JP5303776B2 - Suspension, head gimbal assembly, method for manufacturing the same, and magnetic disk drive unit - Google Patents

Description

The present invention relates to a kind of data recording magnetic disk drive unit, and more particularly to a suspension of a head gimbal assembly (HGA) having a microactuator, a head gimbal assembly and a manufacturing method thereof, and a magnetic disk drive unit.

A magnetic disk drive unit is a data storage device that stores data via a magnetic medium, and a movable magnetic read / write head is positioned on the magnetic medium to selectively read data from the magnetic medium. Or write on a magnetic medium.

Consumers have sought to increase the storage capacity of such magnetic disk drive units and at the same time have desired faster and more accurate read / write speeds. Therefore, magnetic disk manufacturers have been focusing on the development of magnetic disk drive units with higher storage capacity, for example increasing the storage capacity of the magnetic disk indirectly by reducing the track width or track pitch of the magnetic disk, for example. It is to be. However, in order to perform reading / writing faster and more accurately with a high-density magnetic disk, it is necessary for the magnetic disk drive unit to increase the accuracy of position control with respect to the reading / writing head corresponding to the increase in track density. Also, with increasing track density, it has become increasingly difficult to place the read / write head at the proper location on the magnetic disk faster and more accurately with conventional techniques. Therefore, manufacturers of magnetic disk drive units have sought ways to improve read / write head position control in order to take advantage of the increasing track density.

  One method that magnetic disk drive unit manufacturers can effectively use to improve read / write head position control accuracy on high-density magnetic disks is to use a second actuator (also called a micro-actuator). Is to use. The microactuator jointly realizes quick and accurate position control for the read / write head in cooperation with one main actuator. A magnetic disk drive unit including a microactuator is known as a double actuator unit.

Many double actuator units have been developed in which the read / write speed and read / write head are used to improve position control accuracy in high density magnetic disks. Such a double actuator unit usually includes one main voice coil motor actuator and one sub microactuator, for example, a piezoelectric element microactuator (hereinafter referred to as a PZT element actuator). The main voice coil motor actuator is controlled by a servo control system, which places the read / write head on the appropriate track on the disk by making full use of the rotation of the drive arm carrying the read / write head. . The PZT element microactuator jointly realizes improved read / write speed and precise position control on the track where the read / write head is in demand in cooperation with the voice coil motor. The voice coil motor actuator roughly adjusts the position of the read / write head, and the PZT element microactuator makes precise adjustment to the position of the read / write head relative to the magnetic disk. The cooperation of the two actuators jointly realizes efficient and accurate reading / writing of data on a high-density storage magnetic disk.

A kind of known microphone actuator used to realize fine adjustment of the read / write head position includes a PZT element. The PZT element microphone actuator has a correlating electronic device that can selectively contract or expand the PZT element on the microactuator. Since the PZT element microactuator has an appropriate structure, the contraction or expansion of the PZT element causes the movement of the actuator, and further causes the movement of the read / write head. However, compared to a magnetic disk drive unit using a voice coil motor, the read / write head movement achieves faster and more precise adjustment to the read / write head. Such PZT elements are disclosed in many patents, for example, US Patent Publication No. 2003/0168935, entitled “Piezoelectric Drive”.

FIG. 1a shows that one magnetic disk 101 is mounted on a spindle motor 102 and rotates by making full use of the spindle motor. A head gimbal assembly 100 is mounted on the voice coil motor arm 104, and the head gimbal assembly 100 includes a microactuator 105 including a magnetic head 103, and a read / write head is mounted on the magnetic head 103. . One voice coil motor (VCM) controls the movement of the voice coil motor arm 104, whereby the magnetic head 103 controls the movement of the surface of the magnetic disk 101 between tracks, and finally the read / write head becomes magnetic. Data reading / writing on the disk 101 is realized. In the working state, aerodynamic contact is formed between the magnetic head 103 including the read / write head and the rotating magnetic disk 101, and a rising force is generated. The ascending force is balanced with the resilience of large and small equivalents and directional reciprocity applied by the suspension of the head gimbal assembly 100, so that a predetermined flight above the surface of the rotating magnetic disk 101 is performed in the entire radial stroke of the motor arm 104. Altitude can be formed and maintained.

