JP4222317B2 - Micro relay - Google Patents

Description

  The present invention relates to a micro relay manufactured using a semiconductor process.

  Conventionally, as a microrelay manufactured using a semiconductor process, an electromagnet device has been provided, and a movable contact is separated into a fixed contact by driving an armature part to which a magnetic body is attached and a movable contact is provided by the magnetic force of the electromagnet device. An electromagnetic microrelay to be contacted is provided (see, for example, Patent Document 1).

  An example of this type of microrelay is shown in FIG. This microrelay attracts the armature block 3 having a frame-shaped frame portion 31 and an armature portion 30 rotatable with respect to the frame portion 31, a magnetic body 32 coupled to the armature portion 30, and the magnetic body 32. The electromagnet device 2 that rotates the armature portion 30 and the body 1 that holds the electromagnet device 2 and is coupled to the frame portion 31 of the armature block 3. Hereinafter, the upper and lower sides will be described with reference to FIG.

  The body 1 includes a body main body 1A and a thin film 1B bonded to the upper surface of the body main body 1A. The body main body 1A has a rectangular plate shape made of glass, and through holes 10A, 10B, 10C, and 10D are vertically provided in the vicinity of the four corners. The through holes 10A to 10D are provided with conductive films 11A to 11D on the inner surfaces, respectively. Each of the conductive films 11A to 11D is made of, for example, chromium, titanium, platinum, cobalt, nickel, copper, gold, or an alloy thereof, and is formed by plating, vapor deposition, sputtering, or the like. Lands 12 electrically connected to the conductive films 11A to 11D are provided around the openings at both ends of the through holes 10A to 10D, respectively. As shown in FIG. 5, each land 12 on the lower surface side of the body 1 is provided with bumps 13 used for surface mounting onto a printed wiring board (not shown). Each bump 13 is made of a conductive material such as gold, silver, copper, or solder, for example, and is placed on the land 12 so as to close the through holes 10A to 10D and bonded by thermal welding.

  On the upper surface of the body main body 1A, two pairs of fixed contacts 14A, 14B, 15A, and 15B, which are electrically connected to the lands 12 in a one-to-one manner, are provided. Each fixed contact 14A, 14B, 15A, 15B is made of, for example, chromium, titanium, platinum, cobalt, nickel, copper, gold, or an alloy thereof.

  In the center of the body main body 1A, a cross-shaped through hole 16 is vertically provided. The thin film 1B is bonded to the upper surface side of the body main body 1A and covers the upper opening of the through hole 16. And in the body 1, the accommodation recessed part 18 in which the electromagnet apparatus 2 is accommodated is formed under the thin film 1B (refer FIG. 5). The thin film 1B is made of silicon or glass, and has a thickness of about 5 to 50 μm, preferably about 20 μm, by etching or polishing. The inner surface of the through hole 16 is inclined so as to gradually reduce the cross-sectional area of the through hole 16 upward, thereby making it easier to accommodate the electromagnet device 2.

  The electromagnet device 2 includes a yoke 20, a permanent magnet 21, coils 22 </ b> A and 22 </ b> B, and a substrate 23. The yoke 20 is formed by bending or forging an iron plate such as electromagnetic soft iron so that the rectangular plate-like leg pieces 20B and 20C are shorter than the center piece 20A from both ends in the longitudinal direction of the rectangular plate-like center piece 20A. It is formed in a U-shape rising on the same side (upper side in FIG. 4). The permanent magnet 21 has a rectangular parallelepiped shape and is magnetized so that magnetic pole surfaces facing each other have different poles. The permanent magnet 21 is attached to the yoke 20 with one magnetic pole surface (the lower surface in FIG. 4) in contact with the center of the upper surface of the central piece 20 </ b> A of the yoke 20. Here, the other magnetic pole surface (upper surface in FIG. 4) of the permanent magnet 21 is substantially flush with the tip surfaces of the leg pieces 20B and 20C. Each coil 22A, 22B is directly wound around the central piece 20A between the leg pieces 20B, 20C and the permanent magnet 21, respectively. The substrate 23 has a rectangular shape, and is bonded to the lower surface of the central piece 20 </ b> A with the longitudinal direction orthogonal to the longitudinal direction of the central piece 20 </ b> A of the yoke 20. Conductive films 23A (see FIG. 5) are provided at both ends of the lower surface of the substrate 23 in the longitudinal direction, and both ends of each of the coils 22A and 22B are electrically connected to the conductive film 23A. On each conductive film 23A, bumps 24 used for surface mounting on a printed wiring board are provided. The electromagnet device 2 is configured such that the longitudinal direction of the central piece 20A of the yoke 20 and the longitudinal direction of the body 1 are aligned, for example, via a synthetic resin (not shown) filled between the inner surface of the housing recess 18. Is held on.

