CN101290776B - Cantilever part, combination of tabs of magnetic head, manufacturing method thereof, and hard disk driving unit - Google Patents

Cantilever part, combination of tabs of magnetic head, manufacturing method thereof, and hard disk driving unit Download PDF

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Publication number
CN101290776B
CN101290776B CN2007101013140A CN200710101314A CN101290776B CN 101290776 B CN101290776 B CN 101290776B CN 2007101013140 A CN2007101013140 A CN 2007101013140A CN 200710101314 A CN200710101314 A CN 200710101314A CN 101290776 B CN101290776 B CN 101290776B
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magnetic head
cantilever
support sector
salient point
flexible
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CN101290776A (en
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姚明高
谢怡如
孙雨
郭林
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SAE Magnetics HK Ltd
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SAE Magnetics HK Ltd
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Abstract

The invention discloses a cantilever piece of a magnetic head folding piece combination. The cantilever piece comprises a cantilever flexible piece and an outer triggering board, wherein the cantilever flexible piece has a tongue piece area which has a first flexible part used to install the end portion of a magnetic head and a piezoelectric element installation area used to install a piezoelectric element; moreover, the first flexible part is positioned at the top of the tongue piece area; one end of the outer triggering board is connected with the cantilever flexible piece, while the other end has a triggering support part which extends above the tongue piece area to support the front part of the magnetic head. The structure of the outer triggering board reinforces the hardness of the tongue piece area of the cantilever flexible piece, thereby avoiding the problems of deformation and salient point separation when a vibration or percussion event occurs during manufacturing. The invention also discloses a magnetic head folding piece combination with the cantilever piece, a method for making the same and a magnetic disc drive unit with the magnetic head folding piece combination.

Description

Cantilever part, magnetic head fold piece combination and manufacturing approach thereof and disc drive unit
Technical field
The present invention relates to a kind of information recording disk driver element, relate in particular to a kind of cantilever part, magnetic head fold piece combination and manufacturing approach thereof and disc drive unit that has the magnetic head fold piece combination (HGA, head gimbal assembly) of microdrive.
Background technology
Disc drive unit is a kind of information-storing device that utilizes magnetic medium storage data, and have one movably magnetic read/write head be positioned on the magnetic medium, optionally to read or the magnetropism medium writes data from magnetic medium.
The consumer hopes that always the memory capacity of this type disc drive unit constantly increases, and hopes that simultaneously its read or write speed is more accurate sooner.Therefore, disc drive manufacturers is devoted to develop the disc drive unit with higher storage capacity always, for example increases the density of track through track width or the mode of track pitch that reduces on the disk, and then increases the memory capacity of disk indirectly.Yet the increase of track density requires disc drive unit that the position control accuracy of read/write head also must be improved accordingly, so that in compact disk, realize more accurate sooner read-write operation.Along with the increase of track density, use conventional art to realize that faster more accurately read/write head being positioned track limit suitable on the disk gets more and more difficult.Therefore, the mode that improves the read/write head position control is being sought always by disc drive unit manufacturer, so that the benefit of utilizing ever-increasing track density to bring.
A kind of method of raising read/write head position control accuracy on compact disk of effectively being utilized by disc drive unit manufacturer is for adopting second driver; Also be microdrive (micro-actuator), this microdrive cooperates with a master driver jointly to be realized the quick accurate position control of read/write head.The disc drive unit that comprises microdrive is called as the dual drive unit.
Develop many dual drive unit that are used to improve access speed and read/write head precision location on the track of compact disk in the past.This dual drive unit generally includes a keynote coil motor driver and a secondary microdrive, such as piezoelectric element microdrive (hereinafter to be referred as PZT element microdrive).This voice coil motor driver is controlled by servo-control system, and this servo-control system is ordered about the actuating arm rotation of carrying read/write head, thereby read/write head is positioned on the track suitable on the memory disc.PZT element microdrive and voice coil motor are used common raising access speed and realize the accurate location of read/write head on required track.Voice coil motor driver is carried out coarse adjustment to the position of read/write head, and PZT element microdrive carries out accurate adjustment to read/write head with respect to the position of disk.Through the cooperation of two drivers, realize data efficient and accurate read-write operation on the high density memory disk jointly.
A kind of known being used to realizes the microdrive of read/write head fine position is included the PZT element.This PZT element microdrive has relevant electronic installation, and this electronic installation can cause the PZT element on the microdrive optionally to shrink or expand.PZT element microdrive has suitable structure, makes the contraction of PZT element or the motion that expansion causes driver, and then causes the motion of read/write head.With respect to the disc drive unit that only uses voice coil motor driver, the motion of this read/write head can realize the adjustment more accurately sooner of read/write head position.This type PZT element is exposed in many patents, and for example the name United States Patent (USP) that is called " Piexoelectric actuator " discloses No. 2003/0268935.
