JP4539083B2 - Functional liquid supply mechanism, functional liquid droplet ejection apparatus including the same, and method of manufacturing electro-optical device - Google Patents

Description

The present invention functional fluid function liquid supply mechanism and the functional liquid droplet ejecting apparatus including the supplies the functional liquid to the functional liquid droplet ejection head from the tank, as well as about the preparation how the electro-optical device.

Conventionally, a functional liquid droplet ejecting apparatus, which is a type of functional liquid droplet ejecting apparatus and used for manufacturing a color filter for a flat panel display, stores a functional liquid as a functional liquid supply mechanism for supplying a functional liquid to a functional liquid droplet ejecting head. Main tank, sub tank receiving functional liquid from the main tank, sub deaeration device provided between the main tank and the sub tank, and main desorption provided between the sub tank and the functional liquid droplet ejection head. A gas apparatus, a plurality of tubes that connect these to the functional liquid droplet ejection head, a joint that divides these tubes into two branches, and a valve that can open and close the flow path of the functional liquid. A device that supplies a functional liquid to a functional liquid droplet ejection head from a main tank via a sub-tank via a valve is known (for example, see Patent Document 1). ).
In this case, the sub tank is composed of an open tank that adjusts the water head difference between the functional liquid droplet ejection head and the functional liquid supply mechanism, and the functional liquid is supplied from the sub tank to the functional liquid droplet ejection head at a predetermined water head pressure. It is like that.
Japanese Patent Laid-Open No. 11-42795

  In the above-mentioned conventional functional liquid supply mechanism, there is a problem that bubbles mixed during the initial filling of the functional liquid remain in the corners of the joint or valve flow path and flow out at the time of drawing, resulting in defective ejection of the functional liquid droplet ejection head. is there. In addition, the sub-tank is open to the outside air due to its structure, and there is a problem that the degree of deaeration is reduced by touching the outside air by the sub-tank even if the sub-tank is deaerated.

The present invention, the functional liquid droplet ejection apparatus having a function droplet functional fluid supply mechanism can be supplied to the discharge head and which without functional fluid reducing the degree of deaeration, and manufacturing how the electro-optical device The issue is to provide.

The functional liquid supply mechanism of the present invention is connected to a functional liquid droplet ejection head that ejects functional liquid droplets. In the functional liquid supply mechanism that supplies functional liquid to the functional liquid droplet ejection head, the degassed functional liquid is vacuum-packed. Functional liquid tank in the form of a pack stored, a functional liquid supply tube with an upstream end connected to the functional liquid tank and a downstream end connected to a functional liquid droplet ejection head, and a supply port and function of the functional liquid tank A connecting tool that connects the upstream end of the liquid supply tube, and the connecting tool is detachably connected to the tube connecting part that holds the upstream end of the functional liquid supply tube and the supply port. A tank connection part that holds a connection needle with a flow path at its base part, and the base part of the connection needle joins the tube connection part and the tank connection part to the upstream end part of the functional liquid supply tube Due to the liquid-tight insertion and connection And wherein the door.

According to this configuration, the functional liquid is vacuum-packed and does not directly touch the surrounding air while being stored in the functional liquid tank. For this reason, it can prevent that the deaeration degree of a functional liquid falls. In addition, since the functional liquid is in an unsaturated state in which the gas dissolved by deaeration is removed, even if minute bubbles are mixed in from the connection part of the functional liquid supply tube constituting the flow path or the functional liquid Even if ambient air permeates through the supply tube at the molecular level, it absorbs the bubbles. That is, even if air bubbles (ambient air) are allowed to enter the flow path, the generation of air bubbles can be prevented.
Further, the functional liquid supply tube and the functional liquid tank can be easily connected.
Furthermore, the flow path of the functional liquid is formed by inserting the connection needle of the connection tool so as to penetrate the elastic body. Thereby, since the circumference | surroundings of a connection needle are sealed with an elastic body in a connection part, a bubble does not enter from between a connection needle and a supply port part. In addition, by simply pulling out the connection needle, not only can the connection between the functional liquid supply tube and the elastic body be released, but also the functional liquid can leak from the location sealed with the elastic body even when the connection is released. There is no.

  In this case, the tube connecting portion includes a cylindrical male screw portion into which the functional liquid supply tube is inserted into the shaft center, a tube side flange that supports the cylindrical male screw portion, a female screw cap that is screwed to the outside of the cylindrical male screw portion, and a cylindrical male screw. It is preferable to have a tube-side O-ring interposed between the portion and the female screw cap and holding the functional liquid supply tube in a liquid-tight manner.

  In this case, it is preferable that a plurality of minute inflow holes connected to the flow path are formed at the distal end portion of the connection needle.

  In this case, it is preferable that the functional liquid tank is composed of a sealed pack having gas impermeability and waterproofness.

  According to this configuration, the deaeration degree of the functional liquid does not decrease inside the functional liquid tank, and oxygen and moisture can be effectively prevented from entering the functional liquid tank from the ambient air. it can. As a result, it is possible to prevent the functional liquid from being deteriorated by mixing oxygen or moisture into the functional liquid stored in the functional liquid tank.

  In this case, it is preferable that the functional liquid supply tube has gas impermeability and waterproofness.

