JP2008152908A - Head gimbal assembly for disk device, and manufacturing method therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve reliability of HGA by reducing the opportunities for damaging a PZT element. <P>SOLUTION: The head gimbal assembly is provided with a suspension in which a suspension flexure in which a tongue region having a tip side region and a rear end region is formed is provided at one end, and at least one micro-actuator mounted on a micro-actuator mounting region formed at the tongue region of the suspension flexure, a magnetic head slider having a flow-in side end part and a flow-out side end part is mounted as a whole on the tongue part through an insulation layer, the flow-in side end part of the magnetic head slider is mounted on the rear-end side region of the tang region, the flow-out side end part of the magnetic head slider is mounted on the tip-end side region of the tongue region. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a disk device capable of recording data, and more particularly to a head gimbal assembly (HGA) for performing highly accurate positioning control by a thin film PZT microactuator and / or a manufacturing method thereof.

  2. Description of the Related Art As an information recording apparatus, a disk apparatus having a magnetic disk for data storage and a movable recording / reproducing head that is positioned for selectively writing to or reading from the magnetic disk is known.

  The user expects not only a large storage capacity but also a faster and more accurate recording / reproducing operation for the disk device as described above. Therefore, disk device manufacturers have improved disk devices to increase capacity by increasing the density of data tracks, reducing track width, and / or reducing track spacing, for example. I keep doing it.

  However, in order to increase the track density and realize a recording / reproducing operation quickly and accurately using a disk with a high recording density, the disk device appropriately responds to the increase in the track density in the positioning control of the recording / reproducing head. Need to work. However, as the track density increases, it becomes more difficult to quickly and accurately control the recording / reproducing head positioning on the target data track on the storage medium. Therefore, disk device manufacturers are constantly searching for ways to improve the positioning control of the read / write head in order to take advantage of the ever-increasing track density.

  In order to improve the positioning control of the recording / reproducing head with respect to the above-described high recording density disk, one of effective means used by the disk device manufacturer is an auxiliary device such as a microactuator operating in cooperation with the main actuator. There is a method using a typical actuator. A disk apparatus incorporating such a microactuator is known as a two-stage actuator system.

  Various two-stage actuator systems have been improved over the prior art in order to increase the access speed and micropositioning accuracy of the read / write head for the target track on a high recording density medium. Such a two-stage actuator system generally includes a main voice coil motor (VCM) actuator and an auxiliary microactuator such as a PZT element microactuator.

  The VCM actuator is controlled by a servo control system that rotates an actuator arm that supports a recording / reproducing head on a target data track on a recording medium. The PZT microactuator is used in cooperation with the VCM actuator so as to increase the positioning speed or to finely adjust the recording / reproducing head on the target track. Accordingly, the VCM actuator roughly adjusts the position of the recording / reproducing head, and then the PZT microactuator finely adjusts the position of the recording / reproducing head relative to the recording medium. As described above, by connecting and cooperating the VCM actuator and the PZT microactuator, it is possible to effectively and accurately realize information recording / reproduction on a high-density recording medium.

  One form of the microactuator uses a PZT element that realizes fine positioning control of the recording / reproducing head. Such a PZT microactuator has an electrical configuration capable of exciting the PZT element in order to selectively expand and contract the PZT element on the microactuator. The PZT microactuator is configured such that expansion and contraction of the PZT element causes the microactuator to move, and further causes the recording / reproducing head to move. Such movement of the microactuator makes it possible to adjust the position of the recording / reproducing head at a higher speed and with higher accuracy than in a disk device using only the VCM actuator. Here, examples of the PZT microactuator are disclosed in the following Patent Documents 1, 2, 3, and 4.

  FIG. 1 a shows a conventional disk device, and shows a magnetic disk 101 mounted on a spindle motor 102 that rotates the disk 101. The voice coil motor arm 104 supports a head gimbal assembly (HGA) equipped with a microactuator 105 including a magnetic head slider in which the recording / reproducing head 103 is incorporated. The voice coil motor (VCM) is provided for controlling the operation of the voice coil motor arm 104. In other words, the voice coil motor (VCM) is provided for controlling the magnetic head slider to move between tracks on the surface of the disk 101. It has been. Thus, the recording / reproducing head 103 can record / reproduce data with respect to the disk 101.

