JP4345293B2 - Functional liquid filling method for liquid droplet ejection device and liquid droplet ejection device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a droplet discharge method for filling an inkjet droplet discharge head with a functional liquid such as ink stored in a functional liquid tank.apparatusThe functional liquid filling method and the liquid droplet ejection apparatus.
[0002]
[Prior art]
Conventionally, in a droplet discharge device such as an ink jet printer, the droplet discharge head is driven to discharge, so that the functional liquid in the functional liquid tank is supplied to the droplet discharge head via a supply line. . Further, in order to eliminate nozzle clogging and the like, a suction unit for forcibly sucking the functional liquid from the droplet discharge head (cleaning process) is provided (for example, see Patent Document 1).
In this droplet discharge device, when the droplet discharge head is initially filled with the functional liquid, the above-described suction unit is used to suck the functional liquid from the droplet discharge head together with air. In other words, by utilizing the suction unit, the inside of the supply line is made negative pressure, the functional liquid in the functional liquid tank is sent, and the functional liquid is filled in the supply line and the flow path in the head of the droplet discharge head. is doing.
On the other hand, by applying a positive pressure to the sealed functional liquid tank with compressed air such as an inert gas and feeding the functional liquid in the functional liquid tank through the supply pipe, There is also known one that fills a flow path in the head of a discharge head with a functional liquid (for example, see Patent Document 2).
[0003]
[Patent Document 1]
JP-A-10-286974 (2nd page, FIG. 5)
[Patent Document 2]
JP 2000-21160 (2nd page, FIG. 6)
[0004]
[Problems to be solved by the invention]
By the way, if bubbles remain in the flow path in the head, the droplet discharge head causes nozzle discharge failure. On the other hand, a special functional liquid such as ink that cannot be degassed may be used in a droplet discharge apparatus used for forming various film forming portions of a color filter or an organic EL device.
In the conventional filling method using negative pressure in Patent Document 1, bubbles may be generated in the supply pipe line by the dissolved gas depending on the properties of the functional liquid. In such a case, in order to eliminate residual bubbles, it is necessary to discharge the bubbles together with the functional liquid from the flow path in the head through the nozzle several times, and there is a problem in that expensive functional liquid is wasted. .
Further, in the conventional positive pressure filling method of Patent Document 2, when the air pressure acts on the liquid surface of the functional liquid, the gas component of the compressed air dissolves in the functional liquid, so that the dissolved gas amount of the functional liquid increases. There is a fear. For this reason, when a decompression phenomenon occurs in the supply line, such as when the pressure returns to atmospheric pressure after completion of filling, or when a cleaning process (suction of functional liquid) is performed, bubbles are generated in the supply line, resulting in a negative pressure. This causes the same problem as in the case of filling with.
[0005]
  The present invention provides a liquid droplet ejection device that can reliably fill a liquid droplet ejection head with a functional liquid without generating bubbles in a pipe leading to the liquid droplet ejection head.apparatusIt is an object of the present invention to provide a functional liquid filling method and a droplet discharge device.
[0006]
[Means for Solving the Problems]
  Droplet ejection of the present inventionapparatusThe functional liquid filling method ofThe machineVia the supply line from the working fluid tankLiquidFunctional liquid supply system for supplying functional liquid to the droplet discharge headHaveDroplet dischargeapparatusThe functional liquid filling method ofFrom functional fluid tankEliminate the air,In the functional fluid tankFunctional fluidStorageDoStorageProcess andThe machineA filling process of pressurizing and feeding the functional liquid in the functional liquid tank to fill the flow path in the head of the supply pipe and the droplet discharge head;While closing the supply side opening and closing valve provided in the supply pipeline,Connect the cap connected to the suction pump to the droplet discharge head.ToAdhesionLet, Drive the suction pump to suck the functional liquid from the nozzle of the droplet discharge headFirstA suction process;A second suction step of driving the suction pump and opening the supply side opening / closing valve to suck the functional liquid from the nozzle;The filling process isThe machineFor the functional fluid in the functional fluid tankTouchandFunctional fluidPressurizationTo doIt is performed using the movable member comprised in (5).
[0007]
  According to this configuration, when the movable member moves relative to the functional liquid tank in which the functional liquid is sealed by excluding air, the functional liquid in the functional liquid tank undergoes volume deformation in the functional liquid tank due to pressurization. The liquid then flows out to the supply pipe and is fed to the droplet discharge head via the supply pipe. Thus, since the movable member is in liquid-tight contact with the functional liquid and is pressurized, air does not contact the functional liquid at all and air does not dissolve in the functional liquid. Thereby, regardless of the degassing rate of the functional liquid, it is possible to suitably prevent the generation of bubbles of the functional liquid in the supply pipe line and the flow path in the head even during and after the filling.
  In addition, a negative pressure is applied to the droplet discharge head after the functional liquid is filled with a positive pressure by the movable member. As a result, even if bubbles remain in the droplet discharge head (the flow path in the head), the remaining bubbles can be expanded by the pressure reducing effect and appropriately discharged from the droplet discharge head together with the functional liquid. it can.
[0008]
In this case, it is preferable that the movable member is a piston having the inner surface of the functional liquid tank as a cylinder.
[0009]
According to this configuration, the piston can be moved while maintaining a liquid-tight state with respect to the functional liquid between the functional liquid tank and the inner surface of the functional liquid tank. For this reason, the functional liquid can be efficiently fed without contacting with air.
[0010]
Similarly, in this case, it is preferable that the movable member is a film body having the inner surface of the functional liquid tank as a fixed portion.
[0011]
According to this configuration, the film body can be moved while maintaining a liquid-tight state with respect to the functional liquid between the functional liquid tank and the inner surface of the functional liquid tank effectively as described above. For this reason, the functional liquid can be efficiently fed without contacting with air. The film body includes a diaphragm and a bellows.
[0014]
  Other droplet ejection of the present inventionapparatusThe functional fluid filling method of the functional fluid tank is connected via a supply line.LiquidFunctional liquid supply system for supplying functional liquid to the droplet discharge headHaveDroplet dischargeapparatusIn this functional liquid filling method, using a tube pump facing the supply pipe, with the inside of the functional liquid tank open to the atmosphere, the tube pump is driven, and the functional liquid in the functional liquid tank is pressurized and fed, A filling step of filling the supply pipe and the liquid flow in the head of the droplet discharge head with the functional liquid;,liquidUsing a suction means for sucking the functional liquid from the nozzle of the droplet discharge head through a cap that is in close contact with the droplet discharge head,While closing the supply side opening and closing valve provided in the supply pipeline,Aspirate the functional liquid from the nozzle of the droplet discharge headFirstA suction process;A second suction step of driving the suction pump and opening the supply side opening / closing valve to suck the functional liquid from the nozzle;It is provided with.
[0015]
  According to this configuration, the functional liquid is pressurized and fed from the functional liquid tank to the droplet discharge head by handling the supply pipe line with the tube pump. At this time, the inside of the functional liquid tank is opened to the atmosphere. . Thereby, it is possible to avoid applying negative pressure to the functional liquid in the functional liquid tank as much as possible when the functional liquid is sucked by the tube pump. Further, the functional liquid can be pumped to the droplet discharge head without generating bubbles in the supply pipe line and without dissolving air in the functional liquid.