  The armature block 3 is formed by etching a silicon substrate having a thickness of about 50 to 300 μm, preferably about 200 μm, and surrounds the armature part 30 and the entire circumference of the armature part 30 to support the armature part 30. The frame part 31 is provided integrally. As shown in FIG. 6, a rectangular flat magnetic body 32 is bonded to the lower surface of the armature portion 30.

  As shown in FIGS. 6 and 7, the armature portion 30 has a rectangular magnetic body holding portion 30A to which a magnetic body 32 is bonded to the lower surface (upper surface in FIG. 6), and movable contacts 33A and 33B fixed to the lower surface. The movable contact portion 30B. The movable contact portion 30B is supported by the magnetic body holding portion 30A via elastic connecting portions 34 on both sides in the longitudinal direction of the magnetic body holding portion 30A.

  The magnetic body holding part 30A is supported by the frame part 31 via elastic parts 35 having elasticity on both sides in the short direction. A total of four elastic portions 35 are provided on each side of the magnetic material holding portion 30A in the short direction. Each elastic portion 35 has one end connected to the end surface in the short direction of the magnetic body holding portion 30 </ b> A and the other end connected to the inner peripheral surface of the frame portion 31. The elastic part 35 has a vertical dimension smaller than that of the frame part 35, and a width dimension viewed from above is further smaller than a vertical dimension.

  In addition, extending portions 36 are provided in the central portion in the longitudinal direction of the magnetic body holding portion 30A and at both ends in the short side direction so as to project in the short direction of the magnetic body holding portion 30A. A protruding portion 36A is projected from the tip of each 36. Further, on the inner peripheral surface of the frame portion 31, each portion facing the tip surface of the extension portion 36 is provided with an extension portion 37 projecting inward, and the tip surface of each extension portion 37 holds a magnetic material. A concave portion 37A into which the convex portion 36A of the portion 30A is inserted is provided. And since the convex part 36A is located in the concave part 37A, the movement of the armature part 30 with respect to the frame part 31 in the front-rear and left-right directions (up and down, left and right in FIG. 7) is restricted. Further, a protrusion 36B protrudes downward from the lower surface of the extended portion 36.

  Further, second extending portions 38 are provided at the four corners of the magnetic body holding portion 30A. On the lower surface of each second extending portion 38, a second protrusion 38A protrudes downward.

  The magnetic body 32 is formed by machining a magnetic material such as electromagnetic soft iron, electromagnetic stainless steel, permalloy, or ferrite, and is coupled to the lower surface of the magnetic body holding portion 30A. In order to couple the magnetic body 32 to the magnetic body holding portion 30A, for example, the low melting point glass is heated by heating with the low melting point glass interposed between the upper surface of the magnetic body 32 and the lower surface of the magnetic body holding portion 30A. After melting, cool.

  The vertical dimension of the armature part 30 is smaller than the vertical dimension of the frame part 31, and the lower surface of the second protrusion 38 </ b> A and the lower surface of the magnetic body 32 are recessed with respect to the lower surface of the frame part 31.

  The armature block 3 is coupled to the body 1 by, for example, the lower surface of the frame portion 31 being anodically bonded to the upper surface of the body 1. Here, the protrusion 36B abuts on the upper surface of the body 1, and the armature portion 30 can be rotated about the center in the longitudinal direction indicated by the line X in FIG. . That is, the protrusion 36B is a fulcrum protrusion. Further, each movable contact 33A, 33B is opposed to one set of fixed contacts 14A, 14B, 15A, 15B, and the tip surface of the second protrusion 38A is spaced apart and opposed to the upper surface of the body 1. Further, in the magnetic body 32, each portion located on a different side across the rotation axis X of the armature portion 30 as viewed from above opposes the distal end surfaces of the different leg pieces 20B and 20C with the thin film 1B interposed therebetween. To do.

  The upper side of the armature block 3 is covered with a rectangular plate-like cover 4 made of heat-resistant glass such as Pyrex (registered trademark). The cover 4 is bonded to the upper surface of the frame portion 31 by, for example, anodic bonding. In addition, a recess (not shown) for securing a movable range of the armature portion 30 is provided on the lower surface of the cover 4.

