JP4222315B2 - Micro relay - Google Patents

Description

  The present invention relates to a micro relay manufactured using a semiconductor process.

  Conventionally, as a microrelay manufactured using a semiconductor process, an electromagnet device has been provided, and a movable contact is separated into a fixed contact by driving an armature part to which a magnetic body is attached and a movable contact is provided by the magnetic force of the electromagnet device. An electromagnetic microrelay to be contacted is provided (see, for example, Patent Document 1).

  An example of this type of microrelay is shown in FIG. This microrelay attracts the armature block 3 having a frame-shaped frame portion 31 and an armature portion 30 rotatable with respect to the frame portion 31, a magnetic body 32 coupled to the armature portion 30, and the magnetic body 32. The electromagnet device 2 that rotates the armature portion 30 and the body 1 that holds the electromagnet device 2 and is coupled to the frame portion 31 of the armature block 3. Hereinafter, the upper and lower sides will be described with reference to FIG.

  The body 1 includes a body main body 1A and a thin film 1B bonded to the upper surface of the body main body 1A. The body main body 1A has a rectangular plate shape made of glass, and through holes 10A, 10B, 10C, and 10D are vertically provided in the vicinity of the four corners. The through holes 10A to 10D are provided with conductive films 11A to 11D on the inner surfaces, respectively. Each of the conductive films 11A to 11D is made of, for example, chromium, titanium, platinum, cobalt, nickel, copper, gold, or an alloy thereof, and is formed by plating, vapor deposition, sputtering, or the like. Lands 12 electrically connected to the conductive films 11A to 11D are provided around the openings at both ends of the through holes 10A to 10D, respectively. As shown in FIG. 6, each land 12 on the lower surface side of the body 1 is provided with bumps 13 used for surface mounting on a printed wiring board (not shown). Each bump 13 is made of a conductive material such as gold, silver, copper, or solder, for example, and is placed on the land 12 so as to close the through holes 10A to 10D and bonded by thermal welding.

  On the upper surface of the body main body 1A, two pairs of fixed contacts 14A, 14B, 15A, and 15B, which are electrically connected to the lands 12 on a one-to-one basis, are provided. Each fixed contact 14A, 14B, 15A, 15B is made of, for example, chromium, titanium, platinum, cobalt, nickel, copper, gold, or an alloy thereof.

  In the center of the body main body 1A, a cross-shaped through hole 16 is vertically provided. The thin film 1B is bonded to the upper surface side of the body main body 1A and covers the upper opening of the through hole 16. And in the body 1, the accommodation recessed part 18 in which the electromagnet apparatus 2 is accommodated is formed under the thin film 1B (refer FIG. 6). The thin film 1B is made of silicon or glass, and has a thickness of about 5 to 50 μm, preferably about 20 μm, by etching or polishing. The inner surface of the through hole 16 is inclined so as to gradually reduce the cross-sectional area of the through hole 16 upward, thereby making it easier to accommodate the electromagnet device 2.

  The electromagnet device 2 includes a yoke 20, a permanent magnet 21, coils 22 </ b> A and 22 </ b> B, and a substrate 23. The yoke 20 is formed by bending or forging an iron plate such as electromagnetic soft iron so that the rectangular plate-like leg pieces 20B and 20C are shorter than the center piece 20A from both ends in the longitudinal direction of the rectangular plate-like center piece 20A. It is formed in a U-shape that rises on the same side (upper side in FIG. 5). The permanent magnet 21 has a rectangular parallelepiped shape and is magnetized so that magnetic pole surfaces facing each other have different poles. The permanent magnet 21 is attached to the yoke 20 with one magnetic pole surface (the lower surface in FIG. 5) in contact with the center of the upper surface of the central piece 20 </ b> A of the yoke 20. Here, the other magnetic pole surface (upper surface in FIG. 5) of the permanent magnet 21 is substantially flush with the tip surfaces of the leg pieces 20B and 20C. Each coil 22A, 22B is directly wound around the central piece 20A between the leg pieces 20B, 20C and the permanent magnet 21, respectively. The substrate 23 has a rectangular shape, and is bonded to the lower surface of the central piece 20 </ b> A with the longitudinal direction orthogonal to the longitudinal direction of the central piece 20 </ b> A of the yoke 20. Conductive films 23A (see FIG. 6) are provided at both ends in the longitudinal direction of the lower surface of the substrate 23, and both ends of each of the coils 22A and 22B are electrically connected to the conductive film 23A. On each conductive film 23A, bumps 24 used for surface mounting on a printed wiring board are provided. The electromagnet device 2 is configured such that the longitudinal direction of the central piece 20A of the yoke 20 and the longitudinal direction of the body 1 are aligned, for example, via a synthetic resin (not shown) filled between the inner surface of the housing recess 18. Is held in.