  According to this configuration, it is possible to prevent the functional liquid flowing in the functional liquid supply tube from being mixed with oxygen or water that has permeated at the molecular level and the functional liquid from being altered. Usually, a small amount of functional liquid is consumed in discharging the functional liquid droplets, so that the functional liquid sent from the functional liquid tank moves in the functional liquid supply tube over a long time until reaching the functional liquid droplet discharging head. For this reason, preventing the functional liquid from being altered during the movement is particularly effective in stabilizing the ejection of the functional liquid droplets.

  In this case, it is preferable that a tank mount for supporting the functional liquid tank is further provided, and a height adjustment mechanism for adjusting a water head difference between the functional liquid tank and the functional liquid droplet discharge head is incorporated in the tank mount. .

  According to this configuration, the water head difference can be appropriately adjusted with respect to the type of the functional liquid and the pressure loss of the flow path by the height adjusting mechanism. That is, it prevents the functional liquid tank from being too high and the functional liquid from sagging from the functional liquid droplet ejection head, or the functional liquid tank position from being too low and causing the functional liquid discharge amount to decrease and cause a discharge failure. can do. In addition, it is more preferable to automate the height adjustment and adjust the water head pressure to reduce the functional fluid in the functional fluid tank.

  In this case, it is preferable that the functional liquid is mainly composed of a film forming material constituting either the hole injection layer or the light emitting layer of the organic EL device.

  According to this configuration, the functional liquid supply mechanism can prevent the functional liquid from being deteriorated by moisture or oxygen contained in the ambient air, and thus can be suitably used for a film forming material. Thereby, the lifetime of the film forming material can be extended and the reliability of the hole injection layer and the light emitting layer of the organic EL device to be formed can be improved.

  A functional liquid droplet ejection apparatus according to the present invention includes the above-described functional liquid supply mechanism, a functional liquid droplet ejection head, and an X.multidot. And a Y moving mechanism.

  According to this configuration, since a fresh functional liquid is supplied to the functional liquid droplet ejection head, it is possible to improve the reliability of a product manufactured by the functional liquid droplet ejection apparatus. Specifically, there is no occurrence of product film formation failure, light emission failure, or the like.

  The method of manufacturing an electro-optical device according to the present invention is characterized in that the functional droplet discharge device described above is used to form a film-forming portion using functional droplets on a workpiece.

According to this configuration, since it is manufactured using the functional liquid droplet ejection device in which the quality of the functional liquid is difficult to change, it is possible to manufacture a highly reliable electro-optical device. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

As described above, the functional liquid supply mechanism and the functional liquid droplet ejecting apparatus including the of the present invention, as well as according to the production how the electro-optical device, to prevent the deterioration of the functional liquid functional liquid stably and Since it can be supplied, the ejection accuracy of the functional liquid droplets can be improved, and the productivity can be improved.

The production how the electro-optical device of the present invention, because it is carried out using the above-described functional liquid droplet ejecting apparatus, increasing the reliability of operation becomes efficient possible to produce them.

  Hereinafter, a functional liquid supply tube of the present invention and a functional liquid droplet ejection apparatus to which a functional liquid supply mechanism including the functional liquid supply tube of the present invention is applied will be described with reference to the accompanying drawings. The functional liquid droplet ejection device of this embodiment is incorporated in a production line for an organic EL device or a liquid crystal display device which is a kind of so-called flat panel display. This functional droplet discharge device is for forming a hole injection layer using an aqueous functional liquid typified by polyethylene dioxythiophene (PEDOT), or a solvent type typified by an EL luminescent material dissolved in an organic solvent. And the like for forming a light emitting layer of the functional liquid. Since these components have almost the same form, although some of the configurations differ depending on the solvent, this embodiment mainly describes a functional liquid droplet ejection device for forming a hole injection layer.

  As shown in FIG. 1, the functional liquid droplet ejection apparatus 1 includes a machine base 6 and a drawing apparatus 2 having three functional liquid droplet ejection heads 11 arranged in a cross shape at the upper center of the machine base 6. A maintenance device 3 comprising various devices installed on the machine base 6 in parallel with the drawing device 2 and used for maintenance of the functional liquid droplet ejection head 11, and a functional liquid supply mechanism 4 for supplying the drawing device 2 with a functional liquid; It is equipped with. The drawing device 2 performs drawing with functional droplets on the workpiece W using the functional droplet discharge head 11. The maintenance device 3 performs maintenance of the functional liquid droplet ejection head 11 and also checks whether the functional liquid droplets are appropriately ejected from the functional liquid droplet ejection head 11, and the functional liquid produced by the functional liquid droplet ejection head 11. This is for stabilizing the ejection of the droplets. Further, the functional liquid droplet ejection apparatus 1 includes a control device 161 that comprehensively controls each of the above constituent devices. In the present embodiment, a chamber apparatus that discharges functional droplets in an atmosphere of dry air or inert gas is not attached, but a configuration including the chamber apparatus may be used.

