JP3904197B2 - Method for forming Re film by electrolytic plating - Google Patents
Method for forming Re film by electrolytic plating Download PDFInfo
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- JP3904197B2 JP3904197B2 JP2002010811A JP2002010811A JP3904197B2 JP 3904197 B2 JP3904197 B2 JP 3904197B2 JP 2002010811 A JP2002010811 A JP 2002010811A JP 2002010811 A JP2002010811 A JP 2002010811A JP 3904197 B2 JP3904197 B2 JP 3904197B2
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Description
【0001】
【発明の属する技術分野】
本発明は、高温装置部材用の耐食合金皮膜などに用いられるRe皮膜の形成方法に関わる。
【0002】
【従来の技術】
ジエットエンジンやガスタービンのブレードなどに用いられるNi基超合金基材は耐酸化性や耐腐食性が強く求められる。このため、表面にAl等の拡散処理を行い、例えば、Al2O3皮膜を施して高温耐酸化性を得ている。しかし、その性能は十分ではなく、基材にPtなどを用いた拡散バリヤーを設けるなどの手段が開発されている。この拡散バリヤー層としてReを用いると耐高温腐食性が向上させることができる。また、Reは、耐熱衝撃性に優れ、ロケットエンジンの燃焼器などの各種燃焼器や高温用ノズルなどの高温部材として使用されている。これまで、Re皮膜やRe合金皮膜の形成方法としては下記のようなものが知られている。
【0003】
(1)スパッタ法または物理蒸着法
膜厚や組成の制御が容易である一方、▲1▼基材の大きさや形状に制限が多い、▲2▼装置が大掛かりで、操作も複雑である、▲3▼欠陥やき裂の多い皮膜が形成される、などの問題点を持つ。
(2)溶射法
▲1▼欠陥の多い皮膜が形成される、▲2▼薄い膜(10μm以下)の形成に不向きである、▲3▼歩留まりが悪く不経済である、などの問題点を持つ。
(3)Re合金の電解めっき方法
Re含有量が最高で50重量%(原子組成ではより低い割合となる)のNi-Cr-ReやRe含有量が最高で85重量%(63原子%)の電気接点用のRe-Ni合金のめっきなどが知られているが、Reの含有量が低い。
【0004】
【発明が解決しようとする課題】
本発明は、スパッタ法や物理蒸着法などでは解決できない複雑形状への施工を可能にすると共に、溶射法では解決できない薄膜施工、および、両者と比較して安価に、かつ簡便にReを電解めっきで形成する方法を提供する。
【0005】
【課題を解決するための手段】
本発明者らは、Reの電解めっき方法について検討した結果、ヒドロキシル基、カルボニル基、およびアミノ基から選ばれる少なくとも1種の官能基を有する有機酸をめっき浴に含有させ、さらに、めっき浴中の金属イオンと有機酸の組成を制御することによって、原子組成でReが98%以上のRe皮膜の生成が可能であることを見出した。
【0006】
すなわち、本発明は、過レニウム酸イオンを0.1〜8.0mol/l、ニッケル、鉄、コバルト、クロム(III)イオンの少なくとも1種のイオンの総量を0.005〜2.0mol/l、リチウムイオンとナトリウムイオンから選ばれる少なくとも1種の総量を0.0001mol/l以上5.0mol/l以下含有し、カルボン酸、ヒドロキシカルボン酸、およびアミノ酸から選ばれる少なくとも1種の有機酸濃度が、全金属イオン濃度に対して5.0当量より多く15.0当量以下であり、pHが、0〜8、液温が、10〜80℃である水溶液からなるめっき浴を用いることを特徴とするReの電解めっき方法であり、これによって、耐熱耐食性合金皮膜となるRe皮膜の形成が可能となる。
【0007】
過レニウム酸イオンが0.1mol/l未満では、めっき中に98%以上のReは含まれず、8.0mol/lより多いと浴中に不溶性物質を生成する。また、ニッケル、鉄、コバルト、クロム(III)の少なくとも1種のイオンの総量が0.005未満では、めっき効率が著しく低下し、2.0mol/lより多いとめっき中のRe濃度が原子組成で98%未満となる。リチウムイオンとナトリウムイオンの少なくとも一種の総量を0.0001mol/l以上含まないとめっき中のRe濃度は原子組成で98%未満となり、5.0mol/lより多くなると、浴中に不溶性物質を生成し、液の流動性が損なわれる。
【0008】
以上の条件を満たしていても、カルボン酸、ヒドロキシカルボン酸、およびアミノ酸から選ばれる少なくとも1種の有機酸濃度が、全金属イオン濃度に対して5.0当量以下では、めっき中のRe濃度は原子組成で98%未満となり、15.0当量以上では、浴中に不溶性物質を生成し、液の流動性が損なわれる。したがって、過レニウム酸イオンを0.1〜8.0mol/l、ニッケル、鉄、コバルト、クロム(III)イオンの少なくとも1種のイオンの総量を0.005〜2.0mol/l、リチウムイオンとナトリウムイオンから選ばれる少なくとも1種の総量を0.0001mol/l以上5.0mol/l以下、カルボン酸、ヒドロキシカルボン酸、およびアミノ酸から選ばれる少なくとも1種の有機酸濃度を全金属イオン濃度に対して5.0当量より多く15.0当量以下に限定した。
