JP6600143B2 - Gas sensor and manufacturing method thereof - Google Patents

Description

  The present invention relates to a gas sensor and a manufacturing method thereof.

  Conventionally, a gas sensor including a sensor element that detects a concentration of a predetermined gas such as NOx in a gas to be measured such as an exhaust gas of an automobile is known. In such a gas sensor, it is known to form a porous protective layer on the surface of the sensor element. For example, Patent Documents 1 and 2 describe forming a porous protective layer by attaching heat-resistant particles such as alumina to the surface of a sensor element by plasma spraying. By forming this porous protective layer, for example, deterioration of the measurement electrode on the surface of the sensor element, cracking of the sensor element due to moisture adhesion, and the like can be suppressed.

JP2013-54025A Japanese Patent No. 3766572

  By the way, in forming such a porous protective layer on the surface of the sensor element, the adhesion between the porous protective layer and the sensor element surface is poor, and the porous protective layer may peel off after the formation.

  This invention is made | formed in order to solve such a subject, and it aims at suppressing peeling of a porous protection part more.

The gas sensor of the present invention is
A sensor element comprising a base made of an oxygen ion conductive solid electrolyte and provided with a gas inlet for introducing a gas to be measured from the outside;
A porous protective portion covering the surface of the sensor element;
A coating layer disposed on at least a part of the surface of the sensor element excluding the gas inlet and bonding the porous protective part and the sensor element;
It is equipped with.

  In the gas sensor of the present invention, the coating layer bonds the porous protective part and the sensor element. Thereby, peeling of a porous protection part can be suppressed more compared with the case where there is no coating layer. The coating layer does not cover the gas inlet. Therefore, it is also suppressed that the coating layer prevents introduction of the gas to be measured.

  In the gas sensor according to the aspect of the invention, the base body has a rectangular parallelepiped shape, and the coating layer is disposed on at least two surfaces located on opposite sides of the six surfaces of the base body, and the porous protective portion is The first and second porous protective layers bonded to the sensor element through each of the coating layers disposed on the two surfaces, and connected to the first and second porous protective layers, Of these, a third porous protective layer covering one or more surfaces other than the two surfaces may be included. If it carries out like this, about the 1st and 2nd porous protection layer among the porous protection parts, since it has adhered to the sensor element through the coating layer, peeling is controlled more. The third porous protective layer is connected to the first and second porous protective layers that are difficult to peel off. Therefore, peeling is further suppressed for the third porous protective layer. Thus, by forming the coating layer on at least two surfaces located on the opposite sides, it is possible to suppress the peeling of the porous protective layers formed on the three or more surfaces of the substrate.

  In the gas sensor of the present invention, the base has a rectangular parallelepiped shape in which one side is longer than the other two sides, and the coating layer is at least on four surfaces other than the two surfaces having the smallest area among the six surfaces of the base. The porous protective part has four porous protective layers adhered to the sensor element via each of the coating layers disposed on the four surfaces, and the four In the porous protective layer, the porous protective layers formed on the adjacent surfaces may be connected to each other. If it carries out like this, the adhesiveness of four porous protective layers and a sensor element will increase, and peeling of a porous protective part will be suppressed more.

  In the gas sensor according to the aspect of the invention, the base is formed by stacking a plurality of solid electrolyte layers having oxygen ion conductivity, and the coating layer is formed in a direction other than the top and bottom surfaces of the base with the stacking direction of the solid electrolyte layers being the vertical direction. It does not have to be covered. Here, when the gas sensor is manufactured, there are cases where a paste-like coating layer before baking is formed on the surface of the substrate before baking, and the substrate and the coating layer are simultaneously fired. In such a case, if a coating layer before firing is formed on the substrate other than the upper and lower surfaces of the substrate before firing, the paste (coating layer before firing) may enter the gap between the solid electrolyte layers to cause separation between the solid electrolyte layers. is there. By preventing the coating layer from being formed on portions other than the upper and lower surfaces of the substrate, such peeling between the solid electrolyte layers can be further suppressed.

  In the gas sensor of the present invention, the base body has a rectangular parallelepiped shape, and the coating layer may not be disposed on a surface of the six surfaces of the base body on which the gas introduction port is formed. In this way, the coating layer does not block the gas inlet when the gas sensor is manufactured, and the coating layer does not hinder the introduction of the gas to be measured.

  In the gas sensor of the present invention, the base body has a rectangular parallelepiped shape, and an area S1 where the porous protection portion covers the sensor element on at least one surface on which the coating layer is disposed among the six surfaces of the base body. The area ratio R (= S2 / S1 × 100), which is the ratio of the area S2 where the porous protective part covers the coating layer, may be 14% to 100%. If the area ratio R is 14% or more, the adhesion between the porous protective part and the sensor element via the coating layer is likely to be sufficiently high, and peeling of the porous protective part can be further suppressed. The larger the area ratio R, the higher the adhesion between the porous protective part and the sensor element.

  In the gas sensor of the present invention, the coating layer may have a thickness of 1 μm to 30 μm. If the thickness is 1 μm or more, the adhesion between the porous protective part and the sensor element via the coating layer tends to be sufficiently high, and therefore the peeling of the porous protective part can be further suppressed. Moreover, since the adhesiveness is not so high even if the thickness exceeds 30 μm, the amount of coating layer material used can be reduced by setting the thickness to 30 μm or less.

  In the gas sensor of the present invention, the coating layer may have an arithmetic average roughness Ra of a contact surface with the porous protective portion of 1.0 μm to 5.0 μm. In this range, since the adhesion between the porous protective part and the sensor element via the coating layer is likely to be sufficiently high, peeling of the porous protective part can be further suppressed.

  In the gas sensor of the present invention, the coating layer may have a porosity of 10 to 71%. By setting the porosity of the coating layer to 10% or more, the porous protective layer partially enters the pores of the coating layer when the porous protective layer is formed, and adheres closely to the surface of the sensor element (= the surface of the coating layer). It becomes easy. By setting the porosity of the coating layer to 71% or less, the strength of the coating layer becomes sufficient, and peeling of the coating layer can be suppressed.

  In the gas sensor of the present invention, the base is formed with a gas flow part that communicates with the gas inlet and introduces a gas to be measured from the outside, and the sensor element is disposed on the surface of the base. The outer pump electrode, and a measurement electrode that is exposed and disposed in a part of the gas flow part, and the coating layer is not disposed on the outer pump electrode surface, The porous protection part may cover the outer pump electrode surface. In this gas sensor, an electrochemical pump cell can be constituted by a measurement electrode, an outer pump electrode, and a solid electrolyte sandwiched between these electrodes. And since the coating layer is not arrange | positioned on the outer surface pump electrode surface, it can suppress more that a coating layer inhibits the function of the outer side pump electrode as this electrochemical pump cell. Moreover, since the porous protection part covers the outer pump electrode surface, the outer pump electrode can be protected.

The gas sensor manufacturing method of the present invention is a method of manufacturing the above-described gas sensor,
(1) A pre-firing sensor element that becomes the sensor element after firing, and firing disposed on at least a part of the surface of the pre-firing sensor element excluding a portion that becomes the gas inlet after firing in the pre-firing sensor element. A step of preparing an unfired body provided with a pre-fired coating layer to be the coating layer later;
(2) A step of firing the green body to form a fired body including the sensor element and the coating layer;
(3) forming the porous protective portion so as to cover the surface of the sensor element including at least a part of the surface of the coating layer;
Is included.

  In this gas sensor manufacturing method of the present invention, a fired body including a sensor element and a coating layer is produced, and then a porous protective portion is provided so as to cover the surface of the sensor element including at least a part of the surface of the coating layer. Form. By carrying out like this, a porous protection part and a sensor element can be adhere | attached with a coating layer, and peeling of a porous protection part can be suppressed more compared with the case where there is no coating layer. Moreover, since the coating layer before baking is arrange | positioned on the surface of the sensor element before baking except the part used as a gas inlet, the coating layer after baking does not cover a gas inlet. Therefore, it can also be suppressed that the coating layer prevents introduction of the gas to be measured. In addition, since the pre-firing sensor element and the pre-firing coating layer are fired at the same time, the adhesive force between them can be increased, and the formation of the unfired body and the porous protective part is performed in separate steps, so that the porous body is porous. The degree of freedom of the method for forming the protective part is increased.

1 is a schematic perspective view of a gas sensor 100. FIG. AA sectional drawing of FIG. Explanatory drawing of plasma spraying using the plasma gun 120. FIG. FIG. 3 is an explanatory diagram showing a state in which a porous protective part 90 is formed on the sensor element 101. The cross-sectional schematic diagram which shows the coating layer 24 of a modification. The cross-sectional schematic diagram which shows the coating layer 24 of a modification. The cross-sectional schematic diagram which shows the coating layer 24 of a modification. The cross-sectional schematic diagram which shows the coating layer 24 of a modification. Explanatory drawing of area S1 and area S2. Sectional drawing of the gas sensor 100 of a modification. The graph which shows the result of the evaluation test of Experimental example 1,2.

  Next, a schematic configuration of the gas sensor 100 including the sensor element 101 which is an example of the embodiment of the present invention will be described. FIG. 1 is a perspective view schematically showing an example of the configuration of the gas sensor 100. FIG. 2 is a cross-sectional view taken along the line AA of FIG. The gas sensor 100 detects the concentration of a predetermined gas such as NOx in a gas to be measured such as an exhaust gas of an automobile by the sensor element 101. The sensor element 101 has a long rectangular parallelepiped shape. The longitudinal direction of the sensor element 101 (left-right direction in FIG. 1) is the front-rear direction, and the thickness direction of the sensor element 101 (up-down direction in FIG. 1) is vertical. The direction. The width direction of sensor element 101 (the direction perpendicular to the front-rear direction and the up-down direction) is the left-right direction. FIG. 1 shows the sensor element 101 as viewed from the upper right front. FIG. 2 is a cross-sectional view of the sensor element 101 taken along the center in the left-right direction.

As shown in FIG. 2, the sensor element 101 includes a first substrate layer 1, a second substrate layer 2, and a third substrate layer 3 each made of an oxygen ion conductive solid electrolyte layer such as zirconia (ZrO ₂ ). The first solid electrolyte layer 4, the spacer layer 5, and the second solid electrolyte layer 6 are elements having a structure in which the layers are laminated in this order from the bottom in the drawing. The solid electrolyte forming these six layers is dense and airtight. The sensor element 101 is manufactured, for example, by performing predetermined processing and circuit pattern printing on a ceramic green sheet corresponding to each layer, stacking them, and firing and integrating them.

  One end portion (front end portion) of the sensor element 101, and between the lower surface of the second solid electrolyte layer 6 and the upper surface of the first solid electrolyte layer 4, the gas inlet 10 and the first diffusion In a mode in which the rate-limiting portion 11, the buffer space 12, the second diffusion-controlling portion 13, the first internal space 20, the third diffusion-controlling portion 30, and the second internal space 40 are communicated in this order. Adjacently formed.