  Here, due to the inherent tolerance (for example, dynamic operation) between the VCM and the head suspension assembly described above, when only the servo motor system is used, data can be accurately read from the disk or accurately read from the disk. Due to the influence of the performance of the recording / reproducing head for recording data, high-speed and high-precision position control of the magnetic head slider cannot be realized. For this reason, the PZT microactuator 105 is provided to improve the positioning control of the magnetic head slider and the recording / reproducing head 103 as described above. In particular, the PZT microactuator 105 operates to correct the positional deviation of the magnetic head slider 103 more minutely than the VCM in order to supplement the resonance resistance of the VCM and the head suspension assembly. For example, the PZT microactuator 105 can be used for a disk having a narrower data track interval, thereby increasing the value of track per inch (track / inch (TPI)) in the disk device. At the same time, the seek time and settling time of the head can be reduced. As described above, the PZT microactuator 105 can dramatically increase the surface recording density of the disk device and the information recording disk used therefor.

  Figures 1b, 1c and 1d show a typical PZT microactuator and support structure. In particular, FIG. 1b shows an exploded perspective view of the PZT microactuator and support structure, and FIG. 1c shows a plan view of the PZT microactuator and support arm disclosed in FIG. 1b. FIG. 1d also shows a side view of the PZT microactuator and support arm disclosed in FIG. 1b.

  Here, according to the technique disclosed in Patent Document 4, the magnetic head slider 103 having a recording / reproducing sensor is partially mounted on the slider support portion 121 of the suspension. A bump 127 (protrusion) is formed on the slider support 121 to support the center of the back surface of the magnetic head slider. A flexible cable 122 having multi-traces connects the slider support portion 121 and the metallic base flexure component 123. A suspension load beam 124 having dimples 125 supports the slider support portion 121 and the flexure component 123. The magnetic head slider 103 is partially mounted on the end of the flexure 107. The dimples 125 of the suspension load beam 124 support the bumps 127 of the slider support portion 121, and maintain the force from the load beam 124 applied to the center of the magnetic head slider when floating on the disk. The two thin film PZT pieces 10 attached to the tongue region 128 of the suspension are located at least partially on the bottom surface of the magnetic head slider. A substantially parallel gap 111 is formed between the back side of the magnetic head slider and the surface of the PZT element. When a voltage is applied to the thin film PZT piece 10, one of the two PZT pieces contracts as shown by an arrow D in FIG. 1c, and the other PZT expands as shown by an arrow E. As a result, as shown by an arrow C, rotational torque is generated with respect to the magnetic head slider. This is because the magnetic head slider 103 is partially mounted on the slider support portion 121 and the bump 127, and there is a parallel gap between the magnetic head slider and the thin film PZT element.

JP 2002-133803 A US Pat. No. 6,671,131 US Pat. No. 6,670,809 US Patent Application Publication No. 2003/0168935

  Normally, the magnetic head slider is supported by the dimple 125 and rotated. However, when other impacts such as longitudinal vibration or impact caused by dropping (tilt drop) occur, the magnetic head slider is rotated with the dimple as a fulcrum, and the air inflow side end (leading edge) of the magnetic head slider is moved. Collides with PZT element. Thereby, a PZT element receives damage, such as a crack and destruction, for example. Therefore, such a configuration causes, for example, a decrease in reliability with respect to the PZT element.

  FIG. 1e shows a side view of the tongue area of the HGA when subjected to an impact, illustrating the problem described above. As shown in this figure, the magnetic head slider rotates with dimples as fulcrums. Then, the end portion on the air inflow side is inclined and comes into contact with the PZT element 10 at a position indicated by reference numeral 130. For example, the contact caused by the occurrence of an impact can damage the thin film PZT element. At this time, for example, since the end portion of the magnetic head slider 103 is pointed, the portion indicated by reference numeral 130 on the surface of the PZT element from the thin film member is particularly cracked or damaged. For this reason, the PZT element is damaged.