Fig. 1 a has shown that a disk 101 is installed on the Spindle Motor 102 (spindle motor) and by its rotation.Carry magnetic head fold piece combination 100 on the voice coil motor arm 104, this magnetic head fold piece combination 100 comprises the microdrive 105 that contains magnetic head 103, on the magnetic head 103 read/write head is housed.The motion of one voice coil motor (VCM) control voice coil motor arm 104, and then control head 103 moving between disk 101 lip-deep tracks finally realize read/write head data write on disk 101.In the time of in working order, form aerodynamic force property between the disk 101 of the magnetic head 103 that comprises read/write head and rotation and contact, and produce lift.The mutual balance of elastic force that the cantilever part by magnetic head fold piece combination 100 of this lift and opposite sign but equal magnitude applies, and then cause in the overall diameter stroke of motor arm 104, form and keep a predetermined flying height in the surface of the disk 101 that rotates.
Because only use voice coil motor that magnetic head 103 location are existed inherent error, magnetic head 103 can't be realized fast and accurate position control, and influence the performance that read/write head is is accurately read and write data on the disk.For this reason, increase above-mentioned PZT element microdrive 105, so that improve the position control accuracy of magnetic head and read/write head.More particularly, with respect to voice coil motor driver, this PZT element microdrive is adjusted the displacement of magnetic head 103 with littler amplitude, so that compensate the foozle of voice coil motor and/or magnetic head cantilever combination.This PZT element microdrive makes that using littler track pitch becomes possibility, and can the track density (TPI value, the track quantity that per inch is contained) of disk be improved 50%, can reduce seeking rail and positioning time of magnetic head simultaneously.Therefore, PZT element microdrive makes disc drive unit can increase substantially the surface recording density of information storage magnetic disk.
With reference to figure 1b-1c, magnetic head fold piece combination 100 comprises magnetic head 103, a pair of film PZT element 10 and carries the cantilever part of this magnetic head 103 and piezoelectric element 10.This film PZT element 10 is used for magnetic head 103 fine position.This cantilever part comprises flexible element 122, magnetic head support sector 121, a metal substrate 123 and a load beam 124.
Shown in Fig. 1 b-1c, magnetic head 103 parts are installed in the magnetic head support sector 121 of cantilever part, and a convexity 127 is arranged in this magnetic head support sector 121, and this convexity 127 supports the center at magnetic heads 103 back sides.Flexible element 122 with some electric marks connects magnetic head support sector 121 and metal substrate 123.Load beam 124 be located at below magnetic head support sector 121 and the metal substrate 123 with support them the two, be formed with a salient point 125 on it, this salient point 125 cooperates with projection 127.When magnetic head 103 flew on disk, salient point 125 was supported projection 127, makes the load force of load beam 124 put on the center of magnetic head 103 equably always, thereby guaranteed that magnetic head 103 has good flying quality, for example good flight attitude.Flexible element 122 is provided with a tongue area 128, supplies to place PZT element 10.Two PZT elements 10 are located at the tongue area 128 of flexible element 122.With reference to figure 1c, when being transported to 10, one PZT elements 10 of film PZT element, shrinks voltage along arrow D direction, and another is expanded along the arrow E direction.Produce a turning moment like this, make magnetic head support sector 121, move thereby drive magnetic head 103 along the rotation of arrow C direction.
Because magnetic head 103 parts are installed in the magnetic head support sector 121, and the projection in the magnetic head support sector 121 127 supporting the center of magnetic head 103, so magnetic head 103 is easy to rotate around salient point 125 with magnetic head support sector 121.Magnetic head support sector 121 links to each other with metal substrate 123 through the tongue area 128 of flexible element 122.Because the tongue area 128 of flexible element 122 is processed by soft polymeric material; And have only 10-20um thick; So in the cantilever part manufacture process, in the ultrasonic cleaning process, in the manufacture process of magnetic head fold piece combination and in vibration and the crash, the tongue area 128 of cantilever part is easy to distortion.To cause salient point to separate like this, have a strong impact on the performance of magnetic head fold piece combination.Fig. 2 a and 2b have shown the situation of cantilever part tongue area deformation and the situation that salient point breaks away from respectively.Because deformation takes place in flexible element 122 easily; Thereby cause the salient point of magnetic head fold piece combination to break away from; And magnetic head 103 parts are installed in the upper surface of flexible element 122, so the static attitude of magnetic head 103 is difficult to control, thereby have a strong impact on the dynamic property of magnetic head fold piece combination.
In addition, the against shock performance of above-mentioned total is also very poor.When vibrations and crash when generation, cantilever part or PZT element may be damaged, like the crack or break.
