JP2010123393A - Micro-relay - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro-relay with warp reduced in a direction of an oscillating axis of an armature part caused by coupling of a reinforcing member with an armature. <P>SOLUTION: Coupling holes 39 are set in penetration at a site of an armature part 30 of an armature block 3 where fulcrum protrusions 36b are provided in a direction crossing an axis (an oscillating axis X) at which the armature part 30 oscillates against a body 1, and at the same time, a reinforcing member 5 is provided for pinching the armature part 30 together with an armature 32 by being jointed to the armature 32 through the coupling holes 39. The coupling holes 39 have a width larger than that of the reinforcing member 5 in a direction crossing the oscillating axis X of the armature part 30, so that a contact area of the armature part 30 and the reinforcing member 5 is reduced to alleviate warp caused by coupling of the reinforcing member 5 with the armature 32. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a micro relay manufactured using a semiconductor process.

  Conventionally, as a microrelay manufactured using a semiconductor process, an electromagnet device is provided, and an armature part provided with a magnetic material armature and provided with a movable contact is driven by the magnetic force of the electromagnet device. An electromagnetic microrelay that contacts and separates from a fixed contact is provided (for example, Patent Document 1).

  In this type of micro relay, fulcrum protrusions are provided near both ends in the direction of the swing axis of the armature section, and fulcrum protrusions are provided between the fulcrum protrusions on both sides. Therefore, when the armature is attracted by the electromagnet device, the central part of the armature part in the swing axis direction is likely to be deformed so as to protrude downward, which may affect the operating characteristics of the micro relay. was there.

For this reason, in the micro relay shown in Patent Document 1, a coupling hole is provided in a substantially central portion in a direction orthogonal to the swing axis of the armature portion and in a protruding direction of the fulcrum protrusion, and the armature portion is formed by the reinforcing member and the armature. The center portion in the swing axis direction of the armature portion is prevented from being elastically deformed by laser welding the reinforcing member and the armature through the coupling hole.
JP 2006-210065 A

  However, in the above-described conventional micro relay, the armature portion swings due to stress generated by holding the armature portion between the reinforcing member and the armature, or heat generated when laser welding the reinforcing member and the armature. Both ends in the direction perpendicular to the axis are warped, and a gap is generated between the armature part and the armature, which may affect the operating characteristics of the microrelay.

  The present invention has been made in view of the above reasons, and an object of the present invention is to provide a micro relay in which warpage in a direction orthogonal to the swing axis of the armature portion is reduced.

  In order to achieve the above object, according to the first aspect of the present invention, an electromagnet device that generates an electromagnetic force in response to an exciting current to the coil, and a housing portion that houses the electromagnet device are provided on one surface side in the thickness direction. A body provided with a fixed contact, a frame-like frame portion coupled to the one surface of the body, an armature portion disposed within the frame portion and supported swingably by the frame portion, one surface of the armature portion And an armature block having a movable contact that contacts and separates from the fixed contact in response to the swing of the armature part, and an armature block that is connected to the armature part. A fulcrum protrusion is provided on one surface facing the body and serves as a fulcrum when the armature part swings in a direction perpendicular to the swinging axis of the armature part. In addition, a coupling hole is provided at a portion where the fulcrum protrusion is provided, and is disposed on a surface opposite to the armature with respect to the armature part, and is joined to the armature through the coupling hole to be connected to the armature. A reinforcing member for holding the armature portion is provided, and the coupling hole has a width equal to or larger than the width of the reinforcing member in a direction orthogonal to the swing axis of the armature portion.

  The invention according to claim 2 is characterized in that, in the invention according to claim 1, the coupling hole has a width wider than the width of the reinforcing member in the direction of the swing axis of the armature portion.

  According to the first aspect of the present invention, since the area where the armature portion and the reinforcing member are in contact with each other can be reduced, the warpage of both end portions in the direction orthogonal to the swing axis of the armature portion is reduced, and the contact opening / closing capability is reduced. Can be reduced.

