the plurality of unfired ceramic layers serving as the ceramic substrate. Furthermore, two or more green elements can be cut out from one green sheet laminate. This unfired element can be cut out from the unfired sheet laminate by sequentially cutting with a blade or the like, or punching with a press using a punching blade.

(2) Through-hole The above-mentioned “through-hole” is formed through the unfired sheet laminate in the thickness direction so that the wall surface becomes the side surface and one end surface of the one end portion including the detection portion of the unfired element body. The The first porous layer can be formed by filling the through hole with the first porous layer paste and firing it. The planar shape of the through hole may correspond to the planar shape of one end including the detection unit. For example, if the planar shape of the one end portion when projected in the thickness direction is a rectangle, the substantially U-shape can be obtained. By making it substantially U-shaped, the first porous layer paste can be simultaneously filled into both side surfaces and one end surface where the formation of the first porous layer is necessary, and the working time is shortened. Can do.
In addition, what is necessary is just to adjust the width | variety of a through-hole suitably according to the thickness of a 1st porous layer, and the thickness of the unbaking porous layer for forming this 1st porous layer.

(3) Mask A specific mask can be used for filling the through hole with the first porous layer paste. This mask preferably has a mask shape that is the same planar shape as the through hole and wider than the through hole. Filling the through holes with the first porous layer paste can be performed by placing the paste directly on the surface of the unfired sheet laminate without using a mask and pouring it with a squeegee or the like. A method of placing a mask at a predetermined position of the laminate and filling the paste from the mask is preferable. In this way, the range in which the paste adheres to the surface of the green sheet laminate can be adjusted more accurately. The material of the mask is not particularly limited, and may be any of metal, synthetic resin, and ceramic, but is preferably metal.

(4) In the release material filling process, that by arranging a release material on one surface of the unsintered sheet laminate, and the one surface of the unsintered sheet laminate to fill the first porous layer paste from the surface opposite it can. In this way, the lower end surface of the paste filled in the through holes can be easily peeled off from the release material, and the paste is placed on the mounting table as in the case where the unfired sheet laminate is directly mounted on the mounting table. It is possible to prevent the paste from adhering to other unfired sheet laminates, or the adhered paste from solidifying and preventing filling of the other unfired sheet laminates.

  As the mold release material, a sheet, a film, or the like in which surface release properties are improved by impregnating or coating a base material made of paper, resin, metal, or the like with silicone, polyethylene, fluororesin, or the like can be used. Furthermore, it is preferable that the contact surface of the release material with the green sheet laminate has irregularities. The degree of the unevenness is not particularly limited as long as the release material and the unfired sheet laminate do not excessively adhere to each other and a gap is generated between them. By making the surface of the release material rough as described above, it is possible to prevent the release material and the unfired sheet laminate from being in close contact with each other, thereby reducing the workability in the process after filling. The difference between the concave and convex portions is preferably 100 μm or less, particularly 50 μm or less, and more preferably 30 μm or less. If this difference is large, the communication hole for air escape between the unfired sheet laminate and the sheet, film, etc. is closed, which is not preferable because the paste may be insufficiently filled.

[3] Gas sensor structure
As shown in FIG. 10, the gas sensor of the reference invention is a gas sensor 5 in which a stacked gas sensor element 1 is incorporated. For example, the gas sensor is attached in an exhaust pipe of an internal combustion engine and used for measuring an oxygen concentration in exhaust gas. In the gas sensor 5, the stacked gas sensor element 1 is inserted into the housing 52. Further, a double-structure protector 53 is fixed to the outer periphery of the front end portion (one end portion) of the housing 52 so as to cover one end side including the detection portion of the stacked gas sensor element 1. Further, the protector 53 is formed with a vent hole 531 for guiding exhaust gas flowing in the exhaust pipe to the inside at the tip and peripheral surface thereof. As described above, in the stacked gas sensor element 1, one end side including the detection portion protruding from the tip of the housing 52 is a portion exposed to the test gas (exhaust gas). As shown in FIG. 2, the laminated gas sensor element 1 has a porous protective layer 13 formed on one end side exposed to the test gas.