In addition; Because the said structure of cantilever part; The static angular of the pitching and the direction of rolling is all very poor, and the dynamic property that this will cause the unstable properties of magnetic head fold piece combination and have a strong impact on magnetic head fold piece combination is especially when vibrations and crash take place in manufacturing or the handling process.
Therefore, the disc drive unit of demanding a kind of improved cantilever part, magnetic head fold piece combination and manufacturing approach thereof urgently and having this magnetic head fold piece combination solves the problems referred to above and realizes more performance.
Summary of the invention
The object of the present invention is to provide a kind of cantilever part of magnetic head fold piece combination; This cantilever part has improved structure; This structure can prevent that deformation and salient point disengaging take place in the cantilever tongue piece zone in cantilever part manufacture process, vibrations or crash, thereby improves the shockproof properties of magnetic head fold piece combination and the static state and the dynamic property of magnetic head.
Another object of the present invention is to provide a kind of magnetic head fold piece combination; The cantilever part of this magnetic head fold piece combination has improved structure; This structure can prevent that deformation and salient point disengaging take place in the cantilever tongue piece zone in cantilever part manufacture process, vibrations or crash, thereby improves the shockproof properties of magnetic head fold piece combination and the static state and the dynamic property of magnetic head.
A purpose more of the present invention is to provide a kind of method of making magnetic head fold piece combination, and this method can avoid salient point to break away from, and improves the shockproof properties of magnetic head fold piece combination and the static state and the dynamic property of magnetic head.
Another purpose of the present invention is to provide a kind of disc drive unit, and this disc drive unit has good dynamic and static properties, and improves its shockproof properties.
To achieve these goals, the present invention provides a kind of cantilever part of magnetic head fold piece combination, and this cantilever part comprises a cantilever flexible element and an external trigger plate.The cantilever flexible element has a tongue area, and this tongue area has first flexible portion and the PZT installation region that is used to install the PZT element that are used to install the afterbody of magnetic head, and first flexible portion is positioned at said tongue area top.One end of external trigger plate links to each other with the cantilever flexible element, and the other end has one and extends to the triggering support sector of tongue area top with the front portion of carrying magnetic head.
The structure of external trigger plate can make the tongue area hardness of cantilever flexible element strengthen, thereby avoids in the manufacture process, deformation problems and salient point in vibrations or the crash break away from problem.
In addition, as an improvement, tongue area also has a neck, and this neck connects first flexible portion and PZT installation region, and the flexible portion of winning is rotated around this neck.Between neck and triggering support sector, one second salient point is arranged, this triggering support sector is rotated around second salient point thereby this salient point support triggers support sector.
Trigger support sector and have first support sector corresponding with the magnetic head center, one and the second corresponding support sector of magnetic head front portion are connected first support sector and second support sector with one thin bar.
In addition, second support sector also comprises left side arm and the right arm.Arm extends out one left connecting link from the left side, links to each other with the cantilever flexible element, and arm extends out and links to each other with the cantilever flexible element a right connecting link from the right.
In another embodiment of cantilever part of the present invention, external trigger plate and cantilever flexible element are integral structure.
The embodiment of cantilever part according to the present invention, cantilever part also comprise a load beam, and this load beam provides first salient point.The collaborative load force that makes of first salient point and second salient point keeps being applied to the magnetic head center, thereby reaches good resonance transfer performance.
Another embodiment of cantilever part according to the present invention, first flexible portion forms a step, and this step makes between said first flexible portion and the said triggering support sector and keeps a difference in height.
Preferably, the external trigger plate is processed by metal material.
Magnetic head fold piece combination provided by the invention comprises magnetic head, has the microdrive of PZT element and has the cantilever flexible element and the cantilever part of external trigger plate.This magnetic head has front portion and the afterbody relative with the front portion.This cantilever flexible element has a tongue area, and this tongue area has first flexible portion and PZT installation region that is used to install the PZT element of the afterbody that is used to install magnetic head, and first flexible portion is positioned at said tongue area top.One end of external trigger plate links to each other with the cantilever flexible element, and the other end has a triggering support sector that extends to the tongue area top with the front portion of carrying magnetic head.
The manufacturing approach of magnetic head fold piece combination of the present invention may further comprise the steps: 11) an integrally formed cantilever flexible element and an external trigger plate; This cantilever flexible element has a tongue area; This tongue area has first flexible portion of the afterbody that is used to install magnetic head and the PZT installation region that is used to install the PZT element; First flexible portion is positioned at said tongue area top, and external trigger plate one end extends to the tongue area top; 12) the PZT element is mounted to the PZT installation region of cantilever flexible element; 13) magnetic head is provided, this magnetic head has front portion and the afterbody relative with the front portion, and the afterbody of magnetic head is installed in first flexible portion of said cantilever flexible element, and the front portion of magnetic head is carried by said external trigger plate.
