JP4379090B2 - Liquid measuring method and liquid measuring apparatus using surface acoustic wave - Google Patents

Description

  The present invention relates to a surface acoustic wave element. More specifically, the present invention is provided on the outer surface of a substrate having an outer surface that is formed of at least a part of a spherical surface and is continuous in an annular shape. The present invention relates to a spherical surface acoustic wave element in which the surface acoustic wave generating means generates a surface acoustic wave in the direction in which the outer surface is continuous.

  2. Description of the Related Art A surface acoustic wave element has been well known as one that generates surface acoustic waves on a substrate and receives surface acoustic waves generated on the substrate. In a conventional surface acoustic wave element, a pair of interdigital electrodes are provided on a piezoelectric body, and by supplying a high frequency voltage to one interdigital electrode, a surface acoustic wave is generated in the direction in which the interdigital electrodes are arranged. The other interdigital electrode is disposed in the moving direction of the surface acoustic wave generated from one interdigital electrode and receives the surface acoustic wave. The surface acoustic wave element is used for a delay line, an oscillation element and a resonance element for a transmitter, a filter for selecting a frequency, a chemical sensor, a biosensor, or a remote tag.

    In order to increase the accuracy of the resonance frequency in the surface acoustic wave device, it has been desired to reduce the propagation loss when the surface acoustic wave propagates between a pair of interdigital electrodes. In the surface acoustic wave element, the surface of the piezoelectric body on which the pair of interdigital electrodes are provided and the surface of the substrate are flat, so that the surface acoustic wave generated from one interdigital electrode is applied to the other interdigital electrode. While propagating in the opposite direction, it diffuses and weakens in the direction perpendicular to the propagation direction on the surface.

  This phenomenon becomes prominent when the propagation distance becomes longer. For this reason, the propagation loss of the surface acoustic wave cannot be reduced, and as a result, there is a limit to improving the performance of the surface acoustic wave device, so that the performance can be improved much more than the conventional surface acoustic wave device. In order to provide not only a compact surface acoustic wave element that is compact, a surface acoustic wave element as disclosed in Patent Document 1 has been proposed.

It is formed on at least a part of a spherical surface and has a base having an outer surface that is continuous in an annular shape, and is provided on the outer surface of the base and is directed in a direction in which the outer surface of the base is continuous. A surface acoustic wave generating means for generating surface acoustic waves, and the surface acoustic wave generating means is elastic so as to be directed only in the continuous direction without diffusing along the outer surface in a direction crossing the continuous direction. It is a spherical surface acoustic wave element that generates surface waves.
International Publication WO 01/45255

However, as an application, surface acoustic waves can change the speed of circulation when substances adhere to the propagating material surface or when the material formed on the surface undergoes a chemical reaction and changes in elastic properties. In some cases, a specific antibody is bound to the surface of the substrate, and a solution in which the protein to be analyzed is dissolved is bound to the surface. Proteins bind to antibody molecules when present in solution. When this phenomenon is applied to a spherical surface acoustic wave device, devices with various antibodies attached are prepared, the sample solution is brought into contact with all of them, and the surface of the spherical surface acoustic wave device that circulates around the surface after rinsing is dried. When the change in the speed of the wave is measured, only the element to which the protein is attached slows the speed of the loop, so that a specific protein in the sample solution can be detected.

  Samples that can be used for measurement in such medical treatment and biochemistry are collected in vivo, processed, and prepared, so that the amount thereof is very small. On the other hand, since the sensitive part of the spherical surface acoustic wave element is only the part where the surface acoustic wave that is the annular continuous region 31 circulates, not only is it wasted even if the sample is brought into contact with other regions, Even if there is no antibody on the surface, the substance to be detected decreases because it adheres to some extent. Even when the spherical surface acoustic wave element is immersed using a cylindrical container, it is clear that a space 32 that requires a large amount of liquid to be measured is generated as shown in FIG. 9, and that many sample solutions are required. .