【0009】
カルボン酸は、ギ酸、プロピオン酸、酢酸、シュウ酸、アクリル酸、マロン酸、エチレンジアミン4酢酸またはこれらの可溶性塩から選ばれた少なくとも1種であることが好ましい。ヒドロキシカルボン酸は、乳酸、ヒドロキシ酪酸、グリコール酸、マンデル酸、リンゴ酸、酒石酸、グルコン酸、クエン酸またはこれらの可溶性塩から選ばれた少なくとも1種であることが好ましい。アミノ酸は、グリシン、アラニン、プロリン、バリン、ロイシン、イソロイシン、メチオニン、セリン、システイン、アスパラギン、グルタミン、チロシンから選ばれた少なくとも1種であることが好ましい。
【0010】
めっき浴のpHは0〜8、めっきが行われる温度は10〜80℃が好ましい。これらによって、被覆力が高く、組成が均一なめっきが得られる。pHが0未満ではめっきの被覆力が低下し、8より大きいと不溶性物質が多く液の流動性が損なわれる。また、めっきが行われる温度が10℃より低いと電解析出効率が著しく低下し、80℃より高いと被覆力が低下する。したがって、浴のpHは0〜8、めっきが行われる温度は10〜80℃に限定した。より好ましくは、浴のpHが2〜5、めっきが行われる温度が40〜60℃である。
【0011】
また、本発明は、浴中に、カリウム、ルビジウム、セシウム、カルシウム、ストロンチウム、バリウムから選ばれる少なくとも一種以上のイオンが含まれる場合、浴中のリチウムイオンとナトリウムイオンから選ばれる少なくとも1種の総量が、カリウム、ルビジウム、セシウム、カルシウム、ストロンチウム、バリウムから選ばれる少なくとも一種以上のイオンの総量よりも多いことを特徴とする上記の電解めっき方法である。これによって、より高濃度のReめっきが可能となる。
【0012】
リチウムイオンとナトリウムイオンから選ばれる少なくとも1種の総量が、カリウム、ルビジウム、セシウム、カルシウム、ストロンチウム、バリウムから選ばれる少なくとも一種以上のイオンの総量以下では十分な効果は得られないため、リチウムイオンとナトリウムイオンから選ばれる少なくとも1種の総量は、カリウム、ルビジウム、セシウム、カルシウム、ストロンチウム、バリウムから選ばれる少なくとも一種以上のイオンの総量よりも多く限定した。
【0013】
また、本発明は、形成される合金皮膜の組成が、原子組成でReが98%以上で、残りをNi、Co、Fe、Mn、Cr、Mo、W、Nb、Ta、Hf、Si、Al、Ti、Mg、Pt、Ir、Rh、Au、Ag、P、B、C、Y、Ceから選ばれる少なくとも1種と不可避的な不純物とすることを特徴とする上記の電解めっき方法であり、これによって、基材および目的に応じた機能を付与することが可能となる。
【0014】
また、本発明は、めっき浴が、0.0001mol/l以上5.0mol/l以下の硫酸イオン、および0.0001mol/l以上5.0mol/l以下の塩化物イオンを含有することを特徴とする上記の電解めっき方法であり、これによって、液間電圧の低下、およびめっきの被覆力向上が可能となると共に、安定した皮膜組成を得ることができる。上記のイオンが0.0001mol/l未満では、これらの効果は不十分であり、5.0mol/lより多いと不溶性物質を生じ、液の流動性を損なう。したがって、これらのイオン濃度は0.0001mol/l以上5.0mol/l以下に限定した。
【0015】
【実施例】
実施例および比較例
基材として銅板を脱脂洗浄して用いた。めっき液は、過レニウム酸イオン、硫酸ニッケル、塩化クロム、およびクエン酸を含有するものを使用した。めっき浴中の金属イオンと有機酸の化学当量比を2〜11の範囲で変えためっき浴を準備した。浴のpHは3〜8の範囲で調整し、この際、水酸化リチウムおよび硫酸を用いてpH調整を行った。めっき液温は50℃、電流密度は100mA/cm2で電解めっきを行った。
【0016】
蛍光X線分析により求めためっき皮膜組成を以下に示す。図1は、横軸にめっき液中の金属イオンに対する有機酸の化学当量を、縦軸に皮膜の原子組成を示している.図1より、めっき皮膜組成はめっき液中の金属イオンと有機酸との割合に依存しており、有機酸の割合が大きくなるほどめっき皮膜中のRe濃度が高くなることが分かる。そして、全金属イオンに対する有機酸の化学当量比が5以上の実施例では、めっき皮膜のRe濃度は原子組成で98%以上となる。以上により、めっき液中の金属イオンと有機酸の組成を制御することで、原子組成で98%以上のReめっき皮膜を再現性よく形成することが可能となる。
【0017】
【発明の効果】
高温装置部材用耐食皮膜などに用いられるReを、水溶液電解めっきによって形成できることで、複雑形状を持つ装置部材に対しても、簡便に、かつ安価に耐熱・耐食性を付与することが可能となる。
【図面の簡単な説明】
【図1】図1は、実施例および比較例のめっき浴中の金属イオンと有機酸の化学当量比とめっき層組成の関係を示すグラフである。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for forming a Re film used for a corrosion-resistant alloy film for a high-temperature device member.
[0002]
[Prior art]