  The operation of the micro relay will be described. When the coils 22A and 22B are energized, the magnetic body 32 is attracted to one leg piece 20B corresponding to the energization direction, and the armature portion 30 rotates about the protrusion 36B as a fulcrum, and the one movable contact 33A is paired with a pair of fixed contacts. 14A and 14B are brought into contact conduction. Here, the fixed contacts 14A and 14B are electrically connected via the movable contact 33A. At this time, the contact pressure of the movable contact 33 </ b> A with respect to the fixed contacts 14 </ b> A and 14 </ b> B is moderately maintained by the elasticity of the connecting portion 34. Further, the second protrusion 38A is in contact with the upper surface of the body 1, so that the movable range of the armature portion 30 is limited, and damage due to contact between the magnetic body 32 and the thin film 1B is prevented. When the energization of the coils 22A and 22B is stopped, the posture of the armature unit 30 is maintained by the magnetic flux passing through the closed magnetic path of the permanent magnet 21 → the magnetic body 32 → the leg piece 20B → the permanent magnet 21.

Next, when the energization direction to the coils 22A and 22B is reversed, the armature portion 30 supports the projection 36B by the elastic force of the elastic portion 35 and the force by which the magnetic body 32 is attracted to the other leg piece 20C. And the other movable contact 33B is brought into contact with another pair of fixed contacts 15A and 15B. Here, the fixed contacts 15A and 15B are electrically connected via the movable contact 33B. When the energization of the coils 22A and 22B is stopped, the posture of the armature unit 30 is maintained by the magnetic flux passing through the closed magnetic path of the permanent magnet 21 → the magnetic body 32 → the leg piece 20C → the permanent magnet 21. In other words, the micro relay is a latching type relay having two sets of contacts that open and close alternately.
Japanese Patent Laid-Open No. 5-114347

  However, in the conventional micro relay, since the protrusions 36B are located on both sides of the magnetic body 32, a bending force is applied to the armature portion 30 when the magnetic body 32 is attracted to the electromagnet device 2, and the protrusion of the armature portion 30 The vicinity of 36B was easily elastically deformed so that the central portion in the short direction protruded downward. Such deformation in the vicinity of the protrusion 36B of the armature portion 30 is not intended in design, and therefore causes the characteristics to deviate from the design values.

  The present invention has been made in view of the above reasons, and an object of the present invention is to provide a micro relay in which the vicinity of a fulcrum projection of an armature portion is not easily deformed.

The invention of claim 1 is a frame-shaped frame part, an elastic part having one end coupled to the frame part and protruding toward the inside of the frame part, and being elastic with respect to the frame part surrounded by the frame part. an armature block having a movably supported by the armature unit, and the magnetic body coupled to the armature unit, and the electromagnetic device to rotate the armature portion by sucking the magnetic body to the frame portion of the armature block holding the electromagnetic device and a body coupled to the same side as the magnetic body against, the body fixed contact is provided, the armature unit in the micro relay in which the movable contact is provided in contact away the fixed contact in accordance with the rotation of the armature portion, The armature part has a rectangular flat plate-shaped magnetic body holding part with one surface in the thickness direction facing the electromagnet device, and a magnetic body holding part. At the both ends in the short direction and extending in the width direction of the magnetic body holding part. In addition, on one surface in the thickness direction of each extended portion and directed to the body, a fulcrum protrusion is provided to project against the body and serve as a fulcrum when the armature portion rotates with respect to the body. The body is sandwiched between the fulcrum protrusions, and the elastic parts are provided on both sides of the magnetic body holding part in the short direction, respectively, and one end is connected to the end face in the short direction of the magnetic body holding part and the other. The end is connected to the inner peripheral surface of the frame part, and a coupling hole is penetrated in the thickness direction in the central part of the armature part 's magnetic body holding part, and the magnetic body is coupled in the armature part On the opposite side of the curved surface and the opening of the coupling hole And a body portion which is opposed to between, via a joint member which is respectively coupled to the main body portion and the magnetic body provided with the auxiliary bonding member attached to the magnetic through coupling holes, the legs, respectively, for each fulcrum protrusion The armature portion is in contact with the extending portion within a range that overlaps at least a part of the fulcrum projection when viewed from the protruding direction of the fulcrum projection.

  According to the present invention, since the vicinity of the fulcrum protrusion that is easily deformed when the magnetic material is attracted to the electromagnet device in the armature part is mechanically reinforced by the joining auxiliary member, the vicinity of the fulcrum protrusion of the armature part is hardly deformed. Moreover, since the main body part which couple | bonds with a magnetic body in the joining auxiliary member is spaced apart from the armature part by providing a leg part in the joining auxiliary member, even if the joining auxiliary member is deformed by heat, the leg part is surely secured. The mechanical strength of the armature part can be ensured by contacting the part.

