JP4271399B2 - Method for forming Re film by electrolytic plating using Cr (III) -containing bath - Google Patents

Method for forming Re film by electrolytic plating using Cr (III) -containing bath Download PDF

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JP4271399B2
JP4271399B2 JP2002010787A JP2002010787A JP4271399B2 JP 4271399 B2 JP4271399 B2 JP 4271399B2 JP 2002010787 A JP2002010787 A JP 2002010787A JP 2002010787 A JP2002010787 A JP 2002010787A JP 4271399 B2 JP4271399 B2 JP 4271399B2
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plating
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JP2003213479A (en
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敏夫 成田
重成 林
隆幸 吉岡
浩 八鍬
道明 相馬
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敏夫 成田
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Priority to JP2002010787A priority Critical patent/JP4271399B2/en
Priority to PCT/JP2003/000353 priority patent/WO2003062500A1/en
Priority to US10/501,720 priority patent/US6979392B2/en
Priority to EP03701766A priority patent/EP1467001A4/en
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Description

【0001】
【発明の属する技術分野】
本発明は、高温装置部材用の耐食皮膜などに用いられるRe皮膜の形成方法に関わる。
【0002】
【従来の技術】
ジエットエンジンやガスタービンのブレードなどに用いられるNi基超合金基材は耐酸化性や耐腐食性が強く求められる。このため、表面にAl等の拡散処理を行い、例えば、Al2O3皮膜を施して高温耐酸化性を得ている。しかし、その性能は十分ではなく、基材にPtなどを用いた拡散バリヤーを設けるなどの手段が開発されている。この拡散バリヤー層としてReを用いると耐高温腐食性が向上させることができる。また、Reは、耐熱衝撃性に優れ、ロケットエンジンの燃焼器などの各種燃焼器や高温用ノズルなどの高温部材として使用されている。これまで、Re皮膜やRe合金皮膜の形成方法としては下記のようなものが知られている。
【0003】
(1)スパッタ法または物理蒸着法
膜厚や組成の制御が容易である一方、▲1▼基材の大きさや形状に制限が多い、▲2▼装置が大掛かりで、操作も複雑である、▲3▼欠陥やき裂の多い皮膜が形成される、などの問題点を持つ。
(2)溶射法
▲1▼欠陥の多い皮膜が形成される、▲2▼薄い膜(10μm以下)の形成に不向きである、▲3▼歩留まりが悪く不経済である、などの問題点を持つ。
(3)Re合金の電解めっき方法
Re含有量が最高で50重量%(原子組成ではより低い割合となる)のNi-Cr-ReやRe含有量が最高で85重量%(63原子%)の電気接点用のRe-Ni合金のめっきなどが知られているが、Reの含有量が低い。
【0004】
【発明が解決しようとする課題】
本発明は、スパッタ法や物理蒸着法などでは解決できない複雑形状への施工を可能にすると共に、溶射法では解決できない薄膜施工、および、両者と比較して安価にかつ簡便にReを電解めっきで形成する方法を提供する。
【0005】
【課題を解決するための手段】
発明者らは、遷移金属イオンとして過レニウム酸イオンのみを含む浴からReはほとんど電解析出しないが、過レニウム酸イオンとCr3+イオンが共存する浴からは、浴中の過レニウム酸イオンと他の金属イオンの濃度比、および浴のpHを制御することによって、Crはほとんど電解析出せずに、98原子%以上の純度のReのみが電解析出することを見出した。
【0006】