Ni-base superalloy base materials used for jet engines and gas turbine blades are strongly required to have oxidation resistance and corrosion resistance. For this reason, diffusion treatment of Al or the like is performed on the surface, for example, an Al 2 O 3 film is applied to obtain high-temperature oxidation resistance. However, its performance is not sufficient, and means such as providing a diffusion barrier using Pt or the like on the substrate have been developed. When Re is used as the diffusion barrier layer, the high temperature corrosion resistance can be improved. Re is excellent in thermal shock resistance and is used as a high-temperature member such as various combustors such as a rocket engine combustor and a high-temperature nozzle. Until now, the following methods are known as methods for forming the Re film and the Re alloy film.
[0003]
(1) Sputtering method or physical vapor deposition method While film thickness and composition are easy to control, (1) there are many restrictions on the size and shape of the substrate, (2) the apparatus is large and the operation is complicated, 3) There are problems such as the formation of a film with many defects and cracks.
(2) Thermal spraying method (1) A film with many defects is formed, (2) It is not suitable for forming a thin film (less than 10 μm), (3) The yield is poor and uneconomical. .
(3) Electroplating method for Re alloy
Ni-Cr-Re with a maximum Re content of 50% by weight (lower percentage in atomic composition) and Re-Ni alloys for electrical contacts with a maximum Re content of 85% by weight (63 atomic%) Although plating is known, the Re content is low.
[0004]
[Problems to be solved by the invention]
The present invention makes it possible to apply complex shapes that cannot be solved by sputtering or physical vapor deposition, as well as thin film application that cannot be solved by thermal spraying, and electrolytic plating of Re at a lower cost and easier than both. A method of forming is provided.
[0005]
[Means for Solving the Problems]
As a result of examining the electrolytic plating method of Re, the present inventors have included an organic acid having at least one functional group selected from a hydroxyl group, a carbonyl group, and an amino group in a plating bath, and further, in the plating bath It was found that by controlling the composition of the metal ions and the organic acid, a Re film having an atomic composition of Re of 98% or more can be formed.