  The armature block 3 is formed by etching a silicon substrate having a thickness of about 50 to 300 μm, preferably about 200 μm, and surrounds the armature part 30 and the entire circumference of the armature part 30 to support the armature part 30. The frame part 31 is provided integrally. A rectangular flat magnetic body 32 is joined to the lower surface of the armature portion 30 as shown in FIG.

  As shown in FIGS. 7 and 8, the armature portion 30 has a rectangular magnetic body holding portion 30A to which a magnetic body 32 is bonded to the lower surface (upper surface in FIG. 7), and movable contacts 33A and 33B fixed to the lower surface. The movable contact portion 30B. The movable contact portion 30B is supported by the magnetic body holding portion 30A via elastic connecting portions 34 on both sides in the longitudinal direction of the magnetic body holding portion 30A.

  The magnetic body holding part 30A is supported by the frame part 31 via elastic parts 35 having elasticity on both sides in the short direction. A total of four elastic portions 35 are provided on each side of the magnetic material holding portion 30A in the short direction. Each elastic portion 35 has one end connected to the end surface in the short direction of the magnetic body holding portion 30 </ b> A and the other end connected to the inner peripheral surface of the frame portion 31. The elastic part 35 has a vertical dimension smaller than that of the frame part 35, and a width dimension viewed from above is further smaller than a vertical dimension.

  In addition, extending portions 36 are provided in the central portion in the longitudinal direction of the magnetic body holding portion 30A and at both ends in the short side direction so as to project in the short direction of the magnetic body holding portion 30A. A protruding portion 36A is projected from the tip of each 36. Further, on the inner peripheral surface of the frame portion 31, each portion facing the tip surface of the extension portion 36 is provided with an extension portion 37 projecting inward, and the tip surface of each extension portion 37 holds a magnetic material. A concave portion 37A into which the convex portion 36A of the portion 30A is inserted is provided. Further, since the convex portion 36A is positioned in the concave portion 37A, the movement of the armature portion 30 with respect to the frame portion 31 in the front-rear and left-right directions (up and down, left and right in FIG. 8) is restricted. Further, a protrusion 36B protrudes downward from the lower surface of the extended portion 36.

  Further, second extending portions 38 are provided at the four corners of the magnetic body holding portion 30A. On the lower surface of each second extending portion 38, a second protrusion 38A protrudes downward.

  The magnetic body 32 is formed by machining a magnetic material such as electromagnetic soft iron, electromagnetic stainless steel, permalloy, or ferrite, and is coupled to the lower surface of the magnetic body holding portion 30A. In order to couple the magnetic body 32 to the magnetic body holding portion 30A, for example, the low melting point glass is heated by heating with the low melting point glass interposed between the upper surface of the magnetic body 32 and the lower surface of the magnetic body holding portion 30A. After melting, cool.

  The vertical dimension of the armature part 30 is smaller than the vertical dimension of the frame part 31, and the lower surface of the second protrusion 38 </ b> A and the lower surface of the magnetic body 32 are recessed with respect to the lower surface of the frame part 31.