Another manufacturing approach of magnetic head fold piece combination of the present invention may further comprise the steps: 21) cantilever part with tongue area is provided, and this tongue area has one first flexible portion and a PZT installation region, and said first flexible portion is positioned at the top of said tongue area; 22) the PZT element is mounted to the PZT installation region of cantilever flexible element; 23) an external trigger plate and the one of which end linked to each other with the cantilever flexible element is provided, and the other end extends to the top of the tongue area of cantilever flexible element; 24) magnetic head is provided, this magnetic head has front portion and the afterbody relative with the front portion, and the afterbody of magnetic head is mounted to first flexible portion of cantilever flexible element, and the front portion of magnetic head is carried by the external trigger plate.
Disc drive unit of the present invention comprises the Spindle Motor of magnetic head fold piece combination, the actuating arm that links to each other with magnetic head fold piece combination, disk, spinning disk.This magnetic head fold piece combination comprises magnetic head, has the microdrive of PZT element and has the cantilever flexible element and the cantilever part of external trigger plate.This magnetic head has front portion and the afterbody relative with the front portion.This cantilever flexible element has a tongue area, and this tongue area has first flexible portion and the PZT installation region that is used to install the PZT element that are used to install the afterbody of magnetic head, and first flexible portion is positioned at the front portion of tongue area.One end of external trigger plate links to each other with the cantilever flexible element, and the other end has a triggering support sector that extends to the tongue area top with the front portion of carrying magnetic head.
Through following detailed description and combine accompanying drawing, other aspects of the present invention, feature and advantage will be more readily understood, and these accompanying drawings have been described principle of the present invention by way of example.
Description of drawings
Fig. 1 a is the part stereographic map of traditional magnetic disk driver element.
Fig. 1 b is the exploded perspective view of a traditional magnetic head fold piece combination.
Fig. 1 c is the part vertical view after the magnetic head fold piece combination assembling among Fig. 1 b.
Fig. 2 a is the synoptic diagram that cantilever tongue piece regional deformation problem appears in traditional magnetic head fold piece combination.
Fig. 2 b is that the synoptic diagram that salient point breaks away from problem appears in traditional magnetic head fold piece combination.
Fig. 3 a is the stereographic map that the present invention has an embodiment of magnetic head fold piece combination of microdrive.
Fig. 3 b is the exploded perspective view of magnetic head fold piece combination among Fig. 3 a.
Fig. 3 c is the exploded perspective view of second embodiment of the present invention's magnetic head fold piece combination of having microdrive.
Fig. 4 a is the part amplification stereogram of magnetic head fold piece combination among Fig. 3 a.
Fig. 4 b is the part side view of magnetic head fold piece combination among Fig. 4 a.
Fig. 5 is the stereographic map of the PZT element of magnetic head fold piece combination of the present invention.
Fig. 6 is the amplification stereogram of the external trigger plate of magnetic head fold piece combination of the present invention.
Fig. 7 a is the part vertical view of magnetic head fold piece combination tongue area of the present invention.
Fig. 7 b is the part vertical view of magnetic head fold piece combination tongue area of the present invention, has shown how the PZT microdrive works when voltage input PZT microdrive.
Fig. 8 a has showed the impact sensitivity test data of microdrive among the present invention.
Fig. 8 b has showed the resonance gain test data of microdrive among the present invention.
Fig. 9 a is the part side view of the 3rd embodiment of the present invention's magnetic head fold piece combination of having microdrive.
Fig. 9 b is the part side view of the 4th embodiment of the present invention's magnetic head fold piece combination of having microdrive.
Fig. 9 c is the part side view of the 5th embodiment of the present invention's magnetic head fold piece combination of having microdrive.
Figure 10 a is the process flow diagram of an embodiment of the manufacturing approach of magnetic head fold piece combination of the present invention.
Figure 10 b is the process flow diagram of another embodiment of the manufacturing approach of magnetic head fold piece combination of the present invention.
Figure 11 is the stereographic map of disc drive unit of the present invention.
Embodiment
With reference now to accompanying drawing, describe embodiments of the invention, the similar elements label is represented similar elements in the accompanying drawing.As stated, the present invention provides a kind of cantilever part of magnetic head fold piece combination, and this cantilever part comprises a cantilever flexible element and an external trigger plate.The cantilever flexible element has a tongue area, and this tongue area has first flexible portion and the PZT installation region that is used to install the PZT element that are used to install the afterbody of magnetic head, and first flexible portion is positioned at the front portion of tongue area.One end of external trigger plate links to each other with the cantilever flexible element, and the other end has a triggering support sector that extends to the tongue area top with the front portion of carrying magnetic head.Tongue area also has a neck, and this neck connects first flexible portion and PZT installation region, and the flexible portion of winning is rotated around this neck.Between neck and triggering support sector, one second salient point is arranged, this second salient point support triggers support sector, and this triggering support sector is rotated around second salient point.Trigger support sector and have first support sector corresponding with the magnetic head center, one and the second corresponding support sector of magnetic head front portion are connected first support sector and second support sector with one thin bar.
