JP4228496B2 - 荷電粒子線装置 - Google Patents

荷電粒子線装置 Download PDF

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Publication number
JP4228496B2
JP4228496B2 JP2000023790A JP2000023790A JP4228496B2 JP 4228496 B2 JP4228496 B2 JP 4228496B2 JP 2000023790 A JP2000023790 A JP 2000023790A JP 2000023790 A JP2000023790 A JP 2000023790A JP 4228496 B2 JP4228496 B2 JP 4228496B2
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Japan
Prior art keywords
charged particle
particle beam
image
optical system
stray light
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JP2000023790A
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Japanese (ja)
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JP2001216929A5 (enExample
JP2001216929A (ja
Inventor
えりか 兼松
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Nikon Corp
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Nikon Corp
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Priority to JP2000023790A priority Critical patent/JP4228496B2/ja
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Publication of JP2001216929A5 publication Critical patent/JP2001216929A5/ja
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Publication of JP4228496B2 publication Critical patent/JP4228496B2/ja
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JP2000023790A 2000-02-01 2000-02-01 荷電粒子線装置 Expired - Lifetime JP4228496B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000023790A JP4228496B2 (ja) 2000-02-01 2000-02-01 荷電粒子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000023790A JP4228496B2 (ja) 2000-02-01 2000-02-01 荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2001216929A JP2001216929A (ja) 2001-08-10
JP2001216929A5 JP2001216929A5 (enExample) 2006-11-30
JP4228496B2 true JP4228496B2 (ja) 2009-02-25

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JP2000023790A Expired - Lifetime JP4228496B2 (ja) 2000-02-01 2000-02-01 荷電粒子線装置

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Publication number Publication date
JP2001216929A (ja) 2001-08-10

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