JP4223969B2 - Image recording device - Google Patents

Description

The present invention relates to an image recording apparatus , and more particularly to an image recording apparatus that records an image while conveying a sheet material .

  Conventionally, as an example of an image recording apparatus, there is one that records an image by exposing a sheet material with a light beam while conveying the sheet material held on a stage at a constant conveyance speed.

  For example, Patent Document 1 discloses a laser exposure apparatus in which a stage can be moved along a guide rail and reciprocated by rotating a feed screw. However, in the laser exposure apparatus of Patent Document 1, since the stage simply reciprocates, exposure cannot be performed while the stage is returned, and efficiency is poor.

  On the other hand, if a plurality of stages are prepared and the stage is circulated, for example, exposure is performed in the forward operation and only the stage is returned in the backward operation, it is possible to perform efficient image recording. As such a configuration, for example, a configuration in which two rails for moving the stage are arranged side by side, the rails are moved to be inserted into and removed from the stage, and the two rails are exchanged can be cited. However, such a configuration requires a space for two stages in the lateral direction (direction orthogonal to the stage moving direction), which leads to an increase in size.

On the other hand, a structure in which the stage is supported in a cantilever manner and the stage can be conveyed and moved up and down (moved in a direction orthogonal to the moving direction) can be considered. However, this structure requires a highly accurate transport mechanism independently for each of the plurality of stages, resulting in high costs.
JP 2000-338432 A

In view of the above facts, an object of the present invention is to obtain an image recording apparatus that can efficiently convey a sheet material and can be configured in a space-saving and low-cost manner.

In the first aspect of the present invention, the stage transported in a state where the sheet material exposed by light irradiation is held, and the light emitted from the light source according to image information is held on the stage. An exposure head that irradiates and exposes the sheet material at an exposure position in the middle of the conveyance path, an outward path that is continuously arranged from the upstream side to the downstream side in the conveyance direction of the stage from the exposure position, and held on the stage and backward, which is arranged to overlap with the forward viewed in the normal direction of the sheet material that is, a detaching mechanism which can be removably mounted to the stage relative to the forward, the forward by raising and lowering by supporting the stage And a support arm that moves between the return path, a first transport mechanism that moves the stage in the forward path while the stage is held in the forward path by the attachment / detachment mechanism, and the stage A second transport mechanism that performs a return operation in the return path.

In this image recording apparatus , a sheet material to be exposed by light irradiation is held on a stage. Then, the stage holding the sheet material is moved forward by the first transport mechanism while being held in the forward path by the attachment / detachment mechanism . Further, the stage is supported by the support arm and moved from the forward path to the return path, is moved backward by the second transport mechanism, and is further moved by the support arm from the return path to the forward path and circulates. Since the forward path is continuously arranged from the upstream side to the downstream side of the exposure position by the exposure head, the stage can be continuously conveyed along the forward path. Since the return path is arranged so as to overlap the forward path when viewed in the normal direction of the sheet material held on the stage, a space for arranging rails or the like in the stage width direction is unnecessary, and space is saved.

The stage can be attached to and detached from the forward path by an attaching / detaching mechanism. Since the stage can be moved while being reliably held in the forward path, the sheet material on the stage can be exposed by irradiating light from the exposure head in this state . In addition, it is sufficient that the stage is held in the forward path, and a transport mechanism that requires high accuracy is only one of the first transport mechanisms . Therefore, this image recording apparatus can be configured at low cost. Since the stage is circulated in the forward path and the return path, it is possible to efficiently transport the sheet material.

According to a second aspect of the invention, in the first aspect of the invention, the first transport mechanism is provided on the stage and rotates in a state of being in contact with the forward path, and the drive provided on the stage. And a motor for rotating the roller .

The stage can be moved forward in the forward path by being driven and rotated by a motor while the drive roller is in contact with the forward path. Since the driving roller and the motor are provided on the stage, the image recording apparatus can be configured with further space saving.

According to a third aspect of the present invention, in the first or second aspect of the present invention, the attachment / detachment mechanism is a magnet mechanism that is provided on the stage and attracts or releases the stage by a magnetic force with respect to the forward path. .

The stage can be attached to or detached from the forward path by the magnetic force of the magnet mechanism and can be detached. Since the magnet mechanism is provided on the stage , the image recording apparatus can be configured in a small space.

