JP4167191B2 - Suspension, head gimbal assembly, and hard disk drive - Google Patents

Description

  The present invention relates to a suspension on which a head slider having a thin film magnetic head is mounted, and a head gimbal assembly and a hard disk device including the suspension, and more particularly to an apparatus for displacing the head slider by a piezoelectric actuator.

  A thin film magnetic head for recording and reproducing magnetic information on a recording medium such as a hard disk is formed on a so-called head slider. A head gimbal assembly (HGA) is configured by mounting this head slider on the tip end region of the suspension. Generally, this suspension is obtained by superposing a flexible flexure on a load beam formed of SUS or the like, and a wiring for recording / reproducing of a thin film magnetic head is applied to the flexure. Further, the base end side of such a suspension is connected to an actuator arm driven by a voice coil motor (VCM). And what is called a head stack assembly (HSA) is comprised by attaching a VCM coil etc. to what connected the suspension and the actuator arm.

  By the way, with the recent increase in recording density of hard disks, in particular, the narrowing of the track width, a technique for driving a head slider with a minute amount with high accuracy is required. Therefore, conventionally, as shown in Patent Document 1 below, a head gimbal assembly has been proposed in which a piezoelectric actuator using a piezoelectric element is arranged at a connecting portion between the suspension and the actuator arm. This is a so-called two-stage fluctuation type assembly. As a first stage, a relatively large movement of the thin film magnetic head is controlled by driving an actuator arm by a voice coil motor. Is to be controlled by driving a suspension by a piezoelectric actuator.

  However, in such a two-stage variable head gimbal assembly, it is necessary to drive the entire long suspension by a piezoelectric actuator, so that there is a limit to the high accuracy of tracking.

For this reason, as disclosed in, for example, Patent Document 2 below, an apparatus in which a thin film piezoelectric actuator is provided between a head slider and a suspension has been proposed. According to this apparatus, the piezoelectric actuator does not need to drive the long suspension itself, and can directly drive the head slider, so that more accurate tracking can be realized.
JP 2002-134807 A (FIG. 18) JP 2002-203384 A

  However, the conventional head gimbal assembly has the following problems. That is, when the piezoelectric actuator is mounted on the suspension, it is fixed with an adhesive. However, since the actuator is a thin film, it is difficult to mechanically hold the actuator, such as holding by a mechanical arm. For this reason, the mounting position of the piezoelectric actuator deviates from a desired location, which causes a decrease in yield.

  An object of the present invention is to provide a suspension, a head gimbal assembly, and a hard disk device that can prevent displacement of a piezoelectric actuator.

  (1) A suspension according to the present invention is a suspension on which a head slider having a thin film magnetic head that performs at least one of recording and reproduction with respect to a recording medium is mounted, and a support beam portion whose proximal end is connected to an actuator arm And a flexure having a wiring that is superimposed on the support beam portion and electrically connected to the thin film magnetic head, and a piezoelectric actuator that displaces the head slider relative to the support beam portion. A protrusion is formed, and the piezoelectric actuator is characterized in that a hole portion into which the protrusion is inserted is formed. Moreover, the said piezoelectric actuator is good also as a thing in which the said protrusion is contact | abutted and formed in the edge part of this actuator instead of the said hole part or with a hole part.

  Further, the head gimbal assembly of the present invention is such that a head slider is mounted on the suspension as described above. Furthermore, the hard disk device of the present invention includes such a head gimbal assembly and a recording medium on which at least one of information recording and reproduction is performed by the assembly.

  In this suspension, the piezoelectric actuator can be positioned with respect to the flexure by inserting the protrusion of the flexure into the hole of the piezoelectric actuator or by contacting the flexure with the recess. For this reason, it is possible to prevent displacement of the piezoelectric actuator. Note that the positional displacement of the piezoelectric actuator here includes that which occurs both when the piezoelectric actuator is mounted on the flexure and after the mounting.

  Further, in the head gimbal assembly and the hard disk device provided with such a suspension, since the displacement of the piezoelectric actuator is prevented, the yield is remarkably improved.