  Accordingly, there is a need for a technique relating to a microactuator, a head gimbal assembly, a disk device, and a method for manufacturing the same, in which the above disadvantages are improved.

  A feature of the present invention is that the gap between the magnetic head slider and the suspension tongue is reduced or eliminated. In addition, a feature of the present invention is to reduce the size of the suspension tongue region and / or the PZT element.

  Further, the present invention is characterized in that an insulator mounted as a whole is arbitrarily provided between the PZT element and the magnetic head slider, and the PZT element mounting position is changed. Further, the present invention is characterized in that the weight balance between the magnetic head and the rear end portion of the tongue portion region of the suspension flexure is achieved. Note that the above features may be configured separately or combined to improve overall performance.

And the head gimbal assembly which is one form of this invention,
A suspension provided at one end with a suspension flexure formed with a tongue portion region having a front end side region and a rear end side region;
At least one microactuator mounted in a microactuator mounting region formed in the tongue portion region of the suspension flexure,
A magnetic head slider having an inflow side end portion and an outflow side end portion is entirely mounted on the tongue portion via an insulating layer, and the inflow side end portion of the magnetic head slider is a rear end side region of the tongue portion region. The outflow side end of the magnetic head slider is mounted in the tip end region of the tongue portion region.

  And the front end side area | region and rear end side area | region of the said tongue part area | region take the structure that it is connected through the weak intensity | strength part supported by the suspension dimple. In addition, the micro actuator mounting area includes at least one auxiliary member that increases the rigidity of the suspension flexure. Furthermore, the suspension flexure is configured to be located on substantially the entire bottom surface of the magnetic head slider.

  Further, the head gimbal assembly employs a configuration in which a dimple for supporting the suspension flexure is provided in the suspension. In addition, the tongue portion region of the suspension flexure is configured to have a substantially uniform weight around the dimple. Further, a configuration is adopted in which at least one polymer layer formed on the suspension flexure is provided to cover a metal layer for balancing the weight of the tongue portion region in the dimple.

In addition, a disk device according to another embodiment of the present invention is
A head gimbal assembly;
A drive arm coupled to the head gimbal assembly;
A disc,
A spindle motor for rotating the disk, and
The head gimbal assembly
A suspension provided at one end with a suspension flexure formed with a tongue portion region having a front end side region and a rear end side region;
At least one microactuator mounted in a microactuator mounting region formed in the tongue portion region of the suspension flexure,
A magnetic head slider having an inflow side end portion and an outflow side end portion is entirely mounted on the tongue portion via an insulating layer, and the inflow side end portion of the magnetic head slider is a rear end side region of the tongue portion region. The outflow side end of the magnetic head slider is mounted in the tip end region of the tongue portion region.

Furthermore, a method for manufacturing a head gimbal assembly according to another embodiment of the present invention includes:
Providing a suspension;
Mounting a suspension flexure formed with a tongue portion region having a front end side region and a rear end side region on one end of the suspension;
Attaching at least one microactuator to the microactuator mounting region formed in the tongue portion region of the suspension flexure;
A magnetic head slider having an inflow side end portion and an outflow side end portion is mounted on the rear end side region of the tongue portion region, and the outflow side end portion of the magnetic head slider is a tongue portion. Mounting on the tip side region of the region, and mounting the entire tongue portion via an insulating layer;
It has the configuration of having.

  The method includes the step of providing at least one auxiliary member for increasing the rigidity of the suspension flexure in the microactuator mounting region. Further, the suspension flexure is located on substantially the entire bottom surface of the magnetic head slider.

  Further, the method includes a step of providing dimples for supporting the suspension flexure on the suspension. Then, the tongue portion region of the suspension flexure has a substantially uniform weight around the dimples. Further, the method includes a step of providing a metal layer for balancing the weight of the tongue portion region in the dimple, and a step of providing at least one polymer layer that covers the metal layer and is formed on the suspension flexure. Have.