すなわち、本発明は、過レニウム酸イオンを0.001mol/l以上2.0mol/l以下、Cr3+イオンを0.01mol/l以上10.0mol/l以下含有し、かつ、めっき浴中の過レニウム酸イオンの、Cr3+イオンに対するモル比が0.1以上であり、さらに全金属イオン濃度に対して 0.1 以上 15.0 当量以下の濃度の有機酸、 0.0001mol/l 以上 5.0mol/l 以下の臭素イオンを含有し、pHが、0〜5、液温が、10〜80℃である水溶液からなるめっき浴を用いて、電解により原子組成でReが98%以上、残りをCrおよび不可避的な不純物とする皮膜を形成することを特徴とするReの電解めっき方法であり、これによって、98%以上の純度Reを電解析出させることが可能となる。
【0007】
過レニウム酸イオンが0.001mol/l未満では、めっき中のRe濃度が低く、2.0mol/lより多いと不溶性物質を生成してしまう。また、Cr3+イオン濃度が0.01mol/l未満では、Reの電解析出効率が著しく低く、10.0mol/lより多いと不溶性物質を生じてしまう。したがって、過レニウム酸イオンを0.001mol/l以上2.0mol/l以下、Cr3+イオン濃度を0.001mol/l以上10.0mol/l以下に限定した。
【0008】
めっき浴のpHは0〜5、めっきが行われる液温は10〜80℃が好ましい。これらによって、被覆力が高く、組成が均一なめっきが得られる。pHが0未満ではめっきの被覆力が低下し、5より大きいと不溶性物質が多く液の流動性が損なわれるとともに、皮膜中のRe濃度が低くなる。また、めっきが行われる液温が10℃より低いと電解析出効率が著しく低下し、80℃より高いと被覆力が低下する。したがって、浴のpHは0〜5、めっきが行われる液温は10〜80℃に限定した。より好ましくは、浴のpHが2〜5、めっきが行われる温度が20〜40℃である。
【0009】
本発明の方法により形成される原子組成でReが98%以上、残りをCrおよび不可避的な不純物とする皮膜によって、被めっき材に、基材の種類および目的に応じた機能を付与することが可能となる。
【0010】
また、本発明は、めっき浴が有機酸を含有することを特徴とする上記の電解めっき方法であり、これによって、より安定した組成の皮膜を得ることが可能となる。有機酸の種類および濃度を特定することによって、より安定した組成の皮膜を得ることが可能となる。有機酸濃度が、全金属イオン濃度に対して0.1当量未満であると十分な効果は得られず、15.0当量より多いと不溶性物を生じ、液の流動性を損なう。したがって、有機酸濃度は0.1以上15.0当量以下に限定した。
【0011】
有機酸は、ヒドロキシカルボン酸、カルボン酸およびアミノ酸か選ばれた少なくとも1種であることが好ましい。ヒドロキシカルボン酸は、乳酸、ヒドロキシ酪酸、グリコール酸、マンデル酸、リンゴ酸、酒石酸、グルコン酸、クエン酸またはこれらの可溶性塩から選ばれた少なくとも1種であることが好ましい。カルボン酸は、酢酸、プロピオン酸、ギ酸、シュウ酸、アクリル酸、マロン酸、エチレンジアミン4酢酸またはこれらの可溶性塩から選ばれた少なくとも1種であることが好ましい。アミノ酸は、グリシン、アラニン、プロリン、バリン、ロイシン、イソロイシン、メチオニン、セリン、システイン、アスパラギン、グルタミン、チロシンから選ばれた少なくとも1種であることが好ましい。
【0012】
また、本発明は、0.0001mol/l以上5.0mol/l以下のアンモニウムイオンおよび/または0.0001mol/l以上5.0mol/l以下のホウ酸を含有することを特徴とする上記の電解めっき方法であり、これによって、浴を安定化し、厚さの均一な皮膜形成を可能とする。アンモニウムイオンまたはホウ酸が0.0001mol/l未満では、めっき斑が生じ、5.0mol/lより多いと不溶性物を生じ、液の流動性を損なう。したがって、アンモニウムイオンおよびホウ酸は0.0001mol/l以上5.0mol/l以下に限定した。
【0013】
また、本発明は、めっき浴が、0.0001mol/l以上5.0mol/l以下の臭素イオンを含有することを特徴とする上記の電解めっき方法であり、これによって、有毒な塩素ガスの発生を抑制する。臭素イオン濃度が0.0001mol/l未満では、効果がみられず、5.0mol/lより大きいとBrを主成分とするガスを発生してしまうため、臭素イオン濃度は0.0001mol/l以上5.0mol/l以下に限定した。
【0014】
また、本発明は、めっき浴が、0.0001mol/l以上5.0mol/l以下の硫酸イオン、0.0001mol/l以上5.0mol/l以下の塩化物イオン、0.0001mol/l以上5.0mol/l以下のリチウムイオン、0.0001mol/l以上5.0mol/l以下のナトリウムイオンおよび/または0.0001mol/l以上5.0mol/l以下のカリウムイオンを含有することを特徴とする上記の電解めっき方法であり、これによって、液間電圧の低下、およびめっきの被覆力向上が可能となると共に、安定した皮膜組成を得ることができる。上記のイオンが0.0001mol/l未満では、これらの効果は不十分であり、5.0mol/lより多いと不溶性物を生じ、液の流動性を損なう。したがって、これらのイオン濃度は0.0001mol/l以上5.0mol/l以下に限定した。