  (2) Another suspension according to the present invention is a suspension on which a head slider having a thin film magnetic head that performs at least one of recording and reproduction with respect to a recording medium is mounted, and a base end side is connected to an actuator arm. A support beam unit, a flexure having wiring connected to the thin film magnetic head while being superimposed on the support beam unit, and a piezoelectric actuator for displacing the head slider relative to the support beam unit. Is formed with a protrusion, and the piezoelectric actuator is formed with a hole into which the protrusion is inserted, or a recess that is positioned at an edge of the actuator and is in contact with the protrusion. To do.

  Further, another head gimbal assembly according to the present invention is such that a head slider is mounted on such a suspension. Furthermore, another hard disk device according to the present invention includes such a head gimbal assembly and a recording medium.

  In this suspension, the piezoelectric actuator can be positioned with respect to the support beam by inserting the protrusion of the support beam into the hole of the piezoelectric actuator or by bringing it into contact with the recess. For this reason, it is possible to prevent displacement of the piezoelectric actuator. Note that the positional displacement of the piezoelectric actuator here includes that which occurs both when the piezoelectric actuator is mounted on the support beam and after the mounting.

  Further, in the head gimbal assembly and the hard disk device provided with such a suspension, since the displacement of the piezoelectric actuator is prevented, the yield is remarkably improved.

  (3) Another suspension according to the present invention is a suspension on which a head slider having a thin film magnetic head that performs at least one of recording and reproduction with respect to a recording medium is mounted, and a base end side is connected to an actuator arm. A support beam portion, a flexure having wiring connected to the thin film magnetic head while being superimposed on the support beam portion, a piezoelectric actuator that displaces the head slider relative to the support beam portion, and a head slider are mounted. And a transmission plate that transmits the displacement of the piezoelectric actuator to the head slider. The transmission plate has a protrusion, and the piezoelectric actuator has a hole portion into which the protrusion is inserted, or the actuator. It is characterized in that a depression is formed at the edge portion and the protrusion is in contact with it.

  In the present invention, the displacement of the piezoelectric actuator is configured to be transmitted to the head slider through the transmission plate. Then, the relative position between the transmission plate and the piezoelectric actuator can be determined by inserting the protrusion of the transmission plate into the hole of the piezoelectric actuator or by bringing it into contact with the recess. For this reason, it is possible to prevent displacement of the piezoelectric actuator. Note that the positional displacement of the piezoelectric actuator here means that which occurs both when the piezoelectric actuator is mounted on the transmission plate and after the mounting.

  Further, in the head gimbal assembly and the hard disk device provided with such a suspension, since the displacement of the piezoelectric actuator is prevented, the yield is remarkably improved.

  According to the suspension, the head gimbal assembly, and the hard disk device according to the present invention, the displacement of the piezoelectric actuator can be prevented.

  Hereinafter, preferred embodiments of a suspension, a head gimbal assembly, and a hard disk device according to the present invention will be described in detail with reference to the accompanying drawings. In addition, the same code | symbol shall be used for the same element and the overlapping description is abbreviate | omitted.

[First Embodiment]
FIG. 1 is a schematic configuration diagram showing the hard disk device of the present embodiment. The hard disk device 1 includes a hard disk 10 as a recording medium and a head stack assembly (HSA) 20 that records and reproduces magnetic information on the hard disk 10 in a housing 5. The hard disk 10 is rotated by a motor (not shown). Further, the hard disk device 1 incorporates a control unit 15 that performs various controls such as recording and reproduction of information on the hard disk 10 and a ramp mechanism 16 for retracting the thin film magnetic head from the hard disk 10. Yes.

  The head stack assembly 20 includes an actuator arm 22 rotatably supported around a support shaft 21 by a voice coil motor (VCM), and a head gimbal assembly (hereinafter referred to as “HGA”) 30 connected to the actuator arm 22. Are assembled in the depth direction of the figure. A head slider 32 is attached to the HGA 30 so as to face the hard disk 10.