When only the voice coil motor is used, there is an inherent error in the positioning of the magnetic head 103, so that it is impossible to control the magnetic head 103 quickly and accurately, and at the same time the read / write head is accurate. It also affects the performance of reading / writing data on the magnetic disk. Therefore, the position control accuracy of the magnetic head and the read / write head is improved by adding the above-described PZT element microactuator 105. More specifically, in contrast to the voice coil motor actuator, the PZT element microactuator adjusts the displacement of the magnetic head 103 with a smaller width, thereby reducing the manufacturing error of the voice coil motor and / or the magnetic head suspension assembly. To compensate. In addition, the PZT element microactuator enables the application of a smaller track pitch, and increases the track density of the magnetic disk (TPI value, the number of tracks included per inch) by 50%, and at the same time, the track search of the magnetic head and Positioning time can be shortened. Therefore, in the PZT element microactuator, the magnetic disk drive unit can greatly improve the surface recording density of the data storage magnetic disk.

  Referring to FIGS. 1 b-1 c, the head gimbal assembly 100 includes a magnetic head 103, a pair of thin film PZT elements 10, and a suspension on which the magnetic head 103 and the piezoelectric elements 10 are mounted. The thin film PZT element 10 is used for fine adjustment with respect to the position of the magnetic head 103. The suspension includes a flexure 122, one magnetic head support 121, one metal substrate 123, and one load beam 124.

As shown in FIGS. 1b-1c, the magnetic head 103 is partially attached to the magnetic head support 121 of the suspension, and the magnetic head support 121 has one ridge 127, and the ridge 127 is a magnetic head. The center of the back surface of 103 is supported. A flexure 122 having several traces connects the magnetic head support 121 and the metal substrate 123. The load beam 124 is provided below the magnetic head support portion 121 and the metal substrate 123 to support the magnetic head support portion 121 and the metal substrate 123, and one projection 125 is formed on the load beam 124. The protrusion 125 is blended with the ridge 127. When the magnetic head 103 flies over the magnetic disk, the protrusion 125 supports the protuberance 127, and the load force of the load beam 124 is always uniformly applied to the center of the magnetic head 103, so that the good flying performance of the magnetic head 103 is achieved. For example, ensure a good flight posture. The flexure 122 is provided with one tongue area 128 for mounting a PZT element. Two PZT elements 10 are provided in the tongue area 128 of the flexure 122. Referring to FIG. 1c, when a voltage is transported to the thin film PZT element 10, one PZT element 10 contracts along the direction of arrow D, and the other expands along the direction of arrow E. Thus, one rotational torque is generated, and the magnetic head support 121 moves along the direction of the arrow C, thereby causing the magnetic head 103 to move.

Since the magnetic head 103 is partially mounted on the magnetic head support 121 and the ridge 127 on the magnetic head support 121 supports the center of the magnetic head 103, the magnetic head 103 and the magnetic head support 121 are projected. It can be easily rotated around 125. The magnetic head support 121 is connected to the metal substrate 123 through the tongue area 128 of the flexure 122. The tongue section 128 of the flexure 122 is made of a soft polymer material and has a thickness of only 10-20 um, so that it can be used in suspension manufacturing processes, ultrasonic cleaning processes, head gimbal assembly manufacturing processes, and vibration or impact events. The tongue section 128 of this is easily deformed. This causes separation of the protrusions, which has a significant effect on the performance of the head gimbal. 2a and 2b show the case where the suspension tongue section is deformed and the protrusion is detached. The flexure 122 is easily deformed, causing protrusions of the head gimbal assembly to be detached, and since the magnetic head 103 is partially mounted on the upper surface of the flexure 122, it is difficult to control the static posture of the magnetic head 103. The dynamic performance of the head gimbal assembly is also seriously affected.

In addition, the vibration-proof property of the entire structure described above is extremely poor. When a vibration or impact event occurs, the suspension or PZT element can be damaged, for example, by cracking or rupturing.

  Also, the structure of the suspension is extremely inferior in the static angle in the direction of pitching and rotation, causing instability of the performance of the head gimbal assembly, and having a significant influence on the dynamic performance of the head gimbal assembly. This is the case when a vibration or shock occurred during the transportation process.

Therefore, the improved suspension, the head gimbal assembly and the manufacturing method thereof, and the magnetic disk drive unit having the head gimbal assembly are expected to solve the above problems or realize better performance.