  Other features and effects of the present invention will be described in detail in the following embodiments together with the accompanying drawings, which are a part of explaining an example of the essence of the present invention.

  Since the present invention is configured as described above, since the PZT element is not positioned at the bottom end of the magnetic head slider, the chance of damage to the PZT element can be reduced, and the reliability is improved. Can be achieved. In addition, since the large mass around the magnetic head slider is reduced or eliminated, the performance of the head gimbal assembly such as impact performance, resonance transmission characteristics, rotational torque accuracy, and rigidity can be improved.

  The HGA in the conventional example has a large suspension tongue area and requires a parallel gap. However, as described above, such an arrangement can easily damage the PZT element. For this reason, in the embodiment of the present invention, the size of the tongue portion region is reduced and / or the gap is reduced or eliminated. In addition, a configuration is adopted in which the HGA can be moved even when an impact occurs.

<Embodiment 1>
FIG. 2a shows a perspective view of an HGA having a thin film PZT microactuator in embodiment 1. FIG. As shown in FIG. 2 a, the HGA 200 includes a load beam 204, a flexure 209, a hinge 213, and a base plate 212. The magnetic head slider 210 is partially mounted at least in a front end side region (one end side region) and a rear end side region (other end side region) of the tongue portion of the flexure 209. Two PZT elements 202 are mounted in the central region of the flexure 209.

  FIG. 2b is a more detailed view of the tongue area shown in FIG. 2a in this embodiment. FIG. 2c is a side view of the tongue portion region shown in FIG. 2a. As shown in these drawings, the magnetic head slider 210 is partially mounted at least on the front end side region 211 and the rear end side region 214 of the tongue portion of the flexure via an insulator such as epoxy. . Two trapezoidal PZT elements 202 are mounted on the central portion of the flexure.

  Each PZT element 202 has an electric pad 215/217 corresponding to the PZT element 202, and a common ground pad 216. The suspension also has electrical pads 215a / 217a that are electrically connected to pads 222, denoted by reference numeral 222. Electrical bonding 218 by wire bonding or solder ball bonding (SBB) is provided to electrically connect the PZT element to the suspension. Further, the ground pad 216 of the PZT element 202 is similarly connected to the flexure at the flexure side ground 216a.

  As shown in FIG. 2c, there is a gap between the inflow side end (leading edge) of the magnetic head slider and the PZT element as shown in the configuration of the conventional example described with reference to FIG. 1d. Not formed. According to this new configuration, the performance of the HGA when an impact occurs can be improved. In addition, the weight around the dimples is balanced.

  Of course, the size and shape of the PZT element are not limited to the shape and size described above. The present invention is not limited to the provision of two PZT elements. The above-described technique can also be applied to, for example, an HGA having one PZT as will be described later.

  FIG. 3a is an exploded perspective view showing a tongue area of the HGA. As described above, the suspension tongue portion region has the front end side region 211 and the rear end side region 214. And the front end side area | region 211 and the lower end side area | region 214 are connected via the weak intensity | strength part (weak point) formed weakly as the intermediate part (center). The weak strength portion refers to a portion formed with a narrow width between the front end side region 211 and the lower end side region 214 and having a strength weaker than that of the front end side region 211 and the lower end side region 214. .

  A plurality of pads 305 that are electrically connected to the slider pads 306 formed on the magnetic head slider 210 are formed in the front end side region 211 of the tongue portion. Further, the trace 304 is formed around the tongue portion, and is generally formed symmetrically with respect to the center line in the longitudinal direction of the suspension flexure. Note that the trace 304 is formed around the weak strength portion formed in the center of the suspension tongue portion region so as to be bent corresponding to the outer periphery of the weak strength portion. The trace 304 is connected to a pad 222 located at the end of the flexure opposite to the tongue.