  Further, even if bubbles remain in the droplet discharge head (the flow path in the head), the remaining bubbles can be expanded by the pressure reducing effect and appropriately discharged from the droplet discharge head together with the functional liquid. .
[0016]
  The liquid droplet ejection apparatus of the present invention performs drawing by relatively scanning the liquid droplet ejection head with respect to the workpiece, and from the functional liquid tank storing the functional liquid to the liquid droplet ejection head via the supply line. A droplet discharge device for supplyingThe machineFor the functional fluid in the functional fluid tankTouchandFunctional fluidPressurizationTo doA movable member configured as described above, a power mechanism for moving the movable member,A supply-side on-off valve provided in the supply line;A suction mechanism for sucking the functional liquid from the nozzle of the droplet discharge head via a cap that is in close contact with the droplet discharge head; and a power mechanism.Supply side open / close valveAnd a control means for controlling the suction means, and the control means drives the power mechanism to remove the air and remove the functional liquid.StorageBy moving the movable member relative to the functional liquid tank, the functional liquid in the functional liquid tank is pressurized and fed, and the supply liquid and the liquid passage in the head of the droplet discharge head are filled with the functional liquid, and then suction is performed. Driving means to suck the functional liquid from the droplet discharge headThe suction of the droplet discharge head closes the supply side opening / closing valve and drives the suction means to suck the functional liquid from the droplet discharge head, and drives the suction means and opens and closes the supply side. A second suction for opening the valve and sucking the functional liquid from the droplet discharge head.It is characterized by that.
[0017]
  According to this configuration, when the droplet discharge head is filled with the functional liquid, the movable member is moved by driving the power mechanism with respect to the functional liquid tank in which the functional liquid is sealed by removing air. Pressurize the functional fluid in the functional fluid tank. As a result, the functional liquid in the functional liquid tank is deformed in volume and flows out to the supply pipe, and is sent to the droplet discharge head through the supply pipe. At this time, the movable member is liquid-tight to the functional liquid. Since the liquid is in contact with and pressurized, there is no air contact with the functional liquid, and no air is dissolved in the functional liquid. For this reason, regardless of the degassing rate of the functional liquid, it is possible to suitably prevent the generation of bubbles in the functional liquid in the supply pipe line and the flow path in the head even after filling, which is performed at the time of filling and non-filling.
  In addition, a negative pressure is applied to the droplet discharge head after the functional liquid is filled with a positive pressure by the movable member. As a result, even if bubbles remain in the droplet discharge head (the flow path in the head), the remaining bubbles can be expanded by the pressure reducing effect and appropriately discharged together with the functional liquid from the droplet discharge head. .
  Further, since the liquid droplet discharge head is appropriately filled with the functional liquid, it is possible to prevent discharge defects due to bubbles (so-called dot dropout) and appropriately discharge the functional liquid droplets onto the workpiece. The work includes a recording medium such as a cut sheet as well as various substrates such as a color filter described later.
[0018]
In this case, it is preferable that the movable member is constituted by a piston having the inner surface of the functional liquid tank as a cylinder.
[0019]
According to this configuration, the piston can be moved while maintaining a liquid-tight state with respect to the functional liquid between the functional liquid tank and the inner surface of the functional liquid tank. For this reason, the functional liquid can be efficiently fed without contacting with air.
[0020]
Similarly, it is preferable that the movable member is composed of a film body having the inner surface of the functional liquid tank as a fixed portion.
[0021]
According to this configuration, the film body can be moved while maintaining a liquid-tight state with respect to the functional liquid between the functional liquid tank and the inner surface of the functional liquid tank effectively as described above. For this reason, the functional liquid can be efficiently fed without contacting with air. The film body includes a diaphragm and a bellows.
[0022]
  In these cases, a main tank that stores the functional liquid to be supplied to the functional liquid tank via the supply pipeline and functions as the sub tank, ComplementA replenishment side opening / closing valve interposed in the supply line and controlled to open / close by the control means, the power mechanism is configured to reciprocate the movable member, and the control means drives the power mechanism during filling The supply side opening / closing valve is opened and the replenishment side opening / closing valve is closed in synchronization with the forward movement of the movable member in the pressurizing direction, and the supply side opening / closing valve is closed in synchronization with the backward movement of the movable member. It is preferable to open the replenishment side opening / closing valve.
[0023]
According to this configuration, when the functional liquid is filled, the power mechanism functions as a single-acting reciprocating pump with the movable member as a main component, and the supply-side on-off valve and the replenishment-side on-off valve are synchronized with the reciprocating movement of the movable member. Are controlled individually and in association with each other. As a result, when the movable member moves forward, the functional liquid in the functional liquid tank (sub tank) can be fed to the droplet discharge head in a state where pressure feeding to the main tank is prevented. In addition, when the movable member moves backward, the functional liquid in the main tank can be supplied to the functional liquid tank while maintaining the liquid-tight state between the movable member and the functional liquid in the functional liquid tank, and the supply side opening / closing valve is closed. Thus, the back flow of the functional liquid in the supply pipe line can be prevented.
In addition, if the power mechanism is configured by an actuator as a drive source, a rod connected to the movable member, and a power transmission unit that connects the rod and the actuator, the stroke of the reciprocating motion of the movable member can be accurately taken. it can. For example, when the actuator is configured by a motor, the power transmission unit may be configured by a ball screw or a cam mechanism.
[0024]
  In this case, pressurize the main tank,ConcernedIt is preferable that the apparatus further includes a pressurized liquid feeding means for pressure-feeding the functional liquid in the main tank to the functional liquid tank, and the control means preferably drives the pressurized liquid feeding means in synchronization with the backward movement of the movable member. .
[0025]
According to this configuration, since the movable member is moved backward while the functional liquid in the main tank is pressurized and fed to the functional liquid tank, the movable member can be easily returned to the forward movement start position.
[0026]
In these cases, the control means is further controlled to open and close, and further includes an air release valve that opens the inside of the functional liquid tank to the atmosphere. The control means closes the air release valve at the time of filling and controls the atmosphere at the time of non-filling. It is preferred to open the open valve.
[0027]
According to this configuration, the liquid-tight state between the functional liquid tank and the movable member can be appropriately managed at the time of filling by the atmosphere release valve. On the other hand, at the time of non-filling such as drawing on the workpiece, which will be described later, the functional liquid tank is opened to the atmosphere without being affected by the movable member, and a predetermined water head value between the functional liquid tank and the droplet discharge head is appropriately set. It becomes possible to manage.
[0037]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a functional liquid filling method and apparatus for a liquid droplet ejection head and a liquid droplet ejection apparatus according to the present invention will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a production line for flat panel displays such as organic EL devices, and by using an inkjet method, functional droplets such as filter materials and light emitting materials from a droplet discharge head to a substrate (work). Is selectively ejected to form a desired film forming portion on the substrate.