  On the other hand, it is possible to immerse using a container having a round bottom as shown in FIG. 10, but such a container is necessary when it is necessary to immerse several tens of thousands of antibodies as in protein analysis. On the other hand, immersing different spherical surface acoustic wave elements and observing the output requires a lot of time and sample amount.

  As described above, when a measurement such as a chemical treatment using an antigen-antibody reaction is performed using a spherical surface acoustic wave device, the amount of chemical actually required on the surface of the device is the elastic surface of the spherical surface acoustic wave device. It can be seen that, in spite of the fact that it may be only on the path that the wave goes around, it actually requires a very large amount of sample and labor.

  Further, even when a barrel-shaped spherical surface acoustic wave device as shown in FIG. 11 is used, the surface area of the device is slightly reduced, but the detected substance in the liquid to be measured is adsorbed on the plane portion, so that In other words, there is a problem that the amount of a substance to be detected that adheres to an area that is continuously measured in an annular shape that is actually measured is reduced.

  As shown in FIG. 12, it is possible to place the sample in a hexagonal packing and bring it into contact with the surface of a large number of spherical surface acoustic wave elements at one time. However, if there is no significant amount of sample, the measurement is difficult. It is.

The present invention according to claim 1 is provided on the surface of the base material having a region formed in at least a part of a spherical surface in the surface and having an annularly continuous region, and the surface of the base material. A surface acoustic wave element having a surface acoustic wave generator for generating surface acoustic waves on the surface in the continuous direction along the surface region is housed in a container fitted therein, and the container and the surface acoustic wave element are After injecting the liquid to be measured into the gap between the annularly continuous area and taking out from the liquid to be measured or removing the liquid to be measured, the surface acoustic wave generator is used to excite the surface acoustic wave and the excitation is performed. A surface acoustic wave liquid measuring method for measuring the surface acoustic wave velocity, wherein the base material has a region formed in at least a part of a spherical surface and continuous in an annular shape in the surface, Spherical elastic surface with both poles missing from a sphere A shape in which a plurality connecting element in polar moiety, bipolar partial surface which is missing the poles is a liquid measuring method of the surface acoustic wave, characterized in that the measured liquid repellant treated.

One embodiment of the present invention is the method for measuring liquid by surface acoustic waves according to claim 1, wherein at least the region of the base material that is continuous in an annular shape is a piezoelectric material .

One embodiment of the present invention is the method for measuring a liquid by surface acoustic waves according to claim 2 , wherein interdigital electrodes are formed in the annularly continuous region .

2. The liquid measurement by surface acoustic waves according to claim 1 , wherein one embodiment of the present invention is such that the two-electrode partial surfaces lacking the two electrodes are in close contact with each other and subjected to a liquid repulsion process to be measured. Is the method .

One embodiment of the present invention performs chemical treatment or gas treatment in a shape in which a plurality of spherical surface acoustic wave elements each having a shape in which both poles are missing from the spherical shape are connected at the pole portions. A liquid measurement method using surface acoustic waves according to any one of the above .

In one embodiment of the present invention, the chemical solution or gas treatment is performed in the container to be fitted, and the container is cylindrical and the diameter of the cylinder is not larger than 1 mm from the diameter of the spherical shape. 5. A liquid measurement method using surface acoustic waves according to 5 .

One embodiment of the present invention includes a base material having a region formed in at least a part of a spherical surface in a surface and continuous in an annular shape, and the surface provided on the surface of the base material. A surface acoustic wave element having a surface acoustic wave generator for generating a surface acoustic wave in the continuous direction along the surface region, and a container fitted with the surface acoustic wave element, and at least a spherical surface in the surface The base material having a region that is formed in a part of the ring and continuous in an annular shape has a shape in which a plurality of spherical surface acoustic wave elements having a shape in which both poles are missing from a spherical shape are connected at the pole portions. The liquid measuring apparatus is characterized in that a measured liquid repulsion process is performed on a surface of a bipolar part from which both the electrodes are missing .