  According to a second aspect of the present invention, in the first aspect of the invention, in the joining auxiliary member, the main body portion and the armature portion are disposed between the portion that is joined to the joining member of the main portion and the portion that is in contact with the armature portion of the leg portion In the direction in which the distance is changed, a deformable portion that is more elastically deformed than other portions of the joining auxiliary member is provided.

  According to the present invention, since the leg portion can easily follow the armature portion, the leg portion can be more reliably brought into contact with the armature portion to ensure the mechanical strength of the armature portion.

According to the present invention , a coupling hole is penetrated in the thickness direction at a central portion in the longitudinal direction of the magnetic body holding portion of the armature portion, and the leg portion is in contact with the opposite surface of the armature portion to the surface to which the magnetic body is coupled. And a joining auxiliary member that is coupled to the magnetic body via a joining member that is coupled to the body part and the magnetic body through the coupling hole, and is spaced apart from the opening surface of the coupling hole. parts are therefore abuts against the extending portion of the armature unit in a range overlapping at least a portion of each supporting point when viewed from the projecting direction of the fulcrum projection projection for each fulcrum projection, when the magnetic material is attracted to the electromagnetic device in the armature portion Since the vicinity of the fulcrum protrusion that is easily deformed is mechanically reinforced by the joining auxiliary member, the vicinity of the fulcrum protrusion of the armature portion is difficult to deform. Moreover, since the main body part which couple | bonds with a magnetic body in the joining auxiliary member is spaced apart from the armature part by providing a leg part in the joining auxiliary member, even if the joining auxiliary member is deformed by heat, the leg part is surely secured. The mechanical strength of the armature part can be ensured by contacting the part.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  Since the basic configuration of this embodiment is the same as that of the conventional example, common portions are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 2, the armature portion 30 of the present embodiment has two coupling holes 39 arranged in the center in the longitudinal direction so as to penetrate in the lateral direction.

  Moreover, this embodiment is provided with the joining auxiliary member 5 which consists of a material which has elasticity, and covers the opening above each coupling hole 39, respectively. As shown in FIG. 1, the joining auxiliary member 5 is spaced from and opposed to the upper opening surface of the coupling hole 39 and is coupled to the magnetic body 32 through the coupling hole 39 and from both ends of the main body 51. And a leg portion 52 whose tip is in contact with the upper surface of the armature portion 30. The joining auxiliary member 5 is coupled to the armature part 30 by sandwiching the magnetic body holding part 30 </ b> A of the armature part 30 between the magnetic body 32 and holds the magnetic body 32 in the armature part 30.

  As a method of coupling the magnetic body 32 and the joining auxiliary member 5, for example, the joining member 6 made of a material having a low melting point, such as gold, gold / tin alloy, or the like is connected between the magnetic body 32 and the joining auxiliary member 5 in the coupling hole 39. There are a method of interposing and heating and melting the material and then cooling, or a method of welding a part of the joining auxiliary member 5 to the magnetic body 32. In the latter method, a part of the joining auxiliary member 5 becomes a joining member. When the former method is used for bonding to the magnetic body 32, for example, the same material as that of the magnetic body 32 is used as the material of the joining auxiliary member 5, and when the latter method is used, for example, gold, gold / tin alloy is used. Use a material with a low melting point.

  Further, as shown in FIG. 2, the joining auxiliary member 5 has a long and narrow shape in the direction along the rotation axis X of the armature portion 30, and each leg portion 52 abuts on the upper surface of the extending portion 36. . That is, each leg portion 52 of the joining auxiliary member 5 is in contact with the armature portion 30 in a range where it overlaps with the protrusion 36B when viewed from below, which is the protruding direction of the protrusion 36B that is a fulcrum protrusion. Thereby, the vicinity of the protrusion 36B of the armature portion 30 is mechanically reinforced.

  Furthermore, through holes 53 are vertically provided at both ends in the longitudinal direction of the main body 51, and in the joining auxiliary member 5, the vicinity of the through holes 53 is more easily deformed than other parts. It has become.

  According to the above configuration, since the armature portion 30 is mechanically reinforced by the joining auxiliary member 5, the magnetic body 32 is attracted to the electromagnet device 2 compared to the case where the joining auxiliary member 5 is not provided as in the conventional example. Sometimes, the vicinity of the protrusion 36B of the armature portion 30 is not easily deformed.