  Next, the configuration of each element of the HGA 30 will be described with reference to FIGS. FIG. 2 is a perspective view of the HGA 30 as viewed from the side facing the hard disk 10, and FIG. 3 is an exploded perspective view of the assembly 30. The HGA 30 is obtained by mounting a head slider 32 having a thin film magnetic head 31 on a suspension 40. Although not shown, the thin-film magnetic head 31 has a structure in which an inductive electromagnetic transducer for recording and a magnetoresistive element for reproduction are stacked. The head slider 32 is provided with recording pads 33 and 34 used for the recording operation of the electromagnetic transducer and reproducing pads 35 and 36 used for the reproducing operation of the magnetoresistive effect element.

  The suspension 40 includes a support beam portion 50 whose proximal end is connected to the actuator arm 22, a flexible flexure 60 superimposed on the support beam portion 50, and a thin film piezoelectric actuator 70.

  The HGA 30 adopts a format in which the thin film magnetic head 31 is changed in two stages, and the above-described thin film piezoelectric actuator 70 is provided in order to realize this format. The thin film piezoelectric actuator 70 displaces the head slider 32 relative to the support beam portion 50. The relatively large movement of the thin film magnetic head is controlled by driving the suspension 40 and the actuator arm 22 as a whole by a voice coil motor, and the minute movement is controlled by driving the head slider 32 by the piezoelectric actuator 70.

  The support beam unit 50 includes a base plate 51, a connecting plate 52 attached thereto, and a load beam 53. As shown in FIG. 3, the connecting plate 52 is thinner and more flexible than the base plate, and has a rectangular protruding portion 52a protruding to the side and a pair of connecting pieces 52b and 52b extending apart from each other. And are formed. A load beam 53 is swingably connected to each of the connecting pieces 52b and 52b. A tab 53 a is formed at the tip of the load beam 53 so as to ride on the slope when the head slider 32 is retracted to the ramp mechanism 16. Note that the side of the base plate 51 opposite to the side where the load beam 53 is provided is the side connected to the actuator arm 22. Further, the connecting plate 52 and the load beam 53 may be integrally formed.

  The flexure 60 has a flexible wiring board 61 formed of polyimide or the like, and a thin plate (not shown) formed of stainless steel or the like is partially attached to the bottom surface. The flexure 60 is bonded to the support beam portion 50 by laser spot welding. The wiring board 61 has a slider mounting area 61a on the front end side and a pad mounting area 61b on the rear end side. The pad mounting area 61b is laid on the protrusion 52a of the connecting plate 52.

  In the pad mounting area 61b of the flexure 60, recording electrodes 62b and 63b, thin film piezoelectric actuator electrodes 64b to 66b, and reproducing electrodes 67b and 68b are mounted. On the other hand, as shown in the enlarged view of FIG. 4, in the slider mounting area 61a of the flexure 60, four electrodes 62a, 63a, 67a, 68a are arranged. In addition, three electrodes 64 a to 66 a are arranged behind the slider mounting area 61 a of the flexure 60. The electrodes 62a to 68a and the electrodes 62b to 68b are electrically connected by wirings 62c to 68c, respectively. Each of the wirings 62c to 68c is actually covered with an insulating film.

  The electrodes 62a and 63a are connected to the recording pads 33 and 34 of the head slider 32, respectively, and the electrodes 67a and 68a are connected to the reproducing pads 35 and 36, respectively. For connecting these electrodes, gold ball bonding is used as shown in FIG.

  Further, as shown in FIG. 4, projections 69a and 69b are formed on two parallel lines spaced apart from each other on the wiring board 61 of the flexure 60, respectively. The projections 69a and 69b are cylindrical in this embodiment, but are not limited to this, and can be in various forms such as prismatic, conical, prismatic, and hemispherical. Note that a thin plate made of stainless steel or the like is not provided on the back surface of the region where the protrusions 69a and 69b of the wiring board 61 are formed in order to ensure flexibility such as polyimide.

  Further, the wirings 62c to 68c on the wiring substrate 61 can be formed by a film forming technique such as a plating method. In this case, if the protrusions 69a and 69b are formed simultaneously with the formation of the wirings 62c to 68c, the manufacturing process can be shortened. The heights of the protrusions 69a and 69b are preferably set to be approximately the same as the thickness of the thin film piezoelectric actuator 70, for example, 10 μm to 20 μm.