  The armature block 3 is coupled to the body 1 by, for example, the lower surface of the frame portion 31 being anodically bonded to the upper surface of the body 1. Here, the protrusion 36B abuts on the upper surface of the body 1, and the armature portion 30 can rotate about the center of the longitudinal direction indicated by the line X in FIG. 8 with respect to the body 1 with the protrusion 36B as a fulcrum. . That is, the protrusion 36B is a fulcrum protrusion. Further, each movable contact 33A, 33B is opposed to one set of fixed contacts 14A, 14B, 15A, 15B, and the tip surface of the second protrusion 38A is spaced apart and opposed to the upper surface of the body 1. Further, in the magnetic body 32, each portion located on a different side across the rotation axis X of the armature portion 30 as viewed from above opposes the distal end surfaces of the different leg pieces 20B and 20C with the thin film 1B interposed therebetween. To do.

  The upper side of the armature block 3 is covered with a rectangular plate-like cover 4 made of heat-resistant glass such as Pyrex (registered trademark). The cover 4 is bonded to the upper surface of the frame portion 31 by, for example, anodic bonding. In addition, a recess (not shown) for securing a movable range of the armature portion 30 is provided on the lower surface of the cover 4.

  The operation of the micro relay will be described. When the coils 22A and 22B are energized, the magnetic body 32 is attracted to one leg piece 20B corresponding to the energization direction, and the armature portion 30 rotates about the projection 36B as a fulcrum, and the one movable contact 33A is used as a pair of fixed contacts. 14A and 14B are brought into contact conduction. Here, the fixed contacts 14A and 14B are electrically connected via the movable contact 33A. At this time, the contact pressure of the movable contact 33 </ b> A with respect to the fixed contacts 14 </ b> A and 14 </ b> B is moderately maintained by the elasticity of the connecting portion 34. Further, the second protrusion 38A is in contact with the upper surface of the body 1, so that the movable range of the armature portion 30 is limited, and damage due to contact between the magnetic body 32 and the thin film 1B is prevented. When the energization of the coils 22A and 22B is stopped, the posture of the armature unit 30 is maintained by the magnetic flux passing through the closed magnetic path of the permanent magnet 21 → the magnetic body 32 → the leg piece 20B → the permanent magnet 21.

Next, when the energization direction to the coils 22A and 22B is reversed, the armature portion 30 supports the projection 36B by the elastic force of the elastic portion 35 and the force by which the magnetic body 32 is attracted to the other leg piece 20C. And the other movable contact 33B is brought into contact with another pair of fixed contacts 15A and 15B. Here, the fixed contacts 15A and 15B are electrically connected via the movable contact 33B. When the energization of the coils 22A and 22B is stopped, the posture of the armature unit 30 is maintained by the magnetic flux passing through the closed magnetic path of the permanent magnet 21 → the magnetic body 32 → the leg piece 20C → the permanent magnet 21. In other words, the micro relay is a latching type relay having two sets of contacts that open and close alternately.
Japanese Patent Laid-Open No. 5-114347

  However, in the above-described conventional micro relay, since the protrusions 36B are located on both sides of the magnetic body 32, a bending force is applied to the armature portion 30 when the magnetic body 32 is attracted to the electromagnet device 2, and the protrusion of the armature portion 30 The vicinity of 36B was easily elastically deformed so that the central portion in the short direction protruded downward. Such deformation in the vicinity of the protrusion 36B of the armature portion 30 is not intended in design, and therefore causes the characteristics to deviate from the design values.

  The present invention has been made in view of the above reasons, and an object of the present invention is to provide a micro relay in which the vicinity of a fulcrum projection of an armature portion is not easily deformed.

