JP4197654B2 - Head gimbal assembly and hard disk device - Google Patents

Description

  The present invention relates to a head gimbal assembly and a hard disk device on which a head slider is mounted, and more particularly to a device that displaces the head slider by a piezoelectric actuator.

  A thin film magnetic head for recording and reproducing magnetic information on a recording medium such as a hard disk is formed on a so-called head slider. A head gimbal assembly (HGA) is configured by mounting this head slider on the tip end region of the suspension. Generally, this suspension is obtained by superposing a flexible flexure on a load beam formed of SUS or the like, and a wiring for recording / reproducing of a thin film magnetic head is applied to the flexure. Further, the base end side of such a suspension is connected to an actuator arm driven by a voice coil motor (VCM). And what is called a head stack assembly (HSA) is comprised by attaching a VCM coil etc. to what connected the suspension and the actuator arm.

  By the way, with the recent increase in recording density of hard disks, in particular, the narrowing of the track width, a technique for driving a head slider with a minute amount with high accuracy is required. Therefore, conventionally, as shown in Patent Document 1 below, a head gimbal assembly has been proposed in which a piezoelectric actuator using a piezoelectric element is arranged at a connecting portion between the suspension and the actuator arm. This is a so-called two-stage fluctuation type assembly. As a first stage, a relatively large movement of the thin film magnetic head is controlled by driving an actuator arm by a voice coil motor. Is to be controlled by driving a suspension by a piezoelectric actuator.

  However, in such a two-stage variable head gimbal assembly, it is necessary to drive the entire long suspension by a piezoelectric actuator, so that there is a limit to the high accuracy of tracking.

For this reason, as disclosed in, for example, Patent Document 2 below, an apparatus in which a thin film piezoelectric actuator is provided between a head slider and a suspension has been proposed. According to this device, since the piezoelectric actuator does not need to drive the long suspension itself, more accurate tracking can be realized.
JP 2002-134807 A (FIG. 18) JP 2002-203384 A

  However, in the conventional head gimbal assembly, since the thin film piezoelectric actuator is arranged under the head slider, the head slider applies an impact force to the piezoelectric actuator when an unexpected vibration or the like occurs for some reason. Become. As a result, the piezoelectric actuator may be damaged and adversely affect subsequent operations.

  An object of the present invention is to provide a head gimbal assembly and a hard disk device capable of preventing damage to a piezoelectric actuator.

The head gimbal assembly of the present invention includes a head slider having a thin film magnetic head that performs at least one of recording and reproduction with respect to a recording medium, and a support beam section on which the head slider is mounted and whose proximal end is connected to an actuator arm And a suspension having a flexible flexure that is superimposed on the support beam portion, and a piezoelectric actuator that is mounted on the suspension mounting surface and that displaces the head slider relative to the suspension. And the piezoelectric actuator are in contact with the flexure and are spaced apart in a direction parallel to the mounting surface of the suspension . The flexure is provided with wiring electrically connected to the thin film magnetic head and has flexibility. And at least part of this wiring board The piezoelectric actuator is disposed on the side of the flexure where the wiring board is provided, and the piezoelectric actuator is sandwiched between the wiring board and the surface on which the supporting board is located. And a plate overlapping the head slider .

  In this head gimbal assembly, the piezoelectric actuator is provided at a position that does not overlap the head slider, so that it is possible to prevent a situation in which the piezoelectric actuator is damaged by an impact from the head slider.

Further, the suspension has a support beam portion whose base end side is connected to the actuator arm, and a flexure having flexibility while being superimposed on the support beam portion, and the head slider and the piezoelectric actuator are provided on the flexure. It is configured to touch .

  When such a configuration is employed, the displacement of the piezoelectric actuator can be accurately transmitted to the head slider through a flexible flexure.