[0038]
As shown in FIGS. 1 to 4, the droplet discharge device 1 includes a droplet discharge head 2 having the droplet discharge head 20 shown in FIG. 6, and maintenance for performing maintenance processing on the droplet discharge head 20. Means 3, functional liquid supply means 4 for supplying functional liquid to the droplet discharge head 20, and control means 5 (see FIG. 9) for overall control of these means. The droplet discharge device 1 includes a gantry 11 having a stone surface plate 13 fixed to the upper part and a machine gantry 12 attached to the gantry 11. Discharge means 2 is disposed on the stone surface plate 13, and a work W (substrate, see FIG. 4), which is a droplet object, is set below corresponding to the droplet discharge head 20 on the upper side. ing. The workpiece W is made of, for example, a glass substrate or a polyimide substrate.
[0039]
The machine base 12 has a large storage chamber 14 on the near side for storing tanks such as the main tank 101 of the functional liquid supply means 4, and a small storage chamber 15 on the back side. A tank base 16 on which the liquid supply sub tank 102 of the functional liquid supply means 4 is placed is installed on the small storage chamber 15. As will be described in detail later, the liquid supply subtank 102 functions as a subtank with respect to the main tank 101, and the functional liquid in the liquid supply subtank 102 is supplied to the liquid droplet ejection head 20 by the ejection driving of the liquid droplet ejection head 20.
[0040]
A movable table 17 is installed on the large storage chamber 14 so as to be slidable in the longitudinal direction of the machine base 12 (that is, in the X-axis direction). On the moving table 17, a common base 18 on which a suction unit 72 and a wiping unit 73 (both described later) of the maintenance means 3 are placed is fixed.
[0041]
The ejection unit 2 includes a head unit 21 having a plurality of droplet ejection heads 20 (see FIGS. 2 and 5), a main carriage 22 on which the head unit 21 is mounted, and the head unit 21 via the main carriage 22 as a work W. And an X / Y moving mechanism 23 for relatively moving in the X / Y axis direction. The X / Y moving mechanism 23 is disposed on the stone surface plate 13, and moves the workpiece W in the X-axis direction. The X / Y moving mechanism 23 is orthogonal to the X-axis table 25 and moves the main carriage 22 in the Y-axis direction. The Y-axis table 26 is disposed above the X-axis table 25 so as to straddle the X-axis table 25.
[0042]
The X-axis table 25 is composed mainly of a linear motor, and moves the workpiece W in the X-axis direction via a suction table 27 (see FIG. 4) on which the workpiece W is suction-mounted. The Y-axis table 26 is mainly composed of a ball screw, and moves the droplet discharge head 20 in the Y-axis direction via a bridge plate 28 to which the main carriage 22 is fixed.
[0043]
In a series of operations by the discharge means 2, a plurality of droplet discharge heads 20 are selectively driven to discharge in synchronization with the movement of the workpiece W in the main scanning direction (X-axis direction) by the X-axis table 25. That is, so-called main scanning of the droplet discharge head 20 is performed by a reciprocating operation of the workpiece W by the X-axis table 25, and so-called sub-scanning is performed correspondingly to the Y of the droplet discharge head 20 by the Y-axis table 26. This is performed by a forward movement operation that is a pitch feed operation in the axial direction. In this way, the drawing operation for discharging the functional liquid to a predetermined position of the work W by performing the main scanning and the sub scanning of the droplet discharge head 20 relative to the work W by the X / Y moving mechanism 23 is performed by the control means. 5 is executed based on the data stored in 5.
[0044]
Although the workpiece W is moved in the main scanning direction with respect to the droplet discharge head 20 (head unit 21), a configuration in which the droplet discharge head 20 is moved in the main scanning direction may be used. Alternatively, the work W may be fixed and the droplet discharge head 20 may be moved in the main scanning direction and the sub-scanning direction.
[0045]
As shown in FIGS. 5 and 6, the head unit 21 has a sub-carriage 29 on which a plurality (12) of droplet discharge heads 20 are mounted, and is fixed to the main carriage 22 at the sub-carriage 29. . The twelve droplet discharge heads 20 are divided into two rows of six, and are arranged apart from each other in the main scanning direction (X-axis direction). Each droplet discharge head 20 is disposed at a predetermined angle with respect to the workpiece W in order to ensure a sufficient application density of functional droplets. Further, the droplet discharge heads 20 in one column and the other column are disposed so as to be displaced from each other with respect to the sub-scanning direction (Y-axis direction). The nozzles 49 are continuous (partially overlap).
[0046]
As shown in FIG. 6, the droplet discharge head 20 has a so-called double structure, and a functional liquid introduction section 42 having two connection needles 41, and a double head substrate 43 continuous with the functional liquid introduction section 42. And a head main body 44 which is connected to the lower side of the functional liquid introduction part 42 (upper side in FIG. 5A) and in which an in-head flow path filled with the functional liquid is formed. This type of ink jet type droplet discharge head 20 is configured by using a piezoelectric element (piezo element) as an energy generating element for driving ejection or using an electrothermal transducer.
[0047]
Each connection needle 41 is connected to the liquid supply sub tank 102 via the pipe adapter 30, and the functional liquid introduction part 42 receives supply of the functional liquid from each connection needle 41. In other words, the functional liquid is pressure-supplied from the main tank 101 of the functional liquid supply means 4 to the liquid supply subtank 102, but the liquid is subdivided in pressure by this liquid supply subtank 102, and branches from the liquid supply subtank 102 to drop each droplet. It is supplied to the ejection head 20 (details will be described later with reference to FIG. 8).
[0048]
The head body 44 includes a nozzle forming plate 46 having a nozzle surface 45 and two rectangular parallelepiped pump portions 47 connected to the nozzle forming plate 46. In the droplet discharge head 20, the head main body 44 protrudes from the lower surface of the sub-carriage 29, and two nozzle rows 48 are mutually connected to the lower surface of the head main body 44, that is, the nozzle surface 45 facing the workpiece W in parallel. They are formed in parallel. Each nozzle row 48 extends substantially in the main scanning direction. For example, 180 nozzles 49 are arranged at an equal pitch. The droplet discharge head 20 discharges functional droplets from the nozzle 49 in the form of dots by the action of the pump unit 47.
[0049]
The maintenance means 3 is for maintaining the droplet discharge head 20 so that the droplet discharge head 20 can appropriately discharge the functional liquid. In particular, as shown in FIG. A pair of flushing boxes 71 sandwiched and fixed to the X-axis table 25, a suction unit 72 disposed on the machine base 12 side, and a wiping unit 73 disposed adjacent to the suction unit 72 are provided. Each flushing box 71 receives flushing (preliminary ejection: discarding functional liquid droplets from all nozzles 49) of the plurality of liquid droplet ejection heads 20.
[0050]
The suction unit 72 is mounted on the common base 18 of the machine base 12 and is configured to be slidable in the X-axis direction via the moving table 17 to which the common base 18 is fixed. The suction unit 72 forcibly sucks the functional liquid from the droplet discharge head 20 and is mainly used for cleaning to remove the functional liquid thickened in the droplet discharge head 20.