In addition, second support sector also comprises left side arm and the right arm.Arm extends out and links to each other with the cantilever flexible element one left connecting link from the left side, and arm extends out and links to each other with the cantilever flexible element a right connecting link from the right.
Several embodiment of the magnetic head fold piece combination that has this cantilever part are described now.Fig. 3 a-3b has shown an embodiment of the magnetic head fold piece combination 200 with cantilever part of the present invention.Magnetic head fold piece combination 200 comprises cantilever part 300, magnetic head 103 and microdrive 10.Cantilever part 300 comprises substrate 301, load beam 305, articulated part 302, has the flexible element 307 and an external trigger plate 308 of cantilever contact 318 on it, and these elements fit together.
Articulated part 302 is installed on substrate 301 and the load beam 305, and flexible element 307 is installed on articulated part 302 and the load beam 305.Flexible element 307 provides a tongue area; This tongue area comprises first flexible portion 313 at its top; A main flexible body 311 and the PZT installation region 128 ' between first flexible portion 313 and main flexible body 311, this installation region 128 ' is soft polymeric material layer and has electric mark to roll on it.One end of electricity mark links to each other with magnetic head contact 612, and the other end links to each other with cantilever contact 318.PZT installation region 128 ' connects first flexible portion 313 and main flexible body 311.A pair of PZT element 10 is installed in the upper surface of PZT installation region 128 '.A neck 411 is arranged between first flexible portion 313 and PZT installation region 128 ', first flexible portion 313 can freely be rotated around neck 411.One end of external trigger plate 308 links to each other with flexible element 307 in tongue area 128 both sides, and the other end partly carries magnetic head 103.
As shown in Figure 6, external trigger plate 308 has one to trigger support sector and two connecting links 407,408.Trigger support sector comprise first support sector 402 corresponding to magnetic head 103 centres, corresponding to magnetic head 103 anterior second support sector 400 and the thin bar 401 that is connected first, second support sector 402,400.There is the rotary area 405 of a left side arm 403, the right arm 404 and on the left side arm 403 and 404 friendships place of the right arm in second support sector 400.Shown in Fig. 4 b, one second salient point 320 is formed on below the rotary area 405.Arm 403 extends and is coupled in main flexible body 311 left sides left side connecting link 407 from the left side.Similarly, arm 404 extends and is coupled on main flexible body 311 right sides right connecting link 408 from the left side.When turning moment produced, first support sector 402 was around 320 rotations of second salient point.This supporting structure can make soft PZT installation region 128 ' hardness strengthen, thereby prevents in manufacture process, such as in the ultrasonic cleaning process, in the PZT installation process or vibrations or crash when taking place, and the tongue area generation deformation of flexible element 307.
With reference to figure 5, PZT element 10 has free end 10d, 10e and a common port 10c respectively, has several to be electrically connected contact 309a, 309b and 309c on the common port 10c.Contact 309c is the common ground end.
Fig. 4 a is the detailed view of magnetic head fold piece combination tongue area of the present invention.Fig. 4 b is the part side view of magnetic head fold piece combination among Fig. 4 a.With reference to figure 4a-4b, flexible element 307 also has several and is electrically connected contact 310a, 310b, 310c, corresponds respectively to contact 309a, 309b, the 309c of PZT element 10.Electrical connection between flexible element 307 and the PZT element 10 can be adopted different electrically connected methods, such as soldering or metal solder or other suitable methods.Two groups of electricity marks 202,203 are arranged on the flexible element 307 of cantilever part 300, and the one of which end links to each other with the electrical connection contact 612 of electrical connection contact 309a, 309b, 309c and the magnetic head 103 of PZT element respectively, and the other end passes through cantilever part contact 318 and links to each other with control system.Thereby control system is through electric mark 202,203 difference control head 103 and PZT elements 10.
With reference to figure 4b, be formed with one first salient point, 319, the first salient points 319 on the load beam 305 and cooperate with second salient point 320 on the external trigger plate 308.Two salient points 319 and 320 necks 411 with flexible element 307 are clipped in the middle.The afterbody of magnetic head 103 is installed on the bottom 315 of first flexible portion 313, and the front portion of magnetic head 103 is carried by the triggering support sector of external trigger plate 308.An interval 321 is arranged between magnetic head 103 and tongue area, and when PZT element 10 was driven, magnetic head 103 can freely rotate around salient point 319,320 like this.First salient point 319 on the load beam 305 is clipped in the middle the neck on the flexible element 307 411 with second salient point 320 on the external trigger plate 308, thereby keeps load force to be applied to the center of magnetic head 103 always.