In the head gimbal assembly of the present invention, the flexure is provided with wiring electrically connected to the thin film magnetic head and has flexibility, and a support for supporting at least a part of the wiring board. The piezoelectric actuator is disposed on the side of the flexure on which the wiring board is provided, and the piezoelectric actuator and the head slider are sandwiched between the wiring board and the surface of the wiring board on which the support plate is located. There is a plate that overlaps .

  When such a configuration is employed, the displacement of the piezoelectric actuator can be accurately transmitted to the head slider through the plate.

  Furthermore, the plate is preferably formed of the same material as the support plate.

  In manufacturing the flexure, it is possible to employ a technique of patterning the support plate by etching in a state in which the material constituting the support plate is superimposed on the wiring board. At this time, when the plate is formed of the same material as that of the support plate, the plate can be formed simultaneously with the support plate, so that the manufacturing process can be simplified.

A head gimbal assembly according to the present invention is mounted on a head slider having a thin film magnetic head that performs at least one of recording and reproduction on a recording medium, a suspension on which the head slider is mounted, and a mounting surface of the suspension. A piezoelectric actuator that displaces the slider relative to the suspension, and a transmission plate that transmits the displacement of the piezoelectric actuator to the head slider, with one surface facing the piezoelectric actuator and the other surface facing the head slider. The head slider and the piezoelectric actuator are separated from each other in a direction parallel to the mounting surface of the suspension.

  In this case, even if the piezoelectric actuator and the head slider are separated in the above direction, the displacement of the piezoelectric actuator can be efficiently transmitted to the head slider through the transmission plate.

Hard disk drive of the present invention, a recording medium, and a head slider having a thin-film magnetic head for performing at least one of recording or reproducing the recording medium, and a head slider is mounted, the proximal end side is connected to an actuator arm A head gimbal assembly having a support beam portion and a suspension having a flexure having flexibility while being superimposed on the support beam portion, and mounted on a mounting surface of the suspension, the head slider is relative to the suspension. The head slider and the piezoelectric actuator are in contact with the flexure and are spaced apart in a direction parallel to the suspension mounting surface, and the flexure is wired to be electrically connected to the thin film magnetic head. And flexible The wiring board has a support plate that supports at least a part of the wiring board, and the piezoelectric actuator is arranged on the side of the flexure on which the wiring board is provided, and the support board on the wiring board is located The side surface is provided with a plate that overlaps the piezoelectric actuator and the head slider with the wiring board interposed therebetween .

A hard disk device of the present invention includes a recording medium, a head slider having a thin film magnetic head that performs at least one of recording and reproduction on the recording medium, a head gimbal assembly having a suspension on which the head slider is mounted, and a suspension. The piezoelectric actuator is mounted on the mounting surface and displaces the head slider relative to the suspension, and one surface side faces the piezoelectric actuator and the other surface side faces the head slider. A transmission plate for transmitting to the head slider, and the head slider and the piezoelectric actuator are separated from each other in a direction parallel to the mounting surface of the suspension. In this hard disk device, since the piezoelectric actuator is provided at a position that does not overlap the head slider, it is possible to prevent a situation where the piezoelectric actuator is damaged by an impact from the head slider.

  According to the head gimbal assembly and the hard disk device of the present invention, it is possible to prevent the piezoelectric actuator from being damaged.

  Hereinafter, preferred embodiments of a head gimbal assembly and a hard disk device according to the present invention will be described in detail with reference to the accompanying drawings. In addition, the same code | symbol shall be used for the same element and the overlapping description is abbreviate | omitted.

[First Embodiment]
FIG. 1 is a schematic configuration diagram showing the hard disk device of the present embodiment. The hard disk device 1 includes a hard disk 10 as a recording medium and a head stack assembly (HSA) 20 that records and reproduces magnetic information on the hard disk 10 in a housing 5. The hard disk 10 is rotated by a motor (not shown). Further, the hard disk device 1 incorporates a control unit 15 that performs various controls such as recording and reproduction of information on the hard disk 10 and a ramp mechanism 16 for retracting the thin film magnetic head from the hard disk 10. Yes.