【0015】
【実施例】
実施例1
基材として銅板を脱脂洗浄して用いた。めっき液は、塩化クロムを用いて、Cr3+濃度を0.1mol/l、ReO4 -が0.01mol/lとし、ReO4 -イオンとCr3+イオン以外として、酢酸:1.5mol/l、塩化アンモニウム:0.5mol/l、臭化カリウム:0.5mol/lを添加した浴を用いた。pHは硫酸と水酸化ナトリウムで4に調整し、液温は35℃とし、電流密度は100mA/cm2で電解めっきを行った。
【0016】
実施例2
ReO4 -濃度を0.1mol/lとした以外は実施例1と同じ条件で電解めっきした。
比較例1
ReO4 -濃度を0.0001mol/lとした以外は実施例1と同じ条件で電解めっきした。
比較例2
ReO4 -濃度を0.005mol/lとした以外は実施例1と同じ条件で電解めっきした。
【0017】
図1に、実施例と比較例のめっき皮膜組成と、めっき浴中のReO4 -のモル濃度およびCr3+イオンとのモル濃度比の関係を示す。これより、Cr3+濃度が0.1mol/lの浴では、比較例1のReO4 -が0.0001mol/lでは、めっき皮膜組成は約55原子%Re-45原子%Crとなり、実施例1のReO4 -が0.005mol/lでは、約92原子%Re-8原子%Crとなる。そして、実施例1および実施例2ののReO4 -濃度が0.01mol/l以上(ReO4 -濃度/ Cr3+濃度で98原子%以上の純度のReとなる。
【0018】
【発明の効果】
高温装置部材用耐食皮膜などに用いられるReを、水溶液電解めっきによって形成できることで、複雑形状を持つ装置部材に対しても、簡便に、かつ安価に耐熱・耐食性を付与することが可能となる。
【図面の簡単な説明】
【図1】図1は、実施例および比較例のめっき皮膜組成とめっき浴中のReO4 -濃度およびReO4 -/Cr3+濃度比の関係を示すグラフである。
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for forming a Re film used for a corrosion-resistant film for a high-temperature device member.
[0002]
[Prior art]
Ni-base superalloy base materials used for jet engines and gas turbine blades are strongly required to have oxidation resistance and corrosion resistance. For this reason, diffusion treatment of Al or the like is performed on the surface, for example, an Al 2 O 3 film is applied to obtain high-temperature oxidation resistance. However, its performance is not sufficient, and means such as providing a diffusion barrier using Pt or the like on the substrate have been developed. When Re is used as the diffusion barrier layer, the high temperature corrosion resistance can be improved. Re is excellent in thermal shock resistance and is used as a high-temperature member such as various combustors such as a rocket engine combustor and a high-temperature nozzle. Until now, the following methods are known as methods for forming the Re film and the Re alloy film.
[0003]
(1) Sputtering method or physical vapor deposition method While film thickness and composition are easy to control, (1) there are many restrictions on the size and shape of the substrate, (2) the apparatus is large and the operation is complicated, 3) There are problems such as the formation of a film with many defects and cracks.
