JP4306302B2 - Preliminary ejection method for liquid droplet ejection head, liquid droplet ejection apparatus, and electro-optical device manufacturing method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a droplet discharge head preliminary discharge method and a droplet discharge device for preliminarily discharging functional droplets from nozzle holes in order to eliminate thickening of the functional liquid.andManufacturing method of electro-optical deviceTo the lawIt is related.
[0002]
[Prior art]
In an inkjet printer, ink droplets are preliminarily ejected from the nozzle holes of a droplet ejection head as needed during a series of printing operations, thereby eliminating ink thickening due to evaporation of moisture in the nozzle holes and preventing non-ejection. In this case, one that can individually set the amount of ink discharged from each nozzle hole is known (for example, see Patent Document 1).
In this case, the preliminary ejection is performed by applying an analog waveform unrelated to the print data to the droplet ejection head via an FFC (Flat Flexible Cable), and ejecting ink simultaneously from all the nozzle holes. In general, the analog waveform increases in the influence of crosstalk as the FFC resistance (usually increases in proportion to the length) and the number of nozzle holes increase, resulting in disturbances (settling of the rising portion). It is known that a phase shift is likely to occur.
[0003]
In addition, as other ink jet printers, discharge is not performed for all nozzle holes by discharging to the outside of the edge of the printing object based on print data prior to drawing one line, but substantially. A device that also serves as a preliminary discharge is also known (see, for example, Patent Document 2).
This printer is of a system (Bubble Jet (registered trademark) system) that heats the ink in the liquid droplet discharge head and discharges ink droplets by its heat generation action. Even if only the nozzle holes are preliminarily ejected, the temperature of the ink rises due to the preliminarily ejecting from the surrounding nozzle holes, thereby reducing the viscosity of the thickened ink, so that the effect of the preliminary ejection can be substantially obtained. Is.
[0004]
[Patent Document 1]
JP 2000-233518 A (page 10, FIG. 3)
[Patent Document 2]
JP-A-6-278275 (page 13, FIG. 3)
[0005]
[Problems to be solved by the invention]
By the way, when drawing the filter elements of the color filter by applying the ink jet method, the nozzle holes used for drawing one line are limited due to the relationship between the pixel pitch and the arrangement pattern of three colors of RGB. In addition, as a functional liquid such as a filter material to be discharged, a liquid having a high viscosity such as a resin liquid may be used.
[0006]
According to the preliminary discharge method shown in Patent Document 1, since the discharge amount is individually set for each nozzle hole, efficient preliminary discharge in consideration of the viscosity of the functional liquid can be performed. However, since preliminary ejection is performed simultaneously from all nozzle holes, if all nozzle holes are not used for drawing one line, the analog waveform for preliminary ejection is disturbed due to crosstalk, flight bending, etc. A defectively ejected nozzle hole may occur. As a result, there is a problem that the nozzle surface becomes dirty, and as a result, the drawing of one line after the preliminary discharge becomes a drawing defect.
[0007]
On the other hand, according to the preliminary discharge method shown in Patent Document 2, since only the nozzle holes used for drawing one line are discharged to obtain the preliminary discharge effect, such a problem does not occur. However, as the viscosity of the functional liquid increases, the flow path resistance in the droplet discharge head increases, so that the viscosity of the thickened functional liquid is sufficient for the nozzle holes that are not ejected only by the temperature rise effect of the functional liquid. It does not decline.
For this reason, about the nozzle hole used for the drawing of the following 1 line, it becomes a discharge defect because of the thickening of a functional liquid, and cannot draw a several line satisfactorily. For this reason, it is necessary to frequently take recovery measures such as a suction process for forcibly sucking the functional liquid from the nozzle holes, resulting in a decrease in production efficiency.
[0008]
  The present invention relates to a droplet discharge head preliminary discharge method and a droplet discharge device capable of effectively preventing defective preliminary discharge while preventing increase in viscosity of the original functional liquid regardless of the viscosity of the functional liquidandManufacturing method of electro-optical deviceThe lawIts purpose is to provide.
[0009]
[Means for Solving the Problems]
  According to the preliminary discharge method of a droplet discharge head of the present invention, a droplet discharge head that performs drawing of one line by a droplet discharge head having a plurality of nozzle holes using a plurality of nozzle holes set in units of one line. In the preliminary ejection method, at least one line was set.Used for drawingpluraldrawingA flushing process for pre-discharging functional liquid droplets from a plurality of nozzle holes including nozzle holes, and a plurality of remaining nozzles not pre-ejected in the A flushing process among all nozzle holesNon-drawA B flushing step for pre-discharging functional liquid droplets from the nozzle holes,The A flushing process is performed immediately before drawing one line, and the B flushing process is performed immediately after drawing one line.It is performed.
In another preliminary discharge method of a droplet discharge head, droplet discharge is performed by drawing one line by a droplet discharge head having a large number of nozzle holes using a plurality of nozzle holes set in units of one line. In the preliminary ejection method of the head, an A flushing step for preliminary ejection of functional liquid droplets from a plurality of nozzle holes including a plurality of drawing nozzle holes used for drawing set in units of at least one line, and an A flushing step among all nozzle holes And a B flushing process in which functional liquid droplets are preliminarily ejected from a plurality of remaining non-drawing nozzle holes that are not preliminarily ejected in this order. It is characterized by that.
