JP4347549B2 - スピンコート装置 - Google Patents

スピンコート装置 Download PDF

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Publication number
JP4347549B2
JP4347549B2 JP2002213570A JP2002213570A JP4347549B2 JP 4347549 B2 JP4347549 B2 JP 4347549B2 JP 2002213570 A JP2002213570 A JP 2002213570A JP 2002213570 A JP2002213570 A JP 2002213570A JP 4347549 B2 JP4347549 B2 JP 4347549B2
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JP
Japan
Prior art keywords
magnetic field
magnetic
substrate
spin
reference example
Prior art date
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Expired - Fee Related
Application number
JP2002213570A
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English (en)
Japanese (ja)
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JP2004055075A (ja
JP2004055075A5 (https=
Inventor
宏喜 児玉
宣孝 井原
悟 百瀬
拓也 渦巻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
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Fujitsu Ltd
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Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2002213570A priority Critical patent/JP4347549B2/ja
Publication of JP2004055075A publication Critical patent/JP2004055075A/ja
Publication of JP2004055075A5 publication Critical patent/JP2004055075A5/ja
Application granted granted Critical
Publication of JP4347549B2 publication Critical patent/JP4347549B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP2002213570A 2002-07-23 2002-07-23 スピンコート装置 Expired - Fee Related JP4347549B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002213570A JP4347549B2 (ja) 2002-07-23 2002-07-23 スピンコート装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002213570A JP4347549B2 (ja) 2002-07-23 2002-07-23 スピンコート装置

Publications (3)

Publication Number Publication Date
JP2004055075A JP2004055075A (ja) 2004-02-19
JP2004055075A5 JP2004055075A5 (https=) 2005-10-27
JP4347549B2 true JP4347549B2 (ja) 2009-10-21

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ID=31936131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002213570A Expired - Fee Related JP4347549B2 (ja) 2002-07-23 2002-07-23 スピンコート装置

Country Status (1)

Country Link
JP (1) JP4347549B2 (https=)

Also Published As

Publication number Publication date
JP2004055075A (ja) 2004-02-19

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