  The outflow side end (trailing edge) of the magnetic head slider 210 is mounted on the front end side region 211 of the tongue, and the inflow end (leading edge) of the magnetic head slider 210 is the rear end side of the tongue. Mounted on the end 214. The inflow side end portion of the magnetic head slider 210 is an end portion on the inflow side of the air that flows between the disk and the magnetic head slider due to the rotation of the disk when the magnetic head slider 210 floats on the disk. The terminal is an end on the outflow side of air flowing between the disk and the magnetic head slider.

  The two PZT elements 202 have a common ground pad 216 and are mounted on the PZT mounting area 308 of the suspension flexure. The PZT mounting region 308 is separated with the rear end side region 214 of the tongue portion interposed therebetween, and is connected to the suspension tongue portion with a weak strength portion via the trace and the flexure polymer layer. The PZT mounting region 308 is supported by a suspension flexure, for example, a polymer layer formed on a metal layer such as a stainless steel support member.

  The two trigger regions 303 are connected to the PZT mounting region 308, and the flexure tip side region 211 is formed symmetrically around the dimples. The trigger region 308 has a structure mounted and / or formed on the trigger region 308 in order to maintain the flexibility and / or rigidity of the PZT element. Further, the trigger region 308 also has a function of transmitting a rotational moment generated in the suspension tongue portion.

  And the structure mounted in the said trigger area | region 308 is arrange | positioned in the back surface of the tongue part area | region shown to FIG. 3 a in this embodiment, as shown to FIG. 3 b. The structures 310 and 311 have a shape as shown in FIG. 3B, for example, a thin plate member corresponding to the shape of the trigger region 308 or a substantially T-shape. The structures 310 and 311 are formed of a metal layer such as a stainless steel layer formed on the base polymer layer or a copper layer covered with the polymer layer, for example. In addition, the said structures 310 and 311 are not limited to the shape and / or material which are shown in FIG. 3b, You may use another shape and material.

  FIG. 4 a is a diagram for explaining the outline of the operation by the PZT element. First, when a voltage is applied to one of the PZT elements 202, one PZT element 202 contracts and the other PZT element expands. The arrow on the PZT element 202 indicates the direction in which the PZT element expands and contracts. As a result, a rotational torque that is minutely driven and controlled is generated. In particular, the two PZT elements 202 are connected approximately symmetrically around the dimples via the out trigger. Therefore, the magnetic head slider mounted on the tongue portion is rotated together with the suspension tongue portion by the rotational torque generated by the PZT element 202. Further, an arrow shown above (at the tip side) of the magnetic head slider indicates the moving direction of the entire head gimbal assembly caused by the rotational torque.

  FIG. 4b shows two ways of driving the PZT microactuator. The upper left figure is a circuit diagram for supplying two voltages to two PZT elements having the same polarity direction and a common ground, and the upper right figure shows the voltage when two sine voltages having opposite phases are supplied. The waveform is shown. According to the arrangement of the PZT element shown in the upper stage, the PZT element, that is, the magnetic head slider is moved so as to gradually move to the left until the center of the first half cycle, and thereafter until the center of the next half cycle. Move to the right. In the lower example of FIG. 4b, the two PZT elements have opposite polarity directions and a common ground. Then, under driving with a sinusoidal voltage, during the first half cycle, one PZT element expands to the maximum while the other PZT element contracts to the maximum and then both return to the center. . And in the next half cycle, it moves contrary to the above. Note that the above is an example, and the arrangement and driving method of the PZT element are not limited to those described above. For example, the PZT element may have another polarity and arrangement, and the applied voltage may use another voltage waveform.

  FIG. 5a shows an exploded perspective view of the HGA in the present embodiment. In this figure, a load beam 210 is provided, and a base plate 212 is mounted thereon. Further, the hinge 203 is provided between the base plate 212 and the upper portion of the HGA having the front end side region 211 and the rear end side region 214 on which the slider 210 is mounted, the PZT element 202, and the pad 222. .