[0010]
  The droplet discharge apparatus of the present invention performs drawing of one line on a work by a droplet discharge head having a large number of nozzle holes using drawing nozzle holes composed of a plurality of nozzle holes set in units of one line. In the droplet discharge device, A flushing drive for preliminary discharge from a plurality of nozzle holes including drawing nozzle holes, and a plurality of remaining nozzles that are not pre-discharged by the A flushing drive among all nozzle holesNon-drawA control means for controlling the B flushing drive to be preliminarily ejected from the nozzle hole, and a droplet receiving portion for receiving the functional liquid droplet preliminarily ejected by the A flushing drive and the B flushing drive.Is performed immediately before drawing one line, and the B flushing drive is performed immediately after drawing one line.It is characterized by performing.
In addition, other liquid droplet ejection apparatuses draw one line on a work by a liquid droplet ejection head having a large number of nozzle holes by using a drawing nozzle hole composed of a plurality of nozzle holes set in units of one line. In the liquid droplet ejection apparatus, the A flushing drive for preliminary ejection from a plurality of nozzle holes including the drawing nozzle holes and the preliminary ejection from the remaining non-drawing nozzle holes that are not preliminarily ejected by the A flushing drive among all the nozzle holes A control unit that controls the B flushing drive, and a droplet receiving unit that receives functional droplets preliminarily ejected by the A flushing drive and the B flushing drive, and the control unit performs the B flushing drive immediately before drawing one line. A preliminary discharge is performed in the order of A flushing drive.
[0011]
According to these configurations, all of the many nozzle holes of the droplet discharge head include a plurality of nozzle holes used for drawing one line (hereinafter referred to as drawing nozzle holes), and the remaining plurality of nozzle holes. Are divided into nozzle holes (hereinafter referred to as non-drawing nozzle holes), and preliminary ejection based on the classification is performed individually, that is, at different timings with a time difference.
For this reason, in particular, the preliminary discharge of the drawing nozzle holes is not affected by the non-drawing nozzle holes (the influence of crosstalk due to the number of non-drawing nozzle holes), and the analog drive waveform for the preliminary discharge of the drawing nozzle holes Is stable. Thereby, the preliminary discharge of the drawing nozzle hole can be performed stably (the flying bend of the functional liquid droplet does not occur), and the subsequent drawing of one line can be satisfactorily performed regardless of the viscosity of the functional liquid. it can.
On the other hand, for the non-drawing nozzle holes, preliminary discharge is performed prior to or after drawing one line, and accordingly, thickening of the functional liquid is appropriately prevented. Thereby, even if the nozzle hole used for the next one-line drawing changes, the next one-line can be satisfactorily drawn without separately performing a suction process or the like.
The plurality of nozzle holes for which preliminary ejection is performed in the A flushing process / drive includes nozzle holes other than the drawing nozzle holes (hereinafter referred to as excessive nozzle holes). In this case, the allowable range of the surplus nozzle holes is a fluid range that varies depending on the properties of the functional liquid, the length of the FFC, and the like, but is set to a range that can maintain at least an analog waveform for preliminary ejection. .
[0013]
  Also,According to these configurations, processing on data is simplified. That is, by preliminarily incorporating data for preliminary ejection by the A flushing process into one line drawing data, it is not necessary to generate data for preliminary ejection dedicated to the excess nozzle holes.
[0014]
  In these cases, DoubleNumberNon-drawThe nozzle holes are divided into a plurality of groups of nozzle holes, and it is preferable that the B flushing process separately performs preliminary ejection with each group of nozzle holes as a unit with a time difference.
[0015]
According to these configurations, the preliminary discharge in the B flushing process is further subdivided, and the preliminary discharge of the plurality of sets of nozzle hole groups is performed at different timings. As a result, even if the number of drawing nozzle holes is extremely smaller than the number of non-drawing nozzle holes, the preliminary ejection of the non-drawing nozzle holes is not affected by crosstalk, and thus the drawing nozzle holes are adversely affected. It can be surely avoided.
[0016]
In these cases, the A flushing step and the B flushing step may be performed continuously prior to drawing one line when the moving droplet discharge heads pass relatively on the same droplet receiving portion. preferable.
[0017]
According to this configuration, the preliminary discharge of the drawing nozzle hole and the non-drawing nozzle hole can be continuously performed before the drawing by the relative movement of the droplet discharge head with respect to the droplet receiving portion. Further, the number of parts for the droplet receiving portion can be reduced.
[0018]
In this case, it is preferable that the relative movement of the droplet discharge head is continuous with the main scanning in drawing one line.
[0019]
According to this configuration, the droplet discharge head can be quickly shifted from the preliminary discharge to the drawing, and the drawing with the functional liquid in the nozzle hole being good can be performed.
[0023]
  The electro-optical device manufacturing method of the present invention uses the above-described droplet discharge device of the present invention, draws a plurality of lines on a substrate to be a workpiece, discharges functional droplets from a droplet discharge head, and the substrate It is characterized by forming a film forming part on top.