[0051]
As shown in FIGS. 7 and 8, the suction unit 72 includes a cap unit 82 incorporating 12 caps 81 corresponding to the 12 droplet discharge heads 20, a lifting mechanism 84 that moves the cap unit 82 up and down, A suction pump 85 that sucks the functional liquid through the cap 81 and a suction tube 86 that connects the cap 81 and the suction pump 85 are provided. The functional liquid sucked by the suction pump 85 is guided from the suction tube 86 and the collection tube 87 to the reuse tank 88. In addition, the reuse tank 88 is accommodated in said large accommodation chamber 14 (refer FIG. 3).
[0052]
The cap 81 includes a cap main body 91 configured to be in close contact with the peripheral portion of the nozzle surface 45 of the droplet discharge head 20 and a cap holder 92 that fixes the cap main body 91 to the base. The suction tube 86 includes, in order from the cap 81 side, a liquid sensor 93 that detects the presence or absence of functional liquid, a pressure sensor 94 that detects the pressure in the suction tube 86, and a suction tube that closes the suction tube 86. An opening / closing valve 95 is interposed, and the pipe line is integrated in front of the suction pump 85 and connected thereto.
[0053]
When the droplet discharge head 20 is subjected to suction processing, the suction unit 72 is moved to a predetermined position in the X-axis direction by the moving table 17, and the droplet discharge head 20 is moved to the position of the suction unit 72 after the movement. It is moved by the Y moving mechanism 23. Here, the elevating mechanism 84 is driven to raise the cap unit 82, and the cap 81 is brought into close contact with the nozzle surface 45 to seal the droplet discharge head 20. In this state, the suction open / close valve 95 is opened and the suction pump 85 is driven, so that the functional liquid is sucked by the twelve droplet discharge heads 20 at a time.
[0054]
In addition to the relatively high ascending position (contact position) of the cap unit 82 that performs the suction process, the elevating mechanism 84 is moved to a relatively low ascending position where the cap 81 is slightly separated from the droplet discharge head 20. The suction unit 72 can function as a flushing box, and, as will be described later, the functional liquid can be received even in the (initial) filling of the functional liquid into the droplet discharge head 20, as will be described later. Can function as.
[0055]
As shown in FIGS. 1, 3, and 4, the wiping unit 73 is placed on the common base 18 adjacent to the suction unit 72. The wiping unit 73 wipes the nozzle surface 45 of each droplet discharge head 20 contaminated by droplet mist with a wiping sheet (not shown). This wiping process is basically performed by the droplet discharge head 20. This is performed after the suction process.
[0056]
For example, when the cleaning (suction) of the droplet discharge head 20 is completed, the wiping unit 73 is moved to a position facing the droplet discharge head 20 by the moving table 17. Then, the wiping unit 73 feeds out the roll-shaped wiping sheet, makes the slidable contact with the nozzle surface 45 of the droplet discharge head 20, wipes the nozzle surface 45, and winds the wiped sheet after wiping.
[0057]
As shown in FIG. 8, the functional liquid supply unit 4 includes a main tank 101 that stores a large amount (for example, 3 L) of functional liquid, and a liquid supply sub tank that supplies the functional liquid from the main tank 101 to each droplet discharge head 20. 102 (functional liquid tank), an air release valve 103 that opens the inside of the liquid supply subtank 102 to the atmosphere, a first supply tube 104 (supply line) that pipe-connects the main tank 101 and the liquid supply subtank 102, and a liquid supply A second supply tube 105 (replenishment conduit) that pipe-connects the sub tank 102 and each droplet discharge head 20, and an air supply mechanism 106 (pressurized liquid supply means) that supplies compressed air to the main tank 101 and pressure-feeds functional fluid. And.
[0058]
The main part of the air supply mechanism 106 is accommodated in the small accommodating chamber 15 of the machine base (see FIG. 3). The air supply mechanism 106 includes nitrogen (N₂) And the like, an air pump 111 serving as a supply source for supplying compressed air compressed with an inert gas, an air supply tube 112 connecting the air pump 111 and the main tank 101, and an air supply tube 112. And a regulator 113 for keeping the air at a predetermined constant pressure. The main tank 101 is pressurized by the compressed air transmitted through the air supply tube 112, and the functional liquid in the main tank 101 is pressurized and fed to the liquid supply sub tank 102 via the first supply tube 104.
[0059]
The first supply tube 104 is provided with a liquid level adjustment valve 116 that closes the first supply tube 104 and a deaeration mechanism 117 that removes a gas component dissolved in the functional liquid in order from the main tank 101 side. Has been. The functional liquid sent to the liquid supply sub tank 102 by the deaeration mechanism 117 is supplied in a state where the compressed air dissolved by the air supply mechanism 106 is removed. The liquid level adjusting valve 116 adjusts the feeding of the functional liquid from the main tank 101.
[0060]
Specifically, the liquid level adjustment valve 116 is appropriately controlled to open and close (timer control) by the control means 5 based on the detection result of the liquid level detector 118 provided in the liquid supply sub tank 102 and stored in the liquid supply sub tank 102. The height difference (water head value) between the liquid level of the functional liquid and the nozzle surface 45 of the droplet discharge head 20 is adjusted to be within a predetermined management range (for example, 25 mm ± 0.5 mm).
[0061]
Thereby, liquid dripping from the nozzle 49 of the droplet discharge head 20 is prevented, and the droplet is stored in the liquid supply sub-tank 102 by the pumping operation of the droplet discharge head 20, that is, the pump driving of the piezoelectric element in the pump unit 47. The functional liquid is supplied to the droplet discharge head 20 via the second supply tube 105, and the droplet is discharged with high accuracy. When the droplet discharge head 20 discharges droplets, the atmosphere release valve 103 is opened and the liquid supply sub tank 102 is opened to the atmosphere.
[0062]
The second supply tube 105 has one end connected to the liquid supply sub tank 102 and the other end branched from the pipe line via the T-shaped joint 121, and then ejects liquid droplets via the pipe adapter 30. It is connected to the head 20. Specifically, six second supply tubes 105 are connected to the liquid supply subtank 102, and the six second supply tubes 105 correspond to the six droplet discharge heads 20 and the six T supply tubes 105. A total of twelve second branch tubes 122 are formed by being branched into two via the character joints 121. Each of the second branch tubes 122 is further branched into two before the droplet discharge head 20 and connected to the two connection needles 41 of the droplet discharge head 20 via the two pipe adapters 30 (see FIG. 5, see FIG.
[0063]
The second branch tube 122 is provided with a supply valve 123 for closing the functional liquid flow path and a liquid detection sensor 124 for detecting the presence or absence of the functional liquid in order from the T-shaped joint 121 side. . The supply valve 123 is normally open, and is closed during the initial functional liquid filling operation described later. The liquid detection sensor 124 is also used mainly during the initial filling operation of the functional liquid.