The invention of claim 1 is a frame-shaped frame part, an elastic part having one end coupled to the frame part and protruding toward the inside of the frame part, and being elastic with respect to the frame part surrounded by the frame part. An armature block having an armature portion that is supported, a magnetic body coupled to the armature portion, an electromagnet device that attracts the magnetic body to rotate the armature portion, and holds the electromagnet device in the frame portion of the armature block In a microrelay equipped with a coupled body , the body is provided with a fixed contact, and the armature part is provided with a movable contact that comes in contact with the armature part as the armature part rotates. A rectangular flat plate-shaped magnetic body holding portion with one surface facing the electromagnet device and a magnetic body bonded to the one surface, and a central portion in the longitudinal direction of the magnetic body holding portion And extending in the short direction of the magnetic body holding portion at both ends in the short direction, and extending in the thickness direction coincident with the thickness direction of the magnetic body holding portion. Provided on both sides in the short direction of the holding part, respectively, one end is connected to the end face in the short direction of the magnetic body holding part and the other end is connected to the inner peripheral surface of the frame part. The fulcrum protrusions projecting on the surface facing the body, which is one surface in the thickness direction of the part, are in contact with the body and serve as a fulcrum when the armature part rotates with respect to the body. In addition, on the surface opposite to the surface on which the fulcrum protrusion of the extension portion is provided, the range that overlaps at least a part of the fulcrum protrusion when viewed from the protruding direction of the fulcrum protrusion and the surface opposite to the surface on which the magnetic body of the magnetic body holding portion is joined From the thickness direction of the magnetic material holder on the surface Characterized in that it comprises a reinforcing member in contact with the armature part each with a range that does not overlap the fulcrum projection Te.

  According to the present invention, the vicinity of the fulcrum protrusion that is easily deformed when the magnetic material is attracted to the electromagnet device in the armature portion is mechanically reinforced by the reinforcing member, so that the vicinity of the fulcrum protrusion of the armature portion is not easily deformed.

  According to a second aspect of the present invention, in the first aspect of the present invention, the armature portion is provided with a coupling hole penetrating in the protruding direction of the support projection, and the magnetic body and the reinforcing member are coupled to each other through the coupling hole and the armature portion is interposed therebetween. It is characterized in that each armature part is coupled by sandwiching.

  According to the present invention, the reinforcing member can be used both for holding the magnetic body and mechanically reinforcing the armature portion.

According to the present invention, the magnetic material holding portion and the range that overlaps at least a part of the fulcrum protrusion when viewed from the protruding direction of the fulcrum protrusion on the opposite surface of the surface of the extending portion provided with the fulcrum protrusion, coupled to the armature portion In the armature portion, the magnetic body is provided on the opposite surface of the surface to which the magnetic body is bonded so as not to overlap the fulcrum protrusion when viewed from the thickness direction of the magnetic body holding portion. Since the vicinity of the fulcrum protrusion that is easily deformed when attracted by the electromagnet device is mechanically reinforced by the reinforcing member, the vicinity of the fulcrum protrusion of the armature portion is not easily deformed.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  Since the basic configuration of this embodiment is the same as that of the conventional example, common portions are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 2, the armature portion 30 of the present embodiment has two coupling holes 39 arranged in the center in the longitudinal direction so as to penetrate in the lateral direction.

  Further, the present embodiment includes a joining auxiliary member 5 that covers the upper opening of each coupling hole 39. The joining auxiliary member 5 is coupled to the magnetic body 32 through the coupling hole 39, and the magnetic body 32 is coupled to the armature section 30 by sandwiching the magnetic body holding section 30A of the armature section 30 between the magnetic body 32 and the armature section. Hold at 30.

  As a method for coupling the magnetic body 32 and the joining auxiliary member 5 to each other, for example, as shown in FIG. 1, the joining member 6 made of a material having a low melting point such as gold, gold / tin alloy, etc. And a method of cooling the material after being melted by heating, and a method of melting a part of the welding auxiliary member 5 by heat and welding it to the magnetic body 32 through the coupling hole 39. Conceivable. When the former method is used for bonding to the magnetic body 32, for example, the same material as that of the magnetic body 32 is used as the material of the joining auxiliary member 5, and when the latter method is used, for example, gold, gold / tin alloy is used. Use a material with a low melting point.