  Since the present invention has the above-described configuration, it is possible to efficiently transport the sheet material, and it can be configured with a small space and a low cost.

  1 to 4 show an image recording apparatus 12 including a sheet material conveying apparatus 20 according to the first embodiment of the present invention. The image recording apparatus 12 includes a conveyance unit 14 and a recording unit 16, and conveys (scans) a sheet material 18, which is a photosensitive material, in the direction of arrow F at a predetermined conveyance speed, and a light beam on the surface thereof. To record an image. Hereinafter, the simple “transport direction” refers to the same direction as the transport direction of the sheet material 18, and the simple “width direction” refers to the same direction as the width direction (arrow W direction) of the sheet material 18.

  As shown in FIG. 2, the transport unit 14 includes a surface plate 22 having an end surface in a rectangular frame shape. The upper plate 22U of the surface plate 22 is opened over the entire length direction (the same direction as the conveying direction) of the surface plate 22, and is an opening 22K.

  Two stages 24 holding the sheet material 18 are accommodated in the surface plate 22, and when one stage 24A is located in the upper layer, the other stage 24B is located in the lower layer. These stages 24 have the same configuration. As will be described later, the movement in the transport direction in the upper layer and the return in the lower layer (movement in the direction opposite to the transport direction) are repeated, as described later. It circulates in 22.

  Rails 26 and 28 are attached to the lower surface of the upper plate 22U (both sides of the opening 22K) of the surface plate 22 one by one. The rails 26 and 28 are respectively arranged along the transport direction, and constitute the forward path in the present invention.

  From the stage 24, a stage drive mechanism 30 is provided at a position corresponding to each rail 26, 28. Two stage drive mechanisms 30 are arranged along the transport direction (four in total per stage 24). As shown in detail in FIG. 5, the stage driving mechanism 30 has a driving roller 38, and the driving roller 38 receives the driving force of the motor 32 through the motor roller 34 and the idle roller 36 and rotates. As can be seen from FIG. 2, the driving roller 38 is in contact with the rails 26 and 28, and the stage 24 positioned in the upper layer is moved in the transport direction by the rotation of the driving roller 38. The idle roller 36 is urged by a spring 40 in a direction to contact both the motor roller 34 and the drive roller 38 so that the drive force can be reliably transmitted without slipping carelessly.

  The stage 24 is provided with an encoater 39, and the motor 32 is controlled by a signal from the encoater 39 so that the stage 24 is conveyed at a constant speed.

  As shown in FIG. 2, one rail 26 has a flat contact surface with the drive roller 38, but the contact surface with the drive roller 38 of the other rail 28 arranged in parallel with the rail 26 has a width direction. The guiding surface 28S gradually increases toward the center. As will be described later, when the stage 24 rises and the driving roller 38 comes into contact with the rail 28 and further rises, the stage 24 is positioned by moving in the width direction by the guide surface 28S.

  The stage 24 is provided with a magnet mechanism 42 on the outer side in the width direction than the stage driving mechanism 30. As can be seen from FIG. 1, two magnet mechanisms 42 are arranged along the transport direction (four per one stage 24 in total). As shown in detail in FIG. 6, the magnet mechanism 42 includes two iron cores 44 and a magnet 46 disposed therebetween. The magnet 46 is fixed to the turntable 48. When the driving force from the motor 50 is transmitted to the turntable 48 via the worm gear 52, the magnet 46 rotates. By this rotation, the magnet 46 moves between a position where the pole is in contact with the iron core 44 (shown by a solid line) and a position away from the iron core 44 (shown by a two-dot chain line). In a state where the magnet 46 is in contact with the iron core 44 (magnet on state), the magnetic force acts on the iron core 44, so that the iron core 44 is attracted to the upper plate 22U of the surface plate 22. As a result, the driving roller 38 comes into contact with the rails 26 and 28 and the stage 24 is held in the forward path.

  On the other hand, when the magnet 46 is separated from the iron core 44 (magnet off state), the magnetic force does not act on the iron core 44, so the iron core 44 is not attracted to the upper plate 22 </ b> U of the surface plate 22.

  The stage 24 is provided with an impact buffering unit 54 on the inner side in the width direction than the stage driving mechanism 30. Similarly to the magnet mechanism 42, two shock buffering units 54 are provided along the conveying direction (four in total per stage 24). Each shock absorbing unit 54 includes a support column 56 erected on the stage 24 and an elastic body 58 fixed to the upper end of the support column 56.

