JP4221019B2 - Semiconductor device - Google Patents

Semiconductor device Download PDF

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JP4221019B2
JP4221019B2 JP2006254166A JP2006254166A JP4221019B2 JP 4221019 B2 JP4221019 B2 JP 4221019B2 JP 2006254166 A JP2006254166 A JP 2006254166A JP 2006254166 A JP2006254166 A JP 2006254166A JP 4221019 B2 JP4221019 B2 JP 4221019B2
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pad
wire
contacts
wiring
bonding
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JP2007019538A (en
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隆博 加藤
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Fujitsu Semiconductor Ltd
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)

Description

本発明は半導体装置（以下、ＬＳＩという）に係り、詳しくは、パッケージＬＳＩにおいて、パッケージの外部に露出するリード電極とボンディングによりワイヤを介して接続されるチップの入出力端子（Ｉ／Ｏパッド）の構造に関する。   The present invention relates to a semiconductor device (hereinafter referred to as an LSI), and more specifically, in a package LSI, an input / output terminal (I / O pad) of a chip connected to a lead electrode exposed outside the package via a wire. Related to the structure.

近年のＩＣは、高集積化の要望から多層配線化され、ますますの微細化が進められている。そのため、チップ上面に形成されるパッドと配線とのコンタクトも複雑化・微細化が進み、パッドの構造が弱くなりつつある。このようにパッドの構造が弱くなると、パッドがチップから剥離するおそれがあり、リード電極との接続が不良となるおそれがある。一方で、パッドとワイヤの接合は確実なことが常に要求されているため、近年のＬＳＩでは、パッドの構造を強固にすることと、パッドとワイヤの接合を確実にすることの２つを両立することが必要となっている。   In recent years, ICs have been made into multi-layer wiring due to the demand for high integration, and further miniaturization is being promoted. For this reason, the contact between the pad and the wiring formed on the upper surface of the chip is becoming more complicated and finer, and the pad structure is becoming weaker. If the structure of the pad becomes weak in this way, the pad may be peeled off from the chip, and the connection with the lead electrode may be poor. On the other hand, since there is always a need for reliable bonding between the pad and the wire, in recent LSIs, both the strengthening of the pad structure and the reliable bonding of the pad and the wire are compatible. It is necessary to do.

従来、チップ上面の外周部には複数のＩ／Ｏパッドが形成されている。このパッドは、チップ中央部に構成される内部論理回路の電源及び信号の入出力を行うものである。そして、このようなパッドは、パッケージの外部に露出するリード電極に対しボンディングワイヤにより接続される。   Conventionally, a plurality of I / O pads are formed on the outer peripheral portion of the upper surface of the chip. This pad is used for power supply and signal input / output of an internal logic circuit formed at the center of the chip. Such a pad is connected to a lead electrode exposed outside the package by a bonding wire.

図５は、多層配線構造のチップにおけるＩ／Ｏパッド部の一例を示す。尚、図５（ａ）はその平面図であり、図５（ｂ）は図５（ａ）のＣ−Ｃ断面図である。
略正方形状に形成されたパッド１１は層間膜（酸化膜）１２上に形成され、その層間膜１２の下層には配線１３が形成されている。パッド１１は、層間膜１２を挟んで配線１３と複数のコンタクト１４で接続されている。そして、コンタクト１４は、そのパッド１１の周辺部において辺に沿って１列に配置されている。 FIG. 5 shows an example of an I / O pad portion in a chip having a multilayer wiring structure. 5A is a plan view thereof, and FIG. 5B is a cross-sectional view taken along the line C-C in FIG. 5A.
The pad 11 formed in a substantially square shape is formed on an interlayer film (oxide film) 12, and a wiring 13 is formed below the interlayer film 12. The pad 11 is connected to the wiring 13 by a plurality of contacts 14 with the interlayer film 12 interposed therebetween. The contacts 14 are arranged in a line along the side at the periphery of the pad 11.