  The gas introduction port 10, the buffer space 12, the first internal space 20, and the second internal space 40 are provided on the lower surface of the second solid electrolyte layer 6 with the upper portion provided in a state in which the spacer layer 5 is cut out. The space inside the sensor element 101 is defined by the lower part being the upper surface of the first solid electrolyte layer 4 and the side parts being the side surfaces of the spacer layer 5.

  Each of the first diffusion rate controlling unit 11, the second diffusion rate controlling unit 13, and the third diffusion rate controlling unit 30 is provided as two horizontally long slits (the opening has a longitudinal direction in a direction perpendicular to the drawing). . In addition, the site | part from the gas inlet 10 to the 2nd internal space 40 is also called a gas distribution part.

  Further, at a position farther from the front end side than the gas circulation part, the side part is partitioned by the side surface of the first solid electrolyte layer 4 between the upper surface of the third substrate layer 3 and the lower surface of the spacer layer 5. The reference gas introduction space 43 is provided at the position. For example, the atmosphere is introduced into the reference gas introduction space 43 as a reference gas when measuring the NOx concentration.

  The air introduction layer 48 is a layer made of porous ceramics, and a reference gas is introduced into the air introduction layer 48 through the reference gas introduction space 43. The air introduction layer 48 is formed so as to cover the reference electrode 42.

  The reference electrode 42 is an electrode formed in such a manner that it is sandwiched between the upper surface of the third substrate layer 3 and the first solid electrolyte layer 4. As described above, the reference electrode 42 leads to the reference gas introduction space 43. An air introduction layer 48 is provided. Further, as will be described later, it is possible to measure the oxygen concentration (oxygen partial pressure) in the first internal space 20 and the second internal space 40 using the reference electrode 42.

  In the gas circulation part, the gas inlet 10 is a part opened to the external space, and the gas to be measured is taken into the sensor element 101 from the external space through the gas inlet 10. The first diffusion control unit 11 is a part that provides a predetermined diffusion resistance to the gas to be measured taken from the gas inlet 10. The buffer space 12 is a space provided to guide the gas to be measured introduced from the first diffusion rate controlling unit 11 to the second diffusion rate controlling unit 13. The second diffusion rate limiting unit 13 is a part that imparts a predetermined diffusion resistance to the gas to be measured introduced from the buffer space 12 into the first internal space 20. When the gas to be measured is introduced from the outside of the sensor element 101 to the inside of the first internal space 20, the pressure fluctuation of the gas to be measured in the external space (exhaust pressure pulsation if the gas to be measured is an automobile exhaust gas) ), The gas to be measured that is suddenly taken into the sensor element 101 from the gas inlet 10 is not directly introduced into the first internal space 20, but the first diffusion control unit 11, the buffer space 12, the second After the concentration variation of the gas to be measured is canceled through the diffusion control unit 13, the gas is introduced into the first internal space 20. As a result, the concentration fluctuation of the gas to be measured introduced into the first internal space 20 becomes almost negligible. The first internal space 20 is provided as a space for adjusting the partial pressure of oxygen in the gas to be measured introduced through the second diffusion rate limiting unit 13. The oxygen partial pressure is adjusted by the operation of the main pump cell 21.

  The main pump cell 21 includes an inner pump electrode 22 having a ceiling electrode portion 22a provided on substantially the entire lower surface of the second solid electrolyte layer 6 facing the first internal space 20, and an upper surface of the second solid electrolyte layer 6. An electrochemical pump cell comprising an outer pump electrode 23 provided in a manner exposed to the external space in a region corresponding to the ceiling electrode portion 22a, and a second solid electrolyte layer 6 sandwiched between these electrodes. is there.

  The inner pump electrode 22 is formed across the upper and lower solid electrolyte layers (the second solid electrolyte layer 6 and the first solid electrolyte layer 4) that define the first inner space 20, and the spacer layer 5 that provides side walls. Yes. Specifically, a ceiling electrode portion 22a is formed on the lower surface of the second solid electrolyte layer 6 that provides the ceiling surface of the first internal space 20, and a bottom portion is formed on the upper surface of the first solid electrolyte layer 4 that provides the bottom surface. Spacer layers in which the electrode portions 22b are formed and the side electrode portions (not shown) constitute both side walls of the first internal space 20 so as to connect the ceiling electrode portions 22a and the bottom electrode portions 22b. 5 is formed on the side wall surface (inner surface), and is disposed in a tunnel-shaped structure at the portion where the side electrode portion is disposed.

The inner pump electrode 22 and the outer pump electrode 23 are formed as a porous cermet electrode (for example, a cermet electrode of Pt and ZrO ₂ containing 1% of Au). The inner pump electrode 22 in contact with the gas to be measured is formed using a material that has a reduced reduction ability for the NOx component in the gas to be measured.

  In the main pump cell 21, a desired pump voltage Vp 0 is applied between the inner pump electrode 22 and the outer pump electrode 23, and the pump current is positive or negative between the inner pump electrode 22 and the outer pump electrode 23. By flowing Ip0, oxygen in the first internal space 20 can be pumped into the external space, or oxygen in the external space can be pumped into the first internal space 20.

  Further, in order to detect the oxygen concentration (oxygen partial pressure) in the atmosphere in the first internal space 20, the inner pump electrode 22, the second solid electrolyte layer 6, the spacer layer 5, and the first solid electrolyte layer 4. The third substrate layer 3 and the reference electrode 42 constitute an electrochemical sensor cell, that is, a main pump control oxygen partial pressure detection sensor cell 80.

  By measuring the electromotive force V0 in the main pump control oxygen partial pressure detection sensor cell 80, the oxygen concentration (oxygen partial pressure) in the first internal space 20 can be known. Further, the pump current Ip0 is controlled by feedback-controlling the pump voltage Vp0 of the variable power source 25 so that the electromotive force V0 is constant. Thereby, the oxygen concentration in the first internal space 20 can be kept at a predetermined constant value.

  The third diffusion control unit 30 provides a predetermined diffusion resistance to the gas under measurement whose oxygen concentration (oxygen partial pressure) is controlled by the operation of the main pump cell 21 in the first internal space 20, and the gas under measurement is supplied to the gas under measurement. This is the part that leads to the second internal space 40.

  The second internal space 40 is provided as a space for performing a process related to the measurement of the nitrogen oxide (NOx) concentration in the gas to be measured introduced through the third diffusion control unit 30. The NOx concentration is measured mainly in the second internal space 40 in which the oxygen concentration is adjusted by the auxiliary pump cell 50, and further by measuring the pump cell 41 for measurement.

  In the second internal space 40, after the oxygen concentration (oxygen partial pressure) is adjusted in the first internal space 20 in advance, the auxiliary pump cell 50 further supplies the gas to be measured introduced through the third diffusion control unit. The oxygen partial pressure is adjusted. Thereby, since the oxygen concentration in the second internal space 40 can be kept constant with high accuracy, the gas sensor 100 can measure the NOx concentration with high accuracy.

  The auxiliary pump cell 50 includes an auxiliary pump electrode 51 having a ceiling electrode portion 51a provided on substantially the entire lower surface of the second solid electrolyte layer 6 facing the second internal space 40, and an outer pump electrode 23 (outer pump electrode 23). The auxiliary electrochemical pump cell is configured by the second solid electrolyte layer 6 and the sensor element 101 and an appropriate electrode on the outside.

  The auxiliary pump electrode 51 is disposed in the second internal space 40 in the same tunnel configuration as the inner pump electrode 22 provided in the first internal space 20. That is, the ceiling electrode portion 51 a is formed on the second solid electrolyte layer 6 that provides the ceiling surface of the second internal space 40, and the first solid electrolyte layer 4 that provides the bottom surface of the second internal space 40 is formed on the first solid electrolyte layer 4. The bottom electrode part 51b is formed, and the side electrode part (not shown) connecting the ceiling electrode part 51a and the bottom electrode part 51b is provided on the spacer layer 5 that provides the side wall of the second internal space 40. It has a tunnel-type structure formed on both wall surfaces. Note that the auxiliary pump electrode 51 is also formed using a material having a reduced reducing ability with respect to the NOx component in the gas to be measured, like the inner pump electrode 22.

  In the auxiliary pump cell 50, by applying a desired voltage Vp1 between the auxiliary pump electrode 51 and the outer pump electrode 23, oxygen in the atmosphere in the second internal space 40 is pumped to the external space, or It is possible to pump into the second internal space 40 from the space.

  Further, in order to control the oxygen partial pressure in the atmosphere in the second internal space 40, the auxiliary pump electrode 51, the reference electrode 42, the second solid electrolyte layer 6, the spacer layer 5, and the first solid electrolyte. The layer 4 and the third substrate layer 3 constitute an electrochemical sensor cell, that is, an auxiliary pump control oxygen partial pressure detection sensor cell 81.

  The auxiliary pump cell 50 performs pumping by the variable power source 52 that is voltage-controlled based on the electromotive force V1 detected by the auxiliary pump control oxygen partial pressure detection sensor cell 81. Thereby, the oxygen partial pressure in the atmosphere in the second internal space 40 is controlled to a low partial pressure that does not substantially affect the measurement of NOx.

  At the same time, the pump current Ip1 is used to control the electromotive force of the oxygen partial pressure detection sensor cell 80 for main pump control. Specifically, the pump current Ip1 is input as a control signal to the main pump control oxygen partial pressure detection sensor cell 80, and the electromotive force V0 is controlled, so that the third diffusion rate limiting unit 30 controls the second internal space. The gradient of the oxygen partial pressure in the gas to be measured introduced into the gas 40 is controlled so as to be always constant. When used as a NOx sensor, the oxygen concentration in the second internal space 40 is maintained at a constant value of about 0.001 ppm by the action of the main pump cell 21 and the auxiliary pump cell 50.

  The measurement pump cell 41 measures the NOx concentration in the gas to be measured in the second internal space 40. The measurement pump cell 41 includes a measurement electrode 44 provided on a top surface of the first solid electrolyte layer 4 facing the second internal space 40 and spaced from the third diffusion rate-determining portion 30, an outer pump electrode 23, The electrochemical pump cell is constituted by the second solid electrolyte layer 6, the spacer layer 5, and the first solid electrolyte layer 4.

  The measurement electrode 44 is a porous cermet electrode. The measurement electrode 44 also functions as a NOx reduction catalyst that reduces NOx present in the atmosphere in the second internal space 40. Further, the measurement electrode 44 is covered with a fourth diffusion rate controlling part 45.

  The 4th diffusion control part 45 is a film | membrane comprised with a ceramic porous body. The fourth diffusion control unit 45 plays a role of limiting the amount of NOx flowing into the measurement electrode 44 and also functions as a protective film for the measurement electrode 44. In the measurement pump cell 41, oxygen generated by the decomposition of nitrogen oxides in the atmosphere around the measurement electrode 44 can be pumped out, and the generated amount can be detected as the pump current Ip2.

  In order to detect the oxygen partial pressure around the measurement electrode 44, an electrochemical sensor cell, that is, a first solid electrolyte layer 4, a third substrate layer 3, a measurement electrode 44, and a reference electrode 42, that is, A measurement pump control oxygen partial pressure detection sensor cell 82 is configured. The variable power supply 46 is controlled on the basis of the electromotive force V2 detected by the measurement pump control oxygen partial pressure detection sensor cell 82.