[0024]
According to this configuration, since the film forming process is performed using the above-described droplet discharge device, favorable droplet discharge can be performed from each nozzle hole, and the throughput of the electro-optical device can be improved. Examples of the electro-optical device (device) include a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, and an electrophoretic display device. The electron emission device is a concept including a so-called FED (Field Emission Display) device. Furthermore, the electro-optical device includes devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like.
[0027]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a droplet discharge device according to an embodiment of the present invention will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a production line for flat panel displays such as organic EL devices and liquid crystal display devices, and a functional liquid such as a luminescent material from a droplet discharge head to a substrate (work) by an inkjet method. Drawing is performed by selectively discharging droplets to form a desired film forming portion on the substrate. The characteristic part of the present invention is that the droplet discharge head effectively performs preliminary discharge (so-called flushing) prior to drawing while preventing thickening of the original functional liquid.
[0028]
FIG. 1 is a schematic diagram showing a basic configuration of a droplet discharge device. As shown in the figure, the droplet discharge device 1 is movable to an X / Y movement mechanism 2 including an X-axis table 3 and a Y-axis table 4 provided on a machine base (not shown), and to the X-axis table 3. An attached work table 7 and a carriage 8 movably attached to the Y-axis table 4 are provided. The carriage 8 is equipped with a droplet discharge head 9 for discharging functional droplets. On the work table 7, a substrate W as a work is set, and a pair of flushing boxes 11 and 11 for receiving preliminary discharge of the droplet discharge head 9 are incorporated.
[0029]
Although not shown in the drawings, the droplet discharge device 1 includes a functional liquid supply system that supplies a functional liquid to the droplet discharge head 9, a suction unit that sucks and stores the functional liquid with respect to the droplet discharge head 9, and the like. In addition, a control device 12 is provided for overall control of various components such as the XY movement mechanism 2 and the droplet discharge head 9 described above. As the functional liquid, in addition to general ink, a liquid containing a material corresponding to the purpose of various substrates W such as a filter material of a color filter or a liquid metal material that functions as a metal wiring after drawing is used.
[0030]
As shown in FIG. 2, the droplet discharge head 9 includes a nozzle plate 22 having a nozzle surface 21, a pump unit 23 connected to the nozzle plate 22, and a liquid introduction unit connected to an upper side (downward in the figure) of the pump unit 23. 24 and a head substrate 25 connected to the side of the pump unit 23. The liquid introduction part 24 has a connection needle to which a supply tube of a functional liquid supply system is connected.
[0031]
The head substrate 25 is connected to a head driver 72 connected to the control device 12 via a transmission system that transmits signals (see FIG. 1). Although the transmission system may be wireless, in this embodiment, the head driver 72 and the connector 28 protruding from the head substrate 25 are connected by wire using an FFC (Flat Flexible Cable) 73.
[0032]
The nozzle surface 21 faces the surface of the substrate W with a predetermined gap. One nozzle row 31 is formed on the nozzle surface 21. The nozzle row 31 is configured by arranging a large number (for example, 180) of nozzles 32 at an equal pitch in parallel in the Y-axis direction. Then, the functional liquid is ejected in the form of dots from the nozzle holes 33 opened in the nozzle surface 21.
[0033]
The pump unit 23 includes pressure chambers 41 and piezoelectric elements 42 (piezo elements) corresponding to the number of nozzles 32, and each pressure chamber 41 communicates with the nozzles 32. The pump unit 23 includes a mechanism unit 43 that accommodates the piezoelectric element 42, a silicon cavity 44 to which the nozzle plate 22 is bonded, and a resin film 45 that joins the mechanism unit 43 and the silicon cavity 44.
[0034]
The piezoelectric element 42 is displaced according to the drive waveform (analog trapezoidal wave) of the drive signal applied from the head driver 72, and causes a pressure fluctuation in the pressure chamber 41. Due to the pressure fluctuation in the pressure chamber 41, the functional liquid in the pressure chamber 41 is discharged from the nozzle hole 33 as functional droplets. The drive waveform for main discharge (drawing) on the substrate W and the drive waveform for preliminary discharge are both configured in the same waveform shape. Preliminary ejection data for preliminary ejection is incorporated in drawing pattern data for main ejection and stored in the storage area of the control device 12.
[0035]
Needless to say, the number of nozzles, the number of nozzle rows, and the extending direction of the nozzle rows of the droplet discharge head 9 are not limited to this embodiment. For example, the droplet discharge head 9 may be inclined at a predetermined angle in the same direction. In addition, the number of droplet discharge heads 9 is not limited to a single one, and in the case where there are a plurality of these, the arrangement pattern is arbitrary such as a staggered arrangement or a staircase arrangement.
[0036]
As shown in FIG. 1, the pair of flushing boxes 11 and 11 (droplet receiving portions) are incorporated at both ends of the work table 7 in the X-axis direction so as to sandwich the mounting area of the substrate W of the work table 7. Yes. The pair of flushing boxes 11, 11 are formed in the same substantially elongated shape, and a functional liquid absorbent material is laid in the inside thereof.
[0037]
The pair of flushing boxes 11, 11 move toward the droplet discharge head 9 together with the substrate W by the movement of the work table 7, and face this. The functional liquid droplets preliminarily ejected from each nozzle hole 33 of the liquid droplet ejection head 9 are impregnated and held in the functional liquid absorbent 11 of the flushing box. The functional liquid received by the flushing box 11 is stored in a waste liquid tank via a drainage tube communicating with the functional liquid (all not shown).