このように形成されたパッド１１には、図示しない自動ワイヤボンディング装置によって、ボンディングワイヤ１５の一端が当該パッド１１の略全面にわたりボンディングされる。   One end of the bonding wire 15 is bonded to the pad 11 formed in this manner over the substantially entire surface of the pad 11 by an automatic wire bonding apparatus (not shown).

ここで、コンタクト１４が位置するパッド１１の上面には、そのパッド１１形成時に僅かな窪み１６が発生する。しかしながら、コンタクト１４はパッド１１周辺部に配置されているので、パッド１１の上面は平面度が高く、パッド１１とワイヤ１５の接合が確実になされる。   Here, a slight depression 16 is formed on the upper surface of the pad 11 where the contact 14 is located when the pad 11 is formed. However, since the contact 14 is disposed in the periphery of the pad 11, the upper surface of the pad 11 has high flatness, and the bonding between the pad 11 and the wire 15 is ensured.

ところで、自動ワイヤボンディング装置がパッド１１に対して前記ワイヤ１５をボンディングするとき、当該パッド１１には前記ワイヤ１５を介して上向きの応力が作用する。しかしながら、上記したパッド１１はその周辺のみに配置されるコンタクト１４によって配線１３に接続されているので、パッド１１と配線１３との接続箇所が少なく、その構造が強固ではない。従って、パッド１１に対して応力が作用すると、当該パッド１１が層間膜１２から、又は層間膜１２が配線１３から剥離するおそれがある。   By the way, when the automatic wire bonding apparatus bonds the wire 15 to the pad 11, upward stress acts on the pad 11 through the wire 15. However, since the pad 11 described above is connected to the wiring 13 by the contact 14 disposed only in the periphery thereof, the number of connection portions between the pad 11 and the wiring 13 is small, and the structure is not strong. Accordingly, when stress acts on the pad 11, the pad 11 may be peeled off from the interlayer film 12 or the interlayer film 12 may be peeled off from the wiring 13.

特に、上記構成のパッド１１では、その中央部がコンタクト１４の配置された位置から離れているため応力に対して弱く、その中央部からパッド１１全体が層間膜１２から剥離し易い。   In particular, the pad 11 having the above-described configuration is weak against stress because the central portion is away from the position where the contact 14 is disposed, and the entire pad 11 is easily peeled off from the interlayer film 12 from the central portion.

上記した上向きの応力に対して高い強度を持つパッド構造を図６に示す。尚、図６（ａ）はその平面図であり、図６（ｂ）は図６（ａ）のＤ−Ｄ断面図である。
図６に示すパッド１１ａでは、その全面にわたりコンタクト１４が等間隔かつ密に配置され、コンタクト１４の数が増やされている。このようにすれば、パッド１１ａと配線１３との接続箇所が増えるため、当該パッド１１ａは層間膜１２（配線１３）に対して確実に固定される。従って、パッド１１ａに作用する応力によって、当該パッド１１ａが層間膜１２から剥離することを防止することができる。 FIG. 6 shows a pad structure having a high strength against the upward stress described above. 6A is a plan view thereof, and FIG. 6B is a sectional view taken along the line DD of FIG. 6A.
In the pad 11a shown in FIG. 6, the contacts 14 are arranged at equal intervals and densely over the entire surface, and the number of contacts 14 is increased. By doing so, the number of connection points between the pad 11a and the wiring 13 is increased, so that the pad 11a is reliably fixed to the interlayer film 12 (wiring 13). Therefore, it is possible to prevent the pad 11a from being peeled off from the interlayer film 12 due to the stress acting on the pad 11a.