It is an object of the present invention to provide a suspension for a head gimbal assembly, which has an improved structure, which deforms the suspension tongue area or disengages protrusions during the suspension manufacturing process, vibration or impact event. The vibration resistance of the head gimbal assembly and the static or dynamic performance of the magnetic head can be improved.

  Another object of the present invention is to provide a head gimbal assembly, wherein the suspension of the head gimbal assembly has an improved structure, the structure being deformed in the suspension tongue area in the suspension manufacturing process, vibration or impact event. The protrusions can be prevented from being detached, and the vibration-proof property of the head gimbal assembly and the static or dynamic performance of the magnetic head are improved.

Another object of the present invention is to provide a method for manufacturing a certain head gimbal assembly, which can prevent the protrusions from being separated, and improves the vibration isolation performance of the head gimbal assembly and the static and dynamic performance of the magnetic head. Let

Another object of the present invention is to provide a magnetic disk drive unit, which has good dynamic and static performance and improves vibration isolation.

  To achieve the above object, the present invention provides a suspension for a head gimbal assembly that includes one suspension flexure and one external trigger. The suspension flexure has one tongue area, and the tongue area includes one first flexure part used for mounting the rear part of the magnetic head and one piezoelectric element mounting area used for mounting the PZT element. The first flexure portion is located at the apex of the tongue area. One end of the external trigger is connected to the suspension flexure, and the other end has one trigger support, and the trigger support extends to the upper part of the tongue area to mount the front part of the magnetic head.

The structure of the external trigger can reinforce the hardness of the tongue section of the suspension flexure, and can prevent deformation or protrusion separation in the manufacturing process, vibration or impact event.

As an improvement, the tongue section further includes a neck, and the neck is connected to the first flexure and the PZT mounting area so that the first flexure rotates around the neck.
The suspension according to claim 1. There is one second protrusion between the neck and the trigger support, which supports the trigger support so that the trigger support rotates about the second protrusion.

  The trigger support portion includes a first support portion corresponding to the center of the magnetic head, a second support portion corresponding to the front portion of the magnetic head, and a weak beam connecting the first support portion and the second support portion. Having

  In addition, the first support part includes a left arm and a right arm. One left beam extends from the left arm and is connected to the suspension flexure, and one right beam extends from the right arm and is connected to the suspension flexure. To do.

In another embodiment of the invention, the external trigger and the suspension flexure are a unitary structure.

According to an embodiment of the suspension of the present invention, the suspension further includes a load beam, which provides a first protrusion. The first protrusion and the second protrusion cooperate to maintain a load force applied to the center of the magnetic head, thereby realizing a good resonance transition performance.

  According to another embodiment of the suspension of the present invention, the first flexure portion forms a step, and the step maintains a certain height difference between the first flexure portion and the trigger support portion.

  In comparison, the external trigger is preferably made of a metallic material.

  A head gimbal assembly provided by the present invention includes a magnetic head, a microactuator having a PZT element, a suspension including a suspension flexure and an external trigger, and the magnetic head has a front portion and a rear portion facing the front portion. . The suspension flexure has one tongue area, and the tongue area includes a first flexure portion used for mounting the rear portion of the magnetic head and one PZT mounting area used for mounting the PZT element. The flexure part is located at the apex of the tongue area. One end of the external trigger is connected to the suspension flexure, and the other end has one trigger support, and the trigger support extends to the upper part of the tongue area to mount the front part of the magnetic head.

The manufacturing method of the head gimbal assembly of the present invention includes the following steps: 11) One suspension flexure and one external trigger are integrally formed, the suspension flexure has one tongue area, and the tongue area includes: It has a first flexure part used for mounting the rear part of the magnetic head and a PZT mounting area used for mounting the PZT element, the first flexure part is located at the apex of the tongue area, and one end of the external trigger is Extending above the tongue area; 12) mounting the PZT element in the PZT mounting area of the suspension flexure; 13) providing one magnetic head, the magnetic head having a front and a rear facing the front. The rear part of the magnetic head is attached to the first flexure part of the suspension flexure, and the front part of the magnetic head is connected to the external trigger. Ri is mounted.