  Further, the rear end portion of the housing 52 is inserted inside the front end portion of the outer cylinder 51. A screw portion 521 for attaching the gas sensor 5 to the exhaust pipe is formed on the outer periphery of the housing 52. In addition, the detection electrode 112 and the reference electrode 113 of the stacked gas sensor element 1 are electrically connected to an external circuit via a detection electrode lead portion 1121 and a reference electrode lead portion 1131 (see FIG. 3) extending from each. The Further, the heating resistor 121 embedded in the multilayer gas sensor element is electrically connected to an external circuit via the heating resistor lead portion 1211 (see FIG. 3). Further, a total of four lead wires 54 extend through the grommet 511 located on the rear end side of the outer cylinder 51.

[4] Manufacture of Gas Sensor The gas sensor 5 can be manufactured as follows.
First, the laminated gas sensor element 1 connected to each lead wire 54 is inserted into an insertion hole formed in the housing 52 so that one end side including the detection portion protrudes from the tip of the housing 52, and glass is inserted. Sealing with the main sealing material. Thereafter, a metal protector 53 is fixed by laser welding or the like so as to cover the protruding portion of the multilayer gas sensor element 1. Next, the rear end portion of the housing 52 is inserted inside the front end portion of the outer cylinder 51 and joined by laser welding all around. And the grommet 51 is arrange | positioned inside the rear end side of the outer cylinder 51, the outer cylinder 51 located in the radial direction periphery of the grommet 51 is crimped toward the inner side in the radial direction, and the grommet 51 is fixed to the outer cylinder 51. Gas sensor 5 is obtained.

Hereinafter, the present invention will be specifically described by way of examples.
This embodiment relates to a stacked oxygen sensor element which is a kind of stacked gas sensor element and an oxygen sensor which is a gas sensor including the stacked oxygen sensor element.
[1] Structure of laminated oxygen sensor element The structure of the laminated oxygen sensor element will be described with reference to FIGS. FIG. 3 is an exploded perspective view of the multilayer oxygen sensor element. The multilayer oxygen sensor element 1 includes a detection element 11 and a heater element 12 that is a ceramic substrate having a heating resistor 121 inside.

  The detection element 11 contains 60% by mass of partially stabilized zirconia having oxygen ion conductivity in which a predetermined amount of yttria is dissolved as a stabilizer and 40% by mass of alumina, and acts as an oxygen concentration cell. A body 111 is provided. A detection electrode 112 is formed on one surface of the solid electrolyte body 111 and a reference electrode 113 is formed at a position corresponding to the detection electrode 112 on the other surface. A detection electrode lead portion 1121 and a reference electrode lead portion 1131 are extended from the detection electrode 112 and the reference electrode 113, respectively. In this embodiment, the portion where the solid electrolyte body 111 is sandwiched between the detection electrode 112 and the reference electrode 113 corresponds to the detection unit.

  Further, the end of the detection electrode lead part 1121 is connected to a signal extraction terminal 1142 for connection to an external terminal by a through-hole conductor 1152 that penetrates the protective insulating layer 115. Further, the end of the reference electrode lead portion 1131 is connected to a signal extraction terminal 1141 for connection to an external terminal by a through-hole conductor 1111 that penetrates the solid electrolyte body 111 and a through-hole conductor 1151 that penetrates the protective insulating layer 115. ing. The signal extraction terminals 1141 and 1142 are connected to external terminals (not shown). In addition, an electrode protection layer 116 made of a porous body is formed on the surface of the solid electrolyte body 111 where the detection electrode 112 is formed in order to prevent poisoning of the detection electrode 112.

  The heater element 12 has a heat generating resistor 121 made of platinum, and the heat generating resistor 121 is sandwiched between a first alumina layer 122 and a second alumina layer 123 mainly composed of alumina having excellent insulating properties. A lead portion 1211 extends from the heating resistor 121, and terminals of the lead portion 1211 are connected to heater energization terminals 1241 and 1242 by two through-hole conductors 1221 and 1222 that penetrate the first alumina layer 122. And are electrically connected. The heater energization terminals 1241 and 1242 are connected to external terminals (not shown).

Further, as shown in FIG. 2, which is a cross-sectional view taken in the thickness direction in a form including the detection unit with respect to the laminated oxygen sensor element 1, an element which is a laminated body of the detection element 11 and the heater element 12 The entire periphery of the main body is covered with the porous protective layer 13 composed of the first porous layer 131 and the second porous layer 132. Further, as shown in FIG. 10, one end face of the element body of the stacked oxygen sensor element 1 is also covered with the porous protective layer 13. The thickness of the porous protective layer 13 is 200 μm from the corner of the element body.
In addition, the dimension of the part except the 2nd porous layer 132 of the laminated | stacked oxygen sensor element 1 of this Example is 40 mm in length, 3 mm in width, and 2 mm in thickness. Further, as exaggeratedly shown in FIG. 3, one end side including the detection portion in the element body is formed to be narrower than other portions, and the width covered by the first porous layer 131 of the element body. The width of the narrow end portion is 2.7 mm, the width of the other portion is 3 mm, and the portion corresponding to the detection portion is narrowed by 300 μm (150 μm on one side in the width direction).