ところが、パッド１１ａの全面にわたりコンタクト１４を配置すると、それらコンタクト１４による窪み１６によってパッド１１ａ上面の平面度が低くなってしまう。すると、パッド１１ａ上面とボンディングワイヤ１５との接合面積が狭くなり、パッド１１ａからワイヤ１５が剥がれやすくなる。このことは、ＬＳＩの信頼性を大きく低下させる原因の１つとなる。   However, when the contacts 14 are arranged over the entire surface of the pad 11a, the flatness of the upper surface of the pad 11a is lowered by the recess 16 due to the contacts 14. Then, the bonding area between the upper surface of the pad 11a and the bonding wire 15 is reduced, and the wire 15 is easily peeled off from the pad 11a. This is one of the causes for greatly reducing the reliability of the LSI.

本発明は、上記問題点を解決するためになされたものであって、その目的は、パッドに作用する応力に対して強い構造としながら、パッドとワイヤの接合強度を高めることができる半導体装置を提供することにある。   The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a semiconductor device capable of increasing the bonding strength between a pad and a wire while making the structure strong against stress acting on the pad. It is to provide.

請求項１に記載の発明は、チップに形成された配線と、その配線に対し層間膜を挟んで配置され、ボンディングワイヤを接合する四角形状のパッドとを、コンタクトを介して接続した半導体装置であって、前記四角形状のパッドの４辺から第１の距離に環状かつ等間隔に配置された第１のコンタクト列と、前記四角形状のパッドの対角線上に配置された第２，第３のコンタクト列のみを有する。 The invention according to claim 1 is a semiconductor device in which a wiring formed on a chip and a quadrangular pad that is arranged with an interlayer film sandwiched between the wirings and joins bonding wires are connected via contacts. A first contact row arranged annularly and equidistantly at a first distance from four sides of the quadrangular pad, and second and third dials arranged on the diagonal of the quadrangular pad. Has only contact rows.

（作用）
請求項１に記載の発明によれば、四角形状のパッドの４辺から第１の距離に環状かつ等間隔に配置された第１のコンタクト列と、四角形状のパッドの対角線上に配置された第２，第３のコンタクト列のみが備えられる。この請求項に記載の発明では、パッドと配線との接続箇所が比較的多くなるため、パッドに作用する応力に対して強い強度を持つ構造となり、しかも、パッド上面の平面度が大きく低下しないため、パッドとワイヤの接合強度が高くなる。 (Function)
According to the invention described in claim 1, and a first contact row arranged from the four sides of the square shape pad annularly at equal intervals on the first distance, it is arranged on the diagonal line of the square-shaped pads Only the second and third contact rows are provided. In the invention described in this claim, since the number of connection points between the pad and the wiring is relatively large, the structure has a strong strength against the stress acting on the pad, and the flatness of the upper surface of the pad is not greatly reduced. The bonding strength between the pad and the wire is increased.

本発明によれば、パッドに作用する応力に対して強い構造としながら、パッドとワイヤの接合強度を高めることができる半導体装置を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the semiconductor device which can raise the joint strength of a pad and a wire can be provided, making it a structure strong with respect to the stress which acts on a pad.

以下、本発明を具体化した一実施の形態を図１及び図２に従って説明する。
図１は、パッケージＬＳＩを示す。チップ１は多層配線構造のチップであって、その中央部の領域２には内部論理回路を構成する素子が形成され、更にチップ１上面の外周部には複数のＩ／Ｏパッド３が形成されている。このパッド３は、内部論理回路の電源及び信号の入出力を行うものである。そして、このようなパッド３は、パッケージ４の外部に露出するリード電極５に対しボンディングワイヤ６により接続される。 Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
FIG. 1 shows a package LSI. The chip 1 is a chip having a multilayer wiring structure, and an element constituting an internal logic circuit is formed in the central region 2, and a plurality of I / O pads 3 are formed on the outer periphery of the upper surface of the chip 1. ing. The pad 3 is used to input / output power and signals for the internal logic circuit. Such a pad 3 is connected to a lead electrode 5 exposed outside the package 4 by a bonding wire 6.