  FIG. 5b shows the suspension tongue portion region of the HGA assembled from the HGA shown in FIG. 5a in the present embodiment. As shown in FIG. 5b, the large mass around the suspension tongue can be reduced or removed completely. The same can be seen with reference to FIG. That is, a large mass around the slider 103 is removed. According to this configuration, for example, higher performance such as impact performance, resonance transmission characteristics, rotational torque accuracy, and rigidity can be achieved. As described with reference to FIG. 2c, the slider mounted almost entirely enables the tongue structure to be changed, and as a result, the same effect can be obtained. Further, the weight of the tongue portion between the inflow side end portion and the outflow side end portion of the magnetic head slider can be more balanced by, for example, a conductive material that increases its weight.

  Further, as described above, in FIG. 2c, since the PZT element is not located at the end of the bottom surface side of the magnetic head slider, the chance of damage to the PZT element can be reduced. Although the suspension protrudes in the vertical direction beyond the tip of the magnetic head slider, the flexure itself is located almost on the entire bottom surface of the magnetic head slider.

  Figures 6a and 6b show resonance test data obtained from certain embodiments. In particular, FIG. 6a shows the gain and FIG. 6b shows the associated phase. Diagrams 601 and 603 represent the resonance characteristics of the suspension base plate in an excited state of the microactuator, and diagrams 602 and 604 represent the resonance characteristics of the PZT element. Since the magnetic head slider is rotated in accordance with the PZT drive, reaction forces transmitted to the suspension and various resonances are reduced. Therefore, for example, the gain appears at a low resonance frequency. In other words, this can greatly increase the TPI value of the disk drive (HDD).

<Embodiment 2>
Here, the configuration of the above embodiment is possible when any type of PZT element is used. As an example, the PZT element as described above may be ceramic PZT, thin film PZT, PMN-Pt PZT, or the like, but is not limited thereto. Further, as a matter of course, the above-described technique can be applied to a two-stage drive (dual stage drive (DSA)) HGA having a single PZT element, and further, an HGA having no PZT element (“2 The present invention can also be applied to an HGA that does not incorporate a stage drive device or an “HGA that is not a DSA HGA”.

  7a and 7b show “HGA that is not a DSA HGA” that does not have a PZT element in the second embodiment. In particular, FIG. 7a shows a partial perspective view of a suspension tongue region of an HGA that is not an assembled DSA, and FIG. 7b shows a cross-sectional view taken along line 7b-7b in FIG. 7a.

  Two plots 220 (PI plots) are formed in the tip region of the tongue portion of the flexure 211 in FIG. 7b. Here, a structure for controlling the material for mounting the slider, such as an adhesive, epoxy, or the like, is arranged.

  First, the conductive layer 707 is connected to the magnetic head slider. The conductive layer 707 is insulated from the distal end side region 211 of the tongue portion of the flexure 211 via the base substrate PI701, and is at least partially covered by the cover substrate PI705. Similarly, a conductive layer 703 is provided in the rear end side region 214 of the flexure in the rear end side region 214 of the tongue portion, and balances the weight of the magnetic head slider with the front end side region 211 in the dimple. . Further, the transmission 703 is insulated from the rear end side region 214 of the tongue portion of the flexure via the base substrate PI701, and is at least partially covered by the cover substrate PI705. Note that the dimple 125 is positioned between the front end side region 211 and the rear end side region 214 as shown in the drawing, and the weight balance is effectively maintained around the dimple 125 as in FIG.

<Embodiment 3>
FIG. 8 shows an HDD in which an HGA having the microactuator described in the above embodiment is incorporated and assembled. Specifically, the HDD has a frame 801 and one or more disks 802 are rotated by a spindle motor 803. The VCM 804 controls the head 805 that floats the disk 802. Incidentally, since the operation of manufacturing the HDD of FIG. 8 and the like can be easily understood with ordinary technical knowledge by a so-called person skilled in the art, further detailed explanation waves are omitted.