  In the surface acoustic wave element configured as described above, the surface acoustic wave generator formed on at least a part of the spherical surface and provided on the annular region is directed in the direction in which the outer surface of the base material continues. When the surface acoustic wave is generated, the surface acoustic wave is directed only in the continuous direction without diffusing in the direction intersecting with the continuous direction along the annular region. For this reason, the surface acoustic wave can propagate along the annular surface region at least a circumferential distance of the annular region very many times.

  In the surface acoustic wave device according to the present invention, which is configured as described above, the base material is preferably a piezoelectric material, but may be formed of a non-piezoelectric material. In this case, the surface acoustic wave generator has a piezoelectric material film provided in the annular region of the substrate and an elastic surface in a continuous direction by applying an electric field to the piezoelectric material film provided on the surface of the piezoelectric material film. A vibration oscillator for generating a wave. The oscillating oscillator can include an interdigital electrode connected to a high frequency power source.

  The substrate is preferably formed of a piezoelectric material. In this case, the surface acoustic wave generator is provided in an annular region on the surface of the substrate, and generates a surface acoustic wave in a continuous direction by applying a periodic electric field to the annular region of the substrate. An oscillator can be provided.

  The oscillating oscillator can include an interdigital electrode connected to a high frequency power source. When the vibration oscillator includes an interdigital electrode connected to a high frequency power supply, the arrangement period of the plurality of electrode pieces of the interdigital electrode is preferably set to 1/10 or less of the radius of the spherical surface of the substrate. . The wavelength of the surface acoustic wave generated by the vibration oscillator is not equal to the natural vibration of the entire substrate, but is approximately equal to the arrangement period of the plurality of electrode pieces of the interdigital electrode.

  When the vibration oscillator includes an interdigital electrode connected to a high frequency power supply, the length (electrode width) where the electrode pieces of the interdigital electrode face each other is less than half of the diameter of the spherical surface of the base material, and the spherical surface It is preferable that it is set to 1/100 or more of the radius.

The length along the direction perpendicular to the continuous direction of the interdigital electrode and the electric circuit pattern attached to the interdigital electrode is not more than half of the circumferential length of the spherical surface of the substrate. Not only is it necessary, but particularly when a piezoelectric crystal is used as a piezoelectric material, the strength of the surface acoustic wave generated even if it is long does not increase so much, and it is difficult to reduce the size of the element.

  Therefore, it is reasonable that the length (electrode width) at which the plurality of electrode pieces of the interdigital electrode face each other is not more than half the diameter of the spherical surface of the substrate. When the facing length (electrode width) is 1/100 or less of the radius of the annular region of the substrate, the surface acoustic wave generated in the interdigital electrode continues while propagating in the continuous direction of the annular region. It spreads in the direction orthogonal to the direction. When the surface acoustic wave diffused in the direction orthogonal to the continuous direction is input to the interdigital electrode, it is affected by an obstacle existing in the region where the interdigital electrode diffuses, for example, the interdigital electrode Frequency characteristics may be adversely affected.

  In actuality, the wavelength parameter (peripheral length in the continuous direction of the spherical surface / surface acoustic wave wavelength) is 60 to 800, and the length of the plurality of interdigital electrodes facing each other in the orthogonal direction ( The electrode width is preferably close to the collimating angle (the angle at which the maximum width of the circumferential path of the surface acoustic wave is minimized).

  The arrangement period of the plurality of electrode pieces of the interdigital electrode (corresponding to the wavelength of the generated surface acoustic wave) is preferably 1/10 or less of the radius of the spherical surface. Moreover, it is preferable that the distance between the electrode pieces of the interdigital electrode is 1/10 or less of the radius of the spherical surface.