  According to the invention of claim 2, since the area where the armature part and the reinforcing member are in contact with each other can be further reduced, the warpage of both ends in the direction orthogonal to the swing axis of the armature part can be reduced, and the contact opening and closing A decrease in capability can be reduced.

  Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1)
The micro relay according to this embodiment will be described with reference to FIGS.

  As shown in FIG. 2, the micro relay according to the present embodiment is coupled to an armature block 3 having a rectangular frame-shaped frame portion 31 and an armature portion 30 swingable with respect to the frame portion 31, and the armature portion 30. The armature 32 made of the magnetic material, the electromagnet device 2 that swings the armature portion 30 by attracting the armature 32 with an electromagnetic attraction force, and the electromagnet device 2 is housed and coupled to the frame portion 31 of the armature block 3 The body 1 to be provided. In the following description, the upper and lower directions in FIG. 2 are defined as the upper and lower directions, and FIG. 1 shows an exploded perspective view as viewed from below.

  The body 1 includes a body main body 1a made of glass formed in a substantially rectangular parallelepiped shape and a thin film 1b bonded to the upper surface of the body main body 1a. The body body 1a has through holes 10a to 10d extending in the thickness direction in the vicinity of the four corners, and conductive films 11a to 11d are provided on the inner surfaces of the through holes 10a to 10d, respectively. Each of the conductive films 11a to 11d is made of, for example, chromium, titanium, platinum, cobalt, nickel, copper, gold, or an alloy thereof, and is formed by plating, vapor deposition, sputtering, or the like. Lands 12 that are electrically connected to the conductive films 11a to 11d are provided around the openings at both ends in the thickness direction of the through holes 10a to 10d, respectively. Bumps 13 used for surface mounting on a printed wiring board (not shown) are provided. Each bump 13 is made of a conductive material such as gold, silver, copper, or solder, for example, is placed on the land 12 so as to close the through holes 10a to 10d, and is bonded by thermal welding.

  Two pairs of fixed contacts each made of, for example, chromium, titanium, platinum, cobalt, nickel, copper, gold, or an alloy thereof, which are electrically connected to the land 12 on a one-to-one basis on the upper surface of the body body 1a. 14a, 14b, 15a, 15b are provided.

  A substantially cross-shaped through hole 16 is provided in the center of the body body 1a in the thickness direction, and a thin film 1b is joined to the upper surface of the body body 1a so as to cover the opening of the through hole 16. The thin film 1b is made of silicon or glass, and has a thickness of about 5 to 50 μm, preferably about 20 μm, by etching or polishing. A storage portion 18 in which the electromagnet device 2 is stored is formed below the thin film 1b. The inner surface of the through hole 16 is inclined so that the cross-sectional area of the through hole 16 gradually decreases toward the upper side, so that the electromagnet device 2 can be easily accommodated.

  The electromagnet device 2 includes a yoke 20, a permanent magnet 21, coils 22 a and 22 b, and a substrate 23. The yoke 20 is formed by bending or casting an iron plate such as electromagnetic soft iron so that substantially rectangular leg pieces 20b and 20c rise upward from both ends in the longitudinal direction of the substantially rectangular central piece 20a. It is formed in a shape. The permanent magnet 21 has a substantially rectangular parallelepiped shape and is magnetized so that magnetic pole surfaces orthogonal to each other have different poles. The permanent magnet 21 is attached with one magnetic pole surface in contact with the approximate center of the upper surface of the central piece 20a of the yoke 20, and the other magnetic pole surface is substantially flush with the tip surfaces of the leg pieces 20b and 20c. ing. The coils 22a and 22b are directly wound around the central piece 20a between the leg pieces 20b and 20c and the permanent magnet 21, respectively. The substrate 23 has a substantially rectangular shape, and is joined to the lower surface of the central piece 20a in such a direction that its longitudinal direction is perpendicular to the longitudinal direction of the central piece 20a of the yoke 20. Conductive films (not shown) are provided at both ends of the lower surface of the substrate 23 in the longitudinal direction, and both ends of the coils 22a and 22b are electrically connected to the conductive films. Further, bumps (not shown) used for surface mounting on a printed wiring board are provided on each conductive film. The electromagnet device 2 is accommodated in the accommodating portion 18 so that the longitudinal direction of the central piece 20a of the yoke 20 coincides with the longitudinal direction of the body 1, and a synthetic resin (not shown) is interposed between the electromagnet device 2 and the inner surface of the accommodating portion 18. ) Is filled in the body 1.