(2) Thermal spraying method (1) A film with many defects is formed, (2) It is not suitable for forming a thin film (less than 10 μm), (3) The yield is poor and uneconomical. .
(3) Electroplating method for Re alloy
Ni-Cr-Re with a maximum Re content of 50% by weight (lower percentage in atomic composition) and Re-Ni alloys for electrical contacts with a maximum Re content of 85% by weight (63 atomic%) Although plating is known, the Re content is low.
[0004]
[Problems to be solved by the invention]
The present invention makes it possible to construct complex shapes that cannot be solved by sputtering or physical vapor deposition, etc., thin film construction that cannot be solved by thermal spraying, and electroplating Re at a lower cost and easier than both. A method of forming is provided.
[0005]
[Means for Solving the Problems]
The inventors have hardly electrolytically deposited Re from a bath containing only perrhenate ions as transition metal ions, but from a bath in which perrhenate ions and Cr 3+ ions coexist, perrhenate ions in the bath It was found that by controlling the concentration ratio of the other metal ions and the pH of the bath, almost no Cr was electrodeposited and only Re having a purity of 98 atomic% or more was electrodeposited.
[0006]
That is, the present invention contains perrhenate ions 0.001 mol / l to 2.0 mol / l, Cr 3+ ions 0.01 mol / l to 10.0 mol / l, and the perrhenate ions in the plating bath. of, and the molar ratio of Cr 3+ ions is 0.1 or more, more total metal ion concentration of 0.1 to 15.0 organic acid equivalent or less of a concentration relative to contain the following bromide 0.0001 mol / l or more 5.0 mol / l , pH is 0-5, the liquid temperature, using a plating bath comprising an aqueous solution is 10 to 80 ° C., Re is less than 98% by atomic composition by electrolysis, a film that the rest and Cr and inevitable impurities It is an electrolytic plating method of Re characterized in that it is formed, whereby it becomes possible to electrolytically deposit 98% or more of purity Re.
[0007]
If the perrhenate ion is less than 0.001 mol / l, the Re concentration during plating is low, and if it is more than 2.0 mol / l, an insoluble material is generated. Further, when the Cr 3+ ion concentration is less than 0.01 mol / l, the electrolytic deposition efficiency of Re is remarkably low, and when it exceeds 10.0 mol / l, an insoluble material is generated. Therefore, the perrhenate ion was limited to 0.001 mol / l or more and 2.0 mol / l or less, and the Cr 3+ ion concentration was limited to 0.001 mol / l or more and 10.0 mol / l or less.
[0008]
The pH of the plating bath is preferably 0 to 5, and the temperature at which plating is performed is preferably 10 to 80 ° C. With these, plating with high covering power and uniform composition can be obtained. If the pH is less than 0, the covering power of the plating is reduced, and if it is more than 5, the insoluble material is large and the fluidity of the liquid is impaired, and the Re concentration in the film is lowered. In addition, when the temperature of the solution at which plating is performed is lower than 10 ° C., the electrolytic deposition efficiency is remarkably reduced, and when it is higher than 80 ° C., the covering power is reduced. Therefore, the pH of the bath was limited to 0-5, and the temperature of the solution for plating was limited to 10-80 ° C. More preferably, the pH of the bath is 2 to 5, and the temperature at which plating is performed is 20 to 40 ° C.
[0009]
With a film in which Re is 98% or more with the atomic composition formed by the method of the present invention, and the remainder is Cr and unavoidable impurities, the material to be plated can be given a function according to the type and purpose of the substrate. It becomes possible.
[0010]
Moreover, this invention is said electrolytic plating method characterized by the plating bath containing an organic acid, By this, it becomes possible to obtain the film | membrane of a more stable composition. By specifying the type and concentration of the organic acid, a film having a more stable composition can be obtained. If the organic acid concentration is less than 0.1 equivalent with respect to the total metal ion concentration, a sufficient effect cannot be obtained. If the organic acid concentration is more than 15.0 equivalent, an insoluble material is formed and the fluidity of the liquid is impaired. Therefore, the organic acid concentration was limited to 0.1 or more and 15.0 equivalents or less.