  Here, the details of the thin film piezoelectric actuator 70 will be described with reference to FIG. The thin film piezoelectric actuator 70 has a first region 70a and a second region 70b configured to have different expansion / contraction directions. Each region 70a, 70b is composed of a thin film piezoelectric element such as PZT, and its periphery is coated with a resin. The thin film piezoelectric element has various advantages over the thick film element in that it is lightweight, has a good frequency characteristic against vibration, has a wide installation location, and can be controlled with a low voltage.

  The first region 70a and the second region 70b are integrated with resin in the vicinity of the base, but the tapered tip ends are separated from each other. Further, an electrode 71a to which a positive voltage is applied, 71b to which a negative voltage is applied, and an electrode 71c to be a ground potential are provided on the bottom surface side of the thin film piezoelectric actuator 70 in the drawing. These electrodes 71a, 71b, 71c are electrically connected to the electrodes 65a, 64a, 66a on the flexure 60 directly or indirectly through a conductive member.

  In addition, holes 72 a and 72 b having diameters into which the protrusions 69 a and 69 b on the flexure 60 can be inserted are formed at the tip portions of the first region 70 a and the second region 70 b of the thin film piezoelectric actuator 70.

  The above is the configuration of each element of the HGA 30. Next, an example of the assembly process of such an HGA will be described.

  First, the flexure 60 is bonded to the support beam portion 50 by laser spot welding. At this time, the region where the protrusions 69a and 69b are formed is not welded. Next, after applying an adhesive near the base of the thin film piezoelectric actuator 70 (near the electrodes 71a to 71c), the protrusions 69a and 69b on the flexure 60 are inserted into the holes 72a and 72b, thereby flexure. The thin film piezoelectric actuator 70 is positioned with respect to 60. Then, the vicinity of the base of the thin film piezoelectric actuator 70 is bonded to the flexure 60 so that the electrodes 71a, 71b, 71c and the electrodes 65a, 64a, 66a are electrically connected to obtain the suspension 40.

  Next, the head slider 32 is fixed to the tip regions of the first region 70a and the second region 70b of the thin film piezoelectric actuator 70 with an adhesive or the like. Thereby, the HGA 30 shown in FIG. 2 is obtained. The head slider 32 may be bonded to the flexure 60 after being mounted on the thin film piezoelectric actuator 70.

  When a positive voltage is applied to the electrode 64b in the pad mounting region 61b of the flexure 60, a negative voltage is applied to the electrode 65b, and the electrode 66b is set to the ground potential, for example, the first region 70a of the thin film piezoelectric actuator 70 is 4 is reduced in the direction of arrow A in FIG. 4, and the second region 70b extends in the direction of arrow B. Thereby, the head slider 32 fixed to the thin film piezoelectric actuator 70 can be minutely changed on the hard disk.

  In the present embodiment, the following effects are obtained. That is, since the protrusions 69a and 69b and the hole portions 72a and 72b are used as described above, it is possible to prevent the displacement from occurring when the thin film piezoelectric actuator 70 is mounted on the flexure 60. Thereby, the yield in manufacturing the suspension 40, the HGA 30, and the hard disk device 1 can be significantly improved. In addition, since the protrusions 69a and 69b are inserted into the holes 72a and 72b, it is possible to prevent the position of the thin film piezoelectric actuator 70 from shifting even if an unexpected impact is applied when the HGA 30 is used.

  Although the electrodes 71a, 71b, 71c of the thin film piezoelectric actuator 70 are directed to the flexure 60 side, they may be provided on the surface in FIG. In the case of such a configuration, the electrodes 71a, 71b, 71c and the electrodes 64a to 66a on the flexure 60 may be connected by wire bonding or the like.

[Second Embodiment]
Next, a second embodiment of the present invention will be described with reference to FIG. In the present embodiment, projections 81 a and 81 b used for positioning of the thin film piezoelectric actuator 70 are formed on the load beam 53 of the support beam portion 50. In addition, rectangular openings 82a and 82b are formed in the flexure 60 so that the protrusions 81a and 81b are exposed. In the thin film piezoelectric actuator 70, holes 72a and 72b are formed near the base thereof. The other structure of the thin film piezoelectric actuator 70 is the same as that of the first embodiment, and electrodes 71a, 71b, 71c electrically connected to the electrodes 64a to 66a on the flexure 60 are formed on the bottom surface thereof ( (Not shown).