The gas to be measured introduced into the second internal space 40 reaches the measurement electrode 44 through the fourth diffusion rate-determining unit 45 under the condition where the oxygen partial pressure is controlled. Nitrogen oxide in the gas to be measured around the measurement electrode 44 is reduced (2NO → N ₂ + O ₂ ) to generate oxygen. The generated oxygen is pumped by the measurement pump cell 41. At this time, the variable power source is set so that the control voltage V2 detected by the measurement pump control oxygen partial pressure detection sensor cell 82 becomes constant. 46 voltage Vp2 is controlled. Since the amount of oxygen generated around the measurement electrode 44 is proportional to the concentration of nitrogen oxide in the gas to be measured, the nitrogen oxide in the gas to be measured using the pump current Ip2 in the measurement pump cell 41. The concentration will be calculated.

  In addition, if the measurement electrode 44, the first solid electrolyte layer 4, the third substrate layer 3, and the reference electrode 42 are combined to form an oxygen partial pressure detecting means as an electrochemical sensor cell, The electromotive force according to the difference between the amount of oxygen generated by the reduction of the NOx component in the surrounding atmosphere and the amount of oxygen contained in the reference atmosphere can be detected, thereby the concentration of the NOx component in the gas to be measured Is also possible.

  The second solid electrolyte layer 6, the spacer layer 5, the first solid electrolyte layer 4, the third substrate layer 3, the outer pump electrode 23, and the reference electrode 42 constitute an electrochemical sensor cell 83. The oxygen partial pressure in the gas to be measured outside the sensor can be detected by the electromotive force Vref obtained by the sensor cell 83.

  In the gas sensor 100 having such a configuration, by operating the main pump cell 21 and the auxiliary pump cell 50, the oxygen partial pressure is always kept at a constant low value (a value that does not substantially affect the measurement of NOx). A gas to be measured is supplied to the measurement pump cell 41. Therefore, the NOx concentration in the measurement gas is determined based on the pump current Ip2 that flows when oxygen generated by the reduction of NOx is pumped out of the measurement pump cell 41 in proportion to the NOx concentration in the measurement gas. You can know.

  Furthermore, the sensor element 101 includes a heater unit 70 that plays a role of temperature adjustment for heating and maintaining the sensor element 101 in order to increase the oxygen ion conductivity of the solid electrolyte. The heater unit 70 includes a heater connector electrode 71, a heater 72, a through hole 73, a heater insulating layer 74, and a pressure dissipation hole 75.

  The heater connector electrode 71 is an electrode formed so as to be in contact with the lower surface of the first substrate layer 1. By connecting the heater connector electrode 71 to an external power source, power can be supplied to the heater unit 70 from the outside.

  The heater 72 is an electric resistor formed in a form sandwiched between the second substrate layer 2 and the third substrate layer 3 from above and below. The heater 72 is connected to the heater connector electrode 71 through the through-hole 73, and generates heat when power is supplied from the outside through the heater connector electrode 71, thereby heating and keeping the solid electrolyte forming the sensor element 101. .

  The heater 72 is embedded over the entire area from the first internal space 20 to the second internal space 40, and the entire sensor element 101 can be adjusted to a temperature at which the solid electrolyte is activated. ing.

  The heater insulating layer 74 is an insulating layer formed on the upper and lower surfaces of the heater 72 by an insulator such as alumina. The heater insulating layer 74 is formed for the purpose of obtaining electrical insulation between the second substrate layer 2 and the heater 72 and electrical insulation between the third substrate layer 3 and the heater 72.

  The pressure dissipating hole 75 is a portion that is provided so as to penetrate the third substrate layer 3 and communicate with the reference gas introduction space 43, and is for the purpose of alleviating the increase in internal pressure accompanying the temperature increase in the heater insulating layer 74. Formed.

  The sensor element 101 includes a coating layer 24 as shown in FIGS. The coating layer 24 includes a coating layer 24a that covers the upper surface of the sensor element 101 (the upper surface of the second solid electrolyte layer 6), a coating layer 24b that covers the lower surface of the sensor element 101 (the lower surface of the first substrate layer 1), It has. Note that the coating layer 24 a also covers the surface of the outer pump electrode 23. The coating layer 24 b does not cover the heater connector electrode 71 on the lower surface of the sensor element 101. Therefore, the coating layer 24b does not prevent the supply of electric power to the heater connector electrode 71 from the outside. The coating layer 24 is made of porous ceramics such as alumina, zirconia, spinel, cordierite, and magnesia. In the present embodiment, the coating layer 24 is a porous ceramic made of alumina. Although it does not specifically limit, the film thickness of the coating layer 24 is 5-50 micrometers, for example. The porosity of the coating layer 24 is preferably 10% to 71%. The porosity of the coating layer 24 may be 70% or less, or 60% or less. Moreover, it is preferable that arithmetic mean roughness Ra of the surface (the upper surface of the coating layer 24a, and the lower surface of the coating layer 24b) of the coating layer 24 shall be 2.0-5.0 micrometers. Although not particularly limited, the arithmetic average roughness Ra of the surface of the main body of the sensor element 101 on which the coating layer 24 is formed (the upper surface of the second solid electrolyte layer 6 and the lower surface of the first substrate layer 1) is: For example, it is 0.3 to 1.0 μm.

  Further, as shown in FIGS. 1 and 2, the sensor element 101 is partially covered with a porous protective part 90. The porous protection part 90 includes porous protection layers 91a to 91e formed on five surfaces of the six surfaces of the sensor element 101, respectively. The porous protective layer 91a covers a part of the upper surface of the sensor element 101 (the upper surface of the coating layer 24a). The porous protective layer 91b covers a part of the lower surface of the sensor element 101 (the lower surface of the coating layer 24b). The porous protective layer 91 c covers a part of the left surface of the sensor element 101. The porous protective layer 91d covers a part of the right surface of the sensor element 101. The porous protective layer 91e covers the entire front end surface of the sensor element 101. In addition, each of the porous protective layers 91a to 91d is the entire surface from the front end face of the sensor element 101 to the distance L (see FIG. 2) in the surface of the sensor element 101 on which the porous protective layers 91a to 91d are formed. Covering. The porous protective layer 91a also covers the portion where the outer pump electrode 23 is formed. The porous protective layer 91e also covers the gas inlet 10, but since the porous protective layer 91e is a porous body, the gas to be measured flows through the porous protective layer 91e and reaches the gas inlet. Is possible. The porous protection part 90 covers a part of the sensor element 101 (a part from the front end surface of the sensor element 101 to the distance L) and protects the part. The porous protection unit 90 plays a role of suppressing the occurrence of cracks in the sensor element 101 due to, for example, moisture in the gas to be measured attached thereto. Further, the porous protective layer 91a plays a role of suppressing deterioration of the outer pump electrode 23 by suppressing oil components and the like contained in the measurement gas from adhering to the outer pump electrode 23. The distance L is a range of (0 <distance L <length in the longitudinal direction of the sensor element) based on the range in which the sensor element 101 is exposed to the gas to be measured in the gas sensor 100, the position of the outer pump electrode 23, and the like. Stipulated in Hereinafter, the porous protective layers 91a to 91e may be referred to as the porous protective layer 91 unless particularly distinguished.

  In the present embodiment, as shown in FIG. 1, the sensor element 101 has a length in the front-rear direction, a width in the left-right direction, and a thickness in the vertical direction, and length> width> thickness. Yes. Further, the distance L is assumed to be larger than the width and thickness of the sensor element 101. Therefore, among the porous protection layers 91a to 91e, the formation area of the porous protection layers 91a and 91b (= distance L × width of the sensor element 101) is the largest, and then the formation area of the porous protection layers 91c and 91d ( = Distance L × thickness of sensor element 101) is wide, and the formation area of porous protective layer 91e (= width of sensor element 101 × thickness) is the narrowest.

  The porous protective layer 91 is made of a porous material such as an alumina porous material, a zirconia porous material, a spinel porous material, a cordierite porous material, a titania porous material, or a magnesia porous material. In the present embodiment, the porous protective layer 91 is made of an alumina porous body. Although not particularly limited, the thickness of the porous protective layer 91 is, for example, 100 to 700 μm, and the porosity of the porous protective layer 91 is, for example, 10% to 40%. In addition, since adhesive force becomes high, it is preferable that coating layer 24a, 24b and the porous protective layers 91a and 91b formed in the surface are the same materials.

  Next, a method for manufacturing the gas sensor 100 will be described. In the manufacturing method of the gas sensor 100, first, the sensor element 101 is manufactured, and then the porous protection part 90 is formed on the sensor element 101.

  First, a method for manufacturing the sensor element 101 before forming the porous protection part 90 will be described. First, six green ceramic green sheets are prepared. And each corresponding to each of the 1st substrate layer 1, the 2nd substrate layer 2, the 3rd substrate layer 3, the 1st solid electrolyte layer 4, the spacer layer 5, and the 2nd solid electrolyte layer 6, A pattern such as an electrode, an insulating layer, and a resistance heating element is printed on the ceramic green sheet. Further, a paste that becomes the coating layer 24a after firing is screen-printed on the surface of the ceramic green sheet that becomes the second solid electrolyte layer 6 (the surface that becomes the upper surface of the sensor element 101). Similarly, a paste that becomes the coating layer 24b after firing is screen-printed on the surface of the ceramic green sheet that becomes the first substrate layer 1 (the surface that becomes the lower surface of the sensor element 101). The paste used as the coating layers 24a and 24b is a mixture of the raw material powder (alumina powder in this embodiment) made of the material of the coating layer 24 described above, an organic binder, an organic solvent, and the like. The paste is preferably adjusted in advance so that the arithmetic average roughness Ra of the surface of the coating layer 24 after firing is 2.0 to 5.0 μm. Although not particularly limited thereto, for example, the particle size of the raw material powder is D50 = 2 to 20 μm, the volume ratio is 5 to 20 vol%, the binder solution is 20 to 40 vol%, and the cosolvent is 30 to 50 vol%. The paste is prepared by mixing 1 to 5 vol% of the dispersant and mixing the mixture for 2 to 6 hours at a rotation speed of 50 to 250 rpm, so that the arithmetic average roughness Ra of the surface of the coating layer 24 after firing is 2. It can be set to 0-5.0 micrometers. The paste is preferably adjusted in advance so that the porosity of the coating layer 24 after firing is 10% to 71%. For example, the porosity of the coating layer 24 after firing is 10 by adjusting the blending ratio of the pore former to be included in the paste, adjusting the particle size of the raw material powder, or adjusting the blending ratio of the binder solution. It can adjust so that it may become% -71%. After forming various patterns in this way, the green sheet is dried. Then, they are laminated to form a laminate. The laminated body thus obtained includes a plurality of sensor elements 101. The laminate is cut into pieces of the sensor element 101 and fired at a predetermined firing temperature to obtain the sensor element 101. A method of manufacturing the sensor element 101 by laminating a plurality of green sheets is known, and is described in, for example, Japanese Patent Application Laid-Open Nos. 2008-164411 and 2009-175099.