  The maintenance device 3 includes a storage unit 21 that is in close contact with the functional liquid droplet ejection head 11 to prevent drying when the functional liquid droplet ejection device 1 is not in operation, and suction (cleaning) for removing the thickened functional liquid. And a suction unit 31 that receives (flushing) the waste discharged from the functional liquid droplet ejection head 11 and a wiping unit 41 for wiping off dirt adhering to the nozzle surface 12 of the functional liquid droplet ejection head 11. Each of these units is mounted on a moving table 43 placed on the machine base 6 so as to extend in the X-axis direction, and is configured to be movable in the X-axis direction by the moving table 43.

  The storage unit 21 has a sealing cap 22 that is in close contact with the nozzle surface 12 of the functional liquid droplet ejection head 11, and the sealing cap 22 is attached to the moving table 43 via a sealing cap lifting mechanism 23. . When the functional liquid droplet ejection apparatus 1 is not in operation, the functional liquid droplet ejection head 11 is moved to the maintenance position 24 on the moving table 43. In response to this, the sealing cap 22 is lifted and the functional liquid droplet ejection head 11 is moved. The nozzle surface 12 is closely attached. That is, all the nozzles 13 of the functional liquid droplet ejection head 11 are sealed to prevent the functional liquid droplets from being dried at each nozzle 13. This suppresses the thickening of the functional liquid and prevents so-called nozzle clogging.

  The suction unit 31 has a suction cap 32 that is in close contact with the nozzle surface 12 of the functional liquid droplet ejection head 11, and the suction cap 32 is attached to the moving table 43 via a suction cap lifting mechanism 33. Although not shown, a suction pump is connected to the suction cap 32. When the functional liquid discharge head 11 is filled with the functional liquid or when the thickened functional liquid is sucked, the suction cap 32 is raised and brought into close contact with the functional liquid droplet discharge head 11 to perform pump suction. . Further, when the functional liquid droplet ejection (drawing) is suspended, the functional liquid droplet ejection head 11 is driven to perform flushing (disposal ejection). At that time, the suction cap 32 is slightly separated from the functional liquid droplet ejection head 11 so as to receive the flushing. This prevents nozzle clogging and restores the function of the functional liquid droplet ejection head 11 in which nozzle clogging has occurred.

  The wiping unit 41 is provided with a wiping sheet 42 that can be unwound and rewinded. While feeding the wiping sheet 42 that has been fed out and moving the wiping unit 41 in the X-axis direction by the moving table 43, the functional liquid The nozzle surface 12 of the droplet discharge head 11 is wiped off. For this reason, the functional liquid adhering to the nozzle surface 12 of the functional liquid droplet ejection head 11 is removed by the above-described suction operation or the like, and flight bending or the like during functional liquid droplet ejection is prevented. In addition to the above units, the maintenance device 3 preferably includes a discharge inspection unit (not shown) that inspects the flight state of the functional liquid droplets ejected from the functional liquid droplet ejection head 11.

  As shown in FIG. 1, the drawing apparatus 2 has an XY movement mechanism 61 installed in a cross shape on the machine base 6. The XY movement mechanism 61 moves the workpiece W relative to the functional liquid droplet ejection head 11 in the X-axis direction and the Y-axis direction, and straddles the X-axis table 62 on which the workpiece W is mounted. And a Y-axis table 71 on which the functional liquid droplet ejection head 11 is mounted. The drawing apparatus 2 includes various devices such as a head recognition camera (not shown) for recognizing the position of the functional liquid droplet ejection head 11 and a pair of work recognition cameras 77 and 77 for recognizing the position of the work W. Is provided.

  The work W is composed of a translucent (transparent) glass substrate in which electrodes and the like are formed, and the surface thereof is divided into a plurality of drawing regions D and non-drawing regions S for forming pixels. Yes. Then, drawing is performed by discharging functional droplets to the drawing region D.

  The X-axis table 62 is directly installed on the machine base 6 so as to be parallel to the maintenance device 3 extending in the X-axis direction, and the suction table 63 and the suction table 63 for sucking the work W are moved around the Z-axis. A set table 66 composed of a θ table 64 that is rotatably supported, an X-axis slider 65 that slidably supports the set table 66 in the X-axis direction, and an X-axis motor (not shown) that drives the X-axis slider 65. have. The workpiece W is sucked and placed on the suction table 63 and can move in the X-axis direction, which is the main scanning direction, via the X-axis slider 65.

  The Y-axis table 71 is slidable on a pair of left and right columns 72 erected on the machine base 6 with the X-axis table 62 interposed therebetween, a Y-axis frame 73 spanned between both columns 72, and the Y-axis frame 73. A Y-axis slider 74 that is supported, a Y-axis motor (not shown) that drives the Y-axis slider 74, and a main carriage 75 that is supported by the Y-axis slider 74 and on which the functional liquid droplet ejection head 11 is mounted. . A head unit 76 is suspended from the main carriage 75, and the three functional liquid droplet ejection heads 11 are mounted on the head unit 76 via sub-carriages (not shown).