  In order to assemble the suspension 40 of the present embodiment, first, the flexure 60 is bonded to the support beam portion 50 by laser spot welding. At this time, the projections 81 a and 81 b of the load beam 53 are positioned in the openings 82 a and 82 b of the flexure 60.

  Next, after applying an adhesive near the base of the thin film piezoelectric actuator 70, the protrusions 81 a and 81 b on the load beam 53 are inserted into the holes 72 a and 72 b, so that the thin film piezoelectric actuator 70 is attached to the load beam 53. Position. Thereby, the suspension 40 is obtained. At this time, the electrodes 71a, 71b, 71c (not shown) on the bottom surface of the thin film piezoelectric actuator 70 and the electrodes 65a, 64a, 66a are electrically connected to establish a power distribution line to the thin film piezoelectric actuator 70.

  Then, by mounting the head slider on the tip region of the thin film piezoelectric actuator 70, the HGA of this embodiment can be obtained. Furthermore, an actuator arm is connected to the HGA obtained in this way to form a head stack assembly, which is assembled so as to be movable on the hard disk, whereby the hard disk device of this embodiment can be manufactured.

  In this embodiment, since the projections 81 a and 81 b inserted into the holes 72 a and 72 b of the thin film piezoelectric actuator 70 are fixed to the load beam 53, the root region of the actuator 70 is relative to the load beam 53. It cannot be displaced. However, in the actuator 70, the piezoelectric element is displaced in the tip region rather than the root region where the holes 72a and 72b are formed. Therefore, in the HGA 30 of this embodiment in which the tip region of the thin film piezoelectric actuator 70 is not fixed, the actuator 70 can be sufficiently expanded and contracted, and thereby the head slider can be displaced by a desired amount. In order to secure a sufficient amount of displacement of the piezoelectric element, it is preferable to form the holes 72a and 72b on the root side of the region where there is a gap between the first region 70a and the second region 70b. .

  Further, in the present embodiment, since the protrusions 81a and 81b and the holes 72a and 72b are used, it is possible to prevent the positional deviation from occurring when the thin film piezoelectric actuator 70 is mounted on the load beam 53. Thereby, the yield in manufacturing the suspension 40, the HGA 30, and the hard disk device 1 can be significantly improved. Further, since the protrusions 81a and 81b are inserted into the holes 72a and 72b, it is possible to prevent the position of the thin film piezoelectric actuator 70 from shifting even if an unexpected impact is applied when the HGA 30 is used.

[Third Embodiment]
Next, a third embodiment of the present invention will be described with reference to FIGS. FIG. 6 is a perspective view of the vicinity of the head slider in the head gimbal assembly of the present embodiment, and FIG. 7 is an exploded perspective view of FIG. The suspension 40 of this embodiment has a transmission plate 80 that transmits the displacement of the thin film piezoelectric actuator 70 to the head slider 32.

  First, the configuration of each element of this embodiment will be described. As shown in FIG. 7, the thin film piezoelectric actuator 70 employed in the present embodiment is different from the first embodiment in the shapes of the first region 70a and the second region 70b. The outer sides of the first region 70a and the second region 70b are parallel to each other, and the opposing inner sides spread outward. And hole part 72a, 72b is formed in the front-end | tip vicinity of each area | region 70a, 70b. In addition, electrodes 71 a to 71 c are formed on the bottom surface of the thin film piezoelectric actuator 70 as in the first embodiment. These electrodes 71a, 71b, 71c are electrically connected to the electrodes 65a, 64a, 66a on the flexure 60.

  Further, the base region in the vicinity of the electrodes 71 a to 71 c of the thin film piezoelectric actuator 70 is bonded to the wiring board 61 of the flexure 60. On the other hand, the region on the tip side of the root region is located in the opening region of the flexure 60 and thus faces the load beam 53.