  In the present invention, “a base material having a surface including a region formed of a part of a spherical surface and continuous in an annular shape” includes a spherical base material, as well as a spherical shape. Including a barrel shape in which a region other than the above region is cut out, a substantially disk shape having a circumferentially curved outer surface, and a base material including a spherical shape, a barrel shape, or a substantially disk shaped cavity. included. In particular, by forming a barrel shape, it is possible to assemble a plurality of spherical surface acoustic wave elements in a form in which the surface area is suppressed by overlapping the plane portion, and the substance to be detected can be brought into contact only with the annular portion.

  Therefore, the base material is formed of at least a part of a spherical surface and includes a cavity including an inner surface having a region that is continuous in an annular shape, a groove that communicates the inside of the cavity and the outside of the base material, and the like. And an opening.

  In this case, when the spherical surface acoustic wave element is connected, the cavity is preferably a connection cavity and a flow path for the liquid to be measured. In this case, it is preferable to select an appropriate size according to the properties of the liquid to be measured so that the liquid to be measured flows and functions in a minimum amount.

    As is clear from the above detailed description, the spherical surface acoustic wave device according to the present invention can not only greatly improve the performance compared to the conventional surface acoustic wave device, but also the amount of liquid to be measured is small. It is suitable for measurement.

  The present invention will be described in detail with reference to FIG. FIG. 1 shows a single spherical surface acoustic wave element constituting the coupled spherical surface acoustic wave element produced in this embodiment.

  The base material is obtained by cutting two surfaces of a crystal ball having a diameter of 1 mm. When the quartz crystal substrate 1 of the spherical surface acoustic wave element is made using a quartz material, the surface acoustic wave 3 efficiently propagates along the equator when the Z axis (= C axis) of the quartz is regarded as the ground axis. It is known to do. Further, the interdigital electrode 2 can be realized by using vapor deposition and photolithography so that the electrode terminal of the interdigital electrode is formed on the equator in a direction perpendicular to the equator. The shape of the interdigital electrode used in this example is schematically shown in FIG.

  The number of interdigital electrodes used here is 4, the line and space of alternately arranged charges is about 2 microns, and the overlap width is 0.11 mm. The base material was made to have a thickness of 0.4 mm by polishing two surfaces corresponding to the poles of a 1 mm diameter crystal ball. When a plurality of elements are connected to the planar portion, a hydrophobic treatment may be formed along the outer periphery of the planar portion by forming a polyfluoroethylene film or the like in order to prevent the sample solution from entering the gap. . Or you may perform the process of piercing or hollowing a flat part.

  In this way, it is not necessary to carry out hydrophobic processing, and the procedure of injecting the chemical solution after connecting or connecting the flat portions is prevented, so that the intrusion of the chemical solution is prevented if the adhesion is ensured. A similar effect can be obtained by preventing consumption of the substance to be detected.

  This effect is particularly significant when the spherical surface acoustic wave element is used in a barrel shape, and the effect increases as the distance between the planes, that is, the height of the barrel decreases, theoretically the surface area of the sphere and the annular region. It is easily imagined that the substance to be detected can be detected with high sensitivity in inverse proportion to the ratio of the area.

  Therefore, it is preferable that the annular region of the spherical surface acoustic wave device used in the present invention is narrow, and this is effective for a device having a large missing portion. Preferably, it is barrel-shaped, and it is desirable that the distance between the planar portions, that is, the height, is 1 / 1.5 or less of the radius of curvature of the annular region, since a sensitivity improvement of about twice is expected.

  A total of four spherical surface acoustic wave devices are prepared, one of which is immersed in a solution of an antibody against protein A, the other is an antibody of protein B, the other is an antibody of protein C, and the remaining one is It was immersed in pure water, followed by rinsing and drying, and the planar portions were connected as shown in FIG.

  Three spherical surface acoustic wave elements were inserted into the cylindrical container shown in FIG. 3, and the sample liquid 5 to be measured was injected. The circular container has a diameter of 1.1 mm and a height of 1.7 mm. Although not shown, a medicine suction cavity is open at the bottom, and when processing is completed, suction is performed to collect the sample liquid and rinse liquid. I do.