図２は、前記チップ１におけるＩ／Ｏパッド部を示す。尚、図２（ａ）はその平面図であり、図２（ｂ）は図２（ａ）のＡ−Ａ断面図である。
略正方形状に形成されたパッド３は層間膜（酸化膜）７上に形成され、その層間膜７の下層には配線８が形成されている。パッド３は、層間膜７を挟んで配線８と複数のコンタクト９で接続されている。そして、本実施の形態では、コンタクト９は、そのパッド３の周辺部において辺に沿って１列に配置されるとともに、その中央部に所定の数（図２において４個）だけ配置されている。即ち、本実施の形態では、コンタクト９は、パッド３の４隅（４方の角部）を含めた周辺部と中央部に密に配置されている。 FIG. 2 shows an I / O pad portion in the chip 1. 2A is a plan view, and FIG. 2B is a cross-sectional view taken along the line AA in FIG. 2A.
The pad 3 formed in a substantially square shape is formed on an interlayer film (oxide film) 7, and a wiring 8 is formed below the interlayer film 7. The pad 3 is connected to the wiring 8 by a plurality of contacts 9 with the interlayer film 7 interposed therebetween. In the present embodiment, the contacts 9 are arranged in a line along the side at the periphery of the pad 3 and a predetermined number (four in FIG. 2) is arranged at the center. . That is, in this embodiment, the contacts 9 are densely arranged at the peripheral part and the central part including the four corners (four corners) of the pad 3.

ここで、本実施の形態では、パッド３の中央部に配置されるコンタクトの数は、その数とパッドの剥がれ不良度の相関関係と、その数とパッド・ワイヤ間接合強度の相関関係とに基づいて、ともに良好となる範囲内で決めている。つまり、パッド３の中央部には、ワイヤ６を接合する領域（図２（ａ）に示す破線内の領域）に対応する数のコンタクト９が配置される。   Here, in the present embodiment, the number of contacts arranged in the central portion of the pad 3 is based on the correlation between the number and the degree of pad peeling failure, and the correlation between the number and the pad-wire bonding strength. Based on this, both are determined within a range where both are good. That is, the number of contacts 9 corresponding to the region (region in the broken line shown in FIG. 2A) to which the wire 6 is joined is arranged at the center of the pad 3.

図２は、パッド３に対するコンタクト９の配置位置を模式的に示している。因みに、パッド３は、１辺が８０［μｍ］の正方形である。又、コンタクト９は、１辺が０．６［μｍ］の正方形である。更に、隣接するコンタクト９の間隙は、１．２［μｍ］である。従って、実際には、図２に示す数よりも多くのコンタクト９がパッド３に形成されている。 FIG. 2 schematically shows an arrangement position of the contact 9 with respect to the pad 3. Incidentally, the pad 3 is a square whose side is 80 [μm] . The contact 9 is a square having a side of 0.6 [μm] . Further, the gap between adjacent contacts 9 is 1.2 [μm] . Therefore, in actuality, more contacts 9 than the number shown in FIG.

このように形成されたパッド３は、その周辺部と中央部に密に配置されるコンタクト９によって配線８に接続されるので、当該パッド３は層間膜７（配線８）に対して確実に固定される。特に、上記構成のパッド３では、その周辺部及び中央部が応力に対して強い強度を持つ、即ち図５に示すパッド構造に比べて強い構造になっている。そのため、ワイヤ６を介してパッド３に上向きの応力が作用しても、その応力によりパッド３が層間膜７から剥離することが図５の従来例に比べて抑えられる。   Since the pad 3 formed in this way is connected to the wiring 8 by the contacts 9 that are densely arranged at the periphery and the center thereof, the pad 3 is securely fixed to the interlayer film 7 (wiring 8). Is done. In particular, the pad 3 having the above-described configuration has a strong strength against stress at its peripheral portion and central portion, that is, a structure stronger than the pad structure shown in FIG. Therefore, even if an upward stress is applied to the pad 3 through the wire 6, it is possible to prevent the pad 3 from being peeled off from the interlayer film 7 by the stress as compared with the conventional example of FIG.