  Next, a method for forming the porous protection part 90 on the sensor element 101 will be described. In the present embodiment, the porous protective layers 91a to 91e of the porous protective portion 90 are formed one by one by plasma spraying. FIG. 3 is an explanatory diagram of plasma spraying using the plasma gun 120. FIG. 3 shows a state where the porous protective layer 91a is formed as an example, and the plasma gun 120 is shown in cross section. The plasma gun 120 includes an anode 126 and a cathode 128 that serve as electrodes for generating plasma, and a substantially cylindrical outer peripheral portion 122 that covers them. The outer peripheral portion 122 includes an insulating portion (insulator) 123 for insulating from the anode 126. At the lower end of the outer peripheral portion 122, a powder supply portion 132 for supplying a powder sprayed material 134 that is a material for forming the porous protective layer 91 is formed. A water cooling jacket 124 is provided between the outer peripheral portion 122 and the anode 126, thereby enabling the anode 126 to be cooled. The anode 126 is formed in a cylindrical shape, and has a nozzle 126a that opens downward. A plasma generating gas 130 is supplied between the anode 126 and the cathode 128 from above. Such a plasma gun 120 is known and is described in, for example, Patent Document 1 described above.

  When the porous protective layer 91a is formed, a voltage is applied between the anode 126 and the cathode 128 of the plasma gun 120, and arc discharge is performed in the presence of the supplied plasma generating gas 130 to generate plasma. The working gas 130 is brought into a high temperature plasma state. The gas in the plasma state is ejected from the nozzle 126a downward in FIG. 3 as a high-temperature and high-speed plasma jet. On the other hand, the powder spraying material 134 is supplied from the powder supply unit 132 together with the carrier gas. Accordingly, the powder sprayed material 134 is heated and melted and accelerated by the plasma, collides with the surface (upper surface) of the sensor element 101, and rapidly solidifies to form the porous protective layer 91a. The direction of thermal spraying of the plasma gun 120 (the direction of the nozzle 126a) is not particularly limited as long as the porous protective layer 91a can be formed. The porous protective layers 91b to 91e are also formed one by one in the same manner except that the surface to be formed on the sensor element 101 is different. The porous protective layers 91a and 91b are respectively formed on the surfaces of the coating layers 24a and 24b as described above. The porous protective layers 91c to 91e are directly formed on the surface of the main body (each layer 1 to 6) of the sensor element 101. Note that the plasma spraying is performed, for example, in an atmosphere of air and room temperature.

  Here, as the plasma generating gas 130, for example, an inert gas such as an argon gas can be used. Further, since plasma is easily generated, it is preferable to use a mixture of argon and hydrogen as the plasma generating gas 130. Although not particularly limited, the flow rate of argon gas is, for example, 40 to 50 L / min, and the flow rate of hydrogen is, for example, 9 to 11 L / min. The voltage applied between the anode 126 and the cathode 128 is a DC voltage of 50 to 70 V, for example, and the current is 500 to 550 A, for example.

  The powder sprayed material 134 is a powder that becomes the material of the porous protective layer 91 described above, and is alumina powder in this embodiment. Although it does not specifically limit, the particle size of the powder spraying material 134 is 10 micrometers-30 micrometers, for example. As the carrier gas used for supplying the powder spray material 134, for example, the same argon gas as the plasma generating gas 130 can be used. Although not particularly limited, the flow rate of the carrier gas is, for example, 3 to 4 L / min.

  When performing plasma spraying, the distance W between the nozzle 126a, which is the plasma gas outlet in the plasma gun 120, and the surface on which the porous protective layer 91 is formed in the sensor element 101 (the upper surface of the coating layer 24a in FIG. 3) is 50 mm. It is preferable to set it to -300 mm. The distance W may be 120 mm to 250 mm. Further, plasma spraying may be performed while appropriately moving the plasma gun 120 (moving left and right in FIG. 3) according to the area where the porous protective layer 91 is formed. In this case, the distance W is within the above-described range. Is preferably maintained. The time for plasma spraying may be appropriately determined according to the film thickness and area of the porous protective layer 91 to be formed. In the case where the porous protective layer 91 is formed on a part of the surface of the sensor element 101 (region from the front end to the distance L) like the porous protective layer 91a to the porous protective layer 91d. A region where the porous protective layer 91 is not formed may be covered with a mask.

  Next, the formation order of the porous protective layers 91a to 91e will be described. FIG. 4 is an explanatory view showing a state in which the porous protection part 90 is formed on the sensor element 101. First, with respect to the sensor element 101 (FIG. 4A) prepared as described above, the porous protective layer 91a, which is the two porous protective layers 91 having the largest formation area among the porous protective portions 90, 91b is formed in advance (FIG. 4B). Note that either the porous protective layer 91a or the porous protective layer 91b may be formed first. Thereby, the area | region from the front end to the distance L is covered with the porous protective layers 91a and 91b among the upper surface and lower surface of the sensor element 101. FIG.

  Subsequently, porous protective layers 91c to 91e, which are unformed porous protective layers 91 in the porous protective portion 90, are formed by plasma spraying. In the present embodiment, the porous protective layers 91c and 91d are first formed on the left and right surfaces of the sensor element 101, respectively (FIG. 4C). Any of the porous protective layer 91c and the porous protective layer 91d may be formed first. Thereby, the area | region from the front end to the distance L is covered with the porous protective layers 91c and 91d among the left surface and the right surface of the sensor element 101. FIG. Since the porous protective layers 91a and 91b are already formed, for example, when the porous protective layer 91d is formed, the upper end (side portion along the front-rear direction) of the right surface of the sensor element 101 is porous. The protective layer 91a (the right end portion thereof) is present, and the porous protective layer 91b (the right end portion thereof) is present at the lower end (side portion along the front-rear direction) of the right surface. The porous protective layer 91d covers the right surface of the sensor element 101 and is formed so as to be connected to the porous protective layers 91a and 91b (between the porous protective layers 91a and 91b). Similarly, the porous protective layer 91c is formed so as to be connected to the porous protective layer 91a (the left end portion thereof) and the porous protective layer 91b (the left end portion thereof).

  Next, an unformed porous protective layer 91e in the porous protective portion 90 is formed by plasma spraying (FIG. 3D). Thereby, the front end surface of the sensor element 101 is covered with the porous protective layer 91e. The porous protective layers 91a to 91d are formed in advance, and the porous protective layer 91e is formed so as to be connected to the porous protective layers 91a to 91d (front end portions thereof). As described above, the porous protective layers 91 a to 91 e are respectively formed on the upper, lower, left, and right surfaces and the front end surface of the sensor element 101 to form the porous protective portion 90, thereby obtaining the gas sensor 100.

  Here, the correspondence between the components of the present embodiment and the components of the present invention will be clarified. The sensor element 101 of the present embodiment corresponds to the sensor element of the present invention, the gas inlet 10 corresponds to the gas inlet, the main body (each layer 1 to 6) of the sensor element 101 corresponds to the base, and the porous protective portion 90 corresponds to the porous protective part, and the coating layer 24 corresponds to the coating layer. The porous protective layers 91a and 91b correspond to the first and second porous protective layers, and the porous protective layers 91c to 91e correspond to the third porous protective layer. In addition, a laminate of green sheets on which various patterns including a paste that becomes the coating layer 24 are formed corresponds to an unfired body.

  In the gas sensor 100 of the present embodiment described in detail above, the coating layer 24 is disposed on at least a part of the surface of the sensor element 101 excluding the gas inlet 10, and the porous protection part 90 and the sensor element 101 are bonded. is doing. Thereby, compared with the case where there is no coating layer 24, peeling of the porous protection part 90 can be suppressed more. In addition, since the coating layer 24 does not cover the gas inlet 10, it is also suppressed that the coating layer 24 prevents introduction of the gas to be measured.

  Moreover, the main body (each layer 1-6) of the sensor element 101 is a rectangular parallelepiped shape, and the coating layers 24a and 24b are two surfaces which are located on the opposite sides of the upper, lower, left, and right front and rear surfaces of the main body of the sensor element 101. (Upper surface and lower surface). The porous protective part 90 includes a porous protective layer 91a, 91b bonded to the sensor element 101 via each of the coating layers 24a, 24b disposed on the two surfaces (upper surface and lower surface), and a porous material. And porous protective layers 91c to 91e that are connected to the protective layers 91a and 91b and cover one or more surfaces other than the upper surface and the lower surface of the main body of the sensor element 101. Thereby, since the porous protective layers 91a and 91b of the porous protective portion 90 are bonded to the sensor element 101 via the coating layers 24a and 24b, respectively, peeling is further suppressed. The porous protective layers 91c to 91e are connected to the porous protective layers 91a and 91b that are difficult to peel off. Therefore, peeling is further suppressed for the porous protective layers 91c to 91e. Thus, by forming the coating layer 24 on at least two surfaces located on the opposite sides, it is possible to suppress the peeling of the porous protective layers 91a to 91e formed on three or more surfaces of the main body of the sensor element 101.

  Furthermore, the main body of the sensor element 101 is formed by laminating a plurality of solid electrolyte layers (each of layers 1 to 6) having oxygen ion conductivity, and the coating layer 24 is formed by moving the solid electrolyte layers (each of layers 1 to 6) vertically The direction is not covered except for the upper and lower surfaces of the main body of the sensor element 101. Here, in the above-described embodiment, when the gas sensor 100 is manufactured, the paste-like coating layer 24 before firing is formed on the surface of the body of the sensor element 101 before firing, and the body of the sensor element 101 before firing and firing. The previous coating layer 24 is fired simultaneously. In such a case, when the coating layer 24 before firing is formed on the sensor element 101 before firing other than the upper and lower surfaces (that is, the front, back, left, and right surfaces), the paste (the coating layer 24 before firing) is placed between the solid electrolyte layers There is a case where the solid electrolyte layers are separated by entering the gap. By preventing the coating layer 24 from being formed on portions other than the upper and lower surfaces of the main body of the sensor element 101, such peeling between the solid electrolyte layers can be further suppressed.

  Furthermore, the main body of the sensor element 101 has a rectangular parallelepiped shape, and the coating layer 24 is not disposed on the surface (front surface) where the gas inlet 10 is formed among the six surfaces of the main body of the sensor element 101. . Therefore, the coating layer 24 does not block the gas inlet 10 when the gas sensor 100 is manufactured, and the coating layer 24 does not prevent introduction of the gas to be measured.