[0038]
As shown in FIG. 1, the XY movement mechanism 2 is a so-called X / Y two-axis robot, and the X-axis table 3 is positioned below the Y-axis table 4. The X-axis table 3 has a pulse-driven linear motor 61 and an X-axis slider 62 that incorporates the linear motor 61 and has a work table 7 mounted movably in the X-axis direction. The linear motor 61 is driven via a motor driver 74 connected to the control device 12, and the X-axis table 3 moves the substrate W and each flushing box 11 in the X-axis direction via the work table 7.
[0039]
Similarly, the Y-axis table 4 has a pulse-driven linear motor 65 and a Y-axis slider 66 that incorporates the linear motor 65 and has the carriage 8 mounted so as to be movable in the Y-axis direction. The linear motor 65 is driven via a motor driver 75 connected to the control device 12, and the Y-axis table 4 moves the droplet discharge head 9 in the Y-axis direction via the carriage 8.
[0040]
As shown in FIGS. 1 and 3, in the droplet discharge device 1 of the present embodiment, the drawing of one line on the substrate W by the droplet discharge head 9 is synchronized with the movement of the substrate W by the X-axis table 3. This is performed by the droplet discharge head 9 being driven to discharge. That is, so-called main scanning (moving operation including drawing of one line) of the droplet discharge head 9 is performed by a forward movement operation (or backward movement operation) of the substrate W in the X axis direction by the X axis table 3. The so-called sub-scanning is performed by a forward movement operation that is a pitch feeding operation of the droplet discharge head 9 in the Y-axis direction by the Y-axis table 4.
[0041]
In a series of drawing operations, such an operation is repeated, and a plurality of lines (first line, second line, third line,...) Are drawn on the substrate W. Prior to drawing each line, the droplet discharge head 9 performs preliminary discharge to the flushing box 11 (details will be described later).
[0042]
In the present embodiment, drawing is performed in any of the reciprocating motions of the substrate W, but it is of course possible to draw only in the forward motion. Further, although the substrate W is moved in the main scanning direction with respect to the droplet discharging head 9, a configuration in which the droplet discharging head 9 is moved in the main scanning direction may be employed. Further, the substrate W may be fixed and the droplet discharge head 9 may be moved in the main scanning direction and the sub-scanning direction. Conversely, the droplet discharge head 9 may be fixed and the substrate W may be fixed in the main scanning direction. It may be configured to move in the sub-scanning direction.
[0043]
The control device 12 has a CPU 71 for controlling the operation of various constituent devices, and stores control data such as a control program for executing the braking operation of the droplet discharge device 1 and drawing pattern data. In addition, it has a work area for performing various control processes.
[0044]
For example, the control device 12 controls the relative movement operation of the work table 7 and the carriage 8 by the XY movement mechanism 2 via the motor drivers 74 and 75 based on the drawing pattern data, and controls the head driver 72. The main discharge drive for main discharge to the droplet discharge head 9 is controlled. Further, the control device 12 functions as a setting unit that sets the nozzle holes 33 to be preliminarily ejected to the respective flushing boxes 11, and controls the flushing drive to be preliminarily ejected to the droplet ejection head 9 based on this setting.
[0045]
Here, with reference to FIG. 4 and FIG. 5, the first embodiment of the preliminary discharge method of the droplet discharge head 9 will be described in detail.
[0046]
FIG. 4 is an explanatory diagram schematically showing the nozzle holes 33 of the droplet discharge head 9 used for drawing one line. As shown in the figure, for example, a filter element (pixel) made of a functional liquid (filter material) of R (red), G (green), or B (blue) is provided on the surface of the substrate W of the color filter. Consider the case of forming a matrix with a stripe arrangement. The stripe arrangement is a color scheme in which all the rows of the matrix (rows in the main scanning direction) have the same color.
[0047]
One filter element is assumed to be drawn by discharging functional droplets from one nozzle hole 33. Furthermore, it is possible to introduce one color of functional liquid into one liquid droplet ejection head 9, but here, in order to draw an R color filter element, the liquid droplet ejection head 9 has an R color functional liquid. Is supplied from the functional liquid supply system. In such a case, all the nozzle holes 33 of the droplet discharge head 9 are set as follows.
[0048]
Specifically, as shown in the figure, a plurality of nozzle holes 33a (hereinafter referred to as drawing nozzle holes 33a) used for drawing one line of the droplet discharge head 9 corresponding to the filter element of R color. ) Is set. Also, a plurality of nozzle holes 33b (hereinafter referred to as non-drawing nozzle holes 33b) that are not used for drawing one line are set corresponding to the remaining G / B color filter elements. That is, one line is drawn with a so-called low duty setting using only a plurality of nozzle holes 33 among all the nozzle holes 33.
[0049]
A preliminary discharge method of the droplet discharge head 9 in which the drawing nozzle holes 33a are set in this way will be described with reference to FIG. As described above, in one main scan of the droplet discharge head 9, the droplet discharge head 9 continuously faces one flushing box 11, the drawing area of the substrate W, and the other flushing box 11 in order.