  A guide piece 60 is fixed to the upper plate 22U of the surface plate 22 at a position where the elastic body 58 contacts when the stage 24 is raised. The guide piece 60 is formed with a guide surface 60A that rises toward the downstream side in the transport direction. As the stage 24 moves up, the elastic body 58 first comes into contact with the guide surface 60A, and the impact when the stage 24 is mounted on the forward path is alleviated. Immediately after the elastic body 58 contacts the guide surface 60A, the drive roller 38 of the stage drive mechanism 30 does not contact the rails 26 and 28. However, when the stage 24 further moves up, the stage 24 is slightly moved in the transport direction by the guide surface 60A. Moved to. During this ascent, the position (height) of the guide surface 60A is determined so that the drive roller 38 contacts the rails 26 and 28.

  As shown in FIGS. 1 and 2, the lower plate 22S of the surface plate 22 is provided with stage elevating mechanisms 82 and 84 on the upstream side and the downstream side in the transport direction, respectively. Each of the stage elevating mechanisms 82 and 84 is provided with a plurality of support arms 86 (two in each drawing) standing up from the lower plate 22S, and can be moved up and down by an elevating drive source (not shown). The stage 24 can be supported by the support plate 86P provided at the upper end of the support arm 86 from the lower side and can be moved up and down.

  Further, a stage moving mechanism 90 is provided on the lower plate 22S via a holding member 88. The stage moving mechanism 90 has a plurality of transport rollers 92 arranged at predetermined intervals in the transport direction, and the transport rollers 92 constitute a return path in the present invention. The stage 24 can be supported on the transport roller 92, and the transport roller 92 can be rotated in the support state to move (return) the stage 24 in the direction opposite to the transport direction. The support arm 86 is configured such that the support plate 86 </ b> P is positioned below the transport roller 92 when lowered, so that the transport of the stage 24 by the transport roller 92 is not affected.

  A stopper 98 is attached to the upstream end portion of the stage moving mechanism 90, and inadvertent movement of the stage 24 in the upstream direction by the transport roller 92 is restricted.

The holding member 88 is provided with a cable bearer 94 corresponding to each of the stages 24 so that necessary electric power can be supplied to the stage 24 and control signals can be transmitted and received.

  As shown in FIG. 2, an anti-vibration rubber 96 is disposed between the lower plate 22S and the holding member 88. From the stage moving mechanism 90 (holding member 88) when the lower stage 24 moves. The vibration transmission to the stage drive mechanism 30, the surface plate 22, and the upper stage 24 is attenuated.

  FIG. 7B shows the configuration of the recording unit 16. The recording unit 16 includes an exposure head unit 62 including a plurality of exposure heads 64. The exposure head unit 62 is located in the opening 22K, and irradiates the sheet material on the stage 24 conveyed at a constant speed in the forward path from each exposure head 64 with a light beam at a predetermined timing. The sheet material 18 can be exposed.

As shown in FIG. 8, the exposure head 64 includes a DMD (digital micromirror device) 66 that modulates an incident light beam for each pixel in accordance with image data. As shown in FIG. 6, the DMD 66 is configured such that a micromirror (micromirror) 70 is supported by a support on an SRAM cell (memory cell) 68 and a large number of micromirrors constituting a pixel (pixel). This is a mirror device configured by arranging in a grid pattern. Each pixel is provided with a micromirror 70 supported by a support at the top, and a material having a high reflectance such as aluminum (for example, a reflectance of 90% or more) is deposited on the surface of the micromirror 70. . A silicon gate CMOS SRAM cell 68 manufactured in a normal semiconductor memory manufacturing line is disposed directly below the micromirror 70 via a support including a hinge and a yoke, and the whole is monolithic (integrated). It is configured.

  When a digital signal is written to the SRAM cell 68 of the DMD 66, the micromirror 70 supported by the support is tilted in a range of ± α degrees (for example, ± 10 degrees) with respect to the substrate side on which the DMD 66 is disposed with the diagonal line as the center. It is done. FIG. 9A shows a state in which the micromirror 70 is tilted to + α degrees in the on state, and FIG. 9B shows a state in which the micromirror 70 is tilted to −α degrees in the off state. Therefore, by controlling the inclination of the micromirror 70 in each pixel of the DMD 66 as shown in FIG. 5 according to the image signal, the light incident on the DMD 66 is reflected in the inclination direction of each micromirror 70.