しかも、コンタクト９はパッド３の周辺部と中央部にのみ密に配置されるので、パッド３の上面に生じる窪み１０を多くすることなく、その上面の平面度を大きく低下させるものではない。そのため、パッド３に対して前記ワイヤ６の一端をボンディングしたとき、本実施の形態では、パッド３とワイヤ６との接合面積が図６に示すパッド構造の接合面積に比べて広いので、パッド３とワイヤ６の接合強度が図６の従来例に比べて高くなる。従って、本実施の形態では、パッド３とワイヤ６は確実に接合される。   In addition, since the contacts 9 are densely arranged only at the peripheral portion and the central portion of the pad 3, the flatness of the upper surface of the pad 3 is not greatly reduced without increasing the number of depressions 10 formed on the upper surface of the pad 3. Therefore, when one end of the wire 6 is bonded to the pad 3, in this embodiment, the bonding area between the pad 3 and the wire 6 is larger than the bonding area of the pad structure shown in FIG. The bonding strength of the wire 6 is higher than that of the conventional example of FIG. Therefore, in the present embodiment, the pad 3 and the wire 6 are reliably bonded.

上記したように、本実施の形態では、以下に示す作用効果を得ることができる。
（１）本実施の形態のパッド３は、その周辺部と中央部に密に配置されるコンタクト９によって配線８に接続されるので、パッド３に作用する応力に対して強い強度を持つ。しかも、パッド３上面の平面度が大きく低下しないため、パッド３とワイヤ６の接合強度が高い。従って、パッド３の層間膜７からの剥離を抑えることができ、しかも、パッド３とワイヤ６の接合を確実にすることができる。 As described above, in the present embodiment, the following operational effects can be obtained.
(1) Since the pad 3 of the present embodiment is connected to the wiring 8 by the contacts 9 that are densely arranged at the periphery and the center thereof, the pad 3 has high strength against the stress acting on the pad 3. In addition, since the flatness of the upper surface of the pad 3 is not greatly reduced, the bonding strength between the pad 3 and the wire 6 is high. Therefore, peeling of the pad 3 from the interlayer film 7 can be suppressed, and the bonding between the pad 3 and the wire 6 can be ensured.

（２）本実施の形態では、パッド３の中央部に配置されるコンタクトの数は、その数とパッドの剥がれ不良度の相関関係と、その数とパッド・ワイヤ間接合強度の相関関係とに基づいて、ともに良好となる範囲内で決めている。従って、パッド３を応力に対して確実に強い強度を持つ構造とすることができ、かつパッド３とワイヤ６の接合強度を確実に高くすることができる。   (2) In the present embodiment, the number of contacts arranged in the center portion of the pad 3 is based on the correlation between the number and the degree of pad peeling failure, and the correlation between the number and the pad-wire bonding strength. Based on this, both are determined within a range where both are good. Therefore, the pad 3 can be made to have a structure having a strong strength against stress, and the bonding strength between the pad 3 and the wire 6 can be reliably increased.

尚、本発明の実施の形態は以下のように変更してもよい。
○上記実施の形態では、図２に示すように、コンタクト９をパッド３の周辺部と中央部にのみ配置したが、以下のようにコンタクト９を配置しても上記と同様の作用効果がある。 In addition, you may change embodiment of this invention as follows.
In the above embodiment, as shown in FIG. 2, the contacts 9 are arranged only at the peripheral portion and the central portion of the pad 3. However, even if the contacts 9 are arranged as follows, the same effects as described above are obtained. .