[0011]
The organic acid is preferably at least one selected from hydroxycarboxylic acids, carboxylic acids and amino acids. The hydroxycarboxylic acid is preferably at least one selected from lactic acid, hydroxybutyric acid, glycolic acid, mandelic acid, malic acid, tartaric acid, gluconic acid, citric acid, or soluble salts thereof. The carboxylic acid is preferably at least one selected from acetic acid, propionic acid, formic acid, oxalic acid, acrylic acid, malonic acid, ethylenediaminetetraacetic acid, or soluble salts thereof. The amino acid is preferably at least one selected from glycine, alanine, proline, valine, leucine, isoleucine, methionine, serine, cysteine, asparagine, glutamine, and tyrosine.
[0012]
Further, the present invention is the above electroplating method, characterized by containing 0.0001 mol / l or more and 5.0 mol / l or less ammonium ions and / or 0.0001 mol / l or more and 5.0 mol / l or less boric acid. This stabilizes the bath and makes it possible to form a film with a uniform thickness. If ammonium ion or boric acid is less than 0.0001 mol / l, plating spots are formed, and if it is more than 5.0 mol / l, an insoluble material is formed and the fluidity of the liquid is impaired. Therefore, ammonium ions and boric acid were limited to 0.0001 mol / l or more and 5.0 mol / l or less.
[0013]
Further, the present invention is the above electroplating method, wherein the plating bath contains bromine ions of 0.0001 mol / l or more and 5.0 mol / l or less, thereby suppressing generation of toxic chlorine gas. To do. If the bromine ion concentration is less than 0.0001 mol / l, no effect is seen, and if it exceeds 5.0 mol / l, a gas containing Br as a main component is generated, so the bromine ion concentration is 0.0001 mol / l or more and 5.0 mol / l. l Limited to below.
[0014]
Further, the present invention provides a plating bath having a sulfate ion of 0.0001 mol / l to 5.0 mol / l, a chloride ion of 0.0001 mol / l to 5.0 mol / l, a 0.0001 mol / l to 5.0 mol / l or less. Lithium ions, 0.0001 mol / l or more and 5.0 mol / l or less of sodium ions and / or 0.0001 mol / l or more and 5.0 mol / l or less of potassium ions In addition, the liquid voltage can be lowered and the covering power of plating can be improved, and a stable film composition can be obtained. If the above ion is less than 0.0001 mol / l, these effects are insufficient, and if it exceeds 5.0 mol / l, an insoluble material is formed, and the fluidity of the liquid is impaired. Therefore, these ion concentrations were limited to 0.0001 mol / l or more and 5.0 mol / l or less.
[0015]
【Example】
Example 1
A copper plate was degreased and washed as a base material. The plating solution is chromium chloride with a Cr 3+ concentration of 0.1 mol / l, ReO 4 of 0.01 mol / l, acetic acid: 1.5 mol / l, chloride other than ReO 4 and Cr 3+ ions, chloride A bath to which ammonium: 0.5 mol / l and potassium bromide: 0.5 mol / l was added was used. The pH was adjusted to 4 with sulfuric acid and sodium hydroxide, the liquid temperature was 35 ° C., and the electroplating was performed at a current density of 100 mA / cm 2 .
[0016]
Example 2
ReO 4 - except that the 0.1 mol / l concentration were electrolytic plating under the same conditions as in Example 1.
Comparative Example 1
ReO 4 - except that the 0.0001 mol / l concentration were electrolytic plating under the same conditions as in Example 1.
Comparative Example 2
ReO 4 - except that the 0.005 mol / l concentration were electrolytic plating under the same conditions as in Example 1.
[0017]
FIG. 1 shows the relationship between the plating film compositions of Examples and Comparative Examples and the molar concentration ratio of ReO 4 and Cr 3+ ions in the plating bath. From this, in the bath having a Cr 3+ concentration of 0.1 mol / l, when the ReO 4 of Comparative Example 1 is 0.0001 mol / l, the plating film composition is about 55 atomic% Re-45 atomic % Cr. When ReO 4 is 0.005 mol / l, it becomes about 92 atomic% Re-8 atomic % Cr. And, of the ReO 4 Examples 1 and 2 - concentration of 0.01 mol / l or more (ReO 4 - a concentration / Cr 3+ concentration 98 atomic% or more purity Re.