[0050]
In the present embodiment, prior to drawing one line on the substrate W by the drawing nozzle hole 33a, preliminary discharge is performed from the drawing nozzle hole 33a to the one flushing box 11. In addition, after one line is drawn on the substrate W, preliminary ejection is performed from the non-drawing nozzle hole 33 b to the other flushing box 11. That is, the A flushing drive for preliminary ejection from the drawing nozzle hole 33a and the B flushing drive for preliminary ejection from the non-drawing nozzle hole 33b are performed individually with a time difference.
[0051]
Therefore, according to the A flushing drive, functional droplets of R color are preliminarily discharged simultaneously from all the nozzle holes 33 constituting the drawing nozzle hole 33a. On the other hand, according to the B flushing drive after drawing one line, first, only a plurality of nozzle holes 33 corresponding to the B color among the non-drawing nozzle holes 33b are preliminarily discharged, and then the G color is changed to the G color. Only the corresponding plurality of nozzle holes 33 are simultaneously preliminarily ejected with functional droplets.
[0052]
Then, after one main scan is completed, the next main scan of the droplet discharge head 9 sub-scanned by one pitch is similarly performed with the A flushing drive while passing over the flushing box 11 on the main scan start side. The B flushing drive is performed on the flushing box 11 on the main scanning end side. Such preliminary ejection is performed based on the drawing pattern data transmitted to the droplet ejection head 9 via the FFC 73 as described above.
[0053]
According to the preliminary discharge method of the first embodiment, since the preliminary discharge of the droplet discharge head 9 does not simultaneously perform the drawing nozzle hole 33a and the non-drawing nozzle hole 33b, the influence of crosstalk is caused when the drive waveform is transmitted by the FFC 73. Preliminary ejection can be performed from the drawing nozzle hole 33a without receiving (mainly the number of non-drawing nozzle holes 33b). As a result, the drawing nozzle hole 33a performs appropriate preliminary discharge without causing the flight bending of the functional liquid droplets while preventing thickening of the original functional liquid, so that the subsequent drawing of one line on the substrate W is performed. It can be done well.
[0054]
The non-drawing nozzle holes 33b are divided into a plurality of groups (in this case, two groups of G color and B color), and the preliminary ejection in units of each group of nozzle holes has a time difference. In the same manner, it is performed independently of each other, and is not affected by crosstalk (mainly due to the fact that the number of non-drawing nozzle holes 33b is extremely larger than the number of drawing nozzle holes 33a). Appropriate preliminary ejection can be performed from the drawing nozzle hole 33b, and thickening of the functional liquid can also be prevented for the non-drawing nozzle hole 33b.
[0055]
As a result, even if the nozzle hole 33 used for drawing the next one line (for example, the second line) changes, that is, even when a different drawing nozzle hole 33a is set for each line, the non- Since the thickening of the functional liquid in the drawing nozzle hole 33b is prevented, the next one line can be drawn satisfactorily.
[0056]
Next, with reference to FIG. 6, a preliminary ejection method for the droplet ejection head 9 according to the second embodiment will be described. The second embodiment is the same as the first embodiment in that preliminary ejection is performed by setting the drawing nozzle holes 33a and the non-drawing nozzle holes 33b shown in FIG. The difference is that in the second embodiment, the preliminary discharge from the drawing nozzle hole 33a and the preliminary discharge from the non-drawing nozzle hole 33b are applied to the same flushing box 11 prior to drawing one line on the substrate W. Is to do.
[0057]
That is, the droplet discharge head 9 individually performs preliminary discharge from the drawing nozzle hole 33a and the non-drawing nozzle hole 33b with a time difference while passing over the flushing box 11 on the main scanning start side. After drawing one line on W, preliminary ejection is not performed on the flushing box 11 on the main scanning end side. At this time, of course, the preliminary ejection of the non-drawing nozzle holes 33b is performed individually with a time difference for each group (two groups of G color and B color) as a unit. The same preliminary discharge is performed in the next main scan after the sub-scan for one pitch.
[0058]
Accordingly, as in the first embodiment, defective preliminary ejection is effectively prevented while preventing thickening of the original functional liquid, so that a plurality of lines can be satisfactorily drawn on the substrate W. . The drawing nozzle hole 33a and the non-drawing nozzle hole 33b may be preliminarily discharged in any order, but the preliminary discharge from the drawing nozzle hole 33a is set immediately before drawing on the substrate W as shown in FIG. Thus, it is possible to perform drawing on the substrate W better and reliably.
[0059]
In any of the above embodiments, the drawing nozzle hole 33a and the plurality of nozzle holes 33 preliminarily ejected by the A flushing drive are exactly the same. A plurality of nozzle holes 33 other than the drawing nozzle holes 33a (hereinafter referred to as excess nozzle holes) may be included.
[0060]
In this case, the allowable range of the surplus nozzle hole varies depending on the properties of the functional liquid, the length of the FFC 73, etc., but at least the drawing waveform of the drawing nozzle hole 33a by the A flushing drive and the predischarge driving waveform of the surplus nozzle hole can be maintained. Set to range. That is, the number of excess nozzle holes can be set to such an extent that the drive waveform is not disturbed by the influence of crosstalk in the transmission system such as the FFC 73. In addition, as in the above-described embodiments, even when the number of non-drawing nozzle holes 33b is larger than the number of drawing nozzle holes 33a, the preliminary ejection by the B flushing drive is collectively performed (a plurality of sets). Without dividing into nozzle hole groups.)