  As shown in FIG. 7B, the plurality of exposure heads 64 are arranged in a substantially matrix of m rows and n columns (for example, 2 rows and 5 columns in the illustrated example). It arrange | positions so that the sheet | seat material 18 can be exposed in the whole width direction.

  An exposure area 74 by one exposure head 64 is inclined with respect to the scanning direction, and the scanning lines are closely spaced so that a higher resolution can be obtained. Then, as the sheet material 18 is conveyed (scanned), as shown in FIG. 7A, a strip-shaped exposure region is formed on the sheet material 18 for each exposure head 64 without a gap.

  In the recording unit 16, a detection sensor 72 is provided on the upstream side of the exposure head 64. The detection sensor 72 can detect, for example, the leading edge and the trailing edge of the sheet material 18, and the exposure head 64 is controlled so that exposure can be performed at a predetermined timing based on the detected position data.

  When an image is recorded on the sheet material 18 using the image recording apparatus 12 of the present embodiment configured as described above, first, as shown in FIG. The lower stage 24B is positioned downstream in the transport direction. In the upper stage 24 </ b> A, the magnet mechanism 42 is in a magnet-on state, and the stage 24 is attracted to the upper plate 22 </ b> U of the surface plate 22. On the other hand, in the lower stage B, the magnet mechanism 42 is in a magnet-off state. At this time, the sheet material 18 is held on the upper stage 24A.

  In the upper stage 24A, since the driving roller 38 is in contact with the rails 26 and 28, the driving roller 38 is rotated by driving the motor 32, and the stage 24A is conveyed downstream. At this time, the lower stage 24B is supported by the transport roller 92, and the stage 24B is sent to the upstream side by the rotation of the transport roller 92. When the stage 24B moves upstream, vibration is generated, but vibration transmission to the stage 24A is attenuated by the anti-vibration rubber 96. Thereby, the stage 24A can be conveyed with high accuracy.

  In this manner, while simultaneously moving the stages 24A and 24B, the recording material 16 is exposed to the sheet material 18 held on the upper stage 24A by irradiating the modulated light beam, and image recording is performed. I do.

  As shown in FIG. 3, when the image recording on the sheet material 18 is completed, the upper stage 24A is positioned on the downstream side in the transport direction, and the lower stage 24B is positioned on the upstream side in the transport direction.

  Next, the stage elevating mechanism 84 on the downstream side in the transport direction is raised so that a slight gap is generated between the support plate 86P of the support arm 86 and the stage 24. Here, when the magnet mechanism 42 of the stage 24A is in the magnet-off state, the stage 24 is not attracted to the upper plate 22U, and thus the stage 24 is lowered by weight, but is immediately supported by contacting the support plate 86P of the support arm 86.

  In this state, as shown in FIG. 4, the support arm 86 of the downstream stage elevating mechanism 84 is lowered, and the support arm 86 of the upstream stage elevating mechanism 82 is raised. When the support plate 86 </ b> P of the downstream support arm 86 is further lowered below the transport roller 92, the stage 24 </ b> A is supported by the transport roller 92.

  On the other hand, when the support arm 86 on the upstream side rises, first, the elastic body 58 of the shock absorbing unit 54 of the stage 24B comes into contact with the guide surface 60A of the guide piece 60. Due to the elastic deformation of the elastic body 58, the impact at the time of contact is alleviated. For this reason, even if the sheet material 18 on the stage 24A is being exposed, this exposure is not affected and a continuous exposure operation is possible.

  Here, when the magnet mechanism 42 is in the magnet-on state, the magnetic force of the magnet 46 acts on the iron core, and the stage 24B is attracted to the upper plate 22U to further rise. As a result, the stage 24B slightly moves to the downstream side in the transport direction, and the driving roller 38 contacts the rails 26 and 28. In the rail 28, the driving roller 38 is drawn into the guide surface 28S, and the stage 24B is moved and positioned in the width direction. Due to the magnetic force of the magnet mechanism 42, the driving roller 38 comes into contact with the rails 26 and 28 with a predetermined contact pressure, and the stage 24B is mounted on the forward path.