[0006]
That is, the present invention is a perrhenate ion 0.1-8.0 mol / l, the total amount of at least one of nickel, iron, cobalt, chromium (III) ions 0.005-2.0 mol / l, lithium ions and sodium ions The total amount of at least one selected from the group consisting of 0.0001 mol / l to 5.0 mol / l, and the concentration of at least one organic acid selected from carboxylic acid, hydroxycarboxylic acid, and amino acid is based on the total metal ion concentration Re electroplating method characterized by using a plating bath consisting of an aqueous solution of more than 5.0 equivalents and less than or equal to 15.0 equivalents, pH of 0 to 8, and liquid temperature of 10 to 80 ° C. It is possible to form a Re film that becomes a heat and corrosion resistant alloy film.
[0007]
If the perrhenate ion is less than 0.1 mol / l, 98% or more of Re is not contained in the plating, and if it is more than 8.0 mol / l, an insoluble material is generated in the bath. In addition, if the total amount of at least one ion of nickel, iron, cobalt, and chromium (III) is less than 0.005, the plating efficiency is remarkably lowered, and if it exceeds 2.0 mol / l, the Re concentration during plating is 98% in atomic composition. Less than. If the total amount of at least one of lithium ions and sodium ions is not 0.0001 mol / l or more, the Re concentration in the plating is less than 98% in atomic composition, and if it exceeds 5.0 mol / l, an insoluble substance is generated in the bath, The fluidity of the liquid is impaired.
[0008]
Even if the above conditions are satisfied, if the concentration of at least one organic acid selected from carboxylic acid, hydroxycarboxylic acid, and amino acid is 5.0 equivalents or less with respect to the total metal ion concentration, the Re concentration during plating is the atomic composition. If it is less than 98% and 15.0 equivalents or more, an insoluble material is generated in the bath, and the fluidity of the liquid is impaired. Therefore, the perrhenate ion is 0.1 to 8.0 mol / l, the total amount of at least one of nickel, iron, cobalt, and chromium (III) ions is 0.005 to 2.0 mol / l, and at least selected from lithium ions and sodium ions. The total amount of one kind is 0.0001 mol / l or more and 5.0 mol / l or less, and the concentration of at least one organic acid selected from carboxylic acid, hydroxycarboxylic acid, and amino acid is more than 5.0 equivalent and less than 15.0 equivalent with respect to the total metal ion concentration Limited to.
[0009]
The carboxylic acid is preferably at least one selected from formic acid, propionic acid, acetic acid, oxalic acid, acrylic acid, malonic acid, ethylenediaminetetraacetic acid or soluble salts thereof. The hydroxycarboxylic acid is preferably at least one selected from lactic acid, hydroxybutyric acid, glycolic acid, mandelic acid, malic acid, tartaric acid, gluconic acid, citric acid, or soluble salts thereof. The amino acid is preferably at least one selected from glycine, alanine, proline, valine, leucine, isoleucine, methionine, serine, cysteine, asparagine, glutamine, and tyrosine.
[0010]
The pH of the plating bath is preferably 0 to 8, and the temperature at which plating is performed is preferably 10 to 80 ° C. With these, plating with high covering power and uniform composition can be obtained. If the pH is less than 0, the covering power of the plating is reduced, and if it is more than 8, there are many insoluble substances and the fluidity of the liquid is impaired. In addition, when the temperature at which plating is performed is lower than 10 ° C, the electrolytic deposition efficiency is remarkably reduced, and when it is higher than 80 ° C, the covering power is reduced. Therefore, the pH of the bath was limited to 0-8, and the temperature at which plating was performed was limited to 10-80 ° C. More preferably, the pH of the bath is 2 to 5, and the temperature at which plating is performed is 40 to 60 ° C.
[0011]
In the present invention, when the bath contains at least one ion selected from potassium, rubidium, cesium, calcium, strontium, and barium, the total amount of at least one selected from lithium ions and sodium ions in the bath Is more than the total amount of at least one ion selected from potassium, rubidium, cesium, calcium, strontium, and barium. This enables higher concentration Re plating.
[0012]
Since the total amount of at least one selected from lithium ions and sodium ions is less than the total amount of at least one ion selected from potassium, rubidium, cesium, calcium, strontium, and barium, sufficient effects cannot be obtained. The total amount of at least one selected from sodium ions was limited more than the total amount of at least one selected from potassium, rubidium, cesium, calcium, strontium, and barium.