[0061]
In any of the above embodiments, the drawing nozzle holes 33a are set in relation to the arrangement pattern of the three colors of RGB, but of course the present invention is not limited to this. For example, when functional droplets are ejected to almost all pixels in a matrix form (for example, when a hole injection / transport layer 510a of an organic EL device 500 described later is drawn), the pixel pitch and nozzle holes When the pitch does not match, the nozzle hole 33 that can correspond to the pixel becomes the drawing nozzle hole 33a, and the nozzle hole 33 that cannot correspond to the pixel is set as the non-drawing nozzle hole 33b.
[0062]
Next, with reference to FIG. 7, a preliminary ejection method for the droplet ejection head 9 according to the third embodiment will be described. In the third embodiment, unlike the setting of the drawing nozzle hole 33a shown in FIG. 4 in each of the above embodiments, as shown in FIG. 4A, the droplet discharge head 9 includes a drawing nozzle hole 33a and a non-drawing nozzle. The holes 33b are alternately set in the arrangement direction. Regardless of this setting, preliminary ejection from all nozzle holes 33 is performed on the flushing box 11 on the main scanning start side prior to drawing one line.
[0063]
In this case, all the nozzle holes 33 are divided into a plurality of nozzle hole groups (three sets in the figure), and the nozzle holes 33 to be pre-discharged are set in units of the nozzle hole groups of the respective groups. Preliminary discharge from each group of nozzle holes is performed individually with a time difference. That is, all the nozzle holes 33 are divided into a plurality of groups so that all the nozzle holes 33 are not preliminarily discharged at the same time, that is, the pre-discharge of all the nozzle holes 33 is performed before drawing on the substrate W. Discharge is effectively performed at different timings. As a result, it is possible to effectively prevent defective preliminary ejection while preventing thickening of the original functional liquid.
[0064]
However, the number of nozzle holes 33 that can be included in each group of nozzle hole groups only needs to be approximately the same as the number of drawing nozzle holes 33a set in units of one line. Specifically, it may be equal to or less than the number of drawing nozzle holes 33a that are not affected by crosstalk, but similarly to the above, other than the number of drawing nozzle holes 33a, the drive waveform is not disturbed by the influence of crosstalk. It is permissible to add the number of nozzle holes 33.
[0065]
By the way, the droplet discharge apparatus 1 of the present embodiment can be used for manufacturing various electro-optical devices (devices) by using functional liquids made of various materials. That is, it can be applied to the manufacture of liquid crystal display devices, organic EL devices, PDP devices, electrophoretic display devices, and the like. Of course, the present invention can also be applied to the manufacture of color filters used in liquid crystal display devices and the like. As other electro-optical devices, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable. In addition, an electronic apparatus including these electro-optical devices, for example, a mobile phone equipped with a flat panel display can be provided.
[0066]
Therefore, a manufacturing method using the droplet discharge device 1 will be described by taking a manufacturing method of a liquid crystal display device and a manufacturing method of an organic EL device as examples, and other devices will also be described briefly.
[0067]
FIG. 8 is a cross-sectional view of the liquid crystal display device. As shown in the figure, the liquid crystal display device 450 is configured by combining a color filter 400 and a counter substrate 466 between upper and lower polarizing plates 462 and 467 and enclosing a liquid crystal composition 465 therebetween. Yes. In addition, alignment films 461 and 464 are formed between the color filter 400 and the counter substrate 466, and TFT (thin film transistor) elements (not shown) and pixel electrodes 463 are arranged in a matrix on the inner surface of the counter substrate 466. Is formed.
[0068]
The color filter 400 includes pixels (filter elements) arranged in a matrix, and a boundary between the pixels is divided by a bank 413. One of the filter materials (functional liquid) of red (R), green (G), and blue (B) is introduced into each pixel. That is, the color filter 400 includes a light-transmitting substrate 411 and a light-blocking bank 413. The portion where the bank 413 is not formed (removed) constitutes the pixel, and the filter material of each color introduced into the pixel constitutes the colored layer 421. Overcoat layers 422 and electrode layers 423 are formed on the top surfaces of the banks 413 and the colored layers 421.
[0069]
In the droplet discharge device 1 according to the present embodiment, the R, G, and B functional liquids are selected for each colored layer formation region by the droplet discharge head 9 in the pixels formed by being partitioned by the bank 413. Is discharged. And the colored layer 421 used as the film-forming part is obtained by drying the applied functional liquid. In the droplet discharge device 1, various film forming portions such as the overcoat layer 422 are formed by the droplet discharge head 9. Of course, in the drawing, the above-described preliminary discharge method is used, and the droplet discharge head 9 can discharge functional droplets in a good state.
[0070]
Similarly, an organic EL device and a manufacturing method thereof will be described with reference to FIG. As shown in the figure, the organic EL device 500 has a circuit element unit 502 laminated on a glass substrate 501, and a main organic EL element 504 laminated on the circuit element unit 502. A sealing substrate 505 is formed above the organic EL element 504 with an inert gas space.
