JP4347549B2 - スピンコート装置 - Google Patents

スピンコート装置 Download PDF

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Publication number
JP4347549B2
JP4347549B2 JP2002213570A JP2002213570A JP4347549B2 JP 4347549 B2 JP4347549 B2 JP 4347549B2 JP 2002213570 A JP2002213570 A JP 2002213570A JP 2002213570 A JP2002213570 A JP 2002213570A JP 4347549 B2 JP4347549 B2 JP 4347549B2
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JP
Japan
Prior art keywords
magnetic field
magnetic
substrate
spin
reference example
Prior art date
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Expired - Fee Related
Application number
JP2002213570A
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English (en)
Japanese (ja)
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JP2004055075A5 (enExample
JP2004055075A (ja
Inventor
宏喜 児玉
宣孝 井原
悟 百瀬
拓也 渦巻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
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Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2002213570A priority Critical patent/JP4347549B2/ja
Publication of JP2004055075A publication Critical patent/JP2004055075A/ja
Publication of JP2004055075A5 publication Critical patent/JP2004055075A5/ja
Application granted granted Critical
Publication of JP4347549B2 publication Critical patent/JP4347549B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP2002213570A 2002-07-23 2002-07-23 スピンコート装置 Expired - Fee Related JP4347549B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002213570A JP4347549B2 (ja) 2002-07-23 2002-07-23 スピンコート装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002213570A JP4347549B2 (ja) 2002-07-23 2002-07-23 スピンコート装置

Publications (3)

Publication Number Publication Date
JP2004055075A JP2004055075A (ja) 2004-02-19
JP2004055075A5 JP2004055075A5 (enExample) 2005-10-27
JP4347549B2 true JP4347549B2 (ja) 2009-10-21

Family

ID=31936131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002213570A Expired - Fee Related JP4347549B2 (ja) 2002-07-23 2002-07-23 スピンコート装置

Country Status (1)

Country Link
JP (1) JP4347549B2 (enExample)

Also Published As

Publication number Publication date
JP2004055075A (ja) 2004-02-19

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