  In addition, the container in this case has a protrusion for positioning the spherical surface acoustic wave element inserted in a manner connected to the inner wall surface of the container as shown in FIG. It is provided so that the chemical solution is uniformly in contact with the annular region of the spherical surface acoustic wave element.

  The container is preferably cylindrical except for the above-mentioned protrusions, but if the diameter is smaller than 0.5 mm compared to the diameter of the annular region of the spherical surface acoustic wave element, the surface of the chemical solution is placed in the space between the cylindrical container and the annular region. This is desirable because the chemical solution naturally enters the container due to the tension. Therefore, it is preferable that the inner diameter of the cylindrical container and the diameter of the spherical surface acoustic wave element are suppressed within a difference of 1 mm or less.

  The spherical surface acoustic wave element set in the cylindrical container was injected while applying a pressure of about 10 g weight from the upper part in the container to inject the sample liquid. It was possible for the sample liquid to immediately enter the gap between the spherical surface acoustic wave element and the cylindrical container by capillary action to treat the surface of the four spherical surface acoustic wave elements. Although expressed as a cylindrical container here, even a pipe without a bottom can hold and react the liquid by surface tension or the like, and the sample can be easily exchanged, and the present invention does not exclude it.

The amount of sample injected was 0.1 cc or less. When processing spherical spherical surface acoustic wave elements that do not have a flat surface in a lump, more than 10 times as many samples were required, indicating that measurement with a small amount of sample was easy. In particular, it is possible to prevent the protein from adhering to these regions outside the propagation path of the surface acoustic wave and resulting in deterioration of sensitivity because the chemical solution does not enter from the boundary where the elements are connected in a plane. done.

  In addition to the fact that multiple spherical surface acoustic wave elements are connected together to perform measurement in this way, in addition to the fact that the same conditions can be easily applied to the elements used, a large number of spherical elastic elements are used as shown below. The surface wave element can be easily measured. Whether or not protein has adhered to the surface of each spherical surface acoustic wave element is actually obtained by bringing the electrode probe 6 into contact with the interdigital electrode and measuring it with the spherical surface acoustic wave element drive measuring device 7. It was.

  In this figure, measurement is performed using a large number of probes so that evaluation can be performed in parallel from a plurality of elements. However, if measurement is performed while being connected in this manner, one of the three elements is subjected to surface measurement. The measurement results from the element without the antibody can be used for temperature calibration. Since the flat portion of each element is in close contact, there is almost no temperature difference and accurate calibration can be performed.

  In order to obtain the advantages described above, a piezoelectric crystal sphere such as quartz, preferably having a radius of curvature of the annular region of the spherical surface acoustic wave element, preferably at least 1.5 times the radius, is desirable. In the spherical surface acoustic wave element to be used, if the surface acoustic wave is excited to circulate in a band shape with an excessively large width, the circulatory efficiency is poor or the surface acoustic wave of high frequency cannot be circulated. It becomes impossible to react very sensitively to the influence of the substance to be detected adhering to the surface. Naturally, when the thickness between the flat portions is large, the effect of reducing the required sample amount is also small. In particular, it becomes difficult for the planar portions to naturally face each other by inserting a plurality of spherical surface acoustic wave elements in a tube or cylinder and vibrating the whole. When inserting a chemical solution with this scale, it is not shown in the figure because the air is trapped inside and alienates the intrusion of the chemical solution, but it is formed in the bottom of the cylindrical container or a tube without the bottom itself It is desirable.

  Another modified embodiment will be described below with reference to FIG. The logarithm of the interdigital electrode 2 used here is 4, the line and space of the alternately arranged charges is about 2 microns, and the overlapping width is 0.1 mm. The base material is made by polishing two surfaces corresponding to the poles of a 1 mm diameter crystal ball to a thickness of 0.4 mm. An electrode pad is formed on each of the two flat portions for connection at the time of measurement. Terminal 8 is used. The electrode pad shown in FIG. 5 has a ring shape, and a circular pad is formed in the center on the opposite side (lower side) in the figure. In the case where a plurality of elements are connected to the planar portion, a hydrophobic treatment may be formed along the outer periphery of the planar portion in order to prevent the sample solution from entering the gap. Or you may perform the process of piercing or hollowing a flat part. Chemical treatment is performed by connecting such elements, but the measurement method is different from the example described above. In this device, chemical treatment is performed in a coupled manner, but the measurement is performed by disassembling each element one by one and connecting to the analyzer using the plane portion of each element.