  The armature block 3 is formed by etching a silicon substrate having a thickness of about 50 to 300 μm, preferably about 200 μm, and surrounds the armature part 30 and the entire circumference of the armature part 30 to support the armature part 30. The frame part 31 is provided integrally. A substantially rectangular armature 32 is joined to the lower surface of the armature portion 30 as shown in FIG.

  The armature portion 30 includes a substantially rectangular magnetic body holding portion 30a to which the armature 32 is bonded to the lower surface (upper surface in FIG. 1), and a movable contact portion 30b to which the movable contacts 33a and 33b are fixed. The movable contact portion 30b is supported by the magnetic body holding portion 30a via elastic connecting portions 34 on both sides in the longitudinal direction of the magnetic body holding portion 30a. The magnetic body holding portion 30a is supported by the frame portion 31 via elastic portions 35 having elasticity on both sides in the short direction. Two elastic portions 35 are provided on each side of the magnetic material holding portion 30a in the short direction, and a total of four elastic portions 35 are connected to the end surface of the magnetic material holding portion 30a in the short direction and the other end. Is connected to the inner peripheral surface of the frame portion 31. The elastic part 35 has a thickness dimension smaller than that of the frame part 31.

  Extending portions 36 project from the both ends of the magnetic material holding portion 30a in the short direction of the magnetic material holding portion 30a. A convex portion 36a is projected from the tip of each. Further, on the inner peripheral surface of the frame portion 31, each portion facing the tip surface of the extension portion 36 is provided with an extension portion 37 projecting inward, and the tip surface of each extension portion 37 holds a magnetic material. A concave portion 37a into which the convex portion 36a of the portion 30a is inserted is provided. Thus, the movement of the armature portion 30 with respect to the frame portion 31 is limited by the convex portion 36a being positioned in the concave portion 37a. Further, fulcrum protrusions 36b are provided on the lower surface of the extended portion 36 so as to protrude downward. Further, second extending portions 38 are respectively extended at the four corners of the magnetic body holding portion 30a, and protrusions 38a are protruded downward on the lower surfaces of the second extending portions 38, respectively. Yes. The armature portion 30 is formed so that the thickness dimension is smaller than the thickness dimension of the frame portion 31, and the lower surface of the protrusion 38 a and the lower surface of the armature 32 are positioned above the lower surface of the frame portion 31. Yes.

  The armature 32 is formed by machining a magnetic material such as electromagnetic soft iron, electromagnetic stainless steel, permalloy, ferrite, and the like, for example, a state in which a low melting point glass is interposed between the upper surface thereof and the lower surface of the magnetic body holding portion 30a. The low melting point glass is melted by heating at, and then cooled to be coupled to the lower surface of the magnetic body holding part 30a.

  The armature block 3 is coupled to the body 1 by, for example, anodic bonding the lower surface of the frame portion 31 to the upper surface of the body 1. Here, the fulcrum protrusion 36b abuts on the upper surface of the body 1, and the armature portion 30 swings with a fulcrum protrusion 36b as a fulcrum and a straight line connecting the fulcrum protrusions 36b as an axis (hereinafter referred to as "oscillation axis X"). Is possible. Further, each movable contact 33a, 33b faces a pair of fixed contacts 14a, 14b, 15a, 15b, and the tip surface of the protrusion 38a faces the upper surface of the body 1 with a distance therebetween. Further, the armature 32 is configured such that each portion located on a different side across the swing axis X of the armature portion 30 as viewed from above opposes the distal end surfaces of the different leg pieces 20b and 20c with the thin film 1b interposed therebetween. To do.