[0071]
In the organic EL element 504, a bank 512 is formed by an inorganic bank layer 512 a and an organic bank layer 512 b superimposed on the inorganic bank layer 512 a, and a matrix pixel is defined by the bank 512. In each pixel, a pixel electrode 511, a light emitting layer 510b of any one of R, G, and B and a hole injection / transport layer 510a are stacked from the bottom, and a plurality of thin films such as Ca and Al are formed as a whole. It is covered with the counter electrode 503 laminated over the entire area.
[0072]
In the droplet discharge device 1 of the present embodiment, the R, G, and B light emitting layers 510b and the hole injection / transport layer 510a are formed. In the droplet discharge device 1, after forming the hole injection / transport layer 510 a, the counter electrode 503 is formed using a liquid metal material such as Ca or Al as a functional liquid introduced into the droplet discharge head 9. Are equal. Of course, in the drawing, the above-described preliminary discharge method is used, and the droplet discharge head 9 discharges functional droplets in a good state.
[0073]
The above-described preliminary ejection method is also used in the device manufacturing method described below.
[0074]
That is, in the manufacturing method of the PDP apparatus, fluorescent materials of R, G, and B colors are introduced into a plurality of droplet discharge heads 9, and the plurality of droplet discharge heads 9 are main-scanned and sub-scanned to selectively select the fluorescent material. The phosphors are respectively formed in a large number of recesses on the rear substrate (work W).
[0075]
In the method of manufacturing the electrophoretic display device, each color of the electrophoretic material is introduced into the plurality of liquid droplet ejection heads 9, and the plurality of liquid droplet ejection heads 9 are main-scanned and sub-scanned to selectively eject the electrophoretic material. Thus, phosphors are respectively formed in a large number of recesses on the electrode (work W). In addition, it is preferable that the migrating body composed of the charged particles and the dye is enclosed in a microcapsule.
[0076]
In the metal wiring forming method, a liquid metal material is introduced into a plurality of droplet discharge heads 9, the plurality of droplet discharge heads 9 are main-scanned and sub-scanned, and the liquid metal material is selectively discharged to form a substrate (workpiece). W) A metal wiring is formed thereon. For example, these devices can be manufactured by applying to a metal wiring connecting the driver and each electrode in the liquid crystal display device or a metal wiring connecting the TFT and the like in the organic EL device to each electrode. In addition to this type of flat panel display, it goes without saying that it can be applied to general semiconductor manufacturing techniques.
[0077]
In the lens forming method, a lens material is introduced into a plurality of droplet discharge heads 9, the plurality of droplet discharge heads 9 are subjected to main scanning and sub-scanning, and the lens material is selectively discharged to form a transparent substrate (work W ) A large number of microlenses are formed thereon. For example, the present invention is applicable when manufacturing a beam focusing device in the FED apparatus. Moreover, it is applicable also to the manufacturing technology of various optical devices.
[0078]
In the lens manufacturing method, a translucent coating material is introduced into a plurality of droplet discharge heads 9, the plurality of droplet discharge heads 9 are subjected to main scanning and sub-scanning, and the coating material is selectively discharged. A coating film is formed on the surface.
[0079]
In the resist forming method, a resist material is introduced into a plurality of droplet discharge heads 9, the plurality of droplet discharge heads 9 are subjected to main scanning and sub-scanning, and the resist material is selectively discharged to form a substrate (work W). A photoresist having an arbitrary shape is formed. For example, in addition to the formation of banks in the various display devices described above, the present invention can be widely applied to the application of a photoresist in a photolithography method that forms the main body of semiconductor manufacturing technology.
[0080]
In the light diffusing body forming method, a light diffusing material is introduced into a plurality of droplet discharge heads 9, the plurality of droplet discharge heads 9 are subjected to main scanning and sub-scanning, and a light diffusing material is selectively discharged to form a substrate ( A number of light diffusers are formed on the workpiece W). It goes without saying that this case is also applicable to various optical devices.
[0081]
【The invention's effect】
According to the preliminary discharge method of the droplet discharge head of the present invention, the liquid droplet discharge head is divided into those including a plurality of nozzle holes used for drawing one line and the remaining plurality of nozzle holes, and based on the division. Preliminary ejection of functional liquid droplets is performed independently of each other. Therefore, regardless of the viscosity of the functional liquid, it is possible to prevent thickening of the original functional liquid for all nozzle holes. Discharge can be effectively prevented.
[0082]
According to another preliminary ejection method for a droplet ejection head of the present invention, all nozzle holes are divided into a plurality of nozzle hole groups, and preliminary ejection in units of nozzle hole groups is performed prior to drawing one line. Since each set is performed independently and independently, similarly to the above, it is possible to effectively prevent defective preliminary ejection while preventing the thickening of the original functional liquid.
[0083]
According to the droplet discharge apparatus of the present invention, the above-described preliminary discharge method is executed when drawing on a workpiece, so that drawing of one line as well as drawing of a plurality of lines can be performed quickly and satisfactorily regardless of the viscosity of the functional liquid. Can be done.
[0084]
According to the method of manufacturing an electro-optical device, the electro-optical device, and the electronic apparatus of the present invention, since it is a film forming process using the above-described droplet discharge device, various electro-optical devices with high quality and high reliability, An electronic device can be provided.