  The head stack assembly 20 includes an actuator arm 22 rotatably supported around a support shaft 21 by a voice coil motor (VCM), and a head gimbal assembly (hereinafter referred to as “HGA”) 30 connected to the actuator arm 22. Are assembled in the depth direction of the figure. A head slider 32 is attached to the HGA 30 so as to face the hard disk 10.

  Next, the configuration of each element of the HGA 30 will be described with reference to FIGS. 2 is an exploded perspective view of the HGA 30 as viewed from the side facing the hard disk 10, FIG. 3 is an enlarged view of the vicinity of the head slider 32 in FIG. 2, and FIG. 4 is a perspective view of the HGA 30 assembled. It is.

  The HGA 30 is obtained by mounting a head slider 32 having a thin film magnetic head 31 on a suspension 40. Although not shown, the thin-film magnetic head 31 has a structure in which an inductive electromagnetic transducer for recording and a magnetoresistive element for reproduction are stacked. The head slider 32 is provided with recording pads 33 and 34 used for the recording operation of the electromagnetic transducer and reproducing pads 35 and 36 used for the reproducing operation of the magnetoresistive effect element.

  The suspension 40 includes a support beam portion 50 having a proximal end connected to the actuator arm 22 and a flexure 60 that is superimposed on the support beam portion 50 and has flexibility.

  The HGA 30 adopts a format in which the thin film magnetic head 31 is changed in two stages, and a thin film piezoelectric actuator 70 is provided to realize this format. The thin film piezoelectric actuator 70 displaces the head slider 32 relative to the support beam portion 50. The thin film piezoelectric actuator 70 is mounted on the mounting surface S of the suspension 40 (see FIG. 3). A relatively large movement of the head slider 32 is controlled by driving the suspension 40 and the actuator arm 22 by a voice coil motor, and a minute movement is controlled by a piezoelectric actuator 70.

  As shown in FIG. 2, the support beam unit 50 includes a base plate 51, a connecting plate 52 attached thereto, and a load beam 53. The connecting plate 52 is thinner and more flexible than the base plate, and is formed with a rectangular protruding portion 52a protruding sideways and a pair of connecting pieces 52b and 52b extending apart from each other. A load beam 53 is swingably connected to each of the connecting pieces 52b and 52b. A tab 53 a is formed at the tip of the load beam 53 so as to ride on the slope when the head slider 32 is retracted to the ramp mechanism 16. Note that the side of the base plate 51 opposite to the side where the load beam 53 is provided is the side connected to the actuator arm 22. Further, the connecting plate 52 and the load beam 53 may be integrally formed.

  The flexure 60 has a flexible wiring board 61 formed of polyimide or the like. Further, as shown in FIG. 5, a thin plate-like support plate 69 that supports at least a part of the wiring substrate 61 is provided on the bottom surface of the wiring substrate 61, that is, the surface facing the support beam portion 50. FIG. 5 is a plan view of the flexure 60 as viewed from the side attached to the support beam portion 50. The support plate 69 can be formed of a metal such as stainless steel. The thin film piezoelectric actuator 70 is disposed on the side of the flexure 60 where the wiring board 61 is provided. The flexure 60 is bonded to the support beam portion 50 by laser spot welding.

  As shown in FIG. 2, a pad mounting area 61 b is formed on the rear end side of the wiring board 61 in the flexure 60, and the pad mounting area 61 b is laid on the protruding portion 52 a of the connecting plate 52. Become. In the pad mounting area 61b, recording electrodes 62b and 63b, thin film piezoelectric actuator electrodes 64b to 66b, and reproducing electrodes 67b and 68b are mounted. On the other hand, as shown in FIGS. 2 and 3, four electrodes 62 a, 63 a, 67 a, 68 a are arranged on the tip side of the flexure 60. Further, three electrodes 64a to 66a are arranged behind the area where the slider of the flexure 60 is mounted. The electrodes 62a to 68a and the electrodes 62b to 68b are electrically connected by wirings 62c to 68c, respectively. Each of the wirings 62c to 68c is actually covered with an insulating film.