  As another embodiment, the spherical surface acoustic wave element may indicate an element having no interdigital electrode on its surface or a method of using the element. The spherical surface acoustic wave element used in this example uses the same base material as the spherical surface acoustic wave element used in Example 1, but is different in size. It is characterized in that no electrode is formed in advance. When actually measuring, a surface acoustic wave is excited on the surface by bringing a comb-shaped electrode closer to the surface of the substrate.

  The surface of each spherical surface acoustic wave element (where the interdigital electrode is not close but called here) is processed in the same manner as in the example, but actually measured by exciting the surface acoustic wave to the annular region. Only when you do.

FIG. 6 shows the measurement situation. A concave depression having a radius of curvature of 5 mm and an opening of 6 mm is formed, and the same line and space is formed on the concave surface from the deposited film of gold and chromium film as shown in the first embodiment.
An interdigital electrode having an overlap width of 1.1 mm and 8 microns was formed using photolithography.

  A spherical surface acoustic wave element having no electrode is installed on the concave surface from above, an RF burst signal in the vicinity of 45 MHz is applied to the interdigital electrode formed in a concave shape, and the spherical surface acoustic wave element is By exciting the surface acoustic wave that circulates and circulates around the Z-axis, the output measurement is amplified by the amplifier 11 using the high-frequency oscillator 10 through the matching circuit 9 and then analyzed by the signal analyzer 12. It can be carried out. In order to efficiently measure the surface wave, it is necessary to approach the surface of the element to a distance of one quarter or less of the wavelength of 71 μm in the surface acoustic wave element shape, preferably one-tenth or less. In order to keep the distance appropriate, the spacer structure must be constructed on the surface, but various shapes can be considered.

  As another embodiment, FIG. 7 shows a form in which a chemical solution introduction path which is a liquid to be measured connected to the inside of a spherical surface acoustic wave element is formed. The diameter of the spherical surface acoustic wave element used individually is 10 mm, and the thickness (distance between plane portions) is 4 mm. The interdigital electrode has a line and space of 17 μm and an oscillation frequency of 45 MHz. In the case of the spherical surface acoustic wave element 21 of this size, since the liquid cannot naturally enter due to the surface tension, a mechanism for injecting the chemical liquid as the liquid 23 to be measured forcibly supplied is necessary. For this reason, as shown in FIG. 8, a spherical surface acoustic wave element having a cavity so as to form a tunnel by being connected to the inside is effective.

  A small groove is formed in the flat surface portion of the spherical surface acoustic wave element 21, and even when the elements are connected, it is possible to extract chemicals and air (bubbles) from each individual. Further, the chemical liquid as the liquid to be measured 24 is supplied uniformly to the surface of all the spherical surface acoustic wave elements 21 using the internal connection cavity 22 and is discharged by suction. Is possible.

  It can be used as an apparatus for applying various chemical solutions such as a resist solution as a coating solution on a substrate.