  As shown in FIG. 1, the functional liquid droplet ejection head 11 has a large number (for example, 180) of nozzles 13 for ejecting functional liquid droplets on its nozzle surface 12, and the large number of nozzles 13 are arranged in two rows. A nozzle row 14 is formed (one row is possible as shown). Further, the functional liquid droplet ejection head 11 is provided with a pair of in-head flow paths (not shown) corresponding to these nozzle rows and a pair of introduction ports 15 connected to the in-head flow paths (see FIG. 4). ). In the present embodiment, only one of the nozzle rows of each functional liquid droplet ejection head 11 is used, and the functional liquid supply mechanism 4 is connected only to the inlet 15 on one side. The three functional liquid droplet ejection heads 11 are arranged side by side in the X-axis direction on the head unit 76 so that the nozzle rows 14 are orthogonal to the main scanning direction.

  When drawing on the workpiece W, the functional liquid droplet ejection head (head unit 76) 11 is allowed to face the workpiece W with a predetermined workpiece gap, and main scanning (workpiece by the X-axis table 62 is performed. The functional liquid droplet ejection head 11 is driven to eject in synchronization with the reciprocating movement of W. Further, sub-scanning (movement of the head unit 76) is appropriately performed by the Y-axis table 71. By this series of operations, desired functional droplets are selectively ejected to the drawing region D of the work W, that is, drawing is performed.

  When performing maintenance on the functional liquid droplet ejection head 11, the suction unit 31 is moved to the predetermined maintenance position 24 by the moving table 43, and the head unit 76 is moved to the maintenance position 24 by the Y-axis table 71. Then, flushing or pump suction of the functional liquid droplet ejection head 11 is performed. When pump suction is performed, the wiping unit 41 is subsequently moved to the maintenance position 24 by the moving table 43, and the functional liquid droplet ejection head 11 is wiped. Similarly, when the operation is finished and the operation of the apparatus is stopped, the functional liquid droplet ejection head 11 is capped by the storage unit 21.

  Next, the functional liquid supply mechanism 4 will be described in detail with reference to FIGS. 1 and 2. The functional liquid supply mechanism 4 includes three functional liquid tanks 51 and a tank base 101 that supports the functional liquid tank 51 so as to be movable up and down. A functional liquid supply tube 52 serving as a functional liquid supply channel is provided between each functional liquid tank 51 and each functional liquid droplet ejection head 11, and between each functional liquid supply tube 52 and each functional liquid droplet ejection head 11. Are provided with a head-side adapter (connector) 53 for connecting them, and between each functional liquid tube 52 and each functional liquid tank 51, a tank-side adapter (connector) 121 for connecting them is provided. ing. That is, each functional liquid supply tube 52 has an upstream end 58 connected to the functional liquid droplet ejection head 11 and a downstream end 59 connected to the functional liquid tank 51.

  As shown in FIG. 2, the tank base 101 includes a tank base 109 that supports the three functional liquid tanks 51 so as to be movable up and down, an elevating mechanism (height adjusting mechanism) 103 that elevates and lowers the functional liquid tanks 51, and an elevating mechanism 103. And a pair of support blocks 104 for supporting the above on the machine base 6. Further, three sets of tank holders 110 for setting the three functional liquid tanks 51 are provided on the tank base 109. The elevating mechanism 103 includes an elevating member 102 having a “U” -shaped cross section on which the tank base 109 is placed, an elevating guide member 107 for slidably guiding the elevating member 102, and a lead screw 108 screwed into the elevating member 102. And a lift motor 169 connected to the lower end of the lead screw 108 and rotating the lead screw 108 forward and backward.

  The elevating guide member 107 has a pair of guide bars 106, 106 between the upper plate portion 153 and the lower plate portion 154, and the above elevating member 102 is slidable on the pair of guide bars 106, 106. Is engaged. When the elevating motor 169 rotates forward and backward, the elevating member 102 moves up and down via the lead screw 108 so that the water head difference of the functional liquid tank 51 with respect to the functional liquid droplet ejection head 11 can be finely adjusted. The driving of the lifting motor 169 is controlled by the control device 161 described above.

  Next, the functional liquid tank 51 will be described with reference to FIG. The functional liquid tank 51 is of a cartridge type, and includes a functional liquid pack 81 obtained by vacuum-packing a functional liquid composed of an aqueous solvent, and a resin cartridge case 82 that accommodates the functional liquid pack 81. Yes. The functional liquid pack 81 is formed in a bag shape in which two upper and lower rectangular film sheets 84 are overlapped and the periphery thereof is heat-sealed, and a storage space 85 for storing 110 cc of the functional liquid is formed therein. The functional liquid is deaerated and stored in the storage space 85 in a state where air is excluded. When storing the functional liquid, the functional liquid pack 81 swells in the vertical direction. As the functional liquid decreases, the functional liquid pack 81 is deformed into a flat shape and can be used up to the end. A supply port 86 for supplying a functional liquid is provided on one end surface of the functional liquid pack 81, and the functional liquid is supplied from the supply port 86 to the functional liquid supply tube 52. The functional liquid pack 81 is filled with the functional liquid in a vacuum.

  The functional liquid stored in the functional liquid pack 81 is polyethylene-based dioxythiophene (PEDOT) that is an aqueous functional liquid, and the amount of dissolved gas that has been degassed in advance by a degassing device (not shown) and dissolved is close to zero. The functional liquid pack 81 is sealed in a state (unsaturated state).