  The electrodes 62a and 63a are connected to the recording pads 33 and 34 of the head slider 32, respectively, and the electrodes 67a and 68a are connected to the reproducing pads 35 and 36, respectively. For connection between these electrodes, gold ball bonding is used as shown in FIG.

  Here, the details of the thin film piezoelectric actuator 70 will be described with reference to FIG. The thin film piezoelectric actuator 70 has a first region 70a and a second region 70b that are configured so that the expansion and contraction directions are different from each other (region indicated by a one-dot chain line). Each region 70a, 70b is composed of a thin film piezoelectric element such as PZT, and its periphery is coated with a resin. The thin film piezoelectric element has various advantages over the thick film element in that it is lightweight, has a good frequency characteristic against vibration, has a wide installation location, and can be controlled with a low voltage.

  The first region 70a and the second region 70b are integrated with resin in the vicinity of the base, but the tapered tip ends are separated from each other. Further, the outer sides of the first region 70a and the second region 70b are parallel to each other, and the opposing inner sides spread outward toward the tip. Further, an electrode 71a to which a positive voltage is applied, 71b to which a negative voltage is applied, and an electrode 71c to be a ground potential are provided on the bottom surface side of the thin film piezoelectric actuator 70 in the drawing. These electrodes 71a, 71b, 71c are electrically connected to the electrodes 65a, 64a, 66a on the flexure 60 directly or indirectly through a conductive member. Although the electrodes 71a, 71b, 71c of the thin film piezoelectric actuator 70 are configured to face the flexure 60 side, they may be provided on the side opposite to the flexure 60 (upper surface side in FIG. 3). In the case of such a configuration, the electrodes 71a to 71c and the electrodes 64a to 66a on the flexure 60 may be connected by wire bonding or the like.

  Further, the base region in the vicinity of the electrodes 71 a to 71 c of the thin film piezoelectric actuator 70 is bonded to the wiring board 61 of the flexure 60. On the other hand, the region on the tip side of the root region is located in the opening region of the flexure 60 and thus faces the load beam 53.

  Next, the transmission plate 80 will be described. The transmission plate 80 transmits the displacement of the thin film piezoelectric actuator 70 to the head slider 32, and one surface (the lower surface in FIG. 3) faces the thin film piezoelectric actuator 70 and the other surface faces the head slider 32. ing. The transmission plate 80 is made of a metal such as stainless steel, for example, and is connected to the rear portion 83 via a strip-shaped rear portion 83 extending in the width direction and a narrow and long connecting portion 84 as shown in FIG. And a front portion 85. On both sides of the front portion 85, flexible arm portions 86 and 87 that are elongated and extend in parallel toward the rear portion 83 are formed.

  Here, the positional relationship among the head slider 32, the thin film piezoelectric actuator 70, and the transmission plate 80 will be described with reference to FIG. This figure is a view from the so-called air bearing surface where the head slider 32 faces the hard disk 10. The head slider 32 is placed on the front portion 85 of the transmission plate 80. The thin film piezoelectric actuator 70 is located under the transmission plate 80, the root portion where the electrodes 71a to 71b are located overlaps the rear portion 83 of the transmission plate 80, and the tip portions of the first region 70a and the second region 70b are respectively provided. The arms 86 and 87 are bonded so as to overlap.

  The head slider 32 and the thin film piezoelectric actuator 70 are separated from each other in a direction parallel to the mounting surface S (see FIG. 3) of the suspension 40. In other words, the thin film piezoelectric actuator 70 is not positioned below the head slider 32, and the positional relationship is set such that the projection of the thin film piezoelectric actuator 70 on the suspension 40 and the projection of the head slider 32 on the suspension 40 do not overlap. Has been.

  The above is the configuration of each element of the HGA 30. Next, an example of the assembly process of such an HGA will be described.