  In addition, the manufacturing method of the gas sensor 100 according to the present embodiment includes a pre-fired sensor element (a laminate of six unfired ceramic green sheets) that becomes the sensor element 101 after firing, and a gas after firing among the sensor elements before firing. A pre-firing coating layer (a paste printed on the surface of the ceramic green sheet) that is disposed on at least a part of the surface of the pre-firing sensor element excluding the portion that becomes the introduction port 10 and becomes the coating layer 24 after firing. A step (1) of preparing an unfired body (laminated body), a step (2) of firing the laminated body to form a fired body including the sensor element 101 and the coating layer 24, and a surface of the coating layer 24. And (3) forming a porous protective part 90 so as to cover the surface of the sensor element 101 including at least a part thereof. Thus, since the pre-firing sensor element and the pre-firing coating layer are fired at the same time, the adhesive force between them can be increased. In addition, since the firing of the sensor element before firing and the coating layer before firing and the formation of the porous protective portion 90 are performed in separate steps, the degree of freedom in the method of forming the porous protective portion 90 is increased. Therefore, for example, it is easy to adjust the film thickness and porosity of the porous protection part 90 to desired values.

  In the manufacturing method of the gas sensor 100 according to the present embodiment described in detail above, the porous protective portion having the porous protective layers 91a to 91e formed on the five surfaces among the six surfaces of the long rectangular parallelepiped sensor element. In forming 90, two porous protective layers 91a and 91b having the largest formation area are formed in advance. Thus, since the two porous protective layers 91a and 91b having the largest formation area are first formed, the porous protective layer 91a is formed as compared with the case of forming the other porous protective layers 91c to 91e having a narrow formation area. , 91b are easily in close contact with the sensor element 101. And unformed porous protective layers 91c-91e are formed among porous protective parts 90 so that it may connect with at least two porous protective layers 91 (91a, 91b) which have been formed. Thereby, the porous protective layers 91c to 91e formed later are connected to at least two porous protective layers 91 that have been formed, so that the porous protective layers 91c to 91e are hardly peeled off from the sensor element 101 even if the formation area is small. As described above, peeling of the porous protective layer 91 can be further suppressed.

  The two porous protective layers 91 a and 91 b formed in advance are positioned on the upper and lower surfaces which are surfaces opposite to each other among the six surfaces of the sensor element 101. Therefore, the porous protective layers 91c to 91e formed to be connected to the two previously formed porous protective layers 91a and 91b are connected to the two porous protective layers 91a and 91b on both sides of the formation surface. Therefore, the effect of suppressing peeling is enhanced.

  Further, of each surface (upper and lower surfaces) forming the two porous protective layers 91a and 91b, a region including the end portion (right end, left end, front end) on the surface side where the porous protective layers 91c to 91e are formed. The porous protective layers 91a and 91b are formed in advance. Therefore, it becomes easy to connect the two previously formed porous protective layers 91a and 91b and the porous protective layers 91c to 91e to be formed later.

  Furthermore, coating layers 24a and 24b are formed on the upper and lower surfaces of the sensor element surface including the region where the porous protective layers 91a and 91b are formed. By setting the arithmetic average roughness Ra of the surfaces of the coating layers 24 a and 24 b to 2.0 to 5.0 μm, the porous protective layers 91 a and 91 b are in close contact with the surface of the sensor element 101 (the surface of the coating layer 24). It becomes easy and peeling of porous protective layers 91a and 91b can be controlled more.

  Also, coating layers 24a and 24b are formed on the upper and lower surfaces of the sensor element surface including the region where the porous protective layers 91a and 91b are formed. By setting the porosity of the coating layer 24 to 10% or more, the porous protective layers 91a and 91b partially enter the pores of the coating layer 24 and adhere to the surface of the sensor element 101 (= the surface of the coating layer 24). It becomes easy to do. Further, by setting the porosity of the coating layer 24 to 71% or less, the strength of the coating layer 24 becomes sufficient, and peeling of the coating layer 24 can be suppressed.

  In addition, a porous protective layer 91 is formed on each of the front end surface which is one end surface in the longitudinal direction of the surface of the sensor element 101 and the upper, lower, left and right surfaces which are four surfaces perpendicular to the front end surface. A porous protective portion 90 is formed to cover a region from one end in the longitudinal direction of 101 to a distance L in the longitudinal direction of the sensor element 101. Thus, by forming the porous protective layer 91 on the five surfaces, the sensor element 101 is protected by the porous protective portion 90 as compared with the case where the porous protective layer 91 is formed only on the four or less surfaces, for example. The effect to do increases.

  It should be noted that the present invention is not limited to the above-described embodiment, and it goes without saying that the present invention can be implemented in various modes as long as it belongs to the technical scope of the present invention.

  For example, in the above-described embodiment, the coating layers 24a and 24b are disposed on the upper surface and the lower surface among the six surfaces on the top, bottom, left, and right of the main body of the sensor element 101. However, the present invention is not limited to this. For example, as shown in FIG. 5, the coating layer 24 may be disposed on the left and right surfaces of the main body of the sensor element 101. FIG. 5 schematically shows a cross section of the sensor element 101 cut perpendicularly to the longitudinal direction (front-rear direction). In FIG. 5, as the coating layer 24, coating layers 24 c and 24 d are disposed on two surfaces (left surface and right surface) opposite to each other of the main body of the sensor element 101. Also in this case, since the porous protective layers 91c and 91d are bonded to the sensor element 101 via the coating layers 24c and 24d, respectively, peeling is further suppressed. Also, the porous protective layers 91a, 91b, 91e (not shown) are connected to the porous protective layers 91c, 91d that are difficult to peel off. Therefore, peeling is further suppressed for the porous protective layers 91a, 91b, 91e (not shown). Moreover, the coating layer 24 may be formed on two surfaces that are not located on the opposite sides, not limited to the two opposite sides. For example, as the coating layer 24, the coating layer 24a shown in FIG. 2 and the coating layer 24c shown in FIG. 5 may be formed. The coating layer 24 may be disposed on at least a part of the surface of the sensor element 101 excluding the gas inlet 10 and may be formed on only one surface of the sensor element 101 or formed on three or more surfaces. May be.

  For example, as shown in FIG. 6, the coating layer 24 may be provided on four surfaces on the top, bottom, left, and right of the main body of the sensor element 101. FIG. 6 schematically shows a cross section similar to FIG. In FIG. 6, as the coating layer 24, coating layers 24 a to 24 d are respectively disposed on the upper, lower, left and right surfaces of the sensor element 101. That is, the coating layer 24 is disposed on four surfaces other than the two surfaces (front surface and rear surface) having the smallest area among the six surfaces of the main body of the sensor element 101. Moreover, in FIG. 6, the porous protective part 90 has four porous protective layers 91a to 91d bonded to the sensor element 101 through each of the coating layers 24a to 24d disposed on the four surfaces. In addition, the four porous protective layers 91a to 91d formed on the surface of the adjacent sensor element are connected to each other. For example, the porous protective layer 91a is connected to the adjacent porous protective layers 91c and 91d. Thereby, the adhesiveness of the four porous protective layers 91a-91d and the sensor element 101 increases, and peeling of the porous protective part 90 is further suppressed. However, as described above, when the coating layer 24 covers the surface other than the vertical direction (stacking direction) of the main body of the sensor element 101, the paste (the coating layer 24 before firing) is solid at the time of manufacturing the gas sensor 100. In some cases, the solid electrolyte layers may be separated by entering the gaps between the electrolyte layers. Therefore, when forming the coating layer 24 on the upper and lower surfaces of the main body of the sensor element 101, the main body of the sensor element 101 is first formed by baking, and then the coating layer 24 is formed (for example, screen printing and baking). Preferably it is done.

  In the above-described embodiment, the coating layer 24 is not disposed on the surface (front surface) where the gas inlet 10 is formed among the six surfaces of the main body of the sensor element 101, but the gas inlet 10 What is necessary is just to be arrange | positioned in the area | region except. For example, as shown in FIG. 7, the coating layer 24 may include a coating layer 24 e disposed in a region excluding the gas inlet 10 on the front surface of the main body of the sensor element 101. Even in this case, it can be suppressed that the coating layer 24 prevents introduction of the gas to be measured. For example, when the coating layer 24 e is formed by screen printing, the screen printing pattern may be adjusted so that the coating layer 24 e has a shape that avoids the gas inlet 10. Alternatively, for example, when the coating layer 24e is formed by dipping, the gas inlet 10 may be covered with a mask in advance.

  In the above-described embodiment, the gas inlet 10 is disposed on the front surface of the sensor element 101, but is not limited thereto. For example, the gas inlet 10 may be disposed on the upper surface of the sensor element 101 and communicated with a gas circulation part such as the second internal space 40. Also in this case, the coating layer 24 may be disposed on at least a part of the surface of the sensor element 101 excluding the gas inlet 10.

  In the embodiment described above, the coating layer 24a also covers the surface (upper surface) of the outer pump electrode 23 as shown in FIG. 2, but the present invention is not limited to this. As shown in FIG. 8, the coating layer 24 a may not be disposed on the surface of the outer pump electrode 23. By doing so, it is possible to further suppress the coating layer 24a from inhibiting the function of the outer pump electrode 23 as an electrochemical pump cell (for example, the measurement pump cell 41). In FIG. 8, the porous protective layer 91 a covers the surface of the outer pump electrode 23. Therefore, the porous protective layer 91a can protect the outer pump electrode 23.

  For example, in the above-described embodiment, the coating layer 24 covers the region where the porous protective layers 91a and 91b are not formed on the upper surface and the lower surface of the sensor element 101. However, the present invention is not limited to this. The coating layers 24a and 24b only need to cover at least the regions where the porous protective layers 91a and 91b are formed. In addition, a coating layer may be formed on one or more of the regions where the porous protective layers 91c to 91e are formed on the surface of the sensor element 101.

  In the above-described embodiment, the porous protective portion 90 for the area S1 where the porous protective portion 90 covers the sensor element 101 on at least one surface on which the coating layer 24 is disposed among the six surfaces of the main body of the sensor element 101. The area ratio R (= S2 / S1 × 100), which is the ratio of the area S2 covering the coating layer 24, is preferably 14% to 100%. FIG. 9 is an explanatory diagram of the area S1 and the area S2. In FIG. 9, the upper surface of the main body of the sensor element 101 (the upper surface side of the second solid electrolyte layer 6) is shown. As shown in the drawing, the area where the porous protective layer 91a covers the sensor element 101 on the upper surface where the coating layer 24a is disposed among the six surfaces of the main body of the sensor element 101 is the area S1. The area where the porous protective layer 91a covers the coating layer 24a is the area S2. FIG. 9 shows a case where the coating layer 24a exists only in a portion between the porous protective layer 91a and the surface of the sensor element 101 (see the broken line portion), and the area S2 is the area where the coating layer 24a is the sensor. It is equal to the area covering the element 101. Further, since the area S1 includes the area S2, the area S1 always satisfies the area S2. If the area ratio R, which is the ratio of the area S2 to the area S1, is 14% or more, the adhesion between the porous protective layer 91a and the sensor element 101 via the coating layer 24a is likely to be sufficiently high, and the porous protective portion 90 peeling can be further suppressed. As the area ratio R is larger, the adhesion between the porous protection part 90 and the sensor element 101 tends to be higher. Further, when the coating layer 24 is formed on a plurality of surfaces, it is preferable that the number of surfaces having an area ratio R of 14% or more is larger. In the above-described embodiment, the coating layers 24a and 24b always exist between the porous protective layers 91a and 91b and the main body of the sensor element 101, and the coating layers 24a and 24b are formed on the upper surface and the lower surface of the sensor element 101. Of these, the region where the porous protective layers 91a and 91b are not formed is further covered. Therefore, the area ratio R is 100% on the upper surface and the lower surface among the six surfaces of the main body of the sensor element 101.