Another method of manufacturing the head gimbal assembly of the present invention includes the following steps: 21) providing a suspension having a tongue area, the tongue area having a first flexure portion and a PZT mounting area; The first flexure portion is located at the apex of the tongue area; 22) the PZT element is attached to the PZT attachment area of the suspension flexure; 23) one external trigger is provided, and one end of the external trigger is provided. Is connected to the suspension flexure and the other end extends to above the tongue section of the suspension flexure; 24) providing one magnetic head, the magnetic head having a front portion and a rear portion facing the front portion; In addition, the rear part of the magnetic head is attached to the first flexure part of the suspension flexure, and the front part of the magnetic head is It is mounted by over.

A magnetic disk drive unit of the present invention includes a head gimbal assembly, a drive arm connected to the head gimbal assembly, a magnetic disk, and a spindle motor that rotates the magnetic disk. The head gimbal assembly includes a magnetic head and a PZT element. And a suspension having a suspension flexure and an external trigger. The magnetic head has a front portion and a rear portion facing the front portion. The suspension flexure has one tongue area, and the tongue area includes a first flexure portion used for mounting the rear part of the magnetic head and one PZT mounting area used for mounting the PZT element. One flexure section is located at the front of the tongue area. One end of the external trigger is connected to the suspension flexure, and the other end has a trigger support portion, and the trigger support portion extends to the upper portion of the tongue area to mount the front portion of the magnetic head.

The following detailed description and drawings will make other aspects, features and advantages of the present invention more comprehensible, which illustrate the principles of the present invention by way of example.

  Next, embodiments of the present invention will be described with reference to the drawings. Similar part numbers in the drawings indicate similar parts. As described above, the present invention provides a kind of suspension for a head gimbal assembly, which includes one suspension flexure and one external trigger. The suspension flexure has one tongue area, and the tongue area includes a first flexure portion used for mounting the rear part of the magnetic head and a PZT mounting area used for mounting the PZT element. Located at the front of the tongue area. One end of the external trigger is connected to the suspension flexure, and the other end has one trigger support portion, and the trigger support portion extends to the upper portion of the tongue area to mount the front portion of the magnetic head. The tongue section further includes a neck, which connects the first flexure section and the PZT mounting area so that the first flexure section rotates around the neck section. There is one second projection between the neck and the trigger support, and the second projection supports the trigger support, and the trigger support rotates around the second projection. The trigger support portion includes one first support portion corresponding to the center of the magnetic head, one second support portion corresponding to the front portion of the magnetic head, and one connecting the first support portion and the second support portion. And a weak beam.

  In addition, the first support portion further includes a left arm and a right arm. One left beam extends from the left arm and connects to the suspension flexure, and one right beam extends from the right arm and connects to the suspension flexure.

The following describes several embodiments of a head gimbal assembly having the suspension flexure. 3a-3b show one embodiment of a head gimbal assembly 200 having the suspension of the present invention. The head gimbal assembly 200 includes a suspension 300, a magnetic head 103, and the microactuator 10. The suspension 300 includes a substrate 301, a load beam 305, a hinge 302, a flexure 307 having a suspension pad 318, and one external trigger 308, which are combined.

The hinge 302 is attached to the substrate 301 and the load beam 305, and the flexure 307 is attached to the hinge 302 and the load beam 305. The flexure 307 provides one tongue area, and the tongue area includes one first flexure section 313, one main flexure body 311, and the first flexure section 313 and the main flexure body 311 at the apex thereof. With a single PZT mounting area 128 'in between, which is a soft polymer layer with traces overlaid thereon. One end of the trace is connected to the magnetic head pad 612 and the other end is connected to the suspension pad 318. The PZT mounting area 128 ′ connects the first flexure part 313 and the main flexure body 311. The pair of PZT elements 10 are mounted on the upper surface of the PZT mounting area 128 '. There is one neck portion 411 between the first flexure portion 313 and the PZT attachment area 128 ′, and the first flexure portion 313 can freely rotate around the neck portion 411. One end of the external trigger 308 is connected to the flexure 307 on both sides of the tongue area 128, and the other end partially mounts the magnetic head 103.

