JP4381698B2 - 半導体装置及びその作製方法 - Google Patents
半導体装置及びその作製方法 Download PDFInfo
- Publication number
- JP4381698B2 JP4381698B2 JP2003063349A JP2003063349A JP4381698B2 JP 4381698 B2 JP4381698 B2 JP 4381698B2 JP 2003063349 A JP2003063349 A JP 2003063349A JP 2003063349 A JP2003063349 A JP 2003063349A JP 4381698 B2 JP4381698 B2 JP 4381698B2
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- semiconductor
- film
- insulating film
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
- C03C25/10—Coating
- C03C25/104—Coating to obtain optical fibres
- C03C25/106—Single coatings
- C03C25/1061—Inorganic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
- C03C25/62—Surface treatment of fibres or filaments made from glass, minerals or slags by application of electric or wave energy; by particle radiation or ion implantation
- C03C25/6206—Electromagnetic waves
- C03C25/6208—Laser
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02395—Glass optical fibre with a protective coating, e.g. two layer polymer coating deposited directly on a silica cladding surface during fibre manufacture
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Electromagnetism (AREA)
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
- Optical Couplings Of Light Guides (AREA)
- Light Receiving Elements (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003063349A JP4381698B2 (ja) | 2003-03-10 | 2003-03-10 | 半導体装置及びその作製方法 |
| US10/793,787 US7113661B2 (en) | 2003-03-10 | 2004-03-08 | Semiconductor device and method for manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003063349A JP4381698B2 (ja) | 2003-03-10 | 2003-03-10 | 半導体装置及びその作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004273817A JP2004273817A (ja) | 2004-09-30 |
| JP2004273817A5 JP2004273817A5 (enExample) | 2006-04-06 |
| JP4381698B2 true JP4381698B2 (ja) | 2009-12-09 |
Family
ID=32959084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003063349A Expired - Fee Related JP4381698B2 (ja) | 2003-03-10 | 2003-03-10 | 半導体装置及びその作製方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7113661B2 (enExample) |
| JP (1) | JP4381698B2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4381698B2 (ja) * | 2003-03-10 | 2009-12-09 | 株式会社半導体エネルギー研究所 | 半導体装置及びその作製方法 |
| JP2006128414A (ja) * | 2004-10-28 | 2006-05-18 | Furukawa Electric Co Ltd:The | ファイバーsoi基板及びこれを用いた半導体素子並びにその製造方法 |
| US7368307B2 (en) * | 2005-06-07 | 2008-05-06 | Eastman Kodak Company | Method of manufacturing an OLED device with a curved light emitting surface |
| CN102027615A (zh) * | 2008-03-26 | 2011-04-20 | 皇家飞利浦电子股份有限公司 | 发光二极管器件 |
| US8954156B2 (en) | 2010-10-27 | 2015-02-10 | National Tsing Hua University | Methods and apparatuses for configuring artificial retina devices |
| US9114004B2 (en) | 2010-10-27 | 2015-08-25 | Iridium Medical Technology Co, Ltd. | Flexible artificial retina devices |
| CN202033560U (zh) * | 2011-01-14 | 2011-11-09 | 王亚平 | 一种有源阵列液晶显示面板的基板 |
| US9155881B2 (en) | 2011-05-06 | 2015-10-13 | Iridium Medical Technology Co, Ltd. | Non-planar chip assembly |
| US8613135B2 (en) * | 2011-05-06 | 2013-12-24 | National Tsing Hua University | Method for non-planar chip assembly |
| KR102009724B1 (ko) * | 2012-10-29 | 2019-08-13 | 삼성디스플레이 주식회사 | 플렉서블 표시 장치 및 표시 장치의 휘도 보정 방법 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0522417A1 (en) * | 1991-07-09 | 1993-01-13 | Sumitomo Electric Industries, Limited | Light-receiving apparatus with optical fiber connection |
| US5821597A (en) | 1992-09-11 | 1998-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device |
| SE513183C2 (sv) * | 1994-03-18 | 2000-07-24 | Ericsson Telefon Ab L M | Förfarande för framställning av en optokomponent samt kapslad optokomponent |
| US5627364A (en) | 1994-10-11 | 1997-05-06 | Tdk Corporation | Linear array image sensor with thin-film light emission element light source |
| US5631987A (en) * | 1995-06-07 | 1997-05-20 | Reliaspeed, Inc. | Low cost, mode-field matched, high performance laser transmitter optical subassembly |