In the above-described embodiment, it is described that the coating layers 24a and 24b and the porous protective layers 91a and 91b formed on the surfaces thereof are preferably the same material. However, the coating layers 24a and 24b are porous. The same material as the quality protective layers 91a and 91b may be included. In this case, the coating layers 24a and 24b are made of the same material (for example, zirconia (ZrO ₂ )) as the solid electrolyte layer (the second solid electrolyte layer 6 and the first substrate layer 1 in the above-described embodiment) on which the coating layers 24a and 24b are formed. It is preferable to include. The coating layers 24a and 24b include the same material as the solid electrolyte layer on which the coating layers 24a and 24b are formed, and the same material as the porous protective layer 91 formed on the surface of the coating layers 24a and 24b. It becomes easier to bond the layer and the porous protective layer 91. However, the coating layer 24 is not limited to this, and it is sufficient that the porous protective layer 91 and the sensor element 101 can be bonded. For example, the coating layer 24 may be ceramics other than porous ceramics.

  In the embodiment described above, the thickness of the coating layer 24 is, for example, 5 μm to 50 μm, but may be 1 μm to 100 μm. If the thickness is 1 μm or more, the adhesion between the porous protective part 90 and the sensor element 101 via the coating layer 24 tends to be sufficiently high, and therefore the peeling of the porous protective part can be further suppressed. The film thickness of the coating layer 24 may be 30 μm or less, or 20 μm or less, 10 μm or less, or less than 10 μm. Even if the thickness of the coating layer 24 exceeds 30 μm, the adhesion is not so high. Therefore, the amount of the coating layer 24 used can be reduced by setting the thickness to 30 μm or less. Further, if the thickness of the coating layer 24 is further reduced, such as 20 μm or less, 10 μm or less, or less than 10 μm, the amount of material used for the coating layer 24 can be reduced accordingly.

  In the above-described embodiment, it has been described that the porous protective layers 91a and 91b are easily adhered to the sensor element 101 by setting the arithmetic average roughness Ra of the surface of the coating layer 24 to 2.0 to 5.0 μm. However, the arithmetic average roughness Ra of the region where the porous protective layer 91 is formed in the surface of the sensor element 101 may be 2.0 to 5.0 μm. For example, even when the porous protective layer 91 is formed on the surface not provided with the coating layer 24, the arithmetic average of the region where the porous protective layer 91 is formed on the surface of the main body (layer 1 to layer 6) of the sensor element 101. Roughness Ra should just be 2.0-5.0 micrometers. In this case, the arithmetic average roughness Ra may be set to 2.0 to 5.0 μm, for example, by roughening the surface of the main body of the sensor element 101 with sandblasting or the like. The arithmetic average roughness Ra is not limited to the case where the arithmetic average roughness Ra of the contact surface with the porous protective part 90 such as the surface of the coating layer 24 or the surface of the sensor element 101 is 2.0 to 5.0 μm. Even if it is 1.0 micrometer-5.0 micrometers, the effect which can suppress peeling of the porous protection part 90 more is acquired. For example, the arithmetic mean roughness Ra of the surface of the coating layer 24 after firing is adjusted by adjusting the paste in the same manner as in the above-described embodiment except that the particle diameter of the raw material powder is D50 = 0.1 μm to 2 μm. It can be set to 1.0 μm to 2.0 μm. Further, the arithmetic average roughness Ra of the contact surface of the coating layer 24 with the porous protective part 90 may not be within these ranges.

  In the embodiment described above, the porous protective layer 91 of the porous protective part 90 is formed by plasma spraying, but is not limited thereto. Even if it is another formation method, the effect which suppresses peeling of the porous protective layer 91 more similarly to this embodiment is acquired by forming the porous protective layers 91a-91e in the order mentioned above. For example, the porous protective layer 91 may be formed by screen printing in the same manner as the coating layer 24. In this case, the porous protective layers 91a and 91b may be formed in advance by screen printing the paste, drying and baking, and then the porous protective layers 91c to 91e may be printed, dried and fired. Moreover, you may form one or more among the porous protective layers 91a-91e with a method and material different from others. For example, the porous protective layer 91 may be formed by dipping using a paste that becomes the porous protective layer 91 after firing (for example, a material in which the raw material powder of the porous protective layer 91 is dispersed in a solvent). Alternatively, the porous protective layer 91 may be formed using a gel cast method. The gel casting method is a method in which a slurry is solidified by a chemical reaction of the slurry itself to form a molded body. For example, a part of sensor element 101 (part to be covered) is exposed in a space formed inside the mold, and slurry is poured into a gap between the mold and sensor element 101 to be solidified. Thereby, the sensor element 101 can be covered with the porous protective layer 91 as in the above-described embodiment. In addition, when using a gel cast method, it is preferable to add a gelatinizer to a slurry in addition to the raw material powder and solvent of the porous protective layer 91 which were mentioned above. The gelling agent causes a solidification reaction by a chemical reaction, and thereby the slurry is solidified. Examples of the gelling agent include those containing isocyanates, polyols and a catalyst.

  In addition, the formation order of the porous protective layers 91a-91e is not restricted to embodiment mentioned above. If the coating layer 24 has adhered the porous protection part 90 and the sensor element 101, the effect which suppresses peeling of the porous protection layer 91 will be acquired. For example, a paste that becomes the porous protective layers 91a to 91e after firing may be formed by screen printing, dipping or gel casting, and the porous protective layers 91a to 91e may be simultaneously formed by firing. In addition, when forming several porous protective layers 91a-91e sequentially, it is preferable to form at least any one of the porous protective layers 91a and 91b adhere | attached on the coating layers 24a and 24b previously. Further, when the porous protective layer 91 is formed on the surface of the sensor element 101 on the surface without the coating layer 24, it is preferably formed so as to be connected to the formed porous protective layer 91. In addition, it is more preferable that it is formed so as to be connected to at least one of the porous protective layers 91a and 91b bonded to the coating layer 24.

  In the embodiment described above, the coating layer 24 is formed by screen printing and baking, but is not limited thereto. For example, you may form by dipping and baking using the paste used as the coating layer 24 after baking. When the paste that becomes the coating layer 24 after baking is formed by dipping, the portion of the sensor element 101 (or sensor element before baking) where the coating layer 24 is not formed may be covered with a mask.

  In the embodiment described above, the pre-firing sensor element and the pre-firing coating layer are fired simultaneously in the step (2), and the formation of the porous protective part 90 is performed in another step (3). I can't. For example, the coating layer 24 may be formed after firing the sensor element before firing to obtain the sensor element 101. Alternatively, a pre-firing coating layer is formed on the pre-firing sensor element, and further, the porous protective part 90 before firing is formed by screen printing and dipping, and then the pre-firing sensor element, the pre-firing coating layer, and the porous protection before firing. The part 90 may be fired simultaneously.

  In the above-described embodiment, the porous protective layers 91c and 91d are first formed after the porous protective layers 91a and 91b are formed in advance. However, the present invention is not limited to this. After the porous protective layers 91a and 91b are formed in advance, the porous protective layer 91e may be formed first. However, in the order of the above-described embodiment, when the porous protective layer 91e is formed, the porous protective layer 91e can be formed so as to be connected to the four porous protective layers 91a to 91d. On the other hand, after forming the porous protective layers 91a and 91b in advance, when the porous protective layer 91e is first formed, only the porous protective layers 91a and 91b are already formed. The porous protective layer 91 is connected. Here, the porous protective layer 91 having a smaller formation area tends to have a lower adhesion with the sensor element 101. For this reason, the porous protective layer 91e having the smallest formation area is preferably formed last in order to be connected to as many porous protective layers 91 as possible. That is, the order of forming the remaining porous protective layer 91 after the prior lamination in the porous protective portion 90 is such that the porous protective layer 91 having a smaller formation area has a larger number of formed porous protective layers at the time of formation. It is preferable to set the order so as to tend to be connected to 91.

  In the embodiment described above, the porous protection part 90 includes the porous protection layers 91a to 91e, but is not limited thereto. The porous protection part 90 may be bonded to the sensor element 101 by the coating layer 24 disposed on at least a part of the surface of the sensor element 101. For example, the porous protective layer 91e may not be provided in the above-described embodiment. Moreover, although all the porous protective layers 91a-91d shall cover the distance L from the front end of the sensor element 101, it is not restricted to this. For example, one or more of the porous protective layers 91a to 91d may be different in length in the longitudinal direction (distance L in the present embodiment) from the other.

  In the embodiment described above, the porous protective layer 91a covers a region from the front end to the distance L in the upper surface of the sensor element 101, and the porous protective layer is also formed on the left end, right end, and front end of the upper surface of the sensor element 101. Although 91a is assumed to exist, the present invention is not limited to this. For example, the porous protective layer 91a may not be formed up to the right end of the upper surface of the sensor element 101 (the side portion along the front-rear direction of the upper surface of the sensor element 101) (for example, the porous protective layer 91a is the right end). Etc.). Even in such a case, the porous protective layer 91d can be formed so as to be connected to the porous protective layer 91a by forming the porous protective layer 91d so as to protrude slightly to the upper surface side of the sensor element 101. . The same applies to the left end and the front end of the upper surface of the sensor element 101 in the porous protective layer 91a. The same applies to the porous protective layer 91b.

  In the above-described embodiment, the porous protective layers 91a and 91b positioned on the upper and lower surfaces, which are surfaces opposite to each other, of the sensor element 101 are formed in advance, but the present invention is not limited to this. For example, a case is considered in which the upper and lower thicknesses and the left and right widths of the sensor element 101 are the same, and the formation areas of the porous protective layers 91a to 91d are the same and widest. In such a case, any two of the porous protective layers 91a to 91d may be formed in advance. For example, the porous protective layers 91a and 91c may be formed in advance. In this case, since the porous protective layers 91b and 91d cannot be formed so as to be connected to the porous protective layers 91a and 91c, the porous protective layer 91e is first formed after the porous protective layers 91a and 91c are formed. Will do. Thereafter, the porous protective layer 91d is formed so as to be connected to the porous protective layers 91a and 91e, or the porous protective layer 91b is formed so as to be connected to the porous protective layers 91c and 91e. Finally, the remaining porous protective layer 91 (91b or 91d) is formed so as to connect at least two porous protective layers 91 that have been formed. However, in order to increase the effect of suppressing peeling, it is preferable that the two porous protective layers 91 positioned on the opposite surfaces are formed in advance.

  In the embodiment described above, the distance L is larger than the width and thickness of the sensor element 101, but is not limited thereto. For example, when the distance L is smaller than the width and thickness of the sensor element 101, the formation area of the porous protective layer 91e is the largest. In this case, the porous protective layer 91e and the porous protective layer 91 having the next largest formation area are formed in advance.