  The upper side of the armature block 3 is covered with a substantially rectangular parallelepiped cover 4 made of heat-resistant glass such as Pyrex (registered trademark). The cover 4 is bonded to the upper surface of the frame portion 31 by, for example, anodic bonding, and a concave portion (not shown) for securing the movable range of the armature portion 30 is provided on the lower surface of the cover 4.

  As shown in FIG. 1, the armature portion 30 has two coupling holes 39 in the short direction in the longitudinal direction of the armature portion and in the direction perpendicular to the swing axis X, and the swing shaft. The reinforcing member 5 is joined so as to cover the opening on the upper side of the joint hole 39.

The reinforcing member 5 is made of a material having a low melting point, such as gold or gold / tin alloy, and is formed in an elongated shape whose longitudinal direction is along the swing axis of the armature portion 30. Here, the coupling hole 39 is formed in a substantially circular shape having the same diameter as the width of the reinforcing member 5 in the short direction. Further, both ends of the reinforcing member 5 are in contact with the upper surface of the extending portion 36, and the armature portion 30 is sandwiched between the armature portion 30 and the armature portion 30 with the armature 32. In joining the reinforcing member 5 and the armature 32, the reinforcing member 5 is melted by irradiating the upper surface of the reinforcing member 5 with a laser beam in a range where the reinforcing member 5 overlaps the coupling hole 39, A method of welding to the armature 32 through the coupling hole 39 is conceivable. The armature part 30 is held by the armature part 30 by joining the reinforcing member 5 and the armature 32 through the coupling hole 39. Thus, the reinforcing member 5 reinforces the armature part 30 by abutting the armature part 30 in a range overlapping with the fulcrum protrusion 36b and a range not overlapping with the fulcrum protrusion 36b as viewed from below, which is the protruding direction of the fulcrum protrusion 36b.

  As a method for joining the reinforcing member 5 and the armature 32, for example, a joining member made of a material having a low melting point such as gold or gold / tin alloy is interposed between the armature 32 and the reinforcing member 5 in the coupling hole 39. It is also conceivable to join the reinforcing member 5 and the armature 32 by heating and melting them by irradiating them with laser light or the like and then cooling them. In this method, the reinforcing member 5 can use the same material as the armature 32.

  When the reinforcing member 5 and the armature 32 are joined by these methods, the reinforcing member 5 and the joining member generate heat by the laser beam. As described above, the diameter of the coupling hole 39 is the same as that of the reinforcing member 5. Since the width is the same as the width in the short direction, the contact surface between the reinforcing member 5 and the magnetic body holding part 30a is small, the heat generated by the reinforcing member 5 is hardly transmitted to the magnetic body holding part 30a, and the magnetic body holding part 30a is heated. To reduce deformation.

In addition, since the contact surface between the reinforcing member 5 and the magnetic body holding portion 30a is reduced, the magnetic body holding portion 30a is less susceptible to stress due to being held, and is in a direction orthogonal to the swing axis X. Warpage can be reduced The operation of the micro relay will be described below. When the coils 22a and 22b are energized, the armature 32 is attracted to one leg piece 20b corresponding to the energization direction, the armature section 30 swings about the swing axis X, and the one movable contact 33a is fixed to a pair of fixed contacts. The contacts 14a and 14b are brought into contact conduction. Here, the fixed contacts 14a and 14b are electrically connected via the movable contact 33a. At this time, the contact pressure of the movable contact 33 a with respect to the fixed contacts 14 a and 14 b is kept moderate by the elasticity of the connecting portion 34. Further, the protrusion 38a abuts on the upper surface of the body 1, so that the movable range of the armature portion 30 is limited, and damage due to contact between the armature 32 and the thin film 1b is prevented. When the energization to the coils 22a and 22b is stopped, the posture of the armature unit 30 is maintained by the magnetic flux passing through the closed magnetic path of the permanent magnet 21 → the armature 32 → the leg piece 20b → the permanent magnet 21.