It is a perspective view of the spherical surface acoustic wave element used for the surface acoustic wave element of this embodiment. It is a perspective view process drawing which shows the state of the process until it comprises a surface acoustic wave element from the spherical surface acoustic wave element of this embodiment. It is a perspective view process drawing which shows the state of the process after comprising a surface acoustic wave element from the spherical surface acoustic wave element of this embodiment according to FIG. It is a top view which shows the state in which the spherical elastic wave surface acoustic wave element of this embodiment of FIG. 2 was settled in the container. FIG. 2 is a perspective view of a spherical surface acoustic wave element used for the surface acoustic wave element of the present embodiment different from FIG. 1. It is a perspective process figure which shows the measurement state of the spherical surface acoustic wave element of this embodiment. It is a perspective process figure which shows the immersion state of the surface acoustic wave element at the time of using the spherical surface acoustic wave element which concerns on another embodiment. It is sectional drawing which shows the immersion state of the surface acoustic wave element at the time of using the spherical surface acoustic wave element which concerns on embodiment of FIG. It is a perspective view which shows an example of the conventional manufacturing process. It is a perspective view which shows an example of the conventional manufacturing process different from FIG. It is a perspective view which shows an example of the conventional manufacturing process different from FIG. It is a perspective view which shows an example of the conventional manufacturing process different from FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Crystal base material 2 Interdigital electrode 3 Surface acoustic wave 4 Z-axis 5 Sample solution 6 Electrode probe 7 Spherical surface acoustic wave element drive measuring device 8 Electrode terminal 9 Matching circuit 10 High frequency transmitter 11 Amplifier 12 Signal analysis device 13 Groove 21 Elasticity Surface wave element 22 Connection cavity 23 Liquid to be measured 24 Liquid to be measured 24 Liquid to be measured 25 Container 31 Annular region 32 Space where a large amount of liquid to be measured is required

Claims (7)

A base material having a region formed in at least a part of a spherical surface in the surface and continuous in an annular shape, and a surface acoustic wave is applied to the surface provided on the surface of the base material. A surface acoustic wave element including a surface acoustic wave generator that is generated in the continuous direction along the surface of the container, and is placed in a container fitted with the surface acoustic wave element. After injecting the liquid to be measured into the gap and taking it out of the liquid to be measured or removing the liquid to be measured, the surface acoustic wave generator is used to excite the surface acoustic wave and measure the velocity of the excited surface acoustic wave. A liquid measurement method using surface waves ,
The base material having at least a part of a spherical surface and having an annularly continuous region in the surface includes a plurality of spherical surface acoustic wave elements having a shape in which both poles are omitted from a spherical shape. It is a shape that is connected individually,
The electrode partial surface from which both the electrodes are missing is subjected to a liquid repulsion treatment to be measured.
A liquid measuring method using surface acoustic waves. 2. The method of measuring liquid by surface acoustic wave according to claim 1, wherein at least the region of the base material that is continuous in an annular shape is a piezoelectric material. 3. A liquid measuring method using surface acoustic waves according to claim 2, wherein interdigital electrodes are formed in the annularly continuous region. 2. The liquid measuring method using surface acoustic waves according to claim 1, wherein the two electrode partial surfaces from which the two electrodes are missing are in close contact with each other and subjected to a liquid repulsion process to be measured. 5. The surface acoustic wave according to claim 1 , wherein chemical treatment or gas treatment is performed in a shape in which a plurality of spherical surface acoustic wave elements each having a shape in which both poles are missing from the spherical shape are connected at a pole portion. Liquid measurement method by. 6. The surface acoustic wave according to claim 5, wherein the chemical solution or gas treatment is performed in the container to be fitted, and the container has a cylindrical shape, and the diameter of the cylinder is not larger than 1 mm from the diameter of the spherical shape. Liquid measurement method.   A base material having a region formed in at least a part of a spherical surface in the surface and continuous in an annular shape, and a surface acoustic wave is applied to the surface provided on the surface of the base material. A surface acoustic wave element having a surface acoustic wave generator for generating in a continuous direction along the surface, and
  A container fitted with the surface acoustic wave element,
  The base material having at least a part of a spherical surface and having an annularly continuous region in the surface includes a plurality of spherical surface acoustic wave elements having a shape in which both poles are omitted from a spherical shape. It is a shape that is connected individually,
  The electrode partial surface from which both the electrodes are missing is subjected to a liquid repulsion treatment to be measured.
A liquid measuring apparatus characterized by the above.

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