[2] Manufacture of laminated oxygen sensor element This laminated oxygen sensor element is manufactured by producing a non-fired sheet laminate and then performing a through-hole forming step, a filling step, a cutting step and a firing step in this order. Is done. Moreover, the 2nd porous layer 132 is formed by performing a coating | coated process after a baking process.
(1) Production of unsintered detection element Solid using a slurry obtained by wet-mixing 60% by mass of partially stabilized zirconia powder in which yttria is dissolved and 40% by mass of alumina powder together with an organic binder and an organic solvent An unfired sheet to be the electrolyte body 111 was produced. This unfired sheet has a size capable of cutting out 32 unfired oxygen sensor elements, and through holes serving as through holes for 32 elements were formed at predetermined positions. The unsintered sheet is formed in such a size that the 32 unsintered oxygen sensor elements can be cut out as described above, but the individual pieces are provided with a predetermined interval (discard allowance). It has been. Thereafter, a conductive paste containing platinum as a main component is printed in a predetermined pattern on a predetermined portion of one side and the other side of the unfired sheet, and dried to detect the detection electrode 112, the reference electrode 113, and the respective lead portions 1121, 1131. And an unfired conductor to be a through-hole conductor 1111 were formed.

(2) Production of unsintered heater element Using a paste obtained by wet mixing alumina powder together with an organic binder, an organic solvent, etc., an unsintered alumina sheet to be the first alumina layer 122 is formed, and 32 elements are provided. A through hole to be a through hole was formed. Thereafter, a conductive paste similar to the above (1) is printed in a predetermined pattern on a predetermined portion of one surface of the unfired alumina sheet to be the first alumina layer 122, dried, and extended to the heating resistor 121 and the heating resistor 121. The heating resistor pattern to be the lead portion 1211 and the unfired conductor to be the through-hole conductors 1221 and 1222 were formed. In addition, a predetermined terminal pattern to be the heater energizing terminals 1241 and 1242 is printed on a predetermined portion of the other surface of the unfired alumina sheet to be the first alumina layer 122 by using the same conductive paste as in (1) and dried. did. Next, an unsintered alumina sheet to be the second alumina layer 123 is prepared by the same method as that for the first alumina layer 122 and dried. The unfired alumina sheet to be the one alumina layer 122 was laminated on the surface on which the heating resistor pattern was formed, and was pressure-bonded under reduced pressure. Each unsintered alumina sheet also has a size that allows the 32 first alumina layers 122 and the second alumina layers 123 to be cut out, and the individual pieces are provided with a predetermined interval (disposal allowance) therebetween. It has been.

(3) Formation of unsintered sheet laminate Unsintered sheet for detection element prepared in (1) and unsintered sheet for heater element prepared in (2). The surface of the sheet on which the electrode pattern to be the reference electrode 113 and the lead portion 1131 is formed and the other surface of the unfired alumina sheet to be the second alumina layer 123 of the unfired heater element sheet produced in (2). Laminated to face each other.

(4) Printing step (1) Among the one end portions including the detection portion of the unfired sheet laminate formed in (3), the unfired first porous layer 131 is formed on the surface of the unfired sheet for heater elements. A first porous layer paste for forming one porous layer was screen-printed to form a coating film having a thickness of about 30 μm. Thereafter, the coating film was dried at 95 ° C. for 2 minutes. The first porous layer paste used for printing is 100 parts by mass of alumina powder, 15.5 parts by mass of polyvinyl butyral as an organic binder, 42 parts by mass of butyl carbitol as an organic solvent, and as a pore forming agent. 65 parts by mass of carbon powder having a particle size of 5 to 20 μm is blended.