[Brief description of the drawings]
FIG. 1 is a diagram schematically showing a basic configuration of a droplet discharge device according to an embodiment of the present invention, (a) a plan view and (b) a front view.
2A and 2B are diagrams showing a droplet discharge head, in which FIG. 2A is a perspective view, and FIG. 2B is an enlarged cross-sectional view around a nozzle hole.
FIG. 3 is an explanatory view schematically showing a drawing operation of the droplet discharge device.
FIG. 4 is an explanatory diagram for describing nozzle holes of a droplet discharge head set in units of one line.
FIG. 5 is an explanatory diagram showing a preliminary discharge method of the droplet discharge head according to the first embodiment.
FIG. 6 is an explanatory diagram showing a preliminary discharge method of a droplet discharge head according to a second embodiment.
FIG. 7 is an explanatory diagram showing a preliminary discharge method of a droplet discharge head according to a third embodiment.
FIG. 8 is a cross-sectional view of a liquid crystal display device manufactured by the droplet discharge device of the embodiment.
FIG. 9 is a cross-sectional view of an organic EL device manufactured by the droplet discharge device according to the embodiment.
[Explanation of symbols]
1 Droplet ejection device
2 XY movement mechanism
8 Carriage
9 Droplet discharge head
11 Flushing box (droplet receiver)
12 Control device
33 Nozzle hole
73 FFC
W substrate
450 Liquid crystal display
500 Organic EL device

Claims (8)

In a preliminary discharge method of a droplet discharge head in which drawing of one line by a droplet discharge head having a large number of nozzle holes is performed using a plurality of nozzle holes set in units of one line,
A flushing step of pre-discharging functional liquid droplets from a plurality of nozzle holes including a plurality of drawing nozzle holes used for the drawing set in units of at least one line;
A B flushing step of preliminarily discharging functional liquid droplets from a plurality of remaining non-drawing nozzle holes which are not preliminarily discharged in the A flushing step among all nozzle holes,
The preliminary discharge method for a droplet discharge head, wherein the A flushing step is performed immediately before the one line is drawn, and the B flushing step is performed immediately after the one line is drawn .   In a preliminary discharge method of a droplet discharge head in which drawing of one line by a droplet discharge head having a large number of nozzle holes is performed using a plurality of nozzle holes set in units of one line,
  A flushing step of pre-discharging functional liquid droplets from a plurality of nozzle holes including a plurality of drawing nozzle holes used for the drawing set in units of at least one line;
  A B flushing step for preliminarily discharging functional liquid droplets from a plurality of remaining non-drawing nozzle holes that are not preliminarily ejected in the A flushing step among all the nozzle holes,
  A preliminary ejection method for a droplet ejection head, wherein preliminary ejection is performed in the order of the B flushing step and the A flushing step immediately before the drawing of the one line. The A flushing step and the B flushing step are continuously performed prior to the drawing of the one line when the moving droplet discharge heads pass relatively on the same droplet receiving portion. The preliminary discharge method for a droplet discharge head according to claim 2 . The preliminary discharge method of the droplet discharge head according to claim 3 , wherein the relative movement of the droplet discharge head is continuous with main scanning in the drawing of the one line. Before SL plurality of non-imaging nozzle holes are divided into a plurality of sets of nozzles hole group,
Wherein B flushing step, the liquid droplet ejection head according to any one of claims 1 to 4, characterized in that separately to each other preliminary discharge in units of nozzle hole group of each set to exist a time difference Pre-discharge method. In a droplet discharge apparatus that performs drawing of one line on a workpiece by a droplet discharge head having a large number of nozzle holes using drawing nozzle holes composed of a plurality of nozzle holes set in units of one line.
A flushing drive for preliminary ejection from a plurality of nozzle holes including the drawing nozzle holes, and B flushing drive for preliminary ejection from a plurality of remaining non-drawing nozzle holes not preliminarily ejected by the A flushing drive among all nozzle holes are controlled. Control means;
A droplet receiver that receives functional droplets preliminarily ejected by the A flushing drive and the B flushing drive,
The droplet ejection apparatus, wherein the control means performs the A flushing drive immediately before drawing the one line and performs the B flushing drive immediately after drawing the one line . In a droplet discharge apparatus that performs drawing of one line on a workpiece by a droplet discharge head having a large number of nozzle holes using drawing nozzle holes composed of a plurality of nozzle holes set in units of one line.
  A flushing drive for preliminary ejection from a plurality of nozzle holes including the drawing nozzle holes, and B flushing drive for preliminary ejection from a plurality of remaining non-drawing nozzle holes not preliminarily ejected by the A flushing drive among all nozzle holes are controlled. Control means;
  A droplet receiver that receives functional droplets preliminarily ejected by the A flushing drive and the B flushing drive,
  The droplet ejection apparatus, wherein the control means performs preliminary ejection in the order of the B flushing drive and the A flushing drive immediately before the drawing of the one line. Using the droplet discharge device according to claim 6 or 7 ,
A method of manufacturing an electro-optical device, wherein a plurality of lines are drawn on a substrate to be the workpiece, and functional film droplets are ejected from the droplet ejection head to form a film forming portion on the substrate.

Images