JP2002113877A5 - - Google Patents
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- Publication number
- JP2002113877A5 JP2002113877A5 JP2001197700A JP2001197700A JP2002113877A5 JP 2002113877 A5 JP2002113877 A5 JP 2002113877A5 JP 2001197700 A JP2001197700 A JP 2001197700A JP 2001197700 A JP2001197700 A JP 2001197700A JP 2002113877 A5 JP2002113877 A5 JP 2002113877A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001197700A JP4268349B2 (ja) | 2000-08-01 | 2001-06-29 | 半導体デバイスおよびその製造方法 |
| US09/917,819 US6664626B2 (en) | 2000-08-01 | 2001-07-31 | Semiconductor device and method of manufacturing the same |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000232825 | 2000-08-01 | ||
| JP2000-232825 | 2000-08-01 | ||
| JP2001197700A JP4268349B2 (ja) | 2000-08-01 | 2001-06-29 | 半導体デバイスおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002113877A JP2002113877A (ja) | 2002-04-16 |
| JP2002113877A5 true JP2002113877A5 (https=) | 2006-02-23 |
| JP4268349B2 JP4268349B2 (ja) | 2009-05-27 |
Family
ID=26597142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001197700A Expired - Fee Related JP4268349B2 (ja) | 2000-08-01 | 2001-06-29 | 半導体デバイスおよびその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6664626B2 (https=) |
| JP (1) | JP4268349B2 (https=) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4246595A (en) * | 1977-03-08 | 1981-01-20 | Matsushita Electric Industrial Co., Ltd. | Electronics circuit device and method of making the same |
| US4920070A (en) * | 1987-02-19 | 1990-04-24 | Fujitsu Limited | Method for forming wirings for a semiconductor device by filling very narrow via holes |
| US6450621B1 (en) * | 1998-09-17 | 2002-09-17 | Canon Kabushiki Kaisha | Semiconductor device having inkjet recording capability and method for manufacturing the same, inkjet head using semiconductor device, recording apparatus, and information-processing system |
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2001
- 2001-06-29 JP JP2001197700A patent/JP4268349B2/ja not_active Expired - Fee Related
- 2001-07-31 US US09/917,819 patent/US6664626B2/en not_active Expired - Lifetime