  In the above-described embodiment, the sensor element 101 of the gas sensor 100 includes the first internal space 20 and the second internal space 40, but is not limited thereto. For example, a third internal space may be further provided. FIG. 10 shows a cross-sectional view of a gas sensor 100 according to a modification in this case. As shown in the figure, in the gas sensor 100 of this modification, the measurement electrode 44 is not covered with the fourth diffusion rate-determining part 45. Instead, between the auxiliary pump electrode 51 and the measurement electrode 44, a fourth diffusion rate controlling unit 60 similar to the third diffusion rate controlling unit 30 is formed. As a result, the second internal space 40, the fourth diffusion-controlling portion 60, and the third internal space 61 are formed adjacent to each other in this order, and constitute a part of the gas circulation portion. ing. The auxiliary pump electrode 51 is disposed in the second internal space 40, and the measurement electrode 44 is disposed on the upper surface of the first solid electrolyte layer 4 facing the third internal space 61. In the gas sensor 100 of this modification, since the fourth diffusion rate controlling unit 60 functions in the same manner as the fourth diffusion rate controlling unit 45 in FIG. 2, the NOx concentration in the gas to be measured is detected as in the above-described embodiment. Can do. In addition, the gas sensor 100 of this modification can also obtain the same effect as that of the above-described embodiment by adopting the same configuration and manufacturing method as those of the above-described embodiment. For example, since the gas sensor 100 according to the modified example includes the coating layer 24, the peeling of the porous protective part 90 can be further suppressed.

  In the above-described embodiment, the gas sensor of the present invention is embodied in the gas sensor 100 including the variable power sources 25, 46, 52, etc., but the gas sensor of the present invention includes these variable power sources 25, 46, 52, You may embody as a gas sensor (For example, the gas sensor provided with the sensor element 101, the coating layer 24, and the porous protection part 90) except structures, such as external wiring.

  Hereinafter, an example in which the gas sensor 100 is specifically manufactured will be described as an experimental example. Experimental Examples 1, 2, 4 to 7, and 8 to 17 correspond to examples of the present invention, and Experimental Example 3 corresponds to a comparative example. In addition, this invention is not limited to a following example.

[Experimental Example 1]
As Experimental Example 1, ten gas sensors 100 shown in FIGS. Specifically, in step (1), first, 6 ceramic green sheets were produced by forming a zirconia powder to which 4 mol% of the stabilizer yttria was added into a tape shape. The ceramic green sheet used as the spacer layer 5 was previously provided with a space serving as a gas inlet 10 and a gas distribution part by a punching process or the like. Similarly, the ceramic green sheet serving as the first solid electrolyte layer 4 was provided with a space serving as the reference gas introduction space 43. Then, in each of the first substrate layer 1, the second substrate layer 2, the third substrate layer 3, the first solid electrolyte layer 4, the spacer layer 5, and the second solid electrolyte layer 6 of the gas sensor 100 described above. Correspondingly, patterns such as electrodes and insulating layers were formed by screen printing. Moreover, the paste which becomes coating layer 24a, 24b after baking was screen-printed on the surface of the ceramic green sheet used as the 2nd solid electrolyte layer 6 and the 1st board | substrate layer 1. FIG. Then, after drying them, they were laminated and integrated into a laminate. The laminated body was cut and cut into the size of the gas sensor 100. The laminated body after the separation is an unfired body including a pre-fired sensor element that becomes the sensor element 101 after firing, and a pre-fired coating layer that becomes the coating layer 24 after firing. Thus, the process (1) was performed and the laminated body was prepared.

  In addition, the paste for forming the coating layer 24 was adjusted as follows. First, alumina powder having a particle size D50 = 5 μm was prepared as a raw material powder. The volume ratio of the alumina powder is 10 vol%, the binder solution (polyvinyl acetal and butyl carbitol) is 40 vol%, the cosolvent (acetone) is 45 vol%, and the dispersant (polyoxyethylene styrenated phenyl ether) is 5 vol. These were mixed as%, and the paste was adjusted by mixing for 3 hours at a rotation speed of a pot mill mixer of 200 rpm.

  Next, in the step (2), the laminate was baked at 1400 ° C. in an air atmosphere to obtain the sensor element 101 provided with the coating layer 24. In addition, when the film thickness of the coating layer 24 was measured about the produced sensor element 101, all the coating layers 24a and 24b were about 5 micrometers-10 micrometers. The arithmetic average roughness Ra of the surfaces of the coating layers 24a and 24b was about 2 μm. The sensor element 101 including the coating layer 24 had a length in the front-rear direction of 67.5 mm, a width in the left-right direction of 4.25 mm, and a thickness in the up-down direction of 1.45 mm. The porosity of the coating layer 24 was about 20%.

Subsequently, in the step (3), the porous protective layer 91 is formed on the surface of the sensor element 101 in the order of the porous protective layers 91a, 91b, 91c, 91d, and 91e to form the porous protective portion 90. The gas sensor 100 of Experimental example 1 provided with the protection part 90, the coating layer 24, and the sensor element 101 was obtained. The plasma spraying conditions for forming the porous protective layer 91 were as follows. As the plasma generating gas 130, a mixture of argon gas (flow rate 50 L / min) and hydrogen (flow rate 10 L / min) was used. The voltage applied between the anode 126 and the cathode 128 was a DC voltage of 70V. The current was 500A. As the powder spray material 134, an alumina powder having a particle size distribution in the range of 10 μm to 30 μm was used. The carrier gas used to supply the powder spray material 134 was argon gas (flow rate 4 L / min). The distance W was 150 mm. The distance L was 11.8 mm. Moreover, plasma spraying was performed in the atmosphere of air and room temperature. The direction of thermal spraying of the plasma gun 120 (the direction of the nozzle 126a) was set perpendicular to the formation surface of the porous protective layer 91 in the sensor element 101. Each of the formed porous protective layers 91a to 91e had a film thickness of about 450 μm and a porosity of about 20%. The area S1 of the upper surface of the sensor element 101 is 50 mm ^2, (the formation area of the coating layer 24a, 287mm ²⁾ the area S2 50 mm ² is, the area ratio R is 100%. Similarly, the area ratio R of the lower surface of the sensor element 101 was 100%. None of the ten gas sensors 100 of Experimental Example 1 caused the porous protective layer 91 to peel off.

[Experiment 2]
Ten gas sensors 100 of Experimental Example 2 were produced in the same manner as Experimental Example 1 except that the coating layer 24e shown in FIG. 7 was also formed as the coating layer 24 in addition to the coating layers 24a and 24b. In addition, the screen printing of the paste used as the coating layer 24e was performed with respect to the front surface of the laminated body after producing the laminated body cut into the size of the gas sensor 100. Further, the screen printing pattern was adjusted so that the paste would have a shape that avoids the gas inlet 10. In all of the ten gas sensors 100 of Experimental Example 2, the porous protective layer 91 was not peeled off.

[Experiment 3]
Ten gas sensors 100 of Experimental Example 3 were produced in the same manner as Experimental Example 1 except that the coating layer 24 was not formed. Of the ten gas sensors 100 of Experimental Example 3, all of the porous protective layers 91a to 91e were peeled off.

  From the results of Experimental Examples 1 to 3, Experimental Examples 1 and 2 in which the coating layer 24 is disposed and the porous protective portion 90 and the sensor element 101 are adhered are compared with Experimental Example 3 in which the coating layer 24 is not disposed. It was confirmed that the peeling of the porous protective part 90 can be further suppressed.

[Evaluation test]
The sensor static characteristics of the gas sensors 100 of Experimental Examples 1 and 2 were evaluated. Specifically, the sensor element 101 is arranged in a predetermined atmosphere (nitrogen base, oxygen concentration = 0%, NO concentration = 500 ppm, moisture = 3%) and is heated to a normal driving temperature (800 ° C.) by the heater 72. The value of the sensor signal (pump current Ip2 of the measurement pump cell 41) after being kept and stabilized for a predetermined time was measured. In each of Experimental Examples 1 and 2, measurement was performed on six gas sensors 100, and the maximum value, minimum value, and average value of the sensor signal were derived, respectively. The results are shown in FIG. In FIG. 11, the vertical axis indicates the value of the sensor signal in Experimental Examples 1 and 2 when the average value of the sensor signal in Experimental Example 1 is 1. As shown in FIG. 11, when the average value of the sensor signal of Experimental Example 1 is 1, the average value of the sensor signal of Experimental Example 2 is 0.7, and the sensor of Experimental Example 2 is more sensory than Experimental Example 1. The signal was declining overall. Further, the difference between the maximum value and the minimum value was larger in Experimental Example 2, and the variation of the sensor signal due to the individual difference was larger. In the gas sensor 100 of Experimental Example 1, the coating layer 24 is not formed on the front end surface of the sensor element 101 in which the gas inlet 10 is disposed. Thereby, in the gas sensor 100 of Experimental Example 1, the penetration of the coating layer 24 into the gas inlet 10 is suppressed as compared with Experimental Example 2, and the sensor static identification is improved compared to Experimental Example 2 (detection sensitivity of the gas to be measured) It is considered that variations in sensor static characteristics due to individual differences are also suppressed.

[Experimental Example 4]
As Experimental Example 4, 20 gas sensors 100 were manufactured according to the method for manufacturing the gas sensor 100 of the above-described embodiment. Specifically, first, the sensor element 101 having a length in the front-rear direction of 67.5 mm, a width in the left-right direction of 4.25 mm, and a thickness in the vertical direction of 1.45 mm was manufactured. In preparing the sensor element 101, the paste for forming the coating layer 24 was adjusted as follows. The particle size of the raw material powder (alumina powder) is D50 = 5 μm, the volume ratio is 10 vol%, the binder solution (polyvinyl acetal and butyl carbitol) is 40 vol%, the co-solvent (acetone) is 45 vol%, the dispersant (poly These were prepared with 5 vol% of oxyethylene styrenated phenyl ether) and mixed for 3 hours with a pot mill mixer at 200 rpm to prepare a paste. Moreover, when the film thickness of the coating layer 24 was measured about the produced sensor element 101, all were about 10-20 micrometers. Further, the arithmetic average roughness Ra of the surfaces of the coating layers 24a and 24b was about 2.4 μm. The dimension of the sensor element 101 is a dimension including the coating layer 24. The porosity of the coating layer 24 was about 20%.

  Subsequently, the porous protective layer 91 was formed in the order of the porous protective layers 91 a, 91 b, 91 c, 91 d, 91 e on the surface of the sensor element 101 to form the porous protective portion 90, thereby providing the gas sensor 100. The plasma spraying conditions for forming the porous protective layer 91 were as follows. As the plasma generating gas 130, a mixture of argon gas (flow rate 50 L / min) and hydrogen (flow rate 10 L / min) was used. The voltage applied between the anode 126 and the cathode 128 was a DC voltage of 70V. The current was 500A. As the powder spray material 134, an alumina powder having a particle size distribution in the range of 10 μm to 30 μm was used. The carrier gas used to supply the powder spray material 134 was argon gas (flow rate 4 L / min). The distance W was 150 mm. The distance L was 10 mm. Moreover, plasma spraying was performed in the atmosphere of air and room temperature. The direction of thermal spraying of the plasma gun 120 (the direction of the nozzle 126a) was set perpendicular to the formation surface of the porous protective layer 91 in the sensor element 101. The film thicknesses of the formed porous protective layers 91a to 91e were all about 450 μm. In all of the 20 gas sensors 100 of Experimental Example 4, peeling of the porous protective layer 91 did not occur.

