JP4268349B2 - 半導体デバイスおよびその製造方法 - Google Patents

半導体デバイスおよびその製造方法 Download PDF

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Publication number
JP4268349B2
JP4268349B2 JP2001197700A JP2001197700A JP4268349B2 JP 4268349 B2 JP4268349 B2 JP 4268349B2 JP 2001197700 A JP2001197700 A JP 2001197700A JP 2001197700 A JP2001197700 A JP 2001197700A JP 4268349 B2 JP4268349 B2 JP 4268349B2
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JP
Japan
Prior art keywords
metal film
semiconductor device
support substrate
recess
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001197700A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002113877A5 (https=
JP2002113877A (ja
Inventor
伸雄 松本
任 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP2001197700A priority Critical patent/JP4268349B2/ja
Priority to US09/917,819 priority patent/US6664626B2/en
Publication of JP2002113877A publication Critical patent/JP2002113877A/ja
Publication of JP2002113877A5 publication Critical patent/JP2002113877A5/ja
Application granted granted Critical
Publication of JP4268349B2 publication Critical patent/JP4268349B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2001197700A 2000-08-01 2001-06-29 半導体デバイスおよびその製造方法 Expired - Fee Related JP4268349B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001197700A JP4268349B2 (ja) 2000-08-01 2001-06-29 半導体デバイスおよびその製造方法
US09/917,819 US6664626B2 (en) 2000-08-01 2001-07-31 Semiconductor device and method of manufacturing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000232825 2000-08-01
JP2000-232825 2000-08-01
JP2001197700A JP4268349B2 (ja) 2000-08-01 2001-06-29 半導体デバイスおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2002113877A JP2002113877A (ja) 2002-04-16
JP2002113877A5 JP2002113877A5 (https=) 2006-02-23
JP4268349B2 true JP4268349B2 (ja) 2009-05-27

Family

ID=26597142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001197700A Expired - Fee Related JP4268349B2 (ja) 2000-08-01 2001-06-29 半導体デバイスおよびその製造方法

Country Status (2)

Country Link
US (1) US6664626B2 (https=)
JP (1) JP4268349B2 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4246595A (en) * 1977-03-08 1981-01-20 Matsushita Electric Industrial Co., Ltd. Electronics circuit device and method of making the same
US4920070A (en) * 1987-02-19 1990-04-24 Fujitsu Limited Method for forming wirings for a semiconductor device by filling very narrow via holes
US6450621B1 (en) * 1998-09-17 2002-09-17 Canon Kabushiki Kaisha Semiconductor device having inkjet recording capability and method for manufacturing the same, inkjet head using semiconductor device, recording apparatus, and information-processing system

Also Published As

Publication number Publication date
US6664626B2 (en) 2003-12-16
JP2002113877A (ja) 2002-04-16
US20020022341A1 (en) 2002-02-21

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