  First, the flexure 60 is bonded to the load beam 53 by laser spot welding. On the other hand, the thin film piezoelectric actuator 70 and the transmission plate 80 are joined. At this time, the transmission plate 80 and the thin film piezoelectric actuator 70 are point-bonded with an adhesive or the like at three points X, Y, and Z in FIG. Next, the suspension 40 is obtained by bonding the vicinity of the base of the thin film piezoelectric actuator 70 joined to the transmission plate 80 to the flexure 60. At this time, the electrodes 71a, 71b, 71c on the bottom surface of the thin film piezoelectric actuator 70 and the electrodes 65a, 64a, 66a are electrically connected to establish a power distribution line to the thin film piezoelectric actuator 70. When the head slider 32 is bonded to the transmission plate 80, it is preferable that the centers of gravity of the two overlap. Next, the head slider 32 is bonded to the front portion 85 of the transmission plate 80, whereby the HGA 30 of this embodiment is obtained.

  Further, the actuator arm 22 is connected to the HGA 30 obtained in this way to form the head stack assembly 20 and assembled so as to be movable on the hard disk 10, thereby producing the hard disk device 1 of the present embodiment. Can do.

  Further, the assembly procedure of the HGA 30 is not limited to the above-described one, and the following modifications can be implemented. For example, the head slider 32, the transmission plate 80, and the thin film piezoelectric actuator 70 may be integrally assembled and then placed on the flexure 60. Alternatively, the transmission plate 80 may be attached to the thin film piezoelectric actuator 70 after the thin film piezoelectric actuator 70 is bonded to the flexure 60.

  When a positive voltage is applied to the electrode 64b in the pad mounting region 61b (see FIG. 2) of the flexure 60, a negative voltage is applied to the electrode 65b, and the electrode 66b is set to the ground potential, for example, the thin film piezoelectric actuator 70 The first region 70a shrinks in the direction of arrow A in FIG. 3, and the second region 70b extends in the direction of arrow B. Thereby, the head slider 32 fixed to the thin film piezoelectric actuator 70 can be minutely changed on the hard disk.

  In the HGA 30 and the hard disk device 1 of the present embodiment, the following effects are obtained. That is, as described above, the thin film piezoelectric actuator 70 and the head slider 32 are provided in positions that are separated from each other in the direction parallel to the mounting surface S and do not overlap each other. For this reason, the impact which the thin film piezoelectric actuator 70 receives from the head slider 32 can be remarkably reduced, and the situation where the thin film piezoelectric actuator 70 is damaged can be prevented. Even if the thin film piezoelectric actuator 70 and the head slider 32 are separated from each other, the displacement of the thin film piezoelectric actuator 70 can be efficiently transmitted to the head slider 32 through the transmission plate 80.

[Second Embodiment]
Next, a second embodiment of the HGA and hard disk device according to the present invention will be described with reference to FIGS. FIG. 7 is a plan view of the HGA 30 built in the hard disk device 1 as viewed from the air bearing surface side. FIG. 8 is a diagram showing only the suspension portion of the HGA 30 shown in FIG.

  In the present embodiment, the head slider 32 and the thin film piezoelectric actuator 70 are attached by an adhesive or the like so as to be in direct contact with the wiring board 61 of the flexure 60. The thin film piezoelectric actuator 70 and the head slider 32 are separated in a direction parallel to the mounting surface S of the suspension.

  Further, a plate 90 is provided on the surface of the wiring board 61 on which the support plate 69 is located. The plate 90 has the same shape as the transmission plate 80 used in the first embodiment as shown by the hatched lines in FIG. 8, and is formed of the same material as the support plate 69. Further, as shown in FIG. 7, the plate 90 has regions 90 a and 90 b corresponding to the arm portions 86 and 87 (see FIG. 3) of the thin film piezoelectric actuator 70 with the wiring board 61 interposed therebetween. It overlaps the first region 70a and the second region 70b. On the other hand, a region 93 a corresponding to the rear portion 83 of the transmission plate 80 in the plate 90 overlaps with the vicinity of the base of the thin film piezoelectric actuator 70 with the wiring board 61 interposed therebetween.