  In this way, the positions of the stages 24A and 24B are completely switched. By continuously holding the sheet material 18 on the stage 24B positioned on the upper side and repeating the same operation thereafter, image recording on the sheet material 18 can be efficiently performed continuously.

  As can be seen from the above description, in the sheet material conveying device 20 of the present embodiment, two (two) stages 24 overlap each other when viewed in the normal direction of the held sheet material 18 (the forward path and the second path). Since it is moved on the return path), it can be configured in a space-saving manner as compared with the conventional case where two spaces are required in the stage width direction.

  In addition, the stage 24 can be attached to and detached from the forward path (rails 26 and 28), which is a moving path when performing image recording, by the magnetic force (attraction) with respect to the surface plate 22 of the magnet mechanism 42. It is possible to hold the stage 24 in the forward path and perform the forward movement with high accuracy. Moreover, the stage 24 can be easily detached from the forward path simply by setting the magnet mechanism 42 to the magnet-off state.

  In addition, it is sufficient that the stage 24 can be returned in the return path in which image recording is not performed while the stage 24 is reliably held in the forward path, and a highly accurate holding mechanism and transport mechanism are not necessary. In this embodiment, the sheet material conveyance device 20 is configured at low cost by using the conveyance roller 92 as a drive mechanism for the return path.

  In the present embodiment, the stage driving mechanism 30 and the magnet mechanism 42 are provided on the stage 24 so as to save more space. However, these may be provided outside the stage 24.

  In the above description, an image is recorded on the sheet material 18 when the stage 24 is moved (forward operation) on the forward path, and the stage is simply moved (return operation) on the backward path. Then, the stage may be simply sent and image recording on the sheet material 18 may be performed by a backward operation. For example, in FIGS. 1, 3, and 4, the circulation direction of the stage 24 may be counterclockwise.

  As the stage driving mechanism, it is sufficient that the stage can be reliably moved at least when image recording is performed on the sheet material 18, and the stage driving mechanism is not limited to the stage moving mechanism 90 described above. Further, the attachment / detachment mechanism of the present invention is not limited to the above-described magnet mechanism 42 as long as the contact pressure of the driving roller 38 with respect to the rails 26 and 28 can be secured, and for example, the one shown in FIG. 10 can be applied.

  In the attachment / detachment mechanism 102 shown in FIG. 10, an arm 108 is rotatably attached to an upper end of a support wall 104 erected on the stage 24 by a hinge 106. A pressing roller 110 is attached to the tip of the arm 108, and when the arm 108 is lying down (indicated by a solid line), the pressing roller 110 contacts the upper plate 22 U of the surface plate 22 and the upper plate with the driving roller 38. 22U is sandwiched, but when the arm 108 rises (indicated by a two-dot chain line), the sandwiching is released.

  In the middle of the support wall 104, there is provided a lifting plate 116 that moves up and down by the rotation of the worm gear 114 by the motor 112. Further, a pressing pin 118 is erected from the elevating plate 116. When the elevating plate 116 is raised, the pressing pin 118 presses an intermediate portion of the arm 108 and raises the arm 108. A tension coil spring 120 is stretched between the elevating plate 116 and the arm 108. When the pressing pin 118 moves away from the arm 108 due to the lowering of the elevating plate 116, the arm 108 is pulled downward, and the pressing roller 110 is moved to the surface plate. 22 is pressed against the upper plate 22U. Thereby, the pressing roller 110 is indirectly pressed against the rails 26 and 28 via the upper plate 22U.

  Therefore, in the detachable mechanism 102 having this configuration, the stage 24 is attached to and detached from the rails 26 and 28 by simply rotating the motor 112 to change the posture of the arm 108, and the contact pressure of the driving roller 38 with respect to the rails 26 and 28 is increased. It can be secured.