[0064]
Note that, instead of the configuration of the present embodiment, the main tank 101 is formed of a bag-shaped film, which is housed in a cartridge case in a non-airtight state, and the cartridge case is formed of aluminum or the like (not shown). It is good also as a structure which pressurizes the bag-shaped main tank 101 via a pressurization box while accommodating separately. For example, a vent hole or the like is provided in the cartridge case and communicates with the inside of the pressure box so that the pressure inside the pressure box and the inside of the cartridge case are kept at the same pressure. Then, by supplying compressed air from the air supply mechanism 106 to the pressurizing box, the inside of the cartridge case is pressurized and the main tank 101 is deformed to supply the functional liquid in the main tank 101 to the liquid supply sub tank 102. To do. According to this, the deaeration mechanism 117 described above can be dispensed with.
[0065]
The control unit 5 includes a CPU and includes a control unit that controls the operation of each unit (mainly, the discharge unit 2, the maintenance hand 3, and the functional liquid supply unit 4). The control unit includes a control program and control data. And a work area for performing various control processes. The control unit 5 is connected to each of the above-described units (2, 3, 4) to control the entire droplet discharge device 1, and the droplet discharge device 1 performs a drawing operation, an initial filling operation, and the like.
[0066]
For example, when a drawing operation is performed on the workpiece W, the control unit 5 controls the ejection driving of the plurality of droplet ejection heads 20, and the relative movement between the workpiece W and the head unit 21 by the X / Y movement mechanism 23. The general movement behavior. Further, during the drawing operation, the functional liquid supply means 4 is controlled to basically manage the liquid level of the functional liquid in the liquid supply sub-tank 102 that is open to the atmosphere, and the suction unit 72 and the wiping unit of the maintenance means 3. In step 73, suction processing and wiping processing are performed on the droplet discharge head 20.
[0067]
By the way, when the droplet discharge device 1 is newly installed or when the droplet discharge head 20 is replaced, a filling operation for filling the flow path in the head of the droplet discharge head 20 with the functional liquid (abbreviated as initial filling operation). Need to do. Since the initial filling operation cannot be performed by the pumping operation (discharge driving) of the droplet discharge head 20, it is necessary to forcibly supply the functional liquid in the liquid supply subtank 102. In addition, it is necessary to prevent bubbles from being generated in the flow path in the head. Therefore, the functional liquid supply means 4 around the liquid supply sub tank 102 of the present embodiment has a configuration suitable for the initial filling operation.
[0068]
As shown in FIG. 9, the functional liquid supply means 4 includes a piston 141 (movable member) facing the liquid supply sub tank 102 and a power mechanism 142 that reciprocates the piston 141. Correspondingly, the liquid supply sub-tank 102 includes a tank main body 151 that stores the functional liquid, and a cylinder 152 that is connected to the tank main body 151 and in which the piston 141 reciprocates.
[0069]
The tank body 151 is formed to have a larger diameter than the cylinder 152. The lower end of the tank body 151 is connected to the first supply tube 104 and the second supply tube 105, and the liquid The position detector 118 is facing. In addition, the atmosphere release valve 103 that opens the liquid supply subtank 102 to the atmosphere communicates with a boundary portion between the tank main body 151 and the cylinder portion 152. A liquid level sensor 155 for detecting the liquid level of the functional liquid is provided facing the valve piping portion of the air release valve 103 (a position corresponding to the forward movement start position of the piston 141). The liquid level detector 118 is connected to the control means 5 and the atmosphere release valve 103 is controlled to be opened and closed by the control means 5.
[0070]
The piston 141 is configured to be able to come into liquid-tight contact with the functional liquid in the liquid supply sub-tank 102 and to be pressurized, and is provided on the piston main body 161 having a liquid contact surface and the peripheral portion of the piston main body 161. A seal member 162 such as an O-ring and a piston rod 163 provided on the side opposite to the liquid contact surface of the piston main body 161 are configured. The piston main body 161 is fully stored in the tank main body 151 of the liquid supply sub-tank 102 and is in contact with the functional liquid stored in the cylinder portion 152 beyond this. The seal member 162 is made of an elastic material such as fluorine rubber having solvent resistance to the functional liquid, and is located between the piston main body 161 and the inner surface of the cylinder portion 152.
[0071]
With such a configuration, when the air release valve 103 is opened and air is previously removed from the liquid supply subtank 102 so that the functional liquid is in a sealed state, the piston 141 (the piston body 161 and the seal member 162 thereof) It is possible to pressurize the functional liquid while being in liquid-tight contact with the liquid and maintaining this state. That is, the functional liquid is fully stored in the storage space 165 constituted by the piston 141 and the liquid supply sub tank 102. In this state, when the piston 141 pressurizes the functional liquid in a liquid-tight manner (moves downward), the functional liquid undergoes volume deformation and flows out to the second supply tube 105, and is pressurized and fed to the droplet discharge head 20. The
[0072]
Although not shown in detail in any detail, the power mechanism 142 includes an actuator such as a motor or an air cylinder that serves as a drive source, and a power transmission unit that connects the actuator and the piston rod 163, and reciprocates the piston 141 in the vertical direction. Move. The driving of the actuator is controlled by the control means 5. For example, when the actuator is configured by a motor, the power transmission unit is configured by a ball screw, a cam mechanism, a link mechanism (crank mechanism), etc. Stroke can be taken accurately.
[0073]
Here, a series of controls by the control means 5 when performing the initial filling operation will be described with reference to FIGS. The initial filling operation is performed in a state where the droplet discharge head 20 (head unit 21) is moved directly above the suction unit 72 and the cap unit 82 is raised to the relatively low position. Thereby, the functional liquid that oozes out (discharges) from the droplet discharge head 20 during the initial filling can be received by the cap 81 without being scattered outside.
[0074]
In the initial filling operation, first, the power mechanism 142 moves the piston 141 to the forward movement start position, which is the ascending end position, and opens the atmosphere release valve 103 to remove the air from the liquid supply sub tank 102 and The functional liquid pumped from the tank 101 is stored in the liquid supply sub tank 102. Then, after the liquid level sensor 155 detects the functional liquid, the air release valve 103 is closed, the functional liquid is sealed in the storage space 165 in the liquid supply sub tank 102, and the piston 141 is brought into liquid-tight contact with the functional liquid. . In this state, the power mechanism 142 is driven, and the supply valve 123 and the liquid level adjustment valve 116 are controlled to open and close in synchronization with the reciprocation of the piston 141.
[0075]
Specifically, when the liquid level adjustment valve 116 is closed and the supply valve 123 is opened in synchronism with the forward movement, which is the downward movement of the piston 141, the functional liquid in the liquid supply subtank 102 is added by the piston 141. It is pressurized and fed to the droplet discharge head 20 via the second supply tube 105. At this time, since the first supply tube 104 is closed, liquid feeding to the main tank 101 is prevented.
[0076]
When the liquid level adjustment valve 116 is opened and the supply valve 123 is closed in synchronization with the backward movement of the piston 141 from the lower rear end position after the end of the forward movement, the piston 141 is placed in the liquid supply sub tank 102. While maintaining the liquid-tight state with the functional liquid, it rises by acting to suck the functional liquid in the main tank 101. On the other hand, since the second supply tube 105 is closed, the backflow of the functional liquid from the droplet discharge head 20 side is prevented. That is, the liquid supply subtank 102 in the initial filling operation functions as a single-acting reciprocating pump (piston pump) with the piston 141 as a main component.