(5) Through-hole formation process The through-hole 2 which has a substantially U-shaped planar shape and a width | variety of 500 micrometers was formed in the unbaking sheet | seat laminated body as FIG.4 and FIG.5. Thereby, the through-hole 2 is simultaneously formed with respect to three surfaces of the side surface and one end surface of the one end part including the site | part by which formation of a detection part is planned among unfired sheet laminated bodies. In addition, the through-hole 2 for 32 elements was formed in one unbaked sheet laminated body by the punching method. Moreover, as shown in FIG. 4, the through-hole 2 having a width of 500 μm was formed so that part of the through-hole 2 extends between the plurality of pieces in the green sheet laminate (in FIG. 4, The part surrounded by the broken line indicates the size of each green element cut out in the process described later.)

(6) Filling Step As shown in FIGS. 6 and 7, the release agent 3 is arranged on the lower surface of the unfired sheet laminate, and the first porous layer 131 is placed with the mask 4 placed on the upper surface. The through-hole 2 was filled with the paste for 1st porous layers for forming the unbaking 1st porous layer used as another part with the squeegee. Thereafter, the filled paste was dried at 60 ° C. for 180 minutes. The first porous layer paste used for filling is the same as the paste used in the above-described (4) printing process, and it is easy to fill the through-holes 2 and can flow down after filling. The viscosity was not so high. As the release agent 3, as shown in FIG. 8, a release agent 3 made of paper having a concavo-convex difference of about 10 μm between the concave and convex portions on the surface and subjected to waterproof processing was used. The mask 4 is made of metal, has a thickness of 120 μm, and has a mask hole 41 having a width of 900 μm, which is 400 μm wider than the width 500 μm of the through hole 2.

(7) Pressure bonding of the unfired sheet for the protective layer and the unfired sheet for the protective insulating layer to the unfired sheet laminate, using a slurry obtained by wet-mixing a predetermined alumina powder and carbon powder, a binder, an organic solvent, and the like, An unfired sheet for a protective layer to be the electrode protective layer 116 was formed. Next, an unfired sheet for protective insulating layer to be the protective insulating layer 115 was formed using an unfired alumina sheet having the same composition as the unfired alumina sheets to be the first and second alumina layers 122 and 123. Then, the unfired sheet for protective insulating layers was formed with unfired conductors serving as through-hole conductors 1151 and 1152, and terminal patterns serving as signal extraction terminals 1141 and 1142. And on the side where the electrode pattern to be the detection electrode 112 of the green sheet laminate after the filling step (6) is formed, the green sheet for the protective layer and the green sheet for the protective insulating layer are appropriately laminated, Pressurized under reduced pressure.

(8) Separation step In (6), the through-hole 2 is filled with the first porous layer paste. In (7), the unfired sheet laminate is further provided with an unfired sheet for protective layer and an unfired sheet for protective insulating layer. The laminated body shown in FIG. 9 was sequentially cut with a blade along the broken line to obtain a total of 32 unfired elements. In the cutting of each green element, cutting was performed so that no step was generated between the side surface of the green sheet laminate and the side surface of the green porous layer made of the first porous layer paste. Further, in the green element after cutting, the green porous layer was cut so that the thickness of the green porous layer from the side surface to the one end surface was 180 μm.

(9) Firing step The unfired element obtained in (8) is heated from room temperature to 450 ° C. at a rate of 20 ° C./hour in an air atmosphere in a degreasing furnace and held at 450 ° C. for 1 hour for degreasing. (Debinding process). Thereafter, the temperature was raised at a rate of 200 ° C./hour in a firing furnace and fired at a maximum temperature of 1500 ° C. for 1 hour. By this firing, the pore forming agent contained in the unfired porous layer is burned off to generate pores, and the first porous layer 131 is formed.

(10) Second porous layer forming step As an alumina powder, a binder (polyvinyl butyral), an organic solvent, and a pore forming agent on the entire periphery of the one end side including the detection portion of the element body where the first porous layer 131 is formed. A paste containing the carbon powder is printed so that the thickness from the corner of the element body of the porous protective layer 13 after firing is 250 μm and dried. Thereafter, the element body in this state was heated at 10 ° C./hour in an air atmosphere and heat-treated at a maximum temperature of 900 ° C. for 1 hour to form the second porous layer 132 and thus the porous protective layer 13. In this way, a laminated oxygen sensor element 1 was obtained.

  The present invention is not limited to those described in the above specific embodiments, and various modifications can be made within the scope of the present invention depending on the purpose and application. For example, in this embodiment, an oxygen sensor is described, but the present invention can also be applied to various gas sensors such as a gas sensor other than an oxygen sensor, such as a carbon monoxide sensor and a nitrogen oxide sensor.