  Further, as shown in FIG. 3, the joining auxiliary member 5 has a long and narrow shape in the direction along the rotation axis X of the armature portion 30, and both end portions in the longitudinal direction respectively contact the upper surface of the extending portion 36. It touches. That is, the joining auxiliary member 5 is in contact with the armature portion 30 in a range where it overlaps with the projection 36B and a range where it does not overlap when viewed from below, which is the projection direction of the projection 36B as a fulcrum projection. Thereby, the armature part 30 is mechanically reinforced. That is, the joining auxiliary member 5 is a reinforcing member.

  According to the above configuration, since the armature portion 30 is mechanically reinforced by the joining auxiliary member 5, when the joining auxiliary member 5 is not provided as in the conventional example, or as shown in FIG. Compared to the case where the dimensions do not overlap with the installation portion 36, the vicinity of the protrusion 36 </ b> B of the armature portion 30 is less likely to be deformed when the magnetic body 32 is attracted to the electromagnet device 2.

  By the way, even if the reinforcing member is not bonded to the magnetic body 32 but is directly joined to the armature part 30 through, for example, a low-melting glass, the effect of preventing the deformation of the armature part 30 can be obtained. . However, in this embodiment, since the joining auxiliary member 5 that holds the magnetic body 32 on the armature portion 30 serves as a reinforcing member, the step of coupling the magnetic body 32 to the armature portion 30 and the step of providing the reinforcing member are separately provided. Compared to the case, the number of steps can be reduced and the manufacturing cost can be reduced.

It is sectional drawing which shows the principal part of embodiment of this invention. It is a disassembled perspective view which shows the principal part same as the above. It is a top view which shows the principal part same as the above. It is a top view which shows the principal part of a comparative example same as the above. It is a disassembled perspective view which shows a prior art example. It is a perspective view which shows the same as the above. It is a disassembled perspective view which shows the principal part same as the above. It is a top view which shows an armature block same as the above.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Body 2 Electromagnet apparatus 3 Armature block 5 Joining auxiliary member 14A Fixed contact 30 Armature part 31 Frame part 32 Magnetic body 33A Movable contact 35 Elastic part 36B Protrusion 39 Bonding hole

Claims (2)

A frame-shaped frame part, an elastic part having one end coupled to the frame part and projecting to the inside of the frame part and having elasticity, and an armature part surrounded by the frame part and supported rotatably with respect to the frame part via the elastic part An armature block having
A magnetic body coupled to the armature part;
An electromagnet device that attracts a magnetic body to rotate the armature portion, and a body that holds the electromagnet device and is coupled to the frame portion of the armature block ;
In the micro relay in which the body is provided with a fixed contact, and the armature part is provided with a movable contact that comes in contact with the fixed contact as the armature part rotates.
The armature part has a rectangular plate-like magnetic body holding part in which one surface in the thickness direction faces the electromagnet device, and a magnetic body is bonded to the one surface, and a central part in the longitudinal direction of the magnetic body holding part in the short direction Each extending at the opposite ends of the magnetic material holding portion and extending in the thickness direction of the magnetic material holding portion.
The elastic portions are provided on both sides of the magnetic material holding portion in the short direction, respectively, and one end is connected to the end surface of the magnetic material holding portion in the short direction and the other end is connected to the inner peripheral surface of the frame portion. And
On one surface in the thickness direction of each extending portion and directed to the body, a fulcrum projection that protrudes against the body and serves as a fulcrum when the armature portion rotates with respect to the body is provided,
In addition to being coupled to the armature part, the range that overlaps at least a part of the fulcrum protrusion when viewed from the projecting direction of the fulcrum protrusion and the magnetic body of the magnetic body holding part are joined on the opposite side of the surface of the extending part provided with the fulcrum protrusion A microrelay comprising a reinforcing member that abuts against the armature portion in a range that does not overlap with the fulcrum protrusion when viewed from the thickness direction of the magnetic body holding portion on the opposite surface of the magnetic surface . The armature part is provided with a coupling hole penetrating in the protruding direction of the support protrusion,
2. The microrelay according to claim 1, wherein the magnetic body and the reinforcing member are coupled to each other through the coupling hole and are respectively coupled to the armature section by sandwiching the armature section therebetween.

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