[0077]
As described above, when the piston 141 is moved backward, the functional liquid in the main tank 101 is pressurized and fed to the liquid supply sub tank 102 by the air supply mechanism 106 that is being driven, so that the air supply mechanism 106 and the piston 141 move backward. Thus, the piston 141 can be returned to the forward movement start position without fail. Then, by repeating the reciprocating operation of the piston 141 in this way, the functional liquid propagates through the second supply tube 105 and is sent to the droplet discharge head 20.
[0078]
When “existence” of the functional liquid is detected by the liquid detection sensor 124, the detection signal is sent to the control means 5, and the reciprocating operation of the piston 141 is ended by the timer management by the control means 5. That is, after the functional liquid is detected, when the functional liquid is filled in the flow path in the head of the droplet discharge head 20 and a sufficient time has passed for the functional liquid to ooze out from the nozzle, the power mechanism 142 is driven by timer control. Stops and the filling of the functional liquid into the second supply tube 105 and the flow path in the head is completed.
[0079]
In this way, in the initial filling operation, the piston 141 is in liquid-tight contact with the functional liquid and pressurizes the liquid sub tank 102 in which the functional liquid is sealed by excluding air. The functional liquid can be pressurized and fed to the flow path in the head without making contact and without dissolving air in the functional liquid. For this reason, regardless of the degassing rate of the functional liquid, it is possible to appropriately prevent bubbles from being generated in the functional liquid in the second supply tube 105 and the in-head flow path during the filling operation.
[0080]
During the drawing operation when the functional liquid is not filled, the driving of the power mechanism 142 is stopped, the inside of the liquid supply subtank 102 is opened to the atmosphere, and the liquid level of the functional liquid in the liquid supply subtank 102 as described above. Management will be performed. In addition, the piston 141 is incorporated in the upper part of the liquid supply subtank 102 and is configured like a vertical pump in which the piston 141 moves in the vertical direction. However, the piston 141 is incorporated in the side portion of the liquid supply subtank 102 and the piston 141 is horizontally disposed. You may comprise like the horizontal pump made to reciprocate.
[0081]
Next, a second embodiment of the present invention will be described with a focus on differences from the first embodiment with reference to FIG. In the second embodiment, instead of the configuration of the piston 141, the movable member facing the liquid supply subtank 102 is configured by a diaphragm 170. The diaphragm 170 is configured such that an outer peripheral portion 171 thereof is liquid-tightly fixed to the inner surface of the cylinder portion 152 and a central portion thereof is bent in the vertical direction. The power mechanism 142 is connected to the diaphragm 170, and the power mechanism 142 allows the diaphragm 170 (the center portion thereof) to reciprocate in the vertical direction. The storage space 165 is configured by the entire lower surface serving as the liquid contact surface of the diaphragm 170 and the liquid supply sub tank 102, and the diaphragm 170 pressurizes the functional liquid in a liquid-tight manner.
[0082]
When performing the initial filling operation, air is removed and the functional liquid is sealed in the liquid supply subtank 102, and the liquid supply subtank 102 is caused to function as a single-acting reciprocating pump (diaphragm pump) mainly using the diaphragm 170. . That is, as in the first embodiment, the liquid level adjusting valve 116 and the supply valve 123 are controlled to be opened and closed in synchronization with the reciprocating motion of the diaphragm 170 a plurality of times, so that the functional liquid is not brought into contact with air. The functional liquid can be efficiently filled in the flow path in the head of the droplet discharge head 20.
[0083]
Next, a modification of the second embodiment will be described with reference to FIG. In this modification, instead of the diaphragm 170, a bellows 180 is used as the configuration of another film body. The outer peripheral portion 181 of the bellows 180 is liquid-tightly fixed to the inner surface of the cylinder portion 152 and can be expanded and contracted. The bellows 180 is expanded and contracted by the connected power mechanism 142 and reciprocates. The entire inner surface serving as the liquid contact surface of the bellows 180 and the liquid supply sub tank 102 constitute the storage space 165, and the bellows 180 pressurizes the functional liquid in a liquid-tight manner. Also according to this modification, the functional liquid can be efficiently filled into the flow path in the head of the droplet discharge head 20 without bringing the functional liquid into contact with air in the initial filling operation, as in the above embodiment.
[0084]
Next, a third embodiment will be described with reference to FIG. FIG. 12 schematically shows a piping system from the liquid supply sub tank 102 to the droplet discharge head 20 via the second supply tube 105, omitting some components such as the supply valve 123 and the liquid level detector 118. It is the figure shown in. As shown in the figure, a tube pump 190 faces the second supply tube 105.
[0085]
The tube pump 190 includes a drive source (not shown), a roller holder 192 that rotates around the rotation shaft 191 by driving the drive source, a plurality of rollers 193 that are concentrically arranged on the roller holder 192, and each roller 193. A clamping member 194 that sandwiches the second supply tube 105 therebetween, and a biasing member 195 that biases the clamping member 194 toward the roller 193. The tube pump 190 rotates the roller holder 192 with a driving source and revolves a plurality of rollers 193 around the rotation shaft 191 so as to handle the second supply tube 105 and apply to the droplet discharge head 20. Pump liquid.
[0086]
When the initial filling operation is performed by the tube pump 190, the atmosphere release valve 103 (not shown) is opened so that the inside of the liquid supply sub tank 102 is opened to the atmosphere as shown in FIG. The 20 nozzle 49 side is opened to the atmosphere. In this state, the tube pump 190 is driven to feed the functional liquid in the liquid supply sub tank 102 to the droplet discharge head 20 via the second supply tube 105 and fill the flow path in the head.
[0087]
According to this embodiment, since at least the liquid supply subtank 102 is opened to the atmosphere, it is possible to avoid applying negative pressure to the functional liquid in the liquid supply subtank 102 as much as possible when the tube pump 190 sucks the functional liquid. For this reason, as in the above embodiment, the functional liquid can be pumped to the droplet discharge head 20 without generating bubbles in the second supply tube 105 and without causing air to dissolve in the functional liquid.
[0088]
Next, with reference to FIG. 13 and FIG. 8, the processing flow after the initial filling operation will be described by taking the first embodiment as an example. As described above, when the driving of the power mechanism 142 is stopped and the pressurized liquid feeding by the piston 141 is completed, the flow path in the head is filled with the functional liquid (step 1). However, in the above-described filling method by pressurization (positive pressure), bubbles are not generated in the flow path in the head, but temporarily, the flow path in the head (inside the head body constituting the head) is caused by the surface tension of the functional liquid. If air bubbles remain in the corners, there is a problem that it is difficult to discharge the air bubbles to the nozzle 49 when liquid is fed by positive pressure. Therefore, subsequent to the above filling process, the processes after step 2 are performed.