  Moreover, in the said Example, although the two layers of the 1st porous layer and the 2nd porous layer were formed, it is good also as a laminated | stacked gas sensor element in which only the 1st porous layer was formed. Further, in forming the second porous layer, in the above embodiment, the second porous layer is formed through the heat treatment while using the paste that becomes the second porous layer, but the element in which the first porous layer is formed. You may form a 2nd porous layer by spraying with respect to the whole circumference | surroundings of the one end part of a main body.

It is a perspective view which shows typically the external appearance of the laminated | stacked oxygen sensor element of an Example. It is a schematic diagram which shows the cross section of the laminated | stacked oxygen sensor element of FIG. 1 in which the porous protective layer which consists of a 1st porous layer and a 2nd porous layer is formed in the one end part containing a detection part. It is a disassembled perspective view of a lamination type oxygen sensor element. It is a top view for demonstrating the position of the through-hole formed in a non-baking sheet laminated body. It is sectional drawing in AA 'of FIG. It is a schematic diagram for demonstrating a filling process. It is sectional drawing which expands and shows some through holes, a mold release material, etc. of the unbaking sheet | seat laminated body in FIG. It is a schematic diagram (sectional drawing) for demonstrating the structure of a mold release material. It is a top view which shows typically a mode that the piece which becomes 32 unfired elements is formed in the unfired sheet laminated body of 1 sheet. It is typical sectional drawing which shows the structure of a gas sensor (oxygen sensor).

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1; Laminated gas sensor element (laminated oxygen sensor element), 11; Detection element, 111; Solid electrolyte body, 1111; Through-hole conductor, 112; Detection electrode, 1121; Detection electrode lead part, 113; Reference electrode lead portions 1141 and 1142; signal extraction terminals 1143; connection terminals 115; protective insulating layers 1151 and 1152; through-hole conductors 116; electrode protective layers 12; base bodies (heater elements) 121; Heating resistor, 1211; Heating resistor lead, 122; First alumina layer, 1221, 1222; Through-hole conductor, 123; Second alumina layer, 1241, 1242; Heater energizing terminal, 13: Porous protective layer, 131; 1st porous layer, 131 '; Unbaked 1st porous layer, 132; 2nd porous layer, 2; Through-hole, 3; Release material, 4; Disk, 41; mask holes, 5; gas sensor (oxygen sensor), 51; outer cylinder, 511; grommets, 52; housing, 521; screw portion, 53; protector, 531; vent 54; leads.

Claims (6)

A plate extending in the longitudinal direction, having a ceramic base in which a heating resistor is embedded, and a detection element formed on the ceramic base and formed with a detection portion having a pair of electrodes disposed on one end side In a manufacturing method of a stacked gas sensor element comprising a cylindrical element body,
A through-hole forming step of providing a through-hole in the green sheet laminate to form the element body along the side surface and one end surface of the element body including the detection portion; A filling step of filling the pores with the first porous layer paste to form an unfired porous layer to be the first porous layer, an unfired element body and the unfired porous layer from the unfired sheet laminate A cutting step of cutting the green element so as not to cause a step between the side surface of the green element body and the side surface of the green porous layer in the green element; and A method of manufacturing a laminated gas sensor element, comprising: a firing step for firing. 2. The coating process according to claim 1 , further comprising a covering step of covering the entire periphery of the one end including the detection portion with the second porous layer in the element main body on which the first porous layer is formed after the firing step. A method for manufacturing a laminated gas sensor element. Two or more unsintered elements can be cut out from the unsintered sheet laminate, and the filling is performed simultaneously in each of the through holes for forming the two or more unsintered elements in the filling step. Item 3. The method for producing a laminated gas sensor element according to Item 1 or 2 . The laminated mold according to any one of claims 1 to 3 , wherein the first porous layer paste contains a pore forming agent for forming pores in the first porous layer after the baking. A method for manufacturing a gas sensor element. In the filling , a release material is arranged on one side of the unfired sheet laminate, and the first porous layer paste is filled from a surface opposite to the one side of the unfired sheet laminate. the method of fabricating the multilayer gas sensor element according to any one of 1 to 4. The method for producing a laminated gas sensor element according to claim 5 , wherein the release material has irregularities on a surface in contact with the green sheet laminate.

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