[Experimental Example 5]
Twenty gas sensors 100 were produced in the same manner as in Experimental Example 4 except that the formation order of the porous protective layer 91a and the porous protective layer 91b in Experimental Example 4 was reversed. That is, in Experimental Example 5, the porous protective layer 91 was formed in the order of the porous protective layers 91b, 91a, 91c, 91d, and 91e. In all of the 20 gas sensors 100 of Experimental Example 5, the porous protective layer 91 was not peeled off.

[Experimental Example 6]
Twenty gas sensors 100 were produced in the same manner as in Experimental Example 4 except that the porous protective layers 91c and 91d were first formed among the porous protective layers 91a to 91e. That is, in Experimental Example 6, the porous protective layer 91 was formed in the order of the porous protective layers 91c, 91d, 91a, 91b, and 91e. Of the 20 gas sensors 100 of Experimental Example 6, two of the porous protective layers 91a and 91d were peeled off. In addition, it is thought that the porous protective layer 91a peeled with peeling of the porous protective layer 91d.

[Experimental Example 7]
Twenty gas sensors 100 were produced in the same manner as in Experimental Example 4 except that the porous protective layer 91e was first formed among the porous protective layers 91a to 91e. That is, in Experimental Example 7, the porous protective layer 91 was formed in the order of the porous protective layers 91e, 91a, 91b, 91c, and 91d. Of the 20 gas sensors 100 of Experimental Example 7, peeling of the porous protective layer 91e occurred in three of them.

  From the results of Experimental Examples 4 to 7, the porous protective layers 91a and 91b having the widest formation area are formed in advance, and then the porous protective layer 91c is connected so that at least two formed porous protective layers 91 are connected. It was confirmed that the peeling of the porous protective layer 91 can be further suppressed by forming ~ 91e. Further, the porous protective layers 91a and 91b to be bonded to the coating layers 24a and 24b are formed first, and then connected to at least one of the porous protective layers 91a and 91b that have been formed and bonded to the coating layer 24. It was confirmed that the peeling of the porous protective layer 91 can be further suppressed by forming the porous protective layers 91c to 91e as described above.

[Experimental Examples 8 to 17]
In Experimental Examples 8 to 17, 20 gas sensors 100 were produced in the same manner as in Experimental Example 4 except that the porosity of the coating layer 24 was variously changed. Specifically, in the adjustment of the paste for forming the coating layer 24, the sensor elements 101 of Experimental Examples 11 to 20 were manufactured in the same manner as Experimental Example 4 except for the following points. In Experimental Example 8, the raw material powder (alumina powder) was pulverized and the particle size was D50 = 0.5 μm, and the volume ratio of the binder was ¼ (= 10 vol%). In Experimental Example 9, the binder volume ratio was set to 1/4 (= 10 vol%). In Experimental Example 10, the volume ratio of the binder was halved (= 20 vol%). In Experimental Example 11, the sensor element 101 was produced in the same manner as in Experimental Example 4. In Experimental Example 12, 0.225 vol% of a pore former (theobromine) was added to the paste. In Experimental Example 13, 0.85 vol% of a pore former (theobromine) was added to the paste. In Experimental Example 14, 1.75 vol% of a pore former (theobromine) was added to the paste. In Experimental Example 15, 4.25 vol% of a pore former (theobromine) was added to the paste. In Experimental Example 16, 6.5 vol% of a pore former (theobromine) was added to the paste. In Experimental Example 17, 10 vol% of a pore former (theobromine) was added to the paste. The porosity of the coating layer 24 of Experimental Examples 8 to 17 is 5.3%, 10.24%, 15.36%, 20.78%, 37.2%, 51.1%, and 60.7%, respectively. 64.86%, 70.1% and 75%. Moreover, when the film thickness of the coating layer 24 was measured about the sensor element 101 of Experimental example 8-17, all were about 10 micrometers. In addition, the arithmetic average roughness Ra of the surfaces of the coating layers 24a and 24b in Experimental Examples 8 to 17 were both about 2 μm.

  The volume ratio of the raw material powder, the particle diameter of the raw material powder, the volume ratio of the pore former, the volume ratio of the binder, the porosity of the coating layer in the preparation of the paste for forming the coating layer 24 in Experimental Examples 8 to 17, and Table 1 summarizes the number of peeled porous protective layers 91 or coating layers 24 out of 20.

  As shown in Table 1, in Experimental Example 8 in which the porosity of the coating layer 24 was less than 10%, the porous protective layer 24 was peeled off for 2 out of 20 samples. Further, in Experimental Example 17 in which the porosity of the coating layer 24 was over 71%, the coating layer 24 was peeled off for two of the twenty. In Experimental Example 17, it is considered that the coating layer 24 was peeled off by the collision of the alumina powder during plasma spraying, and the peeling was caused due to the low strength of the coating layer 24. On the other hand, in each of Experimental Examples 9 to 16, no peeling of the porous protective layer 91 or the coating layer 24 occurred in any of the 20 samples. From the above results, it is considered that peeling of the porous protective layer 91 can be suppressed by setting the porosity of the coating layer to 10% or more. In addition, it is considered that when the porosity of the coating layer 24 is 71% or less, peeling of the coating layer 24 can be suppressed, and consequently peeling of the porous protective layer 91 can be suppressed.

  DESCRIPTION OF SYMBOLS 1 1st board | substrate layer, 2nd board | substrate layer, 3rd board | substrate layer, 4th 1st solid electrolyte layer, 5 spacer layer, 6 2nd solid electrolyte layer, 10 gas inlet, 11 1st diffusion control part, 12 buffer Space, 13 Second diffusion limiting part, 20 First internal space, 21 Main pump cell, 22 Inner pump electrode, 22a Ceiling electrode part, 22b Bottom electrode part, 23 Outer pump electrode, 24, 24a-24e Coating layer, 25 Variable Power source, 30 3rd diffusion rate limiting part, 40 2nd internal space, 41 measurement pump cell, 42 reference electrode, 43 reference gas introduction space, 44 measurement electrode, 45 4th diffusion rate limiting part, 46 variable power supply, 48 atmosphere introduction layer , 50 Auxiliary pump cell, 51 Auxiliary pump electrode, 51a Ceiling electrode part, 51b Bottom electrode part, 52 Variable power supply, 60 4th diffusion rate limiting part, 61 3rd internal space, 70 Heater part, 71 Heater connector electrode, 72 Heater, 73 Through hole, 74 Heater insulation layer, 75 Pressure diffusion hole, 76, 76a-76c Heater lead wire, 80 Main pump control oxygen partial pressure detection sensor cell, 81 Auxiliary pump control Oxygen partial pressure detection sensor cell, 82 Oxygen partial pressure detection sensor cell for measurement pump control, 83 Sensor cell, 90 Porous protective part, 91, 91a to 91e Porous protective layer, 100 Gas sensor, 101 Sensor element, 120 Plasma gun, 122 Outer peripheral part, 123 insulating part, 124 water cooling jacket, 126 anode, 126a nozzle, 128 cathode, 130 gas for generating plasma, 132 powder supply part, 134 powder spraying material.

Claims (10)

A sensor element comprising a base made of an oxygen ion conductive solid electrolyte and provided with a gas inlet for introducing a gas to be measured from the outside;
A porous protective portion covering the surface of the sensor element;
A coating layer disposed on at least a part of the surface of the sensor element excluding the gas inlet and bonding the porous protective part and the sensor element;
Equipped with a,
The base body has a rectangular parallelepiped shape,
The coating layer is disposed at least on two surfaces located on opposite sides of the six surfaces of the substrate,
The porous protective portion includes first and second porous protective layers bonded to the sensor element via each of the coating layers disposed on the two surfaces, and the first and second porous protective layers. And a third porous protective layer that covers one or more surfaces other than the two surfaces of the base body,
The coating layer does not exist between the third porous protective layer and the substrate;
Gas sensor. The base body has a rectangular parallelepiped shape in which one side is longer than the other two sides,
The coating layer is disposed at least on four surfaces other than the two surfaces having the smallest area among the six surfaces of the substrate,
The porous protective part includes four porous protective layers including the first and second porous protective layers bonded to the sensor element through each of the coating layers disposed on the four surfaces ; anda third porous protective layer covering the one surface of the two surfaces smaller the largest area among the six surfaces of the substrate, and, the four porous protective layer is formed on said surface adjacent The porous protective layers made are connected to each other,
The gas sensor according to claim 1 . The substrate is formed by laminating a plurality of oxygen ion conductive solid electrolyte layers,
The coating layer does not cover other than the upper and lower surfaces of the substrate, with the stacking direction of the solid electrolyte layer being the vertical direction,
The gas sensor according to claim 1 . The base body has a rectangular parallelepiped shape,
The coating layer is not disposed on the surface where the gas introduction port is formed among the six surfaces of the base body.
The gas sensor according to any one of claims 1-3. The base body has a rectangular parallelepiped shape,
Of at least one surface of the six surfaces of the substrate on which the coating layer is disposed, the porous protective portion has an area S2 where the porous protective portion covers the coating layer with respect to the area S1 where the porous protective portion covers the sensor element. The area ratio R (= S2 / S1 × 100) as a ratio is 14% to 100%.
The gas sensor of any one of Claims 1-4 . The coating layer has a thickness of 1 μm to 30 μm.
The gas sensor of any one of Claims 1-5 . The coating layer has an arithmetic average roughness Ra of a contact surface with the porous protective part of 1.0 μm to 5.0 μm.
The gas sensor of any one of Claims 1-6 . The coating layer has a porosity of 10 to 71%.
The gas sensor according to any one of claims 1-7. The base is formed with a gas flow part that communicates with the gas inlet and introduces a gas to be measured from the outside to the inside.
The sensor element has an outer pump electrode disposed on the surface of the base body, and a measurement electrode disposed to be exposed at a part of the gas flow part,
The coating layer is not disposed on the outer pump electrode surface,
The porous protection part covers the outer pump electrode surface,
The gas sensor of any one of Claims 1-8 . A method for manufacturing a gas sensor according to any one of claims 1 to 9
(1) A pre-firing sensor element that becomes the sensor element after firing, and firing disposed on at least a part of the surface of the pre-firing sensor element excluding a portion that becomes the gas inlet after firing in the pre-firing sensor element. A step of preparing an unfired body provided with a pre-fired coating layer to be the coating layer later;
(2) A step of firing the green body to form a fired body including the sensor element and the coating layer;
(3) forming the porous protective portion so as to cover the surface of the sensor element including at least a part of the surface of the coating layer;
The manufacturing method of the gas sensor containing this.