  As described above, the present invention has the following excellent effects. First, in the present invention, it is possible to improve the mobility during the impact and after the impact. It can also withstand impacts and / or can reduce damage associated with impacts. In addition, the magnetic head slider can be stabilized by balancing the weight of the tongue and reducing the gap between the magnetic head slider and the flexure. In the configuration of the conventional example, since the gap affects the position of the magnetic head slider (for example, the tilt of the magnetic head slider), that is, the static posture of the HGA, it is necessary to mount the magnetic head slider with higher accuracy. However, it is possible to improve the impact performance by separating the PZT element from the end of the magnetic head slider and mounting it relatively firmly.

  Further, by reducing the component size, the number of members that receive an impact is reduced, and the manufacturing cost can be reduced. For example, the number of PZT elements manufactured for a wafer can be increased. The above-described technique improves the resonance characteristics, and further reduces the size of the suspension in the tongue region. As a result, it is possible to improve the dynamic and static characteristics of the HGA.

  Although the present invention has been described with reference to the above-described embodiments, the present invention is not limited to such contents, and includes various improvements and equivalent modifications that are included in the scope of the idea of the present invention.

  The head gimbal assembly of the present invention can be used by being incorporated in a disk device that records and reproduces data on a magnetic disk, and has industrial applicability.

It is a fragmentary perspective view which shows the structure of the disc apparatus in a prior art example. It is a partial exploded view which shows the structure of the PZT element microactuator and support arm in a prior art example. It is a top view of the PZT microactuator and support arm in the prior art example disclosed in FIG. FIG. 2 is a side view of a PZT microactuator and a support arm in the conventional example disclosed in FIG. It is a side view which shows the tongue part area | region of HGA at the time of the impact in a prior art example. It is a perspective view which shows the structure of HGA which has a thin film PZT microactuator in this invention. FIG. 3 is an enlarged perspective view showing details of a tongue portion region disclosed in FIG. 2b is a side view of the tongue region disclosed in FIG. It is a disassembled perspective view of the tongue part area | region of HGA in this invention. It is a perspective view which shows the structure of the back surface side of the tongue part area | region disclosed in FIG. 3a in this invention. It is explanatory drawing which shows the operation | movement by a PZT element drive. It is a figure which shows two examples of the method of driving a PZT microactuator. It is a partial exploded perspective view of HGA in the present invention. FIG. 6 is a diagram showing a suspension tongue portion region of the assembled HGA disclosed in FIG. It is a figure which shows the resonance characteristic test data obtained by this invention. It is a figure which shows the resonance characteristic test data obtained by this invention. It is a fragmentary perspective view which shows the structure of the suspension tongue part area | region of the assembled "HGA which is not DSA" in this invention. It is sectional drawing which shows the 7b-7b sectional view in the suspension tongue part area | region of "HGA which is not DSA" disclosed to FIG. 7a. It is a figure which shows HDD assembled | attached and assembled | attached with HGA which has the microactuator of this invention.

Explanation of symbols

200 HGA
202 PZT element 204 Load beam 209 Flexure 210 Magnetic head slider 211 Front end side region 212 Base plate 213 Hinge 214 Rear end side region

Claims (20)