Further, the region where the plate 90 exists in the flexure 60 has a two-layer structure of a layer such as SUS constituting the plate 90 and a flexible layer such as polyimide on the wiring board 61. On the other hand, the area around the plate 90 has a single layer structure in which only the wiring substrate 61 formed of polyimide or the like exists. Furthermore, between the region 90a and the region 93a of the plate 90 and, between the region 90b and the region 93a, the gap _{S 1} and the gap _{S 2} is formed as shown in FIG.

In such a configuration, as in the first embodiment, the head slider 32 is provided at a position that does not overlap with the thin film piezoelectric actuator 70, so that it is prevented from being damaged by an impact from the head slider 32. Can do. Further, the displacement of the thin film piezoelectric actuator 70 can be accurately transmitted to the head slider 32 through the plate 90. Moreover, the transmission efficiency is remarkably improved by providing the gaps S ₁ and S ₂ .

  In manufacturing the flexure 60, a method of patterning the support plate 69 by etching or the like in a state where the material constituting the support plate 69 is superimposed on the wiring board 61 can be employed. When the plate 90 is formed of the same material as the support plate 69 as described above, the plate 90 can be formed at the same time as the support plate 69, so that the manufacturing process can be simplified. If such an advantage is not required, the plate 90 may be made of a material different from that of the support plate 69.

[Third Embodiment]
Next, a third embodiment of the HGA and the hard disk device according to the present invention will be described with reference to FIGS. FIG. 9 is a plan view of the HGA 30 built in the hard disk device 1 as viewed from the air bearing surface side. FIG. 10 is a diagram showing only the suspension portion of the HGA 30 shown in FIG.

  In the HGA 30 and the hard disk device 1 of the present embodiment, the head slider 32 and the thin film piezoelectric actuator 70 are directly attached to the wiring board 61 of the flexure 60 with an adhesive or the like, as in the second embodiment. The thin film piezoelectric actuator 70 and the head slider 32 are separated in a direction parallel to the mounting surface S of the suspension.

  Further, a pair of plates 91 and 92 are provided on the surface of the wiring board 61 on the side where the support plate 69 is located (area shown by hatching in FIG. 10). The plates 91 and 92 are made of the same material as the support plate 69, and as shown in FIG. 9, one ends 91 a and 92 a are sandwiched between the first substrate 70 a and the second region 70 b of the thin film piezoelectric actuator 70. And the other ends 91b and 92b overlap the head slider 32.

The plate 91 is supported by long bridge portions 60a and 60b formed of polyimide or the like, and the plate 92 is supported by bridge portions 60c and 60d which are also formed of polyimide or the like. As shown in FIG. 10, gaps S _{3 to} S ₅ are formed around the bridge portions 60 a to 60 d.

When such a configuration is adopted, the head slider 32 is provided at a position that does not overlap with the thin film piezoelectric actuator 70 as in the first embodiment, and therefore, it is prevented from being damaged by an impact from the head slider 32. be able to. Further, the displacement of the thin film piezoelectric actuator 70 can be accurately transmitted to the head slider 32 through the plates 91 and 92. Moreover, by providing the gap S ₃ to S ₅ in the above, the transmission efficiency is significantly improved.

  As mentioned above, although the invention made by the present inventors has been specifically described based on the embodiments, the present invention is not limited to the above embodiments. For example, instead of a thin film magnetic head that performs both recording and reproduction on a recording medium, a thin film magnetic head that performs only one of recording and reproduction may be used.

