JP4339948B2 - 熱陰極電離真空計 - Google Patents

熱陰極電離真空計 Download PDF

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Publication number
JP4339948B2
JP4339948B2 JP04803299A JP4803299A JP4339948B2 JP 4339948 B2 JP4339948 B2 JP 4339948B2 JP 04803299 A JP04803299 A JP 04803299A JP 4803299 A JP4803299 A JP 4803299A JP 4339948 B2 JP4339948 B2 JP 4339948B2
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Japan
Prior art keywords
grid
filament
pressure measurement
cathode ionization
power
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Expired - Lifetime
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English (en)
Japanese (ja)
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JP2000241281A5 (enExample
JP2000241281A (ja
Inventor
真也 岩間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
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Canon Anelva Corp
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Priority to JP04803299A priority Critical patent/JP4339948B2/ja
Publication of JP2000241281A publication Critical patent/JP2000241281A/ja
Publication of JP2000241281A5 publication Critical patent/JP2000241281A5/ja
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Publication of JP4339948B2 publication Critical patent/JP4339948B2/ja
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  • Measuring Fluid Pressure (AREA)
JP04803299A 1999-02-25 1999-02-25 熱陰極電離真空計 Expired - Lifetime JP4339948B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04803299A JP4339948B2 (ja) 1999-02-25 1999-02-25 熱陰極電離真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04803299A JP4339948B2 (ja) 1999-02-25 1999-02-25 熱陰極電離真空計

Publications (3)

Publication Number Publication Date
JP2000241281A JP2000241281A (ja) 2000-09-08
JP2000241281A5 JP2000241281A5 (enExample) 2006-05-18
JP4339948B2 true JP4339948B2 (ja) 2009-10-07

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JP04803299A Expired - Lifetime JP4339948B2 (ja) 1999-02-25 1999-02-25 熱陰極電離真空計

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JP (1) JP4339948B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0213611D0 (en) 2002-06-13 2002-07-24 Boc Group Plc Vacuum Gauge
JP5728728B2 (ja) 2008-02-21 2015-06-03 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 高圧力動作用に設計された動作パラメータと形状とを有する電離真空計
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
KR102139933B1 (ko) * 2020-05-04 2020-07-31 홍승수 서미스터 센서를 이용한 진공게이지 및 가스 리크 검출기 일체형 검출장치
CN112629747A (zh) * 2020-12-29 2021-04-09 尚越光电科技股份有限公司 一种用于高腐蚀性蒸汽压监测的离子真空计

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JP2000241281A (ja) 2000-09-08

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