As shown in FIG. 6, the external trigger 308 has one trigger support and two beams 407 and 408. The trigger support portion includes one first support portion 400 corresponding to the center of the magnetic head 103, one second support portion 402 corresponding to the front portion of the magnetic head 103, and first and second support portions 400, 402. And a weak beam 401 connected to each other. The first support part 400 has one left arm 403, one right arm 404, and a rotation area 405 located at the intersection of the left arm 403 and the right arm 404. As shown in FIG. 4 b, one second protrusion 320 is formed below the rotation area 405. The left beam 407 extends from the left arm 403 and is connected to the main flexure body 311 on the left side of the main flexure body 311. Similarly, the right beam 408 extends from the right beam 404 and is connected to the main flexure body 311 on the right side of the main flexure body 311. When the rotational torque is generated, the first support part 400 rotates around the second protrusion 320. Such a structure can increase the hardness of the soft PZT mounting area 128 ′, and the tongue area of the flexure 307 may be deformed when a manufacturing process (for example, ultrasonic cleaning process, PZT mounting process), or a vibration or impact event occurs. Can be prevented.

Referring to FIG. 5, the PZT element 10 has separate free ends 10d and 10e and one common end 10c. The common end 10c has several electrical connection pads 309a, 309b and 309c. The pad 309c is a common ground end.

FIG. 4a is a detailed view of the tongue area of the magnetic head gimbal assembly of the present invention. 4b is a partial side view of the head gimbal assembly of FIG. 4a. 4a-4b, the flexure 307 further includes several electrical connection pads 310a, 310b, 310c, which correspond to the pads 309a, 309b, and 309c of the PZT element 10 separately. The electrical connection between the flexure 307 and the PZT element 10 can be made by a different method, such as soldering, wire bonding, or other suitable method. The flexure 307 of the suspension 300 has two sets of traces 202 and 203, one end of which is separately connected to the electrical connection pads 309a, 309b, and 309c of the PZT element and the electrical connection pad 612 of the magnetic head 103, and the other end. The suspension pad 318 is connected to the control system. As described above, the control system controls the magnetic head 103 and the PZT element 10 separately through the traces 202 and 203.

Referring to FIG. 4 b, one first protrusion 319 is formed on the load beam 305, and the first protrusion 319 and the second protrusion 320 on the external trigger 308 are blended. The two protrusions 319 and 320 sandwich the neck 411 of the flexure 307 in the middle. The rear part of the magnetic head 103 is mounted on the bottom 315 of the first flexure part 313, and the front part of the magnetic head 103 is mounted by a trigger support part of the external trigger 308. There is one interval 321 between the magnetic head 103 and the tongue area, and when the PZT element 10 is driven, the magnetic head 103 can freely rotate around the protrusions 319 and 320. The first protrusion 309 of the load beam 305 and the second protrusion 320 of the external trigger 308 hold the neck 411 of the flexure 307 in between so that a load force is always applied to the center of the magnetic head 103.

As shown in FIG. 3c, in the second embodiment of the suspension of the present invention, the external trigger 308 'and the suspension flexure 307 have an integral structure. The integration of the external trigger 308 'and the suspension flexure 307 reduces manufacturing time and the manufacturing cost of the suspension flexure.

  Referring to FIGS. 7a-7b, FIG. 7b discloses how the PZT microactuator operates. When a voltage is applied to the PZT element 10, one PZT element 10 a expands and the other PZT element 10 b contracts to form one rotational torque, and the first flexure unit 313 rotates around the neck 411. Try to rotate. The front part of the magnetic head 103 is mounted by a trigger support part of the external trigger 308, the rear part is attached to the first flexure part 313 of the flexure 307, and the neck part 411 is connected to the first projection 319 of the load beam 305 and the external part. By being sandwiched between the second protrusion 320 of the trigger 308, the trigger support portion and the magnetic head rotate around the protrusions 319 and 320.

  8a-8b show test data for the head gimbal assembly of the present invention. FIG. 8a shows test data of the sensitivity of the microactuator of the present invention to impact. As shown in FIG. 8a, the sensitivity to impact is approximately 170 nm per watt, which explains that the application of the head gimbal assembly having the microactuator to the magnetic disk drive unit is acceptable. FIG. 8b shows test data of the resonance gain of the microactuator of the present invention. A curve 503 indicates the resonance gain when the suspension board is subjected to vibration or driving, and a curve 504 indicates the resonance gain when the PZT element 10 is driven. Here it can be seen that the two curves 503, 504 are not similar. That is, the PZT element 10 has no resonance gain. Therefore, the performance characteristics of the magnetic disk drive unit are improved.