Shown in Fig. 3 c, among second embodiment of cantilever part of the present invention, external trigger plate 308 ' is an integral structure with cantilever flexible element 307.The integrated manufacturing cost that has reduced manufacturing time and cantilever part of external trigger plate 308 ' and cantilever flexible element 307.
With reference to figure 7a-7b, Fig. 7 b has disclosed the PZT microdrive and how to have worked.Expand and another PZT element 10b contraction when voltage inputs to 10, one PZT elements of PZT element 10a, thereby produce a turning moment, first flexible portion 313 is rotated around neck 411.Because the front portion of magnetic head 103 is carried by the triggering support sector of external trigger plate 308; Its afterbody is installed on first flexible portion 313 of flexible element 307; And neck 411 is clipped between second salient point 320 of first salient point 319 and external trigger plate 308 of load beam 305, thereby makes and trigger support sector and magnetic head around salient point 319,320 rotations.
Fig. 8 a-8b has showed some test datas of magnetic head fold piece combination of the present invention.Fig. 8 a has showed the impact sensitivity test data of microdrive among the present invention.Shown in Fig. 8 a, impact sensitivity is every volt of about 170nm, and it is qualified that the magnetic head fold piece combination of the band microdrive among this explanation the present invention is applied in the disc drive unit.Fig. 8 b has showed the resonance gain test data of microdrive among the present invention.Curve 503 expression be the resonance gain when the cantilever part substrate is shaken or drives, and curve 504 expressions is that the resonance of PZT element 10 during by drivings gains.We can see that two curve 503,504 dissmilarities that is to say, PZT element 10 does not have cantilever resonance.Therefore, the performance characteristic of disc drive unit improves to some extent.
Fig. 9 a-9c has disclosed other embodiment more of the present invention.Among Fig. 9 a; The triggering support sector 502 of first flexible portion 513 and external trigger plate 508 forms salient point 515,520 respectively; Two salient points 515,520 all roll on first salient point 319 of load beam 305; Like this when the PZT microdrive is driven, first flexible portion 513, trigger support sector 502 and magnetic head 103 (figure does not show) rotates around salient point 319,515,520.Shown in Fig. 9 b, do not have salient point in the triggering support sector 602 of external trigger plate 608, it is supported by the salient point 515 that function class is similar to second salient point 320.Shown in Fig. 9 c, first flexible portion 613 is formed with a step 616, makes first flexible portion 613 and triggers to keep a difference in height between the support sector 402, thereby make magnetic head 103 all keep good static angular in pitching with when rolling.
Figure 10 a has disclosed the key step that the manufacturing approach of an embodiment of magnetic head fold piece combination of the present invention relates to; It comprises the steps: step 11; An integrally formed cantilever flexible element and an external trigger plate, this cantilever flexible element has a tongue area, and this tongue area has one first flexible portion and a PZT installation region; First flexible portion is positioned at the tongue area top, and external trigger plate one end extends to the tongue area top; Step 12 is mounted to the PZT element PZT installation region of cantilever flexible element; Step 13 provides a magnetic head, and this magnetic head has front portion and the afterbody relative with the front portion, and the afterbody of magnetic head is mounted to first flexible portion of cantilever flexible element, and the front portion of magnetic head is carried by the external trigger plate.
Figure 10 b has disclosed the key step that the manufacturing approach of another embodiment of magnetic head fold piece combination of the present invention relates to; It comprises the steps: step 21; Cantilever flexible element with tongue area is provided; This tongue area has one first flexible portion and a PZT installation region, and first flexible portion is at the tongue area top; Step 22 is mounted to the PZT element PZT installation region of cantilever flexible element; Step 23 provides an external trigger plate and the one of which end is linked to each other with the cantilever flexible element, and the other end extends to the top of the tongue area of cantilever flexible element; Step 24 provides a magnetic head, and this magnetic head has front portion and the afterbody relative with the front portion, the afterbody of magnetic head is mounted to first flexible portion of cantilever flexible element, and the front portion of magnetic head is carried by the external trigger plate.
Preferably, the external trigger plate is shaped through method for chemially etching.
With reference to Figure 11; The embodiment of disc drive unit according to the present invention, disc drive unit can obtain through assemble case 1101, disk 1102, the Spindle Motor 1103 that is used for spinning disk 1102, voice coil motor 106 and the actuating arm 1104 that has a magnetic head fold piece combination 200 of the present invention.Because the structure of disc drive unit and assembling process are known by one of ordinary skill in the art, so omit detailed description about its structure and assembling at this.
Invention has been described more than to combine most preferred embodiment, but the present invention is not limited to the embodiment of above announcement, and should contain various modification, equivalent combinations of carrying out according to essence of the present invention.

Claims (27)

1. the cantilever part of a magnetic head fold piece combination comprises:
The cantilever flexible element; Said cantilever flexible element has a tongue area; Said tongue area has first flexible portion of the afterbody that is used to install magnetic head and the piezoelectric element installation region that is used to install piezoelectric element, and said first flexible portion is positioned at said tongue area top; And
The external trigger plate, said external trigger plate one end links to each other with said cantilever flexible element, and the other end has one and extends to the triggering support sector of tongue area top with the front portion of carrying magnetic head.
2. cantilever part as claimed in claim 1 is characterized in that: said external trigger plate and said cantilever flexible element are integral structure.
3. cantilever part as claimed in claim 1 is characterized in that: said tongue area also comprises a neck that connects said first flexible portion and said piezoelectric element installation region, and said first flexible portion is around said cervical rotation.
4. cantilever part as claimed in claim 3 is characterized in that: between said neck and the said triggering support sector one second salient point is arranged, the said second salient point support triggers support sector, and said triggering support sector is rotated around second salient point.
5. cantilever part as claimed in claim 4; It is characterized in that: said second salient point is formed in the said triggering support sector; Said cantilever part also comprises a load beam, and said load beam is provided with first salient point, and said first salient point and said second salient point are clipped in the middle said neck.
6. cantilever part as claimed in claim 4 is characterized in that: also comprise a load beam, said load beam is provided with first salient point, and said second salient point is formed on the said neck, and rolls on said first salient point.
7. cantilever part as claimed in claim 3; It is characterized in that: also comprise a load beam; Said load beam is provided with first salient point; Said neck and said triggering support sector all form a salient point that rolls on said first salient point, make said first flexible portion and said triggering support sector all around said salient point rotation.
8. cantilever part as claimed in claim 1 is characterized in that: said first flexible portion forms a step, and this step makes between said first flexible portion and the said triggering support sector and keeps a difference in height.
9. cantilever part as claimed in claim 1 is characterized in that: the said support sector that triggers has first support sector corresponding to the magnetic head center, a thin bar that is connected said first support sector and said second support sector corresponding to the second anterior support sector of magnetic head with.
10. cantilever part as claimed in claim 9; It is characterized in that: said second support sector comprises a left side arm and the right arm, said external trigger plate also comprise a left connecting link from the said left side arm extend out link to each other with said cantilever flexible element and a right connecting link arm extends out and links to each other with said cantilever flexible element from said the right.
11. cantilever part as claimed in claim 1 is characterized in that: said external trigger plate is that metal material is processed.
12. a magnetic head fold piece combination comprises:
Magnetic head, said magnetic head have front portion and the afterbody relative with the front portion;
Microdrive, said microdrive has piezoelectric element;
Cantilever part, said cantilever part comprises:
The cantilever flexible element; Said cantilever flexible element has a tongue area; Said tongue area has first flexible portion of the afterbody that is used to install magnetic head and the piezoelectric element installation region that is used to install piezoelectric element, and said first flexible portion is positioned at said tongue area top; And
The external trigger plate, said external trigger plate one end links to each other with said cantilever flexible element, and the other end has one and extends to the triggering support sector of tongue area top with the front portion of carrying magnetic head.
13. magnetic head fold piece combination as claimed in claim 12 is characterized in that: said tongue area also comprises a neck that connects said first flexible portion and said piezoelectric element installation region, and said first flexible portion is around said cervical rotation.
14. magnetic head fold piece combination as claimed in claim 13 is characterized in that: between said neck and the said triggering support sector one second salient point is arranged, the said second salient point support triggers support sector, and said triggering support sector is rotated around second salient point.
15. magnetic head fold piece combination as claimed in claim 14; It is characterized in that: said second salient point is formed in the said triggering support sector; Said cantilever part also comprises a load beam, and said load beam is provided with first salient point, and said first salient point and said second salient point are clipped in the middle said neck.
16. magnetic head fold piece combination as claimed in claim 14 is characterized in that: said second salient point is formed on the said neck, and said cantilever part also comprises a load beam, and said load beam is provided with first salient point, and said second salient point rolls on said first salient point.
17. magnetic head fold piece combination as claimed in claim 13; It is characterized in that: said cantilever part also comprises a load beam; Said load beam is provided with first salient point; Said neck and said triggering support sector all form a salient point that rolls on said first salient point, make said first flexible portion and said triggering support sector all around said salient point rotation.