  The film sheet 84 has a laminated structure composed of a plurality of materials having gas impermeability and waterproofness. In the present embodiment, for example, the outer layer 87 is made of aluminum and the inner layer 88 is made of a resin or the like, and those laminated or coated so as to have gas impermeability and waterproofness are used. The supply port portion 86 is formed of a resin and has a cylindrical shape while maintaining a predetermined strength, and is provided with a mounting hole portion 89 on the functional liquid pack side and a flange portion formed integrally with the mounting hole portion 89 and provided on the tip side. 90.

  The flange portion 90 has an opening 91 that communicates with the storage space 85 at its axial center. The opening 91 is closed with an elastic body 93 that seals the opening 91, and the elastic body 93 is formed of butyl rubber or the like. In this case, due to the gas impermeability and waterproofness of butyl rubber, the elastic body 93 is configured to prevent the functional liquid from being altered by oxygen or moisture of the surrounding air.

  The cartridge case 82 is formed of a rectangular box-shaped case main body 111 having an upper opening, and a lid case 112 that closes the opening of the case main body 111, and an accommodation space 115 in which the functional liquid pack 81 is accommodated is configured. Has been. The case main body 111 has a pack joint portion 113 that is recessed in the center of the front surface, and the pack joint portion 113 has a substantially “U” shape that engages the flange portion 90 of the functional liquid pack 81. A locking groove 141 is formed. A pair of locking projections 143 project from the locking groove 141 toward the center, and the flange portion 90 inserted therein is locked (fixed) in a locked state by the pair of locking projections 143. It has become so.

  The functional liquid tank 51 configured as described above is detachably attached to the tank holder 110 from the side. On the other hand, the tank-side adapter 121 connected to the functional liquid supply tube 52 is fixed to the tank holder 110 so as to correspond to the flange portion 90 of the mounted functional liquid tank 51. The cartridge case 82 is set in the tank holder 110 in a snap-in manner, and it can be determined whether or not the cartridge case 82 is completely set by a detection mechanism 170 attached in the vicinity of the tank holder 110 (see FIG. 6).

  As shown in FIG. 4, the tank-side adapter 121 has a tube connection part 122 that is directly connected to the functional liquid supply tube 52 and a tank connection part 123 that is connected to the functional liquid tank 51. Inside the sections 122 and 123, a flow path for supplying the functional liquid from the functional liquid pack 81 to the functional liquid tube 52 is formed. The tube connecting portion 122 includes a cylindrical male screw portion 124 into which the functional liquid supply tube 52 is inserted into the shaft center, a tube side flange 125 that supports the cylindrical male screw portion 124, and a female screw cap 126 that is screwed to the outside of the cylindrical male screw portion 124. And a tube-side O-ring 127 interposed between the cylindrical male screw portion 124 and the female screw cap 126 and holding the functional liquid supply tube 52 in a liquid-tight manner. On the other hand, the tank connecting portion 123 includes a connecting needle 131 having a channel formed in the axis thereof, a tank side flange 152 for holding the connecting needle 131, and a tank side O interposed in the connecting needle receiving groove 129 of the tube side flange 125. It consists of a ring 128. The tube connection part 122 and the tank connection part 123 are connected by flange-joining the tube side flange 125 and the tank side flange 152. Both O-rings are preferably provided with gas-impermeable properties such as butyl rubber and waterproof properties.

  The connection needle 151 has a sharp tip, and a plurality of minute inflow holes (not shown) connected to the internal flow path (not shown) are formed in the tip portion. That is, the connection needle 151 is connected to the functional liquid pack 81 by being inserted through the elastic body 93 of the functional liquid pack 81 described above, and the functional liquid is allowed to flow out of the functional liquid pack 81 to form a flow path. The base of the connection needle 151 is inserted into the functional liquid supply tube 52, and the internal flow path and the flow path of the functional liquid supply tube 52 are connected. Although not shown in the drawing, the tank side adapter 121 is completely set (attached) to the tank holder 110 so that the opening 91 of the functional liquid tank 51 is connected to the connection needle 151 of the tank side adapter 121. The (elastic body 93) is correctly connected.

  The head-side adapter 53 is formed in a short cylindrical shape with butyl rubber, the functional liquid supply tube 52 is connected to the inner surface of the upper half, and the inlet 15 of the functional liquid droplet ejection head 11 is connected to the inner surface of the lower half. Yes. Needless to say, since the head-side adapter 53 is also made of butyl rubber, it has the above-mentioned properties such as gas impermeability.

  Next, the functional liquid supply tube 52 will be described in detail with reference to FIG. The functional liquid supply tube 52 has a five-layer structure dedicated to the aqueous functional liquid and has an inner diameter of 2 mm. The functional liquid supply tube 52 includes an innermost layer 183 made of polyethylene, an outermost layer 184 made of polyethylene, an intermediate layer 185 made of an ethylene vinyl alcohol copolymer and positioned in the middle, and an outermost layer 184 and an intermediate layer 185. An outer adhesive layer 187 made of a polyolefin-based adhesive and an inner adhesive layer 186 made of a polyolefin-based adhesive located between the innermost layer 183 and the intermediate layer 185 are provided. Inside the innermost layer 183, an in-tube flow path 57 through which the functional liquid flows is formed.