[0018]
【The invention's effect】
Since Re used for the corrosion-resistant film for high-temperature device members can be formed by aqueous solution electroplating, heat and corrosion resistance can be easily and inexpensively imparted to device members having complicated shapes.
[Brief description of the drawings]
FIG. 1 is a graph showing the relationship between plating film compositions of Examples and Comparative Examples, and ReO 4 concentration and ReO 4 / Cr 3+ concentration ratio in a plating bath.

Claims (2)

過レニウム酸イオンを0.001mol/l以上2.0mol/l以下、Cr3+イオンを0.01mol/l以上10.0mol/l以下含有し、かつ、めっき浴中の過レニウム酸イオンの、Cr3+イオンに対するモル比が0.1以上であり、さらに全金属イオン濃度に対して 0.1 以上 15.0 当量以下の濃度の有機酸、 0.0001mol/l 以上 5.0mol/l 以下の臭素イオンを含有し、pHが、0〜5、液温が、10〜80℃である水溶液からなるめっき浴を用いて、電解により原子組成でReが98%以上、残りをCrおよび不可避的な不純物とする皮膜を形成することを特徴とする電解めっきによるRe皮膜の形成方法。Containing perrhenate ions from 0.001 mol / l to 2.0 mol / l and Cr 3+ ions from 0.01 mol / l to 10.0 mol / l, and the perrhenate ions in the plating bath are Cr 3+ ions molar ratio is 0.1 or more, further 0.1 to 15.0 organic acid equivalent or less of a concentration relative to the total metal ion concentration, contained the following bromide 0.0001 mol / l or more 5.0 mol / l with respect to, pH is 0 5. Using a plating bath made of an aqueous solution having a liquid temperature of 10 to 80 ° C., it is characterized by forming a film with an atomic composition of Re of 98% or more and the remainder of Cr and inevitable impurities by electrolysis. Re film formation method by electrolytic plating. めっき浴が、0.0001mol/l以上5.0mol/l以下のアンモニウムイオンおよび/または0.0001mol/l以上5.0mol/l以下のホウ酸を含有することを特徴とする請求項1に記載の電解めっきによるRe皮膜の形成方法。The electroplating according to claim 1, wherein the plating bath contains 0.0001 mol / l or more and 5.0 mol / l or less ammonium ions and / or 0.0001 mol / l or more and 5.0 mol / l or less boric acid. Re film formation method.
JP2002010787A 2002-01-18 2002-01-18 Method for forming Re film by electrolytic plating using Cr (III) -containing bath Expired - Fee Related JP4271399B2 (en)

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JP2002010787A JP4271399B2 (en) 2002-01-18 2002-01-18 Method for forming Re film by electrolytic plating using Cr (III) -containing bath
PCT/JP2003/000353 WO2003062500A1 (en) 2002-01-18 2003-01-17 METHOD FOR FORMING Re COATING FILM OR Re-Cr ALLOY COATING FILM THROUGH ELECTROPLATING
US10/501,720 US6979392B2 (en) 2002-01-18 2003-01-17 Method for forming Re—Cr alloy film or Re-based film through electroplating process
EP03701766A EP1467001A4 (en) 2002-01-18 2003-01-17 METHOD FOR FORMING Re COATING FILM OR Re-Cr ALLOY COATING FILM THROUGH ELECTROPLATING

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WO2008059971A1 (en) 2006-11-16 2008-05-22 National University Corporation Hokkaido University Multilayer alloy coating film, heat-resistant metal member having the same, and method for producing multilayer alloy coating film
JP4896702B2 (en) 2006-12-22 2012-03-14 株式会社ディ・ビー・シー・システム研究所 Alloy film, method for producing alloy film, and heat-resistant metal member

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