  Here, when the joining auxiliary member 5 has a flat shape that does not have the leg portions 52, for example, the joining auxiliary member 5 has both ends in the longitudinal direction due to heat when the frame portion 31 and the body 1 are anodically joined. If it is deformed so as to be warped upward, it is conceivable that the joining auxiliary member 5 is separated from the extending portion 36 and the effect of preventing deformation cannot be sufficiently obtained. On the other hand, in the present embodiment, in the joining auxiliary member 5, by providing the leg portion 52 that contacts the armature portion 30, the main body portion 51 coupled to the magnetic body 32 is separated from the armature portion 30. Even if the joining auxiliary member 5 is deformed, the leg portion 52 can be reliably brought into contact with the armature portion 30 to ensure the mechanical strength of the armature portion 30. Furthermore, since the joining auxiliary member 5 is easily deformed by providing the through hole 53, the joining auxiliary member 5 can easily follow the armature portion 30, so that the leg portion can be more reliably compared with the case where the through hole 53 is not provided. 52 can be brought into contact with the armature portion 30.

  The shape of the joining auxiliary member 5 is not necessarily limited to the shape of the present embodiment. For example, as shown in FIG. 3, each leg portion 52 may be inclined so as to move away from the other leg portion 52 as it approaches the tip. .

  Further, the method of providing the deformed portion is not limited to the method of providing the through hole 53 as described above, and may be easily deformed by reducing the thickness dimension, for example.

  Further, the place where the deformable portion is provided is not necessarily the main body portion 51, and may be between the portion that is coupled to the joining member 6 in the main body portion 51 and the portion that is in contact with the armature portion 30 in the leg portion 52. For example, if the joining auxiliary member 5 has a shape as shown in FIG. 3, the deformable portion may be provided on the leg portion 52 or may be provided across the main body portion 51 and the leg portion 52.

It is sectional drawing which shows the principal part of embodiment of this invention. It is a top view which shows the principal part same as the above. It is sectional drawing which shows the principal part of another form same as the above. It is a disassembled perspective view which shows a prior art example. It is a perspective view which shows the same as the above. It is a disassembled perspective view which shows the principal part same as the above. It is a top view which shows an armature block same as the above.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Body 2 Electromagnet apparatus 3 Armature block 5 Joining auxiliary member 6 Joining member 14A Fixed contact 30 Armature part 31 Frame part 32 Magnetic body 33A Movable contact 35 Elastic part 36B Protrusion 39 Coupling hole 51 Body part 52 Leg part

Claims (2)

A frame-shaped frame part, an elastic part having one end coupled to the frame part and projecting to the inside of the frame part and having elasticity, and an armature part surrounded by the frame part and supported rotatably with respect to the frame part via the elastic part An armature block having
A magnetic body coupled to the armature unit,
An electromagnet device that attracts the magnetic body and rotates the armature portion; and a body that holds the electromagnet device and is coupled to the frame portion of the armature block on the same side as the magnetic body ,
In the micro relay in which the body is provided with a fixed contact, and the armature part is provided with a movable contact that comes in contact with the fixed contact as the armature part rotates.
The armature part has a rectangular plate-like magnetic body holding part in which one surface in the thickness direction faces the electromagnet device, and a magnetic body is bonded to the one surface, and a central part in the longitudinal direction of the magnetic body holding part in the short direction Each extending at the opposite ends of the magnetic material holding portion and extending in the thickness direction of the magnetic material holding portion.
On one surface in the thickness direction of each extending portion and directed to the body, a fulcrum protrusion is provided to contact the body and serve as a fulcrum when the armature portion rotates with respect to the body,
The magnetic body is sandwiched between fulcrum protrusions,
The elastic portions are provided on both sides of the magnetic material holding portion in the short direction, respectively, and one end is connected to the end surface of the magnetic material holding portion in the short direction and the other end is connected to the inner peripheral surface of the frame portion. And
In the central part of the armature part in the longitudinal direction of the magnetic body holding part, a coupling hole is penetrated in the thickness direction ,
The armature portion has a leg portion that is in contact with the opposite surface of the surface to which the magnetic body is coupled, and a main body portion that is opposed to the opening surface of the coupling hole and is coupled to the main body portion and the magnetic body through the coupling hole. A joining auxiliary member coupled to the magnetic body via the joining member;
The leg is in contact with the extending portion of the armature portion in a range where each leg portion overlaps at least a part of the fulcrum projection when viewed from the projecting direction of the fulcrum projection.   In the joining auxiliary member, another part of the joining auxiliary member in the direction in which the distance between the main body part and the armature part is changed between the part joined to the joining member of the main body part and the part contacting the armature part of the leg part. The micro relay according to claim 1, further comprising a deformable portion that is more easily elastically deformed.

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