  The transmission plate 80 is formed of, for example, stainless steel and has a strip-shaped rear portion 83 extending in the width direction and a front portion 85 connected to the rear portion 83 via a narrow and long connecting portion 84. . On both sides of the front portion 85, flexible arm portions 86 and 87 that are elongated and extend in parallel toward the rear portion 83 are formed. Furthermore, substantially cylindrical protrusions 86a and 87a are provided on the bottom surfaces of the arm portions 86 and 87 on the free end side in the figure. The protrusions 86 a and 87 a are set to dimensions that can be inserted into the holes 72 a and 72 b of the thin film piezoelectric actuator 70.

  The above is the configuration of each element. Next, an example of an HGA assembly process will be described.

  First, the flexure 60 is bonded to the load beam 53 by laser spot welding. On the other hand, the thin film piezoelectric actuator 70 and the transmission plate 80 are joined. At this time, the transmission plate 80 is positioned with respect to the thin film piezoelectric actuator 70 by inserting the projections 86a and 87a into the holes 72a and 72b. Further, at point X in FIG. 7, the rear portion 83 of the transmission plate 80 and the thin film piezoelectric actuator 70 are point-bonded with an adhesive or the like. Next, the vicinity of the base of the thin film piezoelectric actuator 70 joined to the transmission plate 80 is bonded to the flexure 60. Thereby, the suspension 40 of this embodiment is obtained. Next, the HGA 30 is obtained by bonding the head slider 32 to the front portion 85 of the transmission plate 80. The hard disk device can be obtained in the same manner as in the second embodiment. When the head slider 32 is bonded to the transmission plate 80, it is preferable that the centers of gravity of the two overlap.

  According to the present embodiment, since the projections 86a and 87a and the holes 72a and 72b are used, it is possible to prevent the displacement from occurring when the transmission plate 80 is mounted on the thin film piezoelectric actuator 70. Thereby, the yield in manufacturing the suspension 40, the HGA 30, and the hard disk device 1 can be significantly improved. Further, since the projections 86a and 87a are inserted into the holes 72a and 72b, it is possible to prevent the relative position between the thin film piezoelectric actuator 70 and the transmission plate 80 from shifting even if an unexpected impact is applied when the HGA 30 is used. .

  Further, the assembly procedure of the HGA 30 is not limited to the above-described one, and the following modifications can be implemented. For example, the head slider 32, the transmission plate 80, and the thin film piezoelectric actuator 70 may be integrally assembled and then placed on the flexure 60. Alternatively, the transmission plate 80 may be attached to the thin film piezoelectric actuator 70 after the thin film piezoelectric actuator 70 is bonded to the flexure 60.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described with reference to FIG. This embodiment is different from the first embodiment (see FIG. 4) in the configuration of the thin film piezoelectric actuator 70, and this point will be mainly described.

  FIG. 8 shows a surface on the side facing the flexure 60 in the thin film piezoelectric actuator 70 of the present embodiment. The electrodes 71a to 71c have the same arrangement as the actuator shown in FIG. Further, the holes 72a and 72b formed in the first region 70a and the second region 70b in the first embodiment are not provided, and instead, the arc-shaped depressions 73a and 73b are formed on both sides of the actuator 70. It is formed at the edge. On the other hand, the protrusions 69a and 69b of the flexure 60 are formed at positions that contact the recesses 73a and 73b. In assembling the suspension, the projections 69 a and 69 a are brought into contact with the recesses 73 a and 73 b to position the thin film piezoelectric actuator 70 with respect to the flexure 60.

  When such a configuration is adopted, since the protrusions 69a and 69b and the depressions 73a and 73b are used, it is possible to prevent the displacement from occurring when the thin film piezoelectric actuator 70 is mounted on the flexure 60. Thereby, the yield in manufacturing the suspension 40, the HGA 30, and the hard disk device 1 can be significantly improved. In addition, the shape of the dents 73a and 73b should just be what can be utilized for positioning of the actuator 70, and is not limited to circular arc shape. Further, since the protrusions 69a and 69b are in contact with the depressions 73a and 73b, it is possible to prevent the position of the thin film piezoelectric actuator 70 from shifting even if an unexpected impact is applied when the HGA 30 is used.