  The intermediate layer 185 is made of an ethylene vinyl alcohol copolymer, and has gas non-permeability to prevent gas permeation and molding stability with a small molding shrinkage rate and stable shape after injection molding. ing. The gas impermeability prevents gas from being mixed in from the surrounding air so that the gas does not dissolve into the functional liquid and the dissolved gas amount of the functional liquid becomes saturated or the functional liquid is not oxidized.

  The innermost layer 183 and the outermost layer 184 are made of polyethylene, and the moisture of the surrounding air prevents moisture from being taken into the functional liquid in the flow path and prevents the functional liquid from being altered. There are low-density polyethylene and high-density polyethylene. In this embodiment, low-density polyethylene is used. In addition, although the cost is high, if a high-density one is used, the waterproofness can be further improved. The innermost layer 183 and the outermost layer 184 may be made of polypropylene. Polypropylene also has the same properties as polyethylene, and can be used for the innermost layer 183 and the outermost layer 184 because of its waterproofness.

  The inner adhesive layer 186 and the outer adhesive layer 187 are made of polyolefin resin adhesive, and among the polyolefin resin adhesives, polyethylene is used. Polyethylene is also used for the innermost layer 183 and the outermost layer 184. However, it has a low surface energy and is difficult to adhere to the ethylene vinyl alcohol copolymer that is the intermediate layer 185 as it is. The melted material is used as the inner adhesive layer 186 and the outer adhesive layer 187 to bond the outermost layer 184, the intermediate layer 185, and the innermost layer 183. For this reason, the inner adhesive layer 186 and the outer adhesive layer 187 act to repair the broken portion of the seal even if the outermost layer 184 and the innermost layer 183 have a seal failure that reduces the waterproof property. Thus, the functional liquid supply tube 52 is more waterproof (that is, has low moisture permeability). The same performance can be obtained by using an ethylene vinyl acetate copolymer hot-melted at 150 ° C. or polypropylene hot-melted at 170 ° C.

  In the functional liquid supply tube 52, the outermost layer 184, the outer adhesive layer 187, the intermediate layer 185, the inner adhesive layer 186 and the innermost layer 183 are simultaneously injected by an injection molding machine (not shown) to bond the layers. Can be easily manufactured as a single unit. The functional liquid supply tube 52 manufactured in this way has bending durability, and the inner adhesive layer 186 and the outer adhesive layer 187 are configured to prevent interlayer slippage even when the stress is concentrated due to bending. Yes.

  In the functional liquid supply mechanism 4 of the present embodiment, the functional liquid stored in the functional liquid tank 51 is discharged from the internal flow path formed in the connection needle 151 according to the driving of the functional liquid droplet ejection head 11. The functional liquid supply tube 52 passes through the in-tube flow path 57, is supplied to the functional liquid droplet ejection head 11 via the head-side adapter 53, and is discharged from the functional liquid droplet ejection head 11 to the work W.

  Next, control by the control device 161 of the functional liquid droplet ejection apparatus 1 of the present embodiment will be described with reference to FIG. The control device 161 directly controls each component device of the functional liquid droplet ejection device 1 or indirectly through various drivers, and a driver directly responsible for driving these component devices. A group 163.

  The control unit 162 includes a CPU 164 configured by a microprocessor, a ROM 165 that stores various control programs, a RAM 166 that serves as a main storage device, and a peripheral control circuit 175 that communicates them to the driver group 163. These are connected to each other by an internal bus 167. The driver group 163 includes a display driver 171 for displaying the display device 168, a head driver 172 for controlling the ejection of the functional liquid droplet ejection head 11, a motor driver 174 for driving the XY movement mechanism 61, and a lift motor 169. It is comprised from various drivers, such as the raising / lowering motor driver 173 which drives.

  In the control device 161 described above, the CPU 164 drives the X / Y moving mechanism 61 via the motor driver 174 to instruct the functional liquid droplet ejection head 11 to move relative to the workpiece W, and also to use the head driver. By controlling the selective ejection of the functional liquid droplets of the functional liquid droplet ejection head 11 via 172, the functional liquid droplet ejection head 11 is caused to draw a predetermined pattern. Further, the CPU 164 controls the lifting mechanism 103 via the lifting motor driver 173, and moves the functional liquid tank 51 up and down to adjust the liquid surface height of the functional liquid so as to take an appropriate water head difference. In this adjustment of the liquid level, the CPU 104 calculates the amount of reduction in the functional liquid tank 51 from the number of discharges of the functional liquid droplet discharge head 11 and the like (suction is also converted into the number of discharges), and based on this calculation result. Preferably it is done.

  The above is the first embodiment of the functional liquid droplet ejection apparatus of the present invention. According to the present embodiment, the functional liquid supply tube 52 has gas impermeability and waterproofness, and the functional liquid tank 51, the connection tool 121, and the head-side adapter 53 have similar performance. Therefore, ambient air is not mixed into the functional liquid in the entire functional liquid supply mechanism 4. Therefore, it is possible to effectively prevent the functional fluid from being altered. Further, even if oxygen or nitrogen in the ambient air enters the molecular liquid level across the functional liquid supply tube 52 in the cross-sectional direction, the degassed functional liquid absorbs them and the minute amount in the flow path. No bubbles remain. From the above, the pressure in the flow path can be optimized, and functional droplets can be discharged with high accuracy.