A suspension provided at one end with a suspension flexure formed with a tongue portion region having a front end side region and a rear end side region;
And at least one microactuator mounted in a microactuator mounting region formed in the tongue portion region of the suspension flexure,
A magnetic head slider having an inflow side end portion and an outflow side end portion is mounted on the tongue portion as a whole via an insulating layer, and the inflow side end portion of the magnetic head slider is located in the tongue portion region. Mounted in the rear end side region, the outflow side end of the magnetic head slider is mounted in the front end side region of the tongue portion region,
A head gimbal assembly characterized by that. The head gimbal assembly according to claim 1, wherein
The front end side region and the rear end side region of the tongue portion region are connected via a weak strength portion supported by a suspension dimple.
A head gimbal assembly characterized by that. The head gimbal assembly according to claim 1 or 2,
The microactuator mounting area includes at least one auxiliary member that increases the rigidity of the suspension flexure.
A head gimbal assembly characterized by that. The head gimbal assembly according to claim 1, 2, or 3,
The suspension flexure is located on substantially the entire bottom surface of the magnetic head slider;
A head gimbal assembly characterized by that. The head gimbal assembly according to claim 1, 2, 3, or 4,
The suspension includes dimples that support the suspension flexure,
A head gimbal assembly characterized by that. The head gimbal assembly according to claim 5, wherein
The tongue portion region of the suspension flexure has a substantially uniform weight around the dimple.
A head gimbal assembly characterized by that. The head gimbal assembly according to claim 5 or 6,
Comprising at least one polymer layer formed on the suspension flexure covering a metal layer for balancing the weight of the tongue portion region in the dimple;
A head gimbal assembly characterized by that. A head gimbal assembly;
A drive arm coupled to the head gimbal assembly;
A disc,
A spindle motor for rotating the disk, and
The head gimbal assembly is
A suspension provided at one end with a suspension flexure formed with a tongue portion region having a front end side region and a rear end side region;
A magnetic head slider having an inflow side end portion and an outflow side end portion; and at least one microactuator mounted in a microactuator mounting region formed in the tongue portion region of the suspension flexure. Is mounted on the tongue portion via an insulating layer, the inflow side end portion of the magnetic head slider is mounted in the rear end side region of the tongue portion region, and the outflow side end portion of the magnetic head slider is It is mounted on the tip side region of the tongue part region,
A disk device characterized by the above. The disk device according to claim 8, wherein
The front end side region and the rear end side region of the tongue portion region are connected via a weak strength portion supported by a suspension dimple.
A disk device characterized by the above. The disk device according to claim 8 or 9, wherein
The microactuator mounting area includes at least one auxiliary member that increases the rigidity of the suspension flexure.
A disk device characterized by the above. The disk device according to claim 8, 9 or 10,
The suspension flexure is located on substantially the entire bottom surface of the magnetic head slider;
A disk device characterized by the above. The disk device according to claim 8, 9, 10, or 11,
The suspension includes dimples that support the suspension flexure,
A disk device characterized by the above. The disk device according to claim 12, wherein
The tongue portion region of the suspension flexure has a substantially uniform weight around the dimple.
A disk device characterized by the above. The disk device according to claim 12 or 13,
Comprising at least one polymer layer formed on the suspension flexure surrounding a metal layer for balancing the weight of the tongue portion region in the dimple;
A disk device characterized by the above. A method for manufacturing a head gimbal assembly comprising:
Providing a suspension;
Mounting a suspension flexure formed with a tongue portion region having a front end side region and a rear end side region on one end of the suspension;
Attaching at least one microactuator to a microactuator mounting region formed in the tongue portion region of the suspension flexure;
A magnetic head slider having an inflow side end portion and an outflow side end portion is mounted on the rear end side region of the tongue portion region, and the outflow side end portion of the magnetic head slider is mounted. Is mounted on the front end side region of the tongue portion region, and is entirely mounted on the tongue portion via an insulating layer;
A method for manufacturing a head gimbal assembly, comprising: A method of manufacturing a head gimbal assembly according to claim 15,
Providing at least one auxiliary member for increasing the rigidity of the suspension flexure in the microactuator mounting region;
A method for manufacturing a head gimbal assembly. A method of manufacturing a head gimbal assembly according to claim 15 or 16,
The suspension flexure is located on substantially the entire bottom surface of the magnetic head slider.
A method for manufacturing a head gimbal assembly. A method for manufacturing a head gimbal assembly according to claim 15, 16 or 17,
Providing the suspension with dimples for supporting the suspension flexure;
A method for manufacturing a head gimbal assembly. A method of manufacturing a head gimbal assembly according to claim 18,
The tongue portion region of the suspension flexure has a substantially uniform weight around the dimple.
A method for manufacturing a head gimbal assembly. A method of manufacturing a head gimbal assembly according to claim 18 or 19,
Providing a metal layer for balancing the weight of the tongue portion region in the dimple;
Providing at least one polymer layer formed on the suspension flexure to cover the metal layer;
A method for manufacturing a head gimbal assembly, comprising:

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