[0089]
In Step 2, first, the air release valve 103 is opened to release the pressure in the liquid supply sub tank 102 to the atmosphere, and then the supply valve 123 is closed (Step 3), and the elevating mechanism 84 is driven to cap. 81 is moved to the relatively high ascending position (contact position), and is brought into close contact with the droplet discharge head 20 (step 4). Here, the suction opening / closing valve 95 is opened and the suction pump 85 is driven to start the suction operation (step 5).
[0090]
As a result, a negative pressure is applied to the droplet discharge head 20 via the cap 81, and the functional liquid is sucked from the droplet discharge head 20. At this time, bubbles that may remain in the flow path in the head are reduced by suction. It expands due to the effect (80 kPa or less) and is discharged well from the nozzle 49 together with the functional liquid. Specifically, when the pressure sensor 94 detects a predetermined pressure (pressure of 80 kPa or less) by the suction operation, the bubbles expand in the flow path in the head due to the pressure reducing effect (step 6). Then, the control means 5 to which the pressure detection signal from the pressure sensor 94 is sent opens the valve 123 for supply in the closed state and opens the second branch tube 122, so that the head is operated by the continuous suction operation. Residual bubbles together with the functional liquid are sucked and discharged from the inner flow path to the nozzle 49 (step 7).
[0091]
Then, by the timer management by the control means 5, the suction opening / closing valve 95 is closed and the suction operation is terminated (step 8). Finally, the cap 81 is separated from the droplet discharge head 20 (step 9), the droplet discharge head 20 (head unit 21) faces directly above the wiping unit 73, and a wiping process is performed on this (step 9). 10). By the wiping process, the nozzle surface 45 of the droplet discharge head 20 contaminated by the filling of the functional liquid is wiped clean, and the droplet discharge head 20 enters a standby state for drawing work.
[0092]
In this way, in the processing after step 2, by finally using the negative pressure by the suction unit 72, the residual bubbles in the flow path in the head can be expanded by the pressure reducing effect, and the residual bubbles are dropped together with the functional liquid. The nozzle 49 of the discharge head 20 can be appropriately and reliably discharged. In step 8, the functional liquid in the liquid supply sub tank 102 is sucked until it falls within the predetermined management range.
[0093]
Note that step 4 may be omitted by keeping the cap 81 in close contact with the droplet discharge head 20 from the time of step 1. Furthermore, the supply valve 123 may be opened and closed a plurality of times during the suction operation (between step 7 and step 8). According to this, since the pulsation is temporarily generated in the flow path in the head, even bubbles that can stay in the flow path in the head can be suitably discharged.
[0094]
By the way, the droplet discharge device 1 of each of the above embodiments can be used for manufacturing various electro-optical devices (devices). That is, it can be applied to the manufacture of liquid crystal display devices, organic EL devices, PDP devices, electrophoretic display devices, and the like. Of course, the present invention can also be applied to the manufacture of color filters used in liquid crystal display devices and the like. As other electro-optical devices, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable. In addition, an electronic device including these electro-optical devices, for example, a mobile phone equipped with a flat panel display can be provided.
[0095]
Therefore, a manufacturing method using the droplet discharge device 1 will be briefly described by taking a manufacturing method of a liquid crystal display device and a manufacturing method of an organic EL device as examples.
[0096]
FIG. 14 is a cross-sectional view of the liquid crystal display device. As shown in the figure, the liquid crystal display device 450 is configured by combining a color filter 400 and a counter substrate 466 between upper and lower polarizing plates 462 and 467 and enclosing a liquid crystal composition 465 therebetween. Yes. In addition, alignment films 461 and 464 are formed between the color filter 400 and the counter substrate 466, and TFT (thin film transistor) elements (not shown) and pixel electrodes 463 are arranged in a matrix on the inner surface of the counter substrate 466. Is formed.
[0097]
The color filter 400 includes pixels (filter elements) arranged in a matrix, and a boundary between the pixels is divided by a bank 413. One of the filter materials (functional liquid) of red (R), green (G), and blue (B) is introduced into each pixel. That is, the color filter 400 includes a light-transmitting substrate 411 (work W) and a light-blocking bank 413. The portion where the bank 413 is not formed (removed) constitutes the pixel, and the filter material of each color introduced into the pixel constitutes the colored layer 421. Overcoat layers 422 and electrode layers 423 are formed on the top surfaces of the banks 413 and the colored layers 421.
[0098]
In the droplet discharge device 1 according to this embodiment, the R, G, and B functional liquids are selected for each colored layer formation region by the droplet discharge head 20 in the pixels formed by being partitioned by the bank 413. Is discharged. And the colored layer 421 used as the film-forming part is obtained by drying the applied functional liquid. In the droplet discharge device 1, various film forming portions such as the overcoat layer 422 are formed by the droplet discharge head 20.
[0099]
Similarly, an organic EL device and a manufacturing method thereof will be described with reference to FIG. As shown in the figure, in the organic EL device 500, a circuit element unit 502 is laminated on a glass substrate 501 (work W), and an organic EL element 504 which is a main component is laminated on the circuit element unit 502. A sealing substrate 505 is formed above the organic EL element 504 with an inert gas space.
[0100]
In the organic EL element 504, a bank 512 is formed by an inorganic bank layer 512 a and an organic bank layer 512 b superimposed on the inorganic bank layer 512 a, and a matrix pixel is defined by the bank 512. In each pixel, a pixel electrode 511, a light emitting layer 510b of any one of R, G, and B and a hole injection / transport layer 510a are stacked from the bottom, and a plurality of thin films such as Ca and Al are formed as a whole. It is covered with the counter electrode 503 laminated over the entire area.
[0101]
In the droplet discharge device 1 of the present embodiment, the R, G, and B light emitting layers 510b and the hole injection / transport layer 510a are formed. In the droplet discharge device 1, after forming the hole injection / transport layer 510 a, the counter electrode 503 is formed using a liquid metal material such as Ca or Al as a functional liquid introduced into the droplet discharge head 20. Are equal.
[0102]
【The invention's effect】
  Droplet ejection of the present inventionapparatusAccording to this functional liquid filling method, when the liquid droplet filling head is filled with the functional liquid, the movable member is liquid-tight with the functional liquid against the functional liquid tank in which the functional liquid is sealed by eliminating air. Since it is movable so as to be in contact with the liquid and pressurized, the functional liquid is sent to the supply pipe line and the flow path in the head without causing any air contact with the functional liquid and without causing air to dissolve in the functional liquid. be able to. Therefore, it is possible to reliably fill the droplet discharge head with the functional liquid without generating bubbles in the pipe leading to the droplet discharge head.
[0103]
  Other droplet ejection of the present inventionapparatusAccording to this functional liquid filling method, in order to drive the tube pump facing the supply pipe line in a state where the functional liquid tank is opened to the atmosphere, avoid applying negative pressure to the functional liquid in the functional liquid tank as much as possible. The functional liquid can be supplied under pressure to the droplet discharge head via the supply line. Accordingly, air does not dissolve in the functional liquid and bubbles are not generated in the supply pipe line, so that the liquid droplet ejection head can be reliably filled with the functional liquid.
[0104]
  According to the droplet discharge device of the present invention,, FSince the functional fluid is filled in the flow path in the lid without any gap, so-called dot dropout of the droplet ejection head is prevented, and functional droplet ejection from the droplet ejection head is performed stably and satisfactorily. Can do.