  Further, here, the form in which the protrusions 69a and 69b of the flexure 60 are brought into contact with the recesses 73a and 73b has been described, but the protrusion 81a formed on the load beam 53 as in the second embodiment (see FIG. 5). , 81b may be configured to contact each other. Or you may comprise so that it may contact | abut to protrusion 86a, 87a formed in the transmission board 80 like 3rd Embodiment (refer FIG. 7).

  As mentioned above, although the invention made by the present inventors has been specifically described based on the embodiment, the present invention is not limited to the above embodiment. For example, the hole formed in the piezoelectric actuator may have a bottomed shape instead of a through hole. The piezoelectric actuator may be provided with both the hole and the edge, and the flexure, the support beam, or the projection of the transmission plate may be inserted or brought into contact with both of them. Furthermore, instead of the thin film magnetic head that performs both recording and reproduction on the recording medium, a thin film magnetic head that performs only one of recording and reproduction may be used.

1 is a diagram illustrating a hard disk device according to a first embodiment. It is a perspective view which shows the head gimbal assembly (HGA) of 1st Embodiment. FIG. 3 is an exploded perspective view of the HGA shown in FIG. 2. FIG. 4 is an enlarged view near the flexure tip of the HGA shown in FIG. 3. It is a perspective view which shows HGA of 2nd Embodiment. It is a perspective view which shows HGA of 3rd Embodiment. It is a disassembled perspective view of HGA shown in FIG. It is a bottom view of the thin film piezoelectric actuator mounted on the suspension of the fourth embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Hard disk apparatus, 5 ... Housing | casing, 10 ... Hard disk (recording medium), 15 ... Control part, 20 ... Head stack assembly, 22 ... Actuator arm, 30 ... Head gimbal assembly, 31 ... Thin film magnetic head, 32 ... Head slider , 40 ... Suspension, 50 ... Support beam section, 51 ... Base plate, 52 ... Connection plate, 53 ... Load beam, 60 ... Flexure, 69a, 69b, 81a, 81b, 86a, 87a ... Projection, 70 ... Thin film piezoelectric actuator, 71a , 71b, 71c ... electrodes, 72a, 72b ... holes, 73a, 73b ... depressions, 80 ... transmission plate.

Claims (3)

A suspension on which a head slider having a thin film magnetic head that performs at least one of recording and reproduction with respect to a recording medium is mounted,
A support beam portion whose proximal end is connected to the actuator arm;
A flexure having wiring connected to the thin film magnetic head while being superimposed on the support beam portion;
A piezoelectric actuator for displacing the head slider relative to the support beam portion;
The head slider is mounted, and a transmission plate that transmits the displacement of the piezoelectric actuator to the head slider,
A projection is formed on the transmission plate,
The suspension according to claim 1, wherein the piezoelectric actuator is formed with a hole into which the protrusion is inserted, or a recess which is located at an edge of the actuator and is in contact with the protrusion. A head slider having a thin film magnetic head that performs at least one of recording and reproduction on a recording medium, and a suspension on which the head slider is mounted,
The suspension is
A support beam part whose proximal end is connected to the actuator arm;
A flexure having wiring connected to the thin film magnetic head while being superimposed on the support beam portion;
A piezoelectric actuator for displacing the head slider relative to the support beam portion;
The head slider is mounted, and a transmission plate that transmits the displacement of the piezoelectric actuator to the head slider,
A projection is formed on the transmission plate,
A head gimbal assembly, wherein the piezoelectric actuator is formed with a hole into which the protrusion is inserted, or a recess that is positioned at an edge of the actuator and is in contact with the protrusion. A recording medium, a head slider having a thin film magnetic head that performs at least one of recording and reproduction with respect to the recording medium, and a suspension on which the head slider is mounted,
The suspension is
A support beam part whose proximal end is connected to the actuator arm;
A flexure having wiring connected to the thin film magnetic head while being superimposed on the support beam portion;
A piezoelectric actuator for displacing the head slider relative to the support beam portion;
The head slider is mounted, and a transmission plate that transmits the displacement of the piezoelectric actuator to the head slider,
A projection is formed on the transmission plate,
The hard disk device, wherein the piezoelectric actuator is formed with a hole into which the protrusion is inserted, or a recess that is positioned at an edge of the actuator and is in contact with the protrusion.

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