  Next, with reference to FIG. 7, the second embodiment of the functional liquid droplet ejection apparatus of the present invention will be described mainly with respect to differences from the first embodiment described above. In the functional liquid droplet ejection device of the second embodiment, the functional liquid supply tube 52 is formed with a larger diameter (for example, an inner diameter of 4 mm), and the upstream end of the functional liquid supply tube 52 is the functional liquid tank 51 (functional The liquid pack 81) is directly connected to a functional liquid supply connector (supply port portion) 181, and the downstream side (downstream end portion) is directly connected to the introduction port portion 15 of the functional liquid droplet ejection head 11. .

  According to the second embodiment, the functional liquid supply mechanism 4 that supplies the functional liquid to the functional liquid droplet ejection head 11 includes the single functional liquid supply tube 11 and the functional liquid tank 51, and thus different members. The number of seams connected to each other can be minimized, and the functional liquid can be prevented from being altered more effectively.

  Further, in place of the above-described tank mount 101, for example, as shown in FIG. 8, a tank lift 191 that supports the functional liquid tank 51 so as to be liftable may be used. The tank lifting platform 191 includes an upper plate 192 on which the functional liquid tank 51 is directly mounted, a lower plate 193 that is fixed to one support column 72 in a bracket shape, and a pair of front and rear that supports the upper plate 192 so as to be movable up and down. X links 194, 194, a connecting rod 195 that connects one end of the lower side of each X link 194, a lead screw 202 that is screwed to the connecting rod 195, and the lead screw 202 are rotated forward and backward. And an elevating drive motor 196.

  The X link 194 includes two links 201 and 201 that are pivotably connected to each other at an intermediate position. One end of each of the two links 201 and 201 is on the side surface of the upper plate 192 and the lower plate 193. The other end is rotatably attached to the upper plate 192 and the lower plate 193 so as to be slidable and rotatable in the horizontal direction in the formed long hole 199. As the elevating drive motor 196 rotates forward and backward, the connecting rod 195 moves forward and backward with the elongated hole as a guide, and the X links 194 and 194 operate as opening and closing legs to move the upper plate 192 up and down. In addition, you may comprise the link mechanism for raising / lowering by piled up several X links 194 up and down. Further, in the drawing, the tank holder is omitted.

  In addition to forming the hole injection layer of the organic EL device described above by the functional droplet discharge device of the present invention, the light emitting layer and color filter of the organic EL device, a liquid crystal display device, a plasma display (PDP device), an electronic device The present invention is also applicable to forming various functional layers such as an emission device (FED device, SED device) and an active matrix substrate formed on these display devices.

  For example, in the case of forming a light emitting layer of an organic EL device, a functional liquid obtained by dissolving an EL light emitting material in an organic solvent-based solvent is used. As a functional liquid supply mechanism, as shown in FIG. A solvent-based functional liquid supply tube 182 consisting of three layers dedicated to the functional liquid of the system may be used for the functional liquid supply mechanism 4. The solvent-based functional liquid supply tube 182 includes an innermost inner layer laminate material 54 having organic solvent resistance and gas impermeability, an outermost outer layer material layer 55 having waterproof properties, an inner layer laminate material 54 and an outer area layer. And an adhesive layer 56 (for example, hot-melted polyethylene) that adheres the material 55 in the middle thereof. This solvent-based functional liquid supply tube 182 is formed with an in-tube flow path 188 through which the functional liquid flows inside the inner surface laminated material 54, and is specially used for the solvent-based functional liquid that forms the light emitting layer of the organic EL device. It has become a thing.

  Next, as an electro-optical device (flat panel display) manufactured using the functional droplet discharge device 1 of the present embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device (FED device, SED device) Further, the structure and manufacturing method thereof will be described by taking an active matrix substrate and the like formed in these display devices as examples. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 10 is a flowchart showing the manufacturing process of the color filter, and FIG. 11 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S11), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S12), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 11B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 11C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and colored layers (film forming portions) 508R, 508G, and 508B are formed by the droplet discharge head 11 in the subsequent colored layer forming step. The landing area of the functional droplet is defined when forming the.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S13), as shown in FIG. 11 (d), functional droplets are ejected by the functional droplet ejection head 11, and each pixel region 507a surrounded by the partition wall portion 507b is placed. Let it land. In this case, the functional liquid droplet ejection head 11 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 12 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 11, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 12 are formed at a predetermined interval. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The functional liquid droplet ejection device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap described above, and seals before attaching the color filter 500 side portion to the counter substrate 521 side portion. Liquid crystal (functional liquid) can be uniformly applied to a region surrounded by the material 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 11. Furthermore, it is also possible to apply the first and second alignment films 524 and 527 by the functional liquid droplet ejection head 11.

FIG. 13 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 14 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 15 is a cross-sectional view of a main part of a display region of the organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2 and the} like, and is laminated on the inorganic bank layer 618a. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 was formed on the hole injection / transport layer 617a and the hole injection / transport layer (hole injection layer) 617a formed in a stacked state on the pixel electrode 613 in the opening 619. And a light emitting layer 617b. In addition, you may further form the other functional layer which has another function adjacent to this light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 16, the display device 600 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 17, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a processing gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 11, the functional liquid droplets can be landed more reliably on the pixel area, and can be landed on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 66 of the functional liquid droplet ejection device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. Is called.