  Next, when the energization direction to the coils 22a and 22b is reversed, the armature portion 30 rotates the swing axis X by the elastic force of the elastic portion 35 and the force by which the armature 32 is attracted to the other leg piece 20c. As a shaft, it swings to the opposite side as described above, and the other movable contact 33b is brought into contact with another pair of fixed contacts 15a and 15b. Here, the fixed contacts 15a and 15b are electrically connected via the movable contact 33b. When the energization of the coils 22a and 22b is stopped, the posture of the armature portion 30 is maintained by the magnetic flux passing through the closed magnetic path of the permanent magnet 21 → the armature 32 → the leg piece 20c → the permanent magnet 21.

(Embodiment 2)
As shown in FIG. 3, the coupling hole 39 is formed in an oval shape having a long side in the direction orthogonal to the swing axis X of the armature portion and a long side longer than the width in the short direction of the reinforcing member 5. Yes. Except for this point, the configuration is the same as that of the first embodiment, so the common components are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 3, the armature portion 30 has two coupling holes 39 penetrating along the short direction at a substantially central portion in the longitudinal direction. The coupling hole 39 has an oval shape, and the long side forms a dimension longer than the width of the reinforcing member 5 in the short direction.

  Thus, the heat generated by the laser light generated when the reinforcing member 5 and the armature 32 are joined is not easily transmitted to the magnetic body holding part 30a, and the possibility that the magnetic body holding part 30a is deformed by heat is reduced. Moreover, since it is hard to receive the stress by joining the reinforcement member 5 and the armature 32, the curvature of the both ends in the direction orthogonal to the rocking | fluctuation axis X of the armature part 30 is reduced, and the fall of opening-and-closing capability is prevented. be able to.

It is a disassembled perspective view which shows the micro relay concerning Embodiment 1 of this invention. It is a disassembled perspective view which shows the micro relay. It is a disassembled perspective view which shows the micro relay concerning Embodiment 2 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Body 14a, 14b Fixed contact 15a, 15b Fixed contact 2 Electromagnet device 3 Armature block 30 Armature part 31 Frame part 32 Armature 33a, 33b Movable contact 36b Support point protrusion 39 Joint hole 5 Reinforcement member

Claims (2)

An electromagnet device that generates an electromagnetic force in response to an excitation current to the coil;
A body provided with a storage portion for storing an electromagnet device and having a fixed contact on one surface side in the thickness direction;
A frame-shaped frame part coupled to the one surface of the body, an armature part disposed in the frame part of the frame part and supported swingably by the frame part, and an electromagnetic force of the electromagnet device coupled to one surface of the armature part An armature block having an armature block made of a magnetic material attracted by the armature and a movable contact that contacts and separates from the fixed contact in response to the swing of the armature part,
The armature part is provided with a fulcrum projection on one surface facing the body and serving as a fulcrum when the armature part swings in contact with the body, and a fulcrum protrusion in a direction perpendicular to the swing axis of the armature part. There is a connecting hole in the
A reinforcing member that is disposed on a surface opposite to the armature portion with respect to the armature portion and is sandwiched between the armature portion and the armature portion by being joined to the armature through the coupling hole;
The microrelay characterized in that the coupling hole has a width equal to or greater than the width of the reinforcing member in a direction orthogonal to the swing axis of the armature portion.   2. The micro relay according to claim 1, wherein the coupling hole has a width wider than the width of the reinforcing member in the direction of the swing axis of the armature portion.

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