[0013]
In the present invention, the composition of the alloy film to be formed has an atomic composition of Re of 98% or more, and the rest are Ni, Co, Fe, Mn, Cr, Mo, W, Nb, Ta, Hf, Si, Al Ti, Mg, Pt, Ir, Rh, Au, Ag, P, B, C, Y, is the above-described electrolytic plating method characterized by being an unavoidable impurity and selected from Ce, This makes it possible to provide functions according to the base material and purpose.
[0014]
Further, the present invention is characterized in that the plating bath contains 0.0001 mol / l or more and 5.0 mol / l or less sulfate ion and 0.0001 mol / l or more and 5.0 mol / l or less chloride ion. This is a plating method, and this makes it possible to reduce the liquid voltage and improve the covering power of plating, and to obtain a stable coating composition. If the above ion is less than 0.0001 mol / l, these effects are insufficient, and if it is more than 5.0 mol / l, an insoluble material is formed and the fluidity of the liquid is impaired. Therefore, these ion concentrations were limited to 0.0001 mol / l or more and 5.0 mol / l or less.
[0015]
【Example】
A copper plate was used after degreasing and washing as a base material for Examples and Comparative Examples. The plating solution used contained perrhenate ion, nickel sulfate, chromium chloride, and citric acid. A plating bath was prepared in which the chemical equivalent ratio of metal ions and organic acid in the plating bath was changed in the range of 2-11. The pH of the bath was adjusted in the range of 3 to 8, and the pH was adjusted using lithium hydroxide and sulfuric acid. Electrolytic plating was performed at a plating solution temperature of 50 ° C. and a current density of 100 mA / cm 2 .
[0016]
The plating film composition determined by fluorescent X-ray analysis is shown below. In FIG. 1, the horizontal axis represents the chemical equivalent of the organic acid to the metal ions in the plating solution, and the vertical axis represents the atomic composition of the film. As can be seen from FIG. 1, the plating film composition depends on the ratio of metal ions and organic acid in the plating solution, and the higher the ratio of organic acid, the higher the Re concentration in the plating film. In an example in which the chemical equivalent ratio of the organic acid to the total metal ions is 5 or more, the Re concentration of the plating film is 98% or more in terms of atomic composition. As described above, by controlling the composition of the metal ions and the organic acid in the plating solution, it is possible to form a Re plating film having an atomic composition of 98% or more with good reproducibility.
[0017]
【The invention's effect】
Since Re used for a corrosion-resistant film for high-temperature device members can be formed by aqueous solution electroplating, heat and corrosion resistance can be easily and inexpensively provided to device members having complicated shapes.
[Brief description of the drawings]
FIG. 1 is a graph showing the relationship between the chemical equivalent ratio of metal ions and organic acids in plating baths of examples and comparative examples, and the plating layer composition.
Claims (4)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2002010811A JP3904197B2 (en) | 2002-01-18 | 2002-01-18 | Method for forming Re film by electrolytic plating |
PCT/JP2003/000354 WO2003062501A1 (en) | 2002-01-18 | 2003-01-17 | METHOD FOR FORMING Re ALLOY COATING FILM HAVING HIGH Re CONTENT THROUGH ELECTROPLATING |
EP03701767A EP1467002A4 (en) | 2002-01-18 | 2003-01-17 | METHOD FOR FORMING Re ALLOY COATING FILM HAVING HIGH Re CONTENT THROUGH ELECTROPLATING |
US10/501,813 US7368048B2 (en) | 2002-01-18 | 2003-01-17 | Method for forming Re alloy coating film having high-Re-content through electroplating |
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JP2002010811A JP3904197B2 (en) | 2002-01-18 | 2002-01-18 | Method for forming Re film by electrolytic plating |
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JP2003213480A JP2003213480A (en) | 2003-07-30 |
JP3904197B2 true JP3904197B2 (en) | 2007-04-11 |
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WO2008059971A1 (en) | 2006-11-16 | 2008-05-22 | National University Corporation Hokkaido University | Multilayer alloy coating film, heat-resistant metal member having the same, and method for producing multilayer alloy coating film |
JP4896702B2 (en) | 2006-12-22 | 2012-03-14 | 株式会社ディ・ビー・シー・システム研究所 | Alloy film, method for producing alloy film, and heat-resistant metal member |
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