18. magnetic head fold piece combination as claimed in claim 12 is characterized in that: said first flexible portion forms a step, and this step makes between said first flexible portion and the said triggering support sector and keeps a difference in height.
19. magnetic head fold piece combination as claimed in claim 12 is characterized in that: the said support sector that triggers has first support sector corresponding to the magnetic head center, a thin bar that is connected said first support sector and said second support sector corresponding to the second anterior support sector of magnetic head with.
20. magnetic head fold piece combination as claimed in claim 12; It is characterized in that: said second support sector comprises a left side arm and the right arm, said external trigger plate also comprise a left connecting link from the said left side arm extend out link to each other with said cantilever flexible element and a right connecting link arm extends out and links to each other with said cantilever flexible element from said the right.
21. magnetic head fold piece combination as claimed in claim 12 is characterized in that: said external trigger plate and said cantilever flexible element are integral structure.
22. magnetic head fold piece combination as claimed in claim 12 is characterized in that: said external trigger plate is that metal material is processed.
23. a method of making magnetic head fold piece combination comprises:
Cantilever part with tongue area is provided, and said tongue area has one first flexible portion and a piezoelectric element installation region, and said first flexible portion is positioned at the top of said tongue area;
Piezoelectric element is mounted to the piezoelectric element installation region of said cantilever flexible element;
One external trigger plate is provided, and an end of said external trigger plate is linked to each other with said cantilever flexible element, the other end extends to the tongue area top; And
One magnetic head is provided, and said magnetic head has front portion and the afterbody relative with the front portion, and the afterbody of said magnetic head is installed on first flexible portion of said cantilever flexible element, and the front portion of said magnetic head is carried by said external trigger plate.
24. a method of making magnetic head fold piece combination comprises:
An integrally formed cantilever flexible element and an external trigger plate; Said cantilever flexible element has a tongue area; Said tongue area has first flexible portion of the afterbody that is used to install magnetic head and the piezoelectric element installation region that is used to install piezoelectric element; Said first flexible portion is positioned at said tongue area top, and said external trigger plate one end extends to the tongue area top;
Piezoelectric element is mounted to the piezoelectric element installation region of said cantilever flexible element;
A magnetic head is provided, and said magnetic head has front portion and the afterbody relative with the front portion, and the afterbody of said magnetic head is installed on first flexible portion of said cantilever flexible element, and the front portion of said magnetic head is carried by said external trigger plate.
25. a disc drive unit comprises:
Magnetic head fold piece combination;
The actuating arm that links to each other with magnetic head fold piece combination;
Disk; And
The Spindle Motor that is used for spinning disk;
Said magnetic head fold piece combination comprises:
Magnetic head, said magnetic head have front portion and the afterbody relative with the front portion;
Microdrive, said microdrive has piezoelectric element;
Cantilever part is characterized in that, said cantilever part comprises:
The cantilever flexible element; Said cantilever flexible element has a tongue area; Said tongue area has first flexible portion of the afterbody that is used to install magnetic head and the piezoelectric element installation region that is used to install piezoelectric element, and said first flexible portion is positioned at said tongue area top; And
The external trigger plate, said external trigger plate one end links to each other with said cantilever flexible element, and the other end has one and extends to the triggering support sector of tongue area top with the front portion of carrying magnetic head.
26. disc drive unit as claimed in claim 25 is characterized in that: the said support sector that triggers has first support sector corresponding to the magnetic head center, a thin bar that is connected said first support sector and said second support sector corresponding to the second anterior support sector of magnetic head with.
27. disc drive unit as claimed in claim 26; It is characterized in that: said second support sector comprises a left side arm and the right arm, said external trigger plate also comprise a left connecting link from the said left side arm extend out link to each other with said cantilever flexible element and a right connecting link arm extends out and links to each other with said cantilever flexible element from said the right.
CN2007101013140A 2007-04-17 2007-04-17 Cantilever part, combination of tabs of magnetic head, manufacturing method thereof, and hard disk driving unit Active CN101290776B (en)

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JP2008108043A JP5303776B2 (en) 2007-04-17 2008-04-17 Suspension, head gimbal assembly, method for manufacturing the same, and magnetic disk drive unit

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JP6042310B2 (en) * 2013-11-15 2016-12-14 株式会社東芝 Head gimbal assembly and disk device provided with the same
JP6018598B2 (en) * 2014-02-21 2016-11-02 株式会社東芝 Head gimbal assembly and disk device provided with the same

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CN1755799A (en) * 2004-09-28 2006-04-05 新科实业有限公司 Micro-driver, magnetic head folding sheet combination with micro-driver and magnetic disk driver
CN1828726A (en) * 2005-02-28 2006-09-06 新科实业有限公司 Rotatable piezoelectric micro-actuator and magnetic head folding sheet combination and disk drive unit thereof

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