Figures 9a-9c show another embodiment of the present invention. In FIG. 9a, the first flexure portion 513 and the trigger support portion 502 of the external trigger 508 separately form protrusions 515 and 520, and the two protrusions 515 and 520 both overlap the first protrusion 319 of the load beam 305. When the PZT microactuator is driven, the first flexure portion 513, the trigger support portion 502, and the magnetic head 103 (not shown) rotate around the protrusions 319, 515, and 520. As shown in FIG. 9 b, the trigger support portion 602 of the external trigger 608 has no protrusion, which is supported by a protrusion 515 having a similar effect to the second protrusion 320. As shown in FIG. 9c, the first flexure portion 613 is formed with one step 616, and by maintaining a certain height difference between the first flexure portion 613 and the trigger support portion 402, the magnetic head When 103 is pitching and rotating, a good static angle can be maintained.

  FIG. 10a shows the main steps involved in the manufacturing method of one embodiment of the head gimbal assembly of the present invention, which includes the following steps: Step 11, integrally forming one suspension flexure and one external trigger; The suspension flexure has one tongue area, and the tongue area includes one first flexure part and one PZT mounting area, and the first flexure part is located at the apex of the tongue area, One end of the trigger extends to above the tongue area; Step 12, attach the PZT element to the PZT attachment area of the suspension flexure; Step 13, provide one magnetic head, the magnetic head comprising the front and its A magnetic head having a rear portion opposed to the front portion and attaching the rear portion of the magnetic head to the first flexure portion of the suspension flexure. Is mounted by the external trigger.

  FIG. 10b shows the main steps involved in the manufacturing method of another embodiment of the head gimbal assembly of the present invention, which includes the following steps: Step 21, providing one suspension flexure with a tongue area, the tongue The zone has one first flexure section and one PZT mounting area, the first flexure section is located at the apex of the tongue section; Step 22, mount the PZT element to the PZT mounting area of the suspension flexure Step 23, providing one external trigger, and further connecting one end of the external trigger to the suspension flexure and extending the other end to above the tongue area; Step 24, providing one magnetic head, The magnetic head has a front part and a rear part opposite to the front part, and the rear part of the magnetic head is connected to the first flexure of the suspension flexure. Attached to the lexer part, the front part of the magnetic head is mounted by an external trigger.

In comparison, it is preferred that the external trigger be formed by a chemical etching method.

  Referring to FIG. 11, according to an embodiment of the magnetic disk drive unit of the present invention, the magnetic disk drive unit includes a housing 1101, a magnetic disk 1102, a spindle motor 1103 that rotates the magnetic disk 1102, a voice coil motor 1106, and the present invention. It can be obtained by combining with a drive arm 1104 having a head gimbal assembly 200. Since the engineers in this technical field are familiar with the structure and combination process of the magnetic disk drive unit, detailed description of the structure and combination process is omitted here.

  Although the present invention has been described with reference to the best embodiment, the present invention is not limited to the embodiment described above, but includes various improvements made based on the essence of the present invention, or equivalent combinations. Should.

It is a three-dimensional view of a portion of a conventional magnetic disk drive unit. FIG. 3 is an exploded view of one conventional head gimbal assembly. FIG. 2 is an overhead view of a portion after combining the head gimbal assembly of FIG. 1b. 6 is a schematic view when a deformation problem occurs in a suspension tongue area of a conventional head gimbal assembly. 6 is a schematic diagram when a problem of protrusion separation occurs in a conventional head gimbal assembly. FIG. 3 is a three-dimensional view of one embodiment of a head gimbal assembly having a microactuator according to the present invention. FIG. 3b is an exploded view of the head gimbal assembly of FIG. 3a. FIG. 4 is an exploded view of a second embodiment of a head gimbal assembly having a microactuator according to the present invention. FIG. 3b is an enlarged three-dimensional view of a portion of the head gimbal assembly of FIG. 3a. 4b is a side view of a local portion of the head gimbal assembly of FIG. 4a. FIG. It is a three-dimensional view of the PZT element of the head gimbal assembly of the present invention. It is the three-dimensional view which expanded the external trigger of the head gimbal assembly of this invention. It is a partial overhead view of the head gimbal assembly tongue area of the present invention. FIG. 5 is a partial overhead view of a head gimbal assembly tongue section of the present invention, showing an operation method when a voltage is applied to a PZT microactuator. The microactuator of the present invention shows impact sensitivity test data. The resonance gain test data of the microphone actuator of the present invention is shown. It is a partial side view of the 3rd Example of the head gimbal assembly which has a microactuator in this invention. FIG. 6 is a partial side view of a fourth embodiment of a head gimbal assembly having a microactuator according to the present invention. FIG. 9 is a partial side view of a fifth embodiment of a head gimbal assembly having a microactuator according to the present invention. It is process drawing of one Example of the manufacturing method of the head gimbal assembly of this invention. It is process drawing of another Example of the manufacturing method of the head gimbal assembly of this invention. It is a three-dimensional view of the magnetic disk drive unit of the present invention.