図３（ａ）に示すように、コンタクト９をパッド３の周辺部、特に４隅（４方の角部）と中央部に密に配置し、更に対角線上に等間隔に配置してもよい。
図３（ｂ）に示すように、コンタクト９をパッド３の周辺部と、中心部を避けた中央部に等間隔に配置してもよい。 As shown in FIG. 3A, the contacts 9 may be densely arranged at the periphery of the pad 3, particularly at the four corners (four corners) and the center, and may be arranged at equal intervals on a diagonal line. .
As shown in FIG. 3B, the contacts 9 may be arranged at equal intervals in the peripheral part of the pad 3 and in the central part avoiding the central part.

図３（ｃ）に示すように、コンタクト９をパッド３の４隅（４方の角部）と中央部に密に配置し、更に対角線上に等間隔に配置してもよい。 As shown in FIG. 3C, the contacts 9 may be densely arranged at the four corners (four corners) and the central part of the pad 3, and further arranged at equal intervals on a diagonal line .

即ち、コンタクト９は、少なくともパッド３の４隅（４方の角部）と中央部に密に配置することが望ましい。
又、図４（図４（ａ）はその平面図、図４（ｂ）は図４（ａ）のＢ−Ｂ断面図）に示すように、コンタクト９はパッド３の周辺部と中央部に環状かつ帯状に連続して配置してもよい。このようにしても、パッド３ｅを層間膜７（配線８）に確実に固定することができる。 That is, it is desirable that the contacts 9 be densely arranged at least at the four corners (four corners) and the center of the pad 3.
Further, as shown in FIG. 4 (FIG. 4 (a) is a plan view thereof, and FIG. 4 (b) is a sectional view taken along line BB of FIG. 4 (a)), the contact 9 is provided at the peripheral portion and the central portion of the pad 3. You may arrange | position continuously in cyclic | annular form and strip | belt shape. Even in this case, the pad 3e can be reliably fixed to the interlayer film 7 (wiring 8).

○上記実施の形態では、パッド３を正方形状に形成したが、パッド３を正方形以外の四角形状、又は四角形以外の形状で形成してもよい。   In the above embodiment, the pad 3 is formed in a square shape, but the pad 3 may be formed in a quadrangular shape other than a square or a shape other than a square.

本実施の形態のＬＳＩの概略構成図である。It is a schematic block diagram of LSI of this Embodiment. 本実施の形態のパッド部の拡大図である。It is an enlarged view of the pad part of this Embodiment. 別例のパッド部の拡大図である。It is an enlarged view of the pad part of another example. 別例のパッド部の拡大図である。It is an enlarged view of the pad part of another example. 従来のパッド部の拡大図である。It is an enlarged view of the conventional pad part. 従来のパッド部の拡大図である。It is an enlarged view of the conventional pad part.

符号の説明Explanation of symbols

１ チップ
３，３ａ〜３ｅ パッド
６ ボンディングワイヤ
７ 層間膜
８ 配線
９ コンタクト 1 Chip 3, 3a-3e Pad 6 Bonding wire 7 Interlayer film 8 Wiring 9 Contact

Claims (1)

チップに形成された配線と、その配線に対し層間膜を挟んで配置され、ボンディングワイヤを接合する四角形状のパッドとを、コンタクトを介して接続した半導体装置であって、  A semiconductor device in which a wiring formed on a chip and a quadrangular pad that is arranged with an interlayer film sandwiched between the wiring and bonding bonding wires are connected via a contact,
前記四角形状のパッドの４辺から第１の距離に環状かつ等間隔に配置された第１のコンタクト列と、  A first contact row arranged annularly and equidistantly at a first distance from four sides of the quadrangular pad;
前記四角形状のパッドの対角線上に配置された第２，第３のコンタクト列のみを有することを特徴とする半導体装置。  A semiconductor device having only second and third contact rows arranged on a diagonal line of the quadrangular pad.
JP2006254166A 2006-09-20 2006-09-20 Semiconductor device Expired - Lifetime JP4221019B2 (en)

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