  In the above description, the exposure head 64 provided with the DMD which is a spatial light modulation element has been described. However, in addition to such a reflective spatial light modulation element, a transmissive spatial light modulation element (LCD) can also be used. For example, a liquid crystal shutter such as a MEMS (Micro Electro Mechanical Systems) type spatial light modulator (SLM), an optical element (PLZT element) that modulates transmitted light by an electro-optic effect, or a liquid crystal light shutter (FLC). It is also possible to use a spatial light modulation element other than the MEMS type, such as an array. Note that MEMS is a general term for a micro system that integrates micro-sized sensors, actuators, and control circuits based on a micro-machining technology based on an IC manufacturing process, and a MEMS type spatial light modulator is an electrostatic force. It means a spatial light modulation element driven by an electromechanical operation using Further, a plurality of Grafting Light Valves (GLVs) arranged in a two-dimensional shape can be used. In the configuration using these reflective spatial light modulator (GLV) and transmissive spatial light modulator (LCD), a lamp or the like can be used as a light source in addition to the laser described above.

  The exposure apparatus described above is, for example, exposure of a dry film resist (DFR) in a manufacturing process of a printed wiring board (PWB) and a color filter in a manufacturing process of a liquid crystal display (LCD). It can be suitably used for applications such as formation, DFR exposure in a TFT manufacturing process, and DFR exposure in a plasma display panel (PDP) manufacturing process.

  In the exposure apparatus, either a photon mode photosensitive material in which information is directly recorded by exposure or a heat mode photosensitive material in which information is recorded by heat generated by exposure can be used. When using a photon mode photosensitive material, a GaN-based semiconductor laser, a wavelength conversion solid-state laser, or the like is used for the laser device. When using a heat mode photosensitive material, an AlGaAs-based semiconductor laser (infrared laser), A solid state laser is used.

1 is a front view illustrating a schematic configuration of an image recording apparatus according to a first embodiment of the present invention. 1 is a side view illustrating a schematic configuration of an image recording apparatus according to a first embodiment of the present invention. 1 is a front view illustrating a schematic configuration of an image recording apparatus according to a first embodiment of the present invention. 1 is a front view illustrating a schematic configuration of an image recording apparatus according to a first embodiment of the present invention. 1A and 1B show a stage drive mechanism of an image recording apparatus according to a first embodiment of the present invention, in which FIG. It is a front view which shows the magnet mechanism of the image recording device of 1st Embodiment of this invention. (A) is a top view which shows the exposed area | region formed in a sheet | seat material, (B) is explanatory drawing which shows the arrangement | sequence of the exposure area by each exposure head. It is the elements on larger scale showing the composition of the digital micromirror device (DMD) concerning the exposure head of a 1st embodiment of the present invention. (A) And (B) is explanatory drawing for demonstrating operation | movement of DMD which concerns on the exposure head of 1st Embodiment of this invention. The other example of the attachment / detachment mechanism applicable to the image recording apparatus of this invention is shown, (A) is a front view, (B) is a side view.

Explanation of symbols

12 image recording device 14 transport unit 16 recording unit 18 sheet material 20 sheet material transport device 22 surface plate 24 stage 26 rail 28 rail 30 stage drive mechanism (first transport mechanism)
42 Magnet mechanism (detachment mechanism)
54 Shock absorbing unit (relaxation member)
62 Exposure head unit 82 Stage elevating mechanism 84 Stage elevating mechanism 90 Stage moving mechanism (second transport mechanism)
92 Conveying roller 96 Anti-vibration rubber (damping member)
102 Detachment mechanism

Claims (3)

A stage conveyed while holding a sheet material exposed by light irradiation ;
An exposure head that irradiates and exposes the light emitted from a light source according to image information at an exposure position in the middle of a conveyance path for the sheet material held on the stage;
An outward path continuously arranged from the upstream side to the downstream side in the transport direction of the stage from the exposure position;
A return path arranged so as to overlap the forward path when viewed in the normal direction of the sheet material held on the stage ;
An attachment / detachment mechanism for making the stage attachable / detachable with respect to the forward path ;
A support arm that moves between the forward path and the return path by supporting the stage and moving up and down;
A first transport mechanism that moves the stage in the forward path while the stage is held in the forward path by the attachment / detachment mechanism ;
A second transport mechanism for returning the stage in the return path;
An image recording apparatus . The first transport mechanism is
A drive roller provided on the stage and rotating in contact with the forward path;
A motor provided on the stage for rotating the drive roller;
The image recording apparatus according to claim 1, comprising: The attachment / detachment mechanism is
The image recording apparatus according to claim 1, wherein the image recording apparatus is a magnet mechanism that is provided on the stage and attracts or releases the stage by a magnetic force with respect to the forward path .

Images