Claims (27)

A suspension of a head gimbal assembly including a suspension flexure and an external trigger,
The suspension flexure has one tongue area, and the tongue area has a first flexure portion used for mounting a rear portion provided with an electric connection pad of a magnetic head and a piezoelectric element used for mounting a piezoelectric element. An area, and
The first flexure portion is located at a tip of the tongue section;
One end of the external trigger is continuously connected with the suspension flexure, the other end of the external trigger has one trigger support portion, the trigger support portion extends to a position spaced above the said tongue area Mounting a front portion opposite to the rear portion of the magnetic head at a spaced position above the tongue area ;
The suspension of the head gimbal assembly characterized by that. The external trigger and the suspension flexure have an integral structure.
The suspension according to claim 1. The tongue section further includes a neck portion connecting the first flexure section and the piezoelectric element mounting section, and the first flexure section rotates around the neck section;
The suspension according to claim 1. There is one second protrusion between the neck and the trigger support part, and the second protrusion supports the trigger support part so that the trigger support part rotates around the second protrusion.
The suspension according to claim 3. The second protrusion is formed on the trigger support part, the suspension further includes a load beam, the load beam is provided with a first protrusion, and the first protrusion and the second protrusion in the middle of the neck part. Sandwiched between
The suspension according to claim 4. The suspension further includes one load beam, the load beam is provided with a first protrusion, and the second protrusion is formed on the neck and overlaps the first protrusion.
The suspension according to claim 4. The suspension further includes one load beam, and the load beam is provided with a first protrusion, and each of the neck portion and the trigger support portion forms a protrusion that overlaps the first protrusion. Each of the flexure portion and the trigger support portion rotate around the protrusion,
The suspension according to claim 3. The first flexure portion forms a staircase, and the staircase maintains a certain height difference between the first flexure portion and the trigger support portion.
The suspension according to claim 1. The trigger support portion includes a first support portion of one corresponding to the center of the magnetic head, and a second support portion of the one corresponding to the front portion of the magnetic head, wherein the second support portion and the first support portion And a weak beam connecting the
The suspension according to claim 1. The first support part includes a left arm and a right arm, and the external trigger further includes a left beam and a right beam, and the left beam extends from the left arm to extend the suspension flex. The right beam extends from the right arm and is connected to the suspension flexure.
The suspension according to claim 9. The external trigger is made of a metal material,
The suspension according to claim 1. A head gimbal assembly including a rear portion provided with an electrical connection pad, a magnetic head having a front portion opposite to the rear portion, a microactuator having a piezoelectric element, and a suspension including a suspension flexure and an external trigger. And
The suspension flexure has one tongue area, and the tongue area includes a first flexure portion used for mounting the rear portion of the magnetic head , and a piezoelectric element mounting area used for mounting the piezoelectric element, The first flexure portion is located at a tip of the tongue section;
One end of the external trigger is continuously connected with the suspension flexure, the other end of the external trigger has one trigger support portion, the trigger support portion extends to a position spaced above the said tongue area Mounting the front portion of the magnetic head at spaced locations above the tongue area ;
A head gimbal assembly characterized by that. The tongue section further includes a neck portion connecting the first flexure section and the piezoelectric element mounting section, and the first flexure section rotates around the neck section;
13. The head gimbal assembly according to claim 12, wherein the head gimbal assembly is a head gimbal assembly. There is one second protrusion between the neck and the trigger support part, and the second protrusion supports the trigger support part so that the trigger support part rotates around the second protrusion.
The head gimbal assembly according to claim 13. The second protrusion is formed on the trigger support part, the suspension further includes a load beam, the load beam is provided with a first protrusion, and the first protrusion and the second protrusion in the middle of the neck part. Sandwiched between
The head gimbal assembly according to claim 14. The second protrusion is formed on the trigger support portion, the suspension further includes one load beam, the load beam is provided with a first protrusion, and the second protrusion overlaps the first protrusion. Yes,
The head gimbal assembly according to claim 14. The suspension further includes one load beam, and the load beam is provided with a first protrusion, and each of the neck portion and the trigger support portion forms a protrusion overlapping the first protrusion, thereby Each of the first flexure part and the trigger support part rotates around the protrusion,