1 is a diagram illustrating a hard disk device according to a first embodiment. It is a disassembled perspective view of the head gimbal assembly (HGA) of 1st Embodiment. FIG. 3 is an enlarged view of the vicinity of a head slider in FIG. 2. It is a perspective view of the state which assembled HGA. It is a top view of the flexure seen from the side attached to a support beam. It is the figure which looked at HGA from the air bearing surface side. It is the top view which looked at HGA of a 2nd embodiment from the air bearing surface side. It is a figure which shows the suspension in HGA shown in FIG. It is the top view which looked at HGA of a 3rd embodiment from the support beam part side. It is a figure which shows the suspension in HGA shown in FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Hard disk apparatus, 5 ... Housing | casing, 10 ... Hard disk (recording medium), 15 ... Control part, 20 ... Head stack assembly, 22 ... Actuator arm, 30 ... Head gimbal assembly, 31 ... Thin film magnetic head, 32 ... Head slider , 40 ... Suspension, 50 ... Support beam section, 51 ... Base plate, 52 ... Connection plate, 53 ... Load beam, 60 ... Flexure, 61 ... Wiring board, 69 ... Support plate, 70 ... Thin film piezoelectric actuator, 71a, 71b, 71c ... Electrode, 80 ... Transmission plate, 90, 91, 92 ... Plate, S ... Mounting surface.

Claims (5)

A head slider having a thin film magnetic head that performs at least one of recording and reproduction on a recording medium;
The head slider is mounted, a support beam portion whose proximal end is connected to the actuator arm, and a suspension having a flexure that is overlapped with the support beam portion and has flexibility ,
A piezoelectric actuator mounted on the suspension mounting surface and displacing the head slider relative to the suspension;
The head slider and the piezoelectric actuator are in contact with the flexure and spaced apart in a direction parallel to the mounting surface of the suspension ,
The flexure includes a wiring board that is electrically connected to the thin film magnetic head and has flexibility, and a support plate that supports at least a part of the wiring board.
The piezoelectric actuator is disposed on the side of the flexure on which the wiring board is provided,
A head gimbal assembly , wherein a plate that overlaps the piezoelectric actuator and the head slider is provided on a surface of the wiring board on the side where the support plate is located .   The head gimbal assembly according to claim 1, wherein the plate is formed of the same material as the support plate.   A head slider having a thin film magnetic head that performs at least one of recording and reproduction on a recording medium;
  A suspension on which the head slider is mounted;
  A piezoelectric actuator mounted on a mounting surface of the suspension and displacing the head slider relative to the suspension;
  One surface side is opposed to the piezoelectric actuator, the other surface side is opposed to the head slider, and includes a transmission plate that transmits the displacement of the piezoelectric actuator to the head slider.
  The head gimbal assembly, wherein the head slider and the piezoelectric actuator are separated from each other in a direction parallel to the mounting surface of the suspension.   A recording medium;
  A head slider having a thin film magnetic head that performs at least one of recording and reproduction with respect to a recording medium, a support beam portion on which the head slider is mounted, the base end side being connected to an actuator arm, and the support beam portion And a head gimbal assembly having a suspension having a flexure having flexibility.
  A piezoelectric actuator mounted on the suspension mounting surface and displacing the head slider relative to the suspension;
  The head slider and the piezoelectric actuator are in contact with the flexure and spaced apart in a direction parallel to the mounting surface of the suspension,
  The flexure includes a wiring board that is electrically connected to the thin film magnetic head and has flexibility, and a support plate that supports at least a part of the wiring board.
  The piezoelectric actuator is disposed on the side of the flexure on which the wiring board is provided,
  2. A hard disk device according to claim 1, wherein a plate that overlaps the piezoelectric actuator and the head slider is provided on a surface of the wiring board on which the support plate is located. A recording medium;
A head slider having a thin film magnetic head that performs at least one of recording and reproduction with respect to a recording medium, and a head gimbal assembly having a suspension on which the head slider is mounted;
A piezoelectric actuator mounted on a mounting surface of the suspension and displacing the head slider relative to the suspension;
One surface side is opposed to the piezoelectric actuator, the other surface side is opposed to the head slider, and includes a transmission plate that transmits the displacement of the piezoelectric actuator to the head slider .
The hard disk drive according to claim 1, wherein the head slider and the piezoelectric actuator are separated from each other in a direction parallel to the mounting surface of the suspension.

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