[Brief description of the drawings]
FIG. 1 is an external perspective view of a droplet discharge device according to an embodiment.
FIG. 2 is a front view of the droplet discharge device according to the embodiment.
FIG. 3 is a right side view of the droplet discharge device according to the embodiment.
FIG. 4 is a plan view in which a part of the droplet discharge device of the embodiment is omitted.
FIG. 5 is a plan view of the head unit of the embodiment.
6A is a perspective view of a droplet discharge head according to an embodiment, and FIG. 6B is a cross-sectional view of a main part of the droplet discharge head.
FIG. 7 is a perspective view of the suction unit of the embodiment.
FIG. 8 is a piping system diagram of the droplet discharge device of the embodiment.
FIG. 9 is a piping diagram schematically showing the area around the functional liquid tank according to the embodiment.
FIG. 10 is a piping diagram schematically showing the area around the functional liquid tank according to the second embodiment.
FIG. 11 is a piping diagram showing a modification of the second embodiment.
FIG. 12 is a piping diagram schematically showing the area around the functional liquid tank according to the third embodiment.
FIG. 13 is a flowchart illustrating an example of a process flow of filling the droplet discharge head with the functional liquid according to the embodiment.
FIG. 14 is a cross-sectional view of a liquid crystal display device manufactured by the droplet discharge device of the embodiment.
FIG. 15 is a cross-sectional view of an organic EL device manufactured by the droplet discharge device according to the embodiment.
[Explanation of symbols]
W Workpiece (substrate)
1 Droplet ejection device
4 Functional liquid supply means (functional liquid supply device, functional liquid supply system)
20 Droplet discharge head
23 XY movement mechanism
72 Suction unit (suction means)
81 cap
101 Main tank
102 Liquid supply sub tank (functional liquid tank)
103 Atmospheric release valve
104 1st supply tube (supply line)
105 Second supply tube (supply line)
106 Air supply mechanism (pressure feeding means)
116 Liquid level control valve (Supply side open / close valve)
123 Supply valve (Supply side open / close valve)
141 Piston (movable member)
142 Power mechanism
170 Diaphragm (movable member)
180 Bellows (movable member)
190 Tube pump

Claims (10)

A functional liquid filling method of the droplet discharge device from functioning tank having a functional fluid supply system for supplying functional liquid droplet discharging head through a supply line,
A storage step of removing air from the functional liquid tank and storing the functional liquid in the functional liquid tank ;
The functional liquid before Symbol function liquid tank and pressurized pumping fluid, a filling step of filling the supply conduit and functional fluids in-head flow passage of the liquid drop ejecting head,
While closing the supply-side opening and closing valve provided in the supply line, a cap connected to the suction pump is brought into close contact with the droplet ejection heads, the functional liquid from the nozzle of the droplet discharge head by driving the suction pump A first suction step of sucking
A second suction step of driving the suction pump and opening the supply side opening / closing valve to suck the functional liquid from the nozzle ;
The filling step, the functional liquid filling method of the droplet discharge device, characterized in that it is performed using the configured movable member to and the functional liquid pressure contact with respect to the functional liquid of the functional liquid tank . 2. The functional liquid filling method for a droplet discharge device according to claim 1, wherein the movable member is a piston having an inner surface of the functional liquid tank as a cylinder. The functional liquid filling method for a droplet discharge device according to claim 1, wherein the movable member is a film body having an inner surface of the functional liquid tank as a fixed portion. A functional liquid filling method of the droplet discharge device from functioning tank having a functional fluid supply system for supplying functional liquid droplet discharging head through a supply line,
Using a tube pump facing the supply line,
With the functional liquid tank open to the atmosphere, the tube pump is driven to pressurize and feed the functional liquid in the functional liquid tank to the supply pipe line and the flow path in the head of the droplet discharge head. A filling process for filling the functional liquid;
Through the cap in close contact with the front Symbol droplet discharge head, a suction means for sucking functional liquid from the nozzle of the droplet discharge head,
A first suction step of closing a supply-side opening / closing valve provided in the supply pipeline and sucking a functional liquid from a nozzle of the droplet discharge head;
The drives the suction pump, the functional liquid filling method of the droplet discharge device to the second suction step, comprising the for sucking functional liquid from the nozzle by opening the supply-side opening and closing valve. This is a droplet discharge device that performs drawing by scanning the droplet discharge head relative to the workpiece and supplies the functional liquid from the functional liquid tank storing the functional liquid to the droplet discharge head via the supply pipe. And
A movable member configured to and a function liquid pressure contact with respect to the functional liquid of the functional liquid tank,
A power mechanism for moving the movable member;
A supply-side on-off valve provided in the supply pipeline;
A suction means for sucking the functional liquid from the nozzle of the droplet discharge head through a cap that is in close contact with the droplet discharge head;
A control means for controlling the power mechanism , the supply side opening / closing valve and the suction means,
The control means drives the power mechanism and moves the movable member relative to the functional liquid tank in which the functional liquid is stored by excluding air, thereby pressurizing and feeding the functional liquid in the functional liquid tank. Then, after the functional liquid is filled in the supply pipe line and the in-head flow path of the droplet discharge head, the suction unit is driven to suck the functional liquid from the droplet discharge head ,
The suction of the droplet discharge head closes the supply side opening / closing valve and drives the suction means to drive the suction means to suck the functional liquid from the droplet discharge head, and to drive the suction means. And a second suction unit that opens the supply side opening / closing valve and sucks the functional liquid from the droplet ejection head .   The liquid droplet ejection apparatus according to claim 5, wherein the movable member is configured by a piston having an inner surface of the functional liquid tank as a cylinder.   The droplet ejecting apparatus according to claim 5, wherein the movable member is formed of a film body having an inner surface of the functional liquid tank as a fixed portion. A main tank for storing the functional liquid to be replenished to the functional liquid tank via a replenishment line, and functioning the functional liquid tank as a sub tank ;
A replenishment side opening / closing valve interposed in the replenishment pipeline and controlled to be opened and closed by the control means;
The power mechanism is configured to be capable of reciprocating the movable member,
The control means drives the power mechanism at the time of filling, opens the supply side opening / closing valve and closes the supply side opening / closing valve in synchronization with the forward movement of the movable member in the pressurizing direction. 8. The liquid droplet ejection apparatus according to claim 5, wherein the supply side opening / closing valve is closed and the replenishment side opening / closing valve is opened in synchronization with the backward movement of the movable member. Pressurizing the main tank, further having a pressurized liquid feeding means for pressure-feeding the functional liquid in the main tank to the functional liquid tank,
9. The droplet discharge device according to claim 8, wherein the control unit drives the pressurized liquid feeding unit in synchronization with the backward movement of the movable member. An air release valve that is controlled to be opened and closed by the control means and that opens the functional liquid tank to the atmosphere;
10. The droplet discharge according to claim 5, wherein the control unit closes the atmosphere release valve during the filling and opens the atmosphere release valve during the non-filling. apparatus.

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