The head gimbal assembly according to claim 13. The first flexure portion forms a staircase, and the staircase maintains a certain height difference between the first flexure portion and the trigger support portion.
13. The head gimbal assembly according to claim 12, wherein the head gimbal assembly is a head gimbal assembly. The trigger support portion, said a first support portion of one corresponding to the center of the magnetic head, the a second support portion of the one corresponding to the front of the magnetic head, wherein the second support portion and the first support portion And a weak beam connecting the
13. The head gimbal assembly according to claim 12, wherein the head gimbal assembly is a head gimbal assembly. The first support part includes a left arm and a right arm, and the external trigger further includes a left beam and a right beam, and the left beam extends from the left arm to extend the suspension flex. The right beam extends from the right arm and is connected to the suspension flexure.
13. The head gimbal assembly according to claim 12, wherein the head gimbal assembly is a head gimbal assembly. The external trigger and the suspension flexure integrated structure,
13. The head gimbal assembly according to claim 12, wherein the head gimbal assembly is a head gimbal assembly. The external trigger is made of a metal material,
13. The head gimbal assembly according to claim 12, wherein the head gimbal assembly is a head gimbal assembly. A method for manufacturing a head gimbal assembly comprising:
Providing a suspension having a tongue area, the tongue area having a first flexure part and a piezoelectric element mounting area, the first flexure part being located at a tip of the tongue area;
Mounting a piezoelectric element on the piezoelectric element mounting area of the suspension flexure;
A step of providing a single external trigger, further one end of the external trigger is connected with the suspension flexure, stretching the other end of the external trigger and spaced position above the tongue area,
Providing one magnetic head, the magnetic head includes a rear portion electrically connecting pads are provided, has a front portion of said rear and opposite side, further first flexure of the rear portion of the magnetic head and the suspension flexure attached to the part, the production method front portion of the magnetic head including the steps to be mounted by the external trigger. A method for manufacturing a head gimbal assembly comprising:
One suspension flexure and one external trigger are integrally formed, and the suspension flexure has one tongue area, and the tongue area is used for mounting the rear part of the magnetic head provided with the electric connection pad. A first flexure portion and a piezoelectric element mounting area used for mounting a piezoelectric element, wherein the first flexure section is located at a tip of the tongue area, and one end of the external trigger is located above the tongue area. A step extending to a separated position ;
A step of mounting a piezoelectric element in a piezoelectric element mounting area of the suspension flexure and a magnetic head are provided, the magnetic head having the rear portion and a front portion opposite to the rear portion , and further, the magnetic head the rear is attached to first flexure portion of the suspension flexure method front portion of the magnetic head including the steps to be mounted by the external trigger. A disk drive unit including a head gimbal assembly, a drive arm connected to the head gimbal assembly, a magnetic disk, and a spindle motor used to rotate the magnetic disk;
The head gimbal assembly is
Including a rear portion provided with an electrical connection pad , a magnetic head having a front portion opposite to the rear portion , a microactuator having a piezoelectric element, and a suspension;
The suspension includes a suspension flexure and an external trigger,
The suspension flexure has one tongue area, and the tongue area includes a first flexure portion used for mounting a rear portion of the magnetic head and a piezoelectric element mounting area used for mounting a piezoelectric element, The first flexure part is located at the tip of the tongue area,
One end of the external trigger is continuously connected with the suspension flexure, the other end of the external trigger has one trigger support portion, the trigger support portion extends to a position spaced above the said tongue area Mounting the front portion of the magnetic head at spaced locations above the tongue area ;
A disk drive unit characterized by that. The trigger support portion includes one first support portion corresponding to the center of the magnetic head , one second support portion corresponding to the front portion of the magnetic head, the first support portion, and the second support portion. Having one weak beam connected to each other,
26. The disk drive unit according to claim 25. The first support part includes a left arm and a right arm, and the external trigger further includes a left beam and a right beam, and the left beam extends from the left arm to extend the suspension flex. The right beam extends from the right arm and is connected to the suspension flexure.
27. The disk drive unit according to claim 26.

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