  As shown in FIG. 19, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is removed from the functional droplet discharge head 11 into each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 19, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 21, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 21) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 22, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 11, as shown in FIG. 23, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode forming step (S25), as shown in FIG. 24, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as electrodes, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 25 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed using the functional liquid droplet ejection apparatus 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 66 of the functional liquid droplet ejection apparatus 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 11. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
In the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the droplet ejection head 11, and the corresponding color. In the discharge chamber 705.

Next, FIG. 26 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  A first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed on the upper surface of the first substrate 801 so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the functional liquid droplet ejection device 1, and The phosphors 813R, 813G, and 813B of the respective colors can be formed using the functional droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 26A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b are formed in the groove portion constituted by the bank portion BB (inkjet method using the functional droplet discharge device 1), and the solvent is dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the functional droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the functional droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is a schematic plan view of a functional liquid droplet ejection apparatus equipped with a functional liquid supply mechanism according to a first embodiment. It is a side view of the tank mount of a 1st embodiment. It is the figure which showed the functional liquid tank, (a) The exploded perspective view of a functional liquid tank, (b) The perspective view of a functional liquid pack, (c) The front view of a functional liquid tank. It is explanatory drawing which shows the connection structure of the functional liquid supply mechanism of 1st Embodiment. It is a side surface schematic diagram of a functional liquid supply tube. It is the block diagram which showed the control apparatus which is the main control system of a functional droplet discharge apparatus. It is explanatory drawing which shows the connection structure of the functional liquid supply mechanism of 2nd Embodiment. It is a side surface schematic diagram of an aqueous functional liquid supply tube. It is an external appearance perspective view of a tank lifting platform. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Function droplet discharge device 4 Function liquid supply mechanism 11 Function liquid droplet discharge head 15 Inlet part 51 Function liquid tank 52 Function liquid supply tube 53 Head side adapter (connecting tool) 58 Upstream end 59 Downstream end 61 X, Y Moving mechanism 86 Supply port portion 93 Elastic body 101 Tank mount 103 Height adjusting mechanism 121 Tank side adapter (connecting tool) 122 Tube connecting portion 131 Connecting needle 508 Film forming portion 617a Hole injection layer 617b Light emitting layer W Workpiece

Claims (9)

In a functional liquid supply mechanism connected to a functional liquid droplet ejection head for ejecting functional liquid droplets and supplying functional liquid to the functional liquid droplet ejection head,
A pack-type functional liquid tank that stores the degassed functional liquid by vacuum packing;
A functional liquid supply tube having an upstream end connected to the functional liquid tank and a downstream end connected to the functional liquid droplet ejection head;
A connector for connecting the supply port of the functional liquid tank and the upstream end of the functional liquid supply tube;
The connector is a tank connection that holds, at its base, a tube connection portion that holds the upstream end of the functional liquid supply tube, and a connection needle with a flow path that is detachably connected to the supply port portion. And
The functional liquid supply, wherein the base of the connection needle is inserted and connected in a liquid-tight manner by joining the tube connecting part and the tank connecting part to the upstream end of the functional liquid supply tube mechanism.   The tube connecting portion is a cylindrical male screw portion that fits the functional liquid supply tube into an axis, and
  A tube-side flange that supports the cylindrical male screw portion;
  A female screw cap that is screwed onto the outside of the cylindrical male screw portion;
  2. The functional liquid supply mechanism according to claim 1, further comprising: a tube-side O-ring interposed between the cylindrical male screw portion and the female screw cap and holding the functional liquid supply tube in a liquid-tight manner. .   3. The functional liquid supply mechanism according to claim 1, wherein a plurality of minute inflow holes connected to the flow path are formed at a distal end portion of the connection needle. The functional liquid supply mechanism according to any one of claims 1 to 3 , wherein the functional liquid tank is formed of a sealed pack having gas impermeability and waterproofness. The functional liquid supply mechanism according to any one of claims 1 to 4 , wherein the functional liquid supply tube has gas impermeability and waterproofness. A tank mount for supporting the functional liquid tank;
To the tank cradle can function according to any one of claims 1 to 5, wherein the height adjusting mechanism for adjusting the water head difference between said functional liquid tank the functional liquid droplet ejecting heads is incorporated Liquid supply mechanism. The functional liquid, the function of any one of claims 1 to 6, characterized in that as a main component deposition material constituting one of the hole injection layer and the luminescent layer of the organic EL device Liquid supply mechanism. A functional liquid supply mechanism according to any one of claims 1 to 7 ,
The functional liquid droplet ejection head;
A functional liquid droplet ejection apparatus comprising: an XY movement mechanism that moves a workpiece relative to the functional liquid droplet ejection head in the X-axis direction and the Y-axis direction. 9. A method of manufacturing an electro-optical device, wherein the functional liquid droplet ejection device according to claim 8 is used to form a film forming portion with the functional liquid droplets on the workpiece.

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