| US5774614A (en) * | 1996-07-16 | 1998-06-30 | Gilliland; Patrick B. | Optoelectronic coupling and method of making same |
| US5955776A (en) | 1996-12-04 | 1999-09-21 | Ball Semiconductor, Inc. | Spherical shaped semiconductor integrated circuit |
| JP3191729B2 (ja) * | 1997-07-03 | 2001-07-23 | 日本電気株式会社 | 光半導体モジュールとその製造方法 |
| JP3147087B2 (ja) | 1998-06-17 | 2001-03-19 | 日本電気株式会社 | 積層型半導体装置放熱構造 |
| US6509645B2 (en) | 1998-07-09 | 2003-01-21 | Nippon Steel Corporation | Spherical semiconductor device and method for fabricating the same |
| US6312304B1 (en) | 1998-12-15 | 2001-11-06 | E Ink Corporation | Assembly of microencapsulated electronic displays |
| TW473783B (en) | 1999-08-13 | 2002-01-21 | Semiconductor Energy Lab | Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device |
| JP3897965B2 (ja) | 1999-08-13 | 2007-03-28 | 株式会社半導体エネルギー研究所 | レーザー装置及びレーザーアニール方法 |
| JP3798220B2 (ja) | 2000-04-07 | 2006-07-19 | シャープ株式会社 | 半導体装置およびそれを用いる液晶モジュール |
| JP4059338B2 (ja) | 2002-07-24 | 2008-03-12 | 独立行政法人科学技術振興機構 | ファイバーを用いた線状センサ及びそのシステム |
| JP4381698B2 (ja) * | 2003-03-10 | 2009-12-09 | 株式会社半導体エネルギー研究所 | 半導体装置及びその作製方法 |
-
2003
- 2003-03-10 JP JP2003063349A patent/JP4381698B2/ja not_active Expired - Fee Related
-
2004
- 2004-03-08 US US10/793,787 patent/US7113661B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7113661B2 (en) | 2006-09-26 |
| JP2004273817A (ja) | 2004-09-30 |
| US20040179767A1 (en) | 2004-09-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7704812B2 (en) | Semiconductor circuit and method of fabricating the same | |
| CN100392829C (zh) | 激光辐照装置、激光辐照方法、以及半导体器件制造方法 | |
| TW501282B (en) | Method of manufacturing semiconductor device | |
| KR100820251B1 (ko) | 레이저 어닐 방법 및 반도체장치 제작방법 | |
| TW523791B (en) | Method of processing beam, laser irradiation apparatus, and method of manufacturing semiconductor device | |
| JP4429586B2 (ja) | 半導体装置の作製方法 | |
| CN100479116C (zh) | 激光照射设备和制造半导体器件的方法 | |
| US7737054B2 (en) | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device | |
| US7326630B2 (en) | Method of fabricating semiconductor device utilizing laser irradiation | |
| US7217605B2 (en) | Laser irradiation method and method of manufacturing a semiconductor device | |
| TWI272722B (en) | Semiconductor device and manufacturing method therefor | |
| JP5404064B2 (ja) | レーザ処理装置、および半導体基板の作製方法 | |
| US7148092B2 (en) | Semiconductor device and method of manufacturing the same | |
| JP4381698B2 (ja) | 半導体装置及びその作製方法 | |
| US7705357B2 (en) | Thin film transistor with channel region in recess | |
| US20020153360A1 (en) | Laser irradiating apparatus and method of manufacturing semiconductor apparatus | |
| US7951654B2 (en) | Method of fabricating semiconductor device | |
| US7166863B2 (en) | Semiconductor element, semiconductor device, electronic device, TV set and digital camera | |
| TW550648B (en) | Semiconductor device and method of manufacturing the same | |
| JP5324837B2 (ja) | 表示装置の作製方法 | |
| JP2006222423A (ja) | レーザー装置及びこれを利用した薄膜トランジスタの製造方法 | |
| JP4230159B2 (ja) | 半導体装置の作製方法 | |
| JP4860116B2 (ja) | 結晶性半導体膜の作製方法 | |
| JP2003218058A (ja) | レーザ照射方法および半導体装置の作製方法 | |
| CN107799398B (zh) | 多晶硅薄膜的制作方法、薄膜、晶体管、基板及激光设备 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060222 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060222 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090220 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090317 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090407 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090915 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090916 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121002 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121002